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CN117259347A - Beam cleaning structure and control method - Google Patents

Beam cleaning structure and control method Download PDF

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Publication number
CN117259347A
CN117259347A CN202311531107.4A CN202311531107A CN117259347A CN 117259347 A CN117259347 A CN 117259347A CN 202311531107 A CN202311531107 A CN 202311531107A CN 117259347 A CN117259347 A CN 117259347A
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CN
China
Prior art keywords
cleaning
mirror
wedge
assembly
dichroic mirror
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Pending
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CN202311531107.4A
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Chinese (zh)
Inventor
康民强
唐军
强永发
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Laser Fusion Research Center China Academy of Engineering Physics
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Laser Fusion Research Center China Academy of Engineering Physics
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Priority to CN202311531107.4A priority Critical patent/CN117259347A/en
Publication of CN117259347A publication Critical patent/CN117259347A/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042Automatically aligning the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046Automatically focusing the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning In General (AREA)

Abstract

The invention provides a light beam cleaning structure and a control method, comprising the following steps: a cleaning assembly, the cleaning assembly comprising: the laser light source is used for emitting light beams; the light spot assembly comprises a third wedge mirror and a fourth wedge mirror which are arranged at intervals; the light spot assembly is used for receiving the light beam emitted by the laser light source and forming an annular cleaning light spot for cleaning the inner wall surface of the accommodating cavity; the focusing module is positioned between the laser light source and the light spot assembly to adjust the focal length of the light beam entering the light spot assembly; the wedge mirror assembly is used for enabling the cleaning light beam to enter the accommodating cavity after being refracted through the wedge mirror assembly and irradiate the inner wall surface of the accommodating cavity; the wedge lens assembly comprises a first wedge lens and a second wedge lens; the wedge mirror assembly is connected with an output shaft of the driving motor to drive the wedge mirror assembly to rotate, so that the irradiation direction of the cleaning light beam passing through the wedge mirror assembly is adjusted. The beam cleaning structure and the control method solve the technical problem that the inner wall of the container is difficult to clean in the related technology.

Description

一种光束清洗结构及控制方法A beam cleaning structure and control method

技术领域Technical field

本发明涉及容器检测技术领域,具体涉及一种光束清洗结构及控制方法。。The invention relates to the technical field of container detection, and in particular to a beam cleaning structure and a control method. .

背景技术Background technique

六氟化铀是一种基础核材料,被广泛用于铀的浓缩和周转等环节。随着核电产业的迅猛发展,六氟化铀产量逐年增加,其六氟化铀容器的使用量和处理任务量也快速増加。六氟化铀容器一般为密闭空心容器,在容器的两端分别有一个“直角阀”和“堵头”作为容器的入口。Uranium hexafluoride is a basic nuclear material and is widely used in uranium enrichment and turnover. With the rapid development of the nuclear power industry, the production of uranium hexafluoride has increased year by year, and the usage and processing tasks of its uranium hexafluoride containers have also increased rapidly. Uranium hexafluoride containers are generally closed hollow containers, with a "right angle valve" and a "plug" at both ends of the container as the inlet of the container.

根据行业标准的规定,当存在“容器的定期检查和实验;空容器的残存量超标;容器装料品种(丰度)改变;容器的维修;容器表面辐射剂量率过高”等任何一种情况时,均需要对六氟化铀容器进行清洗并检验,检验合格者重复使用,不合格的进行报废并送暂存。According to industry standards, when there is any situation such as "regular inspection and experimentation of containers; the remaining amount of empty containers exceeding the standard; changes in the variety (abundance) of container fillings; maintenance of containers; excessive radiation dose rate on the surface of the container", etc. Every time, uranium hexafluoride containers need to be cleaned and inspected. Those that pass the inspection are reused, and those that fail are scrapped and sent to temporary storage.

对清洗后的六氟化铀容器进行检查,需要对容器内部表面(内壁)进行全面的检查,根据行业标准要求:容器内部应清洁、干燥,没有任何污染物;阀门通道可见面不允许有腐蚀痕迹、绿色斑点、沉淀物、水分、划痕和白色的碱性物质等。Inspection of the cleaned uranium hexafluoride container requires a comprehensive inspection of the internal surface (inner wall) of the container. According to industry standards: the interior of the container should be clean, dry, and free of any contaminants; no corrosion is allowed on the visible surface of the valve channel. Traces, green spots, sediment, moisture, scratches and white alkaline substances, etc.

激光清洗为一种物理去除方法,形成气态颗粒和固体废物,没有废液的产生。但是,六氟化铀容器的两个入口(直角阀门和堵头)均为Z1”圆锥螺纹接口,其结构为直径很小的通孔。现有的激光清洗系统由于其结构尺寸的限制,难以从这么小的入口进入,无法实现容器内部的激光清洗。另外,进入容器内部也存在沾污的风险。Laser cleaning is a physical removal method that forms gaseous particles and solid waste without the generation of waste liquid. However, the two inlets of the uranium hexafluoride container (right-angle valve and plug) are both Z1” conical threaded interfaces, and their structure is a through hole with a very small diameter. The existing laser cleaning system is difficult to install due to its structural size limitations. Laser cleaning inside the container cannot be achieved through such a small entrance. In addition, there is also a risk of contamination when entering the interior of the container.

综上所述,随着六氟化铀容器待清洗数量的大量增长,现有的清洗装置和方法,在经济环保、清洗效率和安全性等方面均难以满足需求。In summary, with the massive increase in the number of uranium hexafluoride containers to be cleaned, existing cleaning devices and methods are unable to meet the demand in terms of economy, environmental protection, cleaning efficiency and safety.

发明内容Contents of the invention

本发明的目的在于克服上述技术不足,提供一种光束清洗结构及控制方法,以解决相关技术对容器的内壁进行清洗较为困难的技术问题。The purpose of the present invention is to overcome the above technical deficiencies and provide a beam cleaning structure and control method to solve the technical problem of difficulty in cleaning the inner wall of the container in related technologies.

为达到上述技术目的,本发明采取了以下技术方案:一种光束清洗结构,包括:容器,容器具有容纳腔和与容纳腔连通的容器口;容器口包括相对设置的第一容器口和第二容器口;清洗组件,清洗组件与容器连接,清洗组件包括:激光光源,激光光源用于发射光束;光斑组件,光斑组件包括相间隔设置的第三楔镜和第四楔镜;光斑组件用于接收激光光源发射的光束,并形成用于清洗容纳腔的内壁面的环形的清洗光斑;调焦模块,调焦模块位于激光光源与光斑组件之间,以调节进入光斑组件的光束的焦长;楔镜组件,与容器口相对应地设置,以使清洗光束经过楔镜组件发生折射后,进入容纳腔,并照射到容纳腔的内壁面上;楔镜组件包括第一楔镜和第二楔镜;驱动电机,楔镜组件与驱动电机的输出轴连接,以驱动楔镜组件转动,从而调节经过楔镜组件的清洗光束的照射方向。In order to achieve the above technical objectives, the present invention adopts the following technical solution: a beam cleaning structure, including: a container, the container has a containing cavity and a container mouth connected with the containing cavity; the container mouth includes a first container mouth and a second container mouth arranged oppositely. Container mouth; cleaning component, the cleaning component is connected to the container, the cleaning component includes: a laser light source, the laser light source is used to emit a light beam; the light spot component includes a third wedge mirror and a fourth wedge mirror arranged at intervals; the light spot component is used to Receive the beam emitted by the laser light source and form an annular cleaning spot for cleaning the inner wall of the accommodation cavity; a focusing module, which is located between the laser source and the spot component to adjust the focal length of the beam entering the spot component; The wedge mirror assembly is arranged corresponding to the container mouth, so that after the cleaning beam is refracted by the wedge mirror assembly, it enters the accommodation cavity and irradiates the inner wall surface of the accommodation cavity; the wedge mirror assembly includes a first wedge mirror and a second wedge mirror Mirror; drive motor, the wedge mirror assembly is connected with the output shaft of the drive motor to drive the wedge mirror assembly to rotate, thereby adjusting the irradiation direction of the cleaning beam passing through the wedge mirror assembly.

进一步地,第一楔镜包括第一入射面和第一出射面;第二楔镜包括第二入射面和第二出射面;第一出射面与第二入射面相互平行地设置;驱动电机包括第一驱动电机和第二驱动电机;第一驱动电机的输出轴与第一楔镜连接,第二驱动电机的输出轴与第二楔镜连接。Further, the first wedge mirror includes a first incident surface and a first exit surface; the second wedge mirror includes a second incident surface and a second exit surface; the first exit surface and the second incident surface are arranged parallel to each other; the driving motor includes The first drive motor and the second drive motor; the output shaft of the first drive motor is connected to the first wedge mirror, and the output shaft of the second drive motor is connected to the second wedge mirror.

进一步地,光束清洗结构还包括转接筒;转接筒与第一容器口和/或第二容器口连接;转接筒上设置有窗口片,窗口片为圆柱形结构,窗口片的轴线与第二楔镜的转动轴线相互重合。Further, the beam cleaning structure also includes an adapter barrel; the adapter barrel is connected to the first container mouth and/or the second container mouth; a window piece is provided on the adapter barrel, and the window piece is a cylindrical structure, and the axis of the window piece is connected with the first container mouth. The rotation axes of the second wedge mirrors coincide with each other.

