CN115847283A - Nozzle pressing super-mirror surface tool for gas mass flow controller and machining method - Google Patents

Abstract

The present application relates to the technical field of precision machining, in particular, to a gas mass flow controller pressure nozzle super-mirror tooling and processing method, the tooling includes a grinding and polishing disc, a grinding and polishing baffle and a pre-tightening nut, wherein: grinding There are pressure nozzle holes and magnet holes on the surface of the polishing disc; the pressure nozzle holes are used to place the pressure nozzles and pre-tightening nuts to be processed, and the magnet holes are used to place magnet posts; the grinding and polishing baffle is adsorbed on the bottom surface of the grinding and polishing disc through the magnet posts ; There are through holes corresponding to the nozzle holes on the grinding and polishing baffle. This application adopts the multi-hole pressure nozzle super-mirror tooling with unique structure to process the mirror surface of the pressure nozzle of the gas mass flow controller, and controls the edge of the pressure nozzle, the grinding pressure and the verticality of the pressure nozzle, which can solve the problem of traditional mechanical grinding and polishing equipment. When the mirror surface of the nozzle is processed, the edge of the nozzle is collapsed or ground into a bevel, which causes the valve port to leak.

Description

A gas mass flow controller pressure nozzle ultra-mirror surface tooling and processing method

technical field

The application relates to the technical field of precision machining, in particular, to a super-mirror tooling for a pressure nozzle of a gas mass flow controller and a processing method.

Background technique

Gas mass flow controllers are widely used in aerospace, semiconductor, instrumentation, material preparation, biomedicine and other fields, and are an important instrument for gas mass flow measurement and control. In special fields such as semiconductors, a large number of high-end all-metal dynamic sealing flow controllers are used. "Pressure nozzle" is an important component of high-end all-metal dynamic sealing gas mass flow controllers. The opening distance between the nozzle and the pressure nozzle is used to adjust the flow rate. The larger the distance between the nozzle and the pressure nozzle, the greater the flow rate of the gas mass flow controller. When the driving signal is zero, the pressure nozzle is tightly attached to the nozzle by the downward elastic force of the planar spring. At this time, theoretically, the flow rate flowing through the flow regulating valve is zero.

However, in the actual production of gas mass flow controller products, since the pressure nozzle needs to be processed into a super-mirror surface with a surface roughness of about Ra0. verticality. The traditional mechanical grinding and polishing method is difficult to process the pressure nozzle and the nozzle to meet the metal sealing requirements, that is, when the mirror surface of the pressure nozzle is collapsed or sloped, the flow rate of the gas mass flow controller will not be zero when the gas mass flow controller is closed. That is, there is "air leakage at the valve port".

Contents of the invention

The present application provides a gas mass flow controller pressure nozzle super-mirror surface tooling and processing method, which solves the problem that the traditional mirror surface processing is easy to process the edge of the mirror surface to collapse or slope, resulting in "air leakage at the valve port".

In order to achieve the above purpose, the application provides a gas mass flow controller pressure nozzle ultra-mirror tooling, including a grinding and polishing disc, a grinding and polishing baffle and a pre-tightening nut, wherein: the surface of the grinding and polishing disc is provided with a nozzle hole and a magnet hole; the nozzle hole is used to place the pressure nozzle to be processed and the pre-tightening nut, and the magnet hole is used to place the magnet column; the grinding and polishing baffle is adsorbed on the bottom surface of the grinding and polishing disc through the magnet column; the grinding and polishing baffle is provided with a pressure nozzle Holes correspond to vias.

Further, the nozzle hole is a through hole perpendicular to the bottom surface of the grinding and polishing disc, and the magnet hole is a blind hole perpendicular to the bottom surface of the grinding and polishing disc.

Further, the diameter of the nozzle hole is larger than the diameter of the nozzle to be processed.

Further, the material of the grinding and polishing baffle is a magnetically permeable material, and its thickness is smaller than the height of the press nozzle to be processed.

