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CN117226120A - Plasma jet driven microelectronic circuit 3D printing device and working method - Google Patents

Plasma jet driven microelectronic circuit 3D printing device and working method Download PDF

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Publication number
CN117226120A
CN117226120A CN202311095228.9A CN202311095228A CN117226120A CN 117226120 A CN117226120 A CN 117226120A CN 202311095228 A CN202311095228 A CN 202311095228A CN 117226120 A CN117226120 A CN 117226120A
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China
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fixedly installed
plasma
printing device
driven
microelectronic circuit
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CN202311095228.9A
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周言
李成祥
陈丹
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Zhici Chongqing Technology Co ltd
Chongqing University
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Zhici Chongqing Technology Co ltd
Chongqing University
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Priority to CN202311095228.9A priority Critical patent/CN117226120A/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

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Abstract

本发明涉及3D打印装置技术领域,具体为一种等离子体射流驱动的微电子电路3D打印装置及工作方法,射流等离子发生组件的内部固定安装有进气管,进气管的输出端固定连接有发射管,发射管的内部开设有安装腔体,安装腔体的内部固定安装有针电极,通过空气压缩机将空气通入发射管里,在铜环处,针电极对铜环放电,将空气电离产生等离子体,同时气流将等离子体喷出,通过金属粉末高速喷出的形式,可以根据需求进行叠层工件的3D打印,同时还可以将金属粉末喷涂于非金属工件表面,开展电子电路的制造。

The invention relates to the technical field of 3D printing devices, specifically a plasma jet-driven microelectronic circuit 3D printing device and a working method. An air inlet pipe is fixedly installed inside the jet plasma generating component, and an emission tube is fixedly connected to the output end of the air inlet pipe. , there is an installation cavity inside the launch tube, and a needle electrode is fixedly installed inside the installation cavity. The air is passed into the launch tube through an air compressor. At the copper ring, the needle electrode discharges the copper ring, ionizing the air to produce Plasma, while the air flow ejects the plasma, and through the high-speed ejection of metal powder, 3D printing of laminated workpieces can be carried out according to needs. At the same time, metal powder can also be sprayed on the surface of non-metal workpieces to carry out the manufacturing of electronic circuits.

Description

等离子体射流驱动的微电子电路3D打印装置及工作方法Plasma jet driven microelectronic circuit 3D printing device and working method

技术领域Technical field

本发明涉及3D打印装置技术领域,具体为一种等离子体射流驱动的微电子电路3D打印装置。The present invention relates to the technical field of 3D printing devices, specifically a plasma jet-driven microelectronic circuit 3D printing device.

背景技术Background technique

近几年来,3D打印这个名词从陌生到熟悉,逐渐走向人们的生活和工作中,但是,仍有不少童鞋对3D打印不够了解,3D打印并不神秘,它只是一种新型的制造和加工工艺,3D打印即快速成型技术的一种,它是一种以数字模型(3D设计文件)文件为基础,运用粉末状金属或塑料等可粘合材料,通过3D打印机,逐层打印的方式来构造物体的技术In recent years, the term 3D printing has gone from unfamiliar to familiar and gradually integrated into people's lives and work. However, there are still many children who do not know enough about 3D printing. 3D printing is not mysterious, it is just a new type of manufacturing and processing. Technology, 3D printing is a type of rapid prototyping technology. It is based on a digital model (3D design file) file and uses adhesive materials such as powdered metal or plastic to print layer by layer through a 3D printer. Techniques for constructing objects

金属粉末喷涂/3D打印是装备制造中的重要技术之一,目前,电弧喷涂、等离子喷涂、超音速火焰喷涂等多种方法,亦可进行电子电路中铜涂层的制备,但这类喷涂技术存在制备温度过高铜涂层氧化严重,内部存在孔隙,涂层与基体结合强度较低等问题,此外,电磁加速等离子体喷涂技术采用金属丝电爆炸产生等离子体并以轨道形式对等离子体加速,不可避免对轨道产生烧蚀,减少其寿命,且可控性不强,为此,本发明提出一种电磁脉冲与等离子体射流驱动的电子电路打印装置,通过高压放电产生等离子体射流,驱动金属粉末运动,并通过非接触式线圈对等离子体加速,旨在提高金属粉末喷出速度实现高强度结合的同时,不对装置本身服役寿命造成影响。Metal powder spraying/3D printing is one of the important technologies in equipment manufacturing. Currently, various methods such as arc spraying, plasma spraying, and supersonic flame spraying can also be used to prepare copper coatings in electronic circuits. However, this type of spraying technology There are problems such as serious oxidation of the copper coating when the preparation temperature is too high, internal pores, and low bonding strength between the coating and the substrate. In addition, electromagnetic accelerated plasma spraying technology uses metal wire electric explosion to generate plasma and accelerate the plasma in the form of orbits. , it is inevitable to cause ablation of the track, reduce its life, and the controllability is not strong. Therefore, the present invention proposes an electronic circuit printing device driven by electromagnetic pulse and plasma jet, which generates plasma jet through high-voltage discharge and drives The metal powder moves and accelerates the plasma through a non-contact coil, aiming to increase the ejection speed of the metal powder to achieve high-strength bonding without affecting the service life of the device itself.

鉴于此,本发明申请提供了一种等离子体射流驱动的微电子电路3D打印装置。In view of this, the present application provides a plasma jet-driven microelectronic circuit 3D printing device.

发明内容Contents of the invention

为了弥补以上不足,本发明提供了一种等离子体射流驱动的微电子电路3D打印装置。In order to make up for the above shortcomings, the present invention provides a plasma jet driven microelectronic circuit 3D printing device.

本发明的技术方案是:The technical solution of the present invention is:

一种等离子体射流驱动的微电子电路3D打印装置,包括微电子电路打印装置主体,所述微电子电路打印装置主体的上方固定安装有射流等离子发生组件,所述射流等离子发生组件的内部固定安装有进气管,所述进气管的输出端固定连接有发射管,所述发射管的内部开设有安装腔体,所述安装腔体的内部固定安装有针电极,所述针电极的侧面固定连接有橡胶塞,所述橡胶塞的侧面开设有第一固定卡扣。A plasma jet-driven microelectronic circuit 3D printing device, including a microelectronic circuit printing device main body. A jet plasma generating component is fixedly installed above the main body of the microelectronic circuit printing device. The jet plasma generating component is fixedly installed inside. There is an air inlet pipe. The output end of the air inlet pipe is fixedly connected to a launch tube. An installation cavity is provided inside the launch pipe. A needle electrode is fixedly installed inside the installation cavity. The side of the needle electrode is fixedly connected. There is a rubber plug, and a first fixing buckle is provided on the side of the rubber plug.

