CN117260461A - Plane polishing device - Google Patents

Abstract

The plane polishing device comprises a frame and a polishing machine rotationally connected to the frame, wherein a polishing table and an ultrasonic cleaning table are arranged on the frame, and the polishing table and the ultrasonic cleaning table are arranged on two opposite sides of the polishing machine; the output end of the polishing machine is provided with a carrying disc for placing a piece to be polished; the polishing device comprises a polishing table, a rotating part, a heating plate, a rack and a driving mechanism, wherein the rotating part is arranged in the polishing table in a rotating way, the heating plate is arranged on the rotating part and matched with the carrying plate, and the driving mechanism is connected with the rotating part in the rack; the machine frame is also provided with a trimming ring fixing mechanism for cleaning the polishing table, and one side of the machine frame is provided with a material dropping mechanism communicated with the polishing table; compared with the prior art, the device has the advantages that heating, cleaning and polishing are all completed in the same device, the replacement of the to-be-polished workpiece for treatment equipment in the polishing process is avoided, the polishing efficiency of the to-be-polished workpiece is improved, and meanwhile, the steps of heating, cleaning, polishing and the like are all performed in one device, so that the occupied area of the device is reduced.

Description

A flat polishing device

Technical field

The invention relates to the technical field of optical device production, and in particular to a plane polishing device.

Background technique

A polishing unit is a specialized piece of equipment used for precise polishing and polishing of optics. It uses advanced mechanical structure and control technology to create a smooth, flat and fine surface on the surface to improve optical performance. The main features of the polishing device include high precision, strong adjustability, excellent surface quality, process environment control, and customizability. The polishing machine is a high-precision, automated optical processing equipment that can achieve precise polishing and polishing, providing high-quality mirror processing services for the manufacturing and application of optical devices. The operation process of equipment polishing is as follows: 1. Heat the carrier plate, evenly apply paraffin wax on its surface, and then fix the piece to be polished on the carrier plate and let it cool; 2. Clean the carrier plate ultrasonically; 3. Place the polishing plate Place it in the polishing machine for polishing processing; 4. After polishing, use the dressing ring to trim the disc, heat the sample plate, melt the paraffin, and separate the finished product from the sample plate, complete. .

The Chinese patent application number 201610842612.4 discloses surface polishing equipment. The above-disclosed surface polishing equipment includes a frame and a rough polishing device, a fine polishing device and a conveying device installed on it. The rough polishing device and the fine polishing device are respectively arranged on Above the conveyor device, the rough throwing device includes a rough throwing lifting guide mechanism arranged on the frame. The lifting frame includes a lifting frame movable on the coarse throwing lifting guide mechanism, a coarse throwing lifting power device and a device that drives the lifting frame to move up and down. Coarse throwing mechanism on lifting frame. The Chinese patent application number 202020709508. A polishing mechanism for polishing workpieces. The polishing mechanism includes a placement plate arranged above the polishing plate and placement holes evenly distributed on the placement plate. A workpiece fixing sleeve is provided in the placement hole, and a workpiece fixing sleeve is provided on the workpiece fixing sleeve. There is a workpiece fixing hole, and the workpiece fixing hole is provided through the workpiece fixing sleeve. A polishing workpiece is provided in the workpiece fixing hole to fit with the wall of the workpiece fixing hole. A workpiece pressing block is provided above the polishing workpiece. A connecting rod is provided in the middle of the placing plate, and the placing plate is rotatably fixed on the connecting rod.

In the prior art disclosed above, the heating, polishing, cleaning and other steps before polishing the parts to be polished are all carried out separately, and the three steps of heating, polishing and cleaning are carried out using three equipment respectively. After each step is completed, It is also necessary to move the parts to be polished from one device to another setting, which makes the entire polishing process too cumbersome, thereby reducing the polishing efficiency of the parts to be polished. At the same time, the existing polishing equipment takes up a lot of space and is costly.

Contents of the invention

In order to overcome the above-mentioned defects in the prior art, the present invention provides a plane polishing device that integrates heating, polishing, cleaning and other steps.