In addition, the present application also provides a processing method using a gas mass flow controller pressure nozzle super-mirror tooling, including the following steps: Step 1: attach the grinding and polishing baffle to the bottom surface of the grinding and polishing disc, put the magnet column into In the magnet hole on the surface of the grinding and polishing disc, the grinding and polishing baffle is adsorbed on the bottom surface of the grinding and polishing disc; Step 2: Put the nozzle to be processed into the nozzle hole on the surface of the grinding and polishing disc; Step 3: Insert the pre-tightening nut Put it into the nozzle hole on the surface of the grinding and polishing disc, make the pre-tightening nut contact with the nozzle to be processed, adjust the pre-tightening nut, squeeze the nozzle to be processed from the nozzle hole, and enter the through hole on the grinding and polishing baffle Inside, make the pressure nozzle to be processed and the grinding and polishing baffle on the same plane; Step 4: Put the tooling as a whole on the grinding device, grind the pressure nozzle to be processed, and observe the surface of the pressure nozzle to be processed after 3-5 minutes. When the surface of the press nozzle to be processed has no scratches visible to the naked eye, the grinding is qualified and rinsed with water; Step 5: Put the tooling as a whole on the polishing device, and polish the press nozzle to be processed for 5 minutes, and observe whether the surface of the press nozzle to be processed is free When it is scratched and mirror surface, the polishing is over; Step 6: Take out the magnet column, remove the grinding and polishing baffle, continue to tighten the pre-tightening nut, and squeeze out the finished nozzle completely. After removing the nozzle, clean it with alcohol Clean and wipe clean with a dust-free cloth; Step 7: Use a three-dimensional profiler to image and measure the upper surface of the press nozzle after processing, and evaluate whether the press nozzle is qualified.

Further, in step 7, the following steps are used to judge whether the nozzle is qualified: Step 7.1: If the imaging section displayed by the three-dimensional profiler is a plane, and the surface roughness is ≤ Ra0.009, the nozzle is qualified; if the three-dimensional profiler displays If the imaging section is a curved surface or the surface roughness is >Ra0.009, the nozzle is unqualified; step 7.2: when the nozzle is unqualified, measure the height of the nozzle; step 7.3: if the height of the nozzle is within the tolerance range, Then repeat steps 1-6, and process again; if the height of the press nozzle is not within the tolerance range, it will be scrapped directly.

The invention provides a super-mirror surface tooling and processing method for a gas mass flow controller pressure nozzle, which has the following beneficial effects:

This application adopts the multi-hole pressure nozzle super-mirror tooling with unique structure to process the mirror surface of the pressure nozzle of the gas mass flow controller, and controls the edge of the pressure nozzle, the grinding pressure and the verticality of the pressure nozzle, which can solve the problem of traditional mechanical grinding and polishing equipment. When the mirror surface of the nozzle is processed, the edge of the nozzle is collapsed or ground into a bevel, which causes the valve port to leak.

Description of drawings

The accompanying drawings, which constitute a part of this application, are included to provide a further understanding of the application and make other features, objects and advantages of the application apparent. The drawings and descriptions of the schematic embodiments of the application are used to explain the application, and do not constitute an improper limitation to the application. In the attached picture:

Fig. 1 is a schematic structural diagram of a gas mass flow controller pressure nozzle super-mirror tooling provided according to an embodiment of the present application;

Fig. 2 is a schematic diagram of the assembly of the ultra-mirror tooling of the pressure nozzle of the gas mass flow controller provided according to the embodiment of the present application;

In the figure: 1-grinding and polishing disc, 2-grinding and polishing baffle, 3-preload nut, 4-pressure nozzle hole, 5-magnet hole, 6-pressure nozzle to be processed.

Detailed ways

In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiment of the application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiment of the application. Obviously, the described embodiment is only It is an embodiment of a part of the application, but not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the scope of protection of this application.

It should be noted that the terms "first" and "second" in the description and claims of the present application and the above drawings are used to distinguish similar objects, but not necessarily used to describe a specific sequence or sequence. It should be understood that the data so used may be interchanged under appropriate circumstances for the embodiments of the application described herein. Furthermore, the terms "comprising" and "having", as well as any variations thereof, are intended to cover a non-exclusive inclusion, for example, a process, method, system, product or device comprising a sequence of steps or elements is not necessarily limited to the expressly listed instead, may include other steps or elements not explicitly listed or inherent to the process, method, product or apparatus.