作为优选的技术方案,所述第一固定卡扣的下方固定安装有铜环,所述发射管的左侧开设有第一高压电源,所述针电极的末端固定安装有电磁脉冲驱动加速组件,所述电磁脉冲驱动加速组件的内部固定安装有第一电磁调压阀,所述第一电磁调压阀的输出端开设有进料口,所述进料口的末端固定安装有第一脉冲线圈,所述第一脉冲线圈的上方开设有第二固定卡扣,所述第二固定卡扣的上方固定安装有第二脉冲线圈。As a preferred technical solution, a copper ring is fixedly installed below the first fixed buckle, a first high-voltage power supply is provided on the left side of the launch tube, and an electromagnetic pulse driving acceleration assembly is fixedly installed at the end of the needle electrode. A first electromagnetic pressure regulating valve is fixedly installed inside the electromagnetic pulse driving acceleration component. A feed port is provided at the output end of the first electromagnetic pressure regulating valve. A first pulse coil is fixedly installed at the end of the feed port. , a second fixed buckle is provided above the first pulse coil, and a second pulse coil is fixedly installed above the second fixed buckle.

作为优选的技术方案,所述第一脉冲线圈的输入端固定安装有开关单元,所述开关单元的末端固定安装有储能单元,所述储能单元的下方固定安装有第二高压电源,所述发射管的输出端开设有连接柱,所述连接柱的下方固定安装有打印器。As a preferred technical solution, a switch unit is fixedly installed at the input end of the first pulse coil, an energy storage unit is fixedly installed at the end of the switch unit, and a second high-voltage power supply is fixedly installed below the energy storage unit. A connecting column is provided at the output end of the launch tube, and a printer is fixedly installed below the connecting column.

作为优选的技术方案,所述打印器的侧面固定安装有打印组件,所述打印组件的上方固定安装有传动座,所述传动座的上方开设有固定板,所述固定板的右侧固定安装有支撑架。As a preferred technical solution, a printing component is fixedly installed on the side of the printer, a transmission seat is fixedly installed above the printing component, a fixed plate is provided above the transmission seat, and the right side of the fixed plate is fixedly installed. Has a support stand.

作为优选的技术方案,所述支撑架的下方固定安装有传动柱,所述传动柱的侧面滑动连接有传动板。As a preferred technical solution, a transmission column is fixedly installed below the support frame, and a transmission plate is slidingly connected to the side of the transmission column.

作为优选的技术方案,所述传动柱的右侧转动连接有驱动轮,所述固定板的侧面固定安装有升降组件,所述升降组件的前端固定安装有电机。As a preferred technical solution, a driving wheel is rotatably connected to the right side of the transmission column, a lifting assembly is fixedly installed on the side of the fixed plate, and a motor is fixedly installed on the front end of the lifting assembly.

作为优选的技术方案,所述电机的输出端固定安装有螺纹杆,所述螺纹杆的侧面啮合连接有调节板。As a preferred technical solution, a threaded rod is fixedly installed at the output end of the motor, and an adjustment plate is engaged and connected to the side of the threaded rod.

作为优选的技术方案,所述调节板的右侧开设有滑杆,所述调节板的前端固定连接有工作台。As a preferred technical solution, a sliding rod is provided on the right side of the adjustment plate, and a workbench is fixedly connected to the front end of the adjustment plate.

作为优选的技术方案,所述工作台的下方固定安装有主控组件,所述主控组件的侧面开设有散热口,所述主控组件的前端开设有第一风机,所述第一风机的右侧开设有第一连接孔,所述第一连接孔的右侧固定安装有第二风机,所述第二风机的右侧开设有第二连接孔,所述第二连接孔的上方固定安装有压缩组件,所述压缩组件的上方固定安装有第二电磁调压阀。As a preferred technical solution, a main control assembly is fixedly installed below the workbench, a heat dissipation port is provided on the side of the main control assembly, and a first fan is provided at the front end of the main control assembly. A first connection hole is provided on the right side, a second fan is fixedly installed on the right side of the first connection hole, a second connection hole is provided on the right side of the second fan, and a second connection hole is fixedly installed above the second connection hole. There is a compression assembly, and a second electromagnetic pressure regulating valve is fixedly installed above the compression assembly.

作为优选的技术方案,所述空压机的上方固定连接有连接管道,所述连接管道的下方固定安装有制动器,所述主控组件的上方固定安装有第二支撑板,所述第二支撑板的右侧固定安装有第一支撑板,所述第一支撑板的右侧固定安装有第一连接架,所述第一连接架的后端固定连接有连接板,所述连接板的下方固定安装有固定扣,所述连接板的下方固定安装有第二连接架,所述第二连接架的侧面开设有安装孔。As a preferred technical solution, a connecting pipe is fixedly connected above the air compressor, a brake is fixedly installed below the connecting pipe, a second support plate is fixedly installed above the main control assembly, and the second support A first support plate is fixedly installed on the right side of the board, a first connecting frame is fixedly installed on the right side of the first supporting plate, a connecting plate is fixedly connected to the rear end of the first connecting frame, and the lower part of the connecting plate A fixing buckle is fixedly installed, a second connecting frame is fixedly installed below the connecting plate, and a mounting hole is provided on the side of the second connecting frame.

