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CN115373010A - Intelligent X-ray optical system based on magnetic deformation material - Google Patents

Intelligent X-ray optical system based on magnetic deformation material Download PDF

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CN115373010A
CN115373010A CN202211057282.XA CN202211057282A CN115373010A CN 115373010 A CN115373010 A CN 115373010A CN 202211057282 A CN202211057282 A CN 202211057282A CN 115373010 A CN115373010 A CN 115373010A
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deformation
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王文丛
刘金胜
李璟璟
宋娟
王博
徐延庭
孙书坤
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Shandong Institute of Space Electronic Technology
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Abstract

本发明属于X射线光学分析、光学设计和光学仿真等技术领域,提供一种基于磁致变形材料的智能X射线光学系统,其包括X射线聚焦系统、X射线探测器、X射线图像分析系统、磁场产生及控制装置。本发明的基于磁致变形材料的自校正X射线光学系统可以对光学系统的加工误差、装调误差和热变形误差进行实时的校正,可以很好的提高光学系统的分辨率和环境适应能力。本系统可以产生快速变化的X射线聚焦路径,从而可以减少光学系统轴向尺寸,同时与传统的自适应光学相比系统不含有波前传感器及波前校正器,也不含有参与光学系统面型调节的传感器,省去了复杂的面型变化的驱动装置,可以使X射线光学系统更加小型化与集成化。

Figure 202211057282

The invention belongs to the technical fields of X-ray optical analysis, optical design and optical simulation, and provides an intelligent X-ray optical system based on magneto-deformable materials, which includes an X-ray focusing system, an X-ray detector, an X-ray image analysis system, Magnetic field generation and control device. The self-correcting X-ray optical system based on the magneto-deformable material of the present invention can correct the processing error, assembly error and thermal deformation error of the optical system in real time, and can well improve the resolution and environmental adaptability of the optical system. This system can generate a rapidly changing X-ray focusing path, which can reduce the axial size of the optical system. At the same time, compared with the traditional adaptive optics, the system does not contain wavefront sensors and wavefront correctors, nor does it contain the surface shape of the participating optical system. The adjusted sensor saves the complicated driving device for changing the surface shape, and can make the X-ray optical system more miniaturized and integrated.

Figure 202211057282

Description

一种基于磁致变形材料的智能X射线光学系统An intelligent X-ray optical system based on magneto-deformable materials

技术领域technical field

本发明属于X射线光学分析、光学设计和光学仿真等技术领域,具体涉及一种基于磁致变形材料的智能X射线光学系统。The invention belongs to the technical fields of X-ray optical analysis, optical design, optical simulation and the like, and in particular relates to an intelligent X-ray optical system based on magneto-deformable materials.

背景技术Background technique

X射线光学系统在空间X射线探测、空间X射线成像探测、空间X射线通信等领域,起到重要的作用,其可以将空间中微弱的X射线光子进行聚焦成像,然后利用处理电路对其进行分析,以达到对X射线进行探测的目的。X-ray optical system plays an important role in space X-ray detection, space X-ray imaging detection, space X-ray communication and other fields. It can focus and image the weak X-ray photons in space, and then use the processing circuit to process them. Analysis, in order to achieve the purpose of X-ray detection.

在X射线波段,介质在X射线波长区的折射率存在着吸收,其折射率为1-δ+iβ。与可见光波段的光学常数相比,δ占据了更为重要的位置,其中δ和β都是波长的函数。δ比较小,通常在10-5-10-7之间,所以1-δ非常接近1,致使其位相变化及其缓慢,往往需要较长的路径或者快速变化的路径才能使X射线产生位相延迟,从而使其聚焦成像。目前常用的软X射线聚焦的方法主要是通过较长的路径使其聚焦,掠入射型(Wolter,KB)都属于这一种方法。In the X-ray band, there is absorption in the refractive index of the medium in the X-ray wavelength region, and its refractive index is 1-δ+iβ. Compared with the optical constants in the visible light band, δ occupies a more important position, where both δ and β are functions of wavelength. δ is relatively small, usually between 10 -5 -10 -7 , so 1-δ is very close to 1, causing its phase change to be extremely slow, often requiring a long path or a rapidly changing path to cause phase delay of X-rays , so that it is focused on the image. At present, the commonly used soft X-ray focusing method is mainly to focus it through a long path, and the grazing incidence type (Wolter, KB) belongs to this method.