进一步地,光束清洗结构还包括:测距仪,测距仪用于向容纳腔内发射测距光束,测距光束经过内壁面后,从容器口射出,测距仪根据从容器口内射出的测距光束得到距离信息,以使调焦模块根据距离信息调节进入光斑组件的光束的焦长。Further, the beam cleaning structure also includes: a range finder. The range finder is used to emit a ranging beam into the accommodation cavity. After the ranging beam passes through the inner wall, it is emitted from the container mouth. The range finder is based on the measurement beam emitted from the container mouth. The distance information is obtained from the light beam, so that the focusing module adjusts the focal length of the light beam entering the light spot component according to the distance information.

进一步地,光束清洗结构还包括:控制模块,控制模块与测距仪信号连接,控制模块根据距离信息进行计算,以得到焦长信息,并将焦长信息传输给调焦模块,以使调焦模块根据焦长信息调整焦长。Further, the beam cleaning structure also includes: a control module. The control module is connected to the rangefinder signal. The control module calculates based on the distance information to obtain the focal length information, and transmits the focal length information to the focusing module to adjust the focus. The module adjusts the focal length based on the focal length information.

进一步地,光束清洗结构还包括检测组件,检测组件与容器连接,检测组件包括:照明组件,用于向容纳腔内发射照明光束;成像组件,用于接收经容纳腔的内壁面反射后的照明光束,并根据照明光束形成内壁面的图像;调焦镜头,与控制模块信号连接,以调节照明光束的焦长。Further, the beam cleaning structure also includes a detection component, which is connected to the container. The detection component includes: an illumination component for emitting an illumination beam into the accommodation cavity; and an imaging component for receiving illumination reflected by the inner wall of the accommodation cavity. The light beam forms an image of the inner wall surface according to the illumination light beam; the focusing lens is connected to the control module signal to adjust the focal length of the illumination light beam.

进一步地,光束清洗结构包括清洗双色镜,清洗双色镜包括:清洗双色镜入射面,用于使照明光束和测距光束经过清洗双色镜入射面穿透清洗双色镜;清洗双色镜出射面,与清洗双色镜入射面相对设置,清洗双色镜出射面使清洗光束通过清洗双色镜出射面发生折射后,到达楔镜组件。Further, the beam cleaning structure includes cleaning the dichroic mirror, and the cleaning dichroic mirror includes: cleaning the dichroic mirror incident surface, for causing the illumination beam and the ranging beam to penetrate the cleaning dichroic mirror through the cleaning dichroic mirror incident surface; cleaning the dichroic mirror exit surface, and The incident surfaces of the cleaning dichroic mirror are arranged oppositely, and the exit surface of the cleaning dichroic mirror causes the cleaning beam to be refracted through the exit surface of the cleaning dichroic mirror before reaching the wedge mirror assembly.

进一步地,光束清洗结构包括第一双色镜,第一双色镜位于清洗双色镜远离楔镜组件的一侧;第一双色镜包括:第一双色镜入射面;第一双色镜出射面,用于使经过容器的内壁折射后的照明光束通过第一双色镜出射面穿透第一双色镜,第一双色镜出射面用于使测距光束经过第一双色镜出射面发生反射后,到达清洗双色镜。Further, the beam cleaning structure includes a first dichromatic mirror, which is located on the side of the cleaning dichromatic mirror away from the wedge mirror assembly; the first dichromatic mirror includes: a first dichromatic mirror incident surface; a first dichromatic mirror exit surface, for The illumination beam refracted by the inner wall of the container penetrates the first dichroic mirror through the first dichroic mirror exit surface. The first dichroic mirror exit surface is used to reflect the ranging beam through the first dichroic mirror exit surface before reaching the cleaning dichroic mirror. mirror.

进一步地,光束清洗结构包括第二双色镜,第二双色镜包括:第二双色镜入射面,用于使照明光束通过第二双色镜入射面穿透第二双色镜;第二双色镜出射面,用于使测距光束经过第二双色镜出射面发生折射后,到达第一双色镜出射面。Further, the beam cleaning structure includes a second dichroic mirror, and the second dichroic mirror includes: a second dichroic mirror incident surface, for allowing the illumination beam to penetrate the second dichroic mirror through the second dichroic mirror incident surface; and the second dichroic mirror exit surface. , used to make the ranging beam reach the first dichroic mirror exit surface after being refracted through the second dichroic mirror exit surface.

进一步地,光束清洗结构包括:第一滤光片,第一滤光片位于第一双色镜与调焦镜头之间,以对照明光束进行过滤;第二滤光片,第二滤光片位于第二双色镜与测距仪之间,以对测距光束进行过滤。Further, the beam cleaning structure includes: a first filter located between the first dichroic mirror and the focusing lens to filter the illumination beam; a second filter located between the first dichroic mirror and the focusing lens; between the second dichromatic mirror and the rangefinder to filter the rangefinder beam.

进一步地,第三楔镜包括第三入射面和第三出射面;第四楔镜包括第四入射面和第四出射面;第三出射面与第四入射面相互平行地设置;驱动电机包括第三驱动电机和第四驱动电机;第三驱动电机的输出轴与第三楔镜连接,第四驱动电机的输出轴与第四楔镜连接;第三驱动电机与第四驱动电机的转速相同。Further, the third wedge mirror includes a third incident surface and a third exit surface; the fourth wedge mirror includes a fourth incident surface and a fourth exit surface; the third exit surface and the fourth incident surface are arranged parallel to each other; the driving motor includes The third drive motor and the fourth drive motor; the output shaft of the third drive motor is connected to the third wedge mirror, and the output shaft of the fourth drive motor is connected to the fourth wedge mirror; the rotation speeds of the third drive motor and the fourth drive motor are the same. .

一种控制方法,适用于如上所述的任一项的光束清洗结构,控制方法包括:驱动光束清洗结构的光斑组件的第三楔镜和第四楔镜以相同的转速转动,从而形成环形的清洗光束;驱动光束清洗结构的楔镜组件的第一楔镜和第二楔镜以不同的转速转动,从而使清洗光斑在容器的内壁上沿螺旋线移动,以清洗容器的内壁。A control method, suitable for the beam cleaning structure of any of the above, the control method includes: driving the third wedge mirror and the fourth wedge mirror of the spot assembly of the beam cleaning structure to rotate at the same rotation speed, thereby forming an annular Cleaning beam; driving the first wedge mirror and the second wedge mirror of the wedge mirror assembly of the beam cleaning structure to rotate at different rotational speeds, so that the cleaning light spot moves along a spiral on the inner wall of the container to clean the inner wall of the container.

有益效果:Beneficial effects:

1、本发明的光束清洗结构及控制方法采用激光控制方法,实现了六氟化铀容器的激光清洗,没有液态废水的产生,其产生的气态和固态废物便于回收和利用,结构简单、清洗效率高、废物处置成本低、且经济环保。1. The beam cleaning structure and control method of the present invention adopts a laser control method to realize laser cleaning of uranium hexafluoride containers without the generation of liquid wastewater. The gaseous and solid wastes generated are easy to recycle and utilize, with simple structure and high cleaning efficiency. High, low waste disposal cost, economical and environmentally friendly.

2、本发明的光束清洗结构及控制方法采用脉冲光源、光斑组件、双楔镜扫描、主动照明、激光测距、动态调焦和成像方式,实现容器内壁的全覆盖扫描激光清洗,使得整个系统结构简单、操作方便、成本低。2. The beam cleaning structure and control method of the present invention adopts pulse light source, light spot component, double wedge mirror scanning, active illumination, laser ranging, dynamic focusing and imaging methods to achieve full coverage scanning laser cleaning of the inner wall of the container, making the entire system It has simple structure, convenient operation and low cost.

3、本发明的光束清洗结构及控制方法采用外置的双楔镜扫描方式,在实现全覆盖的同时,没有清洗设备进入容器内部,这样避免了设备的沾污风险,大大提高了激光清洗系统的安全性。3. The beam cleaning structure and control method of the present invention adopts an external double-wedge mirror scanning method. While achieving full coverage, no cleaning equipment enters the inside of the container. This avoids the risk of contamination of the equipment and greatly improves the efficiency of the laser cleaning system. security.

4、本发明的光束清洗结构及控制方法采用光学窗口和转接筒实现对容器的两个入口进行密封,可有效方式容器内部可能残留的有害物质的外泄,这也进一步保障了对清洗过程中人员的安全。4. The beam cleaning structure and control method of the present invention uses an optical window and an adapter barrel to seal the two entrances of the container, which can effectively prevent the leakage of harmful substances that may remain inside the container, which also further guarantees the cleaning process. safety of personnel involved.

附图说明Description of the drawings

图1是本发明实施例采用的光束清洗结构的清洗组件的结构示意图;Figure 1 is a schematic structural diagram of the cleaning component of the beam cleaning structure used in the embodiment of the present invention;

图2是本发明实施例采用的光束清洗结构的结构示意图;Figure 2 is a schematic structural diagram of the beam cleaning structure used in the embodiment of the present invention;

图3是本发明实施例采用的光束清洗结构的光斑组件的结构示意图;Figure 3 is a schematic structural diagram of the light spot component of the beam cleaning structure used in the embodiment of the present invention;

图4是本发明实施例采用的光束清洗结构的楔镜组件的结构示意图Figure 4 is a schematic structural diagram of the wedge mirror assembly of the beam cleaning structure used in the embodiment of the present invention.

