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CN115598086B - Terahertz metamaterial biosensor for evaluating postoperative curative effect of glioma and application - Google Patents

Terahertz metamaterial biosensor for evaluating postoperative curative effect of glioma and application Download PDF

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CN115598086B
CN115598086B CN202211143191.8A CN202211143191A CN115598086B CN 115598086 B CN115598086 B CN 115598086B CN 202211143191 A CN202211143191 A CN 202211143191A CN 115598086 B CN115598086 B CN 115598086B
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terahertz metamaterial
glioma
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CN115598086A (en
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李珂
王青桐
张翼飞
薛皓
李刚
刘宏
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    • G01N21/3581Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G01N21/3586Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]

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Abstract

The invention belongs to the field of biomedical engineering, and relates to a terahertz metamaterial biosensor for evaluating the postoperative curative effect of glioma and application thereof. The terahertz metamaterial chip is arranged in a container for culturing cells; the terahertz metamaterial chip is a gold film in an array shape formed by a plurality of sensing units, and each row of sensing units are connected in series through connecting conductors; the sensing unit is of an inductance-capacitance resonator structure, a detection channel is formed between two electrodes of the inductance-capacitance resonator structure, and the detection channel is in a zigzag shape. The terahertz metamaterial biosensor provided by the invention can be used for rapidly, in-situ, label-free and destructive-free detection of proliferation inhibition and apoptosis promotion capability of tumor treatment simultaneously, so that the curative effect of auxiliary treatment is evaluated, and the establishment of an individual treatment scheme is guided.

Description

评估胶质瘤术后疗效的太赫兹超材料生物传感器及应用Terahertz metamaterial biosensor and its application for evaluating the efficacy of glioma surgery

技术领域Technical Field

本发明属于生物医学工程领域,涉及评估胶质瘤术后疗效的太赫兹超材料生物传感器及应用。The present invention belongs to the field of biomedical engineering and relates to a terahertz metamaterial biosensor for evaluating the efficacy of glioma surgery and its application.

背景技术Background Art

公开该背景技术部分的信息仅仅旨在增加对本发明的总体背景的理解,而不必然被视为承认或以任何形式暗示该信息构成已经成为本领域一般技术人员所公知的现有技术。The information disclosed in this background technology section is only intended to enhance the understanding of the overall background of the invention, and should not necessarily be regarded as an admission or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art.

由于胶质瘤细胞的高度异质性和侵袭性,导致个体间对同一辅助治疗(放疗、化疗等)的敏感性不同,从而使得辅助治疗的效果并不理想,因此,迫切需要快速准确的检测技术及方法来评估辅助治疗的疗效,以指导个体化治疗。Due to the high heterogeneity and invasiveness of glioma cells, individuals have different sensitivities to the same adjuvant therapy (radiotherapy, chemotherapy, etc.), resulting in unsatisfactory effects of adjuvant therapy. Therefore, there is an urgent need for rapid and accurate detection technologies and methods to evaluate the efficacy of adjuvant therapy in order to guide individualized treatment.

增殖和凋亡是评估辅助治疗疗效的两个最重要的肿瘤生物学特征。增殖是活细胞的分裂过程,状态变化不大,而凋亡是一种程序化的细胞死亡,有细胞萎缩、染色质固缩等现象。因此,细胞凋亡不仅改变了活细胞的数量,也改变了肿瘤细胞的介电常数。据发明人研究了解,现有的技术很难同时快速准确地检测肿瘤细胞的增殖和凋亡。Proliferation and apoptosis are the two most important tumor biological characteristics for evaluating the efficacy of adjuvant therapy. Proliferation is the division process of living cells, and the state does not change much, while apoptosis is a programmed cell death with phenomena such as cell atrophy and chromatin condensation. Therefore, cell apoptosis not only changes the number of living cells, but also changes the dielectric constant of tumor cells. According to the inventor's research, it is difficult to detect the proliferation and apoptosis of tumor cells simultaneously and quickly and accurately with existing technologies.

发明内容Summary of the invention

为了解决现有技术的不足,本发明的目的是提供评估胶质瘤术后疗效的太赫兹超材料生物传感器及应用,本发明提供的太赫兹超材料生物传感器能够快速、原位、无标签和无破坏性地同时评估肿瘤治疗的增殖抑制和凋亡促进能力,从而指导制定个体化辅助治疗方案。In order to address the deficiencies of the prior art, the purpose of the present invention is to provide a terahertz metamaterial biosensor and application for evaluating the postoperative efficacy of glioma. The terahertz metamaterial biosensor provided by the present invention can rapidly, in situ, label-free and non-destructively simultaneously evaluate the proliferation inhibition and apoptosis promotion abilities of tumor treatment, thereby guiding the formulation of individualized auxiliary treatment plans.

为了实现上述目的,本发明的技术方案为:In order to achieve the above object, the technical solution of the present invention is:

一方面,一种评估胶质瘤术后疗效的太赫兹超材料生物传感器,包括太赫兹超材料芯片,所述太赫兹超材料芯片设置在用于培养细胞的容器内;所述太赫兹超材料芯片为由若干传感单元形成阵列形状的金膜,每一行传感单元通过连接导体串联;所述传感单元为电感电容谐振器结构,所述电感电容谐振器结构的两电极之间形成检测通道,所述检测通道为曲折状。On the one hand, a terahertz metamaterial biosensor for evaluating the postoperative efficacy of glioma comprises a terahertz metamaterial chip, wherein the terahertz metamaterial chip is arranged in a container for culturing cells; the terahertz metamaterial chip is a gold film in an array shape formed by a plurality of sensing units, wherein each row of sensing units is connected in series through a connecting conductor; the sensing unit is an inductor-capacitor resonator structure, wherein a detection channel is formed between two electrodes of the inductor-capacitor resonator structure, and the detection channel is zigzag.

