CN115911796A - A Millimeter Wave Filter Power Splitter Based on Substrate Integrated Waveguide - Google Patents
A Millimeter Wave Filter Power Splitter Based on Substrate Integrated Waveguide Download PDFInfo
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Abstract
本发明属于射频通信技术领域,具体涉及一种基于基片集成波导的毫米波滤波功分器,包括:基板上层金属层、基板介质层和基板下层金属层;基板下层金属层作为接地面,铺满整个基板介质层的下表面,基板上层金属层设置在基板介质层上表面;基板介质层设置有若干个规则排列的金属通孔,金属通孔贯穿整个基板介质层,连通基板上层金属层和基板下层金属层。本发明提出的滤波功分器是三个SIW腔体耦合的滤波功分结构,在其输出端的两个SIW矩形腔体中,耦合开窗和微带到SIW过渡结构互相正交垂直,该结构可以在S参数图中引入一个传输零点来增强滤波功分器的带外抑制,进而提升滤波功分器的滤波性能。
The invention belongs to the technical field of radio frequency communication, and specifically relates to a millimeter-wave filter power splitter based on a substrate integrated waveguide, comprising: a metal layer on an upper substrate, a medium layer on a substrate, and a metal layer below a substrate; the metal layer on the lower substrate serves as a ground plane, and The lower surface of the entire dielectric layer of the substrate is covered, and the upper metal layer of the substrate is arranged on the upper surface of the dielectric layer of the substrate; the dielectric layer of the substrate is provided with a number of regularly arranged metal through holes, and the metal through holes run through the entire dielectric layer of the substrate, connecting the upper metal layer of the substrate with the Substrate metal layer. The filter power splitter proposed by the present invention is a filter power splitter structure coupled with three SIW cavities. In the two SIW rectangular cavities at the output end, the coupling window and the microstrip SIW transition structure are orthogonal and vertical to each other. The structure A transmission zero point can be introduced in the S-parameter diagram to enhance the out-of-band rejection of the filter power splitter, thereby improving the filtering performance of the filter power splitter.
Description
技术领域technical field
本发明属于射频通信技术领域,具体涉及一种基于基片集成波导的毫米波滤波功分器。The invention belongs to the technical field of radio frequency communication, and in particular relates to a millimeter wave filter power splitter based on a substrate integrated waveguide.
背景技术Background technique
在电磁波频段中,30GHz至300GHz范围内的电磁波定义为毫米波段,该频段内的电磁波具有频带宽、波束窄、窗口频率大气吸收衰减小等特点,将其运用于通信系统中具有抗衰减能力强、抗干扰能力强、信息容量大、保密性高等显著特点。因此,毫米波技术在通信领域具有极大的运用价值,在军用和民用领域得到了广泛研究和应用。In the electromagnetic wave frequency band, the electromagnetic wave in the range of 30GHz to 300GHz is defined as the millimeter wave band. The electromagnetic wave in this frequency band has the characteristics of wide frequency band, narrow beam, and small window frequency atmospheric absorption attenuation. It has strong anti-attenuation ability when it is used in communication systems. , strong anti-interference ability, large information capacity, and high confidentiality. Therefore, millimeter wave technology has great application value in the field of communication, and has been widely researched and applied in military and civilian fields.
在微波毫米波射频电路中,通常将滤波器与功分器级联使用,以此在实现功率分配的基础上抑制谐波,同时消除非线性器件引起的噪声和干扰。但滤波器与功分器级联的电路体积较大,不利于小型化射频电路系统的实现,同时该结构电路损耗较大,设计成本较高。所以有研究人员提出将功分器与滤波器进行一体化设计的滤波功分器,来实现具有频率选择性能的功分器,避免在功分器的输入或微带到SIW过渡结构额外级联滤波器,从而减小了整个射频系统的体积和损耗,因此成为实现小型化射频前端的重要实现手段。In microwave and millimeter wave radio frequency circuits, filters and power dividers are usually cascaded to suppress harmonics on the basis of power distribution and eliminate noise and interference caused by nonlinear devices. However, the cascaded circuit of the filter and the power divider is large, which is not conducive to the realization of a miniaturized radio frequency circuit system. At the same time, the circuit loss of this structure is large, and the design cost is high. Therefore, some researchers have proposed a filter power splitter that integrates the design of the power splitter and the filter to realize a power splitter with frequency selective performance, and avoid additional cascading at the input of the power splitter or the microstrip to the SIW transition structure. Filter, thereby reducing the size and loss of the entire radio frequency system, so it has become an important means of realizing the miniaturized radio frequency front end.