但是利用该方法对X射线进行聚焦时,由于光学系统的加工误差,装调误差和热变形误差等因素的存在,出现较大探测误差,往往需配置波前传感器、波前校正器、光学系统面型调节的传感器,以及复杂的面型变化的驱动装置,致使整个系统体积和重量都很大,不能满足未来轻量化X射线的探测的需求。However, when using this method to focus X-rays, due to the existence of factors such as optical system processing errors, assembly errors, and thermal deformation errors, large detection errors occur, and it is often necessary to configure wavefront sensors, wavefront correctors, and optical systems. The sensor for adjusting the surface shape and the complex driving device for changing the surface shape make the whole system large in size and weight, which cannot meet the needs of future lightweight X-ray detection.

发明内容Contents of the invention

为解决背景技术中存在的问题,本发明提供一种基于磁致变形材料的智能X射线光学系统,通过相应的波前校正技术和镜面面型快变化,使X射线获得快速变化的路径,从而可以减少相应的光学系统的体积和重量。并且可以通过光学系统自校正技术,使系统可以适应在轨复杂的应用环境变化,满足未来自校正高分辨率X射线成像系统的应用需求。其具体技术方案如下:In order to solve the problems existing in the background technology, the present invention provides an intelligent X-ray optical system based on magneto-deformable materials. Through the corresponding wavefront correction technology and the rapid change of the mirror surface shape, the X-ray can obtain a rapidly changing path, thereby The volume and weight of the corresponding optical system can be reduced. And through the self-calibration technology of the optical system, the system can adapt to the complex application environment changes on the orbit and meet the application requirements of the future self-correction high-resolution X-ray imaging system. Its specific technical scheme is as follows:

一种基于磁致变形材料的智能X射线光学系统,其包括X射线聚焦系统、X射线探测器、X射线图像分析系统、磁场产生及控制装置,其中:An intelligent X-ray optical system based on magneto-deformable materials, which includes an X-ray focusing system, an X-ray detector, an X-ray image analysis system, and a magnetic field generation and control device, wherein:

所述X射线聚焦系统设置有磁致变形材料,在对空间中X射线光子进行聚焦成像的过程中,可通过磁致变形材料的面型变化对聚焦参数进行校正;The X-ray focusing system is provided with a magneto-deformable material, and during the process of focusing and imaging the X-ray photons in space, the focusing parameters can be corrected through the change of the surface shape of the magneto-deformable material;

所述X射线探测器用于接收经过X射线聚焦系统聚焦之后的X射线信号,并将其转为电信号;The X-ray detector is used to receive the X-ray signal focused by the X-ray focusing system and convert it into an electrical signal;

所述X射线图像分析系统用于对X射线探测器采集的X射线图像进行分析生成形变参数并反馈至磁场产生及控制装置;The X-ray image analysis system is used to analyze the X-ray images collected by the X-ray detector to generate deformation parameters and feed them back to the magnetic field generation and control device;

磁场产生及控制装置用于根据接收的X射线图像分析系统的形变参数,产生特定的磁场,对X射线聚焦系统的面型变化进行校正。The magnetic field generation and control device is used to generate a specific magnetic field according to the received deformation parameters of the X-ray image analysis system to correct the surface shape change of the X-ray focusing system.