与现有技术相比,本发明的有益效果是:Compared with the prior art, the beneficial effects of the present invention are:

1、本发明通过在射流等离子发生组件的内部固定安装有进气管,进气管的输出端固定连接有发射管,发射管的内部开设有安装腔体,安装腔体的内部固定安装有针电极,针电极的侧面固定连接有橡胶塞,橡胶塞的侧面开设有第一固定卡扣,通过空气压缩机将空气通入发射管里,在铜环处,针电极对铜环放电,将空气电离产生等离子体,同时气流将等离子体喷出,通过金属粉末高速喷出的形式,可以对金属板表面进行打印镀层,也可以根据需求进行叠层工件的3D打印,同时还可以将金属粉末喷涂于非金属工件表面,开展电子电路的制造。1. In the present invention, an air inlet pipe is fixedly installed inside the jet plasma generating component, and the output end of the air inlet pipe is fixedly connected to a launch tube. An installation cavity is provided inside the launch tube, and a needle electrode is fixedly installed inside the installation cavity. A rubber plug is fixedly connected to the side of the needle electrode, and a first fixed buckle is provided on the side of the rubber plug. The air is passed into the launch tube through the air compressor. At the copper ring, the needle electrode discharges the copper ring to ionize the air to produce Plasma, and airflow will eject the plasma at the same time. Through the high-speed ejection of metal powder, coatings can be printed on the surface of metal plates. 3D printing of laminated workpieces can also be carried out according to needs. Metal powder can also be sprayed on non-metallic surfaces. On the surface of metal workpieces, electronic circuits are manufactured.

2、本发明通过在电磁脉冲驱动加速组件的内部固定安装有第一电磁调压阀,第一电磁调压阀的输出端开设有进料口,进料口的末端固定安装有第一脉冲线圈,第一脉冲线圈的上方开设有第二固定卡扣,第二固定卡扣的上方固定安装有第二脉冲线圈,通过储料单元在进料口出放出金属粉末,由电磁调节阀控制进料的速度,粉末落入发射管中,被金属射流推入电磁脉冲驱动加速器区域,该区域由多组独立的放电线圈组成,当开关单元导通,储能单元对线圈放电,产生瞬变的脉冲强磁场,对等离子体加速,等离子体在瞬变磁场中不断加速,同时推动着金属粉末一起加速,直至喷出发射管,与基体碰撞产生冶金结合,以高压(直流或交流或脉冲)电源击穿空气放电产生等离子体,避免金属丝电爆炸产生的噪音影响,且通过调节电压的幅值、(交流或脉冲)频率和气流等参数实现对等离子体的调控,实现对金属粉末喷射初始条件的控制,减少金属丝电爆炸带来的噪音与安全隐患,避免等离子体在轨道高速运动中对轨道产生烧蚀。2. In the present invention, a first electromagnetic pressure regulating valve is fixedly installed inside the electromagnetic pulse driving acceleration component. The output end of the first electromagnetic pressure regulating valve is provided with a feed port, and the end of the feed port is fixedly installed with a first pulse coil. , a second fixed buckle is provided above the first pulse coil, and a second pulse coil is fixedly installed above the second fixed buckle. The metal powder is discharged from the feed port through the storage unit, and the electromagnetic regulating valve controls the feeding. At a speed of A strong magnetic field accelerates the plasma. The plasma continuously accelerates in the transient magnetic field, and at the same time pushes the metal powder to accelerate together until it is ejected from the launch tube, collides with the matrix to produce metallurgical bonding, and is struck by high-voltage (DC or AC or pulse) power. Plasma is generated by discharging through the air to avoid the noise effect caused by the electric explosion of metal wires. The plasma is controlled by adjusting parameters such as voltage amplitude, (AC or pulse) frequency and air flow, and the initial conditions of metal powder injection are controlled. Control, reduce noise and safety hazards caused by electric explosions of metal wires, and avoid plasma ablation of the track during high-speed orbital movement.

3、本发明通过主控组件的侧面开设有散热口,主控组件的前端开设有第一风机,第一风机的右侧开设有第一连接孔,第一连接孔的右侧固定安装有第二风机,由监测组件控制与监测参数,控制包括射流等离子体发生器部分与电磁脉冲驱动加速器部分的高压电源、空压机气流阀门、开关单元、进料口流速等,监测包括气体流量流速、放电电压、放电电流、金属粉末储料情况等关键参数,同时带动风机对装置进行降温,可通过放电参数的设置对等离子体加速过程进行精准控制。3. In the present invention, a heat dissipation port is provided on the side of the main control component, a first fan is provided on the front end of the main control component, a first connection hole is provided on the right side of the first fan, and a third connection hole is fixedly installed on the right side of the first connection hole. The second fan is controlled and monitored by the monitoring component. The control includes the high-voltage power supply of the jet plasma generator part and the electromagnetic pulse drive accelerator part, air compressor air flow valve, switch unit, feed port flow rate, etc. Monitoring includes gas flow rate, Key parameters such as discharge voltage, discharge current, and metal powder storage conditions are also used to drive the fan to cool down the device. The plasma acceleration process can be precisely controlled by setting the discharge parameters.

附图说明Description of drawings

图1为本发明的微电子电路打印装置主体结构示意图;Figure 1 is a schematic diagram of the main structure of the microelectronic circuit printing device of the present invention;

图2为本发明的外形组件结构示意图;Figure 2 is a schematic structural diagram of the appearance component of the present invention;

图3为本发明的射流等离子发生组件结构示意图;Figure 3 is a schematic structural diagram of the jet plasma generating assembly of the present invention;

图4为本发明的电磁脉冲驱动加速组件结构示意图;Figure 4 is a schematic structural diagram of the electromagnetic pulse drive acceleration component of the present invention;

图5为本发明的打印组件结构示意图;Figure 5 is a schematic structural diagram of the printing assembly of the present invention;

图6为本发明的升降组件结构示意图;Figure 6 is a schematic structural diagram of the lifting assembly of the present invention;

图7为本发明的主控组件结构示意图;Figure 7 is a schematic structural diagram of the main control component of the present invention;

图8为本发明的压缩组件结构示意图。Figure 8 is a schematic structural diagram of the compression component of the present invention.

