CN115728623A - Loss de-embedding method and system for high-speed integrated circuit test loading plate calibration device - Google Patents

Abstract

The invention provides a loss de-embedding method and a system of a high-speed integrated circuit test loading plate calibration device, belonging to the technical field of microelectronic test and measurement, wherein the loss de-embedding system comprises the following steps: the auxiliary verification board and the data processing module; two interfaces are reserved on the upper surface and the lower surface of the auxiliary verification plate, one interface is matched with the signal input device, the other interface is matched with the bonding pad interface matched with the microwave probe, the auxiliary verification plate forms a measurement loop for removing the loaded plate, the data processing module is used for comparing signals of a first calibration instrument and a second calibration instrument before and after the auxiliary verification plate is connected to the high-speed integrated circuit test loading plate calibration device, and the de-embedding of time domain parameters in the calibration process of the high-speed integrated circuit test loading plate is calculated. The invention can accurately calculate the loss introduced by the integrated circuit interface adapter.

Description

Loss de-embedding method and system for high-speed integrated circuit test loading board calibration device

technical field

The invention belongs to the technical field of microelectronic testing and measurement, and more specifically relates to a loss de-embedding method and system for a calibration device of a high-speed integrated circuit test loading board.

Background technique

For the high-speed integrated circuit test load board, it is necessary to use a special standard fixture to achieve calibration. This is because the interface of the calibrated load board is usually a general-purpose interface such as non-SMA or BNC, and testing instruments such as oscilloscope (OSC), vector network analyzer ( The interfaces of instruments such as VNA) are usually standard types such as SMA or BNC. Therefore, the connection between the calibrated loading board and the calibration instrument requires an auxiliary fixture. For high-speed signals, the use of the calibration fixture will definitely give the calibration result of the DUT. It is necessary to eliminate or minimize the influence of the standard fixture on the calibration results.

Contents of the invention

Aiming at the defects of the prior art, the object of the present invention is to provide a loss de-embedding method and system of a high-speed integrated circuit test load board calibration device, aiming to solve the problem that the existing standard fixtures used for high-speed integrated circuit test load boards will give The calibration result of the DUT brings a certain loss, which leads to the problem of poor calibration accuracy of the loading board.

To achieve the above object, on the one hand, the present invention provides a loss de-embedding system for a high-speed integrated circuit test loading board calibration device, including: an auxiliary verification board and a data processing module;

Among them, the high-speed integrated circuit test loading board calibration device includes a first calibration instrument, a signal input device, an integrated circuit interface adapter, a microwave probe, a radio frequency cable and a second calibration instrument; an integrated circuit interface adapter, a microwave probe, a radio frequency cable Connect with the second calibration instrument in sequence; the output end of the first calibration instrument is connected with the signal input device; the output end of the signal input device is connected with the loading board; the input end of the integrated circuit interface adapter is connected with the loading board;

The signal input device is used to transmit high-speed digital signals or fast edge signals to the loading board; the integrated circuit adapter is used to detect the output signals on each pad on the loading board; the microwave probe is used to move to the target pad position, and the The corresponding output signal on the target pad is transmitted to the second calibration instrument through the radio frequency cable;

Two interfaces are reserved on the upper and lower surfaces of the auxiliary verification board, one is an interface adapted to the signal input device, and the other is a pad interface adapted to the microwave probe; the data processing module is connected to the first calibration instrument and the second calibration instrument;

The first calibration instrument is used to provide high-speed digital signals or fast edge signals; the second calibration instrument is used to obtain the output signal on the loading board; the auxiliary verification board is used to form a measurement circuit except the loaded board, and the data processing module is used for The signals of the first calibration instrument and the second calibration instrument are compared before and after the auxiliary verification board is connected to the calibration device of the high-speed integrated circuit test load board, and the de-embedding of the time domain parameters during the calibration process of the high-speed integrated circuit test load board is calculated.

Further preferably, the auxiliary verification board is a PCB board.

