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CN115615600A - Device and method for measuring stress birefringence of glass material - Google Patents

Device and method for measuring stress birefringence of glass material Download PDF

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CN115615600A
CN115615600A CN202211333909.XA CN202211333909A CN115615600A CN 115615600 A CN115615600 A CN 115615600A CN 202211333909 A CN202211333909 A CN 202211333909A CN 115615600 A CN115615600 A CN 115615600A
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frequency difference
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reflection window
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CN115615600B (en
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刘维新
曹海
韩建平
代欣利
张珍茹
丁一鸣
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Shandong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0047Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes measuring forces due to residual stresses
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
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    • G01N3/068Special adaptations of indicating or recording means with optical indicating or recording means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/08Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces

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Abstract

The invention provides a device and a method for measuring stress birefringence of a glass material. A fixed reflector of the laser gain tube and an independent reflector driven by a piezoelectric actuator form a resonant cavity with adjustable cavity length; the glass sample can adjust the rotation angle in a plane vertical to the laser axis; the force applying mechanism can adjust the internal stress of the anti-reflection window sheet; measuring the frequency difference of two orthogonal polarization modes through an avalanche photodetector and a frequency meter; the light intensity of two orthogonal polarization modes is measured by two photodetectors. When a glass sample to be measured is not placed in the resonant cavity, calculating phase delay corresponding to the stress birefringence of the anti-reflection window; after a glass sample is placed, adjusting a corner to enable the equivalent fast axis and the slow axis of the glass sample to coincide with the equivalent fast axis of the anti-reflection window twice, and calculating the frequency difference of a splitting mode; and calculating the glass stress birefringence index according to the interval of the split mode frequency difference and the phase retardation of the anti-reflection window. The invention can carry out precise measurement on the stress birefringence of the glass material, has simple structure and is easy to realize automatic measurement.

Description

玻璃材料应力双折射测量装置及方法Device and method for measuring stress birefringence of glass material

技术领域technical field

本发明涉及光学测量技术领域,具体涉及一种玻璃材料应力双折射测量装置及方法。The invention relates to the technical field of optical measurement, in particular to a device and method for measuring stress birefringence of glass materials.

背景技术Background technique

光学玻璃材料和玻璃元件在加工和使用过程中,多种因素会导致其内部存在内应力,如玻璃熔制过程中由于温度梯度会产生热应力,元件加工过程中由于切削或磨削力产生的表面应力,较重元件由于自重产生的压应力,以及安装机构对元件装夹力产生的应力等。内应力会使原本各向同性的玻璃元件由于光弹效应而表现出一定的应力双折射,通过其中的光的偏振态会随之发生变化,光束的波前也发生畸变,从而降低光学系统的性能,严重时甚至造成元件损坏,如激光核聚变装置中用到的钕玻璃元件,传输高能激光束时由于应力双折射会使聚焦光斑的能量分布不均匀,热聚集还会导致元件破裂影响激光系统工作。因此需要对光学玻璃材料和元件应力双折射进行精密测量以评估质量或减小影响。During the processing and use of optical glass materials and glass components, various factors will cause internal stress, such as thermal stress due to temperature gradients during glass melting, and thermal stress due to cutting or grinding forces during component processing. Surface stress, compressive stress generated by heavier components due to their own weight, and stress generated by the mounting mechanism on the clamping force of components, etc. The internal stress will cause the original isotropic glass element to exhibit a certain stress birefringence due to the photoelastic effect, the polarization state of the light passing through it will change accordingly, and the wavefront of the beam will also be distorted, thereby reducing the optical system. In severe cases, it may even cause component damage, such as the neodymium glass component used in laser nuclear fusion devices. When transmitting high-energy laser beams, due to stress birefringence, the energy distribution of the focused spot will be uneven, and heat accumulation will also cause component rupture and affect the laser. The system works. Precise measurements of stress birefringence in optical glass materials and components are therefore required to assess quality or mitigate effects.

通常测量光学元件应力双折射的方法有多种,主要可分为基于偏振光原理和光干涉原理两类:前者采用偏振片等光学元件,将光经过光学玻璃样品后偏振态的变化转变为光强的改变,进而得到其应力双折射,由于通过光强进行测量,易受激光器波动和环境扰动,通常测量精度低;后者采用干涉光路,测量光经过光学玻璃样品后由双折射引起的干涉条纹即相位的变化,得到其应力双折射,测量精度较高,但光路结构复杂。同时,上述方法都无法溯源到计量基准,相互之间可比对性差,有必要研究精度高、光路简单且测量结果可溯源的光学玻璃应力双折射测量装置和方法。Generally, there are many methods for measuring the stress birefringence of optical components, which can be mainly divided into two categories based on the principle of polarized light and the principle of light interference: the former uses optical components such as polarizers to convert the change of the polarization state of light after passing through an optical glass sample into light intensity. The change of stress birefringence can be obtained. Since the measurement is carried out by light intensity, it is easily affected by laser fluctuations and environmental disturbances, and the measurement accuracy is usually low. The latter uses an interference optical path to measure the interference fringes caused by birefringence after the light passes through the optical glass sample. That is, the change of the phase, the stress birefringence is obtained, and the measurement accuracy is high, but the optical path structure is complicated. At the same time, none of the above-mentioned methods can be traced to the measurement standard, and their comparability with each other is poor. It is necessary to study an optical glass stress birefringence measurement device and method with high precision, simple optical path and traceable measurement results.

发明内容Contents of the invention

本发明的目的在于克服现有技术中光学应力测量方法的不足之处,提供一种玻璃材料应力双折射测量装置及方法。The object of the present invention is to overcome the shortcomings of the optical stress measurement method in the prior art, and provide a glass material stress birefringence measurement device and method.

为了达到上述目的,采用的技术方案为:In order to achieve the above purpose, the technical scheme adopted is:

玻璃材料应力双折射测量装置,包括:Device for measuring stress birefringence in glass materials, including:

激光增益管:其第一端设置有固定反射镜,第二端设置有增透窗片;Laser gain tube: the first end is provided with a fixed reflector, and the second end is provided with an anti-reflection window;

独立反射镜:设置在增益管第二端侧,位于增透窗片的外侧,与激光增益管和固定反射镜组合实现正交偏振激光振荡;Independent reflector: set on the second end side of the gain tube, located outside the anti-reflection window, combined with the laser gain tube and fixed reflector to realize orthogonally polarized laser oscillation;

压电制致动器:与独立反射镜连接,以驱动独立反射镜沿激光轴线运动;Piezoelectric actuator: connected with the independent reflector to drive the independent reflector to move along the laser axis;

玻璃样品:设置在增透窗片和独立反射镜之间;Glass sample: set between the anti-reflection window and the independent mirror;

旋转台:所述玻璃样品安装在旋转台上,旋转台的转轴与激光光束重合,以可带动玻璃样品在垂直于激光光束的平面内调整转角;Rotary table: the glass sample is installed on the rotary table, and the rotation axis of the rotary table coincides with the laser beam, so as to drive the glass sample to adjust the rotation angle in a plane perpendicular to the laser beam;

力施加机构:设置在增透窗片的径向方向,能够沿增透窗片径向施加压力;所述力施加机构连接力调整机构,可调整施加至增透窗片的力大小,以使其应力双折射引起激光正交偏振方向上两相邻级纵模间隔的频差为阈值频差f正负阈值范围内,增透窗片沿施加压力的方向为等效快轴方向;所述阈值频差f根据激光器的性能确定;Force application mechanism: it is arranged in the radial direction of the anti-reflection window, and can apply pressure along the radial direction of the anti-reflection window; the force application mechanism is connected with a force adjustment mechanism, which can adjust the force applied to the anti-reflection window, so that The stress birefringence causes the frequency difference between two adjacent longitudinal mode intervals in the orthogonal polarization direction of the laser to be within the threshold frequency difference f within the positive and negative threshold range, and the anti-reflection window along the direction of the applied pressure is the equivalent fast axis direction; The threshold frequency difference f is determined according to the performance of the laser;

偏振片:设置在独立反射镜的外侧;Polarizer: set on the outside of the independent reflector;

光电探测器:设置在偏振片的外侧,用于接收激光两正交偏振模的拍频信号、分裂模拍频信号;Photodetector: set on the outside of the polarizer, used to receive the beat frequency signal of two orthogonal polarization modes of the laser and the beat frequency signal of the split mode;

频率计:与光电探测器通信,获取两正交偏振模的拍频信号的频率值,并计算两正交偏振模的频差;Frequency meter: communicate with the photodetector, obtain the frequency value of the beat frequency signal of the two orthogonal polarization modes, and calculate the frequency difference of the two orthogonal polarization modes;

数据处理器:基于两正交偏振模的频差,计算玻璃材料的应力双折射对应的相位延迟。Data processor: based on the frequency difference of two orthogonal polarization modes, calculate the phase delay corresponding to the stress birefringence of the glass material.

本发明一些实施例中,所述玻璃样品的表面镀增透膜。In some embodiments of the present invention, the surface of the glass sample is coated with an anti-reflection film.

本发明一些实施例中,所述力施加机构对称设置在增透窗片径向方向的两端,以沿径向方向对增透窗片对称施加作用力。In some embodiments of the present invention, the force applying mechanism is arranged symmetrically at both ends of the anti-reflection window in the radial direction, so as to apply force symmetrically to the anti-reflection window in the radial direction.

本发明一些实施例中,偏振片的通光方向与激光偏振方向呈45°夹角。In some embodiments of the present invention, the light transmission direction of the polarizer and the laser polarization direction form an included angle of 45°.

本发明一些实施例中,阈值频差f的范围为15~20MHz。In some embodiments of the present invention, the range of the threshold frequency difference f is 15-20 MHz.

