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CN115971022A - Acoustic signal transmitting device - Google Patents

Acoustic signal transmitting device Download PDF

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Publication number
CN115971022A
CN115971022A CN202211680881.7A CN202211680881A CN115971022A CN 115971022 A CN115971022 A CN 115971022A CN 202211680881 A CN202211680881 A CN 202211680881A CN 115971022 A CN115971022 A CN 115971022A
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composite material
piezoelectric
piezoelectric composite
acoustic signal
electrode sheet
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王登攀
孙申厚
李春洋
何香君
王飞
陈珊珊
李朝阳
唐川敏
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Cetc Chip Technology Group Co ltd
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Abstract

本发明属于声学探测领域,具体涉及一种声信号发射装置;该装置包括:金属板、匹配层、电极片、压电复合材料、电极片和背衬层从上到下依次堆叠连接,金属板上设置有第一声发射传感器和第二声发射传感器;本发明以压电复合材料为激励材料,利用匹配层增加振动模态,匹配层上方再粘一定形状的金属板,形成多模态耦合的振动结构,最终得到了一个振动频率范围覆盖30kHz~500kHz的超声波发射结构,可以有效解决现有单一超声波发射器难以覆盖该频段的问题。

Figure 202211680881

The invention belongs to the field of acoustic detection, and specifically relates to an acoustic signal transmitting device; the device includes: a metal plate, a matching layer, an electrode sheet, a piezoelectric composite material, an electrode sheet and a backing layer are stacked and connected sequentially from top to bottom, and the metal plate The first acoustic emission sensor and the second acoustic emission sensor are arranged on it; the present invention uses the piezoelectric composite material as the excitation material, uses the matching layer to increase the vibration mode, and then sticks a metal plate of a certain shape on the matching layer to form a multi-mode coupling Finally, an ultrasonic emission structure with a vibration frequency range of 30kHz to 500kHz is obtained, which can effectively solve the problem that the existing single ultrasonic transmitter is difficult to cover this frequency band.

Figure 202211680881

Description

一种声信号发射装置An acoustic signal transmitter

技术领域technical field

本发明属于声学探测领域,具体涉及一种声信号发射装置。The invention belongs to the field of acoustic detection, and in particular relates to an acoustic signal emitting device.

背景技术Background technique

构的弯曲振动,频率范围通常为40kHz~80kHz,压电纵振式复合棒换能器通常为几kHz~100kHz左右,而基于压电陶瓷厚度方向的谐振流量计用超声波传感器频率范围通常为100kHz左右~几MHz,因此,现有产品中难以找到一种能够覆盖40kHz~500kHz频段的声发射结构,迫切需要设计一种新结构,来覆盖该频段,为大型密闭空间的内部超声探测、声发射传感器的测试等应用提供一种可行的方案。The bending vibration of the structure, the frequency range is usually 40kHz to 80kHz, the piezoelectric longitudinal vibration composite rod transducer is usually about a few kHz to 100kHz, and the frequency range of the ultrasonic sensor for the resonant flowmeter based on the piezoelectric ceramic thickness direction is usually 100kHz Therefore, it is difficult to find an acoustic emission structure that can cover the frequency range of 40kHz to 500kHz in existing products. Sensor testing and other applications provide a feasible solution.

压电复合材料是水声换能器中用于提高带宽的一种常用材料,压电复合材料加匹配层可以得到多个工作频段,再加上金属板的振动耦合,可以得到更多的工作频点以及更宽的工作频带。基于上述思路,亟需一种由压电复合材料、匹配层和金属板组成的可覆盖宽频段范围的声信号发射装置。Piezoelectric composite material is a common material used to increase bandwidth in underwater acoustic transducers. Piezoelectric composite material plus matching layer can obtain multiple working frequency bands, and coupled with the vibration coupling of metal plates, more work can be obtained frequency and a wider operating frequency band. Based on the above ideas, there is an urgent need for an acoustic signal transmitter consisting of a piezoelectric composite material, a matching layer and a metal plate that can cover a wide frequency range.