Further preferably, the integrated circuit interface adapter includes a front probe position array and a back probe position array; the front probe position array and the back probe position array are respectively fixed to both sides of the loading board; the front probe position array and the back probe position array The shape of the bit array is a fan.

Further preferably, the microwave probe is a GSG-DX microwave probe with a bandwidth of 50G.

Further preferably, the first calibration instrument is a high-speed sampling oscilloscope TDR module; the second calibration instrument is an oscilloscope.

Further preferably, the radio frequency cable is an SMA-SMA cable with a bandwidth of 18G.

In another aspect, the present invention provides a loss de-embedding method for a high-speed integrated circuit test loading board calibration device, comprising the following steps:

Connect the auxiliary verification board between the signal input device and the microwave probe, use the first calibration instrument to input high-speed digital signals, and use the second calibration instrument to collect the eye diagram formed by the output waveform of the loading board;

Calculate the compensation value of the eye height according to the difference between the height of the eye diagram and the amplitude of the high-speed digital signal;

Calculate the compensation value of the eye width according to the difference between the eye diagram width and the pulse width of the high-speed digital signal;

Combine the eye height compensation value and eye width compensation value with the eye diagram rise time to calculate the eye diagram area of the calibration loading board at the highest transmission rate.

In another aspect, the present invention provides a loss de-embedding method for a high-speed integrated circuit test loading board calibration device, comprising the following steps:

Before and after the auxiliary verification board is connected to the signal input device and the microwave probe, the first calibration instrument is used to input the high-speed digital signal, and the second calibration instrument is used to collect the output waveform amplitude;

Combining the peak-to-peak value of the signal sent by the first calibration instrument and the peak-to-peak value of the output waveform collected by the second calibration instrument before and after the access signal input device of the auxiliary verification board and the microwave probe, calculate the compensation value of the amplitude and the load after compensation Plate amplitude attenuation value.

In another aspect, the present invention provides a loss de-embedding method for a high-speed integrated circuit test loading board calibration device, comprising the following steps:

Connect the auxiliary verification board between the signal input device and the microwave probe, use the first calibration instrument to send the fast edge signal, and use the second calibration instrument to collect the output waveform and measure the rise time of the output signal;

Combining the rise time of the microwave probe and the rise time of the RF cable, calculate the compensation value of the rise time of other components in the high-speed integrated circuit test loading board calibration device except the microwave probe and the RF cable;

At the same time, when the auxiliary verification board is not connected between the signal input device and the microwave probe, the rise time of the output signal collected by the second calibration instrument is used to calculate the rise time of the loaded board after compensation.

Generally speaking, compared with the prior art, the above technical solution conceived by the present invention has the following

Beneficial effect:

The invention provides a loss de-embedding system and method for a high-speed integrated circuit test loading board calibration device, and an auxiliary verification board is designed to complete the ideal docking between the signal input device and the microwave probe. At present, the time domain parameters are mainly used The most important is the de-embedding method based on the fixture, that is, the loss brought by the fixture is brought into the calibration result. In view of the differences and uncertainties in the calibration process of various types of high-speed integrated circuit test load boards, the existing methods cannot accurately measure the The loss of pin sockets, passive components, transmission lines and other components is evaluated one by one. The present invention uses the auxiliary verification board to form a measurement circuit except for the loaded board. The data processing module only needs to connect the auxiliary verification board to the high-speed integrated circuit test By comparing the signals of the first calibration instrument and the second calibration instrument before and after the loading board calibration device, the de-embedding of the time domain parameters in the calibration process of the high-speed integrated circuit test loading board can be calculated; the calculation is simple and can accurately calculate the input of the integrated circuit interface adapter The amount of loss has a certain reference value for the application and promotion of the high-speed integrated circuit test loading board calibration device in the integrated circuit test system, ensuring the accuracy and reliability of the high-speed integrated circuit test process.