In order to achieve the above-mentioned object of the invention, the present invention adopts the following technical solution: a plane polishing device, including a frame and a polishing machine rotatably connected to the frame. The frame is provided with a polishing table and an ultrasonic cleaning table. The polishing table and The ultrasonic cleaning table is arranged on opposite sides of the polishing machine; the output end of the polishing machine is provided with a loading plate for placing the parts to be polished; the polishing table is provided with a rotating part, and the rotating part is provided with a loading plate corresponding to the loading plate. The matching heating plate is equipped with a transmission mechanism connected to the rotating parts in the frame; the frame is also provided with a dressing ring fixing mechanism for cleaning the polishing table, and one side of the frame is provided with a transmission mechanism connected to the polishing table. Dripping mechanism.

As a preferred solution of the present invention, the output end of the polishing machine is connected to a polishing shaft. The end of the polishing shaft is provided with a fast fixture that rotates synchronously with the polishing shaft. The carrier plate is installed on the fast fixture.

As a preferred solution of the present invention, the frame is provided with a support column that is rotatably connected to the polishing machine. The polishing machine is provided with a rotating mechanism that drives the polishing shaft to rotate. The rotating mechanism includes a bottom plate arranged in the polishing machine. The bottom plate There is a lifting motor on the lift motor, and a screw rod is connected to the lifting motor.

As a preferred solution of the present invention, the bottom plate is provided with a vertical slide rail, a slide block connected to the screw rod is slidably connected to the slide rail, and a rotating motor connected to the polishing shaft is provided on the slide block. .

As a preferred embodiment of the present invention, the rotating member is arranged in the middle of the polishing table, and the rotating member is provided with a polishing disc that matches the carrier disc.

As a preferred solution of the present invention, the polishing table is provided with a heating plate for heating, one side of the polishing table is connected to a feed port connected to the dropping mechanism, and the bottom of the polishing table is provided with a discharge device for discharging materials. Material pipe, and the frame is equipped with a liquid outlet pipe corresponding to the polishing table.

As a preferred solution of the present invention, the transmission mechanism includes a transmission motor arranged in a frame. The transmission motor is connected with a gear. The frame is provided with a transmission shaft connected to the rotating member. The transmission shaft is provided with a slave. The driving wheel, the gear and the driven wheel are connected with a chain.

As a preferred solution of the present invention, the ultrasonic cleaning table is provided with an ultrasonic generator for cleaning the parts to be polished, and a water outlet is connected to the bottom of the ultrasonic cleaning table.

As a preferred solution of the present invention, the dripping mechanism includes a storage bottle for storing polishing fluid. The storage bottle is connected to a discharge pipe, and the discharge pipe is connected to a discharge port connected to the feed port. .

As a preferred solution of the present invention, the dressing ring fixing mechanism includes a fixed rod arranged on one side of the polishing table. The fixed rod is rotatably connected to an extending bracket, and the extending bracket is provided with a swing arm intersecting with the extending bracket. A clamping piece for fixing the extending bracket and the swing arm bracket is arranged between the extending bracket and the swing arm bracket, and a clamping block for clamping the trimming ring is arranged at the end of the swing arm bracket.

Compared with the prior art, the beneficial effects of the present invention are:

1. Through the polishing table, ultrasonic cleaning table and polishing machine installed on the frame, and the output end of the polishing machine is equipped with a loading disk for placing the parts to be polished, under the action of the polishing machine, the loading disk drives the parts to be polished The parts move back and forth on the polishing table and the ultrasonic cleaning table. Combining the functions of the polishing table and the ultrasonic cleaning table realizes the polishing and cleaning of the parts to be polished. At the same time, through the heating plate set on the rotating part in the polishing table, the parts to be polished are realized. Heating, so that heating, cleaning and polishing are all completed in the same device, which avoids changing the processing equipment of the parts to be polished during the polishing process, improves the polishing efficiency of the parts to be polished, and at the same time, the steps of heating, cleaning and polishing are all in one in the device, thus reducing the footprint of the device;

2. Further, through the rotating mechanism provided in the polishing machine, the rotating mechanism drives the polishing shaft to rotate, thereby driving the parts to be polished on the carrier plate to rotate, causing the parts to be polished to rub against the polishing fluid in the polishing table, thereby achieving the treatment When polishing the polishing parts, the lifting motor in the rotating mechanism realizes the lifting and lowering of the carrier plate, thereby removing the carrier plate from the polishing table and rotating the polishing machine to move the carrier plate to the ultrasonic cleaning table. Cleaning of polished parts.

