CN115421356B - An improved exposure system for Micro-LED chip preparation - Google Patents

Abstract

The present invention relates to the field of chip manufacturing devices, and discloses an improved exposure system for preparing Micro-LED chips, comprising a dark box, which is provided with a processing chamber, an exposure chamber, a reinforcement chamber, a material receiving chamber and a raw material chamber; a pretreatment device, which is located in the processing chamber and performs pretreatment; an exposure device, which is located in the exposure chamber and performs exposure; a material receiving roller, which is located in the material receiving chamber; a substrate, which passes through the processing chamber, the exposure chamber, the reinforcement chamber and the material receiving chamber in sequence and is connected to the material receiving roller; a power box, which is fixedly connected to one side of the dark box and is connected to a kinetic energy mechanism inside the power box, and the exposure device and the material receiving roller are both connected to the kinetic energy mechanism. The present invention uses water periodically in a regional manner to make the overall water environment more stable, ensure the quality of exposure, reduce the overall water consumption, reduce the overall production cost, reduce the breakage rate during transportation, and further reduce the overall cost.

Description

An improved exposure system for Micro-LED chip preparation

Technical Field

The present invention relates to the field of Micro-LED chip manufacturing devices, and in particular to an improved exposure system for preparing Micro-LED chips.

Background technique

Micro-LED display technology refers to a display technology that uses self-luminous micron-sized LEDs as light-emitting pixel units and assembles them on a driving panel to form a high-density LED array. Due to the small size, high integration, and self-luminescence of micro-LED chips, they are generally installed on smaller chips so that there are enough LEDs per unit area to meet the necessary work needs. The production of chips generally uses photolithography, but the process of more mainstream computer chips does not need to reach the nanometer level, so the requirements for photolithography are relatively low. During photolithography, pure water is needed to dissolve some components to achieve the effect of erosion. However, existing machines generally use a sufficient amount of water in a volume pool and then perform multiple erosions. However, in this process, the pure water is impure due to multiple erosions, which affects the subsequent production. At the same time, the one-time amount is large, which wastes pure water and increases its production cost.

Summary of the invention

In order to solve the technical problem of certain cost waste, the present invention provides an improved exposure system for preparing Micro-LED chips.

The present invention is implemented by the following technical scheme: an improved exposure system for preparing Micro-LED chips, a dark box, which is provided with a processing chamber, an exposure chamber, a reinforcement chamber, a material receiving chamber and a raw material chamber; a pretreatment device, which is located in the processing chamber for pretreatment; an exposure device, which is located in the exposure chamber for exposure; a material receiving roller, which is located in the material receiving chamber; a substrate, which passes through the processing chamber, the exposure chamber, the reinforcement chamber and the material receiving chamber in sequence and is connected to the material receiving roller, and the substrate adopts a flexible circuit board to cooperate with the later use; a power box, which is fixedly connected to one side of the dark box, and a kinetic energy mechanism is connected to the inside of the power box, and the exposure device and the material receiving roller are both connected to the kinetic energy mechanism.

As a further improvement of the above scheme, the pretreatment device includes: a replacement roller, which is rotatably connected to one side of the dark box, and the substrate is wrapped around the outside of the replacement roller; a protective box, which is tilted and fixed on one side of the dark box, and multiple processing units are arranged inside it. Multiple rollers are rotatably connected in the protective box to limit the substrate and block the light to form a dark box, a loading roller, which is rotatably connected to the wall of the processing chamber, and a heating and drying roller is arranged on one side of it; a leveling blowing mechanism, which is fixedly connected in the processing chamber, and a suction mechanism is fixedly connected to the bottom of the processing chamber.

As a further improvement of the above scheme, one end of the feeding roller passes through the dark box to reach the power box, and a raw material box connected to the feeding roller is arranged in the power box. A plurality of scrapers are fixedly connected to the bottom of the leveling blowing mechanism, and one side of the leveling blowing mechanism and the suction mechanism are connected to an air suction pump located in the power box. The output end of the air suction pump is connected to a filtering mechanism. A pump is arranged in the raw material box to provide support for the raw material to the feeding roller. At the same time, a specific protective agent is loaded in the raw material box for protection. Suction holes located on the leveling suction mechanism are arranged on both sides of the scraper to ensure the suction effect. The air suction pump is an existing structure to realize the flow of gas.