随着射频系统应用的频率不断提高,毫米波频段得以大规模应用,但对电路的加工精度提出了较高的要求,这也相应地提升了加工成本,限制了毫米波应用的推广。基片集成波导(Substrate Integrated Waveguide,SIW)是一种新型微波毫米波传输线结构,可以通过印刷电路板(Printed Circuit Board,PCB)加工技术获得,其加工技术成熟且价格低廉。SIW在介质基片上实现了近似封闭的导波结构,不仅具有损耗低,Q值高等优点,同时还可以方便地与平面电路集成,该传输结构在微波毫米波高频段有广阔的应用前景。As the frequency of radio frequency system applications continues to increase, the millimeter wave frequency band can be used on a large scale, but higher requirements are placed on the processing accuracy of the circuit, which also increases the processing cost accordingly, limiting the promotion of millimeter wave applications. Substrate Integrated Waveguide (SIW) is a new type of microwave and millimeter wave transmission line structure, which can be obtained through Printed Circuit Board (PCB) processing technology, and its processing technology is mature and low in price. SIW realizes a nearly closed waveguide structure on the dielectric substrate, which not only has the advantages of low loss and high Q value, but also can be easily integrated with planar circuits. This transmission structure has broad application prospects in the microwave and millimeter wave high-frequency bands.
目前,随着通信频谱的日益紧缺,微波毫米波频段因其丰富的频谱资源得到了大规模的应用。但是频率升高带来了制造加工上的难度,目前应用较多的高频段器件制造工艺例如:金属波导、LTCC工艺等,这些工艺的加工难度大,在设计时需要考虑的因素较多,导致其设计和生产成本较高。At present, with the increasingly scarce communication spectrum, the microwave and millimeter wave bands have been widely used due to their rich spectrum resources. However, the increase in frequency has brought difficulties in manufacturing and processing. At present, the manufacturing processes of high-frequency devices such as metal waveguides and LTCC processes are widely used. These processes are difficult to process, and there are many factors that need to be considered in the design, resulting in Its design and production costs are relatively high.
现有的滤波功分器,例如:基于SIW耦合腔体的带通滤波功分器,其结构如图1所示,利用SIW三角腔的双模响应(TE101模和TE102模)设计了双通带带通滤波功分器,但是其第一通带的输入回波损耗效果不佳(仅优于10dB),且该滤波功分器中未引入诸如交叉耦合的结构,使得整个S参数结果图中未引入传输零点,导致通带带外抑制效果有限,频率选择效果不佳。现有技术利用半模SIW三角腔体构造功分输出腔体,但半模SIW腔体的质量因素(Q值)比全模SIW腔体低,特别是在高频毫米波频段。Existing filter power splitters, such as bandpass filter power splitters based on SIW coupled cavities, have a structure as shown in Figure 1, using the dual-mode response (TE 101 mode and TE 102 mode) of the SIW triangular cavity to design Dual-band band-pass filter power divider, but the input return loss effect of the first passband is not good (only better than 10dB), and no structure such as cross-coupling is introduced into the filter power divider, so that the entire S-parameter The transmission zero point is not introduced in the result figure, resulting in limited passband out-of-band suppression effect and poor frequency selection effect. In the prior art, the half-mode SIW triangular cavity is used to construct the power distribution output cavity, but the quality factor (Q value) of the half-mode SIW cavity is lower than that of the full-mode SIW cavity, especially in the high-frequency millimeter wave frequency band.
