CN116473507B - Eye tracking structure - Google Patents

Abstract

The present disclosure relates to an eye-tracking structure, which belongs to the field of eye-tracking technology. The eye-tracking structure includes: a sensing backplane, including a sensing area; an infrared emitter and an infrared receiver, which are arranged on the same side of the sensing backplane, and The infrared receiver is arranged corresponding to the sensing area; the infrared emitter is used to send out infrared detection signals to the eye to be tracked; the infrared receiver is used to receive the infrared echo signal formed by the infrared detection signal reflected by the eye to be tracked, and transmit it to the corresponding The sensing area senses infrared echo signals and generates electrical signals to achieve eye tracking. In this way, by arranging the infrared emitter and the infrared receiver on the same induction backplane, the overall volume is reduced, which is conducive to the integration and lightweight of the entire device.

Description

Eye tracking structure

Technical field

The present disclosure relates to the field of eye tracking technology, and in particular to an eye tracking structure.

Background technique

Currently, in existing AR or VR equipment, eye tracking devices are generally discrete devices, that is, there is an infrared transmitting device at a certain position and an infrared receiving device at another position, which is equivalent to requiring two Using a device to track the eye movement process of a single eye, and further forming a modular packaged product, will lead to a larger overall volume, which is not conducive to the integration and lightweight of the overall device.

Contents of the invention

In order to solve the above technical problems or at least partially solve the above technical problems, the present disclosure provides an eye tracking structure.

The present disclosure provides an eye tracking structure, including:

Sensing backplane, including sensing area;

The infrared emitter and the infrared receiver are arranged on the same side of the induction backplane, and the infrared receiver is arranged corresponding to the induction area;

Wherein, the infrared emitter is used to send an infrared detection signal to the eye to be tracked; the infrared receiver is used to receive the infrared echo signal formed by the eye to be tracked reflecting the infrared detection signal, and transmit it to the corresponding The sensing area; the sensing area senses the infrared echo signal and generates an electrical signal to achieve eye movement tracking.

Optionally, the infrared emitter includes: an infrared emission component, a channel transmission component and a collimating microlens;

The infrared emission component is located on one side of the induction backplane; the channel transmission component is located on the side of the infrared emission component away from the induction backplane; the collimating microlens is located on the light output side of the channel transmission component noodle;

The infrared emission component is used to send an infrared detection signal to the channel transmission component; the collimating microlens is used to collimate the infrared detection signal transmitted by the channel transmission component.

Optionally, the infrared emitting component includes: a resonant cavity, a multi-quantum well layer, a first type reflective layer and a reflective filling layer; the resonant cavity includes an opposite first surface and a second surface, and connects the first The connecting surface between the surface and the second surface, the first surface corresponding to the light exit surface of the resonant cavity;

The multiple quantum well layer is disposed in the resonant cavity; the first type reflective layer covers the second surface and the connecting surface of the resonant cavity, and covers part of the first surface of the resonant cavity; the A reflective filling layer is provided on the first surface of the resonant cavity that is not covered by the first type reflective layer;

The multi-quantum well layer is used to emit infrared detection signals based on voltage control of the induction backplane; the resonant cavity is used to enhance the infrared detection signals emitted by the multi-quantum well layer based on internal oscillation; the first type reflection The reflective filling layer is used to reflect the infrared detection signal in the resonant cavity; the reflective filling layer is used to make the infrared detection signal reflected in the resonant cavity emit from the reflective filling layer to the channel transmission component.

Optionally, the channel transmission component includes: a first metal polarizing grating and a first transparent transmission channel;

The first metal polarizing grating is disposed on the surface of the side of the reflective filling layer facing away from the resonant cavity, and is embedded in the first transparent transmission channel;

The first metal polarizing grating is used to polarize the infrared detection signal emitted from the reflective filling layer; the first transparent transmission channel is used to transmit the infrared detection signal polarized by the first metal polarizing grating;

Wherein, along the direction perpendicular to the side of the light exit surface of the resonant cavity, the length of the first metal polarizing grating is greater than or equal to the length of the reflective filling layer.

Optionally, the infrared receiver includes: a filter component, a second transparent transmission channel and a converging microlens;

The second transparent transmission channel is disposed on one side of the sensing backplane; the filter component is disposed on the side of the second transparent transmission channel away from the sensing backplane; and the converging microlens is disposed on the sensing backplane. The light-receiving surface of the filter component;

The converging microlens is used to converge the infrared echo signal to the induction backplane; the filter component is at least used to perform wavelength selection and polarization for the infrared echo signal collected by the converging microlens; the third The two transparent transmission channels are used to transmit the infrared detection signal after filtering the light component to the sensing backplane.

Optionally, the filter component includes: a third transparent transmission channel, a light deflection layer, a filter layer and a second metal polarizing grating;

The second metal polarizing grating is disposed on the surface of the side of the second transparent transmission channel away from the sensing backplane; the filter layer and the light deflection layer are sequentially disposed on the second metal polarizing grating at intervals. The side facing away from the second transparent transmission channel; the light deflection layer, the filter layer and the second metal polarizing grating are all embedded in the third transparent transmission channel;

The light deflection layer is used to deflect the infrared echo signals gathered by the converging microlenses at a preset angle; the filter layer is at least used to pass the infrared echo signals; the second metal polarizing grating is used for To polarize the infrared echo signal passing through the filter layer.