本发明采用金制备太赫兹超材料芯片,能够使形成的生物传感器在太赫兹频率下具有更好的生物相容性和低损耗的特性。在谐振频率下,电场被高度限制在电容器电极之间,因此该区域是能对外界环境的微小变化做出敏感响应的区域。该生物传感器在对胶质瘤细胞进行检测时,其谐振频率会随着的细胞的数量和状态的变化而变化,从而实现对细胞数量和状态的检测。本发明通过设置曲折状的检测通道,增加敏感区有效面积,从而增加检测的稳定性。The present invention uses gold to prepare a terahertz metamaterial chip, which can make the formed biosensor have better biocompatibility and low loss characteristics at terahertz frequencies. At the resonant frequency, the electric field is highly confined between the capacitor electrodes, so this area is a region that can respond sensitively to slight changes in the external environment. When the biosensor detects glioma cells, its resonant frequency will change with the changes in the number and state of the cells, thereby realizing the detection of the number and state of the cells. The present invention increases the effective area of the sensitive area by setting a tortuous detection channel, thereby increasing the stability of the detection.

另一方面,一种上述评估胶质瘤术后疗效的太赫兹超材料生物传感器的制备方法,包括如下制备太赫兹超材料芯片的过程:On the other hand, a method for preparing the above-mentioned terahertz metamaterial biosensor for evaluating the efficacy of glioma surgery includes the following process of preparing a terahertz metamaterial chip:

在衬底表面涂覆光刻胶层,将刻有与太赫兹超材料芯片相同图案的掩膜覆盖于光刻胶层表面,再进行紫外光刻,然后采用电子束蒸发法在紫外光刻后的模板上镀一层金膜,去除多余的光刻胶即得。A photoresist layer is coated on the surface of the substrate, and a mask engraved with the same pattern as the terahertz metamaterial chip is covered on the surface of the photoresist layer. UV lithography is then performed, and then a layer of gold film is plated on the template after UV lithography by electron beam evaporation, and the excess photoresist is removed.

第三方面,一种上述评估胶质瘤术后疗效的太赫兹超材料生物传感器在检测胶质瘤细胞的凋亡率中的应用。Thirdly, the application of the above-mentioned terahertz metamaterial biosensor for evaluating the postoperative efficacy of glioma in detecting the apoptosis rate of glioma cells.

第四方面,一种上述评估胶质瘤术后疗效的太赫兹超材料生物传感器在同时监测胶质瘤细胞的增殖和凋亡中的应用。Fourthly, a terahertz metamaterial biosensor for evaluating the efficacy of glioma surgery is used to simultaneously monitor the proliferation and apoptosis of glioma cells.

第五方面,一种上述评估胶质瘤术后疗效的太赫兹超材料生物传感器在评估辅助治疗疗效中的应用。A fifth aspect is the application of the above-mentioned terahertz metamaterial biosensor for evaluating the postoperative efficacy of glioma in evaluating the efficacy of adjuvant therapy.

本发明的有益效果为:The beneficial effects of the present invention are:

本发明采用叉指电容设计的超材料生物传感器,能够有效提高面积比,其谐振频率对细胞数量和状态变化引起介电常数的变化非常敏感。经过实验表明,各种活细胞和凋亡细胞组成的固定数量的胶质瘤细胞对太赫兹超材料生物传感器显示不同,揭示了不同细胞状态下的不同折射率。最后,在各种疗法下,结合基础生物学实验,不同数量的胶质瘤细胞在原位被表征出来。确定了活细胞、凋亡细胞数量与频移之间的关系,这相应地首次揭示了肿瘤细胞的增殖、凋亡率和频移之间的关系。因此,本发明可用于快速、原位、无标签和无破坏性地评估肿瘤治疗的增殖抑制和凋亡促进能力,从而指导胶质瘤个体化治疗。The metamaterial biosensor designed with interdigital capacitors in the present invention can effectively improve the area ratio, and its resonant frequency is very sensitive to changes in the dielectric constant caused by changes in the number and state of cells. Experiments have shown that a fixed number of glioma cells composed of various living cells and apoptotic cells show different responses to terahertz metamaterial biosensors, revealing different refractive indices in different cell states. Finally, under various therapies, combined with basic biological experiments, different numbers of glioma cells were characterized in situ. The relationship between the number of living cells, apoptotic cells and frequency shift was determined, which correspondingly revealed for the first time the relationship between tumor cell proliferation, apoptosis rate and frequency shift. Therefore, the present invention can be used to quickly, in situ, label-free and non-destructively evaluate the proliferation inhibition and apoptosis promotion capabilities of tumor treatments, thereby guiding personalized treatment of gliomas.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

构成本发明的一部分的说明书附图用来提供对本发明的进一步理解,本发明的示意性实施例及其说明用于解释本发明,并不构成对本发明的不当限定。The accompanying drawings in the specification, which constitute a part of the present invention, are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

图1为为本发明实施例的太赫兹超材料芯片的传感单元的结构;FIG1 is a structure of a sensing unit of a terahertz metamaterial chip according to an embodiment of the present invention;

图2为本发明实施例中太赫兹超材料芯片的制作流程示意图,Ⅰ、旋涂,在清洁的石英衬底上旋转涂覆光刻胶90秒,转速4000转/分,Ⅱ、紫外线光刻技术,超材料图案从掩膜板转移到衬底上,Ⅲ、显影,转移后的超材料图案会在显影液中显现出来,Ⅳ、蒸镀,用电子束蒸发法蒸发金薄膜;FIG2 is a schematic diagram of the manufacturing process of a terahertz metamaterial chip in an embodiment of the present invention, I. Spin coating, spin coating photoresist on a clean quartz substrate for 90 seconds at a speed of 4000 rpm, II. Ultraviolet lithography technology, transfer of metamaterial pattern from the mask to the substrate, III. Development, the transferred metamaterial pattern will appear in the developer, IV. Evaporation, evaporation of gold thin film by electron beam evaporation;

图3为本发明实施例中太赫兹超材料芯片的表征图,a、制备的生物传感器图像,b、集成聚二甲基硅氧烷(PDMS)细胞培养腔的超材料生物传感器,c、裸太赫兹超材料芯片,d、无PDMS空腔培养胶质瘤细胞的太赫兹超材料芯片,e、在PDMS空腔内培养胶质瘤细胞的太赫兹超材料芯片;FIG3 is a characterization diagram of a terahertz metamaterial chip in an embodiment of the present invention, a, an image of a prepared biosensor, b, a metamaterial biosensor with an integrated polydimethylsiloxane (PDMS) cell culture chamber, c, a bare terahertz metamaterial chip, d, a terahertz metamaterial chip with glioma cells cultured in a PDMS cavity, and e, a terahertz metamaterial chip with glioma cells cultured in a PDMS cavity;