图中:1、微电子电路打印装置主体;11、固定扣;12、连接板;13、第一连接架;14、第一支撑板;15、第二支撑板;16、第二连接架;17、安装孔;2、射流等离子发生组件;21、进气管;22、安装腔体;23、针电极;24、橡胶塞;25、发射管;26、铜环;27、第一固定卡扣;28、第一高压电源;3、电磁脉冲驱动加速组件;31、第二高压电源;32、开关单元;33、储能单元;34、第一脉冲线圈;35、第二固定卡扣;36、第二脉冲线圈;37、第一电磁调压阀;38、进料口;4、打印组件;41、传动座;42、固定板;43、支撑架;44、连接柱;45、传动柱;46、传动板;47、驱动轮;48、打印器;5、升降组件;51、滑杆;52、螺纹杆;53、调节板;54、工作台;55、电机;6、主控组件;61、第一风机;62、散热口;63、第一连接孔;64、第二风机;65、第二连接孔;7、压缩组件;71、第二电磁调压阀;72、连接管道;73、制动器;74、空压机。In the figure: 1. Main body of the microelectronic circuit printing device; 11. Fixed buckle; 12. Connecting plate; 13. First connecting frame; 14. First supporting plate; 15. Second supporting plate; 16. Second connecting frame; 17. Installation hole; 2. Jet plasma generation component; 21. Air inlet pipe; 22. Installation cavity; 23. Needle electrode; 24. Rubber plug; 25. Launch tube; 26. Copper ring; 27. First fixing buckle ; 28. First high-voltage power supply; 3. Electromagnetic pulse drive acceleration component; 31. Second high-voltage power supply; 32. Switching unit; 33. Energy storage unit; 34. First pulse coil; 35. Second fixed buckle; 36 , second pulse coil; 37. first electromagnetic pressure regulating valve; 38. feed port; 4. printing component; 41. transmission seat; 42. fixed plate; 43. support frame; 44. connecting column; 45. transmission column ; 46. Transmission plate; 47. Driving wheel; 48. Printer; 5. Lifting component; 51. Slider; 52. Threaded rod; 53. Adjustment plate; 54. Workbench; 55. Motor; 6. Main control component ; 61. First fan; 62. Heat dissipation port; 63. First connection hole; 64. Second fan; 65. Second connection hole; 7. Compression component; 71. Second electromagnetic pressure regulating valve; 72. Connecting pipe ; 73. Brake; 74. Air compressor.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

除非另有定义,本文所使用的所有的技术和科学术语与属于本发明的技术领域的技术人员通常理解的含义相同。本文中在本发明的说明书中所使用的术语只是为了描述具体的实施例的目的,不是旨在于限制本发明。本文所使用的术语“及/或”包括一个或多个相关的所列项目的任意的和所有的组合。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which the invention belongs. The terminology used herein in the description of the invention is for the purpose of describing specific embodiments only and is not intended to limit the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

请参阅图1至图8,本发明提供一种技术方案:Referring to Figures 1 to 8, the present invention provides a technical solution:

一种等离子体射流驱动的微电子电路3D打印装置,包括微电子电路打印装置主体1,其特征在于:微电子电路打印装置主体1的上方固定安装有射流等离子发生组件2,射流等离子发生组件2的内部固定安装有进气管21,进气管21的输出端固定连接有发射管25,发射管25的内部开设有安装腔体22,安装腔体22的内部固定安装有针电极23,针电极23的侧面固定连接有橡胶塞24,橡胶塞24的侧面开设有第一固定卡扣27,第一固定卡扣27的下方固定安装有铜环26,发射管25的左侧开设有第一高压电源28,针电极23的末端固定安装有电磁脉冲驱动加速组件3,电磁脉冲驱动加速组件3的内部固定安装有第一电磁调压阀37,第一电磁调压阀37的输出端开设有进料口38,进料口38的末端固定安装有第一脉冲线圈34,第一脉冲线圈34的上方开设有第二固定卡扣35,第二固定卡扣35的上方固定安装有第二脉冲线圈36,第一脉冲线圈34的输入端固定安装有开关单元32,开关单元32的末端固定安装有储能单元33,储能单元33的下方固定安装有第二高压电源31,发射管25的输出端开设有连接柱44,连接柱44的下方固定安装有打印器48。A plasma jet-driven microelectronic circuit 3D printing device, including a microelectronic circuit printing device main body 1, which is characterized in that: a jet plasma generating assembly 2 is fixedly installed above the microelectronic circuit printing device main body 1, and the jet plasma generating assembly 2 An air inlet pipe 21 is fixedly installed inside, and the output end of the air inlet pipe 21 is fixedly connected to a launch tube 25. An installation cavity 22 is provided inside the launch tube 25, and a needle electrode 23 is fixedly installed inside the installation cavity 22. The needle electrode 23 A rubber plug 24 is fixedly connected to the side of the rubber plug 24. A first fixed buckle 27 is provided on the side of the rubber plug 24. A copper ring 26 is fixedly installed below the first fixed buckle 27. A first high-voltage power supply is provided on the left side of the launch tube 25. 28. The electromagnetic pulse driving acceleration assembly 3 is fixedly installed at the end of the needle electrode 23. The first electromagnetic pressure regulating valve 37 is fixedly installed inside the electromagnetic pulse driving acceleration assembly 3. The output end of the first electromagnetic pressure regulating valve 37 is provided with a feed. The first pulse coil 34 is fixedly installed at the end of the feed port 38. A second fixed buckle 35 is provided above the first pulse coil 34. A second pulse coil 36 is fixedly installed above the second fixed buckle 35. , the switch unit 32 is fixedly installed at the input end of the first pulse coil 34, the energy storage unit 33 is fixedly installed at the end of the switch unit 32, the second high-voltage power supply 31 is fixedly installed below the energy storage unit 33, and the output end of the launch tube 25 A connecting column 44 is provided, and a printer 48 is fixedly installed below the connecting column 44 .

需要补充的是,通过空压机74将空气通入发射管25里,在铜环26处,针电极23对铜环26放电,将空气电离产生等离子体,同时气流将等离子体喷出,通过金属粉末高速喷出的形式,可以对金属板表面进行打印镀层,也可以根据需求进行叠层工件的打印,同时还可以将金属粉末喷涂于非金属工件表面,开展电子电路的制造。It should be added that air is introduced into the launch tube 25 through the air compressor 74. At the copper ring 26, the needle electrode 23 discharges the copper ring 26 to ionize the air to generate plasma. At the same time, the air flow ejects the plasma through In the form of high-speed ejection of metal powder, coatings can be printed on the surface of metal plates, and laminated workpieces can be printed according to needs. Metal powder can also be sprayed on the surface of non-metal workpieces to manufacture electronic circuits.

