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CN115413106B - Design method of spiral deflection plate for inclined cross-section accelerator with lateral focusing force - Google Patents

Design method of spiral deflection plate for inclined cross-section accelerator with lateral focusing force Download PDF

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Publication number
CN115413106B
CN115413106B CN202210821040.7A CN202210821040A CN115413106B CN 115413106 B CN115413106 B CN 115413106B CN 202210821040 A CN202210821040 A CN 202210821040A CN 115413106 B CN115413106 B CN 115413106B
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plate
spiral
deflection plate
electric field
spiral deflection
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CN115413106A (en
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冀鲁豫
边天剑
郑侠
管锋平
安世忠
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China Institute of Atomic of Energy
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China Institute of Atomic of Energy
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H13/00Magnetic resonance accelerators; Cyclotrons
    • H05H13/005Cyclotrons
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/001Arrangements for beam delivery or irradiation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/001Arrangements for beam delivery or irradiation
    • H05H2007/002Arrangements for beam delivery or irradiation for modifying beam trajectory, e.g. gantries
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/10Nuclear fusion reactors

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Accelerators (AREA)

Abstract

The invention discloses a design method of a spiral deflection plate of an inclined section accelerator with transverse focusing force, which comprises the steps of keeping the height of a central line between an upper layer of spiral deflection plate and a lower layer of spiral deflection plate unchanged, keeping the positions of central points on the end faces of an inlet and an outlet of the upper layer of spiral deflection plate and the lower layer of spiral deflection plate unchanged, changing the shapes of the front side and the rear side of the central points on the inlet and the outlet of the spiral deflection plate while changing the section shapes of the upper layer of spiral deflection plate and the lower layer of spiral deflection plate into inclined sections, so that the inlet end face, the outlet end face and the beam direction form an included angle beta, the included angles of the inlet and the outlet are equal in size and opposite in direction. The invention adopts the spiral deflection plate with an inclined section, improves the transverse focusing force of the spiral deflection plate except the deflection force, and adopts the combination to change the spiral deflection plate, thereby providing the transverse focusing force and the fringe field focusing force of the spiral deflection plate except the deflection force.

Description

Design method of spiral deflection plate of inclined section accelerator with transverse focusing force
Technical Field
The invention belongs to the technical field of cyclotrons, and particularly relates to a design method of a spiral deflection plate of an inclined section accelerator with transverse focusing force.
Background
The strong current proton beam plays an important role in basic scientific research, national defense construction, nuclear energy development, cancer treatment and other aspects. One of the important limiting factors for the beam current intensity of a cyclotron is the magnitude of the central zone transverse focusing force.
The central region comprises a spiral deflection plate for receiving the beam injected by the ion source and deflecting the beam from the vertical direction to the horizontal direction, an electrode structure which is arranged in the tiny region of the head of the high-frequency cavity of the central region and used for accelerating and improving the energy of the beam, and a magnet structure which is arranged in the tiny region of the head of the magnet structure of the central region and used for deflecting the beam to provide the particle running track.
The method adopted by the prior art for improving the transverse focusing force of the central area is only to stop at the electrode structure of the modified central area and the magnetic pole structure of the modified central area, but the spiral deflection plate structure of the modified central area is ignored. The spiral deflection plate is the most critical component of the central area affecting the beam intensity. The spiral deflector plate is the source of particles entering the accelerator from which they are injected into the accelerator. If the focusing capability of the spiral deflection plate is weak, part of the beam current led out from the source is lost due to the weak focusing capability, and even if the electrode structure and the magnetic pole structure of the central region are modified to enhance the focusing capability, the beam current loss is less, but the total effect of enhancing the beam current intensity of the central region is not obvious because part of the beam current led out from the source is lost in the transmission process.
Conventional cyclotron helical deflector plates have poor lateral focusing capability. The structure of the conventional spiral deflection plate is shown in figures 1-1 and 1-2, and is a spiral track consisting of an upper layer of spiral deflection plate and a lower layer of spiral deflection plate. In the transmission process of the spiral track beam, because the acting force of an electric field is always perpendicular to the movement track of the center ions in the spiral channel, the transverse focusing capability of the spiral deflection plate is weak, the beam is dispersed in the transmission process, and the transmission efficiency is low.
Disclosure of Invention
The invention provides a design method of a spiral deflection plate of an inclined section accelerator with transverse focusing force, which aims to solve the problems that the traditional spiral deflection plate of a cyclotron is weak in transverse focusing capability and the beam current in a central area cannot be obviously improved.
The invention adopts the following technical scheme for solving the technical problems:
A method of designing a helical deflector plate for a cyclotron with a transverse focusing force of an inclined cross section, comprising the steps of:
step one, adopting the existing spiral deflection plate design method to finish the traditional spiral deflection plate design;
and secondly, keeping the height of the central line of the beam track between the upper layer spiral deflection plate and the lower layer spiral deflection plate unchanged, and changing the shapes of the cross sections of the spiral deflection plates in the upper, lower, left and right directions of the central line of the beam track to be inclined cross sections, or changing the spiral deflection plates in a combined way, namely keeping the height of the central line between the upper layer spiral deflection plate and the lower layer spiral deflection plate unchanged, keeping the positions of the central points on the inlet end face and the outlet end face of the upper layer spiral deflection plate and the lower layer spiral deflection plate unchanged, changing the shapes of the cross sections of the upper layer spiral deflection plate and the lower layer spiral deflection plate to be inclined cross sections, and changing the shapes of the front side and the rear side of the central points on the inlet end face and the outlet end face of the spiral deflection plate, so that the inlet end face and the outlet end face form an included angle beta, and the included angles of the inlet and the outlet are equal and opposite in direction.