图4,a、THz-FDS检测定量不同凋亡率的胶质瘤细胞示意图,b、c,生物传感器与3×104U251细胞分别经(b)TMZ和(c)IR培养48h后检测细胞凋亡的THz光谱,d,e,分别用(d)0、400、800、1600μM TMZ和(e)0、6、9、12Gy IR处理胶质瘤细胞48h后,流式细胞术检测胶质瘤细胞的代表性图像和凋亡率,f,g,EdU细胞增殖实验结果和(f)48h TMZ和(g)48h IR处理后U251胶质瘤细胞EdU阳性细胞%。EdU阳性细胞%定性预测增殖率,比例尺,200微米,数据用平均值±SD表示(n=3,**p<0.01;***p<0.001;****p<0.0001);Figure 4, a, schematic diagram of THz-FDS detection of glioma cells with different apoptosis rates, b, c, THz spectra of biosensor and 3×10 4 U251 cells after culturing with (b) TMZ and (c) IR for 48h to detect cell apoptosis, d, e, representative images and apoptosis rates of glioma cells detected by flow cytometry after glioma cells were treated with (d) 0, 400, 800, 1600μM TMZ and (e) 0, 6, 9, 12Gy IR for 48h, f, g, EdU cell proliferation assay results and EdU positive cell % of U251 glioma cells after (f) 48h TMZ and (g) 48h IR treatment. EdU positive cell % qualitatively predicts proliferation rate, scale bar, 200 μm, data are expressed as mean ± SD (n = 3, **p <0.01; ***p <0.001; ****p <0.0001);

图5为使用所提出的太赫兹超材料生物传感器检测治疗中的胶质瘤细胞的示意图;FIG5 is a schematic diagram of using the proposed terahertz metamaterial biosensor to detect glioma cells under treatment;

图6为本发明实施例中增殖实验的表征结果图,a、不同数量的U251细胞培养后在生物传感器上的图像(初始数量为n0,培养后数量为nc),b、定量可变U251细胞生物传感器的太赫兹光谱,c、Δf与细胞数n0和nc的关系;FIG6 is a graph showing the characterization results of the proliferation experiment in an embodiment of the present invention, a, images of different numbers of U251 cells after culture on the biosensor (the initial number is n 0 , and the number after culture is n c ), b, terahertz spectrum of the quantitative variable U251 cell biosensor, c, relationship between Δf and the number of cells n 0 and n c ;

图7为本发明实施例中不同辅助治疗方法治疗胶质瘤细胞的过程示意图;FIG7 is a schematic diagram of the process of treating glioma cells using different auxiliary treatment methods according to an embodiment of the present invention;

图8为本发明实施例中增殖、凋亡检测结果图,a-b、根据公式(4)在0、400、800和1600μM TMZ(a)处理和在0、6、9和12Gy IR(b)照射下U251胶质瘤活细胞和凋亡细胞数,n0=3×104U251细胞,c、测定TMZ作用下U251细胞的太赫兹透射率,d、TMZ处理下Δf凋亡细胞与活细胞数量间的关系,e、TMZ处理下Δf与增殖率、凋亡率间的关系,f、测量U251细胞在红外照射下的太赫兹透射率,g、IR处理下Δf凋亡细胞与活细胞数量间的关系,h、IR作用下UΔf与增殖率、凋亡率间的拟合关系,i、j分别为1600μM TMZ、120μM LOM、2μM ETO(IC50剂量)(i)和6Gy IR(j)处理48小时的U251、LN229和A172胶质瘤细胞系的Δf;FIG8 is a graph showing the detection results of proliferation and apoptosis in an embodiment of the present invention, ab, the number of live and apoptotic cells of U251 glioma under treatment with 0, 400, 800 and 1600 μM TMZ (a) and irradiation with 0, 6, 9 and 12 Gy IR (b) according to formula (4), n 0 =3×10 4 U251 cells, c, determination of the terahertz transmittance of U251 cells under the action of TMZ, d, the relationship between Δf apoptotic cells and the number of live cells under TMZ treatment, e, the relationship between Δf and the proliferation rate and apoptosis rate under TMZ treatment, f, measurement of the terahertz transmittance of U251 cells under infrared irradiation, g, the relationship between Δf apoptotic cells and the number of live cells under IR treatment, h, the fitting relationship between UΔf and the proliferation rate and apoptosis rate under IR, i and j are 1600 μM TMZ, 120 μM LOM, 2 μM ETO (IC50 dose) (i) and 6 Gy IR, respectively. Δf of U251, LN229, and A172 glioma cell lines treated with IR (j) for 48 h;

具体实施方式DETAILED DESCRIPTION

应该指出,以下详细说明都是示例性的,旨在对本发明提供进一步的说明。除非另有指明,本文使用的所有技术和科学术语具有与本发明所属技术领域的普通技术人员通常理解的相同含义。It should be noted that the following detailed descriptions are exemplary and are intended to provide further explanation of the present invention. Unless otherwise specified, all technical and scientific terms used herein have the same meanings as those commonly understood by those skilled in the art to which the present invention belongs.

需要注意的是,这里所使用的术语仅是为了描述具体实施方式,而非意图限制根据本发明的示例性实施方式。如在这里所使用的,除非上下文另外明确指出,否则单数形式也意图包括复数形式,此外,还应当理解的是,当在本说明书中使用术语“包含”和/或“包括”时,其指明存在特征、步骤、操作、器件、组件和/或它们的组合。It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and/or "including" are used in this specification, it indicates the presence of features, steps, operations, devices, components and/or combinations thereof.

鉴于现有技术难以同时快速准确地检测肿瘤细胞的增殖和凋亡,从而检测胶质瘤细胞对辅助治疗的敏感性,本发明提出了评估胶质瘤术后疗效的太赫兹超材料生物传感器及应用。In view of the fact that it is difficult to simultaneously and quickly and accurately detect the proliferation and apoptosis of tumor cells with the existing technology, and thus detect the sensitivity of glioma cells to adjuvant therapy, the present invention proposes a terahertz metamaterial biosensor and its application for evaluating the efficacy of glioma surgery.

