CN116183973A - Microwave integrated circuit scattering parameter rapid test evaluation circuit and evaluation method - Google Patents

Abstract

The invention discloses a rapid evaluation circuit and an evaluation method for scattering parameters of a microwave integrated circuit, wherein the evaluation circuit comprises a main control computer, automatic auxiliary equipment, a vector network analyzer, a test clamp A, a test clamp B and a standard microwave integrated circuit; the invention can meet the requirements of rapid, efficient, stable and consistent test application of the scattering parameter of the microwave integrated circuit to be tested, namely the scattering parameter is obtained immediately after test, effectively reduces the cost, time and ineffective occupation of resources in terms of instrument resources caused by the fact that a large number of calibration pieces of the custom-fit test fixture are complicated in operation and the corresponding calibration and error correction of large calculation amount, and improves the test application efficiency; the cost and occupation of software and hardware resources in the test and evaluation process are reduced, the function is conveniently integrated into the comprehensive capacity judgment of the production line for the production and manufacture of the microwave integrated circuit, and the technical requirements of low-cost and high-efficiency mass production and manufacture application requirements and integrated measurement and control of the microwave integrated circuit are met.

Description

A rapid test and evaluation circuit and evaluation method for scattering parameters of microwave integrated circuits

technical field

The invention relates to the technical field of microwave testing, in particular to a microwave integrated circuit scattering parameter rapid testing and evaluation circuit and evaluation method.

Background technique

With the rapid development of microwave integrated circuits and their technologies, the categories, quantities and scales of microwave integrated circuits manufacturing and applications are showing a trend of rapid growth. Therefore, the testing workload in its mass production manufacturing process is also increasing, which brings great challenges to the testing and evaluation performance of its key characteristics such as scattering parameters.

Using the traditional method, two methods are usually adopted when testing the key characteristics of microwave integrated circuits such as scattering parameters: (1) Use a vector network analyzer and configure a custom-fit calibration piece for the test fixture to perform corresponding test calibration, so that the vector The calibration end face and the test end face of the network analyzer are the same end face, and it is the test end face of the relevant pins of the microwave integrated circuit to be tested, so as to obtain a relatively accurate technical characteristic index of the scattering parameters of the microwave integrated circuit to be tested; (2) without customization In the case of a calibration piece that fits the test fixture, it is necessary to obtain the scattering parameter characteristics of the test fixture through testing, and then extend the calibration end face of the vector network analyzer to the test end face through the error correction operation of de-embedding, that is, the microwave integrated circuit to be tested. The test end face of the pin is used to achieve the same effect as the method (1), and to obtain a relatively accurate technical characteristic index of the scattering parameter of the microwave integrated circuit to be tested.

For a wide variety of microwave integrated circuits to be tested and their huge mass production quantities, the application requirements of mass production lines are most concerned with short test time, high test efficiency, and consistency and stability of batch tests. The accuracy of the test results of the key characteristics of non-single microwave integrated circuits to be tested, such as scattering parameters. Based on the traditional method, whether it is customizing the calibration piece that fits the test fixture (including the characteristic parameter data of each calibration piece’s differentiation), or customizing the test fixture and testing its scattering parameters one by one (accurate acquisition of the scattering parameters of most test fixtures It also depends on the customized implementation of the corresponding adaptive calibration parts), which cannot effectively meet the actual application requirements of the mass production line in terms of test cost, test time and corresponding instrument resources, and the continuous improvement of the comprehensive production and manufacturing capabilities of microwave integrated circuits. Relevant technical requirements.

Therefore, in order to effectively reduce the cost, time, and resource invalid occupancy rate of instrument resources introduced by a large number of custom-fit calibration parts for test fixtures and the corresponding complex operation and large-scale calibration and error correction, at the same time, through batch Permanent test evaluation provides reference for improvement in the management and control of manufacturing process quality and status, and supports the continuous improvement of microwave integrated circuit production and manufacturing comprehensive capabilities. It is necessary to innovate or form rapid test evaluation methods and technologies that are suitable for actual application requirements.