图5是本发明实施例采用的光束清洗结构的双色镜的结构示意图;Figure 5 is a schematic structural diagram of a dichroic mirror with a beam cleaning structure adopted in an embodiment of the present invention;

图6是本发明实施例采用的光束清洗结构的清洗光斑的结构示意图;Figure 6 is a schematic structural diagram of the cleaning spot of the beam cleaning structure used in the embodiment of the present invention;

图7是本发明实施例采用的光束清洗结构的容器的结构示意图。Figure 7 is a schematic structural diagram of a container with a beam cleaning structure adopted in an embodiment of the present invention.

其中,上述附图包括以下附图标记:Among them, the above-mentioned drawings include the following reference signs:

1、窗口片;100、容器;101、容纳腔;110、容器口;102、第一容器口;103、第二容器口;10、第一驱动电机;11、第一楔镜;111、第一入射面;112、第一出射面;2、转接筒;12、第一电机驱动器;20、第二驱动电机;21、第二楔镜;211、第二入射面;212、第二出射面;200、清洗组件;22、第二电机驱动器;300、楔镜组件;31、清洗双色镜;311、清洗双色镜入射面;312、清洗双色镜出射面;32、第一双色镜;321、第一双色镜入射面;322、第一双色镜出射面;33、第二双色镜;331、第二双色镜入射面;332、第二双色镜出射面;400、检测组件;41、第一滤光片;42、调焦镜头;43、成像组件;500、光斑组件;501、第三楔镜;5011、第三入射面;5012、第三出射面;502、第四楔镜;5021、第四入射面;5022、第四出射面;510、清洗光斑;51、第二滤光片;52、测距仪;600、反射镜;7、调焦模块;81、输出头;82、光纤光缆;83、激光光源;90、照明组件;91、控制模块。1. Window piece; 100. Container; 101. Accommodating cavity; 110. Container mouth; 102. First container mouth; 103. Second container mouth; 10. First drive motor; 11. First wedge mirror; 111. No. An incident surface; 112, first exit surface; 2, adapter tube; 12, first motor driver; 20, second drive motor; 21, second wedge mirror; 211, second entrance surface; 212, second exit 200. Cleaning component; 22. Second motor driver; 300. Wedge mirror component; 31. Cleaning dichromatic mirror; 311. Cleaning dichromatic mirror incident surface; 312. Cleaning dichromatic mirror exit surface; 32. First dichromatic mirror; 321 , the first dichromatic mirror incident surface; 322. the first dichromatic mirror exit surface; 33. the second dichromatic mirror; 331. the second dichromatic mirror entrance surface; 332. the second dichromatic mirror exit surface; 400. detection component; 41. A filter; 42. Focusing lens; 43. Imaging component; 500. Spot component; 501. Third wedge mirror; 5011. Third incident surface; 5012. Third exit surface; 502. Fourth wedge mirror; 5021 , the fourth incident surface; 5022, the fourth exit surface; 510, cleaning spot; 51, second filter; 52, rangefinder; 600, reflector; 7, focusing module; 81, output head; 82, Optical fiber cable; 83. Laser light source; 90. Lighting component; 91. Control module.

具体实施方式Detailed ways

为了使本技术领域的人员更好地理解本申请方案,下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请一部分的实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都应当属于本申请保护的范围。In order to enable those in the technical field to better understand the solutions of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only These are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts should fall within the scope of protection of this application.

根据本发明实施例,提供了一种光束清洗结构,请参阅图1至图7,包括:容器100,容器100具有容纳腔101和与容纳腔101连通的容器口110;容器口110包括相对设置的第一容器口102和第二容器口103;清洗组件200,清洗组件200与容器100连接,清洗组件200包括:激光光源83,激光光源83用于发射光束;光斑组件500,光斑组件500包括相间隔设置的第三楔镜501和第四楔镜502;光斑组件500用于接收激光光源83发射的光束,并形成用于清洗容纳腔101的内壁面的环形的清洗光斑510;调焦模块7,调焦模块7位于激光光源83与光斑组件500之间,以调节进入光斑组件500的光束的焦长;楔镜组件300,与容器口110相对应地设置,以使清洗光束经过楔镜组件300发生折射后,进入容纳腔101,并照射到容纳腔101的内壁面上;楔镜组件300包括第一楔镜11和第二楔镜21;驱动电机,楔镜组件300与驱动电机的输出轴连接,以驱动楔镜组件300转动,从而调节经过楔镜组件300的清洗光束的照射方向。According to an embodiment of the present invention, a beam cleaning structure is provided, please refer to Figures 1 to 7, which includes: a container 100. The container 100 has a containing cavity 101 and a container mouth 110 connected with the containing cavity 101; the container mouth 110 includes an oppositely arranged The first container mouth 102 and the second container mouth 103; the cleaning assembly 200, the cleaning assembly 200 is connected with the container 100, the cleaning assembly 200 includes: a laser light source 83, the laser light source 83 is used to emit a beam; a light spot assembly 500, the light spot assembly 500 includes The third wedge mirror 501 and the fourth wedge mirror 502 are spaced apart; the spot assembly 500 is used to receive the beam emitted by the laser light source 83 and form an annular cleaning spot 510 for cleaning the inner wall of the accommodation cavity 101; the focusing module 7. The focusing module 7 is located between the laser light source 83 and the spot assembly 500 to adjust the focal length of the light beam entering the spot assembly 500; the wedge mirror assembly 300 is arranged corresponding to the container mouth 110 so that the cleaning beam passes through the wedge mirror. After the component 300 is refracted, it enters the accommodation cavity 101 and irradiates the inner wall of the accommodation cavity 101; the wedge mirror assembly 300 includes a first wedge mirror 11 and a second wedge mirror 21; a driving motor, the wedge mirror assembly 300 and the driving motor. The output shaft is connected to drive the wedge mirror assembly 300 to rotate, thereby adjusting the irradiation direction of the cleaning beam passing through the wedge mirror assembly 300 .

本实施例的光束清洗结构,通过激光光源83发射光束,先经过调焦模块7调节进入光斑组件500的光束的焦长,之后进入光斑组件500形成用于清洗容纳腔101的内壁面的清洗光斑510,清洗光斑510经过楔镜组件300发生折射后,经过容器口110进入容纳腔101,并照射到容纳腔101的内壁面上,楔镜组件300与驱动电机的输出轴连接,驱动楔镜组件300转动,调节经过楔镜组件300的所得清洗光斑510的照射方向,从而使得清洗光斑510经过不同的照射方向实现对各个区域的激光清洗工作,利用环形的清洗光斑510对容器的内壁进行清洗,清洗光斑510能够对容器的内壁进行全面的扫描,使得清洗过程无死角。本发明的光束清洗结构解决了相关技术对容器内壁进行清洗较为困难的技术问题。In the beam cleaning structure of this embodiment, the laser light source 83 emits a beam, and first adjusts the focal length of the beam entering the spot assembly 500 through the focusing module 7 , and then enters the spot assembly 500 to form a cleaning spot for cleaning the inner wall of the accommodation cavity 101 510. After the cleaning light spot 510 is refracted by the wedge mirror assembly 300, it enters the accommodation cavity 101 through the container mouth 110 and irradiates the inner wall of the accommodation cavity 101. The wedge mirror assembly 300 is connected to the output shaft of the driving motor to drive the wedge mirror assembly. 300 rotates to adjust the irradiation direction of the cleaning light spot 510 that passes through the wedge mirror assembly 300, so that the cleaning light spot 510 can achieve laser cleaning of each area through different irradiation directions, and the annular cleaning light spot 510 is used to clean the inner wall of the container. The cleaning light spot 510 can comprehensively scan the inner wall of the container, making the cleaning process without blind spots. The beam cleaning structure of the present invention solves the technical problem in the related art that it is difficult to clean the inner wall of the container.

具体地,激光光源83用于输出脉冲激光,清洗组件200还是设置有对脉冲光准直的输出头81,激光光源83通过光纤光缆82与输出头相连,便于输出头81接收激光光源83的角度更加灵活。激光光源83为脉冲光纤激光器,输出脉冲激光,激光波长为L1;输出头81为准直输出头,对输出的脉冲激光进行准直。Specifically, the laser light source 83 is used to output pulsed laser. The cleaning assembly 200 is also provided with an output head 81 for collimating the pulse light. The laser light source 83 is connected to the output head through an optical fiber cable 82 to facilitate the output head 81 to receive the angle of the laser light source 83. More flexible. The laser light source 83 is a pulse fiber laser that outputs pulse laser with a laser wavelength of L1; the output head 81 is a collimation output head that collimates the output pulse laser.

具体地,调焦模块7为动态调焦镜头,由多个透镜组成,透镜前后表面均镀L1波段增透膜,可以实现对准直光束进行动态聚焦。Specifically, the focusing module 7 is a dynamic focusing lens, which is composed of multiple lenses. The front and rear surfaces of the lens are coated with L1 band anti-reflection coating, which can achieve dynamic focusing of the collimated light beam.