本发明的一种典型实施方式,提供了一种评估胶质瘤术后疗效的太赫兹超材料生物传感器,包括太赫兹超材料芯片,所述太赫兹超材料芯片设置在用于培养细胞的容器内;所述太赫兹超材料芯片为由若干传感单元形成阵列形状的金膜,每一行传感单元通过连接导体串联;所述传感单元为电感电容谐振器结构,所述电感电容谐振器结构的两电极之间形成检测通道,所述检测通道为曲折状。研究表明,本发明提供的太赫兹超材料生物传感器能够确定活细胞、凋亡细胞数量与频移之间的关系,从而能够快速、原位、无标签和无破坏性地评估肿瘤治疗的增殖抑制和凋亡促进能力,且与基础生物学实验有良好的一致性。A typical embodiment of the present invention provides a terahertz metamaterial biosensor for evaluating the efficacy of glioma surgery, including a terahertz metamaterial chip, which is arranged in a container for culturing cells; the terahertz metamaterial chip is a gold film in an array shape formed by a plurality of sensing units, and each row of sensing units is connected in series through a connecting conductor; the sensing unit is an inductor-capacitor resonator structure, and a detection channel is formed between two electrodes of the inductor-capacitor resonator structure, and the detection channel is zigzag. Studies have shown that the terahertz metamaterial biosensor provided by the present invention can determine the relationship between the number of living cells, apoptotic cells and frequency shift, so that the proliferation inhibition and apoptosis promotion ability of tumor treatment can be evaluated quickly, in situ, label-free and non-destructively, and has good consistency with basic biological experiments.

本发明所述的曲折状,例如m形、z形、蛇形、波浪形等。本发明实施例采用m形检测通道进行验证,效果良好。The zigzag shape described in the present invention is, for example, an m-shape, a z-shape, a serpentine shape, a wave shape, etc. The embodiment of the present invention uses an m-shape detection channel for verification, and the effect is good.

在一些实施例中,太赫兹超材料芯片设置在石英基板表面。采用石英基板能够保证生物传感器的生物相容性和低损耗的特性。In some embodiments, the terahertz metamaterial chip is disposed on a surface of a quartz substrate. The use of a quartz substrate can ensure the biocompatibility and low-loss characteristics of the biosensor.

在一些实施例中,所述容器包括培养腔,所述太赫兹超材料芯片作为培养腔的底,所述培养腔的材质为聚二甲基硅氧烷(PDMS)。采用PDMS制成的培养腔,能够进一步提高细胞生长和分布的均匀性。In some embodiments, the container includes a culture chamber, the terahertz metamaterial chip serves as the bottom of the culture chamber, and the material of the culture chamber is polydimethylsiloxane (PDMS). The culture chamber made of PDMS can further improve the uniformity of cell growth and distribution.

在一些实施例中,每平方毫米的太赫兹超材料生物传感器上有150~250个传感单元。In some embodiments, there are 150 to 250 sensing units per square millimeter of the terahertz metamaterial biosensor.

在一些实施例中,谐振频率为370~380GHz。In some embodiments, the resonant frequency is 370-380 GHz.

在一些实施例中,金膜的厚度为80~120nm。In some embodiments, the thickness of the gold film is 80-120 nm.

本发明的另一种实施方式,提供了一种上述评估胶质瘤术后疗效的太赫兹超材料生物传感器的制备方法,包括如下制备太赫兹超材料芯片的过程:Another embodiment of the present invention provides a method for preparing the above-mentioned terahertz metamaterial biosensor for evaluating the efficacy of glioma surgery, including the following process of preparing a terahertz metamaterial chip:

在衬底表面涂覆光刻胶层,将刻有与太赫兹超材料芯片相同图案的掩膜覆盖于光刻胶层表面,再进行紫外光刻,然后采用电子束蒸发法在紫外光刻后的模板上镀一层金膜,去除多余的光刻胶即得。A photoresist layer is coated on the surface of the substrate, and a mask engraved with the same pattern as the terahertz metamaterial chip is covered on the surface of the photoresist layer. UV lithography is then performed, and then a layer of gold film is plated on the template after UV lithography by electron beam evaporation, and the excess photoresist is removed.

在一些实施例中,包括太赫兹超材料芯片与容器组装的过程,将太赫兹超材料芯片放置于容器底部上表面,然后将容器侧壁与容器底部粘结。In some embodiments, the process includes assembling the terahertz metamaterial chip and the container, placing the terahertz metamaterial chip on the upper surface of the bottom of the container, and then bonding the side wall of the container to the bottom of the container.

本发明的第三种实施方式,提供了一种上述评估胶质瘤术后疗效的太赫兹超材料生物传感器在检测胶质瘤细胞的凋亡率中的应用。A third embodiment of the present invention provides an application of the above-mentioned terahertz metamaterial biosensor for evaluating the postoperative efficacy of glioma in detecting the apoptosis rate of glioma cells.

例如在制备或构建检测胶质瘤细胞的凋亡率的系统中的应用。For example, the application in preparing or constructing a system for detecting the apoptosis rate of glioma cells.

本发明的第四种实施方式,提供了一种上述评估胶质瘤术后疗效的太赫兹超材料生物传感器在同时监测胶质瘤细胞的增殖和凋亡中的应用。A fourth embodiment of the present invention provides an application of the above-mentioned terahertz metamaterial biosensor for evaluating the efficacy of glioma surgery in simultaneously monitoring the proliferation and apoptosis of glioma cells.

例如在制备或构建同时监测胶质瘤细胞的增殖和凋亡的系统中的应用。For example, the application in preparing or constructing a system for simultaneously monitoring the proliferation and apoptosis of glioma cells.

本发明的第五种实施方式,提供了一种上述评估胶质瘤术后疗效的太赫兹超材料生物传感器在评估辅助治疗疗效中的应用。A fifth embodiment of the present invention provides an application of the above-mentioned terahertz metamaterial biosensor for evaluating the postoperative efficacy of glioma in evaluating the efficacy of adjuvant therapy.

例如在制备或构建评估辅助治疗疗效的系统中的应用。For example, the application in the preparation or construction of a system for evaluating the efficacy of adjuvant therapy.

评估辅助治疗疗效优选为评估辅助治疗胶质瘤疗效。The evaluation of the efficacy of adjuvant therapy is preferably the evaluation of the efficacy of adjuvant therapy for glioma.

