CN116230587A - A wet treatment fluid recovery device - Google Patents

Abstract

The invention relates to the field of semiconductor wet process technology, in particular to a wet treatment fluid recovery device, which includes a base provided with a fluid speed regulating device, the fluid speed regulating device is located at the center of the base, and also includes an upper fixed recovery tank , the lower fixed recovery tank, the lifting recovery tank cover and several layers of lifting recovery tanks arranged sequentially from outside to inside, the lifting recovery tank cover and each layer of lifting recovery tank are respectively connected with a group of external lifting components. When all groups of external lifting components are retracted, the recovery groove B and all the recovery grooves C are in the blocked state; the recovery groove B and each recovery groove C are controlled by adjusting the extended state of each group of external lifting components to enable the use of . In the present invention, through the cooperative setting of the upper fixed recovery tank, the lower fixed recovery tank, the lifting recovery tank cover and the lifting recovery tank, it can be configured according to the type and quantity of chemicals in the wet process, and the recovered liquid can be collected by classification, and the collection rate high.

Description

A wet treatment fluid recovery device

technical field

The invention relates to the technical field of semiconductor wet process, in particular to a wet process fluid recovery device.

Background technique

In the field of semiconductor wet process, with the update and development of the process, there is an increasing demand for the classified collection of various chemicals used in the process chamber of the process equipment. How to improve the classified collection of chemicals in semiconductor wet process equipment and avoid confusion in the classified collection of chemicals is always a difficult problem.

Contents of the invention

In view of the above problems, the object of the present invention is to provide a wet treatment fluid recovery device.

The purpose of the present invention is achieved through the following technical solutions:

A wet processing fluid recovery device, comprising a base provided with a fluid speed regulating device, the fluid speed regulating device is located at the center of the base, and also includes an upper fixed recovery tank, a lower fixed recovery tank, a lifting recovery tank cover and Several layers of lifting recovery tanks are arranged sequentially from outside to inside, and the cover of the lifting recovery tank and the lifting recovery tank on each layer are respectively connected with a set of external lifting components;

The upper fixed recovery tank is arranged on the upper part of the base and is located on the outer periphery of the fluid speed regulating device. The upper fixed recovery tank has an inner layer part A and an outer layer part A, and the inner layer of the upper fixed recovery tank A recovery groove A with an upper opening is formed between part A and the outer surface part A of the upper fixed recovery tank;

The lower fixed recovery tank is arranged on the lower part of the base and is located on the outer periphery of the upper fixed recovery tank. The lower fixed recovery tank has an inner layer part B and an outer layer part B. The lower fixed recovery tank A recovery groove B with an upper opening is formed between the inner surface part B and the outer surface part B of the lower fixed recovery groove;

Each layer of the lifting recovery tank has an outer layer part C, an intermediate layer part and an inner layer part C arranged sequentially from outside to inside, and the outer layer part C of the lifting recovery tank is the same as the middle layer part of the same lifting recovery tank. A recovery groove C with an upper opening is formed between them;

The lifting recovery tank cover has an outer surface D and an inner surface D;

When all groups of external lifting components are retracted, the recovery groove B and all the recovery grooves C are in a blocked state; the recovery groove B and each recovery groove B are controlled by adjusting the extended state of each group of external lifting components. The opening and use of recovery groove C.

The bottom surface of the recovery groove A, the bottom surface of the recovery groove B, and the bottom surface of the recovery groove C each have a lowest point, and the lowest point on the bottom surface of the recovery groove A and the lowest point on the bottom surface of the recovery groove B are the lowest points. Points and the lowest point on the bottom surface of the recovery groove C are respectively provided with drain ports, and each drain port is connected to a group of drain pipelines.

The bottom surface of the recovery groove A, the bottom surface of the recovery groove B, and the bottom surface of the recovery groove C each have a highest point.

The highest point of the bottom surface of the recovery groove A and the lowest point of the bottom surface of the recovery groove A are respectively located on opposite sides, and the highest point of the bottom surface of the recovery groove B and the lowest point of the bottom surface of the recovery groove B are respectively located on opposite sides. On the side position, the highest point of the bottom surface of the recovery groove C and the lowest point of the bottom surface of the recovery groove C are respectively located on opposite sides.