具体地,在调焦模块7和光斑组件500之间有一个反射镜600,反射镜600用于将从调焦模块7发射出来的光束反射到光斑组件500上。Specifically, there is a reflecting mirror 600 between the focusing module 7 and the light spot assembly 500 . The reflecting mirror 600 is used to reflect the light beam emitted from the focusing module 7 onto the light spot assembly 500 .

参阅图1和图4,在本实施例的光束清洗结构中,楔镜组件300包括:第一楔镜11,第一楔镜11包括第一入射面111和第一出射面112;第二楔镜21,第二楔镜21包括第二入射面211和第二出射面212;第一出射面112与第二入射面211相互平行地设置;驱动电机包括第一驱动电机10和第二驱动电机20;第一驱动电机10的输出轴与第一楔镜11连接,第二驱动电机20的输出轴与第二楔镜21连接。楔镜组件300的每一个楔镜的一个面为平面,另一个面为斜面,带有楔角。也就是说,将第一楔镜11和第二楔镜21的初始位置为对称放置,这样使得出射光束不偏转方向。具体地,第一楔镜11和第二楔镜21的两个表面镀可见光波段增透膜,对于垂直入射光束会改变一个角度进行输出,如果将楔镜旋转一周,出射光束将跟随旋转一个圆圈。第一楔镜11和第二楔镜21依次放置,组合成一个双楔镜组。平行光束垂直入射镜组,通过控制两个楔镜的旋转,可以实现一个圆盘区域内的任意轨迹扫描。通过控制相位差,出射光束可以扫描成一个螺旋圆盘。通过第一驱动电机10和第二驱动电机20周而复始地操作第一楔镜11和第二楔镜21旋转,将容器100内壁结构实现圆盘区域扫描清洗。Referring to Figures 1 and 4, in the beam cleaning structure of this embodiment, the wedge mirror assembly 300 includes: a first wedge mirror 11, the first wedge mirror 11 includes a first incident surface 111 and a first exit surface 112; a second wedge mirror 11; Mirror 21, the second wedge mirror 21 includes a second incident surface 211 and a second exit surface 212; the first exit surface 112 and the second incident surface 211 are arranged parallel to each other; the driving motor includes the first driving motor 10 and the second driving motor 20; The output shaft of the first drive motor 10 is connected to the first wedge mirror 11, and the output shaft of the second drive motor 20 is connected to the second wedge mirror 21. One surface of each wedge mirror of the wedge mirror assembly 300 is a flat surface, and the other surface is an inclined surface with a wedge angle. That is to say, the initial positions of the first wedge mirror 11 and the second wedge mirror 21 are placed symmetrically, so that the outgoing light beam does not deflect. Specifically, the two surfaces of the first wedge mirror 11 and the second wedge mirror 21 are coated with anti-reflection coatings in the visible light band. For vertically incident light beams, they will change an angle for output. If the wedge mirrors are rotated one circle, the outgoing beam will rotate in a circle. . The first wedge mirror 11 and the second wedge mirror 21 are placed in sequence to form a double wedge mirror group. The parallel beam is vertically incident on the lens group, and by controlling the rotation of the two wedge mirrors, any trajectory scanning within a disk area can be achieved. By controlling the phase difference, the outgoing beam can be scanned into a spiral disk. By the first drive motor 10 and the second drive motor 20 repeatedly operating the first wedge mirror 11 and the second wedge mirror 21 to rotate, the inner wall structure of the container 100 is scanned and cleaned in the disk area.

具体地,第一楔镜11和第二楔镜21、第一驱动电机10、第二驱动电机20和第一电机驱动器12、第二电机驱动器22构成光学扫描模组。其中,两个楔镜分别安装在两个驱动电机内部中空旋转轴上,第一电机驱动器12、第二电机驱动器22与第一驱动电机10、第二驱动电机20相连接,并对其进行控制。Specifically, the first wedge mirror 11 and the second wedge mirror 21, the first drive motor 10, the second drive motor 20, the first motor driver 12, and the second motor driver 22 constitute an optical scanning module. Among them, two wedge mirrors are respectively installed on the hollow rotating shafts inside the two drive motors. The first motor driver 12 and the second motor driver 22 are connected to the first drive motor 10 and the second drive motor 20 and control them. .

具体地,第一驱动电机10和第二驱动电机20为中空的高精度环形电机,中空部分用于安装楔镜,可以带动楔镜进行旋转运动,电机上有一个位置传感器。Specifically, the first drive motor 10 and the second drive motor 20 are hollow high-precision ring-shaped motors. The hollow part is used to install the wedge mirror and can drive the wedge mirror to rotate. There is a position sensor on the motor.

第一电机驱动器12和第二电机驱动器22对电机进行控制,通过电控信号,实现电机的旋转速度和旋转方向的控制,还可通过电机上的位置传感器获得电机转轴位置。The first motor driver 12 and the second motor driver 22 control the motor, realize control of the rotation speed and rotation direction of the motor through electrical control signals, and can also obtain the position of the motor shaft through a position sensor on the motor.

参阅图1,在本实施例的光束清洗结构中,光束清洗结构还包括转接筒2;转接筒2与第一容器口102和第二容器口103连接;转接筒2上设置有窗口片1,窗口片1为圆柱形结构,窗口片1的轴线与第二楔镜21的转动轴线相互重合。转接筒2外部为锥形外螺纹,与容器100入口的圆锥螺纹配合,安装到容器100的第一容器口102和第二容器口103。转接筒2内部为中空结构,中间用于安装窗口片1,窗口片1两个表面镀可见光波段增透膜。窗口片1的轴线与第二楔镜21的转动轴线相互重合,这样使得出射照明光束不偏转方向。Referring to Figure 1, in the beam cleaning structure of this embodiment, the beam cleaning structure also includes an adapter barrel 2; the adapter barrel 2 is connected to the first container port 102 and the second container port 103; the adapter barrel 2 is provided with a window. The window piece 1 has a cylindrical structure, and the axis of the window piece 1 and the rotation axis of the second wedge mirror 21 coincide with each other. The outside of the adapter barrel 2 is a tapered external thread, which matches the tapered thread of the inlet of the container 100 and is installed to the first container mouth 102 and the second container mouth 103 of the container 100 . The inside of the adapter barrel 2 is a hollow structure, and the middle is used to install the window piece 1. The two surfaces of the window piece 1 are coated with anti-reflection coatings in the visible light band. The axis of the window 1 and the rotation axis of the second wedge mirror 21 coincide with each other, so that the outgoing illumination beam does not deflect.

在一些实施例中,当转接筒2安装到容器上时,窗口片1可以将容器口110进行封堵,以防止清洗产生的烟尘冒出。In some embodiments, when the adapter barrel 2 is installed on the container, the window piece 1 can block the container opening 110 to prevent smoke generated by cleaning from emerging.

在一些本实施例的光束清洗结构中,壁清洗结构还包括转接筒2;转接筒2与第一容器口102或第二容器口103连接。操作时,先从一个容器口进行激光清洗,再去相对应的另一个容器口再进行激光清洗。两次清洗的区域一结合即可得到一个容纳腔101的全部清洗区域。In some beam cleaning structures of this embodiment, the wall cleaning structure also includes an adapter barrel 2; the adapter barrel 2 is connected to the first container port 102 or the second container port 103. During operation, first perform laser cleaning from one container mouth, and then go to the corresponding other container mouth for laser cleaning. Once the two cleaning areas are combined, the entire cleaning area of one accommodation chamber 101 can be obtained.

参阅图2,在本实施例的光束清洗结构中,光束清洗结构还包括:测距仪52,测距仪52用于向容纳腔101内发射测距光束,测距光束经过内壁面后,从容器口110射出,测距仪52根据从容器口110内射出的测距光束得到距离信息,以使调焦模块7根据距离信息调节进入光斑组件500的光束的焦长。Referring to Figure 2, in the beam cleaning structure of this embodiment, the beam cleaning structure also includes: a range finder 52. The range finder 52 is used to emit a ranging beam into the accommodation cavity 101. After the ranging beam passes through the inner wall, it is emitted from The container mouth 110 is emitted, and the rangefinder 52 obtains distance information based on the ranging beam emitted from the container mouth 110, so that the focusing module 7 adjusts the focal length of the light beam entering the light spot assembly 500 based on the distance information.

具体地,测距仪52为一个激光测距模块,采用相位法进行激光测距。其发射一束单色激光,激光波长为L2,激光光源照射到物体表面,反射回激光测距仪52,实现距离的测量。Specifically, the rangefinder 52 is a laser ranging module that uses the phase method to perform laser ranging. It emits a beam of monochromatic laser with a laser wavelength of L2. The laser light source irradiates the surface of the object and is reflected back to the laser rangefinder 52 to achieve distance measurement.