本发明所述的应用,可以是疾病的诊断与治疗为目的,也可以以非疾病的诊断与治疗为目的。以非疾病的诊断与治疗为目的中,例如对胶质瘤细胞的增殖和凋亡的科学研究。The application of the present invention may be for the purpose of diagnosis and treatment of diseases or for the purpose of diagnosis and treatment of non-diseases. For the purpose of diagnosis and treatment of non-diseases, for example, scientific research on the proliferation and apoptosis of glioma cells.

为了使得本领域技术人员能够更加清楚地了解本发明的技术方案,以下将结合具体的实施例详细说明本发明的技术方案。In order to enable those skilled in the art to more clearly understand the technical solution of the present invention, the technical solution of the present invention will be described in detail below in conjunction with specific embodiments.

实施例Example

太赫兹超材料生物传感器的设计:Design of Terahertz Metamaterial Biosensor:

本实施例的太赫兹超材料芯片周期性的电感电容耦合谐振器组成。采用HFSS和有限元方法对所设计的超材料生物传感器进行了仿真和优化。采用周期边界,即完美电导体(PEC)和完美磁导体(PMC)进行模拟。The terahertz metamaterial chip of this embodiment is composed of periodic inductive and capacitive coupled resonators. The designed metamaterial biosensor is simulated and optimized using HFSS and finite element method. Periodic boundaries, namely perfect electric conductors (PECs) and perfect magnetic conductors (PMCs), are used for simulation.

太赫兹超材料芯片的传感单元如图1a所示。The sensing unit of the terahertz metamaterial chip is shown in Figure 1a.

太赫兹超材料芯片的制作流程,如图2所示。The production process of terahertz metamaterial chip is shown in Figure 2.

首先,用迪康溶液、去离子水、丙酮、乙醇清洗石英衬底并用氮气枪将其吹干;然后将清洁干燥的石英转移并固定在旋涂仪上,在表面旋涂厚度大约1μm的AR-P 5350光刻胶层;将涂有光刻胶的石英片放在热板上110℃烘烤3分钟至光刻胶完全烤干;将刻有与太赫兹超材料芯片相同图案的掩膜板和烘干的石英片都固定到紫外光刻机,进行7秒钟紫外光刻后,在石英片的光刻胶层就形成了所需要的图案;从紫外光刻机上取下石英片,放入5350显影液浸泡20秒,取出后在去离子水里浸泡1分钟来去除表面残留的显影液后,用氮气枪轻轻吹干,显微镜下观察形貌是否完整;然后采用电子束蒸发法在有完整形貌的石英片上镀一层100nm厚的金膜;丙酮剥离掉剩余的光刻胶,得到完整的超材料金属图案,器件制备完。First, the quartz substrate was cleaned with Decon solution, deionized water, acetone, and ethanol and dried with a nitrogen gun; then the clean and dry quartz was transferred and fixed on a spin coater, and AR-P with a thickness of about 1 μm was spin-coated on the surface. 5350 photoresist layer; place the quartz wafer coated with photoresist on a hot plate and bake at 110℃ for 3 minutes until the photoresist is completely dried; fix the mask plate engraved with the same pattern as the terahertz metamaterial chip and the dried quartz wafer to the UV lithography machine, and after 7 seconds of UV lithography, the required pattern is formed on the photoresist layer of the quartz wafer; remove the quartz wafer from the UV lithography machine, put it into 5350 developer and soak it for 20 seconds, take it out and soak it in deionized water for 1 minute to remove the residual developer on the surface, then blow it dry with a nitrogen gun, and observe whether the morphology is complete under a microscope; then use electron beam evaporation to plate a 100nm thick gold film on the quartz wafer with complete morphology; use acetone to strip off the remaining photoresist to obtain a complete metamaterial metal pattern, and the device is prepared.

PDMS腔体制备:PDMS cavity preparation:

PDMS溶液和固化剂购自道康宁。将PDMS溶液与固化剂按10:1的质量比混合。然后,用真空烘箱去除气泡30分钟。在将混合溶液倒入模具之前,在模具表面喷洒脱模剂,以便于PDMS腔体取出。在70℃的热板上烘烤120分钟后,将PDMS腔体从模具中取出。PDMS solution and curing agent were purchased from Dow Corning. PDMS solution and curing agent were mixed at a mass ratio of 10:1. Then, bubbles were removed in a vacuum oven for 30 minutes. Before pouring the mixed solution into the mold, a release agent was sprayed on the mold surface to facilitate the removal of the PDMS cavity. After baking on a hot plate at 70 °C for 120 minutes, the PDMS cavity was removed from the mold.

将太赫兹超材料芯片与PDMS腔体组装如图3b所示。The terahertz metamaterial chip and the PDMS cavity are assembled as shown in Figure 3b.

太赫兹检测:Terahertz detection:

用Toptica THz-FDS TeraScan 1550对带或不带胶质瘤细胞的超材料芯片进行表征,如图7所示。在THz测试前,用磷酸盐缓冲盐水(PBS)冲洗MTMs 90秒,然后在氮气流下轻轻吹干60秒。每个样品的无标签测试耗时5分钟。Metamaterial chips with or without glioma cells were characterized using Toptica THz-FDS TeraScan 1550, as shown in Figure 7. Before THz testing, the MTMs were rinsed with phosphate-buffered saline (PBS) for 90 seconds and then gently blown dry under a stream of nitrogen for 60 seconds. The label-free test took 5 minutes for each sample.

表征结果:Characterization results:

太赫兹超材料生物传感器:Terahertz metamaterial biosensors:

图5显示了使用该生物传感器对胶质瘤细胞的检测。可以看出,随着细胞数量和状态的变化,超材料生物传感器的谐振频率也会发生变化。通常情况下,基于平行板电容的电感电容耦合谐振器的谐振频率为Figure 5 shows the detection of glioma cells using the biosensor. It can be seen that the resonant frequency of the metamaterial biosensor changes with the change of cell number and state. Generally, the resonant frequency of the inductive-capacitive coupled resonator based on parallel plate capacitors is

其中L和C分别是等效电感和电容。在谐振频率下,电场被高度限制在电容器电极之间,以达到高灵敏度在理论上,C对电容电极之间的介电常数ε很敏感,并根据公式(1)ε操纵谐振频率f0,这是提出的生物传感器的关键物理机制。where L and C are the equivalent inductance and capacitance, respectively. At the resonant frequency, the electric field is highly confined between the capacitor electrodes to achieve high sensitivity. In theory, C is sensitive to the dielectric constant ε between the capacitor electrodes and manipulates the resonant frequency f 0 according to formula (1), which is the key physical mechanism of the proposed biosensor.

