CN117260545A - Feedback dressing device and method for detecting CMP (chemical mechanical polishing) dresser pressure and CMP dresser - Google Patents

Abstract

The invention provides a feedback trimming device and method for detecting the pressure of a CMP trimmer, and a CMP trimmer, which includes a pressure detection device; when the trimmer is in an idle state, the trimming disk is set correspondingly to the detection part of the pressure detection device. The dresser in the idle state is used to drive the dressing disc to be pressed against the detection part, and transmit the dresser pressure to the detection part through the dressing disc; the pressure detection device detects the dresser pressure transmitted through the dressing disc through the detection part; When the dresser is in the working state, the dressing disc is set correspondingly with the grinding pad placed on the grinding disc. The dresser in the working state is used to drive the dressing disc to be pressed against the grinding surface of the grinding pad, and transmit the dresser pressure to the grinding surface through the dressing disc. Pad. The present invention can clearly detect the dresser pressure through the pressure detection device, so as to facilitate the adjustment of the dresser pressure according to the detected dresser pressure, thereby reducing the impact on the wafer grinding rate due to excessive or too low dresser pressure.

Description

Feedback dressing device and method for detecting pressure of CMP dresser and CMP dresser

Technical field

The present invention relates to the technical field of CMP dresser pressure trimming, and in particular to a feedback trimming device and method for detecting CMP dresser pressure and a CMP dresser.

Background technique

As shown in Figure 1, in the chip manufacturing process, a dressing disk 2 is installed on the dresser 1, which is a CMP dresser (Chemical-Mechanical Planarization Pad conditioner, chemical mechanical polishing dresser). The dressing disc (Disk) of the dresser is set correspondingly with the grinding pad (Pad) placed on the grinding disc. The dresser drives the dressing disc to press down to the upper surface of the corresponding grinding pad. The dresser transmits the dresser pressure through the dressing disc to the grinding pad. onto the polishing pad