The combination alters the helical deflector plate for providing a lateral focusing force of the helical deflector plate in addition to the deflection force and a fringe field focusing force;
step three, adopting a multi-particle tracking method to simulate particle distribution at the outlet of the spiral deflection plate;
And step four, repeating the step two and the step three until the particle distribution has a smaller envelope.
In the spiral deflection plate with the inclined section, the plate pitch at one end is reduced, the plate pitch at the other end is increased, the pitches at both ends of the upper and lower plates are opposite in the front half and the rear half of the spiral channel, the pitches at both ends of the upper and lower plates are increased in the rear half if the pitches at both ends of the upper and lower plates are reduced in the front half of the spiral channel, and the pitches at both ends of the upper and lower plates are reduced in the rear half if the pitches at both ends of the upper and lower plates are increased in the front half of the spiral channel.
The spiral deflection plate with the inclined section comprises a spiral deflection plate with an inclined section and a trapezoid section, the spiral deflection plate with the trapezoid section keeps the middle position unchanged, the width of an upper plate is reduced, the width of a lower plate is increased, the section is trapezoid, the distances between the two ends of the upper plate and the lower plate in the front half part and the rear half part of a spiral channel are opposite, the distance between the two ends of the upper plate and the lower plate in the rear half part is increased if the distance between the two ends of the upper plate and the lower plate is reduced in the front half part of the spiral channel, and the distance between the two ends of the upper plate and the lower plate in the rear half part is reduced if the distance between the two ends of the upper plate and the lower plate in the front half part is increased in the spiral channel.
The spiral deflection plate with the inclined section comprises a spiral deflection plate with an inclined section and a V-shaped section, the pitch of the polar plates at the middle position is kept unchanged, the two ends of the spiral deflection plate are tilted upwards, the whole section is of a V-shaped structure, the pitch of the polar plates at one end is reduced, the pitch of the polar plates at the other end is increased, the pitches of the upper polar plates and the lower polar plates at the front half part and the rear half part of the spiral channel are opposite, the pitch of the upper polar plates and the lower polar plates at the rear half part of the spiral channel is increased if the pitches of the upper polar plates and the lower polar plates at the front half part are reduced, and the pitch of the upper polar plates and the lower polar plates at the rear half part of the spiral channel is reduced if the pitches of the upper polar plates and the lower polar plates at the front half part and the lower polar plates are increased.
The spiral deflection plate with the inclined section comprises spiral deflection plates with inclined, ladder-shaped and V-shaped combined sections, the distances between the two ends of the upper polar plate and the lower polar plate in the front half part and the rear half part of the spiral channel are opposite, the distance between the two ends of the upper polar plate and the lower polar plate in the rear half part is increased if the distance between the two ends of the upper polar plate and the lower polar plate in the front half part of the spiral channel is reduced, and the distance between the two ends of the upper polar plate and the lower polar plate in the rear half part of the spiral channel is increased if the distance between the two ends of the upper polar plate and the lower polar plate in the front half part of the spiral channel is increased.
Moreover, the combination of the modified spiral deflection plates comprises a combination of spiral deflection plates with inclined sections and spiral deflection plates with modified shapes of inlet and outlet end surfaces.
The electric field component of the fringe field is not due to the inclination of the upper and lower polar plates, although the upper and lower polar plates are folded at one end and spread at the other end, but the electric field component of the fringe field is still parallel up and down from the end face, the electric field component of the fringe field is generated in the electric field arc line of the fringe field, the fringe field generates arc line inward electric field force because the end face of the inlet or the outlet is cut off from one side edge to the other side edge, the opposite oblique lines of the upper and lower inclined planes from which the angle is cut off can be respectively imagined as an edge line consisting of countless steps, and the like, because the front and back positions of each pair of steps and the adjacent steps in the beam direction are different, and each pair of upper and lower steps generates arc line from the lower polar plate to the upper polar plate, and the arc line forms the electric field component of the fringe field.
The combination changes the spiral deflection plate, comprises a combination of the spiral deflection plate with inclined and ladder-shaped combined sections and the spiral deflection plate with changed shapes of the end faces of the inlet and the outlet, and the distances between the upper polar plate and the lower polar plate in the front half part and the rear half part of the spiral channel are opposite, the distance between the upper polar plate and the lower polar plate in the rear half part is increased if the distance between the upper polar plate and the lower polar plate is reduced in the front half part of the spiral channel, and the distance between the upper polar plate and the lower polar plate in the rear half part is reduced if the distance between the upper polar plate and the lower polar plate in the front half part is increased in the rear half part of the spiral channel.
The combination changes the spiral deflection plate, comprises a combination of the spiral deflection plate with inclined and V-shaped combined sections and the spiral deflection plate with changed shapes of the end faces of the inlet and the outlet, and the distances between the upper polar plate and the lower polar plate in the front half part and the rear half part of the spiral channel are opposite, the distance between the upper polar plate and the lower polar plate in the rear half part is increased if the distance between the upper polar plate and the lower polar plate is reduced in the front half part of the spiral channel, and the distance between the upper polar plate and the lower polar plate in the rear half part is reduced if the distance between the upper polar plate and the lower polar plate in the front half part is increased in the rear half part of the spiral channel.