The outer layer portion A of the upper fixed recovery tank extends outward to form a lower overlapping edge, and the upper end of the middle layer portion of each layer of the lifting recovery tank extends inward to form an upper overlapping edge A, and the lifting recovery tank cover The upper end of the inner layer portion D extends inwardly to form an upper overlapping edge B;

When all groups of external lifting components are retracted, the upper overlapping edge A of the innermost lifting recovery tank is overlapped on the lower overlapping edge, except for the innermost lifting recovery tank. The upper overlapping edge A of each layer of the lifting recovery tank is respectively overlapped on the upper overlapping edge A of the adjacent inner layer of the lifting recovery tank, and the upper overlapping edge B of the lifting recovery tank cover is overlapped on the outermost layer On the upper overlapping edge A of the lifting recovery tank.

Between the middle layer part of the lifting recovery tank and the inner layer part C of the same lifting recovery tank, a socket A with a lower opening is formed, and the outer layer part D of the lifting recovery tank cover is connected to the inner layer part of the lifting recovery tank cover. A socket B with a lower opening is formed between D;

When all groups of external lifting components are retracted, the inner surface part B of the lower fixed recovery tank extends to the socket A of the innermost lifting recovery tank, except for the outermost lifting recovery tank The outer layer parts C of the lifting recovery tanks on the other layers respectively extend to the socket A of the lifting recovery tank on the adjacent outer layer, and the outer layer part C of the lifting recovery tank on the outermost layer extends to the lifting recovery tank. Insertion port B of the slot cover.

A shield is provided on the outermost side of the base.

Advantage of the present invention and positive effect are:

1. The present invention can match the types and quantities of chemicals in the wet process through the coordinated arrangement of the upper fixed recovery tank, the lower fixed recovery tank, the lifting recovery tank cover and several layers of lifting recovery tanks arranged sequentially from outside to inside. Configure and collect the recovered liquid by classification, and the collection rate is high, and the lifting recovery tank can be stacked according to the demand.

2. The present invention can make the cover of the lifting recovery tank and the lifting and recovery tanks of each layer overlap each other when closing through the cooperative setting of the lower overlapping edge, the upper overlapping edge A and the upper overlapping edge B, so as to ensure stable closing and avoid different Chemical fluid mix up.

Description of drawings

Fig. 1 is the overall structure schematic diagram of the present invention;

Fig. 2 is the schematic cross-sectional structure diagram of one of the lifting recovery tanks of the present invention;

Fig. 3 is the schematic cross-sectional structure diagram of the lifting recovery tank cover of the present invention;

Figure 4 is an enlarged view of A in Figure 1;

Fig. 5 is one of the schematic diagrams of the use state of the present invention;

Fig. 6 is the second schematic diagram of the use state of the present invention;

Fig. 7 is the third schematic diagram of the use state of the present invention;

Fig. 8 is a fourth schematic view of the use state of the present invention.

In the figure: 1 is the base, 2 is the upper fixed recovery tank, 201 is the lower lap joint edge, 3 is the lower fixed recovery tank, 4 is the lifting recovery tank cover, 401 is the upper lap joint edge B, 402 is the socket B, 5 is the lifting recovery tank, 501 is the upper lap edge A, 502 is the socket A, 6 is the shield, and 001 is the fluid speed regulating device.

Detailed ways

The present invention will be described in further detail below in conjunction with accompanying drawings 1-8.

A wet processing fluid recovery device, as shown in Figures 1-8, in this embodiment includes a base 1 provided with a fluid speed regulating device 001, and the fluid speed regulating device 001 is located at the center of the base 1. In this embodiment, the fluid speed regulating device 001 can adopt the existing technology, including a fluid recovery tray and a substrate rotating shaft that accepts the substrate. The closing plate is rotated so that the fluid recovery plate can fully throw out the liquid on it, which can realize the differential rotation of the fluid and the substrate rotating shaft and improve the fluid collection rate. By adjusting the rotation speed of the substrate rotating shaft and the fluid recovery tray, it can be compatible with substrates of various specifications and sizes.

The wet processing fluid recovery device of the present invention also includes an upper fixed recovery tank 2, a lower fixed recovery tank 3, a lifting recovery tank cover 4 and several layers of lifting recovery tanks 5 arranged sequentially from the outside to the inside, the lifting recovery tank cover 4 and each layer The lifting and recovery tanks 5 are respectively connected with a group of external lifting components, and each group of external lifting components is controlled by the host computer to lift independently. The setting structures of the external lifting components in this embodiment are all prior art, for example, the connected lifting recovery tank cover 4 or the lifting recovery tank 5 is driven up and down by the servo motor through the screw nut structure.