发明内容Contents of the invention

针对现有技术存在的不足,本发明提出了一种声信号发射装置,该装置包括:金属板1、匹配层7、电极片2、压电复合材料3、电极片4和背衬层5;金属板1、匹配层7、电极片2、压电复合材料3、电极片4和背衬层5从上到下依次堆叠连接。In view of the deficiencies in the prior art, the present invention proposes an acoustic signal transmitting device, which includes: a metal plate 1, a matching layer 7, an electrode sheet 2, a piezoelectric composite material 3, an electrode sheet 4 and a backing layer 5; The metal plate 1 , the matching layer 7 , the electrode sheet 2 , the piezoelectric composite material 3 , the electrode sheet 4 and the backing layer 5 are sequentially stacked and connected from top to bottom.

优选的,压电复合材料3包括压电柱部分和填充物部分,压电复合材料3由压电柱部分和填充物部分相互嵌合而成。Preferably, the piezoelectric composite material 3 includes a piezoelectric column part and a filler part, and the piezoelectric composite material 3 is formed by interfitting the piezoelectric column part and the filler part.

进一步的,填充物部分为蜂窝网格柱结构,压电柱部分为与填充物部分相互配合的立柱结构。Further, the filling part is a honeycomb grid column structure, and the piezoelectric column part is a column structure cooperating with the filling part.

优选的,所述压电复合材料3的制作过程包括:Preferably, the manufacturing process of the piezoelectric composite material 3 includes:

第一步:将压电陶瓷片用粘接剂粘到基板上,将压电陶瓷圆片表面涂覆保护层,对涂覆了保护层的压电陶瓷圆片进行切割,得到压电陶瓷柱组成的阵列;The first step: the piezoelectric ceramic sheet is bonded to the substrate with an adhesive, the surface of the piezoelectric ceramic disc is coated with a protective layer, and the piezoelectric ceramic disc coated with the protective layer is cut to obtain a piezoelectric ceramic column array of components;

第二步:压电陶瓷柱组成的阵列进行浇注,在压电陶瓷柱之间形成填充物;The second step: the array composed of piezoelectric ceramic columns is poured to form a filler between the piezoelectric ceramic columns;

第三步:去除基板,得到中间压电复合材料;对中间压电复合材料进行表面处理,并使用溶剂去除中间压电复合材料表面的保护层,使得压电陶瓷圆片原有的银电极暴露出来;The third step: remove the substrate to obtain the intermediate piezoelectric composite material; perform surface treatment on the intermediate piezoelectric composite material, and use a solvent to remove the protective layer on the surface of the intermediate piezoelectric composite material, so that the original silver electrode of the piezoelectric ceramic disc is exposed come out;

第四步:使用涂覆导电胶或渡金属电极的方式分别将中间压电复合材料正面和背面的所有银电极并联,形成导电层,得到制作好的压电复合材料。Step 4: Connect all the silver electrodes on the front and back of the intermediate piezoelectric composite material in parallel by coating conductive glue or metal electrodes to form a conductive layer to obtain the prepared piezoelectric composite material.

优选的,匹配层7、电极片2、压电复合材料3、电极片4和背衬层5的形状均为圆形且面积相同。Preferably, the matching layer 7 , the electrode sheet 2 , the piezoelectric composite material 3 , the electrode sheet 4 and the backing layer 5 are all circular in shape and have the same area.

优选的,金属板1的面积大于匹配层7、电极片2、压电复合材料3、电极片4和背衬层5。Preferably, the area of the metal plate 1 is larger than that of the matching layer 7 , the electrode sheet 2 , the piezoelectric composite material 3 , the electrode sheet 4 and the backing layer 5 .