Description of drawings

FIG. 1 is a schematic diagram of a loss de-embedding system for a high-speed integrated circuit test load board calibration device provided by an embodiment of the present invention;

FIG. 2 is a wiring diagram of an auxiliary verification board in the loss de-embedding method of the high-speed integrated circuit test load board calibration device provided by the embodiment of the present invention;

Mark Description:

1-loading board calibration device; 10-first calibration instrument; 11-signal input device; 12-integrated circuit interface adapter; 13-microwave probe; 14-radio frequency cable; 15-second calibration instrument; 16-auxiliary verification board; 17-data processing module.

Detailed ways

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

The basic principle of the present invention is that when calibrating the loading board, since the IC interface adapter is included in the loading board calibrating device, the IC interface adapter itself will introduce some loss errors, which makes the effect of calibrating the loading board unsatisfactory. An auxiliary verification board is set between the signal input device and the microwave probe, the integrated circuit interface adapter and the loading board are filtered out, and a measurement circuit is separately constructed between the signal input device, the auxiliary verification board and the microwave probe, and the integrated circuit interface adapter is introduced into the The loss de-embedding parameters are quantized and compensated for the calibration amount. The data processing module compares the signals of the first calibration instrument and the second calibration instrument before and after the auxiliary verification board is connected to the calibration device of the high-speed integrated circuit test load board, and can calculate the de-embedding of the time domain parameters during the calibration process of the high-speed integrated circuit test load board. The time domain parameters include: the compensation value of the rise time of other devices in the high-speed integrated circuit test loading board calibration device except the microwave probe and the radio frequency cable, the rise time of the loaded board after compensation, the compensation value of the amplitude and the compensated The amplitude attenuation value of the loaded board, and the eye diagram area of the calibrated loaded board at the highest transmission rate.

More specifically, as shown in FIG. 1 , the present invention provides a loss de-embedding system for a high-speed integrated circuit test loading board calibration device, including: a signal auxiliary verification board 16 and a data processing module 17 as shown in FIG. 2 ; The loading plate calibration device 1 includes a first calibration instrument 10, a second calibration instrument 15, a signal input device 11, an integrated circuit interface adapter 12, a microwave probe 13 and a radio frequency cable 14;

The integrated circuit interface adapter 12, the microwave probe 13, the radio frequency cable 14 and the second calibration instrument 15 are connected in sequence; the output end of the first calibration instrument 10 is connected with the signal input device 11; the output end of the signal input device 11 is connected with the loading plate connected; the input end of the integrated circuit interface adapter is connected with the loading board;

Two types of interfaces are reserved on the upper and lower surfaces of the auxiliary verification board 16, one side is an interface adapted to the signal input device 11, and the other side is a pad interface adapted to the microwave probe 13. After the upper and lower connections, the measurement of the loaded board is formed. The circuit can meet the de-embedding of time domain parameters in the calibration process of high-speed integrated circuit test loading board;

The first calibration instrument 10 is used to provide high-speed digital signals or fast edge signals; the signal input device 11 is used to transmit high-speed mathematical signals or fast edge signals to the loading board; the integrated circuit interface adapter 12 is used to detect each pad on the loading board The output signal on the target pad; the microwave probe 13 is used to move to the position of the target pad, and the corresponding output signal on the target pad is transmitted to the second calibration instrument 15 through the radio frequency cable 14; the second calibration instrument 15 is used to output The output signal corresponding to the pad on the loading board; the auxiliary verification board 16 is used to form a measurement circuit except the loaded board to realize the de-embedding of the time domain parameters in the high-speed integrated circuit test loading board calibration process; the data processing module 17 is used for The signals of the first calibration instrument and the second calibration instrument are compared before and after the auxiliary verification board is connected to the calibration device of the high-speed integrated circuit test load board, and the de-embedding of the time domain parameters during the calibration process of the high-speed integrated circuit test load board is calculated.

Further preferably, the auxiliary verification board is a PCB board.

Further preferably, the integrated circuit interface adapter includes a front probe position array and a back probe position array; the front probe position array and the back probe position array are respectively fixed to both sides of the loading board; the front probe position array and the back probe position array The shape of the bit array is a fan.

Further preferably, the microwave probe is a GSG-DX microwave probe with a bandwidth of 50G.