参阅图1,在本实施例的光束清洗结构中,光束清洗结构还包括:控制模块91,控制模块91与测距仪52信号连接,控制模块91根据距离信息进行计算,以得到焦长信息,并将焦长信息传输给调焦模块7,以使调焦模块7根据焦长信息调整焦长。测距仪52进行测距,获得距离信号,发送至控制模块91,然后计算为调焦模块7信号,对激光进行调焦,聚焦后的光束通过光斑组件500高速扫描成一个线光斑,然后入射到容器100内部表面,通过测距信号和调焦的控制,使得激光聚焦点于容器100内部表面的照射点位置将容器100内壁表面的六氟化铀残留物进行去除。Referring to Figure 1, in the beam cleaning structure of this embodiment, the beam cleaning structure also includes: a control module 91. The control module 91 is signal-connected to the rangefinder 52. The control module 91 performs calculations based on distance information to obtain focal length information. And the focal length information is transmitted to the focusing module 7, so that the focusing module 7 adjusts the focal length according to the focal length information. The rangefinder 52 measures the distance, obtains a distance signal, sends it to the control module 91, and then calculates it as a signal of the focusing module 7 to focus the laser. The focused beam is scanned into a line spot at high speed through the spot component 500, and then is incident. To the internal surface of the container 100, through the control of the ranging signal and focus adjustment, the laser focus point is at the irradiation point position on the internal surface of the container 100 to remove uranium hexafluoride residues on the inner wall surface of the container 100.

参阅图1,在本实施例的光束清洗结构中,光束清洗结构还包括检测组件400,检测组件400与容器100连接,照明组件90用于向容纳腔101内发射照明光束;成像组件43用于接收经容纳腔101的内壁面反射后的照明光束,并根据照明光束形成内壁面的图像;调焦镜头42与控制模块信号连接,以调节照明光束的焦长。Referring to Figure 1, in the beam cleaning structure of this embodiment, the beam cleaning structure also includes a detection component 400. The detection component 400 is connected to the container 100. The lighting component 90 is used to emit an illumination beam into the accommodation cavity 101; the imaging component 43 is used to The illumination beam reflected by the inner wall of the accommodation cavity 101 is received, and an image of the inner wall is formed according to the illumination beam; the focus lens 42 is connected with the control module signal to adjust the focal length of the illumination beam.

具体地,调焦镜头42为一个液态镜头,通过控制电流电压来动态调节镜头的焦距,可以实现非常快速的焦长动态调节。配合成像组件43,可实现不同距离的快速成像。成像组件43为工业相机CCD,可以是黑白相机或彩色相机。Specifically, the focusing lens 42 is a liquid lens. By controlling the current and voltage to dynamically adjust the focal length of the lens, very fast dynamic adjustment of the focal length can be achieved. Cooperating with the imaging component 43, rapid imaging at different distances can be achieved. The imaging component 43 is an industrial camera CCD, which can be a black and white camera or a color camera.

具体地,照明组件90照射白光光源或者单色光源,输出照明光束,照明光束为具有一定发散角的大口径光束,为容器100内部区域提供照明,使得相机能够进行对照明区域的成像观测。Specifically, the lighting component 90 irradiates a white light source or a monochromatic light source and outputs an illumination beam. The illumination beam is a large-aperture beam with a certain divergence angle, providing illumination for the internal area of the container 100 so that the camera can perform imaging observations of the illumination area.

具体地,控制模块9对激光光源83、调焦模块7、光斑组件500、第一电机驱动器12、第二电机驱动器22、照明组件90、测距仪52和调焦镜头42集中控制,并分别与之通过相应的线缆相连接。Specifically, the control module 9 centrally controls the laser light source 83, the focus module 7, the light spot component 500, the first motor driver 12, the second motor driver 22, the lighting component 90, the rangefinder 52 and the focus lens 42, and controls them respectively. Connected to it via corresponding cables.

参阅图5,在本实施例的光束清洗结构中,光束清洗结构包括清洗双色镜31,清洗双色镜31包括:清洗双色镜入射面311,用于使照明光束和测距光束经过清洗双色镜入射面311穿透清洗双色镜31;清洗双色镜出射面312,与清洗双色镜入射面311相对设置,清洗双色镜出射面312使清洗光斑510通过清洗双色镜出射面312发生折射后,到达楔镜组件300。Referring to Figure 5, in the beam cleaning structure of this embodiment, the beam cleaning structure includes a cleaning dichroic mirror 31. The cleaning dichroic mirror 31 includes: a cleaning dichroic mirror incident surface 311, which is used to make the illumination beam and the ranging beam incident through the cleaning dichroic mirror. The surface 311 penetrates the cleaning dichroic mirror 31; the cleaning dichroic mirror exit surface 312 is set opposite to the cleaning dichroic mirror incident surface 311. The cleaning dichroic mirror exit surface 312 causes the cleaning light spot 510 to be refracted through the cleaning dichroic mirror exit surface 312 and then reaches the wedge mirror. Components 300.

照明光束和测距光束经过清洗双色镜入射面311穿透清洗双色镜31,清洗光斑510通过清洗双色镜出射面312发生折射后,到达楔镜组件300。The illumination beam and the ranging beam pass through the cleaning dichroic mirror incident surface 311 and penetrate the cleaning dichroic mirror 31 . The cleaning light spot 510 is refracted by the cleaning dichroic mirror exit surface 312 and then reaches the wedge mirror assembly 300 .

具体地,清洗双色镜31为45°角度放置,其对脉冲激光(L1)高反射,对照明光束和测距仪激光(L2)高透射。通过对两个表面镀光学介质膜实现,清洗双色镜入射面311镀可见光波段增透膜,清洗双色镜出射面312镀L1波段高反射、可见光其他波段高透膜。Specifically, the cleaning dichroic mirror 31 is placed at an angle of 45°, which is highly reflective to the pulse laser (L1) and highly transmissive to the illumination beam and the rangefinder laser (L2). This is achieved by coating two surfaces with optical media films. The incident surface 311 of the clean dichromatic mirror is coated with an anti-reflection coating in the visible light band, and the exit surface 312 of the clean dichromatic mirror is coated with a high-reflection coating in the L1 band and a high-transmission coating in other visible light bands.

参阅图5,在本实施例的光束清洗结构中,光束清洗结构包括第一双色镜32,第一双色镜32位于清洗双色镜31远离楔镜组件300的一侧;第一双色镜32包括:第一双色镜入射面321;第一双色镜出射面322,用于使经过容器100的内壁折射后的照明光束通过第一双色镜出射面322穿透第一双色镜32,第一双色镜出射面322用于使测距光束经过第一双色镜出射面322发生反射后,到达清洗双色镜31。照明光束通过第一双色镜出射面322穿透第一双色镜32,测距光束经过第一双色镜出射面322发生反射后,到达清洗双色镜31。Referring to Figure 5, in the beam cleaning structure of this embodiment, the beam cleaning structure includes a first dichroic mirror 32. The first dichroic mirror 32 is located on the side of the cleaning dichroic mirror 31 away from the wedge mirror assembly 300; the first dichroic mirror 32 includes: The first dichroic mirror incident surface 321; the first dichroic mirror exit surface 322 are used to allow the illumination beam refracted by the inner wall of the container 100 to penetrate the first dichroic mirror 32 through the first dichroic mirror exit surface 322, and the first dichroic mirror exits The surface 322 is used to cause the ranging beam to reach the cleaning dichroic mirror 31 after being reflected by the first dichroic mirror exit surface 322 . The illumination beam penetrates the first dichroic mirror 32 through the first dichroic mirror exit surface 322 , and the ranging light beam reaches the cleaning dichroic mirror 31 after being reflected by the first dichroic mirror exit surface 322 .

具体地,第一双色镜32为45°角度放置,其对照明光束半反半透、对测距仪激光(L1)高反射。通过对两个表面镀光学介质膜实现,第一双色镜出射面322镀可见光波段半反半透膜、L2波段高反射,第一双色镜入射面321镀可见光波段高透膜。Specifically, the first dichromatic mirror 32 is placed at an angle of 45°, which is semi-reflective and semi-transparent to the illumination beam and highly reflective to the rangefinder laser (L1). This is achieved by coating two surfaces with optical media films. The first dichroic mirror exit surface 322 is coated with a semi-reflective and semi-transmissive film in the visible light band and a high reflection in the L2 band. The first dichroic mirror incident surface 321 is coated with a high-transmittance film in the visible light band.

参阅图5,在本实施例的光束清洗结构中,光束清洗结构包括第二双色镜33,第二双色镜33包括:第二双色镜入射面331,用于使照明光束通过第二双色镜入射面331穿透第二双色镜33;第二双色镜出射面332,用于使测距光束经过第二双色镜出射面332发生折射后,到达第一双色镜出射面322。照明光束通过第二双色镜入射面331穿透第二双色镜33,测距光束经过第二双色镜出射面332发生折射后,到达第一双色镜出射面322。Referring to Figure 5, in the beam cleaning structure of this embodiment, the beam cleaning structure includes a second dichroic mirror 33. The second dichroic mirror 33 includes a second dichroic mirror incident surface 331 for making the illumination beam incident through the second dichroic mirror. The surface 331 penetrates the second dichroic mirror 33; the second dichroic mirror exit surface 332 is used to refract the ranging beam through the second dichroic mirror exit surface 332 and then reach the first dichroic mirror exit surface 322. The illumination beam passes through the second dichroic mirror incident surface 331 and penetrates the second dichroic mirror 33 . The ranging beam is refracted by the second dichroic mirror exit surface 332 and then reaches the first dichroic mirror exit surface 322 .