As a further improvement of the above scheme, the exposure device includes: two sliding frames symmetrically arranged, a plurality of slide grooves are arranged on the dark box, one side of the sliding frame is slidably sleeved with the slide groove, and one end of the sliding frame is connected to the kinetic energy mechanism; a plurality of pressure sensors are arranged, and they are fixedly connected to the bottom of the upper sliding frame, and a first buffer ring is fixedly connected to the lower side of the pressure sensor, and the pressure sensor is an existing device. At the same time, a PLC controller is installed in the power box to realize signal processing and signal output, which is convenient for personnel to control the internal, and a mobile box is fixedly connected to the bottom sliding frame and is in sliding contact with the dark box; an actuator is fixedly connected to the mobile box, and a second buffer ring is connected to the top of the actuator;

As a further improvement of the above scheme, the actuator includes: an irradiation lamp, which is provided with multiple lamps and fixedly connected in the moving box, and a light-transmitting plate fixedly connected to the moving box is provided above the lamp; a light guide tube, which is fixedly connected to the moving box, and a mounting tube is threadedly sleeved on the top of the light guide tube, and an actuator tube is threadedly sleeved on the top of the mounting tube, and multiple lenses are fixedly connected in the light guide tube and the actuator tube, and an exposure plate is fixedly connected in the mounting tube, and the light guide tube, the mounting tube and the actuator tube are relatively limited by pins to ensure accurate alignment of each position and overall stability; an actuator sleeve, which is sleeved on the outside of the actuator tube, and the top of which is fixedly connected to the second buffer ring; a sliding ring, which is slidably sleeved in the actuator sleeve, and the bottom end of which is fixedly connected to an adjustment ring fixedly connected to the actuator tube, and one side of the adjustment ring is fixedly connected to a first spring fixedly connected to the actuator sleeve; a drain pipe, one end of which is fixedly connected to the adjustment ring, and one side of which is provided with an absorption pipe fixedly connected to the adjustment ring, and the other end of the absorption pipe is fixedly connected to a connecting pipe connected to the raw material chamber.

As a further improvement of the above solution, a stabilizing box is provided on one side of the dark box, a plurality of heaters are connected to one side of the stabilizing box, a plurality of steering rollers are provided on one side of the heater, and the steering rollers are arranged side by side in an arc structure.

As a further improvement of the above solution, the first buffer ring and the second buffer ring both include a folding ring filled with an inert gas, one side of the folding ring is fixedly connected to a contact ring, and one side of the contact ring is provided with a plurality of sealing grooves.

As a further improvement of the above scheme, the kinetic energy mechanism includes: a motor, which is fixedly connected in the power box, and its output end is connected to the first missing gear; a first transmission wheel, which is rotatably connected to the power box, which is transmission-connected to the first missing gear, and its lower side is meshedly connected to the first gearbox, and the lower side of the first gearbox is transmission-connected to the first driving wheel; an intermediate shaft, which is fixedly sleeved with the first driving wheel, and the second missing gear and the friction wheel are fixedly sleeved on the intermediate shaft; a transmission wheel, which is transmission-connected to the second missing gear, and the driven shaft is fixedly sleeved in the middle, and the outer wall of the driven shaft is fixedly sleeved with an extrusion wheel that matches the friction wheel. Wheel; a rotating wheel, which is fixedly connected to one end of a driven shaft, and the driven shaft is rotatably connected to a power box; a crank, one end of which is rotatably connected to a rotating wheel, and the other end of which is rotatably connected to a sliding mechanism; a second transmission wheel, which is rotatably connected to the power box, and is transmission-connected to the first missing gear, and its upper side is meshed and connected to a second gearbox, and the upper side of the second gearbox is transmission-connected to a second driving wheel; a groove wheel mechanism, which is transmission-connected to the second driving wheel, and one side of the groove wheel mechanism is connected to a receiving shaft connected to a receiving roller, and the groove wheel mechanism is an existing basic structure, which can realize the overall circular motion to drive the periodic rotation of another object. The sliding mechanism includes symmetrically arranged first rods, one of which is rotationally connected to the crank, and one end of the other first rod is fixedly connected to a second spring fixedly connected to the power box, and one end of the two first rods is rotationally connected to a second rod, and the other end of the second rod is rotationally connected to an exposure device; the outer wall of the friction wheel is fixedly connected to a plurality of extrusion sheets with arc structures, and the extrusion sheets are made of metal, and the outer wall of the extrusion sheet is fixedly sleeved with a friction plate.

