CN115547908B

CN115547908B - Loading system

Info

Publication number: CN115547908B
Application number: CN202211507867.7A
Authority: CN
Inventors: 葛敬昌; 鲍伟成; 祝佳辉; 薛增辉; 王文广; 张庆
Original assignee: Shanghai Guona Semiconductor Technology Co ltd; Zhejiang Kona Semiconductor Technology Co ltd
Current assignee: Shanghai Guona Semiconductor Technology Co ltd; Zhejiang Kona Semiconductor Technology Co ltd
Priority date: 2022-11-29
Filing date: 2022-11-29
Publication date: 2023-03-28
Anticipated expiration: 2042-11-29
Also published as: CN115547908A

Abstract

The invention discloses a loading system which comprises a fixed turnover mechanism, a lifting mechanism and a clamping mechanism, wherein the lifting mechanism is used for moving the fixed turnover mechanism to a turnover position corresponding to the clamping mechanism in the vertical direction. The fixed turnover mechanism is used for fixing the sheet material box and driving the sheet material box to turn over after reaching the turnover position, and the sheet material box is manually taken down the end cover and then placed on the fixed turnover mechanism. During the turning process of the sheet material box, the sheet materials in the sheet material box are turned over synchronously with the sheet materials, and the sheet materials and the sheet material box cannot move relatively during the synchronous turning process. The clamping mechanism is used for clamping the turned flaky materials and driving the flaky materials to move towards one side of the bottom wall far away from the base, so that the flaky materials can be conveniently grabbed by inserting the flaky fork into the base. The modular loading system realizes automatic loading of sheet materials and improves efficiency.

Description

Loading system

Technical Field

The invention relates to the field of wafer processing equipment, in particular to a loading system.

Background

In the later process of semiconductor, the wafer is divided into individual chips to prepare for the next chip package. Referring to fig. 1, the wafer is now covered with a thin film on its backside, and the thin film is supported by a wafer Frame, which we call "Frame", to form an integral sheet-like material. Multiple pieces of sheet material are usually loaded in a sheet material box (Frame box) which serves as a carrier for transportation. Referring to fig. 2, the sheet material box 200 includes a base 21 'with an opening at one end, an opening cover of the base 21' and an end cover 22', and the base 21' and the end cover 22 'are fixed by a lock 23'. Referring to fig. 3, the bottom wall and the side wall of the base 21 'are provided with slots 2' correspondingly arranged, one slot 2 'is inserted with a piece of flaky material 100, the flaky material 100 is inserted in the slot 2', and after the flaky material 100 is inserted, the end cover 22 'is covered on the base 21' to limit the flaky material between the base and the end cover.

After entering the semiconductor factory, the sheet material cassettes 200 are all handled manually. The sheet material box is manually carried to the position of the process platform, the end cover 22 'is taken down, and the sheet materials in the base 21' are transmitted to the material box used by the process platform one by one. In the process, the manual transmission brings uncertain risks to the product quality, the pollution of the sheet materials can be caused, and meanwhile, the manual transmission efficiency is in an extremely low state.

Disclosure of Invention

In order to overcome the defects, the invention aims to provide a loading system, which realizes automatic loading of sheet materials, improves the efficiency, reduces the contact between personnel and the sheet materials and reduces the pollution risk.

In order to achieve the above purposes, the invention adopts the technical scheme that: a loading system comprises a rack, wherein a loading window is formed in the rack; the turnover mechanism comprises a fixing turnover mechanism, the fixing turnover mechanism is arranged on one side of a rack, the fixing turnover mechanism comprises a fixing frame for placing a sheet material box, the sheet material box is fixed in the fixing frame, the fixing frame can be vertically overturned relative to the rack under the driving of a turnover device so as to switch the sheet material in the fixing frame between a vertical state and a horizontal state, a protection device capable of being synchronously overturned with the fixing frame is further arranged on the fixing frame, and the protection device can limit the sheet material in the sheet material box. The clamping mechanism is arranged on the rack and located between the fixed turnover mechanism and the loading window, and is used for clamping the sheet materials in a horizontal state and driving the sheet materials to move towards one side far away from the bottom wall of the sheet material box.

The invention has the beneficial effects that: after the sheet material box is fixed on the fixing frame, an end cover of the sheet material box is taken down by a worker, and at the moment, the sheet material inserted in the sheet material box is in a vertical state. For facilitating the piece fork to take and place the piece, the piece material box needs to be turned over by 90 degrees to enable the piece material to be in a horizontal state, and the opening of the piece material box faces the loading window at the moment. In the overturning process of the sheet material box, the protective device can ensure that the sheet material is always positioned in the sheet material box and cannot slide out of the sheet material box. After the slice material box overturned 90 degrees, the slice material was in the horizontality, and fixture clamp got the slice material of horizontality to drive the slice material and move towards the one side of keeping away from the diapire of slice material box, let the slice material break away from the slot on the slice material box promptly, so that the slice fork was got out in the slice material box was inserted to the slice fork. The loading system realizes automatic loading of the flaky materials, and greatly improves the efficiency.

Further, the fixing frame comprises a bottom plate and four side plates, a fixing cavity for placing the sheet material box is defined by the bottom plate and the four side plates, and the part of the sheet material extends out of the fixing cavity and the sheet material box. The fixed cavity realizes the placement of the sheet material box. The slice material guarantees that some are located outside fixed chamber and slice material box, provides space and position for fixture and protector's operation.

Furthermore, the fixing frame is also provided with a pressing component and an adsorption component which limit the sheet material box in the fixing cavity. The adsorption component comprises a vacuum chuck fixed on the bottom plate, and the vacuum chuck is abutted to the bottom wall of the flaky material box. The sucking disc adsorbs the diapire of slice material box, and the adsorption component is fixed slice material box in the vertical direction before the upset.