Optionally, the sensing area and the second transparent transmission channel are positioned in alignment;

The sensing area is used to receive and process the infrared echo signals collected by the converging microlens to the sensing backplane.

Optionally, the total length of the third transparent transmission channel and the second transparent transmission channel is equal to the focal length of the converging microlens.

Optionally, the eye tracking structure further includes: a black matrix and a second type reflective layer; the second type reflective layer includes a first reflective surface and a second reflective surface arranged oppositely;

The black matrix is spaced between the first transparent transmission channel and the third transparent transmission channel; the second type reflective layer is provided between the first type reflective layer and the second transparent transmission channel , and cover the second transparent transmission channel and part of the sensing area;

The black matrix is used to absorb interference signals; the first reflective surface faces the second transparent transmission channel and is used to reflect infrared echo signals passing through the first reflective surface; the second reflective surface faces the first Type reflective layer, used to reflect the infrared detection signal passing through the second reflective surface.

Optionally, the sensing backplane further includes a pixel area arranged in an array;

There are corresponding infrared emitters and infrared receivers in each pixel area; the metal polarization gratings corresponding to the infrared emitters and infrared receivers in each pixel area are arranged in the same direction; the metal polarization gratings corresponding to adjacent pixel areas The arrangement directions of the gratings are perpendicular to each other to isolate the crosstalk between infrared detection signals and infrared echo signals in adjacent pixel areas.

Compared with the existing technology, the technical solution provided by the embodiments of the present disclosure has the following advantages:

The eye tracking structure provided by the embodiment of the present disclosure includes: a sensing backplane, including a sensing area; an infrared emitter and an infrared receiver, which are arranged on the same side of the sensing backplane, and the infrared receiver is arranged corresponding to the sensing area; wherein, The infrared emitter is used to send out infrared detection signals to the eye to be tracked; the infrared receiver is used to receive the infrared echo signal formed by the infrared detection signal reflected by the eye to be tracked, and transmit it to the corresponding sensing area; the sensing area senses the infrared echo signal And generate electrical signals to achieve eye tracking. In this way, by arranging the infrared emitter and the infrared receiver on the same induction backplane, the overall volume is reduced, which is conducive to the integration and lightweight of the entire device.

Description of drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description, serve to explain the principles of the disclosure.

In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those of ordinary skill in the art, It is said that other drawings can be obtained based on these drawings without exerting creative labor.

Figure 1 is a schematic structural diagram of an eye tracking structure provided by an embodiment of the present disclosure;

Figure 2 is a schematic structural diagram of another eye tracking structure provided by an embodiment of the present disclosure;

Figure 3 is a schematic structural diagram of another eye tracking structure provided by an embodiment of the present disclosure;

FIG. 4 is a schematic structural diagram of another eye tracking structure provided by an embodiment of the present disclosure.

Among them, 110. Induction backplane; 111. Sensing area; 120. Infrared emitter; 130. Infrared receiver; 121. Infrared emission component; 122. Channel transmission component; 123. Collimating microlens; 1211. Resonant cavity; 1212 , multiple quantum well layer; 1213, first type reflective layer; 1214, reflective filling layer; 1221, first metal polarizing grating; 1222, first transparent transmission channel; 131, filter component; 132, second transparent transmission channel; 133. Converging microlens; 1311. Third transparent transmission channel; 1312. Light deflection layer; 1313. Filter layer; 1314. Second metal polarizing grating; 140. Black matrix; 150. Second type reflective layer.

Detailed ways

In order to understand the above objects, features and advantages of the present disclosure more clearly, the solutions of the present disclosure will be further described below. It should be noted that, as long as there is no conflict, the embodiments of the present disclosure and the features in the embodiments can be combined with each other.

Many specific details are set forth in the following description to fully understand the present disclosure, but the present disclosure can also be implemented in other ways different from those described here; obviously, the embodiments in the description are only part of the embodiments of the present disclosure, and Not all examples.

The following is an exemplary description of the eye tracking structure provided by embodiments of the present disclosure with reference to the accompanying drawings.

Exemplarily, in some embodiments, FIG. 1 is a schematic structural diagram of an eye tracking structure provided by an embodiment of the present disclosure. Referring to Figure 1, the eye tracking structure includes: a sensing backplane 110, including a sensing area 111; an infrared emitter 120 and an infrared receiver 130, which are disposed on the same side of the sensing backplane 110, and the infrared receiver 130 corresponds to the sensing area 111 is set up; wherein, the infrared emitter 120 is used to send an infrared detection signal to the eye to be tracked; the infrared receiver 130 is used to receive the infrared echo signal formed by the eye to be tracked reflecting the infrared detection signal, and transmit it to the corresponding sensing area 111 ; The sensing area 111 senses infrared echo signals to generate electrical signals to achieve eye tracking.