As a further improvement of the above scheme, a leakage pipe is connected to the bottom of the dark box, the other end of the leakage pipe is connected to a collecting box located below the dark box, a feed pipe is connected to one side of the raw material chamber, and a detector is connected to the collecting chamber.

As a further improvement of the above scheme, an injection plate is connected to the reinforcement cavity, one side of the injection plate is connected to a powder feeder located on the outside, a third spring is fixedly connected to both sides of the reinforcement cavity, the other end of the third spring is fixedly connected to a slider, and an adjustment roller in contact with the substrate is rotatably connected between the two sliders.

Compared with the prior art, the present invention has the following beneficial effects:

1. Through regional periodic water use, the overall water environment is relatively stable, ensuring the quality of exposure. At the same time, extremely small regional water supply can reduce the overall water consumption, thereby reducing the overall production cost. At the same time, overall production can reduce dust or other damage generated during transportation, reduce the breakage rate, and further reduce the overall cost.

2. Through the overall work, the exposure, drying and storage work can be completed at one time, reducing the process, facilitating the work, increasing work efficiency and ensuring output.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG1 is a schematic front cross-sectional view of the present invention;

FIG2 is a schematic cross-sectional view of the present invention from the left;

FIG3 is a rear cross-sectional schematic diagram of the present invention;

FIG4 is a schematic diagram of the structure enlarged at point A;

FIG5 is a schematic diagram of the structure enlarged at B;

FIG6 is a schematic cross-sectional front view of the actuator;

Fig. 7 is a schematic diagram of the structure of the buffer ring;

FIG8 is a schematic diagram of a front cross-sectional view of a buffer ring.

Description of main symbols:

1. Dark box; 2. Raw material chamber; 3. Feed pipe; 4. Receiving roller; 5. Receiving chamber; 6. Processing chamber; 7. Protective box; 8. Replacement roller; 9. Loading roller; 10. Heating and drying roller; 11. Suction mechanism; 12. Flat blowing mechanism; 13. Actuator; 14. Sliding rack; 15. Slide; 16. Steering roller; 17. Moving box; 18. Collecting box; 19. Leakage pipe; 21. Stabilizing box; 22. Heater; 23. Exposure chamber; 24. Substrate; 25. Third spring; 26. Adjusting roller; 27. Reinforcement chamber; 28. Injection plate; 30. Motor; 31. Connecting pipe; 32. Second rod; 33. Rotating wheel; 34. First driving wheel; 35. Transfer wheel; 37. Extrusion wheel; 38. Driven shaft; 39. Intermediate shaft ; 40, friction wheel; 41, first gearbox; 42, second missing gear; 43, first transmission wheel; 44, first missing gear; 45, second transmission wheel; 46, second gearbox; 47, second driving wheel; 48, groove wheel mechanism; 49, material collection shaft; 50, power box; 52, second spring; 53, first rod; 54, crank; 55, pressure sensor; 56, sliding ring; 57, first spring; 58, suction tube; 59, execution tube; 61, lens; 62, drain pipe; 63, adjustment ring; 64, execution sleeve; 65, second buffer ring; 66, first buffer ring; 67, folding ring; 68, contact ring; 69, installation tube; 71, irradiation lamp; 72, light-transmitting plate; 73, light-guiding tube; 74, exposure plate.

Detailed ways

The present invention is further described below in conjunction with the accompanying drawings and specific implementation methods. It should be noted that, under the premise of no conflict, the various embodiments or technical features described below can be arbitrarily combined to form a new embodiment.