The compressing assembly comprises at least one compressing cylinder and a compressing block which is correspondingly arranged, the compressing cylinder is fixed on one side plate, the compressing block is connected with the compressing cylinder and can extend into the fixed cavity, and the compressing block is driven by the compressing cylinder to be close to or far away from the side wall of the sheet material box. The pressing assembly fixes the sheet material box in the horizontal plane before turning.

The adsorption component is matched with the compression component, the sheet material box is fixed from two vertical directions, the sheet material box is always fixed with the fixing frame in the overturning process, and relative movement cannot be generated in the overturning process.

Further, the protection device comprises two limiting rods, the limiting rods can move linearly or turn to be parallel to the bottom plate of the fixing frame and abut against the flaky materials, and the flaky materials are limited in the flaky material box at the moment. The limiting rod is turned over synchronously with the fixing frame in the limiting process, so that the flaky materials cannot generate relative displacement with the flaky material box in the limiting process, and the flaky materials cannot slide out of the flaky material box under the action of centrifugal force.

Further, the protection device further comprises a protection driving piece, and the protection driving piece can drive the two limiting rods to synchronously swing relative to the fixing frame. A protection driving piece can drive two gag lever post synchronous movement, and the space has rationally been utilized to the form of wobbling.

Further, the turnover device comprises a turnover driving piece and a base, the turnover driving piece is arranged on the base and connected with the fixing frame, the turnover driving piece drives the fixing frame to turn over up and down along the base, and the fixing frame changes the flaky materials in the flaky material box between a vertical state and a horizontal state in the turnover process.

The upset driving piece is the cylinder, and the upset driving piece is articulated with the base, and the piston rod of upset driving piece is articulated with the mount. In an initial state, a piston rod of the overturning driving piece is in an extending state, and at the moment, the overturning driving piece supports the fixing frame to enable the flaky materials in the flaky material box to be in a vertical state; when the piston rod of the overturning driving piece retracts, the fixing frame is driven to swing by 90 degrees, the sheet materials are in a horizontal state, and the opening of the sheet material box faces the clamping mechanism.

Further, the turnover device further comprises a limiting assembly, the limiting assembly comprises a limiting frame fixed on the base, the height of the limiting frame is adjustable, and the upper end of the limiting frame can be abutted to the fixing frame after turnover. The limiting frame ensures that the sheet materials in the sheet material box are in an appointed horizontal state after the fixing frame is turned over, and prevents the fixing frame from being too large in swing angle to cause the inclination of the sheet materials. The height of the limiting frame is adjustable, so that the swinging angle of the crystal fixing frame can be adjusted conveniently.

Furthermore, the lifting mechanism is arranged on the rack and can drive the fixed turnover mechanism to linearly reciprocate along the vertical direction of the rack. After the sheet material box is placed on the fixing frame, the position of the sheet material box does not correspond to the position of the clamping mechanism, so that the lifting mechanism is required to move the fixed turnover mechanism to the turnover position corresponding to the clamping mechanism in the vertical direction, and the position of the turned sheet material corresponds to the clamping mechanism in the height direction.

Further, the lifting device comprises a lifting driving piece and a lifting platform which moves up and down under the driving of the lifting driving piece, the base of the turnover device is fixed on the lifting platform, and the lifting driving piece is fixed on the rack.

Further, fixture includes clamping device and moves the material device, move the material device setting in the frame and be connected with clamping device, clamping device is used for the centre gripping slice material, move the material device and drive clamping device and the slice material of centre gripping and move towards the one side of keeping away from the diapire of slice material box. After the fixing frame is turned over, the sheet materials in the sheet material box are in a horizontal state, the sheet materials are clamped by the clamping devices at the moment, after clamping is completed, the material moving devices drive the clamping devices clamping the sheet materials to move towards one side far away from the fixing frame, and the sheet material box is fixed on the fixing frame, so that the sheet materials can move in the X direction of the horizontal plane relative to the sheet material box, the sheet materials are separated from the slots in the bottom wall of the sheet material box, and subsequent sheet forks are convenient to insert.

Further, the clamping device comprises two clamping assemblies capable of moving oppositely or back to back, clamping grooves corresponding to the slots in the sheet material box are formed in opposite surfaces of the two clamping assemblies, and the two clamping assemblies can move under the driving of the correspondingly arranged clamping driving pieces to be close to or far away from the sheet materials.

Move the material device including moving the material driving piece and moving the material support, two the centre gripping driving piece is all fixed on moving the material support, move the material driving piece and fix in the frame and drive and move the material support reciprocating motion between loading window and mount, clamping device sets up on moving the material support.

Further, the clamping assembly comprises a connecting block and a clamping block, the connecting block is fixedly connected with the clamping driving piece, the clamping block is arranged corresponding to the slot of the sheet material box, the clamping slot is formed in the clamping block, and the clamping block can slide along the connecting block to be close to or far away from the sheet material. Because the size of the sheet material may have tolerance, but the clamping driving member can only push the clamping groove to move for a fixed stroke, and the sheet material with different sizes cannot be stably clamped, the clamping block is set to move relative to the connecting block so as to adjust the distance between the corresponding clamping grooves.

Further, the clamping assembly further comprises a spring which is arranged corresponding to the clamping block, the spring pushes the clamping block to move towards one side far away from the connecting block, and when the clamping block clamps the sheet material, the spring is in a compressed state. The spring can provide the pressure that compresses tightly at the slice material edge for the grip block, improves clamping-force, guarantees that every slice material all is pressed from both sides tightly by the centre gripping subassembly.

