CN116512760A - Inkjet printhead, inkjet printing apparatus and method - Google Patents

Abstract

The invention relates to an inkjet printhead, an inkjet printing apparatus and a method. The ink jet print head includes: the ink-jet device comprises an ink-jet cavity, a liquid crystal display device and a liquid crystal display device, wherein a nozzle communicated with a cavity of the ink-jet cavity is arranged in the ink-jet cavity, and a cavity wall of the ink-jet cavity comprises a vibrating plate; the nozzle control unit comprises a piezoelectric actuator and a deformation sensor, wherein the deformation sensor is connected with the vibration plate and used for acquiring the deformation of the vibration plate, and the piezoelectric actuator is connected with the vibration plate and used for driving the deformation of the vibration plate. The ink jet printing head, the equipment and the method can realize the real-time monitoring of the ink jet state of the nozzle of the ink jet printing head.

Description

Inkjet print head, inkjet printing apparatus and method

technical field

The invention relates to the technical field of printing, in particular to an inkjet printing head, inkjet printing equipment and a method.

Background technique

The inkjet printing process is a technique that utilizes colored inks to achieve patterning of ejected materials by splashing the inks into predetermined areas on a substrate. With the development of display technology, the demand for large-size, high-resolution, low-cost process technology and products is increasing. The inkjet printing process is based on its low material consumption and can be printed in large sizes without causing other impacts. , High-resolution printing features have begun to become one of the important development directions of the display manufacturing process. Taking the formation process of light-emitting devices in displays as an example, compared with the traditional evaporation process, only a small amount of material can be used to produce the device, and the cost can be greatly reduced due to the simple manufacturing process.

Inkjet printing head is an important part of inkjet printing equipment. In order to improve printing efficiency and yield, an inkjet printing equipment often integrates multiple printing heads, or integrates multiple nozzles into a printing head. A print head module is formed, and the entire printing process is completed through the jetting of the print head module.

When using an inkjet printing device for inkjet printing, since the nozzles in the inkjet print head are often unable to eject ink for various reasons, it is usually necessary to disable these nozzles that cannot eject ink normally, and use the adjacent Other nozzles to compensate for printing. In order to detect and find these abnormal nozzles, it is often only possible to use testing equipment to monitor whether the inkjet of each nozzle is normal before official printing, and to judge which nozzles are used for official printing by analyzing the detection results.

However, when the number of nozzles in the print head module increases, the time required for detection becomes longer and longer, and as the equipment is used longer, the frequency of detection tends to increase, which easily leads to an increase in production time costs. More, in some cases, even if the nozzles can eject ink normally before printing, it cannot be 100% guaranteed that all the nozzles can eject ink normally after printing starts, and some defects such as spray leakage and misalignment cannot be avoided. Therefore, how to realize the real-time monitoring of the inkjet status of the nozzles of the inkjet print head is an important research direction to ensure the yield and efficiency of inkjet printing.

Contents of the invention

Based on this, it is necessary to provide an inkjet printhead, an inkjet printing device and a method capable of realizing real-time monitoring of the inkjet state of the nozzles of the inkjet printhead and improving the yield and efficiency of inkjet printing.

An inkjet printhead comprising:

An inkjet chamber, provided with a nozzle communicating with the chamber of the inkjet chamber, the chamber wall of the inkjet chamber includes a vibrating plate;

A nozzle control unit, the nozzle control unit includes a piezoelectric actuator and a deformation sensor, the deformation sensor is connected to the vibrating plate and used to obtain the deformation of the vibrating plate, the piezoelectric actuator is connected to the The vibrating plate is connected and used to drive the deformation of the vibrating plate.

When the above-mentioned inkjet print head is in operation, the piezoelectric actuator drives the vibration plate to deform, and the deformation of the vibration plate further causes the space size of the ink-jet chamber to change, driving the ink to be ejected from the nozzle. The deformation of the deformation sensor connected with the vibration plate can reflect the deformation of the vibration plate with the piezoelectric actuator. For example, the piezoelectric actuator fails, or the control command cannot be transmitted to the piezoelectric actuator, resulting in no vibration of the vibration plate, or when the piezoelectric actuator operates, but the nozzle is ejected due to air bubbles, clogging, etc. In case of abnormality, although the vibration plate is deformed but the deformation is abnormal, it can be fed back synchronously through the deformation of the deformation sensor. In this way, according to the deformation of the deformation sensor, the inkjet status of the nozzle corresponding to the deformation sensor can be obtained, and then the inkjet print head can be adjusted. The real-time monitoring of the inkjet status of the nozzle can significantly improve the yield and efficiency of inkjet printing.

In some of the embodiments, the deformation sensor is arranged on the vibrating plate; the piezoelectric actuator is arranged on a side of the deformation sensor away from the vibrating plate.

In some of these embodiments, the deformation sensor includes a first conductive layer, a deformation sensing layer and a second conductive layer stacked on the vibration plate, and the deformation sensing layer is used to obtain the vibration of the vibration plate. deformation;

And/or, the piezoelectric actuator includes a third conductive layer, a piezoelectric layer and a fourth conductive layer stacked on the deformation sensor, and the piezoelectric layer is used to drive the deformation of the vibration plate.