图3a展示了含有若干超材料单元的生物传感器。为了进一步提高细胞生长和分布的均匀性,设计了一个带有聚二甲基硅氧烷(PDMS)的培养腔,并集成到MTM生物传感器上,如图3b所示。图3c-e是超材料芯片的显微镜下图像,细胞在有和没有PDMS腔的超材料芯片表面培养。很明显,PDMS腔使胶质瘤细胞分布更均匀。Figure 3a shows a biosensor containing several metamaterial units. To further improve the uniformity of cell growth and distribution, a culture chamber with polydimethylsiloxane (PDMS) was designed and integrated into the MTM biosensor, as shown in Figure 3b. Figures 3c-e are microscope images of the metamaterial chip, with cells cultured on the surface of the metamaterial chip with and without the PDMS chamber. It is clear that the PDMS chamber makes the glioma cells more evenly distributed.

增殖检测:Proliferation assay:

将48小时辅助治疗下的胶质瘤细胞增殖和凋亡率分别定义为ηp和ηa。48小时是"生物材料和实验方法"中标准生物测定的建议时间。因此,培养后的活细胞和凋亡细胞的数量可以估计为The proliferation and apoptosis rates of glioma cells under 48 h adjuvant therapy were defined as η p and η a , respectively. 48 h is the recommended time for standard bioassays in "Biological Materials and Experimental Methods". Therefore, the number of viable cells and apoptotic cells after culture can be estimated as

nl=n0×(1+ηpa)和na=n0×ηa, (4)n l =n 0 ×(1+n p -n a ) and n a =n 0 ×n a , (4)

n0为初始细胞量。在没有辅助治疗的情况下ηp大约是一个固定的数值,在治疗的情况下被抑制,在没有治疗的情况下ηa通常是百分之几,在治疗的情况下显著提高。本实施例以U251细胞系为例,研究THz MTMs对胶质瘤细胞的检测。通过细胞计数法和流式细胞术分别可以得到总细胞数nc和凋亡率ηa,增殖率ηp由nc和ηa根据式(4)得到,并用EdU细胞增殖试验得到的相对增殖率来验证。 n0 is the initial cell amount. In the absence of adjuvant therapy, ηp is approximately a fixed value, which is suppressed in the case of treatment. In the absence of treatment, ηa is usually a few percent, which is significantly improved in the case of treatment. This embodiment takes the U251 cell line as an example to study the detection of glioma cells by THz MTMs. The total cell number nc and the apoptosis rate ηa can be obtained by cell counting and flow cytometry, respectively. The proliferation rate ηp is obtained by nc and ηa according to formula (4), and is verified by the relative proliferation rate obtained by the EdU cell proliferation test.

首先,将不同浓度的U251细胞200-μl悬液置于带PDMS空腔的生物传感器上培养8小时,其分布如图6a所示。然后,用THz-FDS对细胞生物传感器进行表征。图6b描述了不同初始数n0的特征透射率,图6c描述了Δf与细胞数的关系。随着从0增加到6×104cell,谐振频率逐渐向低频偏移。考虑到胶质瘤细胞在8小时内的增殖和凋亡情况,在相同培养条件下,用标准生物学方法测定48小时后胶质瘤细胞的增殖和凋亡率。活细胞数估计为nl=n0×(1+ηp-ηa)(8/48),nc大约等于nl,由于8h后凋亡率可以忽略不计(小于0.7%)。在这种情况下,Δf和细胞数的拟线性公式可以分别拟合为Δf=14.21×n0和Δf=12.36×nl。另外两种胶质瘤细胞系的实验数据见表1,趋势一致。First, a 200-μl suspension of U251 cells with different concentrations was placed on a biosensor with a PDMS cavity and cultured for 8 h, and its distribution is shown in Figure 6a. Then, the cell biosensor was characterized by THz-FDS. Figure 6b describes the characteristic transmittance for different initial numbers n 0 , and Figure 6c describes the relationship between Δf and the number of cells. As the number increases from 0 to 6×10 4 cell, the resonance frequency gradually shifts to low frequencies. Considering the proliferation and apoptosis of glioma cells within 8 h, the proliferation and apoptosis rates of glioma cells after 48 h were determined by standard biological methods under the same culture conditions. The number of viable cells was estimated to be n l =n 0 ×(1+η p -ηa) (8/48) , and n c was approximately equal to n l , because the apoptosis rate after 8 h was negligible (less than 0.7%). In this case, the quasi-linear formulas for Δf and cell number can be fitted as Δf = 14.21×n 0 and Δf = 12.36×n l , respectively. The experimental data of the other two glioma cell lines are shown in Table 1 , showing the same trend.

不同斜率的拟合关系在一定程度上反映了不同胶质瘤细胞系的细胞体积和增殖率。在Δf和nc的关系中,A172细胞系的斜率大于LN229,说明A172胶质瘤细胞比LN229细胞更大,增殖速度更快。The fitting relationships with different slopes reflect the cell volume and proliferation rate of different glioma cell lines to a certain extent. In the relationship between Δf and n c , the slope of the A172 cell line is greater than that of LN229, indicating that A172 glioma cells are larger and proliferate faster than LN229 cells.

表1 未治疗的太赫兹超材料生物传感器培养8小时胶质瘤细胞的检测Table 1 Detection of untreated glioma cells cultured for 8 hours by terahertz metamaterial biosensor

细胞凋亡检测:Apoptosis detection:

为了研究凋亡细胞的影响,用MTM生物传感器检测了四组在不同治疗条件下培养的3×104U251细胞,这些细胞由不同数量的活细胞和凋亡细胞组成。如图4a所示,将处理48h后从培养板消化的细胞标准化,得到3×104细胞,在生物传感器上再培养5小时,获得良好的粘附,然后用THz-FDS对细胞进行表征。透光率特征见图4b、c。流式细胞仪测得在TMZ和放疗处理下的凋亡率,分别见图4d、e。由于治疗剂量的增加,随着细胞凋亡增强,Δf逐渐降低。这说明凋亡细胞的折射率比活细胞小。但是,活细胞数量的减少也导致更小的Δf,这意味着Δf不能和na直接相关。此外,在消化和再植过程中,凋亡细胞可能会崩溃,活细胞可能会增殖,这给该方法带来了额外的误差。To investigate the effect of apoptotic cells, four groups of 3×10 4 U251 cells cultured under different treatment conditions, consisting of different numbers of live and apoptotic cells, were tested using the MTM biosensor. As shown in Figure 4a, the cells digested from the culture plate after 48 h of treatment were normalized to obtain 3×10 4 cells, which were cultured on the biosensor for another 5 h to obtain good adhesion and then characterized by THz-FDS. The transmittance characteristics are shown in Figure 4b, c. The apoptosis rate under TMZ and radiotherapy treatments was measured by flow cytometry, as shown in Figure 4d, e, respectively. Due to the increase in treatment dose, Δf gradually decreased as cell apoptosis increased. This indicates that the refractive index of apoptotic cells is smaller than that of live cells. However, the reduction in the number of live cells also leads to a smaller Δf, which means that Δf cannot be directly related to n a . In addition, during the digestion and replantation process, apoptotic cells may collapse and live cells may proliferate, which introduces additional errors to the method.

增殖、凋亡检测:Proliferation and apoptosis detection:

如图7所示,3×104胶质瘤细胞在生物传感器上培养48小时后,采用THz-FDS直接测量。作为参照组,3×104(b0)胶质瘤细胞在相同治疗条件下于48孔板中培养,用细胞计数器计算肿瘤细胞总数(nc),ηp可根据上一步得到的式(4)计算。计算得到的nl,nap,和ηa如图8a,b和表3所示,显示出良好的增殖抑制和凋亡促进能力。计算得到的增殖率与图4f、g中的EdU细胞增殖实验结果趋势一致。U251细胞在TMZ和IR处理下的特征透射率如图8c、f所示。可以看出,随着处理剂量的增加,随着活细胞数量的减少、凋亡细胞数量的增加以及总细胞数量的减少,其Δf呈下降趋势,如图8a、b所示。根据细胞计数和生物实验,在图8d、g中绘制了不同处理下Δf与nl、na的关系。可以得到关系曲线的拟合公式Δf=A1×nl+A2×na+A3,其中A1,A2和A3为常数。Δf与ηp和ηa的关系可以拟合为Δf=B1×ηp+B2×ηa+B2,其中B1,B2和B3也是常数(图8e、h)。因此,只要Δf是用太赫兹MTMs表征,ηp和ηa就可以得到与之相拟合的关系。对其他胶质瘤细胞系在各种辅助治疗下的关系,如表3、4所示,也发现了类似的现象。这是THz MTMs首次被证明可以同时检测肿瘤细胞的凋亡和增殖率。As shown in Figure 7, 3×10 4 glioma cells were cultured on the biosensor for 48 hours and then directly measured by THz-FDS. As a reference group, 3×10 4 (b 0 ) glioma cells were cultured in a 48-well plate under the same treatment conditions, and the total number of tumor cells (n c ) was calculated using a cell counter. η p can be calculated according to formula (4) obtained in the previous step. The calculated n l , n a , η p , and η a are shown in Figure 8a, b and Table 3, showing good proliferation inhibition and apoptosis promotion capabilities. The calculated proliferation rate is consistent with the trend of the EdU cell proliferation experiment results in Figure 4f, g. The characteristic transmittance of U251 cells under TMZ and IR treatment is shown in Figure 8c, f. It can be seen that with the increase of the treatment dose, the number of live cells decreases, the number of apoptotic cells increases, and the number of total cells decreases, and its Δf shows a downward trend, as shown in Figure 8a, b. According to cell counting and biological experiments, the relationship between Δf and n l and n a under different treatments is plotted in Figure 8d, g. The fitting formula of the relationship curve can be obtained as Δf = A 1 × n l + A 2 × n a + A 3 , where A 1 , A 2 and A 3 are constants. The relationship between Δf and η p and η a can be fitted as Δf = B 1 × η p + B 2 × η a + B 2 , where B 1 , B 2 and B 3 are also constants (Figure 8e, h). Therefore, as long as Δf is characterized by terahertz MTMs, η p and η a can be fitted with it. Similar phenomena were also found for other glioma cell lines under various adjuvant therapies, as shown in Tables 3 and 4. This is the first time that THz MTMs have been shown to simultaneously detect apoptosis and proliferation rates of tumor cells.

表2 不同辅助治疗下培养48h胶质瘤细胞的THz MTMs检测Table 2 THz MTMs detection of glioma cells cultured for 48 h under different adjuvant treatments

表3 不同辅助治疗下三种细胞系Δf、nl和na的关系Table 3 Relationship between Δf, n l and n a of three cell lines under different adjuvant treatments

Δf:谐振频移;nl:活胶质瘤细胞数量;na:凋亡胶质瘤细胞数量。Δf: resonance frequency shift; n l : number of living glioma cells; na : number of apoptotic glioma cells.

表4 不同辅助治疗下三种细胞系Δf、ηp和ηa的关系Table 4 Relationship between Δf, ηp and ηa of three cell lines under different adjuvant treatments

Δf:谐振频移;nl:活胶质瘤细胞数量;na:凋亡胶质瘤细胞数量。Δf: resonance frequency shift; n l : number of living glioma cells; na : number of apoptotic glioma cells.

总之,治疗下由活细胞和凋亡细胞诱导的太赫兹MTMs的频率偏移可以用于原位、准确、快速和无标记地评估辅助治疗疗效。Δf越小,疗效越好。U251、LN229和A172细胞在三种药物IC50剂量和临床常用放疗剂量下的对应Δf情况如图8i,j所示。注意,Δf不只是单个生物指标(增殖或凋亡)的疗效指标,而是联合响应的疗效指标。在不添加任何标记的情况下,每次实验仅需5分钟,比流式细胞术短24倍,比EdU细胞增殖法短60倍。因此,该方法能够很好地检测各种治疗方法下肿瘤细胞的增殖和凋亡特征,并有可能指导外科医生制定胶质瘤患者的个性化治疗方案。In summary, the frequency shift of terahertz MTMs induced by living cells and apoptotic cells under treatment can be used to evaluate the efficacy of adjuvant therapy in situ, accurately, quickly and label-free. The smaller the Δf, the better the efficacy. The corresponding Δf of U251, LN229 and A172 cells at the IC50 doses of three drugs and the commonly used radiotherapy doses in clinical practice are shown in Figure 8i,j. Note that Δf is not just an efficacy indicator of a single biological indicator (proliferation or apoptosis), but an efficacy indicator of the combined response. Without adding any labels, each experiment takes only 5 minutes, which is 24 times shorter than flow cytometry and 60 times shorter than EdU cell proliferation method. Therefore, this method can well detect the proliferation and apoptosis characteristics of tumor cells under various treatment methods, and has the potential to guide surgeons to develop personalized treatment plans for glioma patients.