Drawings

FIG. 1 is a schematic view of a sheet material;

fig. 2 is a schematic perspective view of a sheet material box;

FIG. 3 is a cross-sectional view of a sheet material cassette;

FIG. 4 is a schematic perspective view of an embodiment of the present invention;

FIG. 5 is a side view of an embodiment of the present invention;

fig. 6 is a schematic structural view of a sheet material box fixed in a fixing device in the embodiment of the invention;

FIG. 7 is a schematic perspective view of a fixing device according to an embodiment of the present invention;

FIG. 8 is a cross-sectional view of a fixation device in an embodiment of the present invention;

FIG. 9 is an enlarged view at A in FIG. 8;

FIG. 10 is a schematic view of a guard according to an embodiment of the present invention;

FIG. 11 is a side view of an embodiment of the invention with the gag lever post in a protected position;

FIG. 12 is a side view of an embodiment of the invention with the stop bar in a released position;

FIG. 13 is another angled side view of the spacing rod in the shielding position in accordance with an embodiment of the present invention;

FIG. 14 is a schematic perspective view of an exemplary embodiment of a flipping mechanism;

FIG. 15 is a side view of the flipping mechanism of the embodiment of the present invention before flipping over the holder;

FIG. 16 is a side view of the flipping mechanism of the embodiment of the present invention after flipping over the holder;

FIG. 17 is a schematic view showing a connection state of the lifting mechanism and the fixed turnover mechanism in the embodiment of the present invention;

FIG. 18 is a schematic structural diagram of a lifting mechanism according to an embodiment of the present invention;

FIG. 19 is a schematic perspective view of a clamping mechanism according to an embodiment of the present invention;

FIG. 20 is a cross-sectional view of a clamping assembly in an embodiment of the present invention;

fig. 21 is an enlarged view at B in fig. 20.

In the figure:

100. a sheet material; 200. a sheet material box; 21', a base; 22', an end cap; 23', a lock catch; 2', a slot; 300. a frame; 400. a lifting mechanism; 500. a clamping mechanism; 600. a fixing device; 700. a guard; 800. a turning device; 900. a piece fork;

11. a fixed mount; 111. a bottom positioning block; 112. a side positioning block; 113. a base plate; 114. a side plate; 1141. a yielding groove; 115. a second rotating shaft; 12. a compression assembly; 121. a pressing cylinder; 122. a compression block; 13. an adsorption component;

21. a limiting rod; 22. a guard drive; 23. connecting a bracket; 24. a first rotating shaft;

31. turning over the driving piece; 32. a base; 33. a limiting component; 331. a mounting frame; 332. an adjustment member;

41. a lifting drive member; 42. a lifting platform; 43. a vertical guide rail; 44. a buffer;

51. a clamping assembly; 511. connecting blocks; 5111. a chute; 512. a clamping block; 5121. a clamping groove; 513. a spring; 514. positioning the slide bar; 52. clamping the driving member; 53. a material moving bracket; 54. a material moving driving member; 55. a horizontal guide rail;

6. and a loading window.

Detailed Description

The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the invention easier to understand by those skilled in the art, and thus will clearly and clearly define the scope of the invention.

Referring to fig. 4 and 5, the loading system of the present invention includes a frame 300, a fixed turnover mechanism, a lifting mechanism 400 and a clamping mechanism 500, wherein the lifting mechanism 400 and the clamping mechanism 500 are fixed on the frame 300, and the fixed turnover mechanism is connected to the lifting mechanism 400 and can reciprocate linearly along the frame 300 in a vertical direction (Z direction) under the driving of the lifting mechanism 400.

The rack 300 is provided with a loading window 6, the fixed turnover mechanism and the clamping mechanism 500 are arranged at the same side of the loading window 6, and the clamping mechanism 500 is arranged between the fixed turnover mechanism and the loading window 6. The elevating mechanism 400 serves to move the fixed turnover mechanism in a vertical direction to a turnover position corresponding to the clamping mechanism 500. The fixed turnover mechanism is used for fixing the sheet material box 200 and driving the sheet material box 200 to turn over after reaching a turnover position, and the sheet material box 200 is placed on the fixed turnover mechanism after the end cover is manually taken down. During the turning process of the sheet material box 200, the sheet material 100 therein turns over synchronously with the same, and the sheet material 100 and the sheet material box 200 do not move relatively during the synchronous turning process, i.e. the sheet material 100 does not slide out of the sheet material box 200. The clamping mechanism 500 is used for clamping the turned sheet material 100 and driving the sheet material 100 to move towards the side far away from the bottom wall of the sheet material box 200, so that the sheet fork 900 is inserted into the base of the sheet material box 200 to grab the sheet material 100.

After the sheet material box 200 is fixed to the fixed turnover mechanism, the end cap of the sheet material box 200 is removed by a worker. At this time, the base of the sheet material box 200 is fixed on the fixed turnover mechanism, and the sheet material 100 inserted in the sheet material box 200 is in a vertical state. In order to facilitate the taking and placing of the piece by the piece fork 900, the piece material box 200 needs to be turned over by 90 degrees to enable the piece material 100 to be in a horizontal state, and at the moment, the opening of the piece material box 200 faces the loading window 6. In the overturning process of the fixed overturning mechanism, the sheet material 100 and the sheet material box 200 can not move relatively, that is, the sheet material 100 can not slide out of the sheet material box 200. After the sheet material box 200 is turned over by 90 degrees, the sheet material 100 is in a horizontal state, the clamping mechanism 500 clamps the sheet material 100 in the horizontal state and drives the sheet material 100 to move towards one side away from the bottom wall of the sheet material box 200, that is, the sheet material 100 is separated from the slot 2' on the sheet material box 200, so that the sheet fork 900 is inserted into the sheet material box 200 to take out the sheet material 100.