The upper fixed recovery tank 2 is arranged on the upper part of the base 1 and is located on the outer periphery of the fluid speed regulating device 001. The upper fixed recovery tank 2 has an inner surface part A and an outer surface part A, and the inner surface part A of the upper fixed recovery tank 2 and the A recovery groove A with an upper opening is formed between the outer surface parts A of the upper fixed recovery tank 2 . The recovery groove A can be used to receive residual liquid falling from the fluid speed regulating device 001 .

The lower fixed recovery tank 3 is arranged on the lower part of the base 1 and is located on the outer periphery of the upper fixed recovery tank 2. The lower fixed recovery tank 3 has an inner layer part B and an outer layer part B, and the inner layer part B of the lower fixed recovery tank 3 and the A recovery groove B with an upper opening is formed between the outer surface parts B of the lower fixed recovery tank 3 .

Each layer of lifting recovery tank 5 has an outer layer part C, an intermediate layer part and an inner layer part C arranged sequentially from the outside to the inside. A recovery groove C with an upper opening is formed between them.

The elevating recovery tank cover 4 has an outer surface D and an inner surface D. As shown in FIG.

When all groups of external lifting components are retracted, the recovery groove B and all the recovery grooves C are in the blocked state; the recovery groove B and each recovery groove C are controlled by adjusting the extended state of each group of external lifting components to enable the use of .

Specifically, in this embodiment, the bottom surface of the recovery groove A, the bottom surface of the recovery groove B, and the bottom surface of the recovery groove C each have a lowest point, and at the lowest point of the bottom surface of the recovery groove A, the bottom surface of the recovery groove The lowest point of the bottom surface of the tank B and the lowest point of the bottom surface of the recovery groove C are respectively provided with drain ports, and each drain port is connected with a set of drain pipelines for recovering specific liquids respectively. The bottom surface of the recovery groove A, the bottom surface of the recovery groove B, and the bottom surface of the recovery groove C each have a highest point. The highest point of the bottom surface of the recovery groove A and the lowest point of the bottom surface of the recovery groove A are respectively located on opposite sides, and the highest point of the bottom surface of the recovery groove B and the lowest point of the bottom surface of the recovery groove B are respectively located on opposite sides. The highest point of the bottom surface of the recovery groove C and the lowest point of the bottom surface of the recovery groove C are respectively located on opposite sides. The liquid entering the recovery groove A, the recovery groove B, and the recovery groove C flows away rapidly from the liquid outlet at the lowest point of the bottom surface under the action of the height difference of the bottom surface respectively. In this embodiment, two left and right symmetrical semicircular inclined flow channels are formed between the highest point of the bottom surface and the lowest point of the bottom surface, which can accelerate the flow velocity of the liquid in the groove and prevent blockage. In this embodiment, the upper fixed recovery tank 2, the lower fixed recovery tank 3, the lifting recovery tank cover 4 and the lifting recovery tank 5 of each layer are all made of hydrophobic materials, which can also avoid the accumulation or even crystallization of the chemical liquid, ensuring that the liquid Recycling went smoothly.

Specifically, in this embodiment, the outer layer portion A of the upper fixed recovery tank 2 extends outward to form a lower overlapping edge 201, and the upper end of the middle layer portion of each lifting recovery tank 5 extends inwardly to form an upper overlapping edge A. 501 , the upper end of the inner surface portion D of the lifting recovery tank cover 4 extends inwardly to form an upper overlapping edge B 401 .

When all groups of external lifting components are retracted, the upper overlapping edge A 501 of the innermost lifting recovery tank 5 is overlapped on the lower overlapping edge 201, and each layer except the innermost lifting recovery tank 5 The upper overlapping edge A501 of the lifting recovery tank 5 is respectively overlapped on the upper overlapping edge A 501 of the lifting recovery tank 5 on the adjacent inner layer, and the upper overlapping edge B 401 of the lifting recovery tank cover 4 is overlapped on the outermost On the upper overlapping edge A 501 of the lifting recovery tank 5 of the layer. Through the cooperative setting of the lower overlapping edge 201, the upper overlapping edge A 501 and the upper overlapping edge B 401, the lifting recovery tank cover 4 and the lifting recovery tanks of each layer can be overlapped layer by layer to ensure stable closing and avoid Mixing of different chemical fluids.