In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", The orientations or positional relationships indicated by "vertical", "horizontal", "horizontal", and "longitudinal" are based on the orientations or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit that the indicated devices, elements or components must have a specific orientation, or be constructed and operated in a specific orientation.

Moreover, some of the above terms may be used to indicate other meanings besides orientation or positional relationship, for example, the term "upper" may also be used to indicate a certain attachment relationship or connection relationship in some cases. Those skilled in the art can understand the specific meanings of these terms in this application according to specific situations.

In addition, the term "plurality" shall mean two or more than two.

It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and embodiments.

As shown in Fig. 1-Fig. 2, the present application provides a gas mass flow controller pressure nozzle ultra-mirror tooling, including a grinding and polishing disc 1, a grinding and polishing baffle 2 and a pre-tightening nut 3, wherein: the surface of the grinding and polishing disc 1 There are pressure nozzle hole 4 and magnet hole 5; the pressure nozzle hole 4 is used to place the pressure nozzle 6 and the pre-tightening nut 3 to be processed, and the magnet hole 5 is used to place the magnet column; the grinding and polishing baffle 2 is adsorbed on the grinding surface by the magnet column The bottom surface of the polishing disc 1 ; the grinding and polishing baffle plate 2 is provided with a through hole corresponding to the nozzle hole 4 .

Specifically, the gas mass flow controller pressure nozzle ultra-mirror tooling provided in the embodiment of the present application is mainly used to fix the gas mass flow controller pressure nozzle, so that the gas mass flow controller pressure nozzle can be ground in the process of ultra-mirror surface processing. And the polishing is more uniform, preventing the edge of the nozzle from collapsing or bevelling. Wherein, in the embodiment of the present application, the diameter of the grinding and polishing disc 1 is preferably 200mm, the thickness is preferably 50mm, the material is preferably 316L, and the surface is preferably processed with 16 nozzle holes 4 and 24 magnet holes 5 for the nozzle holes 4. For placing the pressure nozzle 6 to be processed and the pre-tightening nut 3, the number of the pre-tightening nut 3 is the same as the number of the pressure nozzle 6 to be processed (not all the pre-tightening nuts 3 are marked in Figure 2), and the magnet hole 5 is used to place The magnet column and the grinding and polishing baffle 2 are adsorbed on the bottom surface of the grinding and polishing disc 1 through the magnet column. The grinding and polishing baffle 2 is mainly used to protect the edge of the press nozzle from being ground and collapsed. During the processing, the grinding and polishing baffle 2 will also be Grinding and polishing are equivalent to a kind of consumables, and the grinding and polishing baffle 2 can be replaced at any time according to the actual processing conditions.

More specifically, before processing, first put the pressure nozzle 6 to be processed into the pressure nozzle hole 4, and then put the same number of pre-tightening nuts 3 into the pressure nozzle hole 4, that is, place one in each pressure nozzle hole 4 The pressure nozzle 6 to be processed and a pre-tightening nut 3, during the processing, by adjusting the pre-tightening nut 3, the pressure nozzle 6 to be processed in the pressure nozzle hole 4 is squeezed, so that it enters the corresponding surface of the grinding and polishing baffle plate 2 below. In the through hole, the whole tooling is then placed on the grinding and polishing device for processing, so that the grinding and polishing baffle 2 and the pressure nozzle 6 to be processed are rotated together to ensure that the upper surface of the pressure nozzle 6 to be processed is fully ground during the entire processing process. The polishing baffle 2 is protected to ensure that its edges will not collapse, so as to realize the overall grinding and polishing of the press nozzle.

Further, the nozzle hole 4 is a through hole perpendicular to the bottom surface of the grinding and polishing disc 1 , and the magnet hole 5 is a blind hole perpendicular to the bottom surface of the grinding and polishing disc 1 . The pressure nozzle hole 4 is a through hole, correspondingly cooperates with the through hole of the grinding and polishing baffle plate 2 below, and is used for placing the pressure nozzle 6 to be processed. The magnet hole 5 is a blind hole, and the inside is used to place a magnet column, so that the grinding and polishing baffle 2 can be adsorbed on the bottom surface of the grinding and polishing disc 1 .