Description of the drawings

Figure 1 is a schematic structural diagram of the present invention;

Figure 2 is a schematic structural diagram of the trimming ring fixing mechanism of the present invention;

Figure 3 is a schematic structural diagram of the interior of the rack of the present invention;

Figure 4 is a schematic structural diagram of the rotating mechanism;

Figure 5 is a schematic structural diagram of the dripping mechanism;

Figure 6 is a schematic structural diagram of the transmission mechanism;

Figure 7 is a schematic structural diagram of the heating plate;

Figure 8 is a schematic structural diagram of the polishing disc.

Reference signs: frame 1, support column 101, transmission mechanism 2, transmission motor 201, driven wheel 202, gear 203, chain 204, transmission shaft 205, polishing machine 3, rotating mechanism 301, lifting motor 3011, rotating motor 3012, Base plate 3013, slide rail 3014, screw rod 3015, slider 3016, quick fixture 302, polishing shaft 303, housing 304, loading tray 305, polishing table 4, liquid outlet pipe 401, feed port 402, discharge pipe 403 , rotating part 404, heating plate 405, heating plate 406, polishing plate 407, ultrasonic cleaning table 5, ultrasonic generator 501, water outlet 502, dressing ring fixing mechanism 6, fixed rod 601, extending bracket 602, clamping block 603 , clamping piece 604, swing arm bracket 605, dripping mechanism 7, discharge port 701, discharge pipe 702, storage bottle 703.

Detailed ways

The embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

As shown in Figures 1 to 8, a plane polishing device includes a frame 1 and a polishing machine 3 rotatably connected to the frame 1. The frame 1 is provided with a polishing table 4 and an ultrasonic cleaning table 5. The polishing table 4 The ultrasonic cleaning table 5 is arranged on opposite sides of the polishing machine 3; the output end of the polishing machine 3 is provided with a loading tray 305 for placing the parts to be polished; the polishing table 4 is provided with a rotating member 404, and a rotating member 404 is provided on the rotating member 404. The heating plate 406 matched with the loading plate 305 is provided in the frame 1 with a transmission mechanism 2 connected to the rotating member 404; the frame 1 is also provided with a dressing ring fixing mechanism 6 for cleaning the polishing table 4, the frame 1 One side is provided with a dripping mechanism 7 connected with the polishing table 4.

Further, the rack 1 is mainly used for the installation of the mechanism and the operation of the equipment. The rack 1 is internally connected to a transmission mechanism 2, and the polishing machine 3 is fixedly connected to a rotating mechanism 301. The polishing table 4 and the ultrasonic cleaning table 5 are both arranged on On the upper surface of the frame 1, the dressing ring fixing mechanism 6 is also provided on the upper surface of the frame 1, and the dressing ring fixing mechanism 6 cooperates with the polishing table 4. The dressing ring fixing mechanism 6 can be used to fix the dressing ring before polishing and polishing. Afterwards, the polishing table is cleaned and trimmed, and the dripping mechanism 7 is used to provide polishing fluid to the polishing table 4 .

In addition, the carrier tray 305 is rotated and arranged on the polishing machine 3, and the object to be polished is fixed on the lower surface of the carrier tray 305 through paraffin. The heating plate 406 is provided on the rotating member 404, and the carrier tray 305 abuts on the heating plate 406. , the paraffin on the lower surface of the loading tray 305 is heated through the heating plate 406, thereby melting the paraffin. The parts to be polished are placed in the melted paraffin and left to cool. After the paraffin solidifies, the parts to be polished are fixed on the loading tray 305. .

The output end of the polishing machine 3 is connected to a polishing shaft 303. The end of the polishing shaft 303 is provided with a fast fixture 302 that rotates synchronously with the polishing shaft 303. The loading tray 305 is installed on the fast fixture 302. Further, the polishing shaft 303 is coated Connected to the housing 304, the quick clamp 302 can fix the carrier tray 305 and rotate it, while the housing 304 is used to maintain the stability of the quick clamp 302.

The frame 1 is provided with a support column 101 that is rotatably connected to the polishing machine 3. The polishing machine 3 is provided with a rotating mechanism 301 that drives the polishing shaft 303 to rotate. The rotating mechanism 301 includes a bottom plate 3013 provided in the polishing machine 3. The bottom plate 3013 A lifting motor 3011 is provided, and a screw rod 3015 is connected to the lifting motor 3011.