本发明一些实施例进一步提供一种玻璃材料应力双折射测量方法,其特征在于,包括以下步骤:Some embodiments of the present invention further provide a method for measuring stress birefringence of glass materials, which is characterized in that it includes the following steps:

S1:激光谐振腔内未置入玻璃样品前,从小逐步调大增透窗片径向方向的压力大小,调节压电陶瓷致动器并根据两个光电探测器记录的光强,判断开始出现模式跳变时,减小增透窗片压力至不出现模式跳变,即增透窗片应力双折射引入的分裂模频差Δvw接近阈值频差f时,计算分裂模频差Δvw和对应的相位延迟,步骤包括:独立反射镜在初始位置时,测量激光两正交偏振纵模的频差Δ10,调节压电致动器,改变谐振腔长,测量激光两正交偏振纵模的频差Δ20S1: Before the glass sample is placed in the laser resonator, gradually increase the pressure in the radial direction of the anti-reflection window, adjust the piezoelectric ceramic actuator, and judge the beginning of the phenomenon based on the light intensity recorded by the two photodetectors. When the mode jumps, reduce the pressure of the anti-reflection window until no mode jump occurs, that is, when the split-mode frequency difference Δv w introduced by the stress birefringence of the anti-reflection window is close to the threshold frequency difference f, calculate the split-mode frequency difference Δv w and The corresponding phase delay, the steps include: when the independent reflector is in the initial position, measure the frequency difference Δ 10 of the two orthogonal polarization longitudinal modes of the laser, adjust the piezoelectric actuator, change the length of the resonant cavity, and measure the two orthogonal polarization longitudinal modes of the laser The frequency difference Δ 20 ;

计算增透窗片应力双折射引入的分裂模频差ΔvwCalculate the split mode frequency difference Δv w introduced by the stress birefringence of the AR window:

f≈Δvw=|Δ1020|/2;f≈Δv w =|Δ 1020 |/2;

计算增透窗片应力双折射对应的相位延迟ΔφwCalculate the phase delay Δφ w corresponding to the stress birefringence of the AR window:

Δφw=(λ/2)·|Δ1020|/(Δ1020);Δφ w = (λ/2)|Δ 1020 |/(Δ 1020 );

计算激光器的初始纵模间隔频差Δ00Calculate the initial longitudinal mode spacing frequency difference Δ 00 of the laser:

Δ00=|Δ1020|/2;Δ 00 =|Δ 1020 |/2;

S2:应力双折射引起激光正交偏振方向上激光纵模间隔的频差Δ0的计算步骤包括:S2: The calculation steps of the frequency difference Δ 0 of the laser longitudinal mode interval caused by the stress birefringence in the orthogonal polarization direction of the laser include:

S21:调整旋转台,使玻璃样品的等效快轴或等效慢轴与增透窗片的等效快轴重合时,计算激光纵模间隔的频差Δ0S21: Adjust the rotary table so that when the equivalent fast axis or equivalent slow axis of the glass sample coincides with the equivalent fast axis of the anti-reflection window, calculate the frequency difference Δ0 of the laser longitudinal mode interval;

测量激光两正交偏振纵模的频差Δv11,调节压电致动器,改变谐振腔长,使相邻级纵模进入增益带,测量激光两正交偏振纵模的频差Δv12;进一步设定频差判断阈值,比较Δv11与Δv12的大小及其和与Δ00的大小;Measure the frequency difference Δv 11 of the two orthogonally polarized longitudinal modes of the laser, adjust the piezoelectric actuator, change the length of the resonant cavity, make the adjacent longitudinal modes enter the gain band, and measure the frequency difference Δv 12 of the two orthogonally polarized longitudinal modes of the laser; Further setting the frequency difference judgment threshold, comparing the size of Δv 11 and Δv 12 and their sum with the size of Δ 00 ;

若Δv11与Δv12相等,则压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光发生模式跳变,不计入Δv1t的值以及纵模间隔Δ0If Δv 11 and Δv 12 are equal, then when the piezoelectric actuator changes the resonant cavity length, mode hopping occurs in horizontally polarized light and vertically polarized light, and the value of Δv 1t and the longitudinal mode interval Δ 0 are not included;

若Δv11与Δv12不相等,则进一步判断:If Δv 11 and Δv 12 are not equal, then further judge:

若Δv11与Δv12的和与Δ00的差值的绝对值小于频差判断阈值,则Δv1t=min(Δv11,Δv12),计算激光纵模间隔的频差为Δ0=Δv11+Δv12If the absolute value of the difference between the sum of Δv 11 and Δv 12 and Δ 00 is less than the frequency difference judgment threshold, then Δv 1t = min(Δv 11 , Δv 12 ), and the frequency difference for calculating the laser longitudinal mode interval is Δ 0 = Δv 11 +Δv 12 ;

若Δv11与Δv12的和与2Δ00的差值的绝对值小于频差判断阈值,则Δv1t=|Δv11-Δv12|/2,计算激光纵模间隔的频差为Δ0=(Δv11+Δv12)/2;If the absolute value of the difference between the sum of Δv 11 and Δv 12 and 2Δ 00 is less than the frequency difference judgment threshold, then Δv 1t =|Δv 11 -Δv 12 |/2, and the frequency difference for calculating the laser longitudinal mode interval is Δ 0 =( Δv 11 +Δv 12 )/2;

S22:进一步调整旋转台使其转过90°,使玻璃样品的等效慢轴或等效快轴另一与增透窗片的等效快轴重合时,计算激光纵模间隔的频差:S22: Further adjust the rotary table to turn it through 90°, so that when the equivalent slow axis or the equivalent fast axis of the glass sample coincides with the equivalent fast axis of the anti-reflection window, calculate the frequency difference of the laser longitudinal mode interval:

测量激光两正交偏振纵模的频差Δv21,调节压电致动器,改变谐振腔长,使相邻级纵模进入增益带,测量激光两正交偏振纵模的频差Δv22;根据步骤S21中是否发生模式跳变,Δv21与Δv22的大小及其和判断:Measure the frequency difference Δv 21 of the two orthogonally polarized longitudinal modes of the laser, adjust the piezoelectric actuator, change the length of the resonant cavity, make the adjacent longitudinal modes enter the gain band, and measure the frequency difference Δv 22 of the two orthogonally polarized longitudinal modes of the laser; According to whether mode hopping occurs in step S21, the size of Δv 21 and Δv 22 and their sum judgment:

若步骤S21中未发生模式跳变,且Δv21与Δv22相等,则当前压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光发生模式跳变,不计入Δv2t的值;If no mode hopping occurs in step S21, and Δv 21 is equal to Δv 22 , then when the current piezoelectric actuator changes the resonant cavity length, mode hopping occurs in horizontally polarized light and vertically polarized light, which is not included in Δv 2t value;

若Δv21与Δv22不相等,则进一步判断:If Δv 21 and Δv 22 are not equal, then further judge:

若Δv21与Δv22的和与Δ00的差值的绝对值小于频差判断阈值,则Δv2t=min(Δv21,Δv22),计算激光纵模间隔的频差为Δ0=Δv21+Δv22If the absolute value of the difference between the sum of Δv 21 and Δv 22 and Δ 00 is less than the frequency difference judgment threshold, then Δv 2t = min(Δv 21 , Δv 22 ), and the frequency difference for calculating the laser longitudinal mode interval is Δ 0 = Δv 21 +Δv 22 ;

若Δv21与Δv22的和与2Δ00的差值的绝对值小于频差判断阈值,则Δv2t=|Δv21-Δv22|/2;计算激光纵模间隔的频差为Δ0=(Δv21+Δv22)/2;If the absolute value of the difference between the sum of Δv 21 and Δv 22 and 2Δ 00 is less than the frequency difference judgment threshold, then Δv 2t =|Δv 21 -Δv 22 |/2; the frequency difference for calculating the laser longitudinal mode interval is Δ 0 =( Δv 21 +Δv 22 )/2;

若步骤S21和S22中均未发生模式跳变,两次得到的纵模间隔的频差Δ0相等;If no mode hopping occurs in steps S21 and S22, the frequency difference Δ0 of the longitudinal mode interval obtained twice is equal;

S3:在步骤S2中,调节压电致动器时同时记录两正交偏振模的光强,分别根据玻璃样品等效快轴与增透窗片等效快轴重合时、玻璃样品等效慢轴与增透窗片等效快轴重合时谐振腔内总应力双折射引起的分裂模频差Δv1t值和Δv2t值,以及纵模间隔Δ0值,判断并计算:S3: In step S2, when adjusting the piezoelectric actuator, record the light intensity of the two orthogonal polarization modes at the same time, according to the equivalent fast axis of the glass sample coincides with the equivalent fast axis of the antireflection When the axis coincides with the equivalent fast axis of the anti-reflection window, the split mode frequency difference Δv 1t and Δv 2t value caused by the total stress birefringence in the resonator cavity, and the longitudinal mode interval Δ 0 value, judge and calculate:

若在两次重合的位置,调节压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光发生一次模式跳变,两次重合时测得的分裂模频差Δv1t和Δv2t中对应未发生模式跳变时的一次设为Δvt,且

Figure BDA0003914644510000041
区间,则计算玻璃材料的应力双折射相位延迟为:Δφg=Δφw-(λΔvt)/(2Δ0);If at the double coincidence position, the piezoelectric actuator is adjusted to change the length of the resonant cavity, the horizontally polarized light and the vertically polarized light undergo a mode hop, and the split-mode frequency differences Δv 1t and Δv 2t measured during the two coincidences The one corresponding to the time when no mode hopping occurs is set to Δv t , and
Figure BDA0003914644510000041
interval, then the stress birefringence phase retardation of the glass material is calculated as: Δφ g = Δφ w -(λΔv t )/(2Δ 0 );

若在两次重合的位置,调节压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光未发生模式跳变,两次重合时测得的分裂模频差Δv1t和Δv2t分别处于[2f,3f]MHz及[0,f]MHz区间,则,取[0,f]MHz区间对应的分裂模频差值作为Δvt值,计算玻璃材料的应力双折射相位延迟为:Δφg=Δφw+(λΔvt)/(2Δ0);If there is no mode hopping in the horizontally polarized light and vertically polarized light during the process of adjusting the piezoelectric actuator to change the length of the resonant cavity at the two overlapping positions, the split-mode frequency differences Δv 1t and Δv 2t measured during the two overlapping They are in [2f, 3f] MHz and [0, f] MHz respectively, then, take the split mode frequency difference corresponding to [0, f] MHz as the Δv t value, and calculate the stress birefringence phase delay of the glass material as: Δφ g = Δφ w +(λΔv t )/(2Δ 0 );

若在两次重合的位置,调节压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光发生一次模式跳变,或未发生模式跳变,且,两次重合时测得的分裂模频差Δv1t和Δv2t均>2fMHz,则取两次重合时测得的Δv1t和Δv2t中频差值较大的作为Δvt值,计算玻璃材料的应力双折射相位延迟为:Δφg=(λΔvt)/(2Δ0)-ΔφwIf at the double coincidence position, adjust the piezoelectric actuator to change the length of the resonant cavity, the horizontally polarized light and the vertically polarized light undergo a mode hop, or no mode hop occurs, and the measured If the split mode frequency difference Δv 1t and Δv 2t are both > 2fMHz, then take the larger intermediate frequency difference between Δv 1t and Δv 2t measured during two coincidences as the Δv t value, and calculate the stress birefringence phase delay of the glass material as: Δφ g = (λΔv t )/(2Δ 0 )-Δφ w ;

以上各式中:λ为激光波长。In the above formulas: λ is the laser wavelength.

本发明一些实施例中,阈值频差f为16MHz。In some embodiments of the present invention, the threshold frequency difference f is 16 MHz.

与现有技术相比,本发明的优点和积极效果在于:Compared with prior art, advantage and positive effect of the present invention are:

1、本发明可以通过激光频率或频率差测量玻璃材料的应力双折射,二频率测量精度高,可以对材料应力双折射进行精密测量,测量能够溯源到光波长(即频率)。1. The present invention can measure the stress birefringence of glass materials by laser frequency or frequency difference. The measurement accuracy of the two frequencies is high, and the stress birefringence of materials can be precisely measured, and the measurement can be traced to the light wavelength (ie frequency).