Contents of the invention

In order to solve the above technical problems, the present invention provides a microwave integrated circuit scattering parameter rapid test evaluation circuit and evaluation method to realize the rapid detection of microwave integrated circuit scattering parameters, meet the needs of mass production applications, and has a strong universal sex.

To achieve the above object, the technical scheme of the present invention is as follows:

A microwave integrated circuit scattering parameter rapid test evaluation circuit, including a main control computer, automation auxiliary equipment, vector network analyzer, test fixture A, test fixture B and standard microwave integrated circuit;

The test fixture A and the test fixture B are combined to form an adapter unit, respectively realizing the adaptive connection with the standard microwave integrated circuit and the microwave integrated circuit to be tested, and the test fixture A and the test fixture B are connected with the vector network analyzer The connected end face is the calibration end face, and the end face connected with the standard microwave integrated circuit and the microwave integrated circuit to be tested is the test end face;

The vector network analyzer is used to perform corresponding calibration on the calibration end face, and complete the scattering parameter test and data acquisition of the standard microwave integrated circuit and the microwave integrated circuit to be tested in this state on the test end face;

The model of the standard microwave integrated circuit is the same as that of the microwave integrated circuit to be tested but the scattering parameters are known, which provides standard data of scattering parameters for the test evaluation circuit, and provides support for eliminating the circuit's own system error and iterative optimization to obtain the threshold limit of the test evaluation;

The automation auxiliary equipment provides clamping and loading for the standard microwave integrated circuit and the microwave integrated circuit to be tested, so as to meet the fast and efficient test application requirements of the mass production line;

The main control computer, which contains software, is the core and control center of the circuit. According to the test and evaluation requirements of mass production applications on the production line, it performs integrated coordinated control of the vector network analyzer, adaptation unit, and automation auxiliary equipment. During the test and evaluation Pre-test and import the standard data of standard microwave integrated circuits for calculation to eliminate the system error of the circuit itself, and iterative optimization to obtain the threshold limit of test evaluation, so as to meet the scattering parameters of microwave integrated circuits to be tested in the test evaluation of production line mass production applications quick access to demand.

A method for quickly testing and evaluating scattering parameters of microwave integrated circuits, including the following process:

(1) Before the test and evaluation of the actual application, the main control computer conducts an integrated coordinated measurement and control of the vector network analyzer, the adaptation unit, and the automation auxiliary equipment, and completes the corresponding Calibration, forming a calibration end face on this end face;

(2) The main control computer conducts an integrated coordinated measurement and control of the vector network analyzer, the adaptation unit, and the automation auxiliary equipment, and automatically loads several standard microwave integrated circuits one by one between the test fixture A and the test fixture B of the adaptation unit for testing , through theoretical analysis to obtain the relevant influencing factors of the test evaluation circuit itself, and obtain the threshold limit of the test evaluation through calculation;

(3) During the test and evaluation of practical applications, the main control computer conducts integrated coordinated measurement and control of the vector network analyzer, adaptation unit, and automation auxiliary equipment, and automatically loads the microwave integrated circuits to be tested on the test fixture A of the adaptation unit one by one. The test is performed with the test fixture B, and the real-time test evaluation result is obtained through the relationship between the test result and the threshold limit.