Referring to fig. 4 and 5, the fixing and overturning mechanism includes a fixing device 600, a protecting device 700, and an overturning device 800, the fixing device 600 is used for fixing the sheet material box 200, the fixing device 600 is connected with the overturning device 800, the fixing device 600 can be driven by the overturning device 800 to overturn up and down relative to the frame 300, the overturning device 800 is connected with the lifting mechanism 400, and the lifting mechanism 400 can drive the fixing device 600, the protecting device 700, and the overturning device 800 to lift synchronously. The turning angle of the fixing device 600 is 90 °, which ensures that the sheet material box 200 thereon and the sheet material 100 in the sheet material box 200 can be turned from a vertical state to a horizontal state. The protection device 700 is arranged on the fixing device 600 and overturns synchronously with the fixing device 600, and the protection device 700 is used for limiting the sheet materials 100 in the sheet material box 200, so that the sheet materials 100 cannot slide out of the sheet material box 200 in the overturning process of the sheet material box 200.

Referring to fig. 6, the fixing device 600 includes a fixing frame 11, the sheet material box 200 is embedded in the fixing frame 11, the fixing frame 11 includes a bottom plate 113 and four side plates 114, the bottom plate 113 and the four side plates 114 define a fixing cavity for placing the sheet material box 200, and one end of the fixing cavity has an opening for inserting the sheet material box 200. The bottom wall of the sheet material cassette 200 rests on the bottom panel 113 and the four side panels 114 define four side walls of the sheet material cassette 200 therein. When the sheet material box 200 is embedded in the fixing frame 11, a part of the sheet material 100 is located outside the fixing frame 11 and the sheet material box 200, i.e. extends out of the fixing cavity from the opening of the fixing frame 11.

In one embodiment, referring to fig. 7, in order to facilitate the initial positioning of the sheet material box 200 in the fixing frame 11, a bottom positioning block 111 located in the fixing cavity is further disposed on the bottom plate 113, and a positioning groove for the bottom wall to be clamped is defined between the bottom positioning block 111 and the bottom plate 113. When the sheet material box 200 is placed in the fixing frame 11, the bottom wall of the sheet material box 200 is just clamped into the positioning groove.

The four side panels 114 include two longer long side panels that are parallel and two shorter side panels that are parallel. Referring to fig. 7, the joint of one long side plate and two adjacent short side plates is provided with a side positioning block 112, the side positioning block 112 is L-shaped, and includes a first abutting portion fixed on the long side plate and a second abutting portion fixed on the adjacent short side plate, the joint of the first abutting portion and the second abutting portion is an arc-shaped structure, and the arc-shaped structure is the same as the structure of the joint of two adjacent side walls of the sheet material box 200.

The bottom positioning block 111 and the side positioning block 112 preliminarily position the position of the sheet material box 200 in the fixing frame 11, and ensure that the sheet material box 200 is just placed at a designated position.

Because the sheet material box 200 is to be turned over synchronously with the fixing frame 11, in order to improve the stability of the fixing frame 11 for fixing the sheet material box 200, as shown in fig. 6 and 8, the fixing frame 11 is further provided with a pressing assembly 12, and the pressing assembly 12 presses the sheet material box 200 on the side positioning block 112. The pressing assembly 12 comprises at least one pressing cylinder 121 and a pressing block 122 correspondingly arranged, the pressing cylinder 121 is fixed on the other long side plate, namely, the long side plate without the fixed side positioning block 112 is provided, the pressing block 122 is connected with the pressing cylinder 121 and can extend into the fixed cavity, the pressing block 122 can be driven by the pressing cylinder 121 to be close to or far away from the side wall of the sheet material box 200, so that the sheet material box 200 is clamped between the pressing block 122 and the side positioning block 112, and the pressing assembly 12 fixes the sheet material box 200 in the horizontal plane before being turned.

The hold-down assemblies 12 can also be arranged on the short side plates, and the sheet material cassette 200 can also be fixed in the horizontal plane before being turned over.

Certainly, the side positioning block 112 and the bottom positioning block 111 may not be provided, and the pressing assembly 12 directly presses the sheet material box 200 onto one side plate 114, as long as the fixing of the sheet material box 200 and the fixing frame 11 is ensured.

In one embodiment, in order to facilitate the sheet material box 200 to be placed in the fixed cavity, referring to fig. 9, the side plate 114 to which the pressing cylinder 121 is fixed is further provided with a recess 1141 communicating with the fixed cavity, and the pressing block 122 can be completely inserted into the recess 1141. When the sheet material box 200 needs to be placed in the fixing cavity, the pressing block 122 is embedded into the abdicating groove 1141, and at this time, the pressing block 122 does not protrude out of the side plate 114, so that the placing of the sheet material box 200 is not interfered. When the sheet material box 200 needs to be pressed, the pressing block 122 is driven by the pressing cylinder 121 to move and abut against the side wall of the sheet material box 200, so that the sheet material box 200 is pressed on the side positioning block 112.

The number of the pressing blocks 122 is two, and the two pressing blocks are arranged corresponding to the positions of the side positioning blocks 112, and the sheet material box 200 is clamped between the first abutting parts of the side positioning blocks 112 and the pressing blocks 122.

In one embodiment, referring to fig. 7, the base plate 113 is further provided with a suction assembly 13, and the suction assembly 13 includes at least one suction cup fixed on the base plate 113, the suction cup is a vacuum suction cup, and is connected with an external vacuum generating device. The sucking disc adsorbs the diapire of slice material box 200, and adsorption component 13 fixes slice material box 200 at the vertical direction before the upset.

The sucking disc is provided with two, sets up along the length direction interval of bottom plate 113, and is located the constant head tank to improve stability and the homogeneity to slice material box 200 is absorbent.

When the fixing device 600 is used for fixing the sheet material box 200, the bottom wall of the sheet material box 200 is embedded in the positioning groove. Then, the pressing cylinder 121 drives the pressing block 122 to move toward the side wall of the sheet material box 200, and the sheet material box 200 is clamped between the clamping block and the side positioning block 112. Next, the vacuum chuck on the bottom plate 113 is opened to fix the bottom wall of the sheet material cassette 200. The adsorption component 13 is matched with the compression component 12, the sheet material box 200 is fixed from two vertical directions, the sheet material box 200 is always fixed with the fixing frame 11 in the overturning process, and relative movement cannot be generated in the overturning process.