2、采用在激光增益管的增透窗片施加压力,测量中旋转玻璃样品使其两次与增透窗片快慢轴重合的方法,可以避免由于激光振荡模式存在的强竞争效应而使测量无法进行的情况,使对玻璃材料中任意大小的应力双折射都可直接测量,系统结构简单,易于实现自动测量。2. Apply pressure to the anti-reflection window of the laser gain tube, and rotate the glass sample during the measurement to make it coincide with the fast and slow axes of the anti-reflection window twice, which can avoid the measurement failure due to the strong competition effect of the laser oscillation mode. According to the progress, the stress birefringence of any size in the glass material can be directly measured, the system structure is simple, and it is easy to realize automatic measurement.

附图说明Description of drawings

图1为激光振荡纵模频率分布示意图;Figure 1 is a schematic diagram of the frequency distribution of the longitudinal mode of laser oscillation;

图2a为玻璃样品使激光每一级纵模分裂形成频率差示意图;Figure 2a is a schematic diagram of the frequency difference formed by the splitting of each longitudinal mode of the laser by the glass sample;

图2b为玻璃样品使激光相邻级纵模间隔变动形成频率差示意图;Figure 2b is a schematic diagram of the frequency difference formed by the change of the distance between the longitudinal modes of adjacent stages of the laser caused by the glass sample;

图3a为腔长调节过程中两正交偏振模发生模式跳变示意图;Figure 3a is a schematic diagram of the mode hopping of two orthogonal polarization modes during the cavity length adjustment process;

图3b为腔长调节过程中两正交偏振模未发生模式跳变示意图;Figure 3b is a schematic diagram of two orthogonal polarization modes without mode hopping during cavity length adjustment;

图4为谐振腔内玻璃样品等效快/慢轴与增透窗片等效快轴重合示意图;Figure 4 is a schematic diagram of the coincidence of the equivalent fast/slow axis of the glass sample in the resonator and the equivalent fast axis of the anti-reflection window;

图5为不同应力双折射大小的玻璃样品测量区间示意图;Fig. 5 is a schematic diagram of measurement intervals of glass samples with different stress birefringence sizes;

图6为玻璃材料应力双折射测量装置示意图。Fig. 6 is a schematic diagram of a device for measuring stress birefringence of a glass material.

以上各图中:In each of the above figures:

1-增益管;1- gain tube;

2-固定反射镜;2 - fixed mirror;

3-增透窗片;3- anti-reflection window;

4-独立反射镜;4- independent reflector;

5-压电致动器;5 - piezoelectric actuator;

6-待测玻璃样品;6- The glass sample to be tested;

7-旋转台;7-Rotary table;

8-偏振片;8-polarizer;

9-光电探测器;9 - photodetector;

10-频率计;10 - frequency meter;

11-偏振分光镜;11-polarization beam splitter;

12-第一光电探测器;12 - a first photodetector;

13-第二光电探测器;13 - second photodetector;

14-数据处理单元。14 - Data processing unit.

具体实施方式detailed description

下面,通过示例性的实施方式对本发明进行具体描述。然而应当理解,在没有进一步叙述的情况下,一个实施方式中的元件、结构和特征也可以有益地结合到其他实施方式中。In the following, the present invention will be specifically described through exemplary embodiments. It should be understood, however, that elements, structures and characteristics of one embodiment may be beneficially incorporated in other embodiments without further recitation.

本发明提供的玻璃材料应力双折射测量装置及方法,是基于激光频率分裂测量原理。The device and method for measuring stress birefringence of glass materials provided by the invention are based on the principle of laser frequency splitting measurement.

首先阐述激光频率分裂测量的原理。Firstly, the principle of laser frequency splitting measurement is described.

对于驻波激光器,谐振腔内能够形成振荡的纵模满足谐振条件,如附图1所示。在激光增益带范围内,有两个相邻级纵模vq和vq+1可以获得增益形成激光输出。由于激光模式间的竞争作用,相邻级纵模的偏振方向分别沿激光的两个本征方向,即偏振态相互正交,表示为⊥偏振态和∥偏振态。随着激光腔长改变,其他级次纵模如vq-1、vq-2等会依次进入增益带内形成振荡。振荡纵模满足的关系式为:For a standing wave laser, the longitudinal mode capable of forming oscillations in the resonator satisfies the resonance condition, as shown in Figure 1. Within the range of the laser gain band, there are two adjacent longitudinal modes v q and v q+1 that can gain gain and form laser output. Due to the competition between laser modes, the polarization directions of adjacent longitudinal modes are along the two eigendirections of the laser, that is, the polarization states are orthogonal to each other, denoted as ⊥ polarization state and ∥ polarization state. As the laser cavity length changes, other order longitudinal modes such as v q-1 and v q-2 will sequentially enter the gain band to form oscillations. The relational expression satisfied by the oscillation longitudinal mode is:

Figure BDA0003914644510000071
Figure BDA0003914644510000071

其中,vq为振荡纵模频率,L0为谐振腔腔长,n为谐振腔内等效折射率,c为真空中光速,q即纵模序数,为正整数。由此可以得到相邻级纵模的频差即纵模间隔满足:Among them, v q is the frequency of the longitudinal mode of oscillation, L0 is the cavity length of the resonator, n is the equivalent refractive index in the resonator, c is the speed of light in vacuum, and q is the ordinal number of the longitudinal mode, which is a positive integer. From this, it can be obtained that the frequency difference of adjacent longitudinal modes, that is, the longitudinal mode interval satisfies:

Figure BDA0003914644510000072
Figure BDA0003914644510000072

如附图2a所示,当将玻璃样品放入激光谐振腔后,由于材料存在应力双折射,沿主应力方向和垂直主应力方向上的折射率不再相等,使得在这两个方向上谐振腔的物理腔长有了固定的偏差。根据纵模满足的谐振条件,两个物理腔长对应两个不同的纵模序列,即原本每一级纵模都将分裂为两个,整体上它们的偏振态相互正交。As shown in Figure 2a, when the glass sample is placed in the laser resonator, due to the stress birefringence of the material, the refractive index along the principal stress direction and the perpendicular principal stress direction are no longer equal, making the resonance in these two directions The physical cavity length of the cavity has a fixed offset. According to the resonance conditions satisfied by the longitudinal modes, the two physical cavity lengths correspond to two different longitudinal mode sequences, that is, each longitudinal mode will split into two, and their polarization states are orthogonal to each other as a whole.

其中,由于玻璃材料存在应力双折射,其对应的相位延迟Δφg使激光器产生对纵模产生分裂效应。即原来每一个纵模都会分裂出一个新的纵模,例如:纵模vq分裂为纵模vq和v′q,新的纵模v′q与原来的纵模有一定的频率差,两者之间的其频差为Δv,根据式(1)和式(2)可以计算二者满足关系式(3)。原来纵模相邻级之间的偏振态是一样的,新纵模的偏振态变成跟自己邻近的同级纵模的偏振态垂直。Among them, due to the stress birefringence of the glass material, its corresponding phase delay Δφ g causes the laser to produce a splitting effect on the longitudinal mode. That is to say, each longitudinal mode will split into a new longitudinal mode, for example: the longitudinal mode v q is split into longitudinal modes v q and v′ q , the new longitudinal mode v′ q has a certain frequency difference from the original longitudinal mode, The frequency difference between the two is Δv, according to formula (1) and formula (2), it can be calculated that the two satisfy relational formula (3). The polarization states of adjacent levels of the original longitudinal mode are the same, and the polarization state of the new longitudinal mode becomes perpendicular to that of its adjacent longitudinal modes of the same level.

进一步可调谐激光腔长,使相邻级纵模进入增益带,即可测得模式v′q和vq-1之间的频差Δv′,其与分裂纵模vq之间的频差满足Δ0=Δv+Δv′。从式(3)可知,两相邻级分裂纵模的频差与应力双折射成正比,精密测量Δv和Δv′,就可以准确测得玻璃材料的应力双折射Δφg,其单位是nm。The length of the laser cavity can be further tuned so that the adjacent longitudinal modes enter the gain band, and the frequency difference Δv' between the modes v' q and v q-1 can be measured, and the frequency difference between it and the split longitudinal mode v q Δ 0 =Δv+Δv′ is satisfied. It can be known from formula (3) that the frequency difference between two adjacent split longitudinal modes is proportional to the stress birefringence, and the stress birefringence Δφ g of the glass material can be accurately measured by precise measurement of Δv and Δv′, the unit of which is nm.

Figure BDA0003914644510000073
Figure BDA0003914644510000073

实际上,玻璃材料的应力双折射通常不会很大,导致两正交偏振方向vq和v′q的纵模分裂量Δv很小,两分裂纵模非常靠近。对于He-Ne激光器,当分裂量小于一定的频差值时,两振荡模存在强的模式竞争效应,两模不能同时振荡,只有一个模式可以振荡。上述特定的频差值与激光器的腔长等参数有关,一般约为30~40MHz,可定义为强竞争频差。In fact, the stress birefringence of glass materials is usually not very large, resulting in a small amount of longitudinal mode splitting Δv in the two orthogonal polarization directions v q and v′ q , and the two split longitudinal modes are very close. For the He-Ne laser, when the splitting amount is less than a certain frequency difference value, there is a strong mode competition effect between the two oscillation modes, and the two modes cannot oscillate at the same time, and only one mode can oscillate. The above-mentioned specific frequency difference value is related to parameters such as the cavity length of the laser, and is generally about 30-40 MHz, which can be defined as a strong competitive frequency difference.

如附图2b所示,虚线对应的模式无法振荡。能够进入激光增益带的形成振荡的是相邻级纵模,而且它们的偏振态相互正交以减小模竞争。以附图所示的实施方式为例,此时,相邻纵模:vq-1和vq间,以及vq和vq+1间的频差,即相邻纵模间隔不再是初始值Δ0,而是产生了固定偏差值Δv,得到vq-1和v′q之间的频差为Δ1=Δ0-Δv。进一步调谐激光腔长,使v′q和下一级纵模vq+1移入增益带形成振荡,同时纵模vq-1移出增益带,则振荡纵模vq+1和v′q之间的频差为Δ2=Δ0+Δv。由此,可以根据两次测得的相邻级纵模的模间隔计算分裂模的频差和纵模间隔为:As shown in Figure 2b, the modes corresponding to the dotted lines cannot oscillate. It is adjacent longitudinal modes that can enter the laser gain band to form oscillations, and their polarization states are orthogonal to each other to reduce mode competition. Taking the implementation shown in the accompanying drawings as an example, at this time, adjacent longitudinal modes: the frequency difference between v q-1 and v q , and between v q and v q+1 , that is, the interval between adjacent longitudinal modes is no longer The initial value Δ 0 , but a fixed deviation value Δv is generated, and the frequency difference between v q-1 and v′ q is obtained as Δ 10 -Δv. Further tune the length of the laser cavity so that v′ q and the next longitudinal mode v q+1 move into the gain band to form an oscillation, and at the same time the longitudinal mode v q-1 moves out of the gain band, then the oscillation between the longitudinal mode v q+1 and v′ q The frequency difference between them is Δ 20 +Δv. Therefore, the frequency difference and longitudinal mode interval of the split mode can be calculated according to the two measured intervals of adjacent longitudinal modes:

Figure BDA0003914644510000081
Figure BDA0003914644510000081

将上式代入式(3),可得玻璃材料应力双折射对应的相位延迟为:Substituting the above formula into formula (3), the phase delay corresponding to the stress birefringence of the glass material can be obtained as:

Figure BDA0003914644510000082
Figure BDA0003914644510000082

上述公式(3)和(5)表明,测量前后两次得到的两振荡模的频差,即可得到玻璃材料的应力双折射相位延迟。这种情况是在腔内两振荡模的频差约小于强竞争频差一半出现的。但当腔内应力双折射产生的频差处于约为强竞争频差一半到一倍的范围时,偏振态正交的同级纵模会发生模式跳变。如附图3a所示,第一次测量相邻级纵模的频差为Δ1,继续调谐激光腔长过程中,⊥偏振的模会突然从振荡转抑制,而∥偏振的模从抑制转为振荡。这种情况下,第二次测量相邻级纵模频差与第一次测量同样对应的是∥偏振模的光强减小而⊥偏振模的光强增大,此时测得的仍然是频差Δ1,无法测得频差Δ2,也无法利用式(5)进行计算(实际两次测量中Δ1为频差较小者,Δ2为频差较大者)。这与玻璃样品的应力双折射较小时,产生分裂频差小于阈值频差f,腔长调谐过程中不会发生模式跳变的情况不同,如附图3(b)所示。其中,阈值频差f约为强竞争频差的一半,对于不同参数的激光器,该值略有不同,一般在15~20MHz之间。本专利中,由激光器的特性确定,阈值频差可取约16MHz的值。The above formulas (3) and (5) show that the stress birefringence phase retardation of the glass material can be obtained by measuring the frequency difference of the two oscillation modes twice before and after. This situation occurs when the frequency difference between the two oscillation modes in the cavity is less than half of the frequency difference of the strong competition. However, when the frequency difference generated by intracavity stress birefringence is in the range of about half to one times the frequency difference of the strong competition, the same-level longitudinal modes with orthogonal polarization states will undergo mode hopping. As shown in Figure 3a, the frequency difference of adjacent longitudinal modes is measured for the first time to be Δ 1 . During the process of continuing to tune the laser cavity, the ⊥-polarized mode will suddenly turn from oscillation to suppression, and the ∥-polarized mode will turn from suppression to suppression. for oscillation. In this case, the second measurement of the frequency difference of the adjacent longitudinal modes corresponds to the first measurement that the light intensity of the ∥ polarization mode decreases while the light intensity of the ⊥ polarization mode increases, and the measured value at this time is still Frequency difference Δ 1 , frequency difference Δ 2 cannot be measured, nor can it be calculated using formula (5) (in the actual two measurements, Δ 1 is the one with the smaller frequency difference, and Δ 2 is the one with the larger frequency difference). This is different from the situation that when the stress birefringence of the glass sample is small, the splitting frequency difference is smaller than the threshold frequency difference f, and the mode hopping does not occur during the cavity length tuning, as shown in Figure 3(b). Among them, the threshold frequency difference f is about half of the strong competition frequency difference. For lasers with different parameters, this value is slightly different, generally between 15 and 20 MHz. In this patent, determined by the characteristics of the laser, the threshold frequency difference can take a value of about 16MHz.

基于以上分析可得:玻璃样品放入激光谐振腔后,随着腔长调谐,存在三种情况:Based on the above analysis, it can be obtained that after the glass sample is placed in the laser resonator, there are three situations as the cavity length is tuned:

(a)当玻璃材料应力双折射产生的两分裂模频差为0~16MHz时(对应0~f),可以改变腔长,测得相邻级纵模的频差Δ1和Δ2,代入公式(5)进行计算;(a) When the frequency difference between the two split modes produced by the stress birefringence of the glass material is 0~16MHz (corresponding to 0~f), the cavity length can be changed, and the frequency difference Δ 1 and Δ 2 of the adjacent longitudinal modes can be measured, and substituted into Formula (5) is calculated;

(b)当玻璃材料应力双折射产生的两分裂模频差为16~32MHz时(对应f~2f),由于存在模式跳变,只能测得相邻级纵模形成的较小频差设为Δ1,而不能测得频差Δ2,无法进行测量;(b) When the frequency difference between the two split modes produced by the stress birefringence of the glass material is 16~32MHz (corresponding to f~2f), due to the mode hopping, only the smaller frequency difference formed by the adjacent longitudinal mode can be measured. is Δ 1 , but the frequency difference Δ 2 cannot be measured, and the measurement cannot be performed;

(c)当玻璃材料应力双折射产生的量分裂模频差大于32MHz时(对应>2f),模竞争效应很弱,可以直接测得分裂模的频差Δv,代入公式(3)进行计算。(c) When the frequency difference of the split mode generated by the stress birefringence of the glass material is greater than 32MHz (corresponding to >2f), the mode competition effect is very weak, and the frequency difference Δv of the split mode can be directly measured and substituted into formula (3) for calculation.

为了克服模式跳变导致的无法测量情况,需要使腔内总的双折射产生的纵模频差处于0~16MHz(对应0~f)或≥32MHz(对应>2f)区间范围。为此,在激光谐振内另引入应力双折射,如附图4所示。半外腔激光器的增益管1两端由固定反射镜2和增透窗片3封接而成。在增透窗片上沿径向施加对称压力F,则在增透窗片上引入的应力双折射对应相位延迟为Δφw,且沿压力方向为增透窗片等效快轴方向。调整加力F大小,使在腔内产生的两分裂模频差约为16MHz(f),分裂模的偏振方向分别沿增透窗片的等效快轴和慢轴方向。将待测玻璃样品6放入谐振腔后,由旋转台7驱动可以在垂直激光轴线的平面内旋转。调整玻璃样品的旋转角,使其应力双折射等效的快轴与窗片加力后的快轴重合,则谐振腔内总的应力双折射为二者叠加Δφt=Δφw-Δφg;若使其应力双折射等效的慢轴窗片加力后的快轴重合,则谐振腔内总的应力双折射为Δφt=Δφw+ΔφgIn order to overcome the unmeasurable situation caused by mode hopping, it is necessary to make the longitudinal mode frequency difference generated by the total birefringence in the cavity be in the range of 0-16MHz (corresponding to 0-f) or ≥32MHz (corresponding to >2f). For this reason, stress birefringence is additionally introduced into the laser resonance, as shown in Fig. 4 . Both ends of the gain tube 1 of the semi-external cavity laser are formed by sealing a fixed mirror 2 and an anti-reflection window 3 . If a symmetrical pressure F is applied radially on the anti-reflection window, the stress birefringence introduced on the anti-reflection window corresponds to a phase delay of Δφ w , and the direction along the pressure is the equivalent fast axis direction of the anti-reflection window. Adjust the force F so that the frequency difference between the two split modes generated in the cavity is about 16MHz(f), and the polarization directions of the split modes are along the equivalent fast axis and slow axis of the AR window respectively. After putting the glass sample 6 to be tested into the resonant cavity, it can be driven by the rotating table 7 to rotate in a plane perpendicular to the laser axis. Adjust the rotation angle of the glass sample so that the equivalent fast axis of the stress birefringence coincides with the fast axis after the window is stressed, then the total stress birefringence in the resonator is the superposition of the two Δφ t = Δφ w - Δφ g ; If the fast axes of the slow axis windows with equivalent stress birefringence are superimposed after being stressed, the total stress birefringence in the resonant cavity is Δφ t =Δφ w +Δφ g .

以f为16MHz为例,具体测试过程如下:Taking f as 16MHz as an example, the specific test process is as follows:

当Δφg单独产生的频差

Figure BDA0003914644510000091
调整旋转台使玻璃样品的快轴与激光器窗片的快轴重合(当调谐激光腔长,两偏振方向中之一出现光强为零则达到两轴重合条件),则腔内总的应力双折射Δφt=Δφw+Δφg产生的频差为
Figure BDA0003914644510000101
处于激光模式跳变区间,不能测量,需继续转动玻璃样品使其慢轴与窗片快轴重合,得到腔内总的应力双折射为Δφt=Δφw-Δφg,产生的频差为
Figure BDA0003914644510000102
可以按上述第(a)情况进行测量。此时Δφg越大,Δvt越小,如图5所示的A区间。When Δφ g produces frequency difference alone
Figure BDA0003914644510000091
Adjust the rotating stage so that the fast axis of the glass sample coincides with the fast axis of the laser window (when the length of the laser cavity is tuned, and the light intensity in one of the two polarization directions is zero, the two-axis coincidence condition is reached), the total stress in the cavity doubles The frequency difference generated by refraction Δφ t = Δφ w + Δφ g is
Figure BDA0003914644510000101
It is in the laser mode jump interval and cannot be measured. It is necessary to continue to rotate the glass sample so that the slow axis coincides with the fast axis of the window, and the total stress birefringence in the cavity is Δφ t = Δφ w - Δφ g , and the resulting frequency difference is
Figure BDA0003914644510000102
It can be measured according to the above case (a). At this time, the larger Δφ g is, the smaller Δv t is, as shown in Figure 5, the A section.

当Δφg单独产生的频差

Figure BDA0003914644510000103
调整旋转台使玻璃样品的快轴与激光器窗片的快轴重合,则腔内总的应力双折射Δφt=Δφw+Δφg产生的频差为
Figure BDA0003914644510000104
可以按上述第(c)情况进行测量。继续旋转玻璃样品使其慢轴与激光器窗片的快轴重合,则腔内总的应力双折射Δφt=Δφg-Δφw产生的频差为
Figure BDA0003914644510000105
可以按上述第(a)情况进行测量,如图5所示的B区间。When Δφ g produces frequency difference alone
Figure BDA0003914644510000103
Adjust the rotating stage so that the fast axis of the glass sample coincides with the fast axis of the laser window, then the frequency difference generated by the total stress birefringence in the cavity Δφ t = Δφ w + Δφ g is
Figure BDA0003914644510000104
It can be measured according to the above case (c). Continue to rotate the glass sample so that the slow axis coincides with the fast axis of the laser window, then the frequency difference generated by the total stress birefringence in the cavity Δφ t = Δφ g -Δφ w is
Figure BDA0003914644510000105
The measurement can be carried out according to the above (a) situation, as shown in the B section shown in Figure 5.

当Δφg单独产生的频差

Figure BDA0003914644510000106
调整旋转台使玻璃样品的快轴与激光器窗片的快轴重合,则腔内总的应力双折射Δφt=Δφw+Δφg产生的频差为
Figure BDA0003914644510000107
可以按上述第(c)情况进行测量。继续旋转玻璃样品使其慢轴与激光器窗片的快轴重合,则腔内总的应力双折射Δφt=Δφg-Δφw产生的频差为
Figure BDA0003914644510000108
要么处于激光模式跳变区间,无法测量,要么可以直接测量,
Figure BDA0003914644510000109
如图5所示的C区间。When Δφ g produces frequency difference alone
Figure BDA0003914644510000106
Adjust the rotating stage so that the fast axis of the glass sample coincides with the fast axis of the laser window, then the frequency difference generated by the total stress birefringence in the cavity Δφ t = Δφ w + Δφ g is
Figure BDA0003914644510000107
It can be measured according to the above case (c). Continue to rotate the glass sample so that the slow axis coincides with the fast axis of the laser window, then the frequency difference generated by the total stress birefringence in the cavity Δφ t = Δφ g -Δφ w is
Figure BDA0003914644510000108
Either it is in the laser mode jump interval and cannot be measured, or it can be measured directly,
Figure BDA0003914644510000109
C interval as shown in Figure 5.