Further, the diameter of the nozzle hole 4 is larger than the diameter of the nozzle 6 to be processed. In the embodiment of the present application, the diameter of the pressure nozzle hole 4 is slightly larger than the diameter of the pressure nozzle 6 to be processed, preferably greater than 0.1 mm. During the processing, the pressure nozzle 6 to be processed can be tightly fixed in the pressure nozzle hole 4 to ensure Machining verticality.

Further, the material of the grinding and polishing baffle 2 is a magnetically permeable material, and its thickness is smaller than the height of the press nozzle 6 to be processed. The grinding and polishing baffle plate 2 is made of a magnetically permeable material, and the pressure nozzle 6 to be processed is further tightened in order to be adsorbed to the grinding and polishing disc 1 by the magnet column. In the embodiment of the present application, the height of the pressure nozzle 6 to be processed is preferably 0.55 mm, and the thickness of the grinding and polishing baffle 2 is 0.5 mm, which is just enough to make the head of the pressure nozzle protrude in the through hole, so that during the grinding and polishing process Grind off 0.05mm.

In addition, the embodiment of the present application also provides a processing method using a gas mass flow controller pressure nozzle super-mirror tooling, including the following steps:

Step 1: Stick the grinding and polishing baffle 2 on the bottom surface of the grinding and polishing disc 1, put the magnet column into the magnet hole 5 on the surface of the grinding and polishing disc 1, and make the grinding and polishing baffle 2 adsorb on the bottom surface of the grinding and polishing disc 1 ;

Step 2: Put the nozzle 6 to be processed into the nozzle hole 4 on the surface of the grinding and polishing disc 1;

Step 3: Put the pre-tightening nut 3 into the nozzle hole 4 on the surface of the grinding and polishing disc 1, make the pre-tightening screw 3 contact with the pressure nozzle 6 to be processed, adjust the pre-tightening nut 3, and put the pressure nozzle 6 to be processed from the pressure nozzle Extrude from the hole 4 and enter the through hole on the grinding and polishing baffle 2, so that the pressure nozzle 6 to be processed and the grinding and polishing baffle 2 are on the same plane; the pre-tightening nut 3 is used to apply a certain pressure to the pressure nozzle 6 to be processed , so that the pressure nozzle 6 to be processed moves downward in the nozzle hole 4, enters the through hole of the grinding and polishing baffle 2, and the upper surface of the pressure nozzle 6 to be processed is tightly attached to the grinding and polishing baffle 2 to prevent grinding During the process, the grinding surface is not in the same plane, so that the nozzle is processed into a bevel;

Step 4: Put the tooling as a whole on the grinding device, and grind the press nozzle 6 to be processed. After 3-5 minutes, observe the surface of the press nozzle 6 to be processed. When there are no visible scratches on the surface of the press nozzle 6 to be processed , grinding qualified, rinse with water;

Step 5: Put the tooling as a whole on the polishing device, polish the press nozzle 6 to be processed, and polish for 5 minutes, and observe that the surface of the press nozzle 6 to be processed has no scratches and is a mirror surface, and the polishing is completed;

Step 6: Take out the magnet column, remove the grinding and polishing baffle 2, continue to tighten the pre-tightening nut 3, and squeeze out the finished press nozzle completely. After removing the press nozzle, clean it with alcohol and wipe it clean with a dust-free cloth ;

Step 7.1: Use a three-dimensional profiler to image and measure the upper surface of the press nozzle after processing, and evaluate whether the press nozzle is qualified. If the imaging section displayed by the three-dimensional profiler is a plane, and the surface roughness ≤ Ra0.009, the processing is complete The finished press nozzle is qualified; if the imaging section displayed by the three-dimensional profiler is a curved surface or the surface roughness is >Ra0.009, the finished press nozzle is unqualified;

Step 7.2: When the finished press nozzle is unqualified, measure the height of the press nozzle;

Step 7.3: If the height of the press nozzle is within the tolerance range, repeat steps 1-6 to process again; if the height of the press nozzle is not within the tolerance range, directly scrap it.