本发明的有益效果为:本发明采用金属板1、电极片2、压电复合材料3、电极片4和背衬层5依次堆叠连接而成,以1-3型压电复合材料为激励材料,利用匹配层增加振动模态,匹配层上方再粘一定形状的金属板,形成多模态耦合的振动结构,最终得到了一个振动频率范围覆盖30kHz~500kHz的超声波发射结构,可以有效解决现有单一超声波发射器难以覆盖该频段的问题。The beneficial effects of the present invention are as follows: the present invention adopts the metal plate 1, the electrode sheet 2, the piezoelectric composite material 3, the electrode sheet 4 and the backing layer 5 to be sequentially stacked and connected, and the 1-3 type piezoelectric composite material is used as the excitation material , the matching layer is used to increase the vibration mode, and a metal plate of a certain shape is glued on the matching layer to form a multi-mode coupling vibration structure. Finally, an ultrasonic emission structure with a vibration frequency range of 30kHz to 500kHz is obtained, which can effectively solve the existing problems. It is difficult for a single ultrasonic transmitter to cover this frequency band.

附图说明Description of drawings

图1是本发明中声信号发射装置结构侧视图;Fig. 1 is a side view of the structure of an acoustic signal transmitting device in the present invention;

图2是本发明中声信号发射装置结构爆炸图;Fig. 2 is an exploded view of the structure of the acoustic signal transmitting device in the present invention;

图3为本发明中压电复合材料制作过程的第一步示意图;Fig. 3 is the schematic diagram of the first step of the manufacturing process of the piezoelectric composite material in the present invention;

图4为本发明中压电复合材料制作过程的第二步示意图;Fig. 4 is the second schematic diagram of the manufacturing process of the piezoelectric composite material in the present invention;

图5为本发明中压电复合材料制作过程的第三步示意图;Fig. 5 is the schematic diagram of the third step of the manufacturing process of the piezoelectric composite material in the present invention;

图6为本发明中压电复合材料制作过程的第四步示意图;Fig. 6 is the schematic diagram of the fourth step of the manufacturing process of the piezoelectric composite material in the present invention;

图7为本发明中压电复合材料的压电柱部分示意图;Fig. 7 is a partial schematic diagram of the piezoelectric column of the piezoelectric composite material in the present invention;

图8为本发明中压电复合材料的填充物部分示意图;Fig. 8 is a partial schematic diagram of the filler of the piezoelectric composite material in the present invention;

图中:1、金属板;2、电极片;3、压电复合材料;31、压电陶瓷柱;32、压电陶瓷电极;33、基板;34、填充物;4、电极片;5、背衬层;61、第一声发射传感器;62、第二声发射传感器;7、匹配层。In the figure: 1. Metal plate; 2. Electrode sheet; 3. Piezoelectric composite material; 31. Piezoelectric ceramic column; 32. Piezoelectric ceramic electrode; 33. Substrate; 34. Filler; 4. Electrode sheet; 5. Backing layer; 61, first acoustic emission sensor; 62, second acoustic emission sensor; 7, matching layer.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

本发明提出了一种声信号发射装置,如图1、图2所示,所述装置包括:金属板1、匹配层7、电极片2、压电复合材料3、电极片4和背衬层5;金属板1、匹配层7、电极片2、压电复合材料3、电极片4和背衬层5从上到下依次堆叠连接。The present invention proposes an acoustic signal transmitting device, as shown in Fig. 1 and Fig. 2, the device comprises: a metal plate 1, a matching layer 7, an electrode sheet 2, a piezoelectric composite material 3, an electrode sheet 4 and a backing layer 5; the metal plate 1, the matching layer 7, the electrode sheet 2, the piezoelectric composite material 3, the electrode sheet 4 and the backing layer 5 are sequentially stacked and connected from top to bottom.

优选的,第一声发射传感器61和第二声发射传感器62的设置位置上振动幅度相同。Preferably, the vibration amplitudes at the installation positions of the first acoustic emission sensor 61 and the second acoustic emission sensor 62 are the same.

如图7、图8所示,优选的,压电复合材料3包括压电柱部分和填充物部分,压电复合材料3由压电柱部分和填充物部分相互嵌合而成。As shown in FIG. 7 and FIG. 8 , preferably, the piezoelectric composite material 3 includes a piezoelectric column part and a filler part, and the piezoelectric composite material 3 is formed by interfitting the piezoelectric column part and the filler part.