In some of these embodiments, the nozzle control unit further includes an insulating layer, and the insulating layer is provided on a surface of the second conductive layer away from the deformation sensing layer;

The third conductive layer is disposed on a surface of the insulating layer away from the second conductive layer.

In some of the embodiments, the deformation sensing layer contains a semiconductor material, and the deformation sensing layer is used to acquire the deformation of the vibrating plate;

And/or, the thickness of the deformation sensing layer is 0.1-20 nm.

In some of these embodiments, the materials of the first conductive layer, the second conductive layer, the third conductive layer, and the fourth conductive layer are each independently selected from metals, metal alloys, carbon nanotubes, and organic at least one of conductive materials;

And/or, the thickness of the first conductive layer, the second conductive layer, the third conductive layer and the fourth conductive layer is 50 nm˜500 nm.

In some of these embodiments, the first conductive layer, the second conductive layer and the fourth conductive layer are surface electrodes;

And/or, the third conductive layer is a metal grid electrode.

In some of these embodiments, the chamber includes a first ink flow chamber, an inkjet pressure chamber, and a second ink flow chamber that are connected in sequence, the first ink flow chamber is provided with an ink inlet, and the nozzle is connected to the The inkjet pressure chamber is connected, the second ink flow chamber is provided with an ink outlet, and the vibrating plate constitutes a cavity wall of the inkjet pressure chamber.

In some of these embodiments, the nozzle control unit further includes a damping baffle, and the damping baffle is arranged between the first ink flow chamber and the ink ejection pressure chamber and between the ink ejection pressure chamber and the ink ejection pressure chamber. Between the second ink flow chamber, so that the first ink flow chamber, the inkjet pressure chamber and the second ink flow chamber are relatively independent, and the damping partition is formed between the wall of the chamber An overflow part, so that the first ink flow chamber, the ink jet pressure chamber and the second ink flow chamber communicate with each other.

In some of the embodiments, there are multiple nozzle control units, there are multiple ink jet pressure chambers, and the multiple nozzle control units are provided in one-to-one correspondence with the multiple ink jet pressure chambers.

An inkjet printing device comprising:

An inkjet printhead according to any one of the above;

an electric field applying device electrically connected to the piezoelectric actuator;

a voltage detection device electrically connected to the deformation sensor;

A nozzle monitoring device, electrically connected to the voltage detection device, and used to determine the ink ejection state of the nozzle corresponding to the deformation sensor according to the induced voltage value obtained by the voltage detection device; and

The control device is electrically connected with the nozzle detection device and the inkjet printing head, and is used for controlling the inkjet printing head to print according to the inkjet state.

An inkjet printing method, using the inkjet printing head as described in any one of the above, comprising the steps of:

applying an electric field to the piezoelectric actuator to cause the inkjet printhead to print;

Acquiring the induced voltage value of the deformation sensor during printing by the inkjet print head;

determining the ink ejection state of the nozzle corresponding to the deformation sensor according to the induced voltage value; and

Controlling the inkjet print head to adjust printing according to the inkjet state.

In some of these embodiments, the step of controlling the inkjet print head to adjust printing according to the inkjet state includes the following steps:

There are a plurality of nozzles, and when the ink ejection state of one nozzle corresponding to the deformation sensor is abnormal, the normal nozzle of the inkjet print head is controlled to perform compensation ink ejection to the target area of abnormal ink ejection.

Description of drawings

1 is a schematic cross-sectional structure diagram of an inkjet print head according to an embodiment of the present invention;

Figure 2 is a top view of the inkjet print head shown in Figure 1;

3 is a schematic diagram of the ink flow direction inside the chamber of the inkjet print head according to an embodiment of the present invention;

4 is a schematic diagram of a deformation state of the inkjet printing head, the electric field applying device and the voltage detecting device shown in FIG. 1;

5 is a schematic diagram of another deformation state of the inkjet printing head, the electric field applying device and the voltage detecting device shown in FIG. 1;

6 is a top view of an inkjet print head according to another embodiment of the present invention;

7 is a schematic diagram of induced voltage curves of the deformation sensor of the inkjet print head shown in FIG. 1 in different inkjet states;

FIG. 8 is a schematic flowchart of an inkjet printing method according to an embodiment of the present invention.

Explanation of reference signs:

110, nozzle plate; 120, nozzle; 130: damping partition; 101: flow part; 140: side cavity wall; 151, first ink circulation chamber; 152, second ink circulation chamber; 160, inkjet pressure chamber; 210, vibration plate; 211, ink inlet; 212, ink outlet; 213: deformation curve; 230: deformation sensor; 231: first conductive layer; 232: deformation sensing layer; 233: second conductive layer; 250: Insulation layer; 270: piezoelectric actuator; 271: third conductive layer; 272: piezoelectric layer; 273: fourth conductive layer; 300: electric field application device; 400: voltage detection device.