The combination change spiral deflection plates comprise combination of spiral deflection plates with inclined, ladder-shaped and V-shaped combined sections and spiral deflection plates with changed shapes of end faces of an inlet and an outlet, the distances between the two ends of the upper polar plate and the lower polar plate in the front half part and the rear half part of the spiral channel are opposite, the distance between the two ends of the upper polar plate and the lower polar plate in the rear half part of the spiral channel is increased if the distance between the two ends of the upper polar plate and the lower polar plate in the front half part is reduced, and the distance between the two ends of the upper polar plate and the lower polar plate in the rear half part of the spiral channel is reduced if the distance between the two ends of the upper polar plate and the lower polar plate in the front half part of the spiral channel is increased.
Advantageous effects of the invention
1. The invention overcomes the traditional prejudice that the improvement of the focusing force of the accelerator central area only improves the electrode structure and the magnetic pole structure in the narrow space of the central area, but omits the prejudice of improving the structure of the spiral deflection plate of the central area, and solves the problems of beam loss and difficult great improvement of the beam intensity of the central area caused by weak focusing force from the source.
2. The invention combines the shape of the section of the spiral deflection plate and the shape of the end faces of the inlet and the outlet of the spiral deflection plate, and supports the spiral deflection plate and the inlet and the outlet, thereby obtaining new effects after combination. The focusing forces of the beam inflow opening, the transmission process and the beam outflow opening of the spiral deflection plate are overlapped while the focusing forces of the transverse focusing forces in the beam transmission process of the spiral channel are provided, so that all holes of lost particles in the beam transmission process are blocked, and the beam transmission quality is improved.
3. The invention adopts the shape of the cross section of the inclined spiral deflection plate with the reduced polar plate spacing at one end and the increased polar plate spacing at the other end, and adopts the method that the spacing at the upper polar plate and the lower polar plate of the front half part and the rear half part of the spiral channel are opposite, thereby providing the capability of transverse focusing on the whole spiral channel and improving the beam transmission efficiency.
4. The invention adopts the cross section shape of the spiral deflection plate with the V-shaped cross section, the middle position of the spiral deflection plate with the V-shaped cross section is kept unchanged, the two ends of the spiral deflection plate are upturned, the whole cross section is of a V-shaped structure, the middle position is taken as an original point, the electric field force has the component in the x direction for the position of x <0, and the electric field force has the component in the-x direction for the position of x >0, so that the focusing force in the x direction is provided for the spiral deflection plate, and the transmission efficiency is improved.
5. The invention adopts the sectional shape of the spiral deflection plate with the ladder-shaped section, keeps the middle position unchanged, reduces the width of the upper polar plate, increases the width of the lower polar plate, has the trapezoid section, and has the component of the electric field force directed to the inside of the deflection plate in the edge area of the deflection plate, thereby providing the focusing force in the x direction for the edge area of the spiral deflection plate and improving the transmission efficiency.
6. The invention adopts a ladder-shaped and inclined combined structure, so that ladder-shaped and inclined focusing forces are superposed, namely, for the ladder-shaped, electric field force has components pointing to the interior of the deflection plate in the edge area of the deflection plate, and for the inclined type, lower left-upper right focusing, upper left-lower right defocusing or lower left-upper right defocusing and upper left-lower right focusing are carried out. After the two focusing forces are overlapped, the transverse focusing force of the spiral deflection plate is further enhanced, and the transmission efficiency is improved.
7. The invention adopts a ladder-type and V-type combined structure, and the focusing force is the superposition of V-type and trapezoidal focusing force. For the V-shape, with the intermediate position as the origin, there is a component of the electric field force in the x-direction for the x <0 position, a component of the electric field force in the-x direction for the x >0 position, and a component of the electric field force directed into the deflection plate in the region of the deflection plate edge for the trapezoid. After the two focusing forces are overlapped, the transverse focusing force of the spiral deflection plate is further enhanced, and the transmission efficiency is improved.
8. The invention adopts a V-shaped and inclined combined section structure, takes the middle position as the original point for the V-shaped, has the component in the x direction for the position of x <0, has the component in the-x direction for the position of x >0, and has the functions of lower left-upper right focusing, upper left-upper right defocusing or lower left-upper right defocusing and upper left-lower right focusing for the inclined type. After the two focusing forces are overlapped, the transverse focusing force of the spiral deflection plate is further enhanced, and the transmission efficiency is improved.
9. The invention adopts a combined section structure of inclined type, ladder type and V type, the focusing force is superposition of V type + ladder type + inclined type, for the V type, the middle position is taken as an original point, for the position of x <0, the electric field force has a component in the x direction, for the position of x >0, the electric field force has a component in the-x direction, for the trapezium, in the edge area of the deflection plate, the electric field force has a component pointing to the interior of the deflection plate, for the inclined type, the left lower-right upper focusing, the left upper-right lower defocusing, or the left lower-right upper defocusing, the left upper-right lower focusing. After the three focusing forces are overlapped, the transverse focusing force of the spiral deflection plate is further enhanced, and the transmission efficiency is improved.