Example

Please refer to Figures 1-8. The dark box 1 is provided with a processing chamber 6, an exposure chamber 23, a reinforcement chamber 27, a material receiving chamber 5 and a raw material chamber 2. The exhaust gas is processed in the processing chamber 6, and then is exposed by the exposure device in the exposure chamber 23. It is then transported to the reinforcement chamber 27 for certain protection and stored in the material receiving chamber 5. Pure water is stored in the raw material chamber 2.

The pretreatment device is located in the treatment chamber 6 and performs pretreatment. The pretreatment device performs early treatment to ensure later use.

The exposure device is located in the exposure chamber 23 and performs exposure. The exposure device performs necessary exposure to achieve photolithography.

The receiving roller 4 is located in the receiving cavity 5, and the receiving roller 4 collects the processed parts to meet the work needs.

The substrate 24 passes through the processing chamber 6, the exposure chamber 23, the reinforcement chamber 27 and the receiving chamber 5 in sequence and is connected to the receiving roller 4. The substrate 24 is processed and etched to complete the processing needs.

The power box 50 is fixedly connected to one side of the dark box 1, and a kinetic energy mechanism is connected inside the power box. The exposure device and the receiving roller 4 are both connected to the kinetic energy mechanism. The kinetic energy mechanism provides kinetic energy to various devices in the device to ensure their rotation.

The pre-treatment device includes:

The replacement roller 8 is rotatably connected to one side of the dark box 1, and the substrate 24 is wound around the outer side of the replacement roller 8. The initial unprocessed substrate 24 is wound around the replacement roller 8 to realize the supply of raw materials.

The protection box 7 is fixed obliquely on one side of the dark box 1, and a plurality of processing units are arranged inside the protection box 7. The protection box 7 performs guidance and preliminary processing, and reduces the entry of light to ensure the subsequent exposure needs.

The feeding roller 9 is rotatably connected to the wall of the processing chamber 6, and a heating and drying roller 10 is provided on one side. The feeding roller 9 feeds the surface of the substrate 24 through external supply, and then dries it through the heating and drying roller 10 to achieve liquid solidification and complete the preliminary preparation.

The leveling blowing mechanism 12 is fixedly connected in the processing chamber 6, and the bottom of the processing chamber 6 is fixedly connected with the suction mechanism 11. The scraper at the bottom of the leveling blowing mechanism 12 performs necessary scraping to remove excess raw materials. At the same time, the suction of the suction pump can adsorb the raw materials that may be trimmed to achieve the leveling needs.

One end of the feeding roller 9 passes through the dark box 1 and reaches the power box 50. A raw material box connected to the feeding roller 9 is arranged in the power box 50. A plurality of scraping knives are fixedly connected to the bottom of the leveling blowing mechanism 12. One side of the leveling blowing mechanism 12 and the suction mechanism 11 are both connected to an air suction pump located in the power box 50. The output end of the air suction pump is connected to a filtering mechanism. The filtering mechanism filters the scraped material to reduce pollution.

The exposure device includes:

There are two sliding frames 14 symmetrically arranged, and a plurality of slide grooves 15 are arranged on the dark box 1. One side of the sliding frame 14 is slidably connected with the slide groove 15, and one end of the sliding frame 14 is connected to the kinetic energy mechanism. The sliding frame 14 can move up and down under the limitation of the slide groove 15 and the dark box 1 to meet the needs of subsequent work.

There are multiple pressure sensors 55, which are fixedly connected to the bottom of the upper sliding frame 14. A first buffer ring 66 is fixedly connected to the lower side of the pressure sensor 55. The pressure sensor 55 senses the pressure and then transmits it to the outside for detection. At the same time, the first buffer ring 66 cooperates with the second buffer ring 65 to squeeze and seal the substrate 24.

The moving box 17 is fixedly connected to the sliding frame 14 at the bottom and is in sliding contact with the dark box 1. The moving box 17 moves along with the movement of the sliding frame 14, driving the actuator 13 to move.

The actuator 13 is fixedly connected to the moving box 17, and a second buffer ring 65 is connected to the top of the actuator;

The actuator 13 includes:

There are multiple irradiation lamps 71, which are fixedly connected in the moving box 17. A light-transmitting plate 72 fixedly connected to the moving box 17 is arranged above the irradiation lamps 71. The irradiation lamps 71 generate light sources to achieve strong illumination to ensure subsequent exposure needs. The light passes through the light-transmitting plate 72 and enters the light guide tube 73.