For example, taking the orientation and structure shown in FIG. 1 as an example, in the preset area of the sensing backplane 110, the infrared emitter 120 and the infrared receiver 130 can both be disposed above the sensing backplane 110. The reflection range formed after the eye receives the infrared detection signal is usually concentrated near the infrared emitter 120, so the infrared receiver 130 can be set on the opposite sides of the infrared emitter 120, so that the infrared echo formed by the eye to be tracked reflects the infrared detection signal. The wave signal is received by the infrared receivers 130 on both sides of the infrared emitter 120. In other embodiments, the number and position of the infrared emitter 120 and the infrared receiver 130 can also be set according to the application requirements of eye tracking, which will not be done here. Specific limitations.

Among them, the induction backplane 110 is a backplane used to provide induction sensors and related internal circuits. Infrared echo signals are sensed and processed through the internal induction area 111 to achieve eye tracking. For example, the induction backplane 110 can be Complementary Metal-Oxide-Semiconductor (CMOS) backplane or other types of backplanes used to capture electrons are not limited here. For example, the sensing area 111 in the sensing backplane 110 can be aligned with the infrared receiver 130 above it. In this way, the infrared echo signal is received by the infrared receiver 130 and further transmitted to the bottom of the infrared receiver 130 The corresponding sensing area 111 facilitates the eye-tracking structure to process infrared echo signals in a timely manner, improving the speed of sensing and processing. The specific location and working process of the sensing area 111 will be exemplified below.

It is easy to understand that the infrared detection signal emitted by the infrared emitter 120 is infrared light. Correspondingly, the infrared echo signal received by the infrared receiver 130 is the infrared light reflected by the eye to be tracked. From this, it can be seen that the sensing area 111 is sensitive to infrared light. The infrared light transmitted by the receiver 130 is sensed, and the corresponding electrical signal is generated and processed, and finally the eye movement of the eye to be tracked is obtained, thereby realizing eye movement tracking.

The eye tracking structure provided by the embodiment of the present disclosure includes: a sensing backplane 110, including a sensing area 111; an infrared emitter 120 and an infrared receiver 130, which are arranged on the same side of the sensing backplane 110, and the infrared receiver 130 corresponds to A sensing area 111 is provided; among them, the infrared emitter 120 is used to send an infrared detection signal to the eye to be tracked; the infrared receiver 130 is used to receive the infrared echo signal formed by the eye to be tracked reflecting the infrared detection signal, and transmit it to the corresponding sensor. Area 111; the sensing area 111 senses infrared echo signals and generates electrical signals to achieve eye movement tracking. In this way, by arranging the infrared emitter and the infrared receiver on the same sensing backplane 110, the overall volume is reduced, which is beneficial to the integration and lightweight of the entire device.

In some embodiments, FIG. 2 is a schematic structural diagram of another eye tracking structure provided by an embodiment of the present disclosure. Based on Figure 1, referring to Figure 2, the infrared emitter 120 includes: an infrared emission component 121, a channel transmission component 122 and a collimating micro lens 123; the infrared emission component 121 is located on one side of the sensing backplane 110; the channel transmission component 122 Located on the side of the infrared emitting component 121 away from the sensing backplane 110; the collimating microlens 123 is located on the light exit surface of the channel transmission component 122; the infrared emitting component 121 is used to emit infrared detection signals to the channel transmission component 122; the collimating microlens 123 is used for The infrared detection signal transmitted by the collimated channel transmission component 122.

Illustratively, taking the orientation and structure shown in FIG. 2 as an example, the infrared emitting component 121 is disposed above the sensing backplane 110. Along the light emission direction of the infrared detection signal emitted by the infrared emitting component 121, the channel transmission component 122 and the collimating micrometer are The lenses 123 are arranged above the infrared emitting component 121 in sequence. For example, wafer-to-wafer hybrid bonding (W2W hybridbonding) can be used to combine the sensing backplane and the infrared emitting component to ensure good interconnection density.

It should be noted that the eye tracking structure and the optical waveguide provided by the embodiment of the present disclosure are matched and connected to use the optical waveguide to guide the infrared detection signal to the eye to be tracked. Specifically, after the infrared detection signal emitted by the infrared emission component 121 is transmitted through the channel transmission component 122, it is collimated by the collimating microlens 123 located on the light exit surface of the channel transmission component 122, so that the infrared detection signal, that is, the infrared light can be formed. The parallel infrared light is emitted from the collimating microlens 123, and then the optical waveguide receives the parallel infrared light and guides it to the eye to be tracked to form a subsequent infrared echo signal.