Drawings
FIG. 1-1 is a schematic view of a conventional helical deflector plate at a first viewing angle;
FIGS. 1-2 are schematic views of a second view of a conventional helical deflector plate;
FIG. 2 is a schematic cross-sectional view of a conventional helical deflector plate;
FIG. 3a is a schematic view of a helical deflector plate according to the present invention in inclined cross-section;
FIG. 3b is a graph showing the difference in electric field force (y-direction) across the inclined section of the helical deflector plate of the present invention;
FIG. 3c is a schematic view of the electric field force (x-direction) of the inclined section of the helical deflector plate of the present invention;
FIG. 3d is a schematic diagram of a four-pole electric field with an inclined cross section and resultant force in two directions for a helical deflection plate according to the present invention;
FIG. 4 shows a screw according to the invention a schematic V-shaped section of the deflector plate;
FIG. 5-1 is a schematic cross-sectional view of a spiral deflector plate of the present invention;
FIG. 5-2 is a trapezoid and sloped combined cross-section of a helical deflector plate of the present invention;
FIG. 6 is a schematic view of a V-shaped, trapezoidal, sloped combination cross section of a helical deflector plate of the present invention;
FIG. 7-1 is a schematic perspective view of the exit and entrance of a helical deflector plate with fringe field focusing forces of the present invention;
FIG. 7-2 is a top view of a helical deflector plate exit and entrance with fringe field focusing forces in accordance with the present invention;
FIG. 7-3 is a schematic diagram of bottom-left-top-right direction focusing and top-left-bottom-right direction defocusing of a quadrupole electric field with fringe field focusing forces in accordance with the present invention;
FIG. 7-4 is a schematic diagram of top-left-bottom-right direction focusing and bottom-left-top-right direction defocusing of a quadrupole electric field with fringe field focusing forces in accordance with the present invention;
FIG. 8 is a flow chart of a method of designing a helical deflector plate for an inclined section accelerator with transverse focusing forces.
Detailed Description
Principle of design of the invention
1. Principle of the lateral focusing force of the deflection plate. When the cross-sectional shape of the upper and lower spiral deflection plates is deformed, a transverse focusing force is generated. The principle is described below with reference to a structure of an inclined-section spiral deflector.
1) The focusing principle of the inclined section spiral deflection plate structure is that the plate spacing in the middle position is kept unchanged (d) and the plate spacing at one end is reduced and the plate spacing at the other end is increased. And establishing a coordinate system by taking the center track as an origin. Fig. 3a shows a structure in which the x direction increases (the change amount of the plate pitch is denoted as a) and the x direction decreases, wherein the plate pitch at the left end is denoted as d-a and the plate pitch at the right end is denoted as d+a. The structure can provide focusing force for beam current, and the principle is as follows:
for the y-direction, as shown in fig. 3a, the electric field force Fy is related to x, with x being larger and Fy being smaller. For intermediate position Fy (0), the electric field force just deflects the beam. Fy' =fy-Fy (0), which indicates the additional stress of the beam in addition to deflection, see fig. 3b. There is a quadrupole component of the electric field force, the magnitude of which is a function of a:
for the x-direction, as shown in fig. 3c, the electric field forces Fx and y are related, with the larger y being, the smaller Fx being. There is a quadrupole component of the electric field force, the magnitude of which is a function of a:
The electric field forces in the helical deflection plates are perpendicular to the beam direction, i.e. there is only an electric field in the x-y direction. In a constant magnetic field:
E is the electric field. The method can obtain:
Because f=qe, so:
The resultant of the two electric field forces is shown in fig. 3d, and the quadrupolar electric field generated by the structure focuses the beam in the lower left-upper right direction and defocuses the beam in the upper left-lower right direction. If the left electrode plate spacing is increased and the right electrode plate spacing is decreased, namely a' = -a, the focusing and defocusing directions are opposite.
The focusing characteristic of the quadrupole electromagnetic field on the charged ion beam is well-established theory, and the combination of two quadrupole fields with equal field intensity and opposite directions has a focusing effect on the beam. Let a certain point on the center track be s from the entrance of the spiral deflection plate, let s=0 at the entrance of the spiral deflection plate and s=s0 at the exit. A is changed along with s to generate a quadrupole field with alternating directions, and the quadrupole field with alternating directions has a focusing effect on beam current according to the principle. For example, at the entrance of the helical deflection plate a (0) =a0, a decreases with s, at the central position of the helical deflection plate a (s 0/2) =0, after which the direction of the quadrupolar field is reversed, at the exit of the helical deflection plate a (s 0) = -a0. This example is a varying in half a period, but may vary one or more periods.
2) The structure of the inclined section spiral deflection plate is further explained as follows
First, the difference between the electric field forces is used to form the upward direction of the electric field force y and the downward direction of the electric field force y, as shown in fig. 3b, the difference between the electric field forces is that the center point (also the center point of the beam track) is used as the coordinate origin to establish the coordinate system, the electric field force received by the center point is used as the reference, the electric field force on the left side of the center point is larger than that of the center point, so the electric field force y is upward, the electric field force on the right side of the center point is smaller than that of the center point, so the electric field force is downward, the second, the difference between the electric field forces is used to form the rightward direction of the electric field force x and the leftward direction of the electric field force x, and the electric field force is stronger when the electric field force is closer from the lower polar plate to the upper polar plate than the upper polar plate, the electric field force is bigger than the lower polar plate when the electric field force is closer to the lower polar plate is, the electric field force is bigger than the electric field force under the center point, and the electric field force is rightward direction is smaller than that of the center point. Third, since the two ends of the polar plate are folded and expanded, the expanded end is weaker as x increases in the y direction of the electric field force, so as shown in fig. 3b, the arrow of the right side of the center point in the y direction of the electric field force is shorter to longer, the arrow is longer, the electric field force is weaker, and similarly, the longer the arrow is, the weaker the electric field force is along the direction from the lower polar plate to the upper polar plate, the shorter the length of the arrow of the right direction of the electric field force x is, the more and shorter the length of the arrow is, the more the arrow is, the longer the arrow is, the weaker the electric field force is. Fig. 3a, 3b, 3c are ultimately combined into the distribution of the difference in electric field forces of fig. 6-4, bottom left-top right focused, top left-bottom right defocused.