The light guide tube 73 is fixedly connected to the movable box 17, and a mounting tube 69 is threadedly sleeved on the top thereof, and an execution tube 59 is threadedly sleeved on the top of the mounting tube 69. Multiple lenses 61 are fixedly connected in the light guide tube 73 and the execution tube 59, and an exposure plate 74 is fixedly connected in the mounting tube 69. The light entering the light guide tube 73 passes through the lens 61 and is partially blocked by the exposure plate 74, and then passes through the execution tube 59 to irradiate the substrate 24 for photolithography.

The execution sleeve 64 is sleeved on the outside of the execution cylinder 59, and the top end of the execution sleeve 64 is fixedly connected to the second buffer ring 65;

The sliding ring 56, whose sliding sleeve is arranged in the executing sleeve 64, has its bottom end fixedly connected to the adjusting ring 63 fixedly connected to the executing cylinder 59, and one side of the adjusting ring 63 is fixedly connected to the first spring 57 fixedly connected to the executing sleeve 64. With the movement of the sliding frame 14, the pressure sensor 55 and the executing sleeve 64 are driven to move, so that the first buffer sleeve 66 and the second buffer ring 65 are close to each other, squeezing the substrate 24 to achieve sealing, and at the same time, the volume inside the second buffer ring 65 is reduced and the pressure is increased.

The leakage pipe 62 has one end fixedly connected to the adjustment ring 63, and one side thereof is provided with a suction pipe 58 fixedly connected to the adjustment ring 63, and the other end of the suction pipe 58 is fixedly connected to the connecting pipe 31 connected to the raw material chamber 2. After the volume of the second buffer ring 65 is reduced, the internal liquid flows out through the leakage pipe 62. During subsequent recovery, the pure water raw material is absorbed in the raw material chamber 2 through the suction pipe 58 and the connecting pipe 31.

A stabilizing box 21 is provided on one side of the dark box 1, and a plurality of heaters 22 are connected to one side of the stabilizing box 21. A plurality of steering rollers 16 are provided on one side of the heater 22. The steering rollers 16 are arranged side by side in an arc structure. The stabilizing box 21 fixes the heater 22, and then the heater performs preliminary drying and curing to ensure subsequent transportation and subsequent storage.

The first buffer ring 66 and the second buffer ring 65 both include a folding ring 67, which is filled with inert gas. A contact ring 68 is fixedly connected to one side of the folding ring 67, and a plurality of sealing grooves are provided on one side of the contact ring 68. The contact ring 68 is made of rubber material to achieve sealing.

Kinetic energy institutions include:

The motor 30 is fixedly connected in the power box 50, and its output end is connected to the first missing gear 44. The motor 30 provides torque to drive the first missing gear 44 to rotate periodically, and then intermittently contact the first transmission wheel 43 and the second transmission wheel 45 to achieve torque transmission.

The first transmission wheel 43 is rotationally connected to the power box 50, and is transmission-connected to the first missing gear 44. The lower side of the first transmission wheel 43 is meshedly connected to the first gearbox 41, and the lower side of the first gearbox 41 is transmission-connected to the first driving wheel 34. Through the speed change transmission of the first transmission wheel 43 and the first gearbox 41, the first driving wheel 34 rotates, which further drives the intermediate shaft 39, the first missing gear 42 and the friction wheel 40 to rotate.

The intermediate shaft 39 is fixedly sleeved with the first driving wheel 34, and the second missing gear 42 and the friction wheel 40 are fixedly sleeved on the intermediate shaft 39;

The transmission wheel 35 is transmission-connected with the second missing gear 42, and a driven shaft 38 is fixedly sleeved in the middle thereof. An extrusion wheel 37 cooperating with the friction wheel 40 is fixedly sleeved on the outer wall of the driven shaft 38. The transmission wheel 35 receives the torque transmitted by the second missing gear 42, and at the same time maintains a certain friction force through the cooperation between the friction wheel 40 and the extrusion wheel 37, thereby keeping a stable state for a certain period of time.