Through the above technical solution, a microwave integrated circuit scattering parameter rapid test and evaluation circuit and evaluation method provided by the present invention have the following beneficial effects:

1. By adopting the evaluation circuit and evaluation method provided by the present invention, when performing rapid test and evaluation of microwave integrated circuit scattering parameters for mass production applications, it is not necessary to specially develop and mass-produce calibration parts suitable for microwave integrated circuit test fixtures to be tested. There is also no need for de-embedded calibration based on the test fixture and its accompanying scattering parameter characteristic data and its large-scale calibration error correction. It only needs to be calculated by testing and importing standard data of standard microwave integrated circuits before the test evaluation to eliminate the circuit itself. Error influence, and iterative optimization to obtain the threshold limit of the test evaluation (i.e. the qualification criterion), can realize the rapid detection of the scattering parameters of the microwave integrated circuit under test "instantly measured and obtained" during the test evaluation, effectively solving the problem caused by a large number of customized adaptations. The cost, time, and resource invalid occupancy rate of instrument resources introduced by the calibration parts of the test fixture and the corresponding complex and computationally intensive calibration and error correction. The method provided by the invention is simple and economical, has high test and resource application efficiency, and strong versatility;

2. By adopting the evaluation circuit and evaluation method provided by the present invention, the rapid test and evaluation function of microwave integrated circuit scattering parameters can be integrated into the comprehensive production line capability of microwave integrated circuit manufacturing, and the low-cost, high-efficiency batch of microwave integrated circuits can be realized. The integrated measurement and control application of manufacturing application requirements and technical requirements meets the actual technical requirements of the actual mass production application requirements of microwave integrated circuits in the field of test engineering.

Description of drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings that are required in the description of the embodiments or the prior art.

FIG. 1 is a schematic diagram of a rapid test and evaluation circuit for scattering parameters of a microwave integrated circuit disclosed in an embodiment of the present invention;

Fig. 2 is a connection diagram of the adapter unit and the standard microwave integrated circuit.

Detailed ways

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention.

The present invention provides a microwave integrated circuit scattering parameter rapid test and evaluation circuit, as shown in Figure 1, including a main control computer, automation auxiliary equipment, vector network analyzer, test fixture A, test fixture B and standard microwave integrated circuits.

The test fixture A and the test fixture B are combined to form an adapter unit to respectively realize the adaptive connection with the standard microwave integrated circuit and the microwave integrated circuit to be tested. It only needs to ensure that it has good matching characteristics as a test fixture with low reflection, and It only needs to be connected with the standard microwave integrated circuit and the microwave integrated circuit to be tested to achieve good repeatability and reliability, and it is not necessary to obtain its accurate scattering parameter characteristic data through testing. The end faces of test fixture A and test fixture B connected to the vector network analyzer are calibration end faces, and the end faces connected to the standard microwave integrated circuit and the microwave integrated circuit to be tested are test end faces.

The vector network analyzer is used to carry out corresponding calibration on the end face of the standard type interface, and form a calibration end face on this end face. At the same time, the scattering parameter test and measurement of the standard microwave integrated circuit and the microwave integrated circuit to be tested are completed on the test end face in this state. data collection.

The model of the standard microwave integrated circuit is the same as that of the microwave integrated circuit to be tested, but the scattering parameters are known (the scattering parameters can be accurately measured by existing methods), which are used as standard parts to provide standard data of scattering parameters for the rapid test and evaluation circuit. The solidified physical carrier and reference standard of the technology and index characteristics of the microwave integrated circuit to be tested for production line mass production test and evaluation mainly provide standard data for the rapid test and evaluation circuit, and obtain Threshold limits (i.e. eligibility criteria) for rapid test assessment provide support.

The automation auxiliary equipment provides automatic clamping and loading for standard microwave integrated circuits and microwave integrated circuits to be tested, so as to meet the fast and efficient test application requirements of mass production lines.

The main control computer, which contains software, is the core and control center of the circuit. According to the test and evaluation requirements of mass production applications on the production line, it conducts integrated coordinated control of the vector network analyzer, adaptation unit, and automation auxiliary equipment, and passes the test before the evaluation. Test and import the standard data of standard microwave integrated circuits for calculation to eliminate the system error of the circuit itself, and iteratively optimize the threshold limit for rapid test evaluation to meet the scattering parameters of microwave integrated circuits to be tested during the test evaluation of mass production applications on the production line" Fast, efficient and stable and consistent test application requirements.