3) The front half and the rear half of the spiral channel of the inclined spiral deflection plate are inclined in opposite directions.
Since the helical deflection plates of the inclined section focus in 2 directions and defocus in 2 directions, the helical deflection plates of opposite inclination angles must be arranged in the helical channel of the second half to obtain focusing and defocusing in opposite directions to the upper half, so that the inclined sections of the two directions can mutually compensate the defect that only 2 directions focus and the other 2 directions defocus.
2. Principle of fringe field focusing force. When the inlet or outlet end face of the spiral deflection plate forms an included angle beta with the beam direction, fringe field electric field force is generated. The angle beta is that one end of the end face of the inlet or the outlet is prolonged along the beam direction, the other end of the end face is shortened along the beam direction, and therefore an included angle between the end face of the inlet or the outlet and a plane perpendicular to the beam direction at a central point is formed.
1) The difference between the "fringe field focusing" and the "deflection plate cross-section focusing" is that the "deflection plate cross-section focusing" method of FIGS. 3a to 5-3 is to generate electric field component forces in y-direction and x-direction for the electric field force between the upper and lower plates, as shown in FIG. 3a, the electric field force x-direction is left and right, because the upper and lower plates are inclined to generate the electric field force component force. The electric field component of the fringe field is not due to the inclination of the upper and lower plates, but is still parallel up and down when seen from the end face although the upper and lower plates are folded at one end and spread at the other end, the electric field component of the fringe field is generated in the electric field arc of the fringe field, the inward part of the electric field arc of the fringe field generates the electric field components in x and y directions (the outward part of the electric field arc of the fringe field exceeds the beam current range and has no influence on the beam current, so that fig. 7-1 does not show). The edge field generates an arc inward electric field force because the end face of the inlet or outlet is "cut" from one side to the other side as an oblique angle with one end converging forward (in the beam direction) and one end converging backward, and the opposite oblique lines of the upper and lower oblique planes from which the angle is cut can be respectively imagined as a side line consisting of countless steps, so that the edge field is likened to the steps because the front and back positions of each pair of steps and the adjacent steps in the beam direction are different, and each pair of upper and lower steps generates an arc line from the lower polar plate to the upper polar plate, and the arc lines form the electric field component of the edge field as shown in fig. 7-1.
2) The "difference in electric field force" between the "positional electric field force" and the "center position of the helical deflection plate" is utilized. The "position electric field force" is shown in fig. 7-1, a plane perpendicular to the beam direction is made through the forefront ends W of the inlet or outlet of the upper polar plate and the lower polar plate, the x-y plane of fig. 7-1, the force of the fringe field on the x-y plane is different according to the positions of the particles on the x-y plane, so that the forefront ends are called "position electric field force", the forefront ends W of the inlet or outlet end faces along the beam direction, and the "deflection plate center position" is called the beam track center position, and the intersection point O of the x-y plane of fig. 7-1 is called the deflection plate center position. The direction of the electric field force difference is different from the direction of the electric field force, when the electric field force has a component, the component is upward and rightward, the direction of the electric field force difference can be the upward direction of the electric field force y, the downward direction of the electric field force y, the rightward direction of the electric field force x and the leftward direction of the electric field force x, when the electric field force x is smaller than the electric field force of the center point compared with the electric field force of the center point, the direction of the electric field force x is leftward, and similarly, the weaker the electric field force is in the upward polar plate direction, and when the electric field force in the y direction is smaller than the electric field force of the center point, the direction of the electric field force is downward.
3) The electric field force is greatest nearest the forward most end W of the plate port. Fig. 7-2 is a side view of fig. 7-1, where l is the width of the plate and d is the height between the upper and lower plates. As can be seen in combination with fig. 7-2 and 7-3, in fig. 7-3, the electric field force is greatest at the nearest position to the front-most end W of the port. The nearest location includes an x-direction and a y-direction.
4) The difference between the electric field forces in the y direction is analyzed by comparing the first, -l/2 area with the l/2 area, in which the electric field force of the fringe field of the center O point of the deflection plate is relatively smaller in the-l/2 area than in the W point because the electric field force of the fringe field of the center O point of the deflection plate is relatively larger in the-l/2 area than in the W point because the electric field force of the center O point of the deflection plate is inclined from front to back, and the difference between the electric field forces in the l/2 area is positive in the y direction because the electric field force of the center O point of the deflection plate is smaller in the-l/2 area because the electric field force of the center O point of the deflection plate is inclined from front to back, and the shoulder head in the-l/2 area because the electric field force of the center O point of the deflection plate is smaller in the x-y plane is larger as the x is larger, and the difference in the l/2 area because the electric field force of the center O point of the deflection plate is smaller in the y direction as the x is larger, and the difference in the l/2 area because the electric field force of the center O point of the deflection plate is smaller in the y direction as the negative in the y direction.
5) The difference between the electric field forces in the x direction is analyzed that the first, -d/2 area and the d/2 area are compared, the stronger the electric field force is at the area-d/2 area, the bigger the y is, the farther the distance from the W point is, the weaker the electric field force of the edge field to which the particle is subjected is relative to the W point, so the electric field force of the center O of the deflection plate is positive by the electric field force of the lower plate on the x-y plane, the right direction of the electric field force x is the electric field force, but the smaller the difference of the electric field force is, the shorter the arrow in the horizontal direction of the-d/2 area is, and the weaker the electric field force of the lower plate to which the particle is subjected is as the y is increased, the electric field force of the center O of the deflection plate is larger than the electric field force of the d/2 area is, the negative number is represented by the arrow in the horizontal direction at the moment, and the arrow in the horizontal direction is the longer the upward direction of the negative electric field force is the longer the position of the plate is the electric field force of the position of the higher the negative electrode is.