The rotating wheel 33 is fixedly connected to one end of the driven shaft 38. The driven shaft 38 is rotatably connected to the power box 50. The rotating wheel 33 drives the crank 54 to rotate, and further drives the crank 54 to move.

A crank 54, one end of which is rotatably connected to the rotating wheel 33, and the other end of which is rotatably connected to a sliding mechanism;

The second transmission wheel 45 is rotationally connected to the power box 50, which is transmission-connected to the first missing gear 44, and its upper side is meshingly connected to the second gearbox 46, and the upper side of the second gearbox 6 is transmission-connected to the second driving wheel 47. The second driving wheel 47 rotates through the transmission of the second transmission wheel 45 and the second gearbox 46.

The groove wheel mechanism 48 is connected to the second driving wheel 47 in transmission. One side of the groove wheel mechanism 48 is connected to the receiving shaft 49 connected to the receiving roller 4. After transmission, the groove wheel mechanism 48 is driven by the second driving wheel 47 to achieve indirect rotation, further driving the rotation of the receiving shaft 49 and the receiving roller 4, and driving the substrate 24 to move a distance at one end.

The sliding mechanism includes symmetrically arranged first rods 53, one of which is rotatably connected to the crank 54, and one end of the other first rod 53 is fixedly connected to a second spring 52 fixedly connected to the power box 50, one end of the two first rods 53 are both rotatably connected to the second rod 32, and the other end of the second rod 32 is rotatably connected to the exposure device. When the crank drives the first rod 53 to move, the second rod 32 moves under the limitation of the darkbox 1 and the sliding frame 14, and further drives the sliding frame 14 to move, so that the two sliding frames 40 are close to each other to form extrusion. After there is no external force support, the second spring 52 makes each rod return to its position and wait for subsequent work.

The outer wall of the friction wheel 40 is fixedly connected with a plurality of extrusion sheets with an arc-shaped structure. The extrusion sheets are made of metal. The outer wall of the extrusion sheet is fixedly sleeved with a friction plate. There is a certain angle between the friction wheel 40 and the second missing gear 42. After the second missing gear 42 rotates, the friction plate contacts the extrusion wheel 37, and the state of the driven shaft is maintained by the friction force. After the friction plate moves out of the extrusion wheel 37, the second spring 52 acts, and then the second missing gear acts, forming a cycle of the entire cycle.

A leakage pipe 19 is connected to the bottom of the dark box 1, and the other end of the leakage pipe 19 is connected to a collecting box 18 located below the dark box 1. A feed pipe 3 is connected to one side of the raw material chamber 2. The discharge pipe 19 collects excess pure water and then reuses it to reduce the excessive use of pure water. A detector 29 is connected to the collecting chamber 5.

An injection plate 28 is connected to the reinforcement cavity 27, and one side of the injection plate 28 is connected to a powder feeder located on the outside. Third springs 25 are fixedly connected to both sides of the reinforcement cavity 27, and a slider is fixedly connected to the other end of the third spring 25. An adjusting roller 26 in contact with the substrate 24 is rotatably connected between the two sliders. Through the action of the third spring 25, the adjusting roller 26 can move to a certain extent to ensure that the substrate 24 is always in a certain stretched state.

During operation, the substrate 24 passes through each chamber through the machine to carry out initial preparation. During operation, it first passes through the protective box 7 for initial preparation and isolation, then passes through the loading roller 9 for necessary coating of surface colloid, then passes through the heating and drying roller 10 for drying and stabilization, then passes through the scraping and absorption of the blowing mechanism 12 for overall flatness and fixation, then passes through the actuator 13 for exposure, then passes through the steering of the steering roller 16 and the heating of the heater 22 for necessary drying, and finally passes through the assistance of the injection plate 28 and the detection of the detector 29, and is wound around the receiving roller 4 to complete the work. During the overall operation, the motor 30 drives the rotating wheel 33 to rotate through the first missing gear 44, the first transmission wheel 43, the first gearbox 41, the first driving wheel 34, the intermediate shaft 39, the second missing gear 42, and the transmission wheel 35, and further drives the crank 54 and the first The rod 53 moves, thereby driving the two sliding frames 14 to move toward each other through the second rod 32, and then driving the first buffer ring 66 and the second buffer ring 65 to move toward each other to achieve extrusion. When the pressure sensor 55 senses that the pressure has reached a certain level, the irradiation lamp 71 is controlled to work, and then irradiation is performed through the light-transmitting plate 72, the lens 61, the exposure plate 74, and the execution tube 59 to achieve exposure. In the process of the two sliding frames 14 approaching each other, the mixed and diluted pure water is discharged through the drain pipe 62. When the subsequent second buffer ring 65 and the first buffer ring 66 move relative to each other, the volume becomes larger, and the space below absorbs clean pure water for addition, completing local and precise addition. At the same time, this process cooperates with the work of the second transmission wheel 45, the second gearbox 46, the second driving wheel 47, the groove wheel mechanism 48 and the receiving shaft 49 to realize the pulling and storage of the substrate 24, achieve stable and continuous work, and increase work efficiency.