进一步的,填充物部分为蜂窝网格柱结构,压电柱部分为与填充物部分相互配合的立柱结构。Further, the filling part is a honeycomb grid column structure, and the piezoelectric column part is a column structure cooperating with the filling part.

优选的,压电复合材料3可由压电陶瓷圆片制作而成,具体实施过程如下:Preferably, the piezoelectric composite material 3 can be made of piezoelectric ceramic discs, and the specific implementation process is as follows:

第一步:如图3所示,将压电陶瓷片用粘接剂粘到基板上33上,将压电陶瓷圆片表面涂覆保护层,然后将对涂覆了保护层的压电陶瓷片切割成压电陶瓷柱31组成的阵列,切割完成后,压电陶瓷柱31上仍保留着压电陶瓷片原有的电极32;The first step: as shown in Figure 3, the piezoelectric ceramic sheet is bonded to the substrate 33 with an adhesive, the surface of the piezoelectric ceramic disc is coated with a protective layer, and then the piezoelectric ceramic sheet coated with the protective layer is The sheet is cut into an array of piezoelectric ceramic columns 31. After the cutting is completed, the original electrodes 32 of the piezoelectric ceramic sheet still remain on the piezoelectric ceramic columns 31;

第二步:如图4所示,利用模具对第一步得到的压电陶瓷柱组成的阵列进行浇注,在压电陶瓷柱之间形成填充物34;Step 2: as shown in FIG. 4 , use a mold to cast the array of piezoelectric ceramic pillars obtained in the first step, and form fillers 34 between the piezoelectric ceramic pillars;

第三步:如图5所示,待填充物固化后,将基板去掉,形成了图中所示的中间压电复合材料,对中间压电复合材料进行表面处理,并使用溶剂去除中间压电复合材料表面的保护层,使得压电陶瓷圆片原有的银电极暴露出来;Step 3: As shown in Figure 5, after the filler is cured, the substrate is removed to form the intermediate piezoelectric composite material shown in the figure, and the intermediate piezoelectric composite material is surface treated, and the intermediate piezoelectric composite material is removed using a solvent. The protective layer on the surface of the composite material exposes the original silver electrode of the piezoelectric ceramic disc;

第四步:如图6所示,使用涂覆导电胶或渡金属电极的方式分别将中间压电复合材料正面和背面的所有银电极并联,形成导电层35和36,得到制作好的压电复合材料。Step 4: As shown in Figure 6, connect all the silver electrodes on the front and back of the intermediate piezoelectric composite material in parallel to form conductive layers 35 and 36 by coating conductive glue or transition metal electrodes to obtain the prepared piezoelectric composite material.

图3~图6中只标出了一个压电柱上的电极32作为代表,实际上所有压电柱的上表面和下表面均保留了压电陶瓷片原有的电极。In FIGS. 3 to 6, only the electrode 32 on one piezoelectric column is marked as a representative. In fact, the upper and lower surfaces of all the piezoelectric columns retain the original electrodes of the piezoelectric ceramic sheet.

优选的,电极片2和电极片4,可以是加工好的金属电极,再用导电胶等方式粘到压电复合材料的两侧,也可以是直接用导电胶或镀金属电极等方式在压电复合材料的两侧生成正负电极。Preferably, the electrode sheet 2 and the electrode sheet 4 can be processed metal electrodes, and then stick to both sides of the piezoelectric composite material with conductive glue, etc. The positive and negative electrodes are created on both sides of the electrical composite.

优选的,匹配层7、电极片2、压电复合材料3、电极片4和背衬层5的形状均为圆形且面积相同。Preferably, the matching layer 7 , the electrode sheet 2 , the piezoelectric composite material 3 , the electrode sheet 4 and the backing layer 5 are all circular in shape and have the same area.

优选的,金属板1的面积大于匹配层7、电极片2、压电复合材料3、电极片4和背衬层5。Preferably, the area of the metal plate 1 is larger than that of the matching layer 7 , the electrode sheet 2 , the piezoelectric composite material 3 , the electrode sheet 4 and the backing layer 5 .