具体地,第二双色镜33为45°角度放置,其对照明光高透射、对测距仪激光(L2)高反射。通过对两个表面镀光学介质膜实现,第二双色镜入射面331镀可见光波段增透膜,第二双色镜出射面332镀L2波段高反射、可见光其他波段高透膜。Specifically, the second dichromatic mirror 33 is placed at an angle of 45°, has high transmission of illumination light and high reflection of the rangefinder laser (L2). This is achieved by coating two surfaces with optical media films. The second dichromatic mirror incident surface 331 is coated with a visible light band anti-reflection coating, and the second dichroic mirror exit surface 332 is coated with a high reflection film in the L2 band and a high transmittance film in other visible light bands.

参阅图2和图5,在本实施例的光束清洗结构中,光束清洗结构包括:第一滤光片41,第一滤光片41位于第一双色镜32与调焦镜头42之间,以对照明光束进行过滤;第二滤光片51,第二滤光片51位于第二双色镜33与测距仪52之间,以对测距光束进行过滤。第一滤光片41为窄带滤光片,在L2波段低透射率,在其他波段高透射率,使得测距仪52的激光束L2无法透射,照明光源的光束可以高效率透射,这样防止了照明光束对成像组件43成像的干扰,保证了成像组件43对照明区域的清晰成像。第二滤光片51为带通窄带滤光片,在L2波段高透射率,在其他波段低透射率,使得测距仪52的激光束L2可以高效率透射,照明光源的光束无法通过,保证了测距仪52的测距精度和准确度。Referring to Figures 2 and 5, in the beam cleaning structure of this embodiment, the beam cleaning structure includes: a first filter 41. The first filter 41 is located between the first dichroic mirror 32 and the focusing lens 42. The illumination beam is filtered; the second filter 51 is located between the second dichroic mirror 33 and the rangefinder 52 to filter the ranging beam. The first filter 41 is a narrow-band filter with low transmittance in the L2 band and high transmittance in other bands, so that the laser beam L2 of the rangefinder 52 cannot be transmitted, and the beam of the illumination light source can be transmitted with high efficiency, thus preventing The interference of the illumination beam to the imaging component 43 ensures that the imaging component 43 can clearly image the illuminated area. The second filter 51 is a bandpass narrowband filter with high transmittance in the L2 band and low transmittance in other bands, so that the laser beam L2 of the rangefinder 52 can be transmitted with high efficiency, and the beam of the illumination light source cannot pass through, ensuring The ranging precision and accuracy of the rangefinder 52 are improved.

参阅图3和图6,在本实施例的光束清洗结构中,第三楔镜501包括第三入射面5011和第三出射面5012;第四楔镜502包括第四入射面5021和第四出射面5022;第三出射面5012与第四入射面5021相互平行地设置;驱动电机包括第三驱动电机和第四驱动电机;第三驱动电机的输出轴与第三楔镜501连接,第四驱动电机的输出轴与第四楔镜502连接;第三驱动电机与第四驱动电机的转速相同。第三楔镜501和第四楔镜502同步旋转将入射光束扫描成固定直径的圆环,此圆环为清洗光斑510。Referring to Figures 3 and 6, in the beam cleaning structure of this embodiment, the third wedge mirror 501 includes a third incident surface 5011 and a third exit surface 5012; the fourth wedge mirror 502 includes a fourth incident surface 5021 and a fourth exit surface. surface 5022; the third exit surface 5012 and the fourth incident surface 5021 are arranged parallel to each other; the driving motor includes a third driving motor and a fourth driving motor; the output shaft of the third driving motor is connected to the third wedge mirror 501, and the fourth driving motor The output shaft of the motor is connected to the fourth wedge mirror 502; the rotation speeds of the third drive motor and the fourth drive motor are the same. The third wedge mirror 501 and the fourth wedge mirror 502 rotate synchronously to scan the incident beam into a circular ring with a fixed diameter, and this circular ring is the cleaning spot 510 .

参阅图6,在本实施例的控制方法中,包括上述所说的光束清洗结构,控制方法包括:驱动光束清洗结构的光斑组件500的第三楔镜501和第四楔镜502以相同的转速转动,从而形成环形的清洗光斑510;驱动光束清洗结构的楔镜组件300的第一楔镜11和第二楔镜21以不同的转速转动,从而使清洗光斑510在容器100的内壁上沿螺旋线移动,以清洗容器100的内壁。将光斑组件500的第三楔镜501和第四楔镜502与楔镜组件300的第一楔镜11和第二楔镜21结合使用,光斑组件500的两个楔镜将入射光束扫描成固定直径的圆环,如图6中的清洗光斑510,楔镜组件300的两个楔镜以不同速度旋转将光束扫描成螺旋轨迹。Referring to Figure 6, the control method in this embodiment includes the above-mentioned beam cleaning structure. The control method includes: driving the third wedge mirror 501 and the fourth wedge mirror 502 of the spot component 500 of the beam cleaning structure at the same rotation speed. Rotate, thereby forming an annular cleaning light spot 510; the first wedge mirror 11 and the second wedge mirror 21 of the wedge mirror assembly 300 of the driving beam cleaning structure rotate at different rotational speeds, so that the cleaning light spot 510 spirals along the inner wall of the container 100 The line moves to clean the inner wall of the container 100 . The third wedge mirror 501 and the fourth wedge mirror 502 of the spot assembly 500 are used in combination with the first wedge mirror 11 and the second wedge mirror 21 of the wedge mirror assembly 300. The two wedge mirrors of the spot assembly 500 scan the incident beam into a fixed The two wedge mirrors of the wedge mirror assembly 300 rotate at different speeds to scan the beam into a spiral trajectory.

具体地,采用调焦模块7实现光束的动态调焦,测距仪52为调焦模块7提供距离信息。具体的,长距离动态调焦光束通过楔镜旋转扫描方式实现容器内壁全覆盖扫描,将所有扫描机构(调焦模块7、楔镜组件300)均置于容器外部,在第一容器口102处安装窗口片1,激光束从窗口片1对内壁进行扫描;通过控制楔镜组件300的差速旋转来实现对容器全内壁的全覆盖扫描,结合调焦模块7控制焦点来实现容器内壁清洗功能。在照明组件90照明条件下,通过成像组件43和液态镜头实现对内部区域的在线成像监测。Specifically, the focusing module 7 is used to realize dynamic focusing of the light beam, and the rangefinder 52 provides distance information to the focusing module 7 . Specifically, the long-distance dynamic focusing beam achieves full coverage scanning of the inner wall of the container through wedge mirror rotation scanning. All scanning mechanisms (focusing module 7, wedge mirror assembly 300) are placed outside the container, at the first container mouth 102 Install the window piece 1, and the laser beam scans the inner wall from the window piece 1; by controlling the differential rotation of the wedge mirror assembly 300, full coverage scanning of the entire inner wall of the container is achieved, and the focus is controlled by the focusing module 7 to realize the cleaning function of the inner wall of the container. . Under the lighting conditions of the lighting assembly 90, online imaging monitoring of the internal area is achieved through the imaging assembly 43 and the liquid lens.

具体地,光斑组件500扫描的圆环光斑在加工过程中需保持圆环半径不变和环内光斑叠加率不变两个功能。光斑组件500采用共轴独立旋转方式,通过对两个楔镜的旋转控制实现上述功能需求。Specifically, the circular light spot scanned by the light spot component 500 needs to maintain two functions: the ring radius remains unchanged and the light spot superposition rate within the ring remains unchanged during the processing process. The light spot component 500 adopts a coaxial independent rotation method and realizes the above functional requirements by controlling the rotation of the two wedge mirrors.

圆环半径与工作距离和偏转角相关,工作距离为光束从光斑组件500到容器100内壁表面激光工作点的距离,随着楔镜组件300扫描光束扫描而变化。因而,可通过控制两个楔形棱镜的夹角,去匹配工作距离,从而实现对圆环半径的控制。圆环内光斑叠加率与激光光束参数、圆环半径和光斑扫描速度相关,加工过程中注入激光参数和圆环半径保持不变,因而仅需要保持光斑扫描速度不变。可以通过控制两个楔形棱镜的旋转速度相同既可以实现圆环内光斑叠加率不变。The ring radius is related to the working distance and deflection angle. The working distance is the distance from the light spot assembly 500 to the laser working point on the inner wall surface of the container 100, and changes as the wedge mirror assembly 300 scans the beam. Therefore, the angle between the two wedge prisms can be controlled to match the working distance, thereby controlling the radius of the ring. The spot superposition rate within the ring is related to the laser beam parameters, ring radius and spot scanning speed. During the processing, the injection laser parameters and ring radius remain unchanged, so only the spot scanning speed needs to be kept constant. By controlling the rotation speed of the two wedge prisms to be the same, the superposition rate of light spots in the ring can be kept unchanged.

具体地,设置第一容器口102作为清洗光斑510进入容纳腔101的通道,再通过第二容器口103作为废气抽排口,废气抽排口用于将激光清洗产生的气态颗粒和粉尘排出容器100外。第一容器口102可根据实际情况,设置多个,分别使用多个清洗组件200对容器100的内壁进行清洗;第二容器口103也可设置多个,分别对内部产生的气态颗粒和粉尘进行抽排。Specifically, the first container port 102 is provided as a passage for the cleaning light spot 510 to enter the accommodation cavity 101, and the second container port 103 is used as an exhaust gas exhaust port. The exhaust gas exhaust port is used to discharge the gaseous particles and dust generated by laser cleaning out of the container. 100 outside. Multiple first container openings 102 can be provided according to actual conditions, and multiple cleaning assemblies 200 can be used to clean the inner wall of the container 100 respectively; multiple second container openings 103 can also be provided to separately clean the gaseous particles and dust generated inside. Exhaust.