Further preferably, the first calibration instrument is a high-speed sampling oscilloscope TDR module; the second calibration instrument is an oscilloscope.

Further preferably, the radio frequency cable is an SMA-SMA cable with a bandwidth of 18G.

On the other hand, the loss de-embedding method of the high-speed integrated circuit test loading board calibration device provided by the present invention includes the following steps:

S1: Use the first calibration instrument 10 to input the high-speed digital signal, and the second calibration instrument 15 collects the eye pattern formed by the output waveform, calculates the compensation value h of the eye height according to the difference between the eye height and the high-speed signal amplitude, and calculates the eye height compensation value h according to the eye width and high-speed digital signal. The compensation value W of the eye width is calculated from the difference of the signal pulse width, and the rise time compensation value t is obtained according to the rise time of the eye diagram. The eye diagram area of the calibrated loading board at the highest transmission rate is: S _EYE = [( _WEYE +W )-(T _r +t)]×(H _EYE +h); Among them, _WEYE is the width of the eye diagram; _HEYE is the height of the eye diagram; T _r is the rise time of the eye diagram; W is the eye width compensation value; t is Rise time compensation value; h is eye height compensation value;

S2: Use the first calibration instrument 10 to input a high-speed digital signal, and the second calibration instrument 15 collects the output waveform amplitude, and the compensation value of the amplitude is ΔV _c =20lg(V _0c /V _mc ); wherein, V _0c is an auxiliary verification board The peak-to-peak value of the signal sent by the first calibration instrument under 16 loops; V _mc is the peak-to-peak value of the second calibration instrument 15 acquisition signal under the auxiliary verification board 16 loops; the amplitude attenuation of the loaded plate after compensation is ΔV _L =20lg ( _V V _mc /V _m V _0c ); Wherein, V ₀ is the peak-to-peak value of the signal sent by the first calibration instrument when the auxiliary verification board is not connected between the signal input device 11 and the microwave probe 13; V _m is the auxiliary verification board not connected When connecting between the signal input device 11 and the microwave probe 13, the second calibration instrument 15 collects the peak-to-peak value of the signal;

其中，t_p为微波探针13的上升时间；t_c为射频线缆14的上升时间；补偿后的被校准加载板的上升时间为

其中，t_r为辅助验证板未接入信号输入装置11与微波探针13之间时第二校准仪表采集的上升时间。S3: Use the first calibration instrument to send the standard fast-edge signal t ₀ , the second calibration instrument 15 collects the output waveform and measures the rise time t ₁ of the signal, and other parts of the calibration device except the microwave probe 13 and the radio frequency cable 14 rise The offset value of the time is

Wherein, t _p is the rise time of microwave probe 13; t _c is the rise time of radio frequency cable 14; The rise time of the calibrated loading board after compensation is

Wherein, t _r is the rise time collected by the second calibration instrument when the auxiliary verification board is not connected between the signal input device 11 and the microwave probe 13 .

Example

The present invention provides a method for de-embedding the loss of a calibration device for a high-speed integrated circuit test loading board. In this embodiment, the GTL40-500 type GSG-DX microwave probe is selected, the bandwidth is 50G, and the rise time _tp =0.35/50G=7ps is selected. For SMA-SMA cables with a bandwidth of 18G, the rise time of the high-speed cable is t _c =0.35/18G=19.4ps, and the rise time of the standard fast-edge signal sent by the Tektronix DSA8200 high-speed sampling oscilloscope TDR module is: t ₀ =30ps, the rise time It can be calculated from its nominal bandwidth BW _3dB , where t=K/BW _3dB , take K=0.35; the first calibration instrument 10 selects MP1800 high-speed pattern generator, and the second calibration instrument 2 selects DSA71254C high-speed real-time oscilloscope.

It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.