Specifically, in the present embodiment, an insertion port A 502 with a lower opening is formed between the middle surface portion of the lift recovery tank 5 and the inner surface portion C of the same lift recovery tank 5, and the outer surface portion D of the lift recovery tank cover 4 is connected to the inner surface portion C of the same lift recovery tank 5. An insertion port B 402 with a lower opening is formed between the inner surface parts D of the lifting recovery tank cover 4 .

When all groups of external lifting components are retracted, the inner surface part B of the lower fixed recovery tank 2 extends to the socket A 502 of the innermost lifting recovery tank 5, except for the outermost lifting recovery tank 5 The outer surface part C of the lifting recovery tank 5 of each layer extends to the socket A 502 of the lifting recovery tank 5 on the adjacent outer layer respectively, and the outer surface part C of the lifting recovery tank 5 of the outermost layer extends to the lifting recovery tank cover 4 into the socket B 402. Through the coordinated setting of the socket A502 and the socket B 402, it is convenient to fix the recovery tank 2, the lifting recovery tank cover 4, and the lifting recovery tank 5 of each layer without interference during the up and down movement, saving equipment space, and the recovery tank can be lifted The outer layer part C of 5 and the inner layer part D of the lifting recovery tank cover 4 play a role of diversion.

Specifically, in this embodiment, the outermost side of the base 1 is provided with a shield 6 for protecting internal components.

In a specific embodiment, as shown in Figures 5-8, the lifting recovery tank 5 is provided with two layers. As shown in Figure 5, at this time, the lifting recovery tank cover 4 and the two-layer lifting recovery tank 5 have not risen, and the recovery groove B and all the recovery grooves C are in the blocked state; The recovery tank cover 4 is raised, and the liquid is thrown onto the inner surface D of the lifting recovery tank cover 4, and flows into the recovery groove C of the lifting recovery tank 5 located on the outer layer to recover the first liquid; as shown in the figure As shown in 7, at this time, the lifting recovery tank cover 4 and the lifting recovery tank 5 of the outer layer are raised, and the liquid is thrown to the inner layer part C of the lifting recovery tank 5 of the outer layer, and flows into the lifting recovery tank located at the inner layer 5 in the recovery groove C to recover the second liquid; as shown in Figure 7, the lifting recovery tank cover 4 and the two-layer lifting recovery tank 5 are all raised at this time, and the liquid is thrown to the inner lifting recovery tank 5, and flow into the recovery groove B of the lower fixed recovery tank 3 to recover the third liquid.

working principle:

When in use, when all groups of external lifting components are retracted, the recovery groove B and all the recovery grooves C are in the blocked state, and the recovery groove B and each recovery groove B are controlled by adjusting the extended state of each group of external lifting components. The groove C is opened and used to recover different liquids; the liquids entering the recovery groove A, the recovery groove B, and the recovery groove C are quickly moved from the lowest point of the bottom surface under the action of the height difference of the bottom surface. The flow of the liquid outlet can make the flow speed of the liquid in the groove faster and not easy to be blocked; through the cooperative setting of the lower lap edge 201, the upper lap edge A 501 and the upper lap edge B 401, it can be lifted when closing The cover 4 of the recovery tank and the 5 layers of the lifting recovery tank of each layer are overlapped to ensure stable closing and avoid confusion of different chemical fluids; through the matching setting of the socket A 502 and the socket B 402, it is convenient to fix the recovery tank 2 and lift recovery The tank cover 4 and the lifting recovery tank 5 of each layer do not interfere during the up and down movement, saving equipment space, and can be guided by the outer surface part C of the lifting recovery tank 5 and the inner surface part D of the lifting recovery tank cover 4 , to ensure accurate and stable liquid recovery.