The above descriptions are only preferred embodiments of the present application, and are not intended to limit the present application. For those skilled in the art, there may be various modifications and changes in the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of this application shall be included within the protection scope of this application.

Claims (6)

1. The utility model provides a super mirror surface frock of gas mass flow controller pressure mouth which characterized in that, including lapping polishing dish, lapping polishing baffle and pretension nut, wherein:

the surface of the grinding and polishing disk is provided with a pressure nozzle hole and a magnet hole;

the pressure nozzle hole is used for placing a pressure nozzle to be processed and the pre-tightening nut, and the magnet hole is used for placing a magnet column;

the grinding and polishing baffle is adsorbed on the bottom surface of the grinding and polishing disk through the magnet column;

and the grinding and polishing baffle is provided with a through hole corresponding to the pressure nozzle hole.

2. The gas mass flow controller nozzle orifice tooling fixture of claim 1, wherein the nozzle orifice is a through hole perpendicular to the bottom surface of the polishing disk, and the magnet orifice is a blind hole perpendicular to the bottom surface of the polishing disk.

3. The gas mass flow controller nozzle super-mirror surface tool according to claim 2, wherein the diameter of the nozzle hole is larger than that of the nozzle to be machined.

4. The gas mass flow controller nozzle super-mirror surface tool according to claim 1, wherein the grinding and polishing baffle is made of a magnetic conductive material, and the thickness of the grinding and polishing baffle is smaller than the height of a nozzle to be machined.

5. A processing method for a nozzle pressing super mirror surface tool of a gas mass flow controller according to any one of claims 1 to 4, characterized by comprising the following steps:

step 1: attaching a grinding and polishing baffle plate to the bottom surface of the grinding and polishing disk, and placing a magnet column into a magnet hole on the surface of the grinding and polishing disk to enable the grinding and polishing baffle plate to be adsorbed on the bottom surface of the grinding and polishing disk;

step 2: putting a pressure nozzle to be processed into a pressure nozzle hole on the surface of the grinding and polishing disc;

and step 3: putting a pre-tightening nut into a pressure nozzle hole on the surface of the grinding and polishing disc, enabling the pre-tightening nut to be in contact with a pressure nozzle to be processed, adjusting the pre-tightening nut, extruding the pressure nozzle to be processed from the pressure nozzle hole, and enabling the pressure nozzle to be processed and the grinding and polishing baffle plate to be in the same plane;

and 4, step 4: the whole tool is put on a grinding device, a pressure nozzle to be processed is ground, the surface condition of the pressure nozzle to be processed is observed after 3-5 minutes, when no visible scratch is formed on the surface of the pressure nozzle to be processed, the grinding is qualified, and the pressure nozzle is washed by water;

and 5: the whole tool is put on a polishing device, the pressure nozzle to be processed is polished for 5 minutes, and when the surface of the pressure nozzle to be processed is observed to be free of scratches and is a mirror surface, the polishing is finished;

step 6: taking out the magnet column, taking down the grinding and polishing baffle, continuously screwing the pre-tightening nut, completely extruding the processed pressure nozzle, cleaning with alcohol after taking down the pressure nozzle, and wiping with dust-free cloth;

and 7: and imaging and measuring the upper surface of the processed pressure nozzle by using a three-dimensional contourgraph, and evaluating whether the pressure nozzle is qualified.

6. The machining method for the super mirror surface tool by using the pressure nozzle of the gas mass flow controller as claimed in claim 5, wherein in the step 7, the following steps are adopted to judge whether the pressure nozzle is qualified or not:

step 7.1: if the imaging section displayed by the three-dimensional contourgraph is a plane and the surface roughness is less than or equal to Ra0.009, the pressure nozzle is qualified; if the imaging section displayed by the three-dimensional contourgraph is a curved surface or the surface roughness is more than Ra0.009, the pressure nozzle is unqualified;

step 7.2: when the pressure nozzle is unqualified, measuring the height of the pressure nozzle;

step 7.3: if the height of the pressure nozzle is within the tolerance range, repeating the steps 1-6, and machining again; and if the height of the pressure nozzle is not within the tolerance range, directly performing scrapping treatment.

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