进一步,所述X射线聚焦系统包括聚焦系统基底、沉积层、磁致变形材料、X射线高反膜四个部分,其中所述聚焦系统基底是X射线聚焦系统的主支撑结构;沉积层将聚焦系统基底和磁致变形材料结合在一起;磁致变形材料,为可以产生相应面型变化的变形材料;X射线高反膜镀制在磁致变形材料表面,用于提高X射线光子的反射率。Further, the X-ray focusing system includes four parts: a focusing system substrate, a deposition layer, a magneto-deformable material, and an X-ray high-reflection film, wherein the focusing system substrate is the main support structure of the X-ray focusing system; the deposition layer will focus The system substrate and the magneto-deformable material are combined; the magneto-deformable material is a deformable material that can produce corresponding surface changes; the X-ray high-reflection film is coated on the surface of the magneto-deformable material to improve the reflectivity of X-ray photons .

优选的方案中,所述聚焦系统基底为金属材料或者玻璃材料。In a preferred solution, the focusing system substrate is made of metal material or glass material.

进一步,X射线图像分析系统对X射线探测器采集的X射线图像进行分析,确定系统波前面型变化,并对波前变形进行拟合,并产生相应的变形参数,并反馈给磁场产生与控制装置。Further, the X-ray image analysis system analyzes the X-ray images collected by the X-ray detector, determines the change of the wavefront shape of the system, and fits the wavefront deformation, generates corresponding deformation parameters, and feeds back to the magnetic field generation and control device.

进一步,磁场产生及控制装置根据X射线图像分析系统反馈的面型变化信息,对电磁场设置不同的偏置电压,使电磁场产生相应的磁场变化,通过该磁场变化控制磁致变形材料产生相应的变形。Further, the magnetic field generation and control device sets different bias voltages for the electromagnetic field according to the surface shape change information fed back by the X-ray image analysis system, so that the electromagnetic field produces a corresponding magnetic field change, and controls the magnetostrictive material to produce corresponding deformation through the magnetic field change .

进一步,所述磁致变形材料的形变量由以下公式计算:Further, the deformation amount of the magnetostrictive material is calculated by the following formula:

Figure BDA0003825328380000031
Figure BDA0003825328380000031

其中hf和hs分别为基底和磁致变形材料的厚度,Es和Vs分别为磁致变形材料的杨式模量和泊松比,b为外加磁场强度,通过对磁致变形材料施加不同的磁场,使其产生相应的形变。where h f and h s are the thicknesses of the substrate and the magnetostrictive material, E s and V s are the Young's modulus and Poisson's ratio of the magnetostrictive material, respectively, and b is the strength of the applied magnetic field. By applying different Magnetic field causes it to deform accordingly.

本发明所达到的有益效果为:The beneficial effects achieved by the present invention are:

第一、本发明的基于磁致变形材料的自校正X射线光学系统可以对光学系统的加工误差、装调误差和热变形误差进行实时的校正,可以很好的提高光学系统的分辨率和环境适应能力。First, the self-correcting X-ray optical system based on magneto-deformable materials of the present invention can correct the processing error, assembly error and thermal deformation error of the optical system in real time, and can improve the resolution and environment of the optical system very well. adaptability.

第二、本发明可以产生快速变化的X射线聚焦路径,从而可以减少光学系统轴向尺寸,同时与传统的自适应光学相比系统不含有波前传感器及波前校正器,也不含有参与光学系统面型调节的传感器,省去了复杂的面型变化的驱动装置,可以使X射线光学系统更加小型化与集成化。Second, the present invention can produce a rapidly changing X-ray focusing path, thereby reducing the axial size of the optical system. At the same time, compared with traditional adaptive optics, the system does not contain wavefront sensors and wavefront correctors, nor does it contain participating optics The sensor for adjusting the surface shape of the system eliminates the need for a complex driving device for changing the surface shape, which can make the X-ray optical system more miniaturized and integrated.

第三、在大面阵X射线探测领域,本系统可以有效的提高质量/有效面积的比例,可以有效的提高X射线探测面积。将本系统应用于轻小型化脉冲星X射线探测、天基高分辨率X射线探测领域,将具有重要的科学和工程应用价值。Third, in the field of large area array X-ray detection, this system can effectively improve the ratio of mass/effective area, and can effectively increase the X-ray detection area. Applying this system to light and miniaturized pulsar X-ray detection and space-based high-resolution X-ray detection will have important scientific and engineering application value.