综上,可以根据玻璃样品的快轴和慢轴分别与窗片快轴重合后,两次测得的激光两正交偏振纵模的频差,判断并得到玻璃样品应力双折射。In summary, the stress birefringence of the glass sample can be judged and obtained according to the frequency difference between the two orthogonal polarization longitudinal modes of the laser measured twice after the fast axis and the slow axis of the glass sample coincide with the fast axis of the window respectively.

基于以上原理,本发明提供如下的玻璃材料应力双折射测量装置和测量方法。Based on the above principles, the present invention provides the following glass material stress birefringence measurement device and measurement method.

本发明第一实施例首先提供一种玻璃材料应力双折射测量装置,包括以下结构部件。The first embodiment of the present invention firstly provides a glass material stress birefringence measurement device, which includes the following structural components.

激光增益管1:其第一端设置有固定反射镜2,第二端设置有增透窗片3,Laser gain tube 1: the first end is provided with a fixed reflector 2, and the second end is provided with an anti-reflection window 3,

独立反射镜4:设置在激光增益管1第二端侧,位于增透窗片3的外侧,与激光增益管1和固定反射镜2配合,组合实现正交偏振激光振荡;Independent reflector 4: set on the second end side of the laser gain tube 1, located outside the anti-reflection window 3, and cooperate with the laser gain tube 1 and the fixed reflector 2 to realize orthogonally polarized laser oscillation in combination;

压电制致动器5:与独立反射镜4连接,以驱动独立反射镜4沿激光轴线方向运动;本实施例中,压电致动器5采用的为压电陶瓷,通过改变压电陶瓷的电压,调整压电陶瓷的振动,进而带动独立反射镜4运动,调节独立反射镜4与固定反射镜2之间的距离,改变谐振腔的长度。Piezoelectric actuator 5: connected with the independent reflector 4 to drive the independent reflector 4 to move along the laser axis; in this embodiment, the piezoelectric actuator 5 is made of piezoelectric ceramics. The voltage is adjusted to adjust the vibration of the piezoelectric ceramic, thereby driving the movement of the independent reflector 4, adjusting the distance between the independent reflector 4 and the fixed reflector 2, and changing the length of the resonant cavity.

玻璃样品6:设置在增透窗片3和独立反射镜4之间;本发明的目的即测量玻璃样品6的应力双折射相位延迟,采用相位延迟来评价玻璃的应力双折射指标。玻璃样品6的表面镀激光波长下的增透膜。Glass sample 6: set between the anti-reflection window 3 and the independent mirror 4; the purpose of the present invention is to measure the stress birefringence phase delay of the glass sample 6, and use the phase delay to evaluate the stress birefringence index of the glass. The surface of glass sample 6 is coated with an anti-reflection coating at the laser wavelength.

旋转台:玻璃样品6安装在旋转台上,旋转台可以在竖直平面内转动,旋转台的转轴与激光光束重合,以可带动玻璃样品在垂直于激光光束的平面内调整转角;如图4所示,绕z轴方向旋转。Rotary table: the glass sample 6 is installed on the rotary table, the rotary table can rotate in the vertical plane, the rotation axis of the rotary table coincides with the laser beam, so as to drive the glass sample to adjust the rotation angle in the plane perpendicular to the laser beam; as shown in Figure 4 As shown, rotate around the z-axis.

力施加机构:设置在增透窗片3的径向方向,能够沿增透窗片3径向施加压力;力施加机构连接力调整机构,可调整施加至增透窗片的压力的大小,以使其应力双折射引起激光正交偏振方向上两相邻级纵模间隔的频差为阈值频差f正负阈值范围内,增透窗片沿施加压力的方向为等效快轴方向;所述阈值频差f根据激光器的性能确定,阈值频差f的范围为15~20MHz,本实施例采用16MHz;Force application mechanism: it is arranged in the radial direction of the anti-reflection window 3, and can apply pressure radially along the anti-reflection window 3; the force application mechanism is connected to the force adjustment mechanism, which can adjust the pressure applied to the anti-reflection window to The stress birefringence causes the frequency difference between two adjacent longitudinal modes in the orthogonal polarization direction of the laser to be within the threshold frequency difference f within the positive and negative threshold range, and the antireflection window along the direction of the applied pressure is the equivalent fast axis direction; The threshold frequency difference f is determined according to the performance of the laser, the threshold frequency difference f ranges from 15 to 20 MHz, and 16 MHz is used in this embodiment;

力施夹机构对称设置在增透窗片径向方向的两端,以沿径向方向对增透窗片对称施夹作用力。力施加机构的结构不做具体限定,实际应用中具有多种实施方式。The force clamping mechanism is arranged symmetrically at both ends of the anti-reflection window in the radial direction, so as to apply a clamping force symmetrically to the anti-reflection window in the radial direction. The structure of the force applying mechanism is not specifically limited, and there are various implementations in practical applications.

偏振片8:设置在独立反射镜4的外侧;偏振片8的通光方向与激光偏振方向呈45°夹角。Polarizer 8: set outside the independent reflector 4; the light transmission direction of the polarizer 8 forms an included angle of 45° with the laser polarization direction.

光电探测器9:设置在偏振8片的外侧,用于接收激光两正交偏振模的拍频信号、分裂模拍频信号。此处所述的激光两正交偏振模,可能是两个纵模,也可能是分裂模。Photodetector 9: arranged outside the 8 polarizers, used to receive the beat frequency signals of two orthogonal polarization modes and the split mode beat frequency signals of the laser. The two orthogonal polarization modes of the laser mentioned here may be two longitudinal modes or split modes.

频率计10:与光电探测器通信,获取两正交偏振模的拍频信号的频率值;Frequency meter 10: communicating with the photodetector to obtain the frequency values of the beat frequency signals of the two orthogonal polarization modes;

数据处理器:基于两正交偏振纵模的频差,计算分裂模的频差,并基于分裂模的频差,计算玻璃材料的应力双折射相位延迟。具体的计算方法,在第二实施例中详述。Data processor: Calculate the frequency difference of the split mode based on the frequency difference of two orthogonally polarized longitudinal modes, and calculate the stress birefringence phase delay of the glass material based on the frequency difference of the split mode. The specific calculation method is described in detail in the second embodiment.

本发明第二实施例进一步提供一种玻璃材料应力双折射测量方法,包括以下步骤。The second embodiment of the present invention further provides a method for measuring stress birefringence of a glass material, including the following steps.

S1:激光谐振腔内未置入玻璃样品前,从小逐步调大增透窗片径向方向的压力大小,调节压电陶瓷致动器并根据两个光电探测器记录的光强,判断开始出现模式跳变时,减小增透窗片压力使不出现模式跳变,即增透窗片应力双折射引入的分裂模频差Δvw接近阈值频差f时,S1: Before the glass sample is placed in the laser resonator, gradually increase the pressure in the radial direction of the anti-reflection window, adjust the piezoelectric ceramic actuator, and judge the beginning of the phenomenon based on the light intensity recorded by the two photodetectors. When the mode jumps, reduce the pressure of the anti-reflection window so that no mode jump occurs, that is, when the split-mode frequency difference Δv w introduced by the stress birefringence of the anti-reflection window is close to the threshold frequency difference f,

计算分裂模频差Δvw和对应的相位延迟,步骤包括:独立反射镜在初始位置时,测量激光两正交偏振纵模的频差Δ10,调节压电致动器,改变谐振腔长,测量激光两正交偏振纵模的频差Δ20Calculating the split-mode frequency difference Δv w and the corresponding phase delay, the steps include: when the independent reflector is at the initial position, measure the frequency difference Δ 10 of the two orthogonally polarized longitudinal modes of the laser, adjust the piezoelectric actuator, and change the length of the resonant cavity, Measure the frequency difference Δ 20 of the two orthogonal polarization longitudinal modes of the laser;

计算增透窗片应力双折射引入的分裂模频差ΔvwCalculate the split mode frequency difference Δv w introduced by the stress birefringence of the AR window:

f≈Δvw=|Δ1020|/2;f≈Δv w =|Δ 1020 |/2;

计算增透窗片应力双折射对应的相位延迟ΔφwCalculate the phase delay Δφ w corresponding to the stress birefringence of the AR window:

Δφw=(λ/2)·(Δ1020)/(Δ1020);Δφ w = (λ/2)·(Δ 1020 )/(Δ 1020 );

计算激光器的初始纵模间隔Δ00Calculate the initial longitudinal mode separation Δ 00 of the laser:

Δ00=|Δ1020|/2;Δ 00 =|Δ 1020 |/2;

具体的,通过光电探测器9测量⊥偏振态和∥偏振态两个正交偏振纵模的频率,频率计10基于两个正交偏振纵模的频率,计算激光分裂模vq和vq′之间的频差Δvw。此步骤中,由于没有引入玻璃样品6,应力双折射为增透窗片3引入。初始位置不做限定,改变前后谐振腔的长度也不做限定。这一过程中,调整增透窗片3径向方向的应力,使Δvw接近阈值频差16MHz。此处所述的接近阈值频差,是指允许一定的阈值范围,该阈值可以根据需要设定。Specifically, the frequencies of the two orthogonal polarization longitudinal modes ⊥ polarization state and ∥ polarization state are measured by the photodetector 9, and the frequency meter 10 calculates the laser splitting modes v q and v q ′ based on the frequencies of the two orthogonal polarization longitudinal modes The frequency difference Δv w between. In this step, since the glass sample 6 is not introduced, stress birefringence is introduced for the antireflection window 3 . The initial position is not limited, and the length of the resonant cavity before and after changing is not limited. During this process, the stress in the radial direction of the anti-reflection window 3 is adjusted so that Δv w is close to the threshold frequency difference of 16 MHz. The near-threshold frequency difference mentioned here refers to allowing a certain threshold range, and the threshold can be set as required.

在进行测量之前,首先调整增透窗片的分裂模频差达到确定值阈值频差,这是一个预先完成的工作,一次调整好,后面测试过程中基本不需要改变,只要每次测量玻璃样品前,先测量仅由增透窗片3引起的分裂模频差,计算相位延迟,作为初始值记录,供后面测量玻璃样品时使用。Before the measurement, firstly adjust the split mode frequency difference of the anti-reflection window to reach a certain value threshold frequency difference. This is a pre-finished work, once adjusted, there is basically no need to change it in the subsequent test process, as long as the glass sample is measured each time First, measure the frequency difference of the split mode caused only by the anti-reflection window 3, calculate the phase delay, and record it as the initial value for later use when measuring the glass sample.

