CN116282953A - A kind of strong weather resistance NCVM thin film and coating process - Google Patents
A kind of strong weather resistance NCVM thin film and coating process Download PDFInfo
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- 238000000576 coating method Methods 0.000 title claims abstract description 28
- 239000010409 thin film Substances 0.000 title description 4
- 239000000463 material Substances 0.000 claims abstract description 61
- 229910004298 SiO 2 Inorganic materials 0.000 claims abstract description 43
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 24
- 239000011248 coating agent Substances 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 229910052786 argon Inorganic materials 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims 6
- 239000007888 film coating Substances 0.000 claims 1
- 238000009501 film coating Methods 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 44
- 239000011521 glass Substances 0.000 abstract description 8
- 230000007797 corrosion Effects 0.000 abstract description 6
- 238000005260 corrosion Methods 0.000 abstract description 6
- 238000005336 cracking Methods 0.000 abstract description 6
- 230000002159 abnormal effect Effects 0.000 abstract description 4
- 238000005187 foaming Methods 0.000 abstract description 4
- 239000012788 optical film Substances 0.000 abstract description 2
- 230000000087 stabilizing effect Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000002845 discoloration Methods 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 2
- 229910009815 Ti3O5 Inorganic materials 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/10—Glass or silica
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- C23C14/542—Controlling the film thickness or evaporation rate
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Abstract
Description
技术领域technical field
本发明涉及光学薄膜技术领域，尤其涉及一种强耐候性NCVM薄膜及镀膜工艺。The invention relates to the technical field of optical thin films, in particular to a highly weather-resistant NCVM thin film and a coating process.
背景技术Background technique
众所周知，目前镀膜行业中，手机，玩具，仪器仪表，车载后盖等产品中都需要镀制光学薄膜。As we all know, in the current coating industry, optical films need to be coated on mobile phones, toys, instruments, vehicle back covers and other products.
强耐候性NCVM薄膜是一种高端盖板产品要求。主要用于手机后盖摄像头 、中小尺寸车载显示屏等。智能产品中的重要部件屏幕需要适应更多的不同环境。要求产品在溶液pH=4.7和pH=10放置48H，其外观无变化、无腐蚀、变色、 起泡、开裂、涂层脱落。Strong weather resistance NCVM film is a requirement for high-end cover products. It is mainly used for mobile phone back cover cameras, small and medium-sized car display screens, etc. Screens, an important component in smart products, need to adapt to more different environments. The product is required to be placed in the solution pH=4.7 and pH=10 for 48H, and its appearance has no change, no corrosion, discoloration, foaming, cracking, and coating peeling off.
为了提高性能，同时丰富其实用范围，需要在玻璃材质的表面镀上特殊涂层。市场中现有的小尺寸盖板涂层在使用的过程中对于环境的要求却比较高，酸性和碱性条件下都会使玻璃屏幕上的膜层脱落，极大的限制了该产品的使用范围。目前，为满足及超越客户的要求与期许，增加摄像头镜片的市场竞争力，急需制定一种强耐候性NCVM薄膜及镀膜工艺满足对客户摄像头镜片的作业需求。In order to improve performance and at the same time enrich its range of applications, special coatings are required on the surface of the glass material. The existing small-size cover coatings in the market have relatively high environmental requirements during use. Under acidic and alkaline conditions, the film on the glass screen will fall off, which greatly limits the scope of use of the product. . At present, in order to meet and exceed the requirements and expectations of customers and increase the market competitiveness of camera lenses, it is urgent to develop a strong weather-resistant NCVM film and coating process to meet the operational needs of customers' camera lenses.
查阅各种资料，对于强耐候性NCVM薄膜，一般情况需要特殊的镀膜材料，镀膜后道工序复杂，不足于满足正常量产的要求，并且具有一定的局限性。According to various materials, for strong weather resistance NCVM films, special coating materials are generally required, and the post-coating process is complicated, which is not enough to meet the requirements of normal mass production, and has certain limitations.
因此，提供一种结构简单，膜层材料常见，且生产工艺简单，能够同时满足量产条件和节约成本已经成为目前最大的技术问题。Therefore, it has become the biggest technical problem at present to provide a simple structure, common film layer material, and simple production process, which can meet the mass production conditions and save costs at the same time.