6) Lower left-upper right focus, upper left-lower right defocus. The tilting pattern for the inlet or outlet of fig. 7-2, finally, yields that the tilting pattern for the inlet or outlet of fig. 7-2 is bottom-left-top-right focusing, top-left-bottom-right defocusing.
7) The angle beta between the inlet and the outlet must be opposite to ensure that the total fringe field from the inlet to the outlet is focused. When the angle of fig. 7-2 is set to- β, the lower left-upper right defocus and the upper left-lower right focus are pushed out, so that the defocus of the entrance is replaced by the focus of the exit, and the defocus of the exit is replaced by the focus of the entrance, resulting in the total fringe fields of the entrance and exit being focused.
8) If the defocusing is changed to the defocusing in the left-right upper direction and the focusing is in the left-right lower direction as in fig. 7-1, the inclination angle of fig. 7-1 should be the opposite direction, the side of the end face close to the x direction extends forwards, the side close to the-x direction shortens backwards, the corresponding fringe field arc line should be the right arc line of fig. 7-1, the electric field component x direction is left at the lower polar plate and the electric field component x at the upper polar plate is right, the W point is relatively farther from the vertical plane x-Y, and the Y point is relatively closer to the vertical plane x-Y. Since the-x direction is the increasing direction and the x direction is the decreasing direction, the longer the-x direction arrow is, the stronger the electric field, the shorter the arrow is, the weaker the electric field, the longer the x direction arrow is, and the shorter the arrow is, the stronger the electric field is.
Based on the principle of the invention, the invention provides a design method of a spiral deflection plate of a circular accelerator with a transverse focusing force and an inclined section, which comprises the following steps:
step one, adopting the existing spiral deflection plate design method to finish the traditional spiral deflection plate design;
and secondly, keeping the height of the central line of the beam track between the upper layer spiral deflection plate and the lower layer spiral deflection plate unchanged, and changing the shapes of the cross sections of the spiral deflection plates in the upper, lower, left and right directions of the central line of the beam track to be inclined cross sections, or changing the spiral deflection plates in a combined way, namely keeping the height of the central line between the upper layer spiral deflection plate and the lower layer spiral deflection plate unchanged, keeping the positions of the central points on the inlet end face and the outlet end face of the upper layer spiral deflection plate and the lower layer spiral deflection plate unchanged, changing the shapes of the cross sections of the upper layer spiral deflection plate and the lower layer spiral deflection plate to be inclined cross sections, and changing the shapes of the front side and the rear side of the central points on the inlet end face and the outlet end face of the spiral deflection plate, so that the inlet end face and the outlet end face form an included angle beta, and the included angles of the inlet and the outlet are equal and opposite in direction.
The combination alters the helical deflector plate for providing a lateral focusing force of the helical deflector plate in addition to the deflection force and a fringe field focusing force;
Supplementary notes 1:
1) As shown in fig. 3b, the height of the beam path center line between the upper and lower spiral deflection plates is kept constant, and the center line is a dot at the center of the figure, and the beam is in the direction facing the paper surface, so that the beam looks like a dot. The constant height refers to the constant height of the dots in the figure.
2) 7-1, 7-3 And 7-4, the positions of the central points on the inlet end face and the outlet end face of the upper spiral deflector and the lower spiral deflector are kept unchanged, and the positions of the central points are O points in the drawing.
3) The center line of fig. 3b and the center points of fig. 7-1, 7-3, 7-4, both refer to center points on the beam center line, are concepts. The latter is the center point seen from the inlet and outlet end faces of the helical deflector plate.
Step three, adopting a multi-particle tracking method to simulate particle distribution at the outlet of the spiral deflection plate;
And step four, repeating the step two and the step three until the particle distribution has a smaller envelope.
In the spiral deflection plate with the inclined section, the plate pitch at one end is reduced, the plate pitch at the other end is increased, the pitches at both ends of the upper and lower plates are opposite in the front half and the rear half of the spiral channel, the pitches at both ends of the upper and lower plates are increased in the rear half if the pitches at both ends of the upper and lower plates are reduced in the front half of the spiral channel, and the pitches at both ends of the upper and lower plates are reduced in the rear half if the pitches at both ends of the upper and lower plates are increased in the front half of the spiral channel.
Supplementary explanation 2:
As shown in fig. 3d, for one type of tilted section helical deflection plate, the final focusing effect is 2-direction focusing and 2-direction defocusing of the electric field quadrupolar field. In order to focus the electric field in all 4 directions, two sets of helical deflection plates with different inclined cross sections are required. Therefore, the invention adopts the steps that the distances between the upper polar plate and the lower polar plate in the front half part and the rear half part of the spiral channel are opposite, if the distances between the upper polar plate and the lower polar plate in the front half part of the spiral channel are reduced, the distances between the upper polar plate and the lower polar plate in the rear half part of the spiral channel are increased, and if the distances between the upper polar plate and the lower polar plate in the front half part of the spiral channel are increased, the distances between the upper polar plate and the lower polar plate in the rear half part of the spiral channel are reduced.