当腔内未放入玻璃样品6前,增透窗片3的应力双折射产生的频差,与放入样品后的,同样由不变的增透窗片3应力双折射产生的分裂频差略有不同,因为等效腔长改变了。所以,后面的处理方法,都统一扣减增透窗片3应力双折射引入的相位延迟,其与应力双折射是一一对应的,大小不变,而不是扣减增透窗片3产生的分裂频差。When the glass sample 6 is not placed in the cavity, the frequency difference generated by the stress birefringence of the anti-reflection window 3 is the same as the split frequency difference generated by the stress birefringence of the anti-reflection window 3 after the sample is placed. slightly different because the equivalent cavity length has changed. Therefore, in the following processing methods, the phase delay introduced by the stress birefringence of the anti-reflection window 3 is uniformly deducted, which corresponds to the stress birefringence one-to-one, and the size remains the same, instead of deducting the phase delay caused by the anti-reflection window 3 split frequency difference.

S2:应力双折射引起激光正交偏振方向上激光纵模间隔的频差Δ0的计算步骤包括:S2: The calculation steps of the frequency difference Δ 0 of the laser longitudinal mode interval caused by the stress birefringence in the orthogonal polarization direction of the laser include:

S21:调整旋转台,使玻璃样品的等效快轴或等效慢轴与增透窗片的等效快轴重合时,计算激光纵模间隔的频差Δ0S21: Adjust the rotary table so that when the equivalent fast axis or equivalent slow axis of the glass sample coincides with the equivalent fast axis of the anti-reflection window, calculate the frequency difference Δ0 of the laser longitudinal mode interval;

测量激光两正交偏振纵模的频差Δv11,调节压电致动器,改变谐振腔长,使相邻级纵模进入增益带,测量激光两正交偏振纵模的频差Δv12;进一步设定频差判断阈值,比较Δv11与Δv12的大小及其和与Δ00的大小;Measure the frequency difference Δv 11 of the two orthogonally polarized longitudinal modes of the laser, adjust the piezoelectric actuator, change the length of the resonant cavity, make the adjacent longitudinal modes enter the gain band, and measure the frequency difference Δv1 2 of the two orthogonally polarized longitudinal modes of the laser; Further setting the frequency difference judgment threshold, comparing the size of Δv 11 and Δv 12 and their sum with the size of Δ 00 ;

若Δv11与Δv12相等,则压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光发生模式跳变,不计入Δv1t的值以及纵模间隔Δ0If Δv 11 and Δv 12 are equal, then when the piezoelectric actuator changes the resonant cavity length, mode hopping occurs in horizontally polarized light and vertically polarized light, and the value of Δv 1t and the longitudinal mode interval Δ 0 are not included;

若Δv11与Δv12不相等,则进一步判断:If Δv 11 and Δv 12 are not equal, then further judge:

若Δv11与Δv12的和与Δ00的差值的绝对值小于频差判断阈值,则Δv1t=min(Δv11,Δv12),计算激光纵模间隔的频差为Δ0=Δv11+Δv12If the absolute value of the difference between the sum of Δv 11 and Δv 12 and Δ 00 is less than the frequency difference judgment threshold, then Δv 1t = min(Δv 11 , Δv 12 ), and the frequency difference for calculating the laser longitudinal mode interval is Δ 0 = Δv 11 +Δv 12 ;

若Δv11与Δv12的和与2Δ00的差值的绝对值小于频差判断阈值,则Δv1t=|Δv11-Δv12|/2,计算激光纵模间隔的频差为Δ0=(Δv11+Δv12)/2;If the absolute value of the difference between the sum of Δv 11 and Δv 12 and 2Δ 00 is less than the frequency difference judgment threshold, then Δv 1t =|Δv 11 -Δv 12 |/2, and the frequency difference for calculating the laser longitudinal mode interval is Δ 0 =( Δv 11 +Δv 12 )/2;

S22:在步骤S21的基础上,进一步调整旋转台使其转过90°,使玻璃样品的等效慢轴或等效快轴另一与增透窗片的等效快轴重合时,计算激光纵模间隔的频差。若步骤S21中调节使玻璃样品的等效快轴与增透窗片的等效快轴重合,则步骤S22中,旋转台转过90°后,玻璃样品的等效慢轴与增透窗片的等效快轴重合。同理,若步骤S21中调节使玻璃样品的等效慢轴与增透窗片的等效快轴重合,则步骤S22中,旋转台转过90°后,玻璃样品的等效快轴与增透窗片的等效快轴重合。S22: On the basis of step S21, further adjust the rotary table to make it turn 90°, so that when the equivalent slow axis or the equivalent fast axis of the glass sample coincides with the equivalent fast axis of the anti-reflection window, calculate the laser The frequency difference of the longitudinal mode interval. If it is adjusted in step S21 so that the equivalent fast axis of the glass sample coincides with the equivalent fast axis of the anti-reflection window, then in step S22, after the turntable rotates through 90°, the equivalent slow axis of the glass sample coincides with the equivalent slow axis of the anti-reflection window The equivalent fast axis coincides with . Similarly, if the adjustment in step S21 makes the equivalent slow axis of the glass sample coincide with the equivalent fast axis of the anti-reflection window, then in step S22, after the rotating table rotates 90°, the equivalent fast axis of the glass sample and the anti-reflection window The equivalent fast axis of the window is coincident.

测量激光两正交偏振纵模的频差Δv21,调节压电致动器,改变谐振腔长,使相邻级纵模进入增益带,测量激光两正交偏振纵模的频差Δv22;根据步骤S21中是否发生模式跳变,Δv21与Δv22的大小及其和判断:Measure the frequency difference Δv 21 of the two orthogonally polarized longitudinal modes of the laser, adjust the piezoelectric actuator, change the length of the resonant cavity, make the adjacent longitudinal modes enter the gain band, and measure the frequency difference Δv 22 of the two orthogonally polarized longitudinal modes of the laser; According to whether mode hopping occurs in step S21, the size of Δv 21 and Δv 22 and their sum judgment:

若步骤S21中未发生模式跳变,且Δv21与Δv22相等,则当前压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光发生模式跳变,不计入Δv2t的值;If no mode hopping occurs in step S21, and Δv 21 is equal to Δv 22 , then when the current piezoelectric actuator changes the resonant cavity length, mode hopping occurs in horizontally polarized light and vertically polarized light, which is not included in Δv 2t value;

若Δv21与Δv22不相等,则进一步判断:If Δv 21 and Δv 22 are not equal, then further judge:

若Δv21与Δv22的和与Δ00的差值的绝对值小于频差判断阈值,则Δv2t=min(Δv21,Δv22),计算激光纵模间隔的频差为Δ0=Δv21+Δv22If the absolute value of the difference between the sum of Δv 21 and Δv 22 and Δ 00 is less than the frequency difference judgment threshold, then Δv 2t = min(Δv 21 , Δv 22 ), and the frequency difference for calculating the laser longitudinal mode interval is Δ 0 = Δv 21 +Δv 22 ;

若Δv21与Δv22的和与2Δ00的差值的绝对值小于频差判断阈值,则Δv2t=|Δv21-Δv22|/2;计算激光纵模间隔的频差为Δ0=(Δv21+Δv22)/2;If the absolute value of the difference between the sum of Δv 21 and Δv 22 and 2Δ 00 is less than the frequency difference judgment threshold, then Δv 2t =|Δv 21 -Δv 22 |/2; the frequency difference for calculating the laser longitudinal mode interval is Δ 0 =( Δv 21 +Δv 22 )/2;

若步骤S21和S22中均未发生模式跳变,两次得到的纵模间隔的频差Δ0相等。即,在步骤S21中,如果没有发生模式跳变,可以计算得到纵模间隔一次;在步骤S22中,如果没有发生模式跳变,还可以计算得到纵模间隔一次。这两次得到的结果是一样的,可以任取其一或者取平均值用于步骤S3中计算相位延迟的公式中。If no mode hopping occurs in steps S21 and S22, the frequency difference Δ0 of the longitudinal mode interval obtained twice is equal. That is, in step S21, if no mode hopping occurs, the longitudinal mode interval can be calculated once; in step S22, if no mode hopping occurs, the longitudinal mode interval can be calculated once. The results obtained in these two times are the same, and one or the other can be chosen or the average value can be used in the formula for calculating the phase delay in step S3.

该步骤中,选择在使玻璃样品的等效快轴或等效慢轴分别与增透窗片的快轴重合,择一情况测量两正交偏振纵模的频差。初始位置不做限定,改变前后谐振腔的长度也不做限定。玻璃样品6置于谐振腔后,由玻璃样品6和增透窗片共同产生应力双折射效应。In this step, choose to make the equivalent fast axis or the equivalent slow axis of the glass sample coincide with the fast axis of the anti-reflection window, and measure the frequency difference of two orthogonal polarization longitudinal modes in one case. The initial position is not limited, and the length of the resonant cavity before and after changing is not limited. After the glass sample 6 is placed in the resonant cavity, the stress birefringence effect is generated jointly by the glass sample 6 and the anti-reflection window.

S3:在步骤S2中,调节压电致动器时同时记录两正交偏振模的光强,分别根据玻璃样品等效快轴与增透窗片等效快轴重合时、玻璃样品等效慢轴与增透窗片等效快轴重合时谐振腔内总应力双折射引起的分裂模频差Δv1t值和Δv2t值,以及纵模间隔Δ0值,判断并计算:S3: In step S2, when adjusting the piezoelectric actuator, record the light intensity of the two orthogonal polarization modes at the same time, according to the equivalent fast axis of the glass sample coincides with the equivalent fast axis of the antireflection When the axis coincides with the equivalent fast axis of the anti-reflection window, the split mode frequency difference Δv 1t and Δv 2t value caused by the total stress birefringence in the resonator cavity, and the longitudinal mode interval Δ 0 value, judge and calculate:

若在两次重合的位置,调节压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光发生一次模式跳变,两次重合时测得的分裂模频差Δv1t和Δv2t中对应未发生模式跳变时的一次设为

Figure BDA0003914644510000141
区间,则计算玻璃材料的应力双折射相位延迟为:Δφg=Δφw-(λΔvt)/(2Δ0);If at the double coincidence position, the piezoelectric actuator is adjusted to change the length of the resonant cavity, the horizontally polarized light and the vertically polarized light undergo a mode hop, and the split-mode frequency differences Δv 1t and Δv 2t measured during the two coincidences Corresponding to one time when no mode transition occurs, it is set to
Figure BDA0003914644510000141
interval, then the stress birefringence phase retardation of the glass material is calculated as: Δφ g = Δφ w -(λΔv t )/(2Δ 0 );

若在两次重合的位置,调节压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光未发生模式跳变,两次重合时测得的分裂模频差Δv1t和Δv2t分别处于[2f,3f]MHz及[0,f]MHz区间,则,取[0,f]MHz区间对应的分裂模频差值作为Δvt值,计算玻璃材料的应力双折射相位延迟为:Δφg=Δφw+(λΔvt)/(2Δ0);If there is no mode hopping in the horizontally polarized light and vertically polarized light during the process of adjusting the piezoelectric actuator to change the length of the resonant cavity at the two overlapping positions, the split-mode frequency differences Δv 1t and Δv 2t measured during the two overlapping They are in [2f, 3f] MHz and [0, f] MHz respectively, then, take the split mode frequency difference corresponding to [0, f] MHz as the Δv t value, and calculate the stress birefringence phase delay of the glass material as: Δφ g = Δφ w +(λΔv t )/(2Δ 0 );

若在两次重合的位置,调节压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光发生一次模式跳变,或未发生模式跳变,且,两次重合时测得的分裂模频差Δv1t和Δv2t均>2fMHz,则取两次重合时测得的Δv1t和Δv2t中频差值较大的作为Δvt值,计算玻璃材料的应力双折射相位延迟为:Δφg=(λΔvt)/(2Δ0)-ΔφwIf at the double coincidence position, adjust the piezoelectric actuator to change the length of the resonant cavity, the horizontally polarized light and the vertically polarized light undergo a mode hop, or no mode hop occurs, and the measured If the split mode frequency difference Δv 1t and Δv 2t are both > 2fMHz, then take the larger intermediate frequency difference between Δv 1t and Δv 2t measured during two coincidences as the Δv t value, and calculate the stress birefringence phase delay of the glass material as: Δφ g = (λΔv t )/(2Δ 0 )-Δφ w ;

以上各式中:λ为激光波长,f对应本实施例16MHz。In the above formulas: λ is the laser wavelength, and f corresponds to 16 MHz in this embodiment.