Further, the support column 101 is arranged vertically on the frame 1, and the polishing machine 3 is rotated through the support column 101. In addition, the bottom plate 3013 is fixed in the polishing machine 3, the lifting motor 3011 is set on the top of the bottom plate 3013, and the screw rod 3015 Set vertically, the lifting motor 3011 drives the screw rod 3015 to rotate.

The bottom plate 3013 is provided with a vertically arranged slide rail 3014. The slide rail 3014 is slidably connected to a slide block 3016 connected to the screw rod 3015. The slide block 3016 is provided with a rotating motor 3012 connected to the polishing shaft 303. Further , there are two parallel slide rails 3014 on the base plate 3013, and the two slide rails 3014 are vertically set, the slider 3016 slides vertically on the slide rails 3014, the slider 3016 is rotationally connected to the screw rod 3015, and the rotating motor 3012 is fixed It is arranged on the slider 3016, and the rotating motor 3012 and the slider 3016 move synchronously, and the polishing shaft 303 is connected to the output end of the rotating motor 3012.

The rotating part 404 is arranged in the middle of the polishing table 4, and the rotating part 404 is provided with a polishing disk 407 that matches the loading plate 305. The upper surface of the rotating part 404 is movably connected to a heating disk 406 or a polishing disk 407, and the heating disk 406 is connected At the rotating member 404, the workpiece to be polished can be heated by the heating plate 405, and the polishing disc 407 is connected to the rotating member 404 and cooperates with the carrier plate 305 to polish the workpiece to be polished.

The polishing table 4 is provided with a heating plate 405 for heating. One side of the polishing table 4 is connected to a feed port 402 connected to the dripping mechanism 7. The bottom of the polishing table 4 is provided with a discharge pipe 403 for discharging materials, and The frame 1 is provided with a liquid outlet pipe 401 corresponding to the polishing table 4. Furthermore, the heating plate 405 is located at the bottom of the polishing table 4. The heating function is realized through the cooperation of the heating plate 405 and the heating plate 406. The feed port 402 is set at The side of the polishing table 4 is connected to the liquid outlet pipe 401. The polishing liquid in the dripping mechanism 7 can enter the polishing table 4 through the feed port 402 and the liquid outlet pipe 401. In addition, a discharge pipe 403 is provided on the polishing table. At the lower end of the 4 side, the discharge pipe 403 can be connected to the water pipe, and the discharge pipe 403 is provided with a valve. Through the valve, it can be directly opened to control the outflow of waste liquid, and closed to control the storage of water.

The transmission mechanism 2 includes a transmission motor 201 arranged in the frame 1. The transmission motor 201 is connected with a gear 203. The frame 1 is provided with a transmission shaft 205 connected to the rotating member 404. The transmission shaft 205 is provided with a driven wheel 202. , a chain 204 is connected to the gear 203 and the driven wheel 202. Further, the transmission mechanism 2 drives the gear 203 to rotate through the transmission motor 201. The gear 203 drives the driven wheel 202 to rotate through the chain 204. The driven wheel 202 drives the transmission shaft 205 to rotate, thereby driving The rotating member 404 rotates.

The ultrasonic cleaning table 5 is provided with an ultrasonic generator 501 for cleaning the parts to be polished, and the bottom of the ultrasonic cleaning table 5 is connected to a water outlet 502. Furthermore, the ultrasonic generator 501 is arranged inside the ultrasonic cleaning table 5. The ultrasonic cleaning table 5 Add water or ethanol to clean the parts to be polished before polishing.

The dripping mechanism 7 includes a storage bottle 703 for storing polishing fluid. The storage bottle 703 is connected to a discharge pipe 702 , and the discharge pipe 702 is connected to a discharge port 701 connected with the feed port 402 .

The dressing ring fixing mechanism 6 includes a fixed rod 601 arranged on one side of the polishing table 4. The fixed rod 601 is rotatably connected to an extending bracket 602. The extending bracket 602 is provided with a swing arm bracket 605 that intersects with the extending bracket 602. A clamping piece 604 is provided between the outgoing bracket 602 and the swing arm bracket 605 for fixing the outgoing bracket 602 and the swing arm bracket 605. The end of the swing arm bracket 605 is provided with a clamping block 603 for clamping the trimming ring.