发明内容Contents of the invention
为解决上述技术问题,本发明提出一种基于基片集成波导的毫米波滤波功分器,包括:基板上层金属层、基板介质层和基板下层金属层;In order to solve the above technical problems, the present invention proposes a millimeter-wave filter power divider based on a substrate integrated waveguide, including: a metal layer on the upper substrate, a dielectric layer on the substrate, and a metal layer on the lower substrate;
基板下层金属层作为接地面,铺满整个基板介质层的下表面,基板上层金属层设置在基板介质层上表面;基板介质层设置有若干个规则排列的金属通孔,金属通孔贯穿整个基板介质层,连通基板上层金属层和基板下层金属层。The lower metal layer of the substrate is used as the ground plane, covering the lower surface of the entire substrate dielectric layer, and the upper substrate metal layer is arranged on the upper surface of the substrate dielectric layer; the substrate dielectric layer is provided with several regularly arranged metal through holes, and the metal through holes run through the entire substrate The dielectric layer is connected to the upper metal layer of the substrate and the lower metal layer of the substrate.
优选的,规则排布的金属通孔组成三个矩形阵列,构成包含第一腔体、第二腔体、第三腔体的SIW矩形谐振腔。Preferably, the regularly arranged metal vias form three rectangular arrays, forming a SIW rectangular resonant cavity including a first cavity, a second cavity and a third cavity.
进一步的,SIW矩形谐振腔的每个腔体的侧边中点处设置有一个微带到SIW过渡结构,对应第一微带到SIW过渡结构、第二微带到SIW过渡结构、第三微带到SIW过渡结构。Further, a microstrip SIW transition structure is provided at the midpoint of each cavity of the SIW rectangular resonator, corresponding to the first microstrip SIW transition structure, the second microstrip SIW transition structure, and the third microstrip Take to the SIW transitional structure.
进一步的,SIW矩形谐振腔的第三腔体内设置三个金属通孔,第一腔体、第二腔体分别设置两个金属通孔且第一腔体、第二腔体内设置的金属通孔纵向对称分布。Further, three metal through holes are set in the third cavity of the SIW rectangular resonator, two metal through holes are respectively set in the first cavity and the second cavity, and the metal through holes set in the first cavity and the second cavity Longitudinal symmetrical distribution.
进一步的,SIW矩形谐振腔通过金属通孔阵列缺口构成第一耦合开窗和第二耦合开窗。Further, the SIW rectangular resonant cavity forms the first coupling opening and the second coupling opening through the gaps in the metal through hole array.
进一步的,两个耦合开窗纵向对称分布。Further, the two coupling windows are longitudinally and symmetrically distributed.
进一步的,第一微带到SIW过渡结构与第一耦合开窗垂直正交设置,第二微带到SIW过渡结构与第二耦合开窗垂直正交设置,第三微带到SIW过渡结构设置在第一微带到SIW过渡结构与第二微带到SIW过渡结构的纵向对称线上,第一微带到SIW过渡结构、第二微带到SIW过渡结构、第三微带到SIW过渡结构构成对称结构分布。Further, the SIW transition structure of the first microstrip is vertically orthogonal to the first coupling window, the SIW transition structure of the second microstrip is perpendicular to the second coupling window, and the SIW transition structure of the third microstrip is set On the longitudinal symmetry line of the first microstrip to the SIW transition structure and the second microstrip to the SIW transition structure, the first microstrip to the SIW transition structure, the second microstrip to the SIW transition structure, and the third microstrip to the SIW transition structure form a symmetrical structure distribution.
进一步的,微带到SIW过渡结构由微带线和共面波导结构组成。Further, the microstrip to SIW transition structure is composed of a microstrip line and a coplanar waveguide structure.
本发明的有益效果:Beneficial effects of the present invention:
1、本发明提出的滤波功分器是三个SIW腔体耦合的滤波功分结构,在其输出端的两个SIW矩形腔体中,耦合开窗和微带到SIW过渡结构互相正交垂直,该结构可以在S参数图中引入一个传输零点来增强滤波功分器的带外抑制,进而提升滤波功分器的滤波性能。1. The filter power splitter proposed by the present invention is a filter power splitter structure coupled with three SIW cavities. In the two SIW rectangular cavities at the output end, the coupling window and the microstrip SIW transition structure are orthogonal to each other. This structure can introduce a transmission zero in the S-parameter diagram to enhance the out-of-band rejection of the filter power splitter, thereby improving the filtering performance of the filter power splitter.