其中:玻璃样品和增透窗片两个元件的快轴和慢轴成90°,快轴重合时,慢轴同时也重合。两种情况是:玻璃快轴与增透窗片快轴重合,玻璃快轴与增透窗片慢轴重合。Among them: the fast axis and the slow axis of the two components of the glass sample and the anti-reflection window are 90°, and when the fast axis coincides, the slow axis also coincides. The two situations are: the fast axis of the glass coincides with the fast axis of the anti-reflection window, and the fast axis of the glass coincides with the slow axis of the anti-reflection window.

本发明一些实施例中,确定水平偏振光和垂直偏振光发生模式跳变的方法包括:In some embodiments of the present invention, the method for determining mode hopping of horizontally polarized light and vertically polarized light includes:

在调节激光谐振腔腔长的过程中,记录垂直偏振和水平偏振两正交偏振光的光强;In the process of adjusting the length of the laser resonator cavity, record the light intensity of the vertically polarized and horizontally polarized two orthogonally polarized lights;

计算垂直偏振光光强和水平偏振光光强差;Calculate the difference between the light intensity of vertically polarized light and the light intensity of horizontally polarized light;

在腔长改变半波长过程中,垂直偏振光光强和水平偏振光光强两次到达光强差为零的位置前后,若光强差的正负号均由负变为正或均由正变为负,则判定水平偏振光和垂直偏振光发生模式跳变。In the process of changing the cavity length by half wavelength, the light intensity of the vertically polarized light and the light intensity of the horizontally polarized light reach the position where the light intensity difference is zero twice, if the sign of the light intensity difference changes from negative to positive or both from positive If it becomes negative, it is judged that mode hopping occurs in horizontally polarized light and vertically polarized light.

其中,垂直偏振光光强和水平偏振光光强的测量通过光点探测器实现。Wherein, the measurement of the light intensity of the vertically polarized light and the light intensity of the horizontally polarized light is realized by a light point detector.

实际应用中,也可以通过光强来判断是否发生了模式跳变。如图3所示,在调谐激光腔长的过程中,记录垂直偏振光和水平偏振光的光强,取二者的光强差作为标记flag,如果没有发生模式跳变,则两次经过垂直偏振光和水平偏振光的光强差为零的等光强点前后时,flag的正负号反转一次,即分别由正变为负和由负变为正,或者反过来;而如果发生了模式跳变,则第二次到达等光强点之前发生模式跳变的时候就发生过一次flag正负号反转,而两次经过等光强点的时候,flag正负号均总是从正变为负或者均从负变为正。因此,可以根据光强差值正负号的变化,来判断垂直偏振光和水平偏振光是否发生了跳变。In practical applications, it is also possible to judge whether mode hopping occurs through light intensity. As shown in Figure 3, during the process of tuning the laser cavity length, record the light intensity of the vertically polarized light and the horizontally polarized light, and take the light intensity difference between the two as the flag. If no mode hopping occurs, two passes through the vertical When the light intensity difference between the polarized light and the horizontally polarized light is zero before and after the equal light intensity point, the sign of the flag is reversed once, that is, from positive to negative and from negative to positive, or vice versa; and if When the mode jumps, the sign of the flag is reversed once when the mode jump occurs before reaching the equal light intensity point for the second time, and the sign of the flag is always From positive to negative or both from negative to positive. Therefore, it can be judged whether the vertically polarized light and the horizontally polarized light have jumped according to the change of the sign of the light intensity difference.

采用本发明的方法可以快速直接且精密的测量玻璃材料应力双折射指标,系统结构简单,易于实现自动测量。The method of the invention can quickly, directly and precisely measure the stress birefringence index of the glass material, and the system has a simple structure and is easy to realize automatic measurement.

以上所述,仅是本发明的较佳实施例而已,并非是对本发明作其它形式的限制,任何熟悉本专业的技术人员可能利用上述揭示的技术内容加以变更或改型为等同变化的等效实施例应用于其它领域,但是凡是未脱离本发明技术方案内容,依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化与改型,仍属于本发明技术方案的保护范围。The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention to other forms. Any skilled person who is familiar with this profession may use the technical content disclosed above to change or modify the equivalent of equivalent changes. The embodiments are applied to other fields, but any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention still belong to the protection scope of the technical solutions of the present invention without departing from the content of the technical solutions of the present invention.

Claims (6)