Detailed ways

In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the associated drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the understanding of the disclosure of the present invention more thorough and comprehensive.

In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial" , "radial", "circumferential" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device or Elements must have certain orientations, be constructed and operate in certain orientations, and therefore should not be construed as limitations on the invention.

In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include at least one of these features. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

In the present invention, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection" and "fixation" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , or integrated; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components or the interaction relationship between two components, unless otherwise specified limit. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

In the present invention, unless otherwise clearly specified and limited, the first feature may be in direct contact with the first feature or the first and second feature may be in direct contact with the second feature through an intermediary. touch. Moreover, "above", "above" and "above" the first feature on the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. "Below", "beneath" and "beneath" the first feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is less horizontally than the second feature.

As used herein, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions are for the purpose of illustration only and are not intended to represent the only embodiments.

It should be noted that when an element is referred to as being “fixed” to another element, it can be directly on the other element or there can also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present.

Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of the invention. The terms used herein in the description of the present invention are for the purpose of describing specific embodiments only, and are not intended to limit the present invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Please refer to FIG. 1 and FIG. 2 , an embodiment of the present invention provides an inkjet printing head, including an inkjet cavity and a nozzle control unit.

The inkjet chamber is provided with a nozzle 212 communicating with the chamber of the inkjet chamber, and the chamber wall of the inkjet chamber includes a vibrating plate 210 , in other words at least part of the chamber wall is formed by the vibrating plate 210 .

The nozzle control unit includes a piezoelectric actuator 270 and a deformation sensor 230 . The deformation sensor 230 is connected with the vibrating plate 210 , and the deformation sensor 230 is used to acquire the deformation of the vibrating plate 210 . The piezoelectric actuator 270 is connected to the vibrating plate 210 , and the piezoelectric actuator 270 is used to drive the deformation of the vibrating plate 210 .

Further, the piezoelectric actuator 270 is used to drive the deformation of the vibrating plate 210 specifically: the piezoelectric actuator 270 is used to drive the vibrating plate 210 to deform in a direction toward or away from the chamber of the inkjet cavity, so that The space size of the chamber of the ink ejection chamber changes.

When the above-mentioned inkjet print head is in operation, the piezoelectric actuator 270 drives the vibration plate 210 to deform, and the deformation of the vibration plate 210 leads to a change in the size of the chamber of the inkjet cavity, driving ink to be ejected from the nozzle 120 . The deformation of the vibration plate 210 along with the piezoelectric actuator 270 is reflected by the deformation of the deformation sensor 230 connected to the vibration plate 210 . For example, the piezoelectric actuator 270 fails, or the control command cannot be transmitted to the piezoelectric actuator 270, resulting in no vibrating action of the vibration plate 210, or when the piezoelectric actuator 270 operates, but the nozzle 120 is caused by air bubbles, clogging, etc. When the inkjet is abnormal due to some reasons, although the vibration plate 210 is deformed but the deformation is abnormal, it can be fed back synchronously through the deformation of the deformation sensor 230. In this way, according to the deformation of the deformation sensor 230, the spraying of the nozzle 120 corresponding to the deformation sensor 230 can be obtained. Ink state, and then real-time monitoring of the inkjet state of the nozzle 120 of the inkjet print head is realized, and the inkjet printing yield and efficiency are significantly improved.

It can be understood that the vibrating plate 210 only needs to have a certain deformation ability, and it can be in the shape of a flat plate or other shapes with a certain arc surface, preferably a flat plate. Further, the vibrating plate 210 is thinner to facilitate deformation. Specifically, the vibration plate 210 may be made of stainless steel or silicon, preferably silicon.

In some of these embodiments, the deformation sensor 230 is arranged on the vibrating plate 210 for obtaining the deformation of the vibrating plate 210, and the piezoelectric actuator 270 is arranged on the side of the deformation sensor 230 away from the vibrating plate 210 for The deformation of the vibration plate 210 is driven. The deformation sensor 230 is set between the piezoelectric actuator 270 and the vibration plate 210, the deformation sensor 230 is combined on the vibration plate 210, the piezoelectric actuator 270 is indirectly connected with the vibration plate 210 through the deformation sensor 230, and then can better The deformation of the vibration plate 210 along with the piezoelectric actuator 270 is reflected by the deformation of the deformation sensor 230 .

It can be understood that, in other examples, the piezoelectric actuator 270 may also be directly connected to the vibrating plate 210 .

In some of the embodiments, the deformation sensor 230 includes a first conductive layer 231 , a deformation sensing layer 232 and a second conductive layer 233 stacked on the vibrating plate 210 . Wherein, the deformation sensing layer 232 is used to obtain the deformation of the vibrating plate 210 .