2、本发明中提出的三腔耦合滤波功分结构具有结构简单、易加工和成本低的特点,引入了传输零点,其结构简单,可以依靠PCB技术制作加工,加工难度小,成本低廉,适用于微波毫米波高频段前端系统应用。2. The three-cavity coupling filter power division structure proposed in the present invention has the characteristics of simple structure, easy processing and low cost. It introduces a transmission zero point, its structure is simple, and it can be manufactured and processed by PCB technology. It is less difficult to process and low in cost. It is suitable for It is used in microwave and millimeter wave high frequency front-end system applications.
附图说明Description of drawings
图1为现有基于SIW耦合腔体的带通滤波功分器结构示意图;FIG. 1 is a schematic structural diagram of an existing bandpass filter power divider based on an SIW coupling cavity;
图2为本发明的基于基片集成波导的毫米波滤波功分器的基板介质和基板上表面金属层堆叠俯视图;Fig. 2 is a top view of the substrate medium and the metal layer stacked on the upper surface of the substrate of the millimeter wave filter power splitter based on the substrate integrated waveguide of the present invention;
图3为本发明的基于基片集成波导的毫米波滤波功分器的介质基板、基板上表面金属层和基板下表面金属层堆叠的三维视图;3 is a three-dimensional view of the dielectric substrate, the metal layer on the upper surface of the substrate, and the metal layer on the lower surface of the substrate of the millimeter wave filter power splitter based on the substrate integrated waveguide of the present invention;
图4为本发明的基于基片集成波导的毫米波滤波功分器的带标尺标识的基板介质层版图;Fig. 4 is the substrate dielectric layer layout with scale mark of the millimeter-wave filter power divider based on the substrate integrated waveguide of the present invention;
图5为本发明的基于基片集成波导的毫米波滤波功分器的带标尺标识的基板上表面金属层版图;Fig. 5 is the layout of the metal layer on the upper surface of the substrate with scale marks of the millimeter wave filter power splitter based on the substrate integrated waveguide of the present invention;
图6为本发明的基于基片集成波导的毫米波滤波功分器的仿真结果图;Fig. 6 is a simulation result diagram of the millimeter wave filter power divider based on the substrate integrated waveguide of the present invention;
图中:1:第一腔体;2:微带到SIW过渡结构;3:耦合开窗;4、6:金属通孔;5:第二腔体;7:第三腔体;8:基板上层金属层;9:基板下层金属层;10:基板介质层;In the figure: 1: first cavity; 2: microstrip to SIW transition structure; 3: coupling window; 4, 6: metal via; 5: second cavity; 7: third cavity; 8: substrate The upper metal layer; 9: the lower metal layer of the substrate; 10: the dielectric layer of the substrate;
具体实施方式Detailed ways
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
一种基于基片集成波导的毫米波滤波功分器,如图2、图3所示,包括:基板上层金属层(8)、基板介质层(10)和基板下层金属层(9),其中基板下层金属层(9)作为接地面,铺满整个基板介质层(10)的下表面。A millimeter-wave filter power splitter based on a substrate integrated waveguide, as shown in Figure 2 and Figure 3, includes: a substrate upper metal layer (8), a substrate dielectric layer (10) and a substrate lower metal layer (9), wherein The lower metal layer (9) of the substrate is used as a ground plane and covers the entire lower surface of the dielectric layer (10) of the substrate.