The spiral deflection plate with the inclined section comprises a spiral deflection plate with an inclined section and a trapezoid section, the spiral deflection plate with the trapezoid section keeps the middle position unchanged, the width of an upper plate is reduced, the width of a lower plate is increased, the section is trapezoid, the distances between the two ends of the upper plate and the lower plate in the front half part and the rear half part of a spiral channel are opposite, the distance between the two ends of the upper plate and the lower plate in the rear half part is increased if the distance between the two ends of the upper plate and the lower plate is reduced in the front half part of the spiral channel, and the distance between the two ends of the upper plate and the lower plate in the rear half part is reduced if the distance between the two ends of the upper plate and the lower plate in the front half part is increased in the spiral channel.
Supplementary notes 3:
As shown in fig. 5-2, a. For the ladder + tilt type combined structure, since the tilt type is included, the pitches of both ends of the upper and lower plates are opposite at the front half and the rear half of the spiral type channel, and if the pitches of both ends of the upper and lower plates are reduced at the front half of the spiral type channel, the pitches of both ends of the upper and lower plates are increased at the rear half of the spiral type channel, and if the pitches of both ends of the upper and lower plates are increased at the front half, the pitches of both ends of the upper and lower plates are reduced at the rear half of the spiral type channel. b. For the ladder + tilt combination, the focusing force is a superposition of the ladder and tilt focusing forces, for which the electric field force has a component directed toward the interior of the deflection plate at the edge region of the deflection plate, for which the tilt is lower left-upper right focused, upper left-lower right defocused.
The spiral deflection plate with the inclined section comprises a spiral deflection plate with an inclined section and a V-shaped section, the pitch of the polar plates at the middle position is kept unchanged, the two ends of the spiral deflection plate are tilted upwards, the whole section is of a V-shaped structure, the pitch of the polar plates at one end is reduced, the pitch of the polar plates at the other end is increased, the pitches of the upper polar plates and the lower polar plates at the front half part and the rear half part of the spiral channel are opposite, the pitch of the upper polar plates and the lower polar plates at the rear half part of the spiral channel is increased if the pitches of the upper polar plates and the lower polar plates at the front half part are reduced, and the pitch of the upper polar plates and the lower polar plates at the rear half part of the spiral channel is reduced if the pitches of the upper polar plates and the lower polar plates at the front half part and the lower polar plates are increased.
Supplementary explanation 4:
And a, the spacing between the two ends of the upper polar plate and the lower polar plate in the front half part of the spiral channel is opposite to the spacing between the two ends of the upper polar plate and the lower polar plate in the rear half part of the spiral channel because of the included inclined type, and the spacing between the two ends of the upper polar plate and the lower polar plate in the rear half part of the spiral channel is increased if the spacing between the two ends of the upper polar plate and the lower polar plate in the front half part of the spiral channel is reduced if the spacing between the two ends of the upper polar plate and the lower polar plate in the front half part of the spiral channel is increased. b. For a V-type + tilt combination structure, the focusing force is a superposition of the V-type + tilt, for which the V-type has an origin at the middle position, for the x <0 position, there is a component of the electric field force in the x direction, for the x >0 position, there is a component of the electric field force in the-x direction, for which the tilt is focused lower left-upper right, upper left-lower right defocused.
The spiral deflection plate with the inclined section comprises spiral deflection plates with inclined, ladder-shaped and V-shaped combined sections, the distances between the two ends of the upper polar plate and the lower polar plate in the front half part and the rear half part of the spiral channel are opposite, the distance between the two ends of the upper polar plate and the lower polar plate in the rear half part is increased if the distance between the two ends of the upper polar plate and the lower polar plate in the front half part of the spiral channel is reduced, and the distance between the two ends of the upper polar plate and the lower polar plate in the rear half part of the spiral channel is increased if the distance between the two ends of the upper polar plate and the lower polar plate in the front half part of the spiral channel is increased.
Supplementary explanation 5:
As shown in fig. 6, for the combined cross-sectional structure of the inclined type, the trapezoid type, V-type, a. Because the inclined type is included, the pitches of both ends of the upper and lower plates are opposite in the front half and rear half of the spiral channel, and in the front half of the spiral channel, if the pitches of both ends of the upper and lower plates are reduced, the pitches of both ends of the upper and lower plates are increased in the rear half, and in the rear half of the spiral channel, if the pitches of both ends of the upper and lower plates are increased in the front half, the pitches of both ends of the upper and lower plates are reduced in the rear half. b. For a V-type + ladder-type + tilt-type combination structure, the focusing force is a superposition of the V-type + ladder-type + tilt-type, for which the V-type has an origin at the middle position, for x <0 the electric field force has a component in the x direction, for x >0 the electric field force has a component in the-x direction, for which the trapezoidal shape has a component directed toward the interior of the deflection plate in the edge region of the deflection plate, for which the tilt-type has lower left-upper right focusing, upper left-lower right defocusing.
Moreover, the combination of the modified spiral deflection plates comprises a combination of spiral deflection plates with inclined sections and spiral deflection plates with modified shapes of inlet and outlet end surfaces.
Supplementary notes 6:
As shown in fig. 7-1 and 7-2, fringe field forces are generated when the entrance or exit end surfaces of the helical deflector plates are at an angle β to the beam direction. The angle beta is that one end of the end face of the inlet or the outlet is prolonged along the beam direction, the other end of the end face is shortened along the beam direction, and therefore an included angle between the end face of the inlet or the outlet and a plane perpendicular to the beam direction at a central point is formed.