作为本实施例的优选,打印器48的侧面固定安装有打印组件4,打印组件4的上方固定安装有传动座41,传动座41的上方开设有固定板42,固定板42的右侧固定安装有支撑架43,支撑架43的下方固定安装有传动柱45,传动柱45的侧面滑动连接有传动板46,传动柱45的右侧转动连接有驱动轮47,固定板42的侧面固定安装有升降组件5,升降组件5的前端固定安装有电机55,电机55的输出端固定安装有螺纹杆52,螺纹杆52的侧面啮合连接有调节板53。As a preferred embodiment of this embodiment, the printing assembly 4 is fixedly installed on the side of the printer 48, and the transmission base 41 is fixedly installed above the printing assembly 4. A fixing plate 42 is provided above the transmission base 41, and the right side of the fixing plate 42 is fixedly installed. There is a support frame 43, a transmission column 45 is fixedly installed below the support frame 43, a transmission plate 46 is slidingly connected to the side of the transmission column 45, a driving wheel 47 is rotatably connected to the right side of the transmission column 45, and a fixed plate 42 is fixedly installed on the side of the transmission column 45. The lifting assembly 5 has a motor 55 fixedly installed at the front end, a threaded rod 52 fixedly installed at the output end of the motor 55, and an adjusting plate 53 engaged and connected to the side of the threaded rod 52.

值得说明的是,通过储料单元在进料口38出放出金属粉末,由第一电磁调压阀37控制进料的速度,粉末落入发射管25中,被金属射流推入电磁脉冲驱动加速器区域,该区域由多组独立的放电线圈组成,当开关单元32导通,储能单元33对第一脉冲线圈34放电,产生瞬变的脉冲强磁场,对等离子体加速,等离子体在瞬变磁场中不断加速,同时推动着金属粉末一起加速,直至喷出发射管25,与基体碰撞产生冶金结合,以高压(直流或交流或脉冲)电源击穿空气放电产生等离子体,避免金属丝电爆炸产生的噪音影响,且通过调节电压的幅值、(交流或脉冲)频率和气流等参数实现对等离子体的调控,实现对金属粉末喷射初始条件的控制。It is worth mentioning that the metal powder is discharged from the feed port 38 through the storage unit, and the speed of the feed is controlled by the first electromagnetic pressure regulating valve 37. The powder falls into the launch tube 25 and is pushed into the electromagnetic pulse driven accelerator by the metal jet. This area is composed of multiple groups of independent discharge coils. When the switch unit 32 is turned on, the energy storage unit 33 discharges the first pulse coil 34 to generate a transient strong pulse magnetic field, which accelerates the plasma. The plasma changes in the transient state. It is continuously accelerated in the magnetic field, and at the same time, the metal powder is pushed to accelerate together until it is ejected from the launch tube 25, and collides with the substrate to produce metallurgical bonding. The high-voltage (DC or AC or pulse) power supply is used to break down the air and discharge to generate plasma to avoid electric explosion of the metal wire. The noise generated is affected, and the plasma is controlled by adjusting parameters such as voltage amplitude, (AC or pulse) frequency, and air flow to control the initial conditions of metal powder injection.

作为本实施例的优选,调节板53的右侧开设有滑杆51,调节板53的前端固定连接有工作台54,工作台54的下方固定安装有主控组件6,主控组件6的侧面开设有散热口62,主控组件6的前端开设有第一风机61,第一风机61的右侧开设有第一连接孔63,第一连接孔63的右侧固定安装有第二风机64,第二风机64的右侧开设有第二连接孔65,第二连接孔65的上方固定安装有压缩组件7,压缩组件7的上方固定安装有第二电磁调压阀71,第二电磁调压阀71的下方固定连接有空压机74,空压机74的上方固定连接有连接管道72,连接管道72的下方固定安装有制动器73,主控组件6的上方固定安装有第二支撑板15,第二支撑板15的右侧固定安装有第一支撑板14,第一支撑板14的右侧固定安装有第一连接架13,第一连接架13的后端固定连接有连接板12,连接板12的下方固定安装有固定扣11,连接板12的下方固定安装有第二连接架16,第二连接架16的侧面开设有安装孔17。As a preferred embodiment of this embodiment, a sliding rod 51 is provided on the right side of the adjusting plate 53. The front end of the adjusting plate 53 is fixedly connected to a workbench 54. The main control assembly 6 is fixedly installed below the workbench 54. The side of the main control assembly 6 A heat dissipation port 62 is provided, a first fan 61 is provided at the front end of the main control component 6, a first connection hole 63 is provided on the right side of the first fan 61, and a second fan 64 is fixedly installed on the right side of the first connection hole 63. A second connection hole 65 is provided on the right side of the second fan 64. A compression assembly 7 is fixedly installed above the second connection hole 65. A second electromagnetic pressure regulating valve 71 is fixedly installed above the compression assembly 7. The second electromagnetic pressure regulating valve 71 is fixedly installed above the compression assembly 7. An air compressor 74 is fixedly connected below the valve 71 , a connecting pipe 72 is fixedly connected above the air compressor 74 , a brake 73 is fixedly installed below the connecting pipe 72 , and a second support plate 15 is fixedly installed above the main control assembly 6 , the first support plate 14 is fixedly installed on the right side of the second support plate 15, the first connecting frame 13 is fixedly installed on the right side of the first supporting plate 14, and the connecting plate 12 is fixedly connected to the rear end of the first connecting frame 13, A fixing buckle 11 is fixedly installed below the connecting plate 12 , a second connecting frame 16 is fixedly installed below the connecting plate 12 , and a mounting hole 17 is provided on the side of the second connecting frame 16 .

具体使用过程中,通过以加速第一脉冲线圈34的形式替代轨道加速方式,对等离子体实现非接触式加速,等离子体推动金属粉末高速运动,同样适用于导电性不强的金属,且避免等离子体在轨道高速运动中对轨道产生烧蚀,可提高装置的服役寿命,同时等离子体的产生与其加速为两个独立的装置,可通过放电参数的设置对等离子体加速过程进行精准控制。During specific use, the orbital acceleration method is replaced by accelerating the first pulse coil 34 to achieve non-contact acceleration of the plasma. The plasma drives the metal powder to move at high speed, which is also suitable for metals with weak conductivity and avoids plasma The ablation of the orbit by the body during the high-speed motion of the orbit can improve the service life of the device. At the same time, the generation of plasma and its acceleration are two independent devices. The plasma acceleration process can be accurately controlled by setting the discharge parameters.