The above-mentioned embodiments are only preferred embodiments of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantial changes and substitutions made by technicians in this field on the basis of the present invention shall fall within the scope of protection required by the present invention.

Claims (8)

1. An improved exposure system for Micro-LED chip preparation, comprising:

the dark box is internally provided with a processing cavity, an exposure cavity, a reinforcing cavity, a material receiving cavity and a raw material cavity;

The pretreatment device is positioned in the treatment cavity and is used for pretreatment;

an exposure device, which is positioned in the exposure cavity and is used for exposure;

The material receiving roller is positioned in the material receiving cavity;

the substrate sequentially penetrates through the processing cavity, the exposure cavity, the reinforcing cavity and the material receiving cavity and then is connected with the material receiving roller;

The power box is fixedly connected to one side of the camera bellows, the inside of the power box is connected with a kinetic energy mechanism, and the exposure device and the material receiving roller are connected with the kinetic energy mechanism;

the exposure apparatus includes:

The two sliding frames are symmetrically arranged, a plurality of sliding grooves are formed in the camera bellows, one side of each sliding frame is in sliding sleeve joint with each sliding groove, and one end of each sliding frame is connected with the kinetic energy mechanism;

the pressure sensors are arranged in a plurality, are fixedly connected to the bottom of the sliding frame above, and are fixedly connected with a first buffer ring at the lower side;

the movable box is fixedly connected with the sliding frame at the bottom and is in sliding contact with the camera bellows;

The actuator is fixedly connected to the movable box, and the top end of the actuator is connected with a second buffer ring;

The actuator includes:

the plurality of the irradiation lamps are fixedly connected in the movable box, and a light-transmitting plate fixedly connected with the movable box is arranged above the irradiation lamps;

the light guide cylinder is fixedly connected with the movable box, the top thread of the light guide cylinder is sleeved with the mounting cylinder, the top thread of the mounting cylinder is sleeved with the execution cylinder, the light guide cylinder and the execution cylinder are fixedly connected with a plurality of lenses, and the mounting cylinder is fixedly connected with the exposure plate;

The execution sleeve is sleeved on the outer side of the execution cylinder, and the top end of the execution sleeve is fixedly connected with the second buffer ring;

The sliding ring is sleeved in the execution sleeve in a sliding manner, the bottom end of the sliding ring is fixedly connected with an adjusting ring fixedly connected with the execution cylinder, and one side of the adjusting ring is fixedly connected with a first spring fixedly connected with the execution sleeve;

One end of the bleeder tube is fixedly connected with the adjusting ring, one side of the adjusting ring is connected with a suction tube fixedly connected with the adjusting ring, and the other end of the suction tube is fixedly connected with a connecting tube connected with the raw material cavity;

Wherein, along with the movement of carriage, drive pressure sensor and execution cover removal for be close to each other between first buffer ring and the second buffer ring, squeeze the base plate, realize sealedly, the internal volume of second buffer ring reduces simultaneously, and pressure increase, after the second buffer ring reduces in volume, inside liquid flows through the bleeder tube, and at the time of follow-up resumes, draws pure water raw materials in the raw materials chamber through suction pipe and connecting pipe.