附图说明Description of drawings

图1是一种基于磁致变形材料的智能X射线光学系统的系统原理图;Figure 1 is a system schematic diagram of an intelligent X-ray optical system based on magneto-deformable materials;

图2是X射线聚焦系统的结构示意图。Fig. 2 is a schematic structural diagram of an X-ray focusing system.

图中标号:Labels in the figure:

1、X射线聚焦系统;1-1、聚焦系统基底;1-2、沉积层;1-3、磁致变形材料;1-4、X射线高反膜;2、X射线探测器;3、X射线图像分析系统;4、磁场产生及控制装置。1. X-ray focusing system; 1-1. Focusing system substrate; 1-2. Deposition layer; 1-3. Magneto-deformable material; 1-4. X-ray high reflection film; 2. X-ray detector; 3. X-ray image analysis system; 4. Magnetic field generation and control device.

具体实施方式Detailed ways

为便于本领域的技术人员理解本发明,下面结合附图说明本发明的具体实施方式。In order to make it easier for those skilled in the art to understand the present invention, the specific implementation manners of the present invention will be described below with reference to the accompanying drawings.

参照图1-2,一种基于磁致变形材料的智能X射线光学系统,其包括X射线聚焦系统、X射线探测器、X射线图像分析系统、磁场产生及控制装置,其中所述X射线聚焦系统设置有磁致变形材料,在对空间中X射线光子进行聚焦成像的过程中,可通过磁致变形材料的面型变化对聚焦参数进行校正。X射线聚焦系统优选包括聚焦系统基底、沉积层、磁致变形材料、X射线高反膜四个部分,其中所述聚焦系统基底是X射线聚焦系统的主支撑结构,聚焦系统基底为金属材料或者玻璃材料。沉积层将聚焦系统基底和磁致变形材料结合在一起;磁致变形材料,为可以产生相应面型变化的变形材料;X射线高反膜镀制在磁致变形材料表面,用于提高X射线光子的反射率。Referring to Figures 1-2, an intelligent X-ray optical system based on magneto-deformable materials includes an X-ray focusing system, an X-ray detector, an X-ray image analysis system, a magnetic field generation and control device, wherein the X-ray focusing The system is equipped with a magneto-deformable material, and during the process of focusing and imaging the X-ray photons in space, the focusing parameters can be corrected through the change of the surface shape of the magneto-deformable material. The X-ray focusing system preferably includes four parts: a focusing system substrate, a deposition layer, a magneto-deformable material, and an X-ray high-reflection film, wherein the focusing system substrate is the main support structure of the X-ray focusing system, and the focusing system substrate is a metal material or glass material. The deposition layer combines the focusing system substrate and the magneto-deformable material; the magneto-deformable material is a deformable material that can produce corresponding surface changes; the X-ray high-reflection film is coated on the surface of the magneto-deformable material to improve the X-ray Photon reflectivity.

X射线探测器用于接收经过X射线聚焦系统聚焦之后的X射线信号,并将其转为电信号;X射线图像分析系统用于对X射线探测器采集的X射线图像进行分析生成形变参数并反馈至磁场产生及控制装置;磁场产生及控制装置用于根据接收的X射线图像分析系统的形变参数,产生特定的磁场,对X射线聚焦系统的面型变化进行校正。The X-ray detector is used to receive the X-ray signal focused by the X-ray focusing system and convert it into an electrical signal; the X-ray image analysis system is used to analyze the X-ray image collected by the X-ray detector to generate deformation parameters and feed back To the magnetic field generation and control device; the magnetic field generation and control device is used to generate a specific magnetic field according to the received deformation parameters of the X-ray image analysis system, and correct the surface shape change of the X-ray focusing system.