Claims (7)

1. A wet processing fluid recovery device, comprising a base (1) provided with a fluid speed regulating device (001), the fluid speed regulating device (001) is located at the center of the base (1), characterized in that : also include upper fixed recovery tank (2), lower fixed recovery tank (3), lifting recovery tank cover (4) and several layers of lifting recovery tank (5) arranged sequentially from outside to inside, described lifting recovery tank cover ( 4) and the lifting recovery tank (5) on each floor is respectively connected with a group of external lifting components; The upper fixed recovery tank (2) is arranged on the upper part of the base (1) and is located on the outer periphery of the fluid speed regulating device (001). The upper fixed recovery tank (2) has an inner layer A and an outer layer Part A, a recovery groove A with an upper opening is formed between the inner surface part A of the upper fixed recovery tank (2) and the outer surface part A of the upper fixed recovery tank (2); The lower fixed recovery tank (3) is arranged on the lower part of the base (1) and is located on the outer periphery of the upper fixed recovery tank (2). The lower fixed recovery tank (3) has an inner surface B and The outer layer part B, the upper opening recovery groove B is formed between the inner layer part B of the lower fixed recovery tank (3) and the outer layer part B of the lower fixed recovery tank (3); The lifting recovery tank (5) of each layer has an outer layer part C, an intermediate layer part and an inner layer part C arranged in sequence from the outside to the inside, and the outer layer part C of the lifting recovery tank (5) is the same as the same lifting A recovery groove C with an upper opening is formed between the intermediate layer parts of the recovery tank (5); The lifting recovery tank cover (4) has an outer surface D and an inner surface D; When all groups of external lifting components are retracted, the recovery groove B and all the recovery grooves C are in a blocked state; the recovery groove B and each recovery groove B are controlled by adjusting the extended state of each group of external lifting components. The opening and use of recovery groove C. 2. A wet treatment fluid recovery device according to claim 1, characterized in that: the bottom surface of the recovery groove A, the bottom surface of the recovery groove B, and the bottom surface of the recovery groove C each have a The lowest point, and the lowest point of the bottom surface of the recovery groove A, the lowest point of the bottom surface of the recovery groove B, and the lowest point of the bottom surface of the recovery groove C are each provided with a drain port, and each of the drain ports is connected to a group of drains pipeline. 3. A wet processing fluid recovery device according to claim 2, characterized in that: the bottom surface of the recovery groove A, the bottom surface of the recovery groove B, and the bottom surface of the recovery groove C each have a high point. 4. A wet treatment fluid recovery device according to claim 3, characterized in that: the highest point of the bottom surface of the recovery groove A and the lowest point of the bottom surface of the recovery groove A are respectively located on opposite sides, and the The highest point of the bottom surface of the recovery groove B and the lowest point of the bottom surface of the recovery groove B are respectively located on opposite sides, and the highest point of the bottom surface of the recovery groove C and the lowest point of the bottom surface of the recovery groove C are respectively located on opposite sides. superior. 5. A wet treatment fluid recovery device according to claim 1, characterized in that: the outer layer A of the upper fixed recovery tank (2) extends outward to form a lower overlapping edge (201), and each layer The upper end of the middle layer portion of the lifting recovery tank (5) extends inwardly to form an upper lap edge A (501), and the upper end of the inner layer portion D of the lifting recovery tank cover (4) extends inwardly to form an upper lap joint. edgeB(401); When all groups of external lifting components are retracted, the upper overlapping edge A (501) of the innermost lifting recovery groove (5) is overlapped on the lower overlapping edge (201), except for the innermost The upper overlapping edge A (501) of each layer of the lifting recovery tank (5) other than the lifting recovery tank (5) of the layer is respectively overlapped with the upper overlapping edge of the lifting recovery tank (5) of the adjacent inner layer On A (501), the upper overlapping edge B (401) of the lifting recovery tank cover (4) is overlapped on the upper overlapping edge A (501) of the outermost lifting recovery tank (5). 6. A wet processing fluid recovery device according to claim 1, characterized in that: the middle layer part of the lifting recovery tank (5) and the inner layer part C of the same lifting recovery tank (5) are formed The lower opening socket A (502), the lower opening socket B (402) is formed between the outer surface D of the lifting recovery tank cover (4) and the inner surface D of the lifting recovery tank cover (4); When all groups of external lifting components are retracted, the inner surface part B of the lower fixed recovery tank (2) extends to the insertion port A (502) of the innermost lifting recovery tank (5), except The outer layer parts C of the lifting recovery tanks (5) of each layer other than the lifting recovery tank (5) of the outermost layer respectively extend to the socket A (502) of the lifting recovery tank (5) of the adjacent outer layer , the outer surface part C of the outermost lifting recovery tank (5) extends to the insertion port B (402) of the lifting recovery tank cover (4). 7. A wet processing fluid recovery device according to claim 1, characterized in that: a shield (6) is provided on the outermost side of the base (1).

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