CN116275540B - A laser micro-ablation fiber bundling device for laser micro-thrusters - Google Patents
A laser micro-ablation fiber bundling device for laser micro-thrustersInfo
- Publication number
- CN116275540B CN116275540B CN202211529482.0A CN202211529482A CN116275540B CN 116275540 B CN116275540 B CN 116275540B CN 202211529482 A CN202211529482 A CN 202211529482A CN 116275540 B CN116275540 B CN 116275540B
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- optical fiber
- laser
- substrate
- ablation
- glass sheet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Optical Couplings Of Light Guides (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses an optical fiber bundling ablation device for laser micro-ablation, which comprises an optical fiber, an anti-reflection glass sheet, a solid working medium target belt, a substrate and a laser. The invention changes the concept of the installation and debugging of the existing optical lens in the laser thruster, utilizes optical fiber coupling to output laser, utilizes the grooved substrate to realize laser bundling output, utilizes the known parameters of the divergence angle, the lens increasing position and the refractive index of the optical fiber to accurately arrange the working medium ablation position to realize efficient ablation of the working medium, has simple structure and higher space utilization rate, greatly reduces the structural complexity of the laser micro thruster and prolongs the service life of the laser thruster, and can furthest reduce the accumulated error caused by repeated processing by adopting a micro processing technology to achieve the fiber bundling arrangement effect with high precision and high density. The laser micro-ablation realized by the invention has the effects of low cost, miniaturization and high efficiency.
Description
Technical Field
The invention belongs to the field of optics, and particularly relates to a laser micro-ablation optical fiber bundle ablation device for a laser micro-thruster, which is used for a scene of laser ablation of a propelling working medium in a space laser micro-thruster.
Background
The laser micro-thruster is a space micro-propulsion system for generating micro-thrust by using laser ablation to propel working medium, and as the ablation light spot of laser to working medium is generally in the order of hundred micrometers, the laser micro-thruster belongs to a micro-ablation process, so that the laser micro-thruster has smaller thrust, is generally in the order of millinewton, and is mainly used for attitude and orbit control, orbit maintenance and the like of micro-nano satellites. The existing laser micro-thruster ablation light source has complex structure and large volume, and the ablation light spot area has scattered light beam distribution, so that the efficient ablation effect on working media can not be met, and further, the miniaturization and low-power consumption development requirements of the space laser micro-thruster are limited.
In addition, the key of the improvement of the performance of the space laser micro-thruster is the high and low laser power density and the high-efficiency ablation of working media so as to reduce dead weight and meet the requirement of high total impact. This requires the laser of the laser micro-thruster to have better focusing performance and close-packed bundling. The existing method is to use a single lens or a plurality of lenses to realize focusing of laser beams, however, the application of the lenses not only increases the debugging difficulty of an optical path, but also brings complexity to a system, meanwhile, in order to realize efficient ablation of a target belt type solid working medium, the single lens needs to reciprocate in a certain dimension, a motor, a guide rail and other motion executing mechanisms are added, the extra power of a thruster is increased, and the method also uses the combination of the lenses to realize efficient ablation of the working medium, which brings complexity to increase and debug the volume of the system.
Disclosure of Invention
In view of this, the invention aims to reduce the complexity of the laser micro-thruster structure, reduce the volume of the laser micro-thruster, reduce the energy consumption and the debugging difficulty of the laser micro-thruster structure, and realize the low cost, miniaturization and high efficiency of laser micro-ablation.
In order to achieve the above purpose, the invention provides an optical fiber bundling ablation device for laser micro-ablation, which comprises an optical fiber, a substrate, a glass sheet, a solid working medium target belt, a substrate and a laser;
The plurality of diode lasers are connected with one optical fiber, laser emitted by the diode lasers is output through the optical fiber, and the substrate is used for fixing the output ends of the optical fibers and enabling the directions of the output ends of the optical fibers to be parallel to each other;
the glass sheet is arranged between the optical fiber output end and the solid working medium target belt;
The solid working medium target belt is placed on the laser target surface output by the optical fiber output end, ablation is generated by the solid working medium target belt under the action of a laser beam, and the ablation spots on the solid working medium target belt are circular spots and are tangent to each other.
Further, the glass sheet is an anti-reflection glass sheet, and both sides of the anti-reflection glass sheet are plated with an anti-reflection film with the same wavelength as the diode laser.
Further, the material of the glass sheet is quartz glass.
Further, the substrate is of a single structure or an upper and lower combined structure, when the substrate is of a single structure, a through hole for accommodating the optical fiber output end is formed in the substrate, or a through groove for accommodating the optical fiber is formed in the substrate, when the substrate is of an upper and lower combined structure, the substrate comprises an upper substrate and a lower substrate which are overlapped up and down, through grooves for accommodating the optical fiber output end are formed in the surfaces opposite to each other of the upper substrate and the lower substrate, or through grooves for accommodating the optical fiber output end are formed in the upper surface of the lower substrate or only the lower surface of the upper substrate, and the optical fiber is fixed in the through grooves or the through holes.
Further, the optical fiber bundling ablation device further comprises a bundling shell, wherein the bundling shell is provided with a through groove, and the substrate and the glass sheet which are fixed with the optical fiber output end are fixed in the through groove.
Further, the optical fiber output ends are parallel to each other and have equal intervals, the ends of the optical fiber output ends are on the same straight line, the intervals of the optical fiber output ends are p,Wherein w is the width of the target zone of the solid working medium, and n is the number of optical fibers.
Further, an optical fiber bundle composed of a plurality of optical fibers fixed in a substrate is sequentially fixed with the positions of the glass sheet and the solid working medium belt, wherein the distance between the output end of the optical fiber bundle and the glass sheet is L 1, the distance between the glass sheet and the solid working medium belt is L 2, and the optical fiber bundle is a solid working medium beltWherein D is the size of the ablated spot on the target band, D is the core diameter of the optical fiber, θ 1 is the divergence angle of the single optical fiber, and θ 2 isM is the refractive index of the glass sheet and L is the thickness of the glass sheet.
Further, the distance L 1 between the output end of the optical fiber bundle and the glass sheet is less than or equal to 5mm.
Further, the diode laser is connected to the optical fiber through the FC interface.
Further, the solid working medium target zone comprises a transparent basal layer and a pushing working medium layer, wherein the transparent basal layer is arranged on one side close to the optical fiber output end, and the pushing working medium layer is arranged on one side deviating from the optical fiber output end.
The optical fiber bundling device for laser micro-ablation has the advantages that 1) the concept of installing and debugging an optical lens in the prior art is changed, laser is output by utilizing optical fiber coupling, laser bundling output is realized by utilizing a substrate with a square groove, working medium ablation positions can be precisely arranged by utilizing known parameters of an optical fiber divergence angle, a lens increasing position and a refractive index, efficient ablation of the working medium is realized, 2) the structure is simple, the space utilization rate is higher, the structural complexity of a laser micro-thruster can be greatly reduced, the service life of the laser thruster is prolonged, and 3) the integrated error caused by multiple processing can be reduced to the greatest extent by utilizing a micro-processing technology to the substrate with the groove, so that the optical fiber bundling arrangement effect with high precision and high density is achieved. Thus, the laser micro-ablation achieved by the present invention has the effects of low cost, miniaturization and high efficiency.
Drawings
FIG. 1 is a schematic view of the distribution of light spots during optical fiber bundling according to the present invention;
FIG. 2 is a schematic diagram showing the distribution of the optical fibers on a working medium target tape after passing through a lens increasing step in the optical fiber bundling process;
FIG. 3 is a schematic diagram of a fiber-coupled diode laser according to the present invention;
FIG. 4 is a schematic illustration of an optical fiber bundle of the present invention on a substrate with a square groove;
FIG. 5 is a schematic illustration of an optical fiber bundle of the present invention in two substrates with square grooves;
FIG. 6 is a schematic illustration of an optical fiber bundle of the present invention mounted by a metal mounting housing after placement on a substrate with a square groove;
fig. 7 is a diagram of a fiber bundle module of the present discovery.
The reference numerals are as follows:
1-optical fiber, 2-glass sheet, 3-solid working medium target band, 4-substrate, 5-shell and 6-diode laser.
Detailed Description
Embodiments of the present invention are described in further detail below with reference to the accompanying drawings and examples. The following examples are illustrative of the invention but are not intended to limit the scope of the invention.
In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the embodiments of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In describing embodiments of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "connected," "connected," and "coupled" should be construed broadly, and may be, for example, fixedly connected, detachably connected, integrally connected, mechanically connected, electrically connected, directly connected, or indirectly connected via an intermediate medium. The specific meaning of the above terms in embodiments of the present invention will be understood in detail by those of ordinary skill in the art.
In embodiments of the invention, unless expressly specified and limited otherwise, a first feature "up" or "down" on a second feature may be that the first and second features are in direct contact, or that the first and second features are in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the embodiments of the present invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
The optical fiber bundling device for laser micro-ablation in the specific embodiment of the invention realizes bundling combination of multiple paths of laser beams by utilizing multiple paths of optical fiber coupling output through a plurality of low-cost small diode lasers, thereby meeting the ablation effect on working media. Embodiments of the optical fiber bundling apparatus for laser micro-ablation according to the present invention are described below with reference to fig. 1-6.
The optical fiber bundling device for laser micro-ablation of the invention comprises an optical fiber 1, a glass sheet 2, a solid working medium target band 3, a substrate 4 and a laser 6, wherein the laser 6 is a low-cost small diode laser.
In some embodiments of the invention, the substrate 4 is provided with an upper substrate and a lower substrate, the surfaces of the upper substrate and the lower substrate, which are opposite, are provided with through straight line grooves, the distance between the grooves is equal, the optical fibers are fixed in the grooves, the grooves can be square grooves, the processing and the manufacturing are convenient, the inner wall of the square groove of the substrate is easy to be tangent to the circular section of the outer diameter of the optical fibers, and the position of the laser as a solid working medium target zone is controlled. In the second method of grooving, only a straight groove is formed on the lower surface of the upper substrate or the upper surface of the lower substrate, and the other substrate is not grooved. Further, a method of directly opening a through hole in a substrate may be employed.
The glass sheet 2 is arranged in front of the end face of the optical fiber output end of the substrate 4, the solid working medium target belt 3 is arranged in front of the glass sheet 2, the input end of the optical fiber 1 is connected with the diode laser 6 through the FC interface, laser emitted by the diode laser 6 acts on the solid working medium target belt 3 after passing through the optical fiber 1 and the glass sheet 2, the solid working medium target belt 3 ablates under the action of laser beams, ablation spots on the solid working medium target belt 3 are circular spots and are tangent to each other, the solid working medium target belt 3 comprises a transparent substrate layer and a propelling working medium layer, the transparent substrate layer faces the glass sheet 2, and the propelling working medium layer faces the outer side of the glass sheet 2.
As shown in FIG. 1, in an optical fiber bundling apparatus for laser micro-ablation according to some embodiments of the present invention, an arrangement pitch between optical fibers 1 is p, whereinWherein w is the width of a solid working medium target band, n is the number of optical fibers, the front of the optical fiber bundle is a glass sheet 2, the thickness of the glass sheet is L, preferably, the glass sheet adopts an anti-reflection glass sheet, both sides of the anti-reflection glass sheet are plated with an anti-reflection film with the same wavelength as that of the diode laser, the selected material is quartz glass, the anti-reflection glass sheet is adopted to avoid the pollution of the jet substances to the optical fiber core diameter, the transmissivity of the laser with the specific wavelength emitted by the diode laser is increased, and part of the light with other wavelengths is filtered to enable the laser passing through the anti-reflection glass sheet to be purer.
The laser emitted by the diode laser is coupled and output through the optical fiber, passes through the transparent substrate on the working medium target belt and finally forms ablation spots on the working medium to generate an ablation effect, and the ablation spots are tangent to each other, so that the working medium is fully utilized, dead weight is reduced, and the blocking of the glass sheet 2 can also avoid pollution to the core diameter of the optical fiber because of the generation of injection substances in the ablation process. Further, in order to prevent the fiber core from being contaminated, the manufacturing is convenient and the reliability in use is increased, as shown in fig. 7, the substrate 4 and the glass sheet 2 with the optical fibers fixed are fixed in the bundling case 5 with the through groove, and the transparent glass sheet 2 is placed at one end of the groove of the bundling case 5.
Referring to FIG. 2, in some embodiments of the present invention, an optical fiber bundle composed of a plurality of optical fibers 1 fixed in a substrate 4 is placed in sequence with a glass sheet 2 and a solid working medium band, wherein the distance between the emitting end of the optical fiber bundle and the glass sheet 2 is L 1, typically L 1 is less than or equal to 5mm, the distance between the glass sheet 2 and the solid working medium band 3 is L 2, whereinWherein D is the size of the ablated spot on the target band, D is the core diameter of the optical fiber, θ 1 is the divergence angle of the single optical fiber, and θ 2 isM is the refractive index of the anti-reflection glass sheet, and L is the thickness of the anti-reflection glass sheet. As can be seen from the above analysis and fig. 2, the refraction of the anti-reflection glass sheet shortens the distance between the optical fiber output end and the solid working medium target zone in the scheme of setting the anti-reflection glass sheet with the same light spot size, which is beneficial to simplifying the structural design and reducing the volume of the whole device.
Referring to fig. 3, in the present invention, an input end of an optical fiber 1 is connected to a diode laser 6 through an FC interface, and an output end of the optical fiber is placed on a substrate with a square groove and is used for emitting a laser beam.
Referring to fig. 4-7, a method of manufacturing an optical fiber cluster ablation device for laser micro-ablation in accordance with one embodiment of the present invention includes the steps of:
Step S100, grooving the substrate, wherein the grooves of the substrate can be made by adopting a micromachining technology, the grooves can be formed on both the upper substrate and the lower substrate, the grooves can be formed on only the lower substrate, and only one substrate with through grooves can be made, generally, the cross section of the groove is square, the processing is convenient, the precision of the distance between the optical fibers can be controlled, other shapes such as a circle can be also adopted according to the processing conditions, the grooves are arranged in parallel with the grooves at equal intervals, the arrangement interval is p, and the method comprises the steps of Wherein w is the width of the target band of the solid working medium, and n is the number of optical fibers.
And step 200, placing the optical fibers on a lower substrate with square grooves, placing an upper substrate above the optical fibers, clamping the optical fibers in the lower substrate through the two substrates, keeping the number of the optical fibers consistent with that of the grooves on the substrates, enabling the output ends of the optical fibers to be flush with the end faces of the substrates with grooves, preferably enabling the sizes of the grooves on the substrates to be the same, enabling the sizes of the grooves to be matched with the outer diameter of the optical fibers, and enabling the inner walls of the grooves on the substrates to be tangential to the circular cross section of the outer diameter of the optical fibers.
Step 300, injecting adhesive between the optical fiber and the groove wall of the substrate and curing;
Step S400, placing an anti-reflection glass sheet at the front L 1 position of the end face of the substrate, wherein the two sides of the anti-reflection glass sheet are preferably plated with an anti-reflection film with the same wavelength as the diode laser, and the selected material is quartz glass, and L 1 is generally less than or equal to 5mm;
S500, placing an upper substrate, a lower substrate and an optical anti-reflection glass sheet which are provided with optical fibers in a metal installation shell;
Step S600 placing the target tape at a distance L 2 from the front of the anti-reflection glass sheet, wherein Wherein D is the size of the ablated spot on the target band, D is the core diameter of the optical fiber, θ 1 is the divergence angle of the optical fiber, and θ 2 isM is the refractive index of the anti-reflection glass sheet, and L is the thickness of the anti-reflection glass sheet.
In a specific embodiment of the invention, 8 paths of optical fiber bundles are manufactured by utilizing a substrate with square grooves, 105/125 multimode optical fibers are adopted, the optical fibers are arranged on the substrate with the square grooves which are distributed at equal intervals, the number of the square grooves on the substrate is 8, the side length of the square grooves is 125 mu m, the arrangement interval of the square grooves is 750mm, and the substrate adopts a micro-machining technology, so that the accumulated errors caused by multiple machining are reduced to the greatest extent, and the optical fiber bundle arrangement effect with high precision and high density is achieved. 8 paths of optical fibers are placed in the square groove, the size of the square groove is matched with the outer diameter of the optical fibers, and the inner wall of the substrate square groove is tangent to the circular section of the outer diameter of the optical fibers. And manufacturing a substrate with 8 square grooves, combining the two substrates, placing the optical fibers, injecting an adhesive between the optical fibers and the square groove walls of the two substrates, and curing to obtain an optical fiber bundle, placing an anti-reflection glass sheet in front of the substrates, wherein the placing distance is 4mm, the thickness of the glass sheet is 2mm, and the two surfaces of the glass sheet are plated with 976nm wavelength anti-reflection films due to the fact that the wavelength of the adopted diode laser is 976 nm. And (3) placing the whole optical fiber bundling and the anti-reflection glass sheet in a metal fixed shell to form an optical fiber bundling device, and finally determining the position of a working medium target belt.
The optical fiber bundling device for laser micro-ablation changes the concept of installation and debugging of an optical lens in the prior art, outputs laser by using optical fiber coupling, realizes laser bundling output by using a substrate with a square groove, and can accurately arrange the ablation position of a working medium by using known parameters of the divergence angle, the lens increasing position and the refractive index of the optical fiber, thereby realizing efficient ablation of the working medium.
The invention has simple structure and higher space utilization rate, can greatly reduce the structural complexity of the laser micro-thruster and prolong the service life of the laser thruster.
The substrate with the grooves can reduce accumulated errors caused by multiple processing to the greatest extent by using a micro-processing technology, and achieves the effects of high-precision and high-density optical fiber bundling arrangement. Thus, the laser micro-ablation achieved by the present invention has the effects of low cost, miniaturization and high efficiency.
The application is not limited to what has been described in the specification and in the written description of the claims, and any modifications and variations known in the art are intended to be included within the scope of the application, since the description of the specific embodiments is illustrative only and not in any way limiting.
Claims (9)
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| CN202211529482.0A CN116275540B (en) | 2022-11-30 | 2022-11-30 | A laser micro-ablation fiber bundling device for laser micro-thrusters |
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| CN202211529482.0A CN116275540B (en) | 2022-11-30 | 2022-11-30 | A laser micro-ablation fiber bundling device for laser micro-thrusters |
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| CN103499848A (en) * | 2013-09-06 | 2014-01-08 | 中国科学院西安光学精密机械研究所 | Laser micro thruster optical system and installation method thereof |
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| JP2808102B2 (en) * | 1996-11-28 | 1998-10-08 | 株式会社川口光学産業 | Ring beam generating optics |
| JP2003207695A (en) * | 2002-01-15 | 2003-07-25 | Sharp Corp | Optical communication module and single-core bidirectional optical communication module |
| CN102022299B (en) * | 2010-12-07 | 2012-01-25 | 中国人民解放军国防科学技术大学 | Laser microthruster |
| CN102175376B (en) * | 2011-01-27 | 2012-06-27 | 哈尔滨工业大学 | Multi-laser-beam heterodyne micro-impulse-measuring device and method |
| WO2013086227A1 (en) * | 2011-12-09 | 2013-06-13 | Jds Uniphase Corporation | Varying beam parameter product of a laser beam |
| CN203480064U (en) * | 2013-09-06 | 2014-03-12 | 中国科学院西安光学精密机械研究所 | Laser micro thruster optical system |
| CN104625418A (en) * | 2013-11-12 | 2015-05-20 | 西安中科麦特电子技术设备有限公司 | Laser ablation micro-thruster |
| CN103698302B (en) * | 2013-12-30 | 2016-03-02 | 合肥知常光电科技有限公司 | The multi-angle Multi point measuring apparatus of gain medium bound edge residual reflection and method |
| JP6659746B2 (en) * | 2018-02-16 | 2020-03-04 | ファナック株式会社 | Laser processing head to reduce contamination of protective window |
| CN108581244A (en) * | 2018-05-15 | 2018-09-28 | 中国人民解放军战略支援部队航天工程大学 | Belt working substance supply laser ablation microthruster |
| CN111120233A (en) * | 2019-12-10 | 2020-05-08 | 南京理工大学 | An optical fiber self-consumable laser micropropulsion system |
| CN111408856B (en) * | 2020-04-15 | 2022-11-22 | 华东师范大学重庆研究院 | Method and device for fabricating microfluidic chip with femtosecond plasma grating |
| DE102020116268A1 (en) * | 2020-06-19 | 2021-12-23 | Ii-Vi Delaware, Inc. | FIBER-COUPLED LASER WITH VARIABLE BEAM PARAMETER PRODUCT |
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| CN103499848A (en) * | 2013-09-06 | 2014-01-08 | 中国科学院西安光学精密机械研究所 | Laser micro thruster optical system and installation method thereof |
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