The electric field component of the fringe field is not due to the inclination of the upper and lower plates, but is still parallel up and down when seen from the end face although the upper and lower plates are folded up and folded down and spread up from the end face, the electric field component of the fringe field is generated by the electric field arc of the fringe field, the electric field force inwards generated by the arc is generated by the fringe field because the end face of the inlet or outlet is 'cut off' from one side edge to the other side edge, the opposite oblique lines of the upper and lower inclined planes from which the angle is cut off can be respectively imagined as an edge line consisting of innumerable 'steps', and the like is distinguished by the fact that the front and back positions of each pair of 'steps' and the adjacent steps in the beam direction are different, and therefore each pair of upper and lower steps generates the arc from the lower plate to the upper plate, and the electric field component of the fringe field is formed by the arc lines as shown in fig. 7-1.
The combination changes the spiral deflection plate, comprises a combination of the spiral deflection plate with inclined and ladder-shaped combined sections and the spiral deflection plate with changed shapes of the end faces of the inlet and the outlet, and the distances between the upper polar plate and the lower polar plate in the front half part and the rear half part of the spiral channel are opposite, the distance between the upper polar plate and the lower polar plate in the rear half part is increased if the distance between the upper polar plate and the lower polar plate is reduced in the front half part of the spiral channel, and the distance between the upper polar plate and the lower polar plate in the rear half part is reduced if the distance between the upper polar plate and the lower polar plate in the front half part is increased in the rear half part of the spiral channel.
The combination changes the spiral deflection plate, comprises a combination of the spiral deflection plate with inclined and V-shaped combined sections and the spiral deflection plate with changed shapes of the end faces of the inlet and the outlet, and the distances between the upper polar plate and the lower polar plate in the front half part and the rear half part of the spiral channel are opposite, the distance between the upper polar plate and the lower polar plate in the rear half part is increased if the distance between the upper polar plate and the lower polar plate is reduced in the front half part of the spiral channel, and the distance between the upper polar plate and the lower polar plate in the rear half part is reduced if the distance between the upper polar plate and the lower polar plate in the front half part is increased in the rear half part of the spiral channel.
The combination change spiral deflection plates comprise combination of spiral deflection plates with inclined, ladder-shaped and V-shaped combined sections and spiral deflection plates with changed shapes of end faces of an inlet and an outlet, the distances between the two ends of the upper polar plate and the lower polar plate in the front half part and the rear half part of the spiral channel are opposite, the distance between the two ends of the upper polar plate and the lower polar plate in the rear half part of the spiral channel is increased if the distance between the two ends of the upper polar plate and the lower polar plate in the front half part is reduced, and the distance between the two ends of the upper polar plate and the lower polar plate in the rear half part of the spiral channel is reduced if the distance between the two ends of the upper polar plate and the lower polar plate in the front half part of the spiral channel is increased.
It should be emphasized that the above-described embodiments are merely illustrative of the invention, which is not limited thereto, and that modifications may be made by those skilled in the art, as desired, without creative contribution to the above-described embodiments, while remaining within the scope of the patent laws.

Claims (2)

1. A design method of a spiral deflection plate of a circular accelerator with a transverse focusing force and an inclined section is characterized by comprising the following steps:
step one, adopting the existing spiral deflection plate design method to finish the traditional spiral deflection plate design;
the method comprises the steps of arranging a plurality of layers of spiral deflection plates on a beam track, wherein the beam track comprises a plurality of layers of spiral deflection plates, and the beam track comprises a plurality of layers of beam track center lines, wherein the beam track center lines are arranged between the upper layer of spiral deflection plates and the lower layer of spiral deflection plates;
A helical deflection plate of an inclined section, in which the plate pitch at one end is reduced and the plate pitch at the other end is increased, and the pitches at both ends of the upper and lower plates are opposite in the front half and rear half of the helical channel, in which the pitch at both ends of the upper and lower plates is increased in the rear half if the pitch at both ends of the upper and lower plates is reduced in the front half and in the rear half of the helical channel if the pitch at both ends of the upper and lower plates is increased in the front half;
step three, adopting a multi-particle tracking method to simulate particle distribution at the outlet of the spiral deflection plate;
And step four, repeating the step two and the step three until the particle distribution has a smaller envelope.
2. The method of designing a helical deflection plate for a cyclotron with a transverse focusing force according to claim 1, wherein the combination of the helical deflection plate comprises a combination of the helical deflection plate with a tilted section and the helical deflection plate with a changed shape of the end faces of the inlet and the outlet.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106132068A (en) * 2016-07-29 2016-11-16 中国原子能科学研究院 A kind of cyclotron injects line deflecting plates and center device
CN109561568A (en) * 2018-11-27 2019-04-02 中国原子能科学研究院 It is a kind of to generate the periodic magnetic iron component for rocking track and increasing axial focusing force

Family Cites Families (2)

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JP5214090B2 (en) * 2004-11-30 2013-06-19 株式会社Sen Beam deflection scanning method, beam deflection scanning apparatus, ion implantation method, and ion implantation apparatus
CN201919234U (en) * 2010-12-23 2011-08-03 中国原子能科学研究院 A New Structure of the Electrode Plate of the Electrostatic Helical Deflector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106132068A (en) * 2016-07-29 2016-11-16 中国原子能科学研究院 A kind of cyclotron injects line deflecting plates and center device
CN109561568A (en) * 2018-11-27 2019-04-02 中国原子能科学研究院 It is a kind of to generate the periodic magnetic iron component for rocking track and increasing axial focusing force

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