In some embodiments, continuing to refer to FIG. 2 , the infrared emitting component 121 includes: a resonant cavity 1211 , a multi-quantum well layer 1212 , a first type reflective layer 1213 and a reflective filling layer 1214 ; the resonant cavity 1211 includes an opposite first surface and a third Two surfaces, as well as a connecting surface connecting the first surface and the second surface, the first surface corresponds to the light exit surface of the resonant cavity 1211; the multi-quantum well layer 1212 is provided in the resonant cavity 1211; the first type reflective layer 1213 covers the resonant cavity The second surface and connecting surface of 1211, and part of the first surface covering the resonant cavity 1211; the reflective filling layer 1214 is provided on the first surface of the resonant cavity 1211 that is not covered by the first type reflective layer 1213; the multi-quantum well layer 1212 used to emit infrared detection signals based on voltage control of the sensing backplane 110; the resonant cavity 1211 is used to enhance the infrared detection signals emitted by the multi-quantum well layer 1212 based on internal oscillation; the first type reflective layer 1213 is used to reflect infrared in the resonant cavity 1211 Detection signal; the reflective filling layer 1214 is used to make the infrared detection signal reflected in the resonant cavity 1211 emit from the reflective filling layer 1214 to the channel transmission component 122.

Illustratively, taking the orientation and structure shown in FIG. 2 as an example, the multi-quantum well layer 1212 is located below the inside of the resonant cavity 1211. The surface above the resonant cavity 1211 is the first surface, and the surface below is the second surface. Correspondingly, , the corresponding surfaces on the left and right sides of the resonant cavity 1211 are the connecting surfaces. For this purpose, the first type reflective layer 1213 covers the surface below the resonant cavity 1211 and the surfaces on the left and right sides, and at the same time covers the surface above the resonant cavity 1211 On part of the surface, the specific position of the multi-quantum well layer 1212 and the area of the first type reflective layer 1213 covering the first surface can be set according to the emission requirements of the infrared emission component 121, which are not limited here.

Specifically, under the voltage control of the induction backplane 110, the electrons and holes in the multi-quantum well layer 1212 will emit infrared light based on recombination to form stimulated radiation. Since the first type reflective layer 1213 is provided around the resonant cavity 1211, The infrared light emitted by the multi-quantum well layer 1212 is continuously reflected in the resonant cavity 1211, so that a continuous oscillation of stimulated radiation can be formed in the resonant cavity 1211 to enhance the infrared light emitted by the multi-quantum well layer 1212. After that, the enhanced The infrared light is emitted from the reflective filling layer 1214 to the channel transmission component 122, so that the channel transmission component 122 and the collimating microlens 123 can subsequently act on it. For example, the preparation material of the multi-quantum well layer 1212 may include quantum dots or other materials, which is not limited here.

Combined with the working process of the infrared emission component 121 mentioned above, the first type reflective layer 1213 covering the connecting surface of the resonant cavity 1211 is used to reflect the infrared light from the side of the resonant cavity 1211, and covers the second surface of the resonant cavity 1211. The first type reflective layer 1213 is used to reflect infrared light below the resonant cavity 1211 to improve the utilization of infrared light. It can also provide an insulation effect for the infrared emitting component 121 to prevent the infrared emitting component 121 from contacting the infrared receiver 130 to generate light. crosstalk.

In addition, the first type reflective layer 1213 and the reflective filling layer 1214 above the resonant cavity 1211 are jointly used to constrain the emission angle and direction of the infrared light oscillating inside the resonant cavity 1211. Specifically, for example, the first type reflective layer above the resonant cavity 1211 is used. 1213 enables the infrared light to be fully reflected, so that the infrared light in the resonant cavity 1211 can be continuously reflected and oscillated to enhance, and finally the infrared light is emitted to the channel transmission component 122 by the reflective filling layer 1214 that can pass the infrared light.

For example, the first type reflective layer 1213 covering the second surface and the connecting surface of the resonant cavity 1211 may be a distributed Bragg reflection (DBR); covering part of the first surface of the resonant cavity 1211 The first type reflective layer 1213 may be composed of a material capable of forming total reflection; the reflective filling layer 1214 may be made of silicon monoxide (SiOx) material or other insulating materials, which are not limited here.

In some embodiments, continuing to refer to FIG. 2 , the channel transmission component 122 includes: a first metal polarization grating 1221 and a first transparent transmission channel 1222 ; the first metal polarization grating 1221 is disposed on the side of the reflective filling layer 1214 away from the resonant cavity 1211 surface and embedded in the first transparent transmission channel 1222; the first metal polarizing grating 1221 is used to polarize the infrared detection signal emitted from the reflective filling layer; the first transparent transmission channel is used to transmit the polarized signal after being polarized by the first metal polarizing grating. infrared detection signal; wherein, along the direction perpendicular to the side of the light exit surface of the resonant cavity, the length of the first metal polarizing grating is greater than or equal to the length of the reflective filling layer 1214.

Illustratively, taking the orientation and structure shown in FIG. 2 as an example, the first transparent transmission channel 1222 is disposed on the plane above the reflective filling layer 1214, and the first metal polarizing grating 1221 is embedded in the first transparent transmission channel 1222. and is located on the surface above the reflective filling layer 1214 . Specifically, the infrared light emitted from the reflective filling layer 1214 is first polarized by the first metal polarizing grating 1221 to form infrared light with a polarization state (corresponding to linearly polarized light), and is then transmitted to the collimating microlens through the first transparent transmission channel 1222 123.