Referring to fig. 10, the protection device 700 is disposed on the fixing frame 11, and includes two limiting rods 21 capable of synchronously swinging relative to the fixing frame 11, the limiting rods 21 can swing toward the fixing frame 11 and swing to a position parallel to the bottom plate 113 of the fixing frame 11, at this time, the limiting rods 21 abut against the sheet material 100, and the sheet material 100 is limited in the sheet material box 200.

Referring to fig. 13, the limiting rod 21 can abut against the edge of the sheet material 100, and the limiting rod 21 applies a force F to the sheet material 100 toward the bottom plate 113 to prevent the sheet material 100 from sliding out of the sheet material box 200 when the sheet material box 200 is turned over. The flaky materials 100 form a regular octagonal structure, and the vertical distance between the two limiting rods 21 is smaller than the vertical distance between the two parallel edges of the flaky materials 100. When the limiting rod 21 swings to abut against the sheet material 100, the limiting rod 21 and the sheet material box 200 are located on two sides of the sheet material 100, the sheet material 100 is clamped between the limiting rod 21 and the sheet material box 200, and the limiting rod 21 compresses the sheet material 100 in the sheet material box 200. One limit of sheet material 100 and the diapire butt of sheet material box 200, two parallel edges are vertical sets up, extend along the Z promptly, and two vertical limits of sheet material 100 have the part to be located outside mount 11 and sheet material box 200. Before the fixed frame 11 is turned over, the bottom wall of the sheet material box 200 and the limiting rod 21 are positioned at the upper side and the lower side of two vertical edges of the sheet material 100. The limiting rod 21 can be abutted against all the sheet materials 100 in the sheet material box 200, so that the length of the limiting rod 21 is greater than the width of the sheet material box 200.

The limiting rod 21 is arranged to limit the sheet material 100, so that the sheet material 100 is prevented from sliding out of the sheet material box 200 under the action of centrifugal force in the synchronous overturning process of the sheet material box 200.

The swing angle of the limiting rod 21 is 90 °, in the process of turning the fixing frame 11, the limiting rod 21 is located at a position parallel to the bottom plate 113 of the fixing frame 11, the limiting rod 21 is located at a protection position for limiting the sheet material 100, and at this time, the position of the limiting rod 21 is shown in fig. 11 and 13; in other times, the limiting rod 21 is located at a position perpendicular to the fixing frame 11, and at this time, the limiting rod 21 is located at one side of the side plate 114 of the fixing frame 11, so that the picking and placing of the sheet material 100 are not interfered, and the limiting rod 21 is located at a releasing position, which is shown in fig. 12.

The protection device 700 further comprises a protection driving member 22, and the protection driving member 22 drives the two limiting rods 21 to synchronously swing. The two limiting rods 21 are jointly fixed on a connecting support 23, and the connecting support 23 is hinged with the fixing frame 11. The protection driving member 22 is connected with the connecting support 23, and the protection driving member 22 drives the connecting support 23 to swing so as to drive the two limiting rods 21 to swing.

In this embodiment, the protection driving member 22 is a cylinder, the protection driving member 22 is hinged to the fixing frame 11, and a piston rod of the protection driving member 22 is hinged to the connecting bracket 23. When the piston rod of the protection driving member 22 extends, the limiting rod 21 is pushed to swing towards the fixed frame 11 to a position parallel to the bottom plate 113 of the fixed frame 11. After the sheet material box 200 is turned over, the piston rod of the protective driving member 22 retracts to drive the limiting rod 21 to reset, the limiting rod 21 swings 90 degrees towards the loading window 6 to swing to a position perpendicular to the bottom plate 113 of the fixed frame 11, and the limiting rod 21 clamps the sheet material 100 for the clamping mechanism to move.

In an embodiment, the limiting rods 21 of the protection device 700 may not swing, and the two limiting rods 21 may be directly parallel to the bottom plate 113 and move back and forth or move relative to each other under the driving of the protection driving member 22, at this time, the protection driving member 22 may be a bidirectional cylinder and fixed on the fixing frame 11, and the two output ends of the protection driving member 22 are fixed to the limiting rods 21. The two limiting rods 21 can still abut against the sheet material 100, and the sheet material 100 is limited in the sheet material box 200. As long as the movement of the limiting rod 21 can limit the sheet material 100 in the sheet material box 200 and can give way when the sheet material 100 is taken out from the sheet material box 200.

Referring to fig. 10 and 12, the connecting bracket 23 is provided with a first rotating shaft 24, and the fixing frame 11 is provided with a first bearing seat for the first rotating shaft 24 to be inserted and rotated, so as to facilitate the flexible rotation of the connecting bracket 23. The first bearing block is fixed to the long side plate to which the side positioning block 112 is fixed. The stopper rod 21 rotates along the axis R1 of the first rotating shaft 24.

Referring to fig. 14, the turnover device 800 includes a turnover driving member 31 and a base 32, wherein the base 32 is mechanically connected to the lifting mechanism 400, the turnover driving member 31 is disposed on the base 32 and connected to the fixing frame 11, and the turnover driving member 31 drives the fixing frame 11 to turn up and down along the base 32.

The fixing frame 11 is hinged to the base 32 and can swing along the base 32, as shown in fig. 6 and 7, a second rotating shaft 115 is fixed on the fixing frame 11, and the base 32 is provided with a second bearing seat for the second rotating shaft 115 to insert and rotate, so as to facilitate flexible rotation of the fixing frame 11. The fixed frame 11 rotates around the axis R2 of the second rotating shaft 115. The turnover driving member 31 is a cylinder, the turnover driving member 31 is hinged to the base 32, and a piston rod of the turnover driving member 31 is hinged to the fixing frame 11.