A method for quickly testing and evaluating scattering parameters of microwave integrated circuits, including the following process:

(1) Before the test and evaluation of the actual application, the main control computer conducts an integrated coordinated measurement and control of the vector network analyzer, the adaptation unit, and the automation auxiliary equipment, and completes the corresponding Calibration, forming a calibration end face on this end face for subsequent testing;

(2) The main control computer conducts an integrated coordinated measurement and control of the vector network analyzer, the adaptation unit, and the automation auxiliary equipment, and automatically loads several standard microwave integrated circuits one by one between the test fixture A and the test fixture B of the adaptation unit for testing , through theoretical analysis to obtain the relevant influencing factors of the test evaluation circuit itself (ie, the following A, B, C factors), and obtain the threshold limit of the rapid test evaluation (ie, the eligibility criterion) through calculation;

(3) During the test and evaluation of practical applications, the main control computer conducts integrated coordinated measurement and control of the vector network analyzer, adaptation unit, and automation auxiliary equipment, and automatically loads the microwave integrated circuits to be tested on the test fixture A of the adaptation unit one by one. The test is carried out with the test fixture B, and the real-time test evaluation result is obtained through the relationship between the test result (this result is not an accurate value obtained through large data volume calculations such as de-embedding and error correction) and the threshold limit.

As shown in Figure 2, when the microwave integrated circuit to be tested (the following DUT) is tested in the present invention, the standard microwave integrated circuit (the following standard part) is used to eliminate the system error of the test evaluation circuit itself and iterative optimization to obtain the fast test evaluation threshold limit (i.e. the eligibility criteria) theoretical analysis is as follows:

The four scattering parameters (self-characteristics) of test fixture A are:

The four scattering parameters (self-characteristics) of test fixture B are:

The above two items are characteristic data of the self-scattering parameters of the adapter unit (test fixture A, test fixture B), and do not need to be obtained in advance.

The four scattering parameters (properties) of the DUT are:

The four scattering parameters (self-characteristics) of standard parts are:

The above two items are the characteristic data of the scattering parameters of the standard part and the test part, one is known in advance, and the other is obtained after the test evaluation.

The four scattering parameters of the equivalent two-port network of the cascaded combination of test fixture A and standard components are:

The four scattering parameters of the equivalent two-port network of the cascaded combination of test fixture A and the DUT are:

The four scattering parameters of the equivalent two-port network of the cascaded combination of test fixture A, standard parts and test fixture B are:

The four scattering parameters of the equivalent two-port network of the cascaded combination of test fixture A, DUT and test fixture B are:

The above four items are required for the equivalent derivation of the intermediate process and do not need to be obtained in advance.

The four scattering parameters (test results) obtained by loading the standard parts in the test fixture A and test fixture B for testing are respectively:

The four scattering parameters (test results) obtained by loading the test piece in the test fixture A and the test fixture B for testing are respectively:

The above two items are the two test results in the test evaluation process, which need to be obtained during the test evaluation, and the test evaluation results of the DUT can be obtained in real time.

The standard or DUT and test fixture A are equivalent to a two-port network, and the scattering parameters of the equivalent two-port network can be obtained according to the network cascading formula as follows:

Then connect the test fixture B to test the scattering parameters. According to the network cascading formula, the scattering parameters of the equivalent two-port network including test fixture A, standard parts and test fixture B can be obtained as follows:

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And />

而/>

And />

而/>

And />

Similarly, replace the standard part with the DUT to test the scattering parameters. According to the network cascading formula, the scattering parameters of the equivalent two-port network including the test fixture A, the DUT and the test fixture B can be obtained as follows:

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而/>

And />

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)可视为不变的常量。Since the use of test fixture A and test fixture B remains unchanged during the test evaluation process, its scattering parameters (such as

) can be regarded as an immutable constant.