It is easy to understand that the first metal polarizing grating 1221 shown in FIG. 2 is actually a metal grating bar arranged at intervals. The length of the first metal polarizing grating 1221 includes the metal grating bars shown in FIG. 2 and their spacing. The length, along the direction perpendicular to the side of the light exit surface of the resonant cavity 1211, that is, the horizontal direction, the length of the first metal polarizing grating 1221 is greater than or equal to the length of the reflective filling layer 1214 to ensure that all the infrared light emitted by the reflective filling layer 1214 can be The first metal polarizing grating 1221 is polarized, that is, all linearly polarized light is formed, achieving a better polarization effect.

In some embodiments, FIG. 3 is a schematic structural diagram of yet another eye tracking structure provided by an embodiment of the present disclosure. Based on Figure 2, referring to Figure 3, the infrared receiver 130 includes: a filter component 131, a second transparent transmission channel 132 and a converging microlens 133; the second transparent transmission channel 132 is provided on one side of the sensing backplane 110; The filter component 131 is disposed on the side of the second transparent transmission channel 132 away from the sensing backplane 110; the converging microlens 133 is disposed on the light-receiving surface of the filter component 131; the converging microlens 133 is used to collect infrared echo signals to the sensing backplane. 110; The filter component 131 is at least used for wavelength selection and polarization of the infrared echo signals gathered by the converging microlens 133; the second transparent transmission channel 132 is used to transmit the infrared detection signal after passing through the filter component 131 to the sensing backplane 110 .

Illustratively, with reference to FIG. 2 , taking the orientation and structure shown in FIG. 3 as an example, FIG. 3 shows infrared receivers 130 located on the left and right sides of the infrared emitter 120 in a preset area. Specifically, for each infrared receiver 130, the second transparent transmission channel 132 is located on the surface above the sensing backplane 110, the filter component 131 and the converging microlens 133 are located above the second transparent transmission channel 132, and the filter component 131 is located between the second transparent transmission channel 132 and the converging microlens 133; in this way, the converging microlens 133 is disposed on the light-receiving surface of the filter component 131 to facilitate concentrating the infrared light reflected by the eye to be tracked.

Specifically, after the eye to be tracked reflects the infrared light, that is, the infrared echo signal, first, the condensing microlens 133 can collect light from all directions, including the infrared light reflected by the eye to be tracked and other interference light, to improve the intensity of the infrared light through the convergence effect. Utilization, after that, the filter component 131 is used to select the wavelength of the light in various directions collected by the condensing microlens 133, and polarize the infrared light reflected by the eye to be tracked, and then transmit it to the sensing backplane 110 through the second transparent transmission channel 132 Sensing area 111 in . It should be noted that the converging microlens 133 can converge the infrared light reflected by the eye to be tracked into a light spot to the sensing area 111. The specific working principle of the converging microlens 133 will be exemplarily described below.

In some embodiments, continuing to refer to FIG. 3 , the filter component 131 includes: a third transparent transmission channel 1311 , a light deflection layer 1312 , a filter layer 1313 and a second metal polarization grating 1314 ; the second metal polarization grating 1314 is disposed on the third The surface of the side of the two transparent transmission channels 132 facing away from the sensing backplane 110; the filter layer 1313 and the light deflection layer 1312 are arranged in sequence on the side of the second metal polarizing grating 1314 facing away from the second transparent transmission channel 132; the light deflection layer 1312, The filter layer 1313 and the second metal polarizing grating 1314 are both embedded in the third transparent transmission channel 1311; the light deflection layer 1312 is used to deflect the infrared echo signals collected by the converging microlens 133 at a preset angle; the filter layer 1313 At least for passing infrared echo signals; the second metal polarizing grating 1314 is used for polarizing the infrared echo signals that pass through the filter layer 1313 .

Illustratively, taking the orientation and structure shown in Figure 3 as an example, the third transparent transmission channel 1311 is located between the second transparent transmission channel 132 and the converging microlens 133, and the second metal polarizing grating in the third transparent transmission channel 1311 1314 is located on the surface above the second transparent transmission channel 132. The filter layer 1313 and the light deflection layer 1312 in the third transparent transmission channel 1311 are arranged in sequence above the second metal polarizing grating 1314.

Specifically, first, the light deflection layer 1312 deflects light in various directions condensed by the condensing microlens 133 at a preset angle, and for light of different wavelengths, the deflection angles are different. For example, for visible light in other interference light, light The deflection layer 1312 can deflect the visible light at a larger angle, so that the visible light cannot continue to be transmitted to the lower filter layer 1313 in the direction of convergence; for infrared light, the light deflection layer 1312 can prevent the infrared light from deflecting or deflect the infrared light. The angle is small so that the infrared light can continue to be transmitted to the filter layer 1313 below in the direction of convergence; then, the filter layer 1313 selects the wavelength of the transmitted light, only passes the infrared light and blocks possible remaining interference light Then, the infrared light passing through the filter layer 1313 is polarized by the second metal polarizing grating 1314, and the polarized infrared light is transmitted to the sensing area 111 through the second transparent transmission channel 132.