Referring to fig. 15, in the initial state, the piston rod of the turnover driving member 31 is in an extended state, and at this time, the turnover driving member 31 supports the fixing frame 11, so that the sheet material 100 in the sheet material box 200 is in a vertical state; referring to fig. 16, when the piston rod of the turnover driving member 31 retracts, the fixed frame 11 is driven to swing 90 °, the sheet material 100 is in a horizontal state, and the opening of the sheet material box 200 faces the clamping mechanism 500.

In one embodiment, in order to ensure that the sheet material 100 in the sheet material box 200 is in a designated horizontal state after the fixing frame 11 is turned over, referring to fig. 14, the turning device 800 further includes a limiting component 33, and the limiting component 33 prevents the sheet material 100 from being inclined due to an excessively large swing angle of the fixing frame 11.

The limiting component 33 comprises a limiting frame fixed on the base 32, the height of the limiting frame is adjustable, and the upper end of the limiting frame can be abutted to the fixing frame 11 after being turned. Referring to fig. 15, the limiting frame comprises a mounting frame 331 and an adjusting member 332 capable of moving up and down along the mounting frame 331, and the height position of the adjusting member 332 can be adjusted. In this embodiment, the adjusting member 332 is a vertically disposed bolt, the bolt is screwed to the mounting frame 331, the upper end surface of the bolt can abut against the mounting frame 331, and the height position of the upper end surface of the bolt can be adjusted when the bolt is rotated.

Referring to fig. 14, the base 32 includes a fixing plate, two spaced vertical plates are fixed on an upper end surface of the fixing plate, the fixing frame 11 is located between the two vertical plates, and the second bearing seat is disposed on the vertical plates. The limiting frame is located in the middle of the fixing plate, can limit the fixing frame 11 from the middle of the fixing frame 11, and applies uniform force to the fixing frame 11. In order to satisfy the swing stroke of the fixing frame 11, the size of the turnover driving member 31 is larger, so that the lower end surface of the fixing plate extends downwards to form a connecting frame, and the shell of the turnover driving member 31 is hinged with the connecting frame.

Referring to fig. 17 and 18, the lifting mechanism 400 includes a lifting driving member 41 and a lifting platform 42 moving up and down by the lifting driving member 41, and the base 32 is fixed to the lifting platform 42 by a fixing member. The lifting driving member 41 is fixed on the frame 300, and may be an air cylinder, directly drives the lifting platform 42 to move up and down, or may be a lifting screw rod assembly, as long as the lifting platform 42 can be driven to move linearly in a reciprocating manner.

After the sheet material box 200 is fixed on the fixing frame 11, the lifting driving member 41 moves to drive the base 32 and the sheet material box 200 thereon to move up synchronously to reach the turning position corresponding to the clamping mechanism 500, and in the process, the sheet material 100 in the sheet material box 200 keeps a vertical state. After the sheet material box 200 reaches the position in the height direction, the protective driving member 22 drives the limiting rod 21 to swing towards the sheet material 100 until the limiting rod abuts against the sheet material 100, and the sheet material 100 is limited between the limiting rod 21 and the sheet material box 200. After the protection is finished, the piston rod of the turnover driving member 31 retracts to drive the fixed frame 11 and the sheet material box 200 thereon to synchronously turn over until the sheet material 100 in the sheet material box 200 is in a horizontal position.

In one embodiment, in order to improve the stability of the lifting platform 42, two vertical guide rails 43 are fixed on the fixed frame 11 for sliding the lifting platform 42, and the two vertical guide rails 43 are symmetrically arranged on two sides of the lifting driving member 41.

In one embodiment, in order to limit the distance that the lifting platform 42 moves upwards and decelerate the lifting platform 42 when moving to the extreme position, the fixed frame 11 is further provided with a buffer 44, and the buffer 44 is always positioned above the lifting platform 42 and can abut against the lifting platform 42. When the lifting driving member 41 drives the lifting platform 42 to move upwards to reach the turning position of the fixing frame 11, the lifting platform 42 is ensured to be fixed, and therefore a buffer 44 is provided for limiting the upward moving height of the lifting platform 42.

Referring to fig. 19, the clamping mechanism 500 includes a clamping device and a material moving device, the material moving device is disposed on the frame 300 and connected to the clamping device, the clamping device is used for clamping the sheet material 100, and the material moving device is used for driving the clamping device and the sheet material 100 clamped by the clamping device to move linearly and reciprocally in the X direction of the horizontal plane. After the fixing frame 11 is turned over, the sheet material 100 in the sheet material box 200 is in a horizontal state, the clamping device clamps the sheet material 100, after clamping is completed, the material moving device drives the clamping device clamping the sheet material 100 to move towards one side far away from the fixing frame 11, and the sheet material box 200 is fixed on the fixing frame 11, so that the sheet material 100 can move in the X direction of the horizontal plane relative to the sheet material box 200, and the sheet material 100 is separated from the slot 2' in the bottom wall of the sheet material box 200.

Referring to fig. 3, for the stability of the sheet material 100 in the transportation process, the slot 2' on the bottom wall of the sheet material box 200 is a V-shaped slot, and the edge of the sheet material 100 is embedded into the V-shaped slot, at this time, the V-shaped slot realizes the fixation of the edge of the sheet material 100. When picking and placing the sheet-like materials 100, the sheet fork 900 needs to enter the sheet-like material box 200 from the lower side of each sheet-like material 100, and then lift the sheet-like materials 100 for a certain distance and take out the sheet-like materials. However, if the sheet 100 is inserted into the V-shaped groove, there is almost no gap between the V-shaped groove and the wafer frame support of the sheet 100, i.e. there is no lifting space, and the forcible lifting of the sheet 100 by the fork 900 may cause the fork 900 to break. Therefore, a clamping mechanism 500 is arranged, the material moving device can drive the clamping device which clamps the sheet material 100 to move towards one side far away from the fixed frame 11, the sheet material 100 is separated from the V-shaped groove, and the sheet material 100 is located at a material waiting position where the sheet fork 900 takes the material.