Further, the materials of the first conductive layer 231 and the second conductive layer 233 are each independently selected from at least one of metals, metal alloys, carbon nanotubes and organic conductive materials. The material of the first conductive layer 231 and the second conductive layer 233 is preferably a material with low resistivity, including but not limited to a metal layer or a metal alloy formed by at least one of aluminum, copper, silver, titanium, chromium, platinum and gold layers, or stacks of these metal layers and/or metal alloy layers, nano metal rods, nano metal wires, metal grids, carbon nanotubes, porous metal materials and organic conductive materials, etc. In this specific example, the first conductive layer 231 is a surface electrode; for example, it is formed in a large area on the vibrating plate 210 . It can be understood that the first conductive layer 231 can be designed as a common electrode or a ground electrode.

Further, the thickness of the first conductive layer 231 and/or the second conductive layer 233 is 50 nm˜500 nm.

Further, the deformation sensing layer 232 contains a semiconductor material; specifically, the deformation sensing layer 232 may be a semiconductor material layer. The deformation sensing layer 232 deforms with the vibrating plate 210, which in turn causes the deformation sensing layer 232 to generate charges and forms an electric field between the upper and lower electrodes of the deformation sensing layer 232 (that is, the first conductive layer 231 and the second conductive layer 233). . By detecting the induced voltage value of the upper and lower electrodes of the deformation sensing layer 232 , the deformation such as the deformation of the deformation sensing layer 232 can be judged.

Further, the thickness of the deformation sensing layer 232 is 0.1-20 nm. If the thickness of the deformation sensing layer 232 is within this range, it can better exert deformation performance.

In some of these embodiments, the semiconductor material is boron nitride (BN), barium titanate (BaTiO ₃ ), zinc oxide (ZnO), graphene, molybdenum disulfide (MoS ₂ ), molybdenum diselenide (MoSe ₂ ) A two-dimensional material formed by at least one of tungsten disulfide (WS ₂ ). Two-dimensional materials include, but are not limited to, nanotube materials.

Further, the material of the deformation sensing layer 232 can be a nanotube material formed by at least one of materials such as boron nitride (BN), barium titanate (BaTiO ₃ ), zinc oxide (ZnO), or doped with graphite A two-dimensional material formed of at least one of materials such as alkene, molybdenum disulfide (MoS ₂ ), molybdenum diselenide (MoSe ₂ ), tungsten disulfide (WS ₂ ), hexagonal boron nitride (h-BN), and the like.

Taking the deformation sensing layer 232 as a barium titanate nanotube material layer as an example, the sensing mechanism of the deformation sensing layer 232 is: after the nanotube material inside the deformation sensing layer 232 is strained, it will be on both sides of the pipe of the nanotube material. Due to the action of electrostatic force, from the perspective of the entire sensing layer, positive charges and negative charges will focus on the upper and lower electrodes respectively, thereby forming an electric field and piezoelectric potential (ie, the above-mentioned induced voltage value). Similarly, when the strain disappears, the piezoelectric potential inside the nanotube also disappears, and at the same time, it appears as a reverse potential.

In some of the embodiments, the nozzle control unit further includes an insulating layer 250 , and the insulating layer 250 is disposed on the surface of the second conductive layer 233 away from the deformation sensing layer 232 . The piezoelectric actuator 270 is disposed on a surface of the insulating layer 250 away from the second conductive layer 233 . The function of the insulating layer 250 is to isolate the deformation sensor 230 and the piezoelectric actuator 270 . The material of the insulating layer 250 may be an organic insulating material or an inorganic insulating material, wherein the inorganic insulating material may be silicon nitride, silicon oxide, silicon oxynitride, silicon oxycarbide, aluminum oxide, hafnium oxide, and the like.

Preferably, the material of the insulating layer 250 is a material with a low dielectric constant, which can avoid the formation of parasitic capacitance between the deformation sensor 230 and the piezoelectric actuator 270, and affect the accuracy of detecting the induced voltage value of the deformation sensor 230; preferably , the insulating layer 250 is a silicon oxide layer. Further, the thickness of the insulating layer 250 is 100-500 nm.

In some of the embodiments, the piezoelectric actuator 270 includes a third conductive layer 271 , a piezoelectric layer 272 and a fourth conductive layer 273 stacked on the deformation sensor 230 . Wherein, the piezoelectric layer 272 is used to drive the vibration plate 210 to deform. Further, the third conductive layer 271 is disposed on the insulating layer 250 ; in other words, the insulating layer 250 is disposed between the second conductive layer 233 and the third conductive layer 271 .

In some of these embodiments, the materials of the third conductive layer 271 and the fourth conductive layer 273 are similar to those of the first conductive layer 231, and are independently selected from at least one of metals, metal alloys, carbon nanotubes and organic conductive materials; No more details. Further, the thickness of the third conductive layer 271 and/or the fourth conductive layer 273 is 50 nm˜500 nm.

In a specific example, the third conductive layer 271 is a metal grid electrode. Further, the first conductive layer 231 , the second conductive layer 233 and the fourth conductive layer 273 are surface electrodes. The third conductive layer 271 is preferably a metal grid electrode, which can effectively avoid the formation of parasitic capacitance between the third conductive layer 271 and the second conductive layer 233, and affect the detection accuracy of the induced voltage value of the deformation sensor 230, thereby having It is beneficial to improve the precision of the induced voltage value of the deformation sensor 230 . In addition, in order to connect with external control and detection circuits, the above-mentioned conductive layers are patterned with exposed parts, so as to facilitate the binding connection between the print head and the control circuit (such as a flexible circuit board).