For example, the light deflection layer 1312 can be a metasurface material. In other embodiments, it can also be other types of materials known to those skilled in the art, which are not limited here.

In some embodiments, continuing to refer to FIG. 3 , the sensing area 111 and the second transparent transmission channel 132 are arranged in alignment; the sensing area 111 is used to receive and process the infrared echo signals collected by the converging microlens 133 to the sensing backplane 110 .

Wherein, along the horizontal direction, the length of the sensing area 111 is equal to the length of the second transparent transmission channel 132 . Illustratively, taking the orientation and structure shown in FIG. 3 as an example, the sensing area 111 is located directly below the second transparent transmission channel 132 to achieve one-to-one alignment of the sensing area 111 and the second transparent transmission channel 132 .

It is not difficult to understand that the reflectivity of the eyeball and non-eyeball areas are different. For example, the reflectivity of the white of the eye is greater than the reflectivity of the pupil. For this reason, when the infrared light reflected by the glasses to be tracked is passed by the sensing area 111 in the sensing backplane 110 After receiving, the sensing area 111 will perform calculation processing based on the electrical signals formed by the infrared light reflected by the eyeball and the non-eyeball area to obtain the actual eye movement.

In some embodiments, continuing to refer to FIG. 3 , the total length of the third transparent transmission channel 1311 and the second transparent transmission channel 132 is equal to the focal length of the converging microlens 133 .

Among them, for the scenario where the infrared receiver 130 receives infrared light, in order to enable the infrared light collected by the converging microlens 133 to be concentrated into a light spot on the sensing area 111, the total length of the third transparent transmission channel 1311 and the second transparent transmission channel 132 is It needs to be equal to the focal length of the converging microlens 133, so that the focus of the converging microlens 133 is located in the sensing area 111. In this way, by setting the total length of the third transparent transmission channel 1311 and the second transparent transmission channel 132, the glasses to be tracked can be reflected The infrared light is concentrated in the sensing area 111, so that the concentrated light spot has higher energy, which not only improves the utilization rate of infrared light, but also improves the sensitivity of the sensing area 111 to infrared light, which is conducive to the realization of infrared echo signals. accurate detection. Correspondingly, for the scenario where the infrared emitter 120 emits infrared light, the corresponding focus of the collimating microlens 123 is located on the reflective filling layer 1214, so that the infrared light emitted by the reflective filling layer 1214 can finally be collimated by the collimating microlens 123 It is parallel infrared light.

It should be noted that, combined with the above working principles of the collimating microlens 123 and the condensing microlens 133, the corresponding diameters and heights of the collimating microlens 123 and the condensing microlens 133 are different. For example, by changing the collimating microlens 123 and the condensing microlens 133. The height of the converging microlens 133 can further change the position of the focus corresponding to the collimating microlens 123 and the converging microlens 133; for example, the diameter and height of the collimating microlens 123 can be greater than the diameter and height of the converging microlens 133. In order to maximize the light collection rate, we will not go into details here.

In some embodiments, continuing to refer to FIG. 3 , the eye tracking structure further includes: a black matrix 140 and a second type reflective layer 150 ; the second type reflective layer 150 includes a first reflective surface and a second reflective surface arranged oppositely. ; The black matrix 140 is spaced between the first transparent transmission channel 1222 and the third transparent transmission channel 1311; the second type reflective layer 150 is disposed between the first type reflective layer 1213 and the second transparent transmission channel 132, and is for the second The transparent transmission channel 132 and part of the sensing area 111 are covered; the black matrix 140 is used to absorb interference signals; the first reflective surface faces the second transparent transmission channel 132 and is used to reflect the infrared echo signal passing through the first reflective surface; the second The reflective surface faces the first type reflective layer 1213 and is used to reflect the infrared detection signal passing through the second reflective surface.

Taking the orientation and structure shown in FIG. 3 as an example, along the vertical direction, the length of the second type reflective layer 150 is equal to or greater than the total length of the second transparent transmission channel 132 and the sensing area 111 to improve the utilization rate of infrared light. . For example, the second type reflective layer 150 may be made of materials such as tungsten or aluminum with high reflectivity, and the second type reflective layer 150 is not conductive to isolate the infrared emitter 120 and the infrared receiver 130 . electrical crosstalk between.

For example, the first reflective surface of the second type reflective layer 150 is in contact with the second transparent transmission channel 132, and the second reflective surface of the second type reflective layer 150 is in contact with the first type reflective layer 1213. Specifically, for the infrared receiver 130 to receive infrared light, when the infrared light is transmitted to the second transparent transmission channel 132, the first reflective surface of the second type reflective layer 150 can be used to reflect the infrared light with poor convergence effect, thereby improving The utilization rate of the infrared echo signal is improved; accordingly, for the infrared emitter 120 to emit infrared light, when the infrared light is transmitted in the resonant cavity 1211, the second reflective surface can be used to infrared escaping from the first type reflective layer 1213. The light is reflected again, improving the utilization rate of the infrared detection signal.