X射线图像分析系统对X射线探测器采集的X射线图像进行分析,确定系统波前面型变化,并对波前变形进行拟合,并产生相应的变形参数,并反馈给磁场产生与控制装置。磁场产生及控制装置根据X射线图像分析系统反馈的面型变化信息,对电磁场设置不同的偏置电压,使电磁场产生相应的磁场变化,通过该磁场变化控制磁致变形材料产生相应的变形。The X-ray image analysis system analyzes the X-ray images collected by the X-ray detector, determines the change of the wavefront shape of the system, and fits the wavefront deformation, generates corresponding deformation parameters, and feeds back to the magnetic field generation and control device. The magnetic field generation and control device sets different bias voltages on the electromagnetic field according to the surface shape change information fed back by the X-ray image analysis system, so that the electromagnetic field produces a corresponding magnetic field change, and controls the magnetostrictive material to produce corresponding deformation through the magnetic field change.

磁致变形材料的形变量由以下公式计算:The deformation of the magnetostrictive material is calculated by the following formula:

Figure BDA0003825328380000041
Figure BDA0003825328380000041

其中hf和hs分别为基底和磁致变形材料的厚度,Es和Vs分别为磁致变形材料的杨式模量和泊松比,b为外加磁场强度,通过对磁致变形材料施加不同的磁场,使其产生相应的形变。where h f and h s are the thicknesses of the substrate and the magnetostrictive material, E s and V s are the Young's modulus and Poisson's ratio of the magnetostrictive material, respectively, and b is the strength of the applied magnetic field. By applying different Magnetic field causes it to deform accordingly.

整个系统的工作过程为:X射线聚焦系统对空间中的X射线信号进行聚焦采集,X射线探测器对聚焦后的X射线信号进行探测,转换为相应的图像信息;X射线图像分析系统对X射线探测器采集的X射线图像进行分析,确定系统波前面型变化,采用Zernike多项式法对波前变形进行拟合,Zernike多项式是在单位圆内部连续正交的无穷项的多项式完全集,其参数与光学像差具有对应性,由于光学波前是光学系统各种像差的作用产生的综合变化,因此采用Zernike多项式进行光学波前拟合。根据图像分析系统采集到的X射线图像信息,利用Zernike系数和像差的的对应关系,分析得到Zernike各项系数,然后将其转换为并产生相应的变形参数,反馈给磁场产生与控制装置;磁场产生与控制装置根据相应的变形参数,产生特定的磁场,使X射线光学系统产生需要的面型参数变化,从而可到达对X射线光学系统本身面型变化进行校正的目的。The working process of the whole system is as follows: the X-ray focusing system collects the X-ray signals in space, and the X-ray detector detects the focused X-ray signals and converts them into corresponding image information; the X-ray image analysis system analyzes the X-ray signals. The X-ray images collected by the ray detector are analyzed to determine the change of the wavefront shape of the system, and the Zernike polynomial method is used to fit the wavefront deformation. The Zernike polynomial is a polynomial complete set of infinite terms that are continuous and orthogonal inside the unit circle. Corresponding to optical aberration, since the optical wavefront is a comprehensive change produced by various aberrations of the optical system, Zernike polynomials are used for optical wavefront fitting. According to the X-ray image information collected by the image analysis system, using the corresponding relationship between Zernike coefficients and aberrations, the Zernike coefficients are analyzed and obtained, and then converted into and generated corresponding deformation parameters, which are fed back to the magnetic field generation and control device; The magnetic field generation and control device generates a specific magnetic field according to the corresponding deformation parameters, so that the X-ray optical system produces the required surface parameter changes, so as to achieve the purpose of correcting the surface change of the X-ray optical system itself.