It can be understood that the piezoelectric layer 272 contains a piezoelectric material, which is characterized in that the vertical direction of the piezoelectric layer 272 can be controlled by controlling the voltage drop applied to its upper and lower electrodes (the third conductive layer 271 and the fourth conductive layer 273). Shape; specifically, the stretching and shrinking of the piezoelectric material can be controlled, which in turn can play a role in driving the deformation of the vibration plate.

Further, the piezoelectric layer 272 in the piezoelectric actuator 270 can be made of lead zirconate titanate (PZT) ceramic material, specifically, the piezoelectric layer 272 can be formed by the following method: pass the piezoelectric material slurry through the wire A coating method such as screen printing is applied to a predetermined thickness, and then dried for a predetermined time to form the piezoelectric layer 272 . Further, the slurry of the fourth conductive layer 273 can also be coated on the dried piezoelectric layer 272 by using a coating method such as screen printing, and then sintered at a high temperature after drying, and the sintering temperature can be 900-1000° C. The preparation of the piezoelectric actuator 270 is completed. Next, it is generally necessary to apply an electric field to the piezoelectric layer 272 to activate the piezoelectric actuator 270 . In addition, when the vibrating plate 210 is thin and fragile, the piezoelectric layer 272 and the fourth conductive layer 273 may also be formed using a sol-gel method.

In some of these embodiments, the chamber includes a first ink flow chamber 151, an inkjet pressure chamber 160, and a second ink flow chamber 152 that are connected in sequence, the first ink flow chamber 151 is provided with an ink inlet 211, and the nozzle and inkjet The pressure chamber 160 is in communication with the second ink flow chamber 152 having an ink outlet 212 , and the vibrating plate 210 constitutes a cavity wall of the inkjet pressure chamber 160 .

The ink inlet 211 of the first ink circulation chamber 151 is for ink to import ink from the ink tank (not shown), and the ink outlet 212 of the second ink circulation chamber 152 is for ink to output ink from the inkjet pressure chamber 160 , so that the ink forms a circulation path in the chamber in the print head.

The ink ejection pressure chamber 160 is the place where the interaction between the ink and the vibrating plate 210 is the strongest. Generally, as shown in FIG. The direction of the flow chamber 152 is smooth flow. When the piezoelectric actuator 270 deforms with the change of the input voltage and deforms the vibrating plate 210, as shown in FIG. 4 and FIG. In the case of contraction and expansion, the action of first expansion and then contraction of the inkjet pressure chamber 160 is generally used. Due to the existence of the damping partition 130 and the viscoelasticity of the ink, the ink can be effectively squeezed out from the nozzle 120, and finally the ink is formed. drop.

Further, the vibrating plate 210 also constitutes a cavity wall of the first ink circulation chamber 151 and the second ink circulation chamber 152 . Further, the ink inlet 211 of the first ink circulation chamber 151 and the ink outlet 212 of the second ink circulation chamber 152 are both disposed on the vibrating plate 210 . For a single nozzle 120, there are generally two openings, one as the ink inlet 211 and the other as the ink outlet 212. This is in consideration of making the ink flow as much as possible no matter whether the print head is working or not, which is conducive to bringing the air bubbles into the air. Walk.

Further, the ink ejection cavity further includes a nozzle plate 110 for forming a cavity wall. The nozzle plate 110 and the vibrating plate 210 are respectively located on opposite sides of the ink ejection cavity. The nozzle plate 110 is provided with nozzles 120 . The nozzle plate 110 may be formed of a substrate made of a material having good fine processability. Specifically, the nozzle plate 110 may be a stainless steel plate or a silicon plate. Further, the thickness of the nozzle plate 110 may be 20˜100 μm.

Further, the surface of the nozzle plate 110 away from the vibrating plate 210 is further provided with a waterproof and hydrophobic film layer, and the waterproof and hydrophobic film layer can improve the inkjet performance of the inkjet print head.

Nozzles 120 are formed in the nozzle plate 110 for passages connecting the inkjet pressure chamber 160 with the environment outside the inkjet printhead. Specifically, the ink is ejected from the nozzle 120 to form ink droplets and finally printed to the target area. The length of the nozzle 120 is consistent with the thickness of the nozzle plate 110, and there is no special requirement for the shape, but generally, the opening diameter of the nozzle 120 is larger on the side close to the ink pressure chamber, and smaller on the side away from the ink pressure chamber, which is conducive to lifting The inkjet performance of the printhead.