本发明的一种等离子体射流驱动的微电子电路3D打印装置在使用时,首先通过空压机74将空气通入发射管25里,在铜环26处,针电极23对铜环26放电,将空气电离产生等离子体,同时气流将等离子体喷出,通过金属粉末高速喷出的形式,可以对金属板表面进行打印镀层,也可以根据需求进行叠层工件的打印,同时还可以将金属粉末喷涂于非金属工件表面,开展电子电路的制造,通过储料单元在进料口38出放出金属粉末,由第一电磁调压阀37控制进料的速度,粉末落入发射管25中,被金属射流推入电磁脉冲驱动加速器区域,该区域由多组独立的放电线圈组成,当开关单元32导通,储能单元33对第一脉冲线圈34放电,产生瞬变的脉冲强磁场,对等离子体加速,等离子体在瞬变磁场中不断加速,同时推动着金属粉末一起加速,直至喷出发射管25,与基体碰撞产生冶金结合,以高压(直流或交流或脉冲)电源击穿空气放电产生等离子体,避免金属丝电爆炸产生的噪音影响,且通过调节电压的幅值、(交流或脉冲)频率和气流等参数实现对等离子体的调控,实现对金属粉末喷射初始条件的控制,通过以加速第一脉冲线圈34的形式替代轨道加速方式,对等离子体实现非接触式加速,等离子体推动金属粉末高速运动,同样适用于导电性不强的金属,且避免等离子体在轨道高速运动中对轨道产生烧蚀,可提高装置的服役寿命,同时等离子体的产生与其加速为两个独立的装置,可通过放电参数的设置对等离子体加速过程进行精准控制。When the plasma jet-driven microelectronic circuit 3D printing device of the present invention is used, air is first introduced into the launch tube 25 through the air compressor 74. At the copper ring 26, the needle electrode 23 discharges the copper ring 26. The air is ionized to generate plasma, and the air flow ejects the plasma at a high speed. Through the high-speed ejection of metal powder, coatings can be printed on the surface of the metal plate, and laminated workpieces can also be printed according to needs. At the same time, the metal powder can be Spray on the surface of non-metallic workpieces to manufacture electronic circuits. The metal powder is discharged from the feed port 38 through the storage unit. The first electromagnetic pressure regulating valve 37 controls the feed speed. The powder falls into the launch tube 25 and is The metal jet is pushed into the electromagnetic pulse driven accelerator area, which is composed of multiple sets of independent discharge coils. When the switch unit 32 is turned on, the energy storage unit 33 discharges the first pulse coil 34 to generate a transient strong pulse magnetic field, which affects the plasma. Body acceleration, the plasma continuously accelerates in the transient magnetic field, and at the same time pushes the metal powder to accelerate together, until it is ejected from the launch tube 25, collides with the substrate to produce metallurgical bonding, and is generated by high-voltage (DC or AC or pulse) power supply breakdown in the air. Plasma avoids the noise effects caused by electric explosions of metal wires, and controls the plasma by adjusting parameters such as voltage amplitude, (AC or pulse) frequency, and air flow to control the initial conditions of metal powder injection. The form of accelerating the first pulse coil 34 replaces the orbital acceleration method to achieve non-contact acceleration of the plasma. The plasma drives the metal powder to move at high speed. It is also suitable for metals with weak conductivity and avoids the plasma from damaging the metal during the high-speed orbital movement. The ablation of the track can improve the service life of the device. At the same time, the generation of plasma and its acceleration are two independent devices. The plasma acceleration process can be precisely controlled by setting the discharge parameters.

以上显示和描述了本发明的基本原理、主要特征和本发明的优点。本行业的技术人员应该了解,本发明不受上述实施例的限制,上述实施例和说明书中描述的仅为本发明的优选例,并不用来限制本发明,在不脱离本发明精神和范围的前提下,本发明还会有各种变化和改进,这些变化和改进都落入要求保护的本发明范围内。本发明要求保护范围由所附的权利要求书及其等效物界定。The basic principles, main features and advantages of the present invention have been shown and described above. Those skilled in the industry should understand that the present invention is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the present invention and are not used to limit the present invention. Under the premise, there will be various changes and improvements in the present invention, and these changes and improvements all fall within the scope of the claimed invention. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims (10)