Referring to fig. 19, the clamping device includes two clamping assemblies 51 capable of moving toward or away from each other, and the two clamping assemblies 51 are located on both sides of the sheet material 100 in the Y direction. The opposite surfaces of the two clamping assemblies 51 are provided with clamping grooves 5121 corresponding to the insertion grooves 2', that is, the number of the clamping grooves 5121 is the same as the maximum number of the sheet materials 100 capable of being inserted into the sheet material box 200. The two gripper assemblies 51 can be moved in the Y direction to approach or move away from the sheet material 100 by correspondingly arranged gripper drives 52. When the clamping assembly 51 moves relatively, the edge of the sheet material 100 can be inserted into the clamping groove 5121 at the corresponding position, so as to clamp the sheet material 100. The clamping assembly 51 can clamp the sheet material 100 on two vertical edges outside the fixed frame 11 and the sheet material box 200, and the clamping stability is high.

The clamping driving pieces 52 are fixed on the material moving device, the material moving device comprises a material moving driving piece 54 and a material moving support 53, the two clamping driving pieces 52 are fixed on the material moving support 53, and the material moving driving piece 54 is fixed on the rack 300 and drives the material moving support 53 to move back and forth along the X direction. The opening of the turned sheet material box 200 faces the X direction, and when the clamping device moves along the X direction, the clamped sheet material 100 is driven to be separated from the V-shaped groove.

Referring to fig. 20, the clamping assembly 51 includes a connection block 511 and a clamping block 512, the connection block 511 is fixedly connected to the clamping driving member 52, the clamping block 512 is disposed corresponding to the slot 2', and a clamping groove 5121 is formed on the clamping block 512. In one embodiment, the clamping block 512 is movable in the Y-direction relative to the connection block 511, such that the distance between the corresponding clamping grooves 5121 of the two clamping assemblies 51 is adjustable. Since there may be tolerance in the size of the sheet material 100, but the clamping driving member 52 can only push the clamping groove 5121 to move a fixed stroke, and thus stable clamping of the sheet material 100 with different sizes cannot be performed, the clamping block 512 is set to move relative to the connection block 511 to adjust the distance between the corresponding clamping grooves 5121.

Referring to fig. 21, the clamping assembly 51 further includes a spring 513 corresponding to the clamping block 512, the spring 513 pushes the clamping block 512 to move away from the connecting block 511, and when the clamping block 512 clamps the sheet material 100, the spring 513 is in a compressed state. The springs 513 allow the position of the clamping blocks 512 to be adaptive and provide a clamping force to the clamping blocks 512 to clamp the sheet materials 100, ensuring that each sheet material 100 is clamped by the clamping assembly 51.

Each clamping block 512 is fixed on one positioning slide bar 514, a sliding groove 5111 for the positioning slide bar 514 to slide is formed in the connecting block 511, and a limiting block of the sliding groove 5111 for preventing the positioning slide bar 514 from sliding out is fixed at one end, far away from the clamping block 512, of the positioning slide bar 514. The spring 513 is sleeved on the positioning sliding rod 514 between the connecting block 511 and the clamping block 512, one end of the spring 513 is abutted with the connecting block 511, and the other end is abutted with the clamping block 512.

In one embodiment, to improve the moving stability of the material moving support 53, a platform is fixed on the frame 300, and the platform is also provided with a horizontal guide rail 55 for moving the material moving support 53, and the horizontal guide rail 55 extends along the Y direction.

The clamping driving member 52 and the material moving driving member 54 are both one of an air cylinder or an electric cylinder, a piston rod of the clamping driving member 52 moves along the X direction, a piston rod of the material moving driving member 54 moves along the Y direction, and the moving directions of the piston rod of the clamping driving member 52 and the piston rod of the material moving driving member 54 are perpendicular.

After the overturning driving member 31 drives the whole fixing frame 11 to overturn, the sheet material 100 is located at a horizontal position, the protection driving member 22 drives the limiting rod 21 to swing towards one side far away from the fixing frame 11, namely, the limiting rod 21 resets and is not in contact with the sheet material 100, and the sheet material 100 is not limited. The clamp driving member 52 then drives the corresponding clamp assembly 51 to move towards the sheet material 100, and the sheet material 100 is clamped in the corresponding clamp groove 5121. After clamping, move material driving piece 54 and drive centre gripping subassembly 51 and move towards the one side of keeping away from slice material box 200, because slice material box 200 is fixed motionless, slice material 100 is held by centre gripping subassembly 51 and produces relative displacement with slice material box 200, breaks away from the V type groove. The sheet material 100 here only has to be moved over a distance of 5-10 mm. The blade fork 900 may extend into the sheet material box 200 from the loading window 6, lift the sheet material 100 upward and take it out of the sheet material box 200, completing the loading.

The invention also discloses a loading method of the sheet material box 200, which comprises the following steps:

firstly, the lifting mechanism 400 drives the fixed turnover mechanism to descend, the manual carrying sheet material box 200 is embedded in the fixed frame 11, the sheet material box 200 is fixed in two vertical directions through the pressing component 12 and the adsorption component 13 on the fixed frame 11, the end cover of the sheet material box 200 is taken out, and at the moment, the sheet material 100 in the sheet material box 200 is in a vertical state.

Then, the lifting mechanism 400 drives the fixing device 600, the protection device 700 and the turnover device 800 to move up synchronously until the sheet material box 200 reaches the turnover position corresponding to the clamping mechanism 500.