本实施例的控制方法包括如下过程和步骤:The control method of this embodiment includes the following processes and steps:

1、光束清洗结构和六氟化铀容器的安装1. Installation of beam cleaning structure and uranium hexafluoride container

将六氟化铀容器进行水平放置并固定,将直角阀和堵头入口的附属组件拆除,在两个入口分别装入转接筒2,转接筒2中间有安装窗口片1。将清洗结构的楔镜组件300对准其中一个入口,作为第一容器口102,调节并保证楔镜组件300与窗口片1同光轴放置,楔镜组件300的第一楔镜11和第二楔镜21调节为初始位置。Place and fix the uranium hexafluoride container horizontally, remove the right-angle valve and the accessory components of the plug inlet, and install the adapter barrel 2 at the two inlets. There is an installation window 1 in the middle of the adapter barrel 2. Align the wedge mirror assembly 300 of the cleaning structure with one of the inlets as the first container port 102. Adjust and ensure that the wedge mirror assembly 300 is placed on the same optical axis as the window piece 1. The first wedge mirror 11 and the second wedge mirror 11 of the wedge mirror assembly 300 are The wedge mirror 21 is adjusted to the initial position.

2、激光测距方法和步骤2. Laser ranging methods and steps

通过控制模块91发送指令,打开测距仪52,发射测距激光束,激光束经过第二滤光片51透射,然后依次经过第二双色镜33和第一双色镜32,高反射,反射后激光束通过清洗双色镜31、楔镜组件300和窗口片1,入射到容器内部正前方某点位置,在容器表面该点位置进行反射,反射后光束依次通过窗口片1、楔镜组件300、清洗双色镜31,然后再经过第一双色镜32和第二双色镜33反射,返回测距仪52,经过数据处理,获得距离信息,然后将距离信息传送给控制模块91。Send an instruction through the control module 91 to open the rangefinder 52 and emit a ranging laser beam. The laser beam is transmitted through the second filter 51 and then passes through the second dichromatic mirror 33 and the first dichromatic mirror 32 in sequence. It is highly reflective. The laser beam passes through the cleaning dichroic mirror 31, the wedge mirror assembly 300 and the window piece 1, and is incident on a certain point directly in front of the container, and is reflected at that point on the surface of the container. After reflection, the beam passes through the window piece 1, the wedge mirror assembly 300, and the window piece 1 in turn. The dichroic mirror 31 is cleaned, then reflected by the first dichroic mirror 32 and the second dichroic mirror 33 , and returned to the rangefinder 52 . After data processing, the distance information is obtained, and then the distance information is transmitted to the control module 91 .

3、激光控制方法和步骤3. Laser control methods and steps

如图6所示,光斑组件500的第三楔镜501和第四楔镜502与楔镜组件300的第一楔镜11和第二楔镜21结合使用。第三楔镜501和第四楔镜502同步旋转将入射光束扫描成固定直径的环形光斑;再通过楔镜组件300的两个楔镜以不同速度旋转将光束扫描成螺旋轨迹。通过控制楔镜组件300的差速旋转来实现对容器100全内壁的全覆盖扫描,结合调焦模块7控制焦点来实现容器100内壁清洗功能。As shown in FIG. 6 , the third wedge mirror 501 and the fourth wedge mirror 502 of the light spot assembly 500 are used in combination with the first wedge mirror 11 and the second wedge mirror 21 of the wedge mirror assembly 300 . The third wedge mirror 501 and the fourth wedge mirror 502 rotate synchronously to scan the incident beam into an annular spot with a fixed diameter; then the two wedge mirrors of the wedge mirror assembly 300 rotate at different speeds to scan the beam into a spiral trajectory. By controlling the differential rotation of the wedge mirror assembly 300, full coverage scanning of the entire inner wall of the container 100 is achieved, and the cleaning function of the inner wall of the container 100 is realized by controlling the focus in combination with the focusing module 7.

4、光束照明方法和步骤4. Beam lighting methods and steps

通过控制模块91发送指令,打开照明组件90,输出照明光束,照明光束通过第二双色镜33进行透射,然后经过第一双色镜32进行部分反射,反射后的照明光束通过楔镜组件300和窗口片1,入射到容器内部正前方区域,实现该区域的照明。Send an instruction through the control module 91 to open the lighting assembly 90 and output the illumination beam. The illumination beam is transmitted through the second dichroic mirror 33 and then partially reflected through the first dichroic mirror 32. The reflected illumination beam passes through the wedge mirror assembly 300 and the window. Piece 1 is incident on the area directly in front of the container to achieve lighting in this area.

5、光学成像方法和步骤5. Optical imaging methods and steps

通过控制模块91发送指令,打开成像组件43和调焦镜头42。根据获得的测距信息,解算成调焦长度信号,发送给调焦镜头42,快速实现镜头焦长的调节。照明区域的照明光束反射后的光束,依次经过窗口片1、楔镜组件300、清洗双色镜31、第一双色镜32、第一滤光片41,然后经过调焦镜头42成像在成像组件43感光面上,实现成像组件43的成像。采集到的成像数据,传输到控制模块91。An instruction is sent through the control module 91 to open the imaging assembly 43 and the focus lens 42 . According to the obtained distance measurement information, it is solved into a focusing length signal and sent to the focusing lens 42 to quickly adjust the focal length of the lens. The reflected light beam of the illuminating area passes through the window piece 1, the wedge mirror assembly 300, the cleaning dichroic mirror 31, the first dichroic mirror 32, and the first filter 41 in sequence, and then passes through the focusing lens 42 to be imaged on the imaging component 43 On the photosensitive surface, imaging of the imaging component 43 is realized. The collected imaging data is transmitted to the control module 91 .

6、楔镜组件旋转扫描方法和步骤6. Wedge mirror assembly rotation scanning method and steps

通过控制模块91发送指令,打开第一驱动电机10、第二驱动电机20、第一电机驱动器12和第二电机驱动器22,驱动电机旋转,楔镜跟随旋转,控制两个楔镜以一定的相位差进行旋转。通过楔镜的脉冲激光束、测距激光束和照明光束跟随进行旋转扫描,形成一个圆盘区域。Send an instruction through the control module 91 to turn on the first drive motor 10, the second drive motor 20, the first motor driver 12 and the second motor driver 22, drive the motor to rotate, the wedge mirror will follow the rotation, and control the two wedge mirrors to rotate with a certain phase. Differential rotation. The pulsed laser beam, ranging laser beam and illumination beam passed through the wedge mirror are followed for rotational scanning to form a disk area.

7、全覆盖清洗扫描方式7. Full coverage cleaning and scanning method

首先将光束清洗结构安装在A位置,从A端入射,从D端进行废气抽排,实现对六氟化铀容器内部C-B-D区域的扫描、清洗、照明、成像;然后将光束清洗结构安装在B位置,从B端入射,从A端进行废气抽排,实现对六氟化铀容器内部C-A-D区域的扫描、清洗、照明、成像。最终,实现对容器内部全表面的全覆盖激光清洗,如图7所示。First, the beam cleaning structure is installed at position A, incident from the A end, and exhaust gas is extracted from the D end to achieve scanning, cleaning, illumination, and imaging of the C-B-D area inside the uranium hexafluoride container; then the beam cleaning structure is installed at B Position, the incident is from the B end, and the exhaust gas is extracted from the A end to realize scanning, cleaning, illumination, and imaging of the C-A-D area inside the uranium hexafluoride container. Finally, full coverage laser cleaning of the entire interior surface of the container is achieved, as shown in Figure 7.

8、成像数据处理和检测8. Imaging data processing and detection

将两次扫描过程中,拍摄的图片进行拼接,基于容器的三维结构模型进行表面渲染,获得三维图形数据,提供检测结论。The pictures taken during the two scanning processes are spliced, and the surface is rendered based on the three-dimensional structural model of the container to obtain three-dimensional graphic data and provide detection conclusions.

需要说明的是,本申请的说明书和权利要求书及上述附图中的术语“第一”、“第二”等是用于区别类似的对象,而不必用于描述特定的顺序或先后次序。应该理解这样使用的数据在适当情况下可以互换,以便这里描述的本申请的实施例能够以除了在这里图示或描述的那些以外的顺序实施。此外,术语“包括”和“具有”以及他们的任何变形,意图在于覆盖不排他的包含,例如,包含了一系列步骤或单元的过程、方法、系统、产品或设备不必限于清楚地列出的那些步骤或单元,而是可包括没有清楚地列出的或对于这些过程、方法、产品或设备固有的其它步骤或单元。It should be noted that the terms "first", "second", etc. in the description and claims of this application and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It is to be understood that the data so used are interchangeable under appropriate circumstances so that the embodiments of the application described herein can be practiced in sequences other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, e.g., a process, method, system, product, or apparatus that encompasses a series of steps or units and need not be limited to those explicitly listed. Those steps or elements may instead include other steps or elements not expressly listed or inherent to the process, method, product or apparatus.