本发明的一种工作方式是作为收发合置的超声探测器,通过压电复合材料的振动,激发结构的整体振动,并对传播介质发射超声波,经过被测物体反射后,再被结构接收,最终在压电复合材料两侧的电极片2和电极片4上检测到电压信号,此时,该装置可以作为一种穿透一定厚度金属板的超声波发射装置,并且可以通过压电复合材料与金属基板的多种振动模态耦合,形成较宽的工作频段,或者在多个频点工作。One working mode of the present invention is as an ultrasonic probe combined with transmitting and receiving, through the vibration of the piezoelectric composite material, the overall vibration of the structure is excited, and the ultrasonic wave is emitted to the propagation medium, and after being reflected by the measured object, it is received by the structure. Finally, a voltage signal is detected on the electrode sheet 2 and the electrode sheet 4 on both sides of the piezoelectric composite material. At this time, the device can be used as an ultrasonic emission device that penetrates a metal plate with a certain thickness, and can pass through the piezoelectric composite material and A variety of vibration modes of the metal substrate are coupled to form a wide operating frequency band, or work at multiple frequency points.

本发明的另一种工作方式是作为一个超宽频带的声发射信号模拟装置,此时,金属板上设置有多个声发射传感器,优选的,金属板上设置有两个声发射传感器,分别为第一声发射传感器61和第二声发射传感器62。将装置置于近似自由边界的工作状态下,将声发射传感器61和62用相同的方式固定设置在金属板的上方,固定设置的位置可用结构仿真或激光测振的方式选取振动幅度相等或接近的位置,以便提高测试精度。Another working mode of the present invention is as an ultra-wideband acoustic emission signal simulation device. At this time, a plurality of acoustic emission sensors are arranged on the metal plate. Preferably, two acoustic emission sensors are arranged on the metal plate, respectively These are the first acoustic emission sensor 61 and the second acoustic emission sensor 62 . Put the device in the working state of the approximate free boundary, and fix the acoustic emission sensors 61 and 62 above the metal plate in the same way, and the fixed position can be selected by structural simulation or laser vibration measurement. The vibration amplitude is equal or close to position in order to improve the test accuracy.

以上方案中所表述的如“上”、“下”等方位术语,仅为便于叙述的明了,而并非用以限定本发明在实施时的绝对方位,其相对关系的改变或调整,在无实质变更技术内容下,当亦视为本发明可实施的范畴。The orientation terms such as "upper" and "lower" expressed in the above schemes are only for the convenience of description, and are not used to limit the absolute orientation of the present invention when it is implemented. The change or adjustment of its relative relationship is not essential. Changes in technical content should also be regarded as the scope of the present invention that can be implemented.

在本发明中,除非另有明确的规定和限定,术语“设置”、“连接”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或成一体;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系,除非另有明确的限定,对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the present invention, unless otherwise clearly specified and limited, terms such as "arrangement" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral body; it can be a mechanical The connection can also be an electrical connection; it can be a direct connection or an indirect connection through an intermediary, it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly defined, for ordinary people in this field Those skilled in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

以上所举实施例,对本发明的目的、技术方案和优点进行了进一步的详细说明,所应理解的是,以上所举实施例仅为本发明的优选实施方式而已,并不用以限制本发明,凡在本发明的精神和原则之内对本发明所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above examples have further described the purpose, technical solutions and advantages of the present invention in detail. It should be understood that the above examples are only preferred implementations of the present invention and are not intended to limit the present invention. Any modification, equivalent replacement, improvement, etc. made to the present invention within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims (6)