In some of these embodiments, the nozzle control unit further includes a damping baffle 130, and the damping baffle 130 is arranged between the first ink flow chamber 151 and the ink ejection pressure chamber 160 and between the ink ejection pressure chamber 160 and the second ink flow chamber 152. between, so that the first ink flow chamber 151, the inkjet pressure chamber 160 and the second ink flow chamber 152 are relatively independent, and the flow part 101 is formed between the damping partition 130 and the cavity wall of the chamber (as shown in Fig. 4 shown), so that the first ink flow chamber 151, the ink ejection pressure chamber 160 and the second ink flow chamber 152 communicate with each other. On the one hand, the damping partition 130 acts as a damper, which is used to buffer the flow of ink between the inkjet pressure chamber 160 and the first ink circulation chamber 151 and the second ink circulation chamber 152 after the piezoelectric actuator 270 is activated. Mutual flow, slow down the flow of ink between two adjacent chambers, so that the ink is more likely to be squeezed out of the inkjet pressure chamber 160 due to the deformation of the piezoelectric actuator 270 and the vibrating plate 210; on the other hand, it also It plays the role of relatively isolating the chamber.

Further, the material of the damping partition 130 may be stainless steel or silicon. Further, the damping diaphragm 130 may be integrally formed with the nozzle plate 110 , and may also be integrally formed with the side chamber wall 140 located between the nozzle plate 110 and the vibrating plate 210 . The side cavity wall 140 is the wall forming the first ink circulation chamber 151, the second ink circulation chamber 152, and the inkjet pressure chamber 160, and is the two outermost barriers of the print head, and its material can be stainless steel or silicon.

Please refer to FIG. 6 , in some embodiments, there are multiple nozzle control units and multiple ink jet pressure chambers 160 , and the multiple nozzle control units correspond to the multiple ink jet pressure chambers 160 one by one. In this way, the above-mentioned nozzle control units are respectively provided for each ink ejection pressure chamber 160 , and then the ink ejection state of the nozzles corresponding to each ink ejection pressure chamber 160 can be individually controlled.

Further, the plurality of inkjet pressure chambers 160 are relatively independent, one nozzle is provided corresponding to each other, and an ink inlet 211 and an ink outlet 212 are correspondingly provided at the corresponding positions of the first ink circulation chamber 151 and the second ink circulation chamber 152 . Further, in this specific example, a plurality of inkjet pressure chambers 160 are arranged side by side in sequence.

Further, multiple inkjet pressure chambers 160 can share the same first ink flow chamber 151 and second ink flow chamber 152, which can make the inkjet flow more stable.

Another embodiment of the present invention also provides an inkjet printing device, including: the inkjet printing head described in any one of the above, an electric field application device 300, a voltage detection device 400, a nozzle monitoring device (not shown) and control device (not shown).

The electric field applying device 300 is electrically connected to the piezoelectric actuator 270 and is used to make the piezoelectric actuator 270 drive the vibration plate 210 to deform.

The voltage detecting device 400 is electrically connected with the deformation sensor 230 and is used for detecting the induced voltage value generated by the deformation sensor 230 as the vibration plate 210 deforms.

The nozzle monitoring device is electrically connected to the voltage detection device 400 , and is used to determine the ink ejection state of the nozzle corresponding to the deformation sensor 230 according to the induced voltage value obtained by the voltage detection device 400 .

The control device is electrically connected with the nozzle detection device and the inkjet print head, and is used to control the inkjet print head to print according to the ink ejection state. It can be understood that the above "electrical connection" refers to a connection for establishing electrical signals. Further, the electrical connection may be a wired electrical connection or a wireless connection. The wired electrical connection includes the use of wires to realize the electrical connection, and the wireless connection includes wifi, bluetooth, etc. to realize the electrical signal connection. For example, in a specific example, the electric field application device 300 is electrically connected to the piezoelectric actuator 270 through a wire; the voltage detection device 400 is electrically connected to the deformation sensor 230 through a wire; or wireless connection to realize electrical signal connection; the control device, nozzle detection device and inkjet printing head can realize electrical signal connection through wired or wireless connection.

It can be understood that the above-mentioned inkjet printing device can also use a stage, the stage is used to place the substrate to be printed, the inkjet printing head is arranged at intervals from the stage, and the nozzle is arranged facing the stage.

It can be understood that the above-mentioned inkjet printing device may contain one or more inkjet printing heads. It can be understood that one inkjet print head can be provided with one or more nozzles.

Please refer to FIG. 8 , another embodiment of the present invention also provides an inkjet printing method of the above inkjet printing head or the above inkjet printing device. The inkjet printing method includes the following steps S10-S40:

Step S10: applying an electric field to the piezoelectric actuator 270 to enable the inkjet print head to print.

It can be understood that in step S10 , the electric field can be applied by the electric field applying device 300 .

Step S20: Obtain the induced voltage value of the deformation sensor 230 during printing by the inkjet print head.

It can be understood that in step S20 , the induced voltage value can be obtained through the voltage detection device 400 . The deformation of the deformation sensor 230 is reflected by the induced voltage value, so that according to the induced voltage value of the deformation sensor 230, the ink ejection state of the nozzle corresponding to the deformation sensor 230 can be obtained, thereby realizing real-time monitoring of the ink ejection state of the nozzle of the inkjet print head .