Then, the limiting rod 21 of the protection device 700 swings towards the sheet material box 200 relative to the fixing frame 11, and the limiting rod 21 is directly parallel to the bottom plate of the fixing frame 11 and is abutted against the sheet material 100, so that the sheet material 100 is limited between the sheet material box 200 and the limiting rod 21.

Then, the turnover device 800 drives the fixing device 600 and the protection device 700 to synchronously turn over until the sheet material 100 in the sheet material box 200 is in a horizontal state.

Then, the limiting rod 21 of the protection device 700 swings towards the side far away from the sheet material box 200, and the limiting rod 21 relieves the limitation on the sheet material 100.

Then the clamping device of the clamping mechanism 500 clamps and clamps the sheet material 100, and the material moving device of the clamping mechanism 500 drives the sheet material 100 to move towards the side far away from the sheet material box 200 until the sheet material 100 is separated from the slot 2' on the bottom wall of the sheet material box 200.

Finally, the sheet fork 900 extends into the wafer box from the loading window 6 of the rack 300, lifts the sheet material 100 upwards and takes out the sheet material from the sheet material box 200, and loading is completed.

The above embodiments are merely illustrative of the technical concept and features of the present invention, and the present invention is not limited thereto, and any equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.

Claims

1. A loading system, characterized by: comprises that

The device comprises a rack, a positioning device and a control device, wherein a loading window is formed in the rack;

the fixing turnover mechanism is arranged on one side of the rack and comprises a fixing frame for placing a sheet material box, the sheet material box is fixed in the fixing frame, the fixing frame can be driven by the turnover device to turn over up and down relative to the rack so as to switch the sheet material in the fixing frame between a vertical state and a horizontal state, the fixing frame is also provided with a protective device capable of synchronously turning over the fixing frame, and the protective device can limit the sheet material in the sheet material box;

the clamping mechanism is arranged on the rack and positioned between the fixed turnover mechanism and the loading window, and is used for clamping a horizontal sheet material and driving the sheet material to move towards one side far away from the bottom wall of the sheet material box, and the sheet material is separated from the slot on the bottom wall in the moving process so as to be convenient for a sheet fork to take the material;

fixture includes clamping device and moves the material device, move the material device setting in the frame and be connected with clamping device, clamping device is used for centre gripping slice material, clamping device includes two relative or the centre gripping subassembly of carrying on the back of the body removal of ability, two be provided with on the opposite face of centre gripping subassembly with the interior slot correspondence of slice material box set up the centre gripping groove, two the centre gripping subassembly can move under the centre gripping driving piece drive that corresponds the setting in order to be close to or keep away from slice material, move the slice material orientation that the material device drove clamping device and clamping device centre gripping and move towards one side of keeping away from the diapire of slice material box.

2. The loading system of claim 1, wherein: the fixing frame comprises a bottom plate and four side plates, a fixing cavity for placing the sheet material box is defined by the bottom plate and the four side plates, and the part of the sheet material extends out of the fixing cavity and the sheet material box.

3. The loading system of claim 2, wherein: the fixing frame is also provided with a pressing component and an adsorption component which limit the sheet material box in the fixing cavity;

the adsorption assembly comprises a vacuum sucker fixed on the bottom plate, and the vacuum sucker is abutted to the bottom wall of the sheet material box;

the pressing assembly comprises at least one pressing cylinder and a pressing block which is correspondingly arranged, the pressing cylinder is fixed on one side plate, the pressing block is connected with the pressing cylinder and can extend into the fixing cavity, and the pressing block is close to or far away from the side wall of the flaky material box under the driving of the pressing cylinder.

4. The loading system of claim 1, wherein: the protection device comprises two limiting rods, the limiting rods can move linearly or swing to a position parallel to the bottom plate of the fixing frame and abut against the flaky materials, and at the moment, the flaky materials are limited in the flaky material box.

5. The loading system of claim 4, wherein: the protection device further comprises a protection driving piece, and the protection driving piece can drive the two limiting rods to synchronously swing relative to the fixing frame.

6. The loading system of claim 1, wherein: the turnover device comprises a turnover driving piece and a base, wherein the turnover driving piece is arranged on the base and connected with the fixing frame, the fixing frame is driven by the turnover driving piece to turn over from top to bottom along the base, the fixing frame is arranged in the turnover process, and the flaky materials in the flaky material box are changed between a vertical state and a horizontal state.

7. The loading system of claim 6, wherein: the turnover device further comprises a limiting assembly, the limiting assembly comprises a limiting frame fixed on the base, the height of the limiting frame is adjustable, and the upper end of the limiting frame can be abutted to the fixing frame after turnover.

8. The loading system of any of claims 1-7, wherein: the lifting mechanism is arranged on the rack and can drive the fixed turnover mechanism to do linear reciprocating motion along the rack in the vertical direction.

9. The loading system of claim 8, wherein: the lifting mechanism comprises a lifting driving piece and a lifting platform which moves up and down under the driving of the lifting driving piece, the base of the turnover device is fixed on the lifting platform, and the lifting driving piece is fixed on the rack.

10. The loading system of claim 1, wherein: the material moving device comprises a material moving driving piece and a material moving support, the two clamping driving pieces are fixed on the material moving support, and the material moving driving piece is fixed on the rack and drives the material moving support to move back and forth between the loading window and the fixing frame.

11. The loading system of claim 10, wherein: the clamping assembly comprises a connecting block and a clamping block, the connecting block is fixedly connected with the clamping driving piece, the clamping block corresponds to the slot of the sheet material box, the clamping groove is formed in the clamping block, and the clamping block can slide along the connecting block to be close to or far away from the sheet material.

12. The loading system of claim 11, wherein: the clamping assembly further comprises a spring which is arranged corresponding to the clamping block, the spring pushes the clamping block to move towards one side away from the connecting block, and the spring is in a compression state when the clamping block clamps the flaky material.