如图4、图5所示,基板介质层(10)设置有若干个金属通孔,金属通孔贯穿整个基板介质层(10),连通基板上层金属层(8)和基板下层金属层(9);规则排布的金属通孔组成矩形阵列,构成了SIW矩形谐振腔的第一腔体(1)、第二腔体(5)、第三腔体(7);第一腔体(1)和第二腔体(5)与第三腔体(7)通过金属通孔阵列缺口构成的耦合开窗(3),实现将第三腔体(7)的电磁波能量等比例耦合到两个级联腔体第一腔体(1)和第二腔体(5)中,进而形成腔体之间的耦合滤波功分;耦合开窗(3)的宽度可以控制腔体(1)和(7)之间的耦合量,实现对两个腔体谐振频点位置的调整;耦合开窗(3)设置有两个,并且沿纵向对称。As shown in Figures 4 and 5, the substrate dielectric layer (10) is provided with several metal through holes, and the metal through holes run through the entire substrate dielectric layer (10), connecting the substrate upper metal layer (8) and the substrate lower metal layer (9). ); regularly arranged metal vias form a rectangular array, forming the first cavity (1), the second cavity (5), and the third cavity (7) of the SIW rectangular resonator; the first cavity (1 ) and the second cavity (5) and the third cavity (7) through the coupling window (3) formed by the gap of the metal through hole array, so that the electromagnetic wave energy of the third cavity (7) is coupled to the two In the first cavity (1) and the second cavity (5) of cascaded cavities, and then form the coupling filter power division between the cavities; the width of the coupling window (3) can control the cavity (1) and ( 7) The amount of coupling between them realizes the adjustment of the resonant frequency point positions of the two cavities; there are two coupling windows (3) and they are longitudinally symmetrical.
SIW矩形谐振腔(7)内设置了三个金属通孔(4),用以干扰第三腔体(7)中的TE101模式电磁波,三个金属通孔(4)抑制了基模的谐振从而达到消除第一通带的目的。Three metal through holes (4) are set in the SIW rectangular resonant cavity (7) to interfere with the TE 101 mode electromagnetic wave in the third cavity (7), and the three metal through holes (4) suppress the resonance of the fundamental mode So as to achieve the purpose of eliminating the first passband.
SIW矩形谐振腔的第一腔体(1)的耦合开窗(3)与微带到SIW过渡结构(2)垂直正交设置,这样设置可以使得第三腔体(7)与第一腔体(1)耦合激励起TE102模,将微带到SIW过渡结构设置在第一腔体(1)的侧边中点处,TE102模在该处正负相消,进而得到一个稳定的传输零点;为了调整SIW腔体的谐振频率,使得第三腔体(7)和第一腔体(1)的谐振频率靠近,进而形成滤波通带,设置了两个调整谐振频率的金属通孔(6);第二腔体(5)和第一腔体(1)的设置方法一致,两者沿纵向对称设置。The coupling window (3) of the first cavity (1) of the SIW rectangular resonator is vertically and orthogonally arranged with the microstrip SIW transition structure (2), so that the third cavity (7) can be connected with the first cavity (1) Coupling excites the TE 102 mode, and sets the microstrip SIW transition structure at the midpoint of the side of the first cavity (1), where the TE 102 mode cancels positive and negative, thereby obtaining a stable transmission Zero point; in order to adjust the resonant frequency of the SIW cavity so that the resonant frequency of the third cavity (7) and the first cavity (1) are close to form a filter passband, two metal through holes ( 6); the setting method of the second cavity (5) is the same as that of the first cavity (1), and the two are arranged symmetrically along the longitudinal direction.
微带到SIW过渡结构(2)用于把TEM模转换到TE模,微带线上传输的是准TEM模式电磁波,SIW传输的是TE模电磁波,由微带线上的电磁波传输到SIW上需要一个过渡结构。The microstrip to SIW transition structure (2) is used to convert the TEM mode to the TE mode. The quasi-TEM mode electromagnetic wave is transmitted on the microstrip line, and the TE mode electromagnetic wave is transmitted by the SIW. The electromagnetic wave on the microstrip line is transmitted to the SIW. A transition structure is required.
滤波功分电路的输入输出由三个微带到SIW过渡结构(2)实现,该结构由微带线和共面波导结构组成;一个输入过渡结构设置在第三腔体(7)中,两个输出过渡结构分别设置在第一腔体(1)和第二腔体(5)中。The input and output of the filtering power dividing circuit is realized by three microstrip SIW transition structures (2), which are composed of microstrip lines and coplanar waveguide structures; one input transition structure is arranged in the third cavity (7), two Two output transition structures are respectively arranged in the first cavity (1) and the second cavity (5).
整体电路的设置沿纵向对称分布,这样设置可以减小滤波效果中相位差影响。The configuration of the overall circuit is distributed symmetrically along the longitudinal direction, so that the configuration can reduce the influence of the phase difference in the filtering effect.