Therefore, using the normalized data processing compared with the standard parts, we can get:

in,

The normalized processing results of the forward and reverse transmission scattering parameters can be obtained by operation as follows:

则有/>

make

then there />

and

Using the above-mentioned method of testing standard parts and parts to be tested, test multiple standard parts (including scattering parameter characteristic data) respectively, and substitute the obtained test results and scattering parameter characteristic data of each standard part into calculation and data processing according to the above formula Fitting, the A factor including the influence of the test and evaluation circuit itself can be obtained.

和

待测件的散射参数测试结果/>

和/>

标准件的散射参数特性数据/>

和

标准件散射参数特性的上下限Δ以及包含测试评估电路自身影响在内的A因子，即可以得到待测微波集成电路(待测件)快速测试评估的阈值限(即合格判据)为

和/>

只要正向和反向传输散射参数在此阈值限内就是合格品，其去除测试影响的测试结果也可以根据标准件的散射参数特性数据加以运算得到。Therefore, in the actual application test evaluation, we test the results according to the scattering parameters of the standard parts

and

Scattering parameter test results of the DUT/>

and />

Scattering parameter characteristic data of standard parts/>

and

The upper and lower limits Δ of the scattering parameter characteristics of the standard part and the A factor including the influence of the test evaluation circuit itself, that is, the threshold limit (i.e. the qualification criterion) for the rapid test evaluation of the microwave integrated circuit (DUT) to be tested can be obtained as

and />

As long as the forward and reverse transmission scattering parameters are within this threshold limit, it is a qualified product, and the test results of removing the test influence can also be calculated according to the characteristic data of the scattering parameters of the standard parts.

At the same time, we can normalize the forward and back reflection scattering parameters as follows:

in,

By ignoring the relatively small influencing factors, the normalized approximation results of the forward and reverse reflective scattering parameters can be obtained as follows:

令/>

则有

order />

then there is

令/>

则有

order />

then there is

Using the above-mentioned method of testing standard parts and parts to be tested, test multiple standard parts (including scattering parameter characteristic data) respectively, and substitute the obtained test results and scattering parameter characteristic data of each standard part into calculation and data processing according to the above formula Fitting, the B factor and C factor including the influence of the test and evaluation circuit itself can be obtained.

和

待测件的散射参数测试结果/>

和/>

标准件的散射参数特性数据/>

和

标准件散射参数特性的上下限Δ以及包含测试评估电路自身影响在内的B因子和C因子，即可以得到待测微波集成电路(待测件)快速测试评估的阈值限(即合格判据)分别为

以及/>

只要正向和反向反射散射参数在此阈值限内就是合格品，其去除测试影响的测试结果也可以根据标准件的散射参数特性数据加以运算得到。Therefore, in the actual application test evaluation, we test the results according to the scattering parameters of the standard parts

and

Scattering parameter test results of the DUT/>

and />

Scattering parameter characteristic data of standard parts/>

and

The upper and lower limits Δ of the scattering parameter characteristics of the standard part and the B factor and C factor including the influence of the test and evaluation circuit itself, that is, the threshold limit for the rapid test evaluation of the microwave integrated circuit (device under test) to be tested (that is, the qualification criterion) can be obtained respectively

and />

As long as the forward and reverse reflective scattering parameters are within the threshold limit, it is a qualified product, and the test results of removing the test influence can also be calculated according to the characteristic data of the scattering parameters of the standard parts.