1.玻璃材料应力双折射测量装置,其特征在于,包括:1. The glass material stress birefringence measuring device is characterized in that, comprising: 激光增益管:其第一端设置有固定反射镜,第二端设置有增透窗片;Laser gain tube: the first end is provided with a fixed reflector, and the second end is provided with an anti-reflection window; 独立反射镜:设置在增益管第二端侧,位于增透窗片的外侧,与激光增益管和固定反射镜组合实现激光振荡;Independent reflector: set on the second end side of the gain tube, located outside the anti-reflection window, combined with the laser gain tube and fixed reflector to realize laser oscillation; 压电制致动器:与独立反射镜连接,以驱动独立反射镜沿激光轴线方向运动;Piezoelectric actuator: connected with the independent reflector to drive the independent reflector to move along the laser axis; 玻璃样品:设置在增透窗片和独立反射镜之间;Glass sample: set between the anti-reflection window and the independent mirror; 旋转台:所述玻璃样品安装在旋转台上,旋转台的转轴与激光光束重合,以可带动玻璃样品在垂直于激光光束的平面内调整转角;Rotary table: the glass sample is installed on the rotary table, and the rotation axis of the rotary table coincides with the laser beam, so as to drive the glass sample to adjust the rotation angle in a plane perpendicular to the laser beam; 力施加机构:设置在增透窗片的径向方向,能够沿增透窗片径向施加压力;所述力施加机构连接力调整机构,可调整施加至增透窗片的力大小,以使其应力双折射引起激光正交偏振方向上两相邻级纵模间隔的频差为阈值频差f正负阈值范围内,增透窗片沿施加压力的方向为等效快轴方向;所述阈值频差f根据激光器的性能确定;Force application mechanism: it is arranged in the radial direction of the anti-reflection window, and can apply pressure along the radial direction of the anti-reflection window; the force application mechanism is connected with a force adjustment mechanism, which can adjust the force applied to the anti-reflection window, so that The stress birefringence causes the frequency difference between two adjacent longitudinal mode intervals in the orthogonal polarization direction of the laser to be within the threshold frequency difference f within the positive and negative threshold range, and the anti-reflection window along the direction of the applied pressure is the equivalent fast axis direction; The threshold frequency difference f is determined according to the performance of the laser; 偏振片:设置在独立反射镜的外侧;Polarizer: set on the outside of the independent reflector; 雪崩光电探测器:设置在偏振片的外侧,用于接收激光两正交偏振模的拍频信号;Avalanche photodetector: set on the outside of the polarizer, used to receive the beat frequency signals of the two orthogonal polarization modes of the laser; 频率计:与雪崩光电探测器通信,获取两正交偏振模的拍频信号的频率值;Frequency meter: communicate with the avalanche photodetector to obtain the frequency value of the beat frequency signal of two orthogonal polarization modes; 偏振分光镜:设置在激光增益管固定反射镜的一侧,用于将两正交偏振模的光分为光束一和光束二;Polarization beam splitter: set on one side of the fixed reflector of the laser gain tube, used to split the light of two orthogonal polarization modes into beam 1 and beam 2; 光电探测器:包括第一光电探测器和第二光电探测器,分别设置在光束一的传播光路上,以及,光束二的传播光路上,探测光束一以及光束二的光强;Photodetector: including a first photodetector and a second photodetector, which are respectively arranged on the propagation optical path of the first beam, and on the propagation optical path of the second beam, to detect the light intensity of the first beam and the second beam; 数据处理单元:接收两光电探测器的光强信号;接收频率计测得的两正交偏振模拍频信号的频差值,并计算量正交偏振模拍频信号的频差值;基于光强信号和频差值计算玻璃材料的应力双折射对应的相位延迟。Data processing unit: receive the light intensity signals of two photodetectors; receive the frequency difference value of two orthogonal polarization mode beat frequency signals measured by the frequency meter, and calculate the frequency difference value of the orthogonal polarization mode beat frequency signal; The strong signal and frequency difference values calculate the phase retardation corresponding to the stress birefringence of the glass material. 2.如权利要求1所述的玻璃材料应力双折射测量装置,其特征在于,所述玻璃样品的表面镀增透膜。2. The device for measuring stress birefringence of glass materials according to claim 1, wherein the surface of the glass sample is coated with an anti-reflection film. 3.如权利要求1所述的玻璃材料应力双折射测量装置,其特征在于,所述力施加机构对称设置在增透窗片径向方向的两端,以沿径向方向对增透窗片对称施加作用力。3. glass material stress birefringence measuring device as claimed in claim 1, is characterized in that, described force application mechanism is symmetrically arranged on the two ends of anti-reflection window radial direction, to anti-reflection window along radial direction Apply force symmetrically. 4.如权利要求1所述的玻璃材料应力双折射测量装置,其特征在于,偏振片的通光方向与激光偏振方向呈45°夹角。4. The device for measuring stress birefringence of glass materials according to claim 1, characterized in that the light transmission direction of the polarizer and the laser polarization direction form an angle of 45°. 5.如权利要求1所述的玻璃材料应力双折射测量装置,其特征在于,阈值频差f的范围为15~20MHz。5 . The device for measuring stress birefringence of glass materials according to claim 1 , wherein the range of the threshold frequency difference f is 15-20 MHz. 6.玻璃材料应力双折射测量方法,其特征在于,包括以下步骤:6. The method for measuring stress birefringence of glass materials, comprising the following steps: S1:激光谐振腔内未置入玻璃样品前,从小逐步调大增透窗片径向方向的压力大小,调节压电陶瓷致动器并根据两个光电探测器记录的光强,判断开始出现模式跳变时,减小增透窗片压力至不出现模式跳变,即增透窗片应力双折射引入的分裂模频差Δvw接近阈值频差f时,计算分裂模频差Δvw和对应的相位延迟,步骤包括:独立反射镜在初始位置时,测量激光两正交偏振纵模的频差Δ10,调节压电致动器,改变谐振腔长,测量激光两正交偏振纵模的频差Δ20S1: Before the glass sample is placed in the laser resonator, gradually increase the pressure in the radial direction of the anti-reflection window, adjust the piezoelectric ceramic actuator, and judge the beginning of the phenomenon based on the light intensity recorded by the two photodetectors. When the mode jumps, reduce the pressure of the anti-reflection window until no mode jump occurs, that is, when the split-mode frequency difference Δv w introduced by the stress birefringence of the anti-reflection window is close to the threshold frequency difference f, calculate the split-mode frequency difference Δv w and The corresponding phase delay, the steps include: when the independent reflector is in the initial position, measure the frequency difference Δ 10 of the two orthogonal polarization longitudinal modes of the laser, adjust the piezoelectric actuator, change the length of the resonant cavity, and measure the two orthogonal polarization longitudinal modes of the laser The frequency difference Δ 20 ; 计算增透窗片应力双折射引入的分裂模频差ΔvwCalculate the split mode frequency difference Δv w introduced by the stress birefringence of the AR window: f≈Δvw=|Δ102x|/2f≈Δv w =|Δ 102 x|/ 2 ; 计算增透窗片应力双折射对应的相位延迟ΔφwCalculate the phase delay Δφ w corresponding to the stress birefringence of the AR window: Δφw=(λ/2)·|Δ1020|/(Δ1020);Δφ w = (λ/2)|Δ 1020 |/(Δ 1020 ); 计算激光器的初始纵模间隔频差Δ00Calculate the initial longitudinal mode spacing frequency difference Δ 00 of the laser: Δ00=|Δ1020|/2;Δ 00 =|Δ 1020 |/2; S2:应力双折射引起激光正交偏振方向上激光纵模间隔的频差Δ0的计算步骤包括:S2: The calculation steps of the frequency difference Δ 0 of the laser longitudinal mode interval caused by the stress birefringence in the orthogonal polarization direction of the laser include: S21:调整旋转台,使玻璃样品的等效快轴或等效慢轴与增透窗片的等效快轴重合时,计算激光纵模间隔的频差Δ0S21: Adjust the rotary table so that when the equivalent fast axis or equivalent slow axis of the glass sample coincides with the equivalent fast axis of the anti-reflection window, calculate the frequency difference Δ0 of the laser longitudinal mode interval; 测量激光两正交偏振纵模的频差Δv11,调节压电致动器,改变谐振腔长,使相邻级纵模进入增益带,测量激光两正交偏振纵模的频差Δv12;进一步设定频差判断阈值,比较Δv11与Δv12的大小及其和与Δ00的大小;Measure the frequency difference Δv 11 of the two orthogonally polarized longitudinal modes of the laser, adjust the piezoelectric actuator, change the length of the resonant cavity, make the adjacent longitudinal modes enter the gain band, and measure the frequency difference Δv 12 of the two orthogonally polarized longitudinal modes of the laser; Further setting the frequency difference judgment threshold, comparing the size of Δv 11 and Δv 12 and their sum with the size of Δ 00 ; 若Δv11与Δv12相等,则压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光发生模式跳变,不计入Δv1t的值以及纵模间隔Δ0If Δv 11 and Δv 12 are equal, then when the piezoelectric actuator changes the resonant cavity length, mode hopping occurs in horizontally polarized light and vertically polarized light, and the value of Δv 1t and the longitudinal mode interval Δ 0 are not included; 若Δv11与Δv12不相等,则进一步判断:If Δv 11 and Δv 12 are not equal, then further judge: 若Δv11与Δv12的和与Δ00的差值的绝对值小于频差判断阈值,则Δv1t=min(Δv11,Δv12),计算激光纵模间隔的频差为Δ0=Δv11+Δv12If the absolute value of the difference between the sum of Δv 11 and Δv 12 and Δ 00 is less than the frequency difference judgment threshold, then Δv 1t = min(Δv 11 , Δv 12 ), and the frequency difference for calculating the laser longitudinal mode interval is Δ 0 = Δv 11 +Δv 12 ; 若Δv11与Δv12的和与2Δ00的差值的绝对值小于频差判断阈值,则Δv1t=|Δv11-Δv12 |/2,计算激光纵模间隔的频差为Δ0=(Δv11+Δv12)/2;If the absolute value of the difference between the sum of Δv 11 and Δv 12 and 2Δ 00 is less than the frequency difference judgment threshold, then Δv 1t =|Δv 11 -Δv 12 | /2, and the frequency difference of the laser longitudinal mode interval is calculated as Δ 0 =( Δv 11 +Δv 12 )/2; S22:进一步调整旋转台使其转过90°,使玻璃样品的等效慢轴或等效快轴另一与增透窗片的等效快轴重合时,计算激光纵模间隔的频差:S22: Further adjust the rotary table to turn it through 90°, so that when the equivalent slow axis or the equivalent fast axis of the glass sample coincides with the equivalent fast axis of the anti-reflection window, calculate the frequency difference of the laser longitudinal mode interval: 测量激光两正交偏振纵模的频差Δv21,调节压电致动器,改变谐振腔长,使相邻级纵模进入增益带,测量激光两正交偏振纵模的频差Δv22;根据步骤S21中是否发生模式跳变,Δv21与Δv22的大小及其和判断:Measure the frequency difference Δv 21 of the two orthogonally polarized longitudinal modes of the laser, adjust the piezoelectric actuator, change the length of the resonant cavity, make the adjacent longitudinal modes enter the gain band, and measure the frequency difference Δv 22 of the two orthogonally polarized longitudinal modes of the laser; According to whether mode hopping occurs in step S21, the size of Δv 21 and Δv 22 and their sum judgment: 若步骤S21中未发生模式跳变,且Δv21与Δv22相等,则当前压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光发生模式跳变,不计入Δv2t的值;If no mode hopping occurs in step S21, and Δv 21 is equal to Δv 22 , then when the current piezoelectric actuator changes the resonant cavity length, mode hopping occurs in horizontally polarized light and vertically polarized light, which is not included in Δv 2t value; 若Δv21与Δv22不相等,则进一步判断:If Δv 21 and Δv 22 are not equal, then further judge: 若Δv21与Δv22的和与Δ00的差值的绝对值小于频差判断阈值,则Δv2t=min(Δv21,Δv22),计算激光纵模间隔的频差为Δ0=Δv21+Δv22If the absolute value of the difference between the sum of Δv 21 and Δv 22 and Δ 00 is less than the frequency difference judgment threshold, then Δv 2t = min(Δv 21 , Δv 22 ), and the frequency difference for calculating the laser longitudinal mode interval is Δ 0 = Δv 21 +Δv 22 ; 若Δv21与Δv22的和与2Δ00的差值的绝对值小于频差判断阈值,则Δv2t=|Δv21-Δv22|/2;计算激光纵模间隔的频差为Δ0=(Δv21+Δv22)/2;If the absolute value of the difference between the sum of Δv 21 and Δv 22 and 2Δ 00 is less than the frequency difference judgment threshold, then Δv 2t =|Δv 21 -Δv 22 |/2; the frequency difference for calculating the laser longitudinal mode interval is Δ 0 =( Δv 21 +Δv 22 )/2; 若步骤S21和S22中均未发生模式跳变,两次得到的纵模间隔的频差Δ0相等;If no mode hopping occurs in steps S21 and S22, the frequency difference Δ0 of the longitudinal mode interval obtained twice is equal; S3:在步骤S2中,调节压电致动器时同时记录两正交偏振模的光强,分别根据玻璃样品等效快轴与增透窗片等效快轴重合时、玻璃样品等效慢轴与增透窗片等效快轴重合时谐振腔内总应力双折射引起的分裂模频差Δv1t值和Δv2t值,以及纵模间隔Δ0值,判断并计算:S3: In step S2, when adjusting the piezoelectric actuator, record the light intensity of the two orthogonal polarization modes at the same time, according to the equivalent fast axis of the glass sample coincides with the equivalent fast axis of the antireflection When the axis coincides with the equivalent fast axis of the anti-reflection window, the split mode frequency difference Δv 1t and Δv 2t value caused by the total stress birefringence in the resonator cavity, and the longitudinal mode interval Δ 0 value, judge and calculate: 若在两次重合的位置,调节压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光发生一次模式跳变,两次重合时测得的分裂模频差Δv1t和Δv2t中对应未发生模式跳变时的一次设为Δvt,且
Figure FDA0003914644500000041
MHz区间,则计算玻璃材料的应力双折射相位延迟为:Δφg=Δφw-(λΔvt)/(2Δ0);
If at the double coincidence position, adjust the piezoelectric actuator to change the length of the resonant cavity, a mode jump occurs for the horizontally polarized light and the vertically polarized light, and the split-mode frequency differences Δv 1t and Δv 2t measured during the two coincidences The one corresponding to the time when no mode hopping occurs is set to Δv t , and
Figure FDA0003914644500000041
MHz interval, the stress birefringence phase retardation of the glass material is calculated as: Δφ g = Δφ w -(λΔ vt )/(2Δ 0 );
若在两次重合的位置,调节压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光未发生模式跳变,两次重合时测得的分裂模频差Δv1t和Δv2t分别处于[2f,3f]MHz及[0,f]MHz区间,则,取[0,f]MHz区间对应的分裂模频差值作为Δvt值,计算玻璃材料的应力双折射相位延迟为:Δφg=Δφw+(λΔvt)/(2Δ0);If there is no mode hopping in the horizontally polarized light and vertically polarized light during the process of adjusting the piezoelectric actuator to change the length of the resonant cavity at the two overlapping positions, the split-mode frequency differences Δv 1t and Δv 2t measured during the two overlapping They are respectively in [2f, 3f] MHz and [0, f] MHz intervals, then, take the split mode frequency difference corresponding to [0, f] MHz interval as Δv t value, and calculate the stress birefringence phase delay of the glass material as: Δφ g =Δφ w +(λΔ vt )/(2Δ 0 ); 若在两次重合的位置,调节压电致动器改变谐振腔长过程中,水平偏振光和垂直偏振光发生一次模式跳变,或未发生模式跳变,且,两次重合时测得的分裂模频差Δv1t和Δv2t均>2fMHz,则取两次重合时测得的Δv1t和Δv2t中频差值较大的作为Δvt值,计算玻璃材料的应力双折射相位延迟为:Δφg=(λΔvt)/(2Δ0)-ΔφwIf at the double coincidence position, adjust the piezoelectric actuator to change the length of the resonant cavity, the horizontally polarized light and the vertically polarized light undergo a mode hop, or no mode hop occurs, and the measured If the split-mode frequency difference Δv 1t and Δv 2t are both > 2fMHz, then take the larger intermediate-frequency difference between Δv 1t and Δv 2t measured during two coincidences as the Δv t value, and calculate the stress birefringence phase delay of the glass material as: Δφ g = (λΔv t )/(2Δ 0 )-Δφ w ; 以上各式中:λ为激光波长。In the above formulas: λ is the laser wavelength.
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