本发明的工作原理:SIW矩形腔体通过设置两个耦合开窗与两个输出SIW谐振腔体相连,等宽度的开窗实现了3dB功率分配,输出SIW谐振腔体的耦合窗和输出过渡结构正交设置,输出腔体侧边中线位置的电磁和磁场分布很弱,在此位置设置输出过渡结构可以使得在输出的腔体中激励起的TE102模在该位置正负相消,无法激励TEM模,进而在阻带中产生传输零点。The working principle of the present invention: the SIW rectangular cavity is connected to two output SIW resonant cavities by setting two coupling windows, the windows of equal width realize 3dB power distribution, and the coupling window and output transition structure of the output SIW resonant cavity Orthogonal setting, the electromagnetic and magnetic field distribution at the midline position on the side of the output cavity is very weak. Setting the output transition structure at this position can make the TE102 mode excited in the output cavity cancel positive and negative at this position, and the TEM cannot be excited. mode, which in turn creates transmission zeros in the stopband.
实施例一,对本发明进行仿真,选择的介质基片材料为Rogers RT5880,相对介电常数εr=2.2,损耗角正切值tanθ=0.0009,厚度为0.508mm。
仿真得到的S参数结果见图6,其中S11表示输入端口回波损耗,S21和S31表示传输系数,由S参数图可以看出,该实例的中心频率为35.39GHz,3dB带宽为1.16GHz。从S11曲线图可以看到回波损耗基本优于20dB,匹配良好;从S21和S31曲线图可以看出,两条曲线几乎重合,并且在通频带右侧(36.62GHz处)存在一个传输零点,在该传输零点右侧的传输系数优于29dB,带外抑制效果好。The S-parameter results obtained by simulation are shown in Figure 6, where S 11 represents the return loss of the input port, and S 21 and S 31 represent the transmission coefficient. It can be seen from the S-parameter diagram that the center frequency of this example is 35.39GHz, and the 3dB bandwidth is 1.16 GHz. From the S 11 curve, it can be seen that the return loss is basically better than 20dB, and the matching is good; from the S 21 and S 31 curves, it can be seen that the two curves almost overlap, and there is a Transmission zero point, the transmission coefficient on the right side of the transmission zero point is better than 29dB, and the out-of-band suppression effect is good.
尽管已经示出和描述了本发明的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本发明的范围由所附权利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes, modifications and substitutions can be made to these embodiments without departing from the principle and spirit of the present invention. and modifications, the scope of the invention is defined by the appended claims and their equivalents.
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Application publication date: 20230404 Assignee: Chongqing Xinxi Communication Technology Co.,Ltd. Assignor: Chongqing Institute of microelectronics industry technology University of Electronic Science and technology Contract record no.: X2024980032118 Denomination of invention: A millimeter wave filtering power divider based on substrate integrated waveguide License type: Common License Record date: 20241205 Application publication date: 20230404 Assignee: Xinchen (Chongqing) Microelectronics Co.,Ltd. Assignor: Chongqing Institute of microelectronics industry technology University of Electronic Science and technology Contract record no.: X2024980032116 Denomination of invention: A millimeter wave filtering power divider based on substrate integrated waveguide License type: Common License Record date: 20241205 Application publication date: 20230404 Assignee: Zhongjin Integrated Circuit (Chongqing) Co.,Ltd. Assignor: Chongqing Institute of microelectronics industry technology University of Electronic Science and technology Contract record no.: X2024980032115 Denomination of invention: A millimeter wave filtering power divider based on substrate integrated waveguide License type: Common License Record date: 20241205 Application publication date: 20230404 Assignee: Chengdian Qili Technology Co.,Ltd. Assignor: Chongqing Institute of microelectronics industry technology University of Electronic Science and technology Contract record no.: X2024980032111 Denomination of invention: A millimeter wave filtering power divider based on substrate integrated waveguide License type: Common License Record date: 20241205 Application publication date: 20230404 Assignee: Chongqing Xunyin Technology Co.,Ltd. Assignor: Chongqing Institute of microelectronics industry technology University of Electronic Science and technology Contract record no.: X2024980032109 Denomination of invention: A millimeter wave filtering power divider based on substrate integrated waveguide License type: Common License Record date: 20241205 |