Step S30: Determine the ink ejection state of the nozzle corresponding to the deformation sensor 230 according to the induced voltage value.

In some of the embodiments, it can be judged according to the induced voltage value whether the corresponding nozzle is activated and whether ink is ejected normally. It can be understood that step S30 can be performed by the above-mentioned nozzle monitoring device.

Specifically, as shown in FIG. 7 , when the piezoelectric actuator 270 is normal and the nozzle is printing normally, the induced voltage curve of the deformation sensor is as shown in A in FIG. 7 . When the piezoelectric actuator 270 fails, or the control command cannot be transmitted to the piezoelectric actuator 270, the vibrating plate 210 does not vibrate, and the deformation sensor does not vibrate accordingly. The induced voltage of the deformation sensor is the reference voltage and will not change. The induced voltage curve of the deformation sensor is shown as B in FIG. 7 . When the piezoelectric actuator 270 operates, but the nozzle ejects abnormally due to bubbles, clogging, etc., the deformation of the vibrating plate 210 will produce different deformations due to the different reaction forces of the ink, and the induced voltage curve of the deformation sensor, As shown in C in Figure 7. In this way, the deformation sensor 230 will be subject to a different strain force, and the voltage signal detected by the nozzle monitoring device will be different from the normal ink drop, so as to determine whether the nozzle is abnormally ejecting ink. Further, the nozzle monitoring device may be a sensor.

Step S40: Control the inkjet print head to adjust printing according to the inkjet state.

It can be understood that step S40 can be performed by the above-mentioned control device.

When there are multiple nozzles, the feedback voltages of all the nozzles (that is, the above-mentioned corresponding induced voltage values of the deformation sensor 230 ) are monitored. If the ink ejection state of the nozzle corresponding to one of the deformation sensors 230 is abnormal, the serial number of the abnormal nozzle can be fed back to the control device. Next, perform the following steps.

Step S41: judging whether the piezoelectric actuator 270 corresponding to the abnormal ink ejection is abnormal;

Step S42: If the piezoelectric actuator 270 is abnormal, then control the normal nozzles of the inkjet print head to perform compensation ink ejection to the target area of abnormal ink ejection.

In this way, compensation and abnormal repair actions can be quickly realized, and the production efficiency and yield rate of inkjet printing can be effectively improved. Specifically, compensating ink ejection specifically includes: disabling the abnormal nozzle corresponding to the piezoelectric actuator 270, and performing secondary printing compensation using adjacent normal nozzles.

Step S43 , if the piezoelectric actuator 270 is normal, check the predetermined ink ejection area of the abnormal nozzle, and judge whether the state of the ink droplet in the predetermined ink ejection area is qualified.

If the state of the ink droplet in the predetermined ink ejection area is qualified, a normal printing operation is performed. If the state of the ink drop in the predetermined inkjet area is unqualified, perform repair measures, and perform normal printing after repair. Specifically, the repair measure can be to set a secondary printing supplementary action in the abnormally printed area.

An embodiment of the present invention also provides a computer device, including a memory and a processor, the memory stores a computer program, and the processor implements the steps of any one of the above methods when executing the computer program.

In some of these embodiments, the computer device may be a terminal. The computer device includes a processor, a memory, a network interface, a display screen and an input device connected through a system bus. Wherein, the processor of the computer device is used to provide calculation and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and computer programs. The internal memory provides an environment for the operation of the operating system and computer programs in the non-volatile storage medium. The network interface of the computer device is used to communicate with an external terminal via a network connection. When the computer program is executed by the processor, any one of the above-mentioned inkjet printing methods can be realized. The display screen of the computer device may be a liquid crystal display screen or an electronic ink display screen, and the input device of the computer device may be a touch layer covered on the display screen, or a button, a trackball or a touch pad provided on the casing of the computer device , and can also be an external keyboard, touchpad or mouse.

An embodiment of the present invention also provides a computer-readable storage medium on which a computer program is stored, and when the computer program is executed by a processor, the steps of any one of the methods are implemented.

Those of ordinary skill in the art can understand that all or part of the processes in the methods of the above embodiments can be implemented through computer programs to instruct related hardware. The computer programs can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it may include the procedures of the embodiments of the above-mentioned methods. Wherein, any reference to memory, storage, database or other media used in the various embodiments provided by the present invention may include non-volatile and/or volatile memory. Nonvolatile memory can include read only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in many forms such as Static RAM (SRAM), Dynamic RAM (DRAM), Synchronous DRAM (SDRAM), Double Data Rate SDRAM (DDRSDRAM), Enhanced SDRAM (ESDRAM), Synchronous Chain Synchlink DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM), etc.

The technical features of the above-mentioned embodiments can be combined arbitrarily. To make the description concise, all possible combinations of the technical features in the above-mentioned embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, should be considered as within the scope of this specification.

The above-mentioned embodiments only express several implementation modes of the present invention, and the descriptions thereof are relatively specific and detailed, but should not be construed as limiting the patent scope of the invention. It should be noted that, for those skilled in the art, several modifications and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent for the present invention should be determined by the appended claims, and the description and drawings can be used to explain the contents of the claims.