1.一种等离子体射流驱动的微电子电路3D打印装置,包括微电子电路打印装置主体(1),其特征在于:所述微电子电路打印装置主体(1)的上方固定安装有射流等离子发生组件(2),所述射流等离子发生组件(2)的内部固定安装有进气管(21),所述进气管(21)的输出端固定连接有发射管(25),所述发射管(25)的内部开设有安装腔体(22),所述安装腔体(22)的内部固定安装有针电极(23),所述针电极(23)的侧面固定连接有橡胶塞(24),所述橡胶塞(24)的侧面开设有第一固定卡扣(27)。1. A plasma jet-driven microelectronic circuit 3D printing device, comprising a microelectronic circuit printing device main body (1), characterized in that: a jet plasma generator is fixedly installed above the microelectronic circuit printing device main body (1) Component (2). An air inlet pipe (21) is fixedly installed inside the jet plasma generating assembly (2). The output end of the air inlet pipe (21) is fixedly connected with a launch tube (25). The launch tube (25) ) has an installation cavity (22) inside, a needle electrode (23) is fixedly installed inside the installation cavity (22), and a rubber plug (24) is fixedly connected to the side of the needle electrode (23), so A first fixing buckle (27) is provided on the side of the rubber plug (24). 2.如权利要求1所述的一种等离子体射流驱动的微电子电路3D打印装置,其特征在于:所述第一固定卡扣(27)的下方固定安装有铜环(26),所述发射管(25)的左侧开设有第一高压电源(28),所述针电极(23)的末端固定安装有电磁脉冲驱动加速组件(3),所述电磁脉冲驱动加速组件(3)的内部固定安装有第一电磁调压阀(37),所述第一电磁调压阀(37)的输出端开设有进料口(38),所述进料口(38)的末端固定安装有第一脉冲线圈(34),所述第一脉冲线圈(34)的上方开设有第二固定卡扣(35),所述第二固定卡扣(35)的上方固定安装有第二脉冲线圈(36)。2. A plasma jet-driven microelectronic circuit 3D printing device according to claim 1, characterized in that: a copper ring (26) is fixedly installed below the first fixed buckle (27), and the A first high-voltage power supply (28) is provided on the left side of the launch tube (25), and an electromagnetic pulse driving acceleration assembly (3) is fixedly installed at the end of the needle electrode (23). The electromagnetic pulse driving acceleration assembly (3) A first electromagnetic pressure regulating valve (37) is fixedly installed inside. The output end of the first electromagnetic pressure regulating valve (37) is provided with a feed port (38). The end of the feed port (38) is fixedly installed with a A first pulse coil (34), a second fixed buckle (35) is provided above the first pulse coil (34), and a second pulse coil (35) is fixedly installed above the second fixed buckle (35) 36). 3.如权利要求2所述的一种等离子体射流驱动的微电子电路3D打印装置,其特征在于:所述第一脉冲线圈(34)的输入端固定安装有开关单元(32),所述开关单元(32)的末端固定安装有储能单元(33),所述储能单元(33)的下方固定安装有第二高压电源(31),所述发射管(25)的输出端开设有连接柱(44),所述连接柱(44)的下方固定安装有打印器(48)。3. A plasma jet-driven microelectronic circuit 3D printing device according to claim 2, characterized in that: a switch unit (32) is fixedly installed at the input end of the first pulse coil (34), and the An energy storage unit (33) is fixedly installed at the end of the switch unit (32), a second high-voltage power supply (31) is fixedly installed below the energy storage unit (33), and the output end of the launch tube (25) is provided with The connecting column (44) has a printer (48) fixedly installed below the connecting column (44). 4.如权利要求3所述的一种等离子体射流驱动的微电子电路3D打印装置,其特征在于:所述打印器(48)的侧面固定安装有打印组件(4),所述打印组件(4)的上方固定安装有传动座(41),所述传动座(41)的上方开设有固定板(42),所述固定板(42)的右侧固定安装有支撑架(43)。4. A plasma jet-driven microelectronic circuit 3D printing device as claimed in claim 3, characterized in that: a printing component (4) is fixedly installed on the side of the printer (48), and the printing component (4) 4), a transmission seat (41) is fixedly installed above the transmission seat (41), a fixed plate (42) is provided above the transmission seat (41), and a support frame (43) is fixedly installed on the right side of the fixed plate (42). 5.如权利要求4所述的一种等离子体射流驱动的微电子电路3D打印装置,其特征在于:所述支撑架(43)的下方固定安装有传动柱(45),所述传动柱(45)的侧面滑动连接有传动板(46)。5. A plasma jet-driven microelectronic circuit 3D printing device as claimed in claim 4, characterized in that: a transmission column (45) is fixedly installed below the support frame (43), and the transmission column (45) The side of 45) is slidingly connected with a transmission plate (46). 6.如权利要求5所述的一种等离子体射流驱动的微电子电路3D打印装置,其特征在于:所述传动柱(45)的右侧转动连接有驱动轮(47),所述固定板(42)的侧面固定安装有升降组件(5),所述升降组件(5)的前端固定安装有电机(55)。6. A plasma jet-driven microelectronic circuit 3D printing device according to claim 5, characterized in that: a driving wheel (47) is rotatably connected to the right side of the transmission column (45), and the fixed plate A lifting assembly (5) is fixedly installed on the side of (42), and a motor (55) is fixedly installed on the front end of the lifting assembly (5). 7.如权利要求6所述的一种等离子体射流驱动的微电子电路3D打印装置,其特征在于:所述电机(55)的输出端固定安装有螺纹杆(52),所述螺纹杆(52)的侧面啮合连接有调节板(53)。7. A plasma jet-driven microelectronic circuit 3D printing device as claimed in claim 6, characterized in that: a threaded rod (52) is fixedly installed at the output end of the motor (55), and the threaded rod (52) is fixedly installed on the output end of the motor (55). The side of 52) is engaged and connected with an adjusting plate (53). 8.如权利要求7所述的一种等离子体射流驱动的微电子电路3D打印装置,其特征在于:所述调节板(53)的右侧开设有滑杆(51),所述调节板(53)的前端固定连接有工作台(54)。8. A plasma jet-driven microelectronic circuit 3D printing device as claimed in claim 7, characterized in that: a slide bar (51) is provided on the right side of the adjustment plate (53), and the adjustment plate (53) The front end of 53) is fixedly connected with a workbench (54). 9.如权利要求8所述的一种等离子体射流驱动的微电子电路3D打印装置,其特征在于:所述工作台(54)的下方固定安装有主控组件(6),所述主控组件(6)的侧面开设有散热口(62),所述主控组件(6)的前端开设有第一风机(61),所述第一风机(61)的右侧开设有第一连接孔(63),所述第一连接孔(63)的右侧固定安装有第二风机(64),所述第二风机(64)的右侧开设有第二连接孔(65),所述第二连接孔(65)的上方固定安装有压缩组件(7),所述压缩组件(7)的上方固定安装有第二电磁调压阀(71),所述第二电磁调压阀(71)的下方固定连接有空压机(74);9. A plasma jet-driven microelectronic circuit 3D printing device according to claim 8, characterized in that: a main control assembly (6) is fixedly installed below the workbench (54), and the main control assembly (6) is fixedly installed below the workbench (54). A heat dissipation port (62) is provided on the side of the component (6), a first fan (61) is provided on the front end of the main control component (6), and a first connection hole is provided on the right side of the first fan (61). (63), a second fan (64) is fixedly installed on the right side of the first connection hole (63), and a second connection hole (65) is provided on the right side of the second fan (64). A compression assembly (7) is fixedly installed above the two connection holes (65), and a second electromagnetic pressure regulating valve (71) is fixedly installed above the compression assembly (7). The second electromagnetic pressure regulating valve (71) An air compressor (74) is fixedly connected below; 所述空压机(74)的上方固定连接有连接管道(72),所述连接管道(72)的下方固定安装有制动器(73),所述主控组件(6)的上方固定安装有第二支撑板(15),所述第二支撑板(15)的右侧固定安装有第一支撑板(14),所述第一支撑板(14)的右侧固定安装有第一连接架(13),所述第一连接架(13)的后端固定连接有连接板(12),所述连接板(12)的下方固定安装有固定扣(11),所述连接板(12)的下方固定安装有第二连接架(16),所述第二连接架(16)的侧面开设有安装孔(17)。