Further, an extension bracket 602 is connected to the top of the fixed rod 601. A clamping piece 604 is provided in the middle of the upper surface of the extending bracket 602. A swing arm bracket 605 is movably connected to the outer surface of the clamping piece 604. The swing arm bracket 605 is away from the clamping piece. A clamping block 603 is movably connected to the outer surface of one end of 604. The extension bracket 602 can be rotated at the fixed rod 601 to find a suitable position on the polishing table 4. The fixed rod 601 can add limit rings on the upper and lower surfaces of the extension bracket 602. , make the extending bracket 602 find the up and down position, the swing arm bracket 605 can rotate at the clamping piece 604, the swing arm bracket 605 is fixed by the rotation of the clamping piece 604, and the clamping block 603 cooperates with the front end of the extending bracket 602 to move Fix the trimming ring. Place the trimming ring on the polishing disc 407 before polishing. Start the polishing disc 407 to rotate, and the trimming ring will rotate on it. With the dripping water from the liquid outlet pipe 401, the polishing disc 407 can be cleaned, and the impurities and polishing materials from the last polishing can be removed. Remove any debris that may remain on the optical disc 407, and use the same method as above after polishing.

When in use, the rotating part 404 is connected to the heating plate 406, the parts to be polished are placed on the heating plate 406, the loading plate 305 is fixed on the quick clamp 302 above the polishing machine 3, and the polishing machine 3 drives the polishing shaft 303 downward through the lifting motor. Move, and then drive the loading tray 305 to move downward, and fit the piece to be polished, the heating plate 405 provides heating for the heating plate 406, and then lift the loading tray 305, coat its lower surface with paraffin, and then move downward. It fits the piece to be polished to ensure that the equipment can dissipate heat while evenly heating the loading tray 305. Water is added to the polishing table 4 and left to cool. At this time, the piece to be polished is fixed under the loading tray 305 through the solidification of paraffin. surface, and then the polishing shaft 303 drives the loading tray 305 to move upward. The rotating support column 101 places the loading tray 305 on the ultrasonic cleaning table 5. The polishing shaft 303 moves downward to the inside of the ultrasonic cleaning table 5 for ultrasonic cleaning. The polishing table 4. Replace the fixed polishing disk 407 on the rotating part 404 below. The rotation of the transmission motor 201 drives the gear 203, the chain 204, the driven wheel 202 and the transmission shaft 205 to rotate, which in turn drives the rotating part 404 to rotate, and then drives the loading plate through the polishing shaft 303. 305 moves upward, the rotating polishing machine 3 drives the loading plate 305 to the polishing table 4 and moves downward to fit the polishing plate 407. A dripping mechanism 7 is set up to control the dripping of polishing liquid through the liquid outlet pipe 401, and the rotating member 404 drives the polishing plate 305. The optical disc 407 and the fast clamp 302 drive the carrier tray 305 to cooperate with each other to complete the polishing work;

Then, the loading tray 305 is lifted up through the polishing shaft 303, and the rotating member 404 replaces the fixed heating plate 406. The loading tray 305 is lowered through the polishing shaft 303 until it fits the heating plate 406. The heating plate 405 is turned on for heating. After the paraffin melts, the polishing process is completed. The shaft 303 lifts the loading tray 305 and takes out the parts to be polished. The rotating part 404 replaces the fixed polishing disc 407. The dressing ring is placed on the polishing disc 407 through the dressing ring fixing mechanism 6 for trimming. The polishing waste liquid is discharged through the polishing table 4. The pipe 403 flows out, and the ultrasonic cleaning waste liquid flows out through the water outlet 502, thereby completing a series of operations of heating, cleaning, and polishing on the same platform.

The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be practiced in other embodiments without departing from the spirit or scope of the invention; accordingly , the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Although this article uses a lot of reference numbers in the figure: frame 1, support column 101, transmission mechanism 2, transmission motor 201, driven wheel 202, gear 203, chain 204, transmission shaft 205, polishing machine 3, rotating mechanism 301 , Lifting motor 3011, rotating motor 3012, base plate 3013, slide rail 3014, screw rod 3015, slider 3016, quick clamp 302, polishing shaft 303, shell 304, carrier tray 305, polishing table 4, liquid outlet pipe 401, Feed port 402, discharge pipe 403, rotating member 404, heating plate 405, heating plate 406, polishing plate 407, ultrasonic cleaning table 5, ultrasonic generator 501, water outlet 502, dressing ring fixing mechanism 6, fixed rod 601, Terms such as extension bracket 602, clamping block 603, clamping piece 604, swing arm bracket 605, dripping mechanism 7, discharge port 701, discharge pipe 702, storage bottle 703, etc. do not exclude the possibility of using other terms. sex. These terms are used only to more conveniently describe and explain the essence of the present invention; interpreting them as any additional limitations is contrary to the spirit of the present invention.