1. An acoustic signal transmitting apparatus, comprising: the piezoelectric ceramic comprises a metal plate (1), a matching layer (7), an electrode plate (2), a piezoelectric composite material (3), an electrode plate (4) and a backing layer (5); the metal plate (1), the matching layer (7), the electrode plate (2), the piezoelectric composite material (3), the electrode plate (4) and the backing layer (5) are sequentially stacked and connected from top to bottom.
2. The acoustic signal transmission device according to claim 1, wherein the piezoelectric composite material (3) comprises a piezoelectric pillar portion and a filler portion, and the piezoelectric composite material (3) is formed by the piezoelectric pillar portion and the filler portion being fitted to each other.
3. An acoustic signal transmission device according to claim 3, wherein the filler part is of a honeycomb lattice column structure and the piezoelectric column part is of a pillar structure which is fitted with the filler part.
4. The acoustic signal emitting device according to claim 1, wherein the piezoelectric composite material (3) is produced by a process comprising:
the first step is as follows: adhering the piezoelectric ceramic wafer to a substrate by using an adhesive, coating a protective layer on the surface of the piezoelectric ceramic wafer, and cutting the piezoelectric ceramic wafer coated with the protective layer to obtain an array consisting of piezoelectric ceramic columns;
the second step: pouring an array formed by the piezoelectric ceramic columns to form fillers among the piezoelectric ceramic columns;
the third step: removing the substrate to obtain an intermediate piezoelectric composite material; performing surface treatment on the intermediate piezoelectric composite material, and removing a protective layer on the surface of the intermediate piezoelectric composite material by using a solvent to expose the original silver electrode of the piezoelectric ceramic wafer;
the fourth step: and respectively connecting all silver electrodes on the front surface and the back surface of the middle piezoelectric composite material in parallel by using a mode of coating conductive adhesive or a transition metal electrode to form a conductive layer, thus obtaining the manufactured piezoelectric composite material.
5. The acoustic signal transmission device according to claim 1, wherein the matching layer (7), the electrode sheet (2), the piezoelectric composite material (3), the electrode sheet (4) and the backing layer (5) are all circular in shape and have the same area.
6. The acoustic signal transmission device according to claim 1, wherein the metal plate (1) has an area larger than the matching layer (7), the electrode sheet (2), the piezoelectric composite material (3), the electrode sheet (4) and the backing layer (5).
CN202211680881.7A 2022-12-27 2022-12-27 Acoustic signal transmitting device Pending CN115971022A (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101255265A (en) * 2008-04-11 2008-09-03 清华大学 Lead-free piezoelectric ceramic/polymer 1-3 structure composite material and its processing method
CN103212532A (en) * 2013-04-24 2013-07-24 陕西师范大学 T-shaped high-power ultrasonic transducer
WO2013183292A1 (en) * 2012-06-05 2013-12-12 パナソニック株式会社 Ultrasonic echo sounder transducer and ultrasonic flow meter equipped with same
CN104923468A (en) * 2014-03-19 2015-09-23 中国科学院大连化学物理研究所 Large power ultrasonic wave micro-reactor
CN110277485A (en) * 2019-02-21 2019-09-24 北京信息科技大学 Composite laminated flexural vibration element and preparation method thereof
CN217726112U (en) * 2021-10-20 2022-11-04 中山大学 Annular ultrasonic transducer
CN219092638U (en) * 2022-12-27 2023-05-30 中电科芯片技术(集团)有限公司 Acoustic signal transmitting device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101255265A (en) * 2008-04-11 2008-09-03 清华大学 Lead-free piezoelectric ceramic/polymer 1-3 structure composite material and its processing method
WO2013183292A1 (en) * 2012-06-05 2013-12-12 パナソニック株式会社 Ultrasonic echo sounder transducer and ultrasonic flow meter equipped with same
CN103212532A (en) * 2013-04-24 2013-07-24 陕西师范大学 T-shaped high-power ultrasonic transducer
CN104923468A (en) * 2014-03-19 2015-09-23 中国科学院大连化学物理研究所 Large power ultrasonic wave micro-reactor
CN110277485A (en) * 2019-02-21 2019-09-24 北京信息科技大学 Composite laminated flexural vibration element and preparation method thereof
CN217726112U (en) * 2021-10-20 2022-11-04 中山大学 Annular ultrasonic transducer
CN219092638U (en) * 2022-12-27 2023-05-30 中电科芯片技术(集团)有限公司 Acoustic signal transmitting device

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