Claims (6)

1. A loss de-embedding system of a high-speed integrated circuit test load plate calibration device is characterized by comprising: an auxiliary verification board (16) and a data processing module (17);

the calibration device for the high-speed integrated circuit test loading plate comprises a first calibration instrument (10), a signal input device (11), an integrated circuit interface adapter (12), a microwave probe (13), a radio frequency cable (14) and a second calibration instrument (15); the integrated circuit interface adapter (12), the microwave probe (13), the radio frequency cable (14) and the second calibration instrument (15) are connected in sequence; the output end of the first calibration instrument (10) is connected with the signal input device (11); the output end of the signal input device (11) is connected with the loading plate; the input end of the integrated circuit interface adapter (12) is connected with the loading plate;

two interfaces are reserved on the upper surface and the lower surface of the auxiliary verification board (16), one interface is an interface adaptive to the signal input device (11), the other interface is a pad interface adaptive to the microwave probe (13), and the data processing module is connected with the first calibration instrument (10) and the second calibration instrument (15);

the first calibration meter (10) is used for providing a high-speed digital signal or a fast-edge signal; the second calibration instrument (15) is used for acquiring an output signal on the loading plate; the auxiliary verification board (16) is used for forming a measurement loop for removing the loaded board, and the data processing module (17) is used for comparing signals of the first calibration instrument (10) and the second calibration instrument (15) before and after the auxiliary verification board (16) is connected to the high-speed integrated circuit test loading board calibration device, and calculating de-embedding of time domain parameters in the calibration process of the high-speed integrated circuit test loading board.

2. The loss de-embedding system of claim 1, wherein the integrated circuit interface adapter (12) includes a front side probe bit array and a back side probe bit array; the front probe position array and the back probe position array are respectively fixed to two sides of the loading plate; the front probe bit array and the back probe bit array are in fan shapes.

3. The loss de-embedding system of claim 3, wherein the microwave probe (13) is a GSG-DX microwave probe with a bandwidth of 50G;

the first calibration instrument is a high-speed sampling oscilloscope TDR module; the second calibration instrument is an oscilloscope;

the radio frequency cable (14) is an SMA-SMA cable with a bandwidth of 18G.

4. A loss de-embedding method based on the loss de-embedding system of claim 1, comprising the steps of:

an auxiliary verification board (16) is connected between a signal input device (11) and a microwave probe (13), a first calibration instrument (10) is used for inputting high-speed digital signals, and a second calibration instrument (15) is used for collecting an eye pattern formed by output waveforms of a loading board;

calculating an eye height compensation value according to the difference between the eye pattern height and the high-speed digital signal amplitude;

calculating a compensation value of the eye width according to the difference between the eye pattern width and the pulse width of the high-speed digital signal;

and calculating the eye pattern area of the calibration loading plate at the highest transmission rate by combining the eye pattern rising time with the eye height compensation value and the eye width compensation value.

5. A loss de-embedding method based on the loss de-embedding system of claim 1, comprising the steps of:

before and after the auxiliary verification board (16) is connected between the signal input device (11) and the microwave probe (13), a first calibration instrument (10) is adopted to input high-speed digital signals, and a second calibration instrument (15) is adopted to collect and output waveform amplitude values;

and calculating a compensation value of the amplitude and a compensated load plate amplitude attenuation value by combining the peak-to-peak value of a signal sent by a first calibration instrument before and after the auxiliary verification plate (16) is connected between the signal input device (11) and the microwave probe (13) and the peak-to-peak value of an output waveform collected by a second calibration instrument (15).

6. A loss de-embedding method based on the loss de-embedding system of claim 1, comprising the steps of:

the auxiliary verification board (16) is connected between the signal input device (11) and the microwave probe (13), a first calibration instrument (10) is adopted to send a fast edge signal, a second calibration instrument (15) is adopted to collect an output waveform, and the rise time of the output signal is measured;

calculating the compensation value of the rise time of other devices except the microwave probe (13) and the radio frequency cable (14) in the high-speed integrated circuit test loading plate calibration device by combining the rise time of the microwave probe (13) and the rise time of the radio frequency cable (14);

and meanwhile, the rise time of the output signal collected by the second calibration instrument (15) when the auxiliary verification board (16) is not accessed between the signal input device (11) and the microwave probe (13) is combined, and the rise time of the compensated load board is calculated.

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