Claims (10)

1. The plane polishing device comprises a frame (1) and a polishing machine (3) rotatably connected to the frame (1), and is characterized in that a polishing table (4) and an ultrasonic cleaning table (5) are arranged on the frame (1), and the polishing table (4) and the ultrasonic cleaning table (5) are arranged on two opposite sides of the polishing machine (3); the output end of the polishing machine (3) is provided with a carrying disc (305) for placing a piece to be polished; a rotating piece (404) is rotationally arranged on the polishing table (4), a heating disc (406) matched with the carrying disc (305) is arranged on the rotating piece (404), and a transmission mechanism (2) connected with the rotating piece (404) is arranged in the frame (1); the machine frame (1) is also provided with a trimming ring fixing mechanism (6) for cleaning the polishing table (4), and one side of the machine frame (1) is provided with a material dropping mechanism (7) communicated with the polishing table (4).

2. The planar polishing device according to claim 1, wherein the output end of the polishing machine (3) is connected with a polishing shaft (303), the end of the polishing shaft (303) is provided with a quick clamp (302) which rotates synchronously with the polishing shaft (303), and the carrying disc (305) is mounted on the quick clamp (302).

3. The plane polishing device according to claim 2, wherein the frame (1) is provided with a support column (101) rotationally connected with the polishing machine (3), a rotating mechanism (301) for driving the polishing shaft (303) to rotate is arranged in the polishing machine (3), the rotating mechanism (301) comprises a bottom plate (3013) arranged in the polishing machine (3), the bottom plate (3013) is provided with a lifting motor (3011), and a screw rod (3015) is connected to the lifting motor (3011).

4. A planar polishing device according to claim 3, wherein the bottom plate (3013) is provided with a vertically arranged slide rail (3014), the slide rail (3014) is slidably connected with a slide block (3016) connected with a screw rod (3015), and the slide block (3016) is provided with a rotating motor (3012) connected with a polishing shaft (303).

5. A planar polishing apparatus according to claim 1, wherein the rotating member (404) is provided in the middle of the polishing table (4), and a polishing plate (407) which is fitted to the carrier plate (305) is provided on the rotating member (404).

6. The planar polishing device according to claim 1, wherein a heating plate (405) for heating is arranged on the polishing table (4), a feeding hole (402) communicated with the material dropping mechanism (7) is connected to one side of the polishing table (4), a material discharging pipe (403) for discharging is arranged at the bottom of the polishing table (4), and a liquid outlet pipe (401) corresponding to the polishing table (4) is arranged on the frame (1).

7. A plane polishing device according to claim 1, characterized in that the transmission mechanism (2) comprises a transmission motor (201) arranged in the frame (1), a gear (203) is connected to the transmission motor (201), a transmission shaft (205) connected with a rotating member (404) is arranged in the frame (1), a driven wheel (202) is arranged on the transmission shaft (205), and a chain (204) is connected to the gear (203) and the driven wheel (202).

8. The planar polishing device according to claim 1, wherein an ultrasonic generator (501) for cleaning a workpiece to be polished is arranged on the ultrasonic cleaning table (5), and a water outlet (502) is connected to the bottom of the ultrasonic cleaning table (5).

9. The planar polishing device according to claim 6, wherein the dropping mechanism (7) comprises a storage bottle (703) for storing polishing liquid, a discharge pipe (702) is connected to the storage bottle (703), and a discharge port (701) communicated with the feed port (402) is connected to the discharge pipe (702).

10. The planar polishing device according to claim 1, wherein the trimming ring fixing mechanism (6) comprises a fixing rod (601) arranged on one side of the polishing table (4), the fixing rod (601) is rotatably connected with an extending support (602), a swing arm support (605) which is arranged to be intersected with the extending support (602) is arranged on the extending support (602), a clamping piece (604) for fixing the extending support (602) and the swing arm support (605) is arranged between the extending support (602) and the swing arm support (605), and a clamping block (603) for clamping the trimming ring is arranged at the end part of the swing arm support (605).