Because the microwave integrated circuit scattering parameter rapid test and evaluation method and circuit suitable for mass production applications of the present invention can pass the solidification of the microwave integrated circuit technology and index characteristics of several standard parts (that is, the microwave integrated circuit technology and index characteristics of the mass production test evaluation of the production line) before the test evaluation Physical carrier and reference standard) test, combined with its scattering parameter characteristic data, can obtain the relevant influence factors of the test evaluation circuit itself (such as the above-mentioned A, B, C factors) and the threshold limit (that is, the qualification criterion). Therefore, as long as the scattering parameter rapid test evaluation circuit of the present invention controls the main control computer to carry out integrated coordinated measurement and control of the vector network analyzer, the adaptation unit, and the automation auxiliary equipment during the actual test evaluation, the obtained test results of the DUT (this The result is not an accurate value obtained by a large amount of calculations such as de-embedding calibration and error correction) to determine the qualification of its scattering parameters in real time, so as to meet the fast, efficient, stable and consistent requirements of "instant measurement" of the scattering parameters of the microwave integrated circuit to be tested. Test application requirements, and effectively solve the problem of cost, time, and resource invalid occupancy of instrument resources introduced by a large number of custom-fit calibration parts for test fixtures and their corresponding complex operations and large-scale calibration and error correction. The generalized method provides a solution for rapid testing and evaluation of microwave integrated circuit scattering parameters that meet the requirements of fast, efficient and stable mass production line manufacturing.

The above description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention will not be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (2)

1. The rapid test and evaluation circuit for the scattering parameters of the microwave integrated circuit is characterized by comprising a main control computer, automatic auxiliary equipment, a vector network analyzer, a test clamp A, a test clamp B and a standard microwave integrated circuit;

the test fixture A and the test fixture B form an adapting unit in a combined mode, so that adapting connection with a standard microwave integrated circuit and a microwave integrated circuit to be tested is respectively realized, the end faces of the test fixture A and the test fixture B, which are connected with the vector network analyzer, are calibration end faces, and the end faces of the test fixture A and the test fixture B, which are connected with the standard microwave integrated circuit and the microwave integrated circuit to be tested, are test end faces;

the vector network analyzer is used for carrying out corresponding calibration on the calibration end face, and carrying out scattering parameter test and data acquisition on the standard microwave integrated circuit and the microwave integrated circuit to be tested under the state on the test end face;

the standard microwave integrated circuit has the same model as the microwave integrated circuit to be tested but has known scattering parameters, provides scattering parameter standard data for the test evaluation circuit, and provides support for eliminating system errors of the circuit and obtaining a threshold limit of test evaluation through iterative optimization;

the automatic auxiliary equipment provides clamping and loading for the standard microwave integrated circuit and the microwave integrated circuit to be tested so as to meet the requirements of quick and efficient test application of the mass production line;

the main control computer is a core and a control center of the circuit, performs integrated cooperative control on the vector network analyzer, the adaptation unit and the automatic auxiliary equipment according to the test evaluation requirement of the production line mass production application, calculates the standard data of the standard microwave integrated circuit through testing and importing before the test evaluation to eliminate the system error of the circuit, and iteratively optimizes the threshold value limit of the test evaluation to meet the requirement of rapidly obtaining the scattering parameter of the microwave integrated circuit to be tested during the test evaluation of the production line mass production application.

2. A rapid microwave integrated circuit scattering parameter test and evaluation method is characterized by comprising the following steps:

(1) Before the test and evaluation of practical application, the main control computer performs integrated cooperative measurement and control on the vector network analyzer, the adapting unit and the automatic auxiliary equipment, and the corresponding calibration is completed on the end face of the standard type interface between the vector network analyzer and the adapting unit, and a calibration end face is formed on the end face;

(2) The main control computer performs integrated collaborative measurement and control on the vector network analyzer, the adaptation unit and the automatic auxiliary equipment, sequentially and automatically loads a plurality of standard microwave integrated circuits between a test fixture A and a test fixture B of the adaptation unit one by one for testing, obtains relevant influence factors of a test evaluation circuit by theoretical analysis, and obtains a threshold limit of test evaluation by calculation;

(3) When the test and evaluation of the practical application are carried out, the main control computer carries out integrated collaborative measurement and control on the vector network analyzer, the adapting unit and the automatic auxiliary equipment, the microwave integrated circuits to be tested are automatically loaded between the test clamp A and the test clamp B of the adapting unit one by one in sequence, and the real-time test and evaluation result is obtained through the relation between the test result and the threshold limit.

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