可选地,本实施例中的具体示例可以参考上述实施例中所描述的示例,本实施例在此不再赘述。Optionally, for specific examples in this embodiment, reference may be made to the examples described in the above embodiments, which will not be described again in this embodiment.

上述本申请实施例序号仅仅为了描述,不代表实施例的优劣。The above serial numbers of the embodiments of the present application are only for description and do not represent the advantages or disadvantages of the embodiments.

在本申请的上述实施例中,对各个实施例的描述都各有侧重,某个实施例中没有详述的部分,可以参见其他实施例的相关描述。In the above-mentioned embodiments of the present application, each embodiment is described with its own emphasis. For parts that are not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments.

以上所述仅是本申请的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本申请原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本申请的保护范围。The above are only the preferred embodiments of the present application. It should be pointed out that for those of ordinary skill in the art, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications can also be made. should be regarded as the scope of protection of this application.

Claims (12)

1. A beam cleaning structure, comprising:
a container (100), the container (100) having a receiving cavity (101) and a container mouth (110) in communication with the receiving cavity (101); the container mouth (110) comprises a first container mouth (102) and a second container mouth (103) which are oppositely arranged;
-a cleaning assembly (200), the cleaning assembly (200) being connected to the container (100), the cleaning assembly (200) comprising:
a laser light source (83), the laser light source (83) being adapted to emit a light beam;
a light spot assembly (500), wherein the light spot assembly (500) comprises a third wedge mirror (501) and a fourth wedge mirror (502) which are arranged at intervals; the light spot assembly (500) is used for receiving the light beam emitted by the laser light source (83) and forming an annular cleaning light spot (510) for cleaning the inner wall surface of the accommodating cavity (101);
a focusing module (7), the focusing module (7) being located between the laser light source (83) and the spot assembly (500) to adjust the focal length of the light beam entering the spot assembly (500);
a wedge mirror assembly (300) which is arranged corresponding to the container mouth (110) so that the cleaning light beam enters the accommodating cavity (101) after being refracted by the wedge mirror assembly (300) and irradiates on the inner wall surface of the accommodating cavity (101); the wedge mirror assembly (300) comprises a first wedge mirror (11) and a second wedge mirror (21);
and the wedge lens assembly (300) is connected with an output shaft of the driving motor to drive the wedge lens assembly (300) to rotate, so that the irradiation direction of the cleaning light beam passing through the wedge lens assembly (300) is regulated.
2. The beam cleaning arrangement according to claim 1, characterized in that the first wedge mirror (11) comprises a first entrance face (111) and a first exit face (112); the second wedge mirror (21) comprises a second entrance face (211) and a second exit face (212); the first exit surface (112) and the second entrance surface (211) are arranged parallel to each other;
the drive motor comprises a first drive motor (10) and a second drive motor (20); an output shaft of the first driving motor (10) is connected with the first wedge mirror (11), and an output shaft of the second driving motor (20) is connected with the second wedge mirror (21).
3. The beam cleaning arrangement according to claim 2, characterized in that the beam cleaning arrangement further comprises an adapter cylinder (2); the adapter cylinder (2) is connected with the first container opening (102) and/or the second container opening (103); the adapter tube (2) is provided with a window sheet (1), the window sheet (1) is of a cylindrical structure, and the axis of the window sheet (1) and the rotation axis of the second wedge mirror (21) are mutually overlapped.
4. The beam cleaning structure of claim 1, further comprising:
the range finder (52), range finder (52) are used for to the internal emission range finding light beam of holding chamber (101), range finding light beam is after the internal face, follow container mouth (110) is penetrated, range finder (52) are according to follow range finding light beam that is penetrated in container mouth (110) obtains distance information, so that focusing module (7) are according to distance information adjusts the focal length of getting into the light beam of facula subassembly (500).
5. The beam cleaning structure of claim 4, further comprising:
the control module (91), control module (91) with distancer (52) signal connection, control module (91) is according to distance information calculates to obtain burnt long information, and will burnt long information transmission is given focusing module (7), so that focusing module (7) is according to burnt long information adjustment burnt long.
6. The beam cleaning structure according to claim 5, further comprising a detection assembly (400), the detection assembly (400) being connected to the container (100), the detection assembly (400) comprising:
an illumination assembly (90) for emitting an illumination beam into the receiving cavity (101);
an imaging assembly (43) for receiving the illumination light beam reflected by the inner wall surface of the accommodating chamber (101) and forming an image of the inner wall surface according to the illumination light beam;
and the focusing lens (42) is in signal connection with the control module so as to adjust the focal length of the illumination light beam.
7. The beam cleaning structure according to claim 6, characterized in that the beam cleaning structure comprises a cleaning dichroic mirror (31), the cleaning dichroic mirror (31) comprising:
a cleaning dichroic mirror incidence surface (311) for causing the illumination beam and the ranging beam to penetrate the cleaning dichroic mirror (31) through the cleaning dichroic mirror incidence surface (311);
and a cleaning dichroic mirror exit surface (312) disposed opposite to the cleaning dichroic mirror entrance surface (311), wherein the cleaning dichroic mirror exit surface (312) refracts the cleaning light beam through the cleaning dichroic mirror exit surface (312) and reaches the wedge mirror assembly (300).
8. The beam cleaning structure according to claim 7, characterized in that the beam cleaning structure comprises a first dichroic mirror (32), the first dichroic mirror (32) being located at a side of the cleaning dichroic mirror (31) remote from the wedge mirror assembly (300); the first dichroic mirror (32) includes:
a first dichroic mirror entrance face (321);
a first dichroic mirror exit surface (322) for allowing the illumination beam reflected by the inner wall of the container (100) to penetrate the first dichroic mirror (32) through the first dichroic mirror exit surface (322), the first dichroic mirror exit surface (322) being adapted to allow the ranging beam to reach the cleaning dichroic mirror (31) after being reflected by the first dichroic mirror exit surface (322).
9. The beam cleaning structure according to claim 8, characterized in that the beam cleaning structure comprises a second dichroic mirror (33), the second dichroic mirror (33) comprising:
a second dichroic mirror entrance face (331) for allowing the illumination beam to penetrate the second dichroic mirror (33) through the second dichroic mirror entrance face (331);
and a second dichroic mirror exit surface (332) for refracting the ranging beam through the second dichroic mirror exit surface (332) and reaching the first dichroic mirror exit surface (322).
10. The beam cleaning structure of claim 9, wherein the beam cleaning structure comprises:
a first filter (41), the first filter (41) being located between the first dichroic mirror (32) and the focus lens (42) to filter the illumination beam;
-a second filter (51), the second filter (51) being located between the second dichroic mirror (33) and the rangefinder (52) for filtering the ranging beam.
11. The beam cleaning structure of claim 1, wherein,
the third wedge mirror (501) comprises a third entrance face (5011) and a third exit face (5012);
the fourth wedge mirror (502) comprises a fourth entrance face (5021) and a fourth exit face (5022); the third exit surface (5012) and the fourth entrance surface (5021) are arranged parallel to each other;
the driving motor comprises a third driving motor and a fourth driving motor; an output shaft of the third driving motor is connected with the third wedge mirror (501), and an output shaft of the fourth driving motor is connected with the fourth wedge mirror (502); the rotation speed of the third driving motor is the same as that of the fourth driving motor.
12. A control method suitable for a beam cleaning structure according to any one of claims 1 to 11, characterized in that the control method comprises:
a third wedge mirror (501) and a fourth wedge mirror (502) of the light spot assembly (500) of the light beam cleaning structure are driven to rotate at the same rotation speed, so that an annular cleaning light beam is formed;
the first wedge mirror (11) and the second wedge mirror (21) of the wedge mirror assembly (300) driving the beam cleaning structure are rotated at different rotational speeds, so that the cleaning spot (510) moves along a spiral line on the inner wall of the container (100) to clean the inner wall of the container (100).
CN202311531107.4A 2023-11-16 2023-11-16 Beam cleaning structure and control method Pending CN117259347A (en)

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CN109365413A (en) * 2018-11-29 2019-02-22 华核(天津)新技术开发有限公司 Laser cleaning head and application method based on circle prism wedge rotation
CN115532737A (en) * 2022-11-22 2022-12-30 中国航空制造技术研究院 Device and method for accurately and uniformly cleaning composite coating of airplane by laser
CN117299695A (en) * 2023-10-20 2023-12-29 中核陕西铀浓缩有限公司 Laser cleaning optimization method and system for product container of uranium enrichment factory
CN117380664A (en) * 2023-11-16 2024-01-12 中核陕西铀浓缩有限公司 Inner wall cleaning structure and cleaning method

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6407385B1 (en) * 1998-12-18 2002-06-18 Nikon Corporation Methods and apparatus for removing particulate foreign matter from the surface of a sample
JP2001300749A (en) * 2000-04-17 2001-10-30 Fuji Xerox Co Ltd Method of laser beam machining, method of manufacturing work with laser beam, and method of cleaning
CN105252144A (en) * 2014-07-17 2016-01-20 大族激光科技产业集团股份有限公司 High-precision laser follow-up cutting head and monitoring and automatic focus finding method thereof
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CN109365413A (en) * 2018-11-29 2019-02-22 华核(天津)新技术开发有限公司 Laser cleaning head and application method based on circle prism wedge rotation
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