A connecting pipe (72) is fixedly connected above the air compressor (74), a brake (73) is fixedly installed below the connecting pipe (72), and a third brake (73) is fixedly installed above the main control assembly (6). Two support plates (15), a first support plate (14) is fixedly installed on the right side of the second support plate (15), and a first connecting frame (14) is fixedly installed on the right side of the first support plate (14). 13), the rear end of the first connecting frame (13) is fixedly connected with a connecting plate (12), and a fixing buckle (11) is fixedly installed below the connecting plate (12). A second connecting frame (16) is fixedly installed below, and a mounting hole (17) is provided on the side of the second connecting frame (16). 10.一种等离子体射流驱动的微电子电路3D打印工作方法,其特征在于:通过以加速第一脉冲线圈的形式替代轨道加速方式,对等离子体实现非接触式加速,等离子体推动金属粉末高速运动,同样适用于导电性不强的金属,且避免等离子体在轨道高速运动中对轨道产生烧蚀,可提高装置的服役寿命,同时等离子体的产生与其加速为两个独立的装置,可通过放电参数的设置对等离子体加速过程进行精准控制;使用时,首先通过空压机将空气通入发射管里,在铜环处,针电极对铜环放电,将空气电离产生等离子体,同时气流将等离子体喷出,通过金属粉末高速喷出的形式,可以对金属板表面进行打印镀层,也可以根据需求进行叠层工件的打印,同时还可以将金属粉末喷涂于非金属工件表面,开展电子电路的制造,通过储料单元在进料口出放出金属粉末,由第一电磁调压阀控制进料的速度,粉末落入发射管中,被金属射流推入电磁脉冲驱动加速器区域,该区域由多组独立的放电线圈组成,当开关单元导通,储能单元对第一脉冲线圈放电,产生瞬变的脉冲强磁场,对等离子体加速,等离子体在瞬变磁场中不断加速,同时推动着金属粉末一起加速,直至喷出发射管,与基体碰撞产生冶金结合,以高压电源击穿空气放电产生等离子体,避免金属丝电爆炸产生的噪音影响,且通过调节电压的幅值、频率和气流等参数实现对等离子体的调控,实现对金属粉末喷射初始条件的控制,通过以加速第一脉冲线圈的形式替代轨道加速方式,对等离子体实现非接触式加速,等离子体推动金属粉末高速运动,同样适用于导电性不强的金属,且避免等离子体在轨道高速运动中对轨道产生烧蚀。10. A working method for 3D printing of microelectronic circuits driven by plasma jet, which is characterized by: by replacing the orbital acceleration method with the form of accelerating the first pulse coil, non-contact acceleration of the plasma is achieved, and the plasma drives the metal powder at high speed Movement is also suitable for metals with low conductivity, and avoids plasma ablation of the orbit during high-speed orbital motion, which can improve the service life of the device. At the same time, the generation of plasma and its acceleration are two independent devices, which can be The setting of discharge parameters accurately controls the plasma acceleration process; when used, air is first introduced into the launch tube through an air compressor, and at the copper ring, the needle electrode discharges the copper ring to ionize the air to generate plasma, and at the same time the air flow Plasma is ejected and metal powder is ejected at high speed to print coatings on the surface of metal plates. It can also print laminated workpieces according to needs. At the same time, metal powder can also be sprayed on the surface of non-metal workpieces to carry out electronic work. In the manufacturing of circuits, metal powder is discharged from the feed port through the storage unit. The speed of the feed is controlled by the first electromagnetic pressure regulating valve. The powder falls into the launch tube and is pushed into the electromagnetic pulse driven accelerator area by the metal jet. This area It is composed of multiple groups of independent discharge coils. When the switch unit is turned on, the energy storage unit discharges the first pulse coil, generating a transient pulse strong magnetic field to accelerate the plasma. The plasma continues to accelerate in the transient magnetic field and simultaneously promotes It accelerates together with the metal powder until it ejects the launch tube, and collides with the substrate to produce metallurgical bonding. The high-voltage power supply breaks down the air and discharges to generate plasma, avoiding the noise impact caused by the electric explosion of the metal wire, and by adjusting the amplitude, frequency and voltage of the voltage. Parameters such as airflow control the plasma and control the initial conditions of metal powder injection. By replacing the orbital acceleration method with the accelerating first pulse coil, non-contact acceleration of the plasma is achieved, and the plasma drives the metal powder to move at high speed. , also suitable for metals with low electrical conductivity, and to avoid plasma ablation of the orbit during high-speed orbital motion.
CN202311095228.9A 2023-08-29 2023-08-29 Plasma jet driven microelectronic circuit 3D printing device and working method Pending CN117226120A (en)

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CN113580568A (en) * 2021-07-29 2021-11-02 南京工业大学 Plasma nanometer vibration material disk device
CN114012110A (en) * 2021-10-29 2022-02-08 哈尔滨阿尔特机器人技术有限公司 Electromagnetic acceleration in-situ impact laser additive manufacturing device and method
CN220659227U (en) * 2023-08-29 2024-03-26 智磁(重庆)科技有限责任公司 A plasma jet driven microelectronic circuit 3D printing device

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Publication number Priority date Publication date Assignee Title
CN1267242A (en) * 1997-06-20 2000-09-20 德克萨斯州立大学董事会 Method and apparatus for electromagnetic powder deposition
US20180342379A1 (en) * 2017-05-23 2018-11-29 Starfire Industries Llc Atmospheric cold plasma jet coating and surface treatment
CN113580568A (en) * 2021-07-29 2021-11-02 南京工业大学 Plasma nanometer vibration material disk device
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