Among them, the black matrix 140 is a structure used to absorb interference light. For example, for the infrared receiver 130 to receive infrared light, the light deflection layer 1312 deflects interference light such as short-wavelength visible light at a larger angle, so that the visible light will be absorbed by the black matrix 140 on both sides of the light deflection layer 1312, making the visible light unable to Continue to transmit to the lower filter layer 1313 along the direction of convergence; in addition, in order to ensure effective elimination of interference light, the black matrix 140 is disposed between the first transparent transmission channel 1222 and the third transparent transmission channel 1311, and at the same time, along the vertical direction , the length of the black matrix 140 may be equal to the length of the third transparent transmission channel 1311.

In some embodiments, FIG. 4 is a schematic structural diagram of yet another eye tracking structure provided by an embodiment of the present disclosure. On the basis of Figure 3, referring to Figure 4, the sensing backplane also includes a pixel area arranged in an array; each pixel area is provided with a corresponding infrared emitter 120 and an infrared receiver 130; the infrared in each pixel area The metal polarizing gratings corresponding to the emitter 120 and the infrared receiver 130 are arranged in the same direction; the metal polarizing gratings corresponding to adjacent pixel areas are arranged in perpendicular directions to isolate infrared detection signals and infrared echo signals in adjacent pixel areas. of crosstalk.

Among them, the preset area corresponds to each pixel area. Specifically, referring to FIG. 4 , the first metal polarizing grating 1221 corresponding to the infrared emitter 120 and the second metal polarizing grating 1314 corresponding to the infrared receiver 130 in each pixel area are arranged in the same direction. On this basis, it is set The arrangement directions of the metal polarizing gratings corresponding to adjacent pixel areas are perpendicular to each other, ensuring that infrared light in a certain pixel area cannot pass through the metal polarizing grating corresponding to the adjacent pixel area, preventing infrared detection signals from adjacent pixel areas and infrared The echo signals generate crosstalk, further improving the utilization of infrared light.

In addition, internal wiring 160 is also shown in Figure 4. The sensing backplane 110 is interconnected with the infrared emitting component 121 through the internal wiring 160, and voltage is provided to the infrared emitting component 121 through the internal wiring 160 to excite the multi-quantum well layer. 1212 emits infrared light.

For example, the first transparent transmission channel 1222 and the third transparent transmission channel 1311 can be made of transparent organic materials, such as photoresist, which reduces the preparation cost; the second transparent transmission channel 132 can be made of silicon oxide material. , which is simple to prepare and improves convenience in the preparation process.

Therefore, by arranging corresponding infrared emitters 120 and infrared receivers 130 in each smaller pixel area, the embodiments of the present disclosure solve the problem in the related art that the overall volume is too large due to the separate arrangement of the infrared emitting device and the infrared receiving device. , achieving a higher-precision eye tracking structure integrating transmitting and receiving. In addition, on the basis that the arrangement directions of the metal polarizing gratings corresponding to adjacent pixel areas are perpendicular to each other, the light deflection layer 1312 and the filter layer 1313 are combined to ensure that the light source obtained by each pixel area in the eye tracking structure is the corresponding The infrared light emitted by the infrared emission component 121 reduces signal noise.

It should be noted that in this article, relational terms such as “first” and “second” are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply these There is no such actual relationship or sequence between entities or operations. Furthermore, the terms "comprises," "comprises," or any other variations thereof are intended to cover a non-exclusive inclusion such that a process, method, article, or apparatus that includes a list of elements includes not only those elements, but also those not expressly listed other elements, or elements inherent to the process, method, article or equipment. Without further limitation, an element defined by the statement "comprises a..." does not exclude the presence of additional identical elements in a process, method, article, or apparatus that includes the stated element.

The above descriptions are only specific embodiments of the present disclosure, enabling those skilled in the art to understand or implement the present disclosure. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be practiced in other embodiments without departing from the spirit or scope of the disclosure. Therefore, the present disclosure is not to be limited to the embodiments described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (9)

1. An eye tracking structure comprising: an inductive backplate including an inductive region;

the infrared emitter and the infrared receiver are arranged on the same side of the induction backboard, and the infrared receiver is arranged corresponding to the induction area;

the infrared emitter is used for emitting infrared detection signals to eyes to be tracked; the infrared receiver is used for receiving an infrared echo signal formed by the infrared detection signal reflected by the eye to be tracked and transmitting the infrared echo signal to the corresponding sensing area; the induction area induces the infrared echo signals to generate electric signals so as to realize eye movement tracking;

the infrared emitter includes infrared emission subassembly, passageway transmission subassembly, infrared emission subassembly includes: the device comprises a resonant cavity, a multiple quantum well layer, a first type reflecting layer and a reflecting filling layer; the resonant cavity comprises a first surface and a second surface which are opposite to each other, and a joint surface for joining the first surface and the second surface, wherein the first surface corresponds to the light-emitting surface of the resonant cavity;