发明内容Contents of the invention
为了克服现有技术的上述缺点，本发明提出一种强耐候性NCVM薄膜及镀膜工艺，目的是提供一种结构简单，膜层材料常见，且生产工艺简单，能够同时满足量产条件和节约成本的技术问题，满足客户的高端需求，该工艺能够实现镀膜后玻璃表面在溶液pH=4.7和pH=10放置48H，产品外观无变化、无腐蚀、变色、 起泡、开裂、膜层脱落等异常现象。In order to overcome the above-mentioned shortcomings of the prior art, the present invention proposes a strong weather-resistant NCVM film and coating process, the purpose of which is to provide a simple structure, common film material, and simple production process, which can meet mass production conditions and save costs at the same time To meet the high-end needs of customers, this process can realize the glass surface after coating is placed in the solution pH=4.7 and pH=10 for 48H, the appearance of the product does not change, no corrosion, discoloration, blistering, cracking, film shedding and other abnormalities Phenomenon.
本发明所采取的技术方案是，提出一种强耐候性NCVM薄膜，包括基材，其中，在所述基材表面镀制膜层，所述膜层采用SiO2低折射率材料、Al2O3中折射率材料和Ti3O5高折射率材料层叠而成，所述膜层由内到外的结构是：Ti3O5/SiO2/Ti3O5/SiO2/Ti3O5/SiO2/Ti3O5/Al2O3/ SiO2层状结构。The technical solution adopted by the present invention is to propose a strong weather-resistant NCVM film, including a substrate, wherein a film layer is coated on the surface of the substrate, and the film layer is made of SiO 2 low refractive index materials, Al 2 O 3. Medium refractive index material and Ti 3 O 5 high refractive index material are laminated. The structure of the film layer from inside to outside is: Ti 3 O 5 /SiO 2 /Ti 3 O 5 /SiO 2 /Ti 3 O 5 /SiO 2 /Ti 3 O 5 /Al 2 O 3 /SiO 2 layered structure.
进一步地，所述每层SiO2低折射率材料厚度为80nm-100nm,每层Ti3O5高折射率材料为5nm-50nm，Al2O3中折射率材料厚度为10nm-50nm。Further, the thickness of each layer of SiO 2 low refractive index material is 80nm-100nm, the thickness of each layer of Ti 3 O 5 high refractive index material is 5nm-50nm, and the thickness of Al 2 O 3 medium refractive index material is 10nm-50nm.
进一步地，所述SiO2、Al2O3、Ti3O5膜层膜料纯度在99.999%。Further, the purity of the SiO 2 , Al 2 O 3 , and Ti 3 O 5 film materials is 99.999%.
本发明还提出一种强耐候性NCVM薄膜的镀制工艺，其包括以下步骤：The present invention also proposes a coating process of strong weather resistance NCVM film, which comprises the following steps:
步骤1：使用蒸发机270度EB加射频IB加晶控仪监控；Step 1: Use evaporator 270 degrees EB plus RF IB plus crystal controller to monitor;
步骤2：膜层设计采用SiO2低折射率材料、Al2O3中折射率材料和Ti3O5高折射率材料层叠而成，所述膜层由内到外的结构是：Ti3O5/SiO2/Ti3O5/SiO2/Ti3O5/SiO2/Ti3O5/Al2O3/SiO2层状结构，所述每层SiO2低折射率材料厚度为80nm-100nm,每层Ti3O5高折射率材料为5nm-50nm，Al2O3中折射率材料厚度为10nm-50nm；Step 2: The film layer is designed by laminating SiO 2 low refractive index material, Al 2 O 3 medium refractive index material and Ti 3 O 5 high refractive index material. The structure of the film layer from inside to outside is: Ti 3 O 5 /SiO 2 /Ti 3 O 5 /SiO 2 /Ti 3 O 5 /SiO 2 /Ti 3 O 5 /Al 2 O 3 /SiO 2 layered structure, the thickness of each layer of SiO 2 low refractive index material is 80nm -100nm, the thickness of each layer of Ti 3 O 5 high refractive index material is 5nm-50nm, and the thickness of Al 2 O 3 middle refractive index material is 10nm-50nm;
步骤3：以上膜料纯度在99.999%，蒸发源到基板距离在0.9m-1.2m之间；Step 3: The purity of the above film materials is 99.999%, and the distance from the evaporation source to the substrate is between 0.9m-1.2m;
步骤4：低折射率材料在工作时，离子源充入氧气和氩气比4：1/5：1，氩气流量在5-50sccm,氧气流量在10-50sccm,气压在1.0E-3,其中射频Beam电流在500-1600mA,电压在800-1400V,为了充分考虑到膜层堆积密度，镀膜速率控制在8-10A/S；高折射率材料离子源充入氧气和氩气比6：1/7：1，氩气流量在10-15sccm,氧气流量在50-99sccm,镀膜气压在2.5E-2，其中射频Beam电流在800-1200 mA,电压在500-1400 V,镀膜速率3-4A/S，高折射率镀膜APC控制在3.0E-2，实际冲入氧气为70-90sccm；Step 4: When the low refractive index material is working, the ion source is filled with oxygen and argon at a ratio of 4:1/5:1, the flow rate of argon is 5-50sccm, the flow rate of oxygen is 10-50sccm, and the air pressure is 1.0E-3. Among them, the RF Beam current is 500-1600mA, and the voltage is 800-1400V. In order to fully consider the film stacking density, the coating rate is controlled at 8-10A/S; the high refractive index material ion source is filled with oxygen and argon at a ratio of 6:1 /7:1, argon flow at 10-15sccm, oxygen flow at 50-99sccm, coating pressure at 2.5E-2, RF Beam current at 800-1200 mA, voltage at 500-1400 V, coating rate at 3-4A /S, APC of high refractive index coating is controlled at 3.0E-2, and the actual intrusion oxygen is 70-90sccm;
步骤5：Al2O3中折射率材料的参数中需要做底料，表面不允许存在发红发黑现象，在镀膜过程中低温NO IAD，APC设定在2.0E-2，镀膜气压在1.0E-3，速率3A/S。Step 5: The parameters of the refractive index material in Al 2 O 3 need to be used as a primer, and redness and blackening are not allowed on the surface. During the coating process, low temperature NO IAD, APC is set at 2.0E-2, and the coating pressure is 1.0 E-3, rate 3A/S.
与现有技术相比，本发明的有益效果：本发明中玻璃表面膜层厚度均匀，监控方便，膜层在油墨面，颜色淡蓝色，在终端严格的测试标准中能稳定合格，极限测试产品在pH4.7、PH10溶液中可稳定72H外观无变化、无腐蚀、变色、起泡、开裂、膜层脱落等异常现象，另外本发明采用的膜层材料常见，且生产工艺简单，能够同时满足量产条件和节约成本已经成为目前最大的技术问题，满足客户的高端需求。Compared with the prior art, the present invention has the beneficial effects: in the present invention, the thickness of the film layer on the glass surface is uniform, and the monitoring is convenient. The film layer is on the ink surface, and the color is light blue. The product can be stabilized in pH4.7, PH10 solution for 72H without any change in appearance, no corrosion, discoloration, foaming, cracking, film shedding and other abnormal phenomena. In addition, the film material used in the present invention is common, and the production process is simple, which can simultaneously Satisfying mass production conditions and saving costs has become the biggest technical issue at present to meet the high-end needs of customers.
附图说明Description of drawings
图1为本发明一种强耐候性NCVM薄膜的结构示意图。Fig. 1 is a structural schematic diagram of a strong weather resistance NCVM film of the present invention.
具体实施方式Detailed ways
参看图1，一种强耐候性NCVM薄膜，包括基材1，其中，在所述基材1表面镀制膜层，所述膜层采用SiO2低折射率材料3、Al2O3中折射率材料4和Ti3O5高折射率材料2层叠而成，所述膜层由内到外的结构是：Ti3O5/SiO2/Ti3O5/SiO2/Ti3O5/SiO2/Ti3O5/Al2O3/SiO2层状结构；所述基材1采用玻璃基材；Referring to Fig. 1, a kind of strong weather resistance NCVM thin film, comprises substrate 1, wherein, on described substrate 1 surface coating film layer, described film layer adopts SiO 2 low
进一步地，所述每层SiO2低折射率材料3厚度为80nm-100nm,每层Ti3O5高折射率材料2为5nm-50nm，Al2O3中折射率材料厚度4为10nm-50nm。Further, the thickness of each layer of SiO 2 low
进一步地，所述SiO2、Al2O3、Ti3O5膜层膜料纯度在99.999%。Further, the purity of the SiO 2 , Al 2 O 3 , and Ti 3 O 5 film materials is 99.999%.
本发明还提出一种强耐候性NCVM薄膜的镀制工艺，其包括以下步骤：The present invention also proposes a coating process for a strong weather-resistant NCVM film, which comprises the following steps:
步骤1：使用蒸发机270度EB加射频IB加晶控仪监控；Step 1: Use evaporator 270 degrees EB plus RF IB plus crystal controller to monitor;
步骤2：膜层设计采用SiO2低折射率材料3、Al2O3中折射率材料4和Ti3O5高折射率材料2层叠而成，所述膜层由内到外的结构是：Ti3O5/SiO2/Ti3O5/SiO2/Ti3O5/SiO2/Ti3O5/Al2O3/SiO2层状结构，所述每层SiO2低折射率材料3厚度为80nm-100nm,每层Ti3O5高折射率材料2为5nm-50nm，Al2O3中折射率材料4厚度为10nm-50nm；Step 2: The film layer is designed by laminating SiO 2 low
步骤3：以上膜料纯度在99.999%，蒸发源到基板距离在0.9m-1.2m之间；Step 3: The purity of the above film materials is 99.999%, and the distance from the evaporation source to the substrate is between 0.9m-1.2m;
步骤4：低折射率材料3在工作时，离子源充入氧气和氩气比4：1/5：1，氩气流量在5-50sccm,氧气流量在10-50sccm,气压在1.0E-3,其中射频Beam电流在500-1600mA,电压在800-1400V,为了充分考虑到膜层堆积密度，镀膜速率控制在8-10A/S；高折射率材料3离子源充入氧气和氩气比6：1/7：1，氩气流量在10-15sccm,氧气流量在50-99sccm,镀膜气压在2.5E-2，其中射频Beam电流在800-1200 mA,电压在500-1400 V,镀膜速率3-4A/S，高折射率镀膜APC控制在3.0E-2，实际冲入氧气为70-90sccm；Step 4: When the low
步骤5： Al2O3中折射率材料4的参数中需要做底料，表面不允许存在发红发黑现象，在镀膜过程中低温NO IAD，APC设定在2.0E-2，镀膜气压在1.0E-3，速率3A/S。Step 5: The parameters of the refractive index material 4 in Al 2 O 3 need to be used as a primer, and redness and blackening are not allowed on the surface. During the coating process, low temperature NO IAD, APC is set at 2.0E-2, and the coating pressure is at 1.0E-3, rate 3A/S.
与现有技术相比，本发明的有益效果：本发明中玻璃基材表面膜层厚度均匀，监控方便，膜层在油墨面，颜色淡蓝色，在终端严格的测试标准中能稳定合格，极限测试产品在pH4.7、PH10溶液中可稳定48H外观无变化、无腐蚀、变色、起泡、开裂、膜层脱落等异常现象，另外本发明采用的膜层材料常见，且生产工艺简单，能够同时满足量产条件和节约成本已经成为目前最大的技术问题，满足客户的高端需求。Compared with the prior art, the beneficial effect of the present invention is that the thickness of the film layer on the surface of the glass substrate in the present invention is uniform, and the monitoring is convenient. The film layer is on the ink surface, and the color is light blue. The limit test product can be stable in pH4.7, PH10 solution for 48H without any change in appearance, no corrosion, discoloration, foaming, cracking, film shedding and other abnormal phenomena. In addition, the film material used in the present invention is common, and the production process is simple. Being able to meet mass production conditions and save costs at the same time has become the biggest technical problem at present to meet the high-end needs of customers.
试验检测数据：本发明一种强耐候性NCVM薄膜经过一系列严格苛刻的性能测试结果如下：水煮100摄氏度，2小时1*1不出现脱膜，玻璃表面在溶液pH=4.7和pH=10放置48H，产品外观无变化、无腐蚀、变色、起泡、开裂 、膜层脱落等异常现象。Experimental detection data: A series of strict and harsh performance test results of a strong weather-resistant NCVM film of the present invention are as follows: boiled at 100 degrees Celsius, 2 hours 1*1 does not appear to be defilmed, and the glass surface is in the solution pH=4.7 and pH=10 Placed for 48 hours, there is no change in the appearance of the product, no corrosion, discoloration, blistering, cracking, film shedding and other abnormal phenomena.
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