Claims (13)

1. An inkjet printhead, comprising:

the ink-jet device comprises an ink-jet cavity, a liquid crystal display device and a liquid crystal display device, wherein a nozzle communicated with a cavity of the ink-jet cavity is arranged in the ink-jet cavity, and a cavity wall of the ink-jet cavity comprises a vibrating plate;

the nozzle control unit comprises a piezoelectric actuator and a deformation sensor, wherein the deformation sensor is connected with the vibration plate and used for acquiring the deformation of the vibration plate, and the piezoelectric actuator is connected with the vibration plate and used for driving the deformation of the vibration plate.

2. The inkjet printhead of claim 1, wherein said deformation sensor is disposed on said diaphragm; the piezoelectric actuator is arranged on one side of the deformation sensor, which is far away from the vibration plate.

3. The inkjet printhead of claim 2, wherein the deformation sensor comprises a first conductive layer, a deformation sensing layer, and a second conductive layer laminated on the diaphragm, the deformation sensing layer configured to obtain deformation of the diaphragm;

and/or the piezoelectric actuator comprises a third conductive layer, a piezoelectric layer and a fourth conductive layer which are laminated on the deformation sensor, wherein the piezoelectric layer is used for driving the deformation of the vibration plate.

4. The inkjet printhead of claim 3, wherein said nozzle control unit further comprises an insulating layer disposed on a surface of said second conductive layer remote from said deformation sensing layer;

the third conductive layer is arranged on the surface, far away from the second conductive layer, of the insulating layer.

5. The inkjet printhead of claim 3, wherein said deformation sensing layer comprises a semiconductor material, said semiconductor material being a two-dimensional material formed from at least one of boron nitride, barium titanate, zinc oxide, graphene, molybdenum disulfide, molybdenum diselenide, and tungsten disulfide;

and/or the thickness of the deformation sensing layer is 0.1-20 nm.

6. The inkjet printhead of claim 3, wherein the materials of said first conductive layer, said second conductive layer, said third conductive layer, said fourth conductive layer are each independently selected from at least one of a metal, a metal alloy, carbon nanotubes, and an organic conductive material;

and/or the thicknesses of the first conductive layer, the second conductive layer, the third conductive layer and the fourth conductive layer are 50 nm-500 nm.

7. The inkjet printhead of claim 3, wherein said first conductive layer, said second conductive layer, and said fourth conductive layer are face electrodes;

and/or, the third conductive layer is a metal grid electrode.

8. An inkjet printhead according to any one of claims 1 to 7, wherein the chamber comprises a first ink flow chamber, an inkjet pressure chamber and a second ink flow chamber in communication, the first ink flow chamber being provided with an ink inlet, the nozzle being in communication with the inkjet pressure chamber, the second ink flow chamber being provided with an ink outlet, the diaphragm forming a wall of the inkjet pressure chamber.

9. The inkjet printhead of claim 8, wherein said nozzle control unit further comprises a damping diaphragm disposed between said first ink flow chamber and said inkjet pressure chamber and between said inkjet pressure chamber and said second ink flow chamber such that said first ink flow chamber, said inkjet pressure chamber and said second ink flow chamber are relatively independent of each other, and wherein an overflow is formed between said damping diaphragm and a wall of said chamber such that said first ink flow chamber, said inkjet pressure chamber and said second ink flow chamber are in communication with each other.

10. The inkjet printhead of claim 8, wherein said plurality of nozzle control units are provided, said plurality of inkjet pressure chambers are provided, and said plurality of nozzle control units are provided in one-to-one correspondence with said plurality of inkjet pressure chambers.

11. An inkjet printing apparatus, comprising:

an inkjet printhead as claimed in any one of claims 1 to 10;

an electric field applying device electrically connected to the piezoelectric actuator;

the voltage detection device is electrically connected with the deformation sensor;

the nozzle monitoring device is electrically connected with the voltage detection device and is used for determining the ink jet state of the nozzle corresponding to the deformation sensor according to the induced voltage value acquired by the voltage detection device; and

And the control device is electrically connected with the nozzle detection device and the ink jet printing head and is used for controlling the ink jet printing head to print according to the ink jet state.

12. An inkjet printing method, characterized in that an inkjet printhead according to any one of claims 1 to 10 is used, comprising the steps of:

applying an electric field to the piezoelectric actuator to cause the inkjet printhead to print;

acquiring an induced voltage value of the deformation sensor in the printing of the ink jet printing head;

determining the ink-jet state of the nozzle corresponding to the deformation sensor according to the induced voltage value; and

And controlling the ink jet printing head to adjust printing according to the ink jet state.

13. The inkjet printing method according to claim 12 wherein the step of controlling the inkjet printhead to adjust printing according to the inkjet status comprises the steps of:

and when the ink-jet state of the nozzle corresponding to one deformation sensor is abnormal, controlling the normal nozzle of the ink-jet printing head to perform compensation ink-jet on the target area of abnormal ink-jet.