结论,本发明提出了一种新的太赫兹超材料方法来同时监测胶质瘤细胞的增殖和凋亡,并评估辅助治疗的疗效。首先,本发明证明了特征频移Δf是胶质瘤细胞数量变化和状态变化的综合响应。然后,通过生物学实验,拟合活细胞和凋亡细胞数量与Δf之间的关系,同时揭示增殖率和凋亡率与Δf之间的关系。在治疗条件下,Δf,nl和na之间的关系拟合为Δf=A1×nl+A2×na+A3。对应的,Δf与ηp和ηa的关系可以拟合为Δf=B1×ηp+B2×ηa+B3。因此,该方法可以同时监测胶质瘤细胞的增殖和凋亡,准确、原位、无标记、无电离辐射、快速评估胶质瘤细胞对辅助治疗的敏感性。Conclusion, the present invention proposes a new terahertz metamaterial method to simultaneously monitor the proliferation and apoptosis of glioma cells and evaluate the efficacy of adjuvant therapy. First, the present invention proves that the characteristic frequency shift Δf is a comprehensive response to the change in the number and state of glioma cells. Then, through biological experiments, the relationship between the number of living cells and apoptotic cells and Δf is fitted, and the relationship between the proliferation rate and apoptosis rate and Δf is revealed. Under treatment conditions, the relationship between Δf, n l and n a is fitted as Δf = A 1 × n l + A 2 × n a + A 3 . Correspondingly, the relationship between Δf and η p and η a can be fitted as Δf = B 1 × η p + B 2 × η a + B 3 . Therefore, this method can simultaneously monitor the proliferation and apoptosis of glioma cells, and accurately, in situ, label-free, non-ionizing radiation, and quickly evaluate the sensitivity of glioma cells to adjuvant therapy.

本发明提出的频移方法在检测治疗疗效方面是非特异性和快速的。The frequency shift method proposed by the present invention is non-specific and rapid in detecting the therapeutic efficacy.

以上所述仅为本发明的优选实施例而已,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims (4)

1.一种评估胶质瘤术后疗效的太赫兹超材料生物传感器在同时监测胶质瘤细胞的增殖和凋亡中的应用,其特征是,1. Application of a terahertz metamaterial biosensor for evaluating the efficacy of glioma surgery in simultaneously monitoring the proliferation and apoptosis of glioma cells, characterized in that: 所述评估胶质瘤术后疗效的太赫兹超材料生物传感器包括太赫兹超材料芯片,所述太赫兹超材料芯片设置在用于培养细胞的容器内;所述太赫兹超材料芯片为由若干传感单元形成阵列形状的金膜,每一行传感单元通过连接导体串联;所述传感单元为电感电容谐振器结构,所述电感电容谐振器结构的两电极之间形成检测通道;The terahertz metamaterial biosensor for evaluating the efficacy of glioma surgery comprises a terahertz metamaterial chip, which is arranged in a container for culturing cells; the terahertz metamaterial chip is a gold film in an array shape formed by a plurality of sensing units, and each row of sensing units is connected in series through a connecting conductor; the sensing unit is an inductor-capacitor resonator structure, and a detection channel is formed between two electrodes of the inductor-capacitor resonator structure; 所述检测通道为m形;The detection channel is m-shaped; 太赫兹超材料芯片设置在石英基板表面;The terahertz metamaterial chip is arranged on the surface of a quartz substrate; 所述容器包括培养腔,所述太赫兹超材料芯片作为培养腔的底,所述培养腔的材质为PDMS;The container comprises a culture chamber, the terahertz metamaterial chip serves as the bottom of the culture chamber, and the material of the culture chamber is PDMS; 的关系曲线的拟合公式,其中,为常数; and , The fitting formula of the relationship curve ,in , and is a constant; :谐振频移;:活胶质瘤细胞数量;:凋亡胶质瘤细胞数量; :Resonance frequency shift; :Number of viable glioma cells; : Number of apoptotic glioma cells; 的关系曲线的拟合为,其中, 是常数; and and The relationship curve fitting is ,in , and is a constant; :谐振频移; :胶质瘤细胞增殖率;:胶质瘤细胞凋亡率。 :Resonance frequency shift; : Glioma cell proliferation rate; : Apoptosis rate of glioma cells. 2.一种如权利要求1所述的应用,其特征是,金膜的厚度为80~120 nm。2. A use as claimed in claim 1, characterized in that the thickness of the gold film is 80-120 nm. 3.一种如权利要求1所述的应用,其特征是,所述评估胶质瘤术后疗效的太赫兹超材料生物传感器的制备方法,包括如下制备太赫兹超材料芯片的过程:3. An application as claimed in claim 1, characterized in that the method for preparing the terahertz metamaterial biosensor for evaluating the efficacy of glioma surgery comprises the following process of preparing the terahertz metamaterial chip: 在衬底表面涂覆光刻胶层,将刻有与太赫兹超材料芯片相同图案的掩膜覆盖于光刻胶层表面,再进行紫外光刻,然后采用电子束蒸发法在紫外光刻后的模板上镀一层金膜,去除多余的光刻胶即得。A photoresist layer is coated on the surface of the substrate, and a mask engraved with the same pattern as the terahertz metamaterial chip is covered on the surface of the photoresist layer. UV lithography is then performed, and then a layer of gold film is plated on the template after UV lithography by electron beam evaporation, and the excess photoresist is removed. 4.一种如权利要求3所述的应用,其特征是,包括太赫兹超材料芯片与容器组装的过程,将太赫兹超材料芯片放置于容器底部上表面,然后将容器侧壁与容器底部粘结。4. An application as claimed in claim 3, characterized in that it includes a process of assembling the terahertz metamaterial chip and the container, placing the terahertz metamaterial chip on the upper surface of the bottom of the container, and then bonding the side wall of the container to the bottom of the container.
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