2. The improved Micro-LED chip manufacturing exposure system according to claim 1, wherein the preprocessing device comprises:

a replacement roller rotatably connected to one side of the camera bellows, the substrate being wound around the outside of the replacement roller;

The protective box is obliquely fixed on one side of the camera bellows, and a plurality of processing units are arranged in the protective box;

The feeding roller is rotationally connected with the cavity wall of the processing cavity, and one side of the feeding roller is provided with a heating and drying roller;

The flattening blowing mechanism is fixedly connected in the processing cavity, and the bottom of the processing cavity is fixedly connected with the material sucking mechanism.

3. The improved Micro-LED chip preparation exposure system according to claim 2, wherein one end of the feeding roller penetrates through the camera bellows to reach the power box, a raw material box connected with the feeding roller is arranged in the power box, a plurality of knife-coating knives are fixedly connected to the bottom of the leveling blowing mechanism, suction pumps positioned in the power box are connected to one sides of the leveling blowing mechanism and the suction mechanism, and a filtering mechanism is connected to the output end of the suction pump.

4. The improved Micro-LED chip manufacturing exposure system according to claim 1, wherein a stabilizing box is arranged on one side of the dark box, a plurality of heaters are connected to one side of the stabilizing box, a plurality of turning rollers are arranged on one side of the heaters, and the turning rollers are arranged side by side to form an arc-shaped structure.

5. The improved Micro-LED chip manufacturing exposure system of claim 1, wherein the first buffer ring and the second buffer ring each comprise a folding ring, inert gas is filled in the folding rings, a contact ring is fixedly connected to one side of each folding ring, and a plurality of sealing grooves are formed in one side of each contact ring.

6. The improved Micro-LED chip manufacturing exposure system of claim 1, wherein the kinetic energy mechanism comprises:

The motor is fixedly connected in the power box, and the output end of the motor is connected with a first gear lack;

The first driving wheel is in rotary connection with the power box, is in transmission connection with the first gear lack, is connected with a first gearbox in a meshed manner at the lower side of the first driving wheel, and is in transmission connection with a first driving wheel at the lower side of the first gearbox;

the intermediate shaft is fixedly sleeved with the first driving wheel, and the intermediate shaft is fixedly sleeved with a second gear-lack and a friction wheel;

The transmission wheel is in transmission connection with the second gear lack, a driven shaft is fixedly sleeved in the middle of the transmission wheel, and an extrusion wheel matched with the friction wheel is fixedly sleeved on the outer wall of the driven shaft;

the rotating wheel is fixedly connected with one end of a driven shaft, and the driven shaft is rotationally connected with the power box;

One end of the crank is rotationally connected with the rotating wheel, and the other end of the crank is rotationally connected with the sliding mechanism;

The second driving wheel is in rotary connection with the power box, is in transmission connection with the first gear lack, is in meshed connection with a second gearbox at the upper side, and is in transmission connection with a second driving wheel at the upper side of the second gearbox;

The grooved pulley mechanism is in transmission connection with the second driving wheel, and one side of the grooved pulley mechanism is connected with a receiving shaft connected with the receiving roller;

The sliding mechanism comprises first rod pieces which are symmetrically arranged, one of the first rod pieces is rotationally connected with the crank, one end of the other first rod piece is fixedly connected with a second spring which is fixedly connected with the power box, one end of each of the two first rod pieces is rotationally connected with a second rod piece, and the other end of each of the second rod pieces is rotationally connected with the exposure device;

The outer wall fixedly connected with a plurality of arc-shaped structure's of friction pulley extrusion piece, the extrusion piece adopts the metal material, the fixed friction plate that has cup jointed of outer wall of extrusion piece.

7. The improved Micro-LED chip manufacturing exposure system according to claim 6, wherein a leakage pipe is connected to the bottom of the camera bellows, a collecting box located below the camera bellows is connected to the other end of the leakage pipe, and a feeding pipe is connected to one side of the raw material cavity.

8. The improved Micro-LED chip manufacturing exposure system according to claim 7, wherein a jet plate is connected in the reinforcing cavity, a powder feeder positioned on the outer side is connected to one side of the jet plate, a third spring is fixedly connected to two sides of the reinforcing cavity, a sliding block is fixedly connected to the other end of the third spring, and an adjusting roller contacting with the substrate is rotatably connected between the two sliding blocks.