以上的本发明实施方式,并不构成对本发明保护范围的限定。任何在本发明的精神和原则之内所作的修改、等同替换和改进等,均应包含在本发明的权利要求保护范围之内。The above embodiments of the present invention are not intended to limit the protection scope of the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims (6)

1. An intelligent X-ray optical system based on a magnetically deformable material, comprising: x ray focusing system, X ray detector, X ray image analysis system, magnetic field produce and controlling means, wherein:
the X-ray focusing system is provided with a magneto-deformation material, and can correct focusing parameters through the surface shape change of the magneto-deformation material in the process of focusing and imaging X-ray photons in a space;
the X-ray detector is used for receiving the X-ray signals focused by the X-ray focusing system and converting the X-ray signals into electric signals;
the X-ray image analysis system is used for analyzing the X-ray image collected by the X-ray detector to generate deformation parameters and feeding the deformation parameters back to the magnetic field generation and control device;
the magnetic field generating and controlling device is used for generating a specific magnetic field according to the deformation parameters of the received X-ray image analysis system and correcting the surface shape change of the X-ray focusing system.
2. The intelligent magnetically deformable material-based X-ray optical system of claim 1, wherein: the X-ray focusing system comprises a focusing system substrate, a deposition layer, a magnetic deformation material and an X-ray high-reflection film, wherein:
the focusing system base is a main support structure of an X-ray focusing system;
the deposition layer combines the focusing system substrate and the magnetically deformable material together;
the magnetic deformation material is a deformation material which can generate corresponding surface type change;
the high-reflectivity X-ray film is plated on the surface of the magnetic deformation material and used for improving the reflectivity of X-ray photons.
3. An intelligent X-ray optical system based on a magnetically deformable material, as claimed in claim 2, wherein: the focusing system substrate is made of metal materials or glass materials.
4. An intelligent X-ray optical system based on a magnetically deformable material, as claimed in claim 1, wherein: the X-ray image analysis system analyzes the X-ray image collected by the X-ray detector, determines the change of the wavefront surface of the system, fits the wavefront deformation, generates corresponding deformation parameters and feeds back the deformation parameters to the magnetic field generation and control device.
5. An intelligent X-ray optical system based on a magnetically deformable material, as claimed in claim 1, wherein:
the magnetic field generating and controlling device sets different bias voltages for the electromagnetic field according to the surface type change information fed back by the X-ray image analysis system, so that the electromagnetic field generates corresponding magnetic field change, and the magnetic deformation material is controlled to generate corresponding deformation through the magnetic field change.
6. An intelligent X-ray optical system based on a magnetically deformable material, as claimed in claim 1, wherein: the deformation amount of the magnetically deformable material is calculated by the following formula:
Figure FDA0003825328370000021
wherein h is f And h s Thickness of the substrate and of the magnetically deformable material, respectively, E s And V s Respectively the Young modulus and Poisson ratio of the magneto-deformation material, and b is the external magnetic field intensity, and the magneto-deformation material is correspondingly deformed by applying different magnetic fields.
CN202211057282.XA 2022-08-31 2022-08-31 Intelligent X-ray optical system based on magnetic deformation material Pending CN115373010A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070030573A1 (en) * 2005-05-14 2007-02-08 Holochip Corporation Fluidic optical devices
CN102063913A (en) * 2009-11-12 2011-05-18 日立民用电子株式会社 Variable mirror actuator and optical disc drive
CN104335122A (en) * 2012-04-27 2015-02-04 卡尔蔡司Smt有限责任公司 Optical elements including magnetostrictive materials
CN108140439A (en) * 2015-09-30 2018-06-08 皇家飞利浦有限公司 The focusing for the grating being imaged by means of electro-mechanical transduction device foil to being used for differential phase contrast

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070030573A1 (en) * 2005-05-14 2007-02-08 Holochip Corporation Fluidic optical devices
CN102063913A (en) * 2009-11-12 2011-05-18 日立民用电子株式会社 Variable mirror actuator and optical disc drive
CN104335122A (en) * 2012-04-27 2015-02-04 卡尔蔡司Smt有限责任公司 Optical elements including magnetostrictive materials
CN108140439A (en) * 2015-09-30 2018-06-08 皇家飞利浦有限公司 The focusing for the grating being imaged by means of electro-mechanical transduction device foil to being used for differential phase contrast

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
张晓芳 等: "《自适应光学理论及应用》", 31 December 2020, 北京理工大学出版社, pages: 161 - 163 *

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