the multiple quantum well layer is arranged in the resonant cavity; the first type reflecting layer covers the second surface and the joint surface of the resonant cavity and covers part of the first surface of the resonant cavity; the reflection filling layer is arranged on a first surface of the resonant cavity which is not covered by the first type reflection layer;

the multi-quantum well layer is used for emitting infrared detection signals based on voltage control of the induction backboard; the resonant cavity is used for enhancing infrared detection signals emitted by the multiple quantum well layers based on internal oscillation; the first type reflecting layer is used for reflecting infrared detection signals in the resonant cavity; the reflection filling layer is used for enabling infrared detection signals reflected in the resonant cavity to be emitted to the channel transmission assembly through the reflection filling layer;

the channel transmission assembly comprises a first metal polarization grating; the length of the first metal polarization grating is greater than or equal to the length of the reflection filling layer along the direction perpendicular to one side of the light emitting surface of the resonant cavity.

2. The eye-tracking structure according to claim 1, wherein the infrared emitter comprises collimating microlenses;

the infrared emission component is positioned on one side of the induction backboard; the channel transmission assembly is positioned at one side of the infrared emission assembly, which is away from the induction backboard; the collimating micro lens is positioned on the light-emitting surface of the channel transmission assembly;

the infrared emission component is used for emitting an infrared detection signal to the channel transmission component; the collimating micro lens is used for collimating the infrared detection signals transmitted by the channel transmission assembly.

3. The eye-tracking structure according to claim 1, wherein the channel-transfer assembly comprises a first transparent transfer channel;

the first metal polarization grating is arranged on the surface of one side of the reflection filling layer, which is away from the resonant cavity, and is embedded in the first transparent transmission channel;

the first metal polarization grating is used for forming polarization for infrared detection signals emitted by the reflection filling layer; the first transparent transmission channel is used for transmitting infrared detection signals polarized by the first metal polarization grating.

4. An eye-tracking structure according to claim 3, wherein the infrared receiver comprises: the optical filter assembly, the second transparent transmission channel and the converging micro lens;

the second transparent transmission channel is arranged on one side of the induction backboard; the optical filtering component is arranged on one side, away from the induction backboard, of the second transparent transmission channel; the converging micro lens is arranged on the light receiving surface of the light filtering component;

the converging micro lens is used for converging the infrared echo signals to the induction backboard; the optical filtering component is at least used for carrying out wavelength selection and polarization on the infrared echo signals converged by the converging micro lenses; the second transparent transmission channel is used for transmitting the infrared detection signals passing through the optical filtering assembly to the induction backboard.

5. The eye-tracking structure according to claim 4, wherein the filter assembly comprises: the third transparent transmission channel, the light deflection layer, the filter layer and the second metal polarization grating;

the second metal polarization grating is arranged on the surface of one side, away from the induction backboard, of the second transparent transmission channel; the filter layer and the light deflection layer are sequentially arranged at intervals on one side of the second metal polarization grating, which is away from the second transparent transmission channel; the light deflection layer, the light filtering layer and the second metal polarization grating are embedded in the third transparent transmission channel;

the light deflection layer is used for deflecting the infrared echo signals converged by the converging micro lenses by a preset angle; the filter layer is at least used for passing the infrared echo signals; the second metal polarization grating is used for forming polarization on the infrared echo signals passing through the filter layer.

6. The eye-tracking structure according to claim 4, wherein the sensing area and the second transparent transmission channel are disposed in a one-to-one alignment;

the sensing area is used for receiving and processing the infrared echo signals converged by the converging micro lenses to the sensing backboard.

7. The eye-tracking structure according to claim 5, wherein a total length of the third transparent transmission channel and the second transparent transmission channel is equal to a focal length of the converging microlens.

8. The eye-tracking structure according to claim 5, further comprising: a black matrix and a second type reflective layer; the second type reflecting layer comprises a first reflecting surface and a second reflecting surface which are arranged opposite to each other;

the black matrix is spaced between the first transparent transmission channel and the third transparent transmission channel; the second type reflecting layer is arranged between the first type reflecting layer and the second transparent transmission channel and coats the second transparent transmission channel and part of the sensing area;

the black matrix is used for absorbing interference signals; the first reflecting surface faces the second transparent transmission channel and is used for reflecting the infrared echo signals passing through the first reflecting surface; the second reflecting surface faces the first type reflecting layer and is used for reflecting the infrared detection signals passing through the second reflecting surface.

9. The eye-tracking structure according to claim 5, wherein the sensing backplate further comprises an array of pixel regions;

each pixel area is internally provided with a corresponding infrared emitter and a corresponding infrared receiver; the arrangement directions of the infrared emitters and the metal polarization gratings corresponding to the infrared receivers in each pixel area are the same; the arrangement directions of the metal polarization gratings corresponding to the adjacent pixel areas are mutually perpendicular so as to isolate the crosstalk of infrared detection signals and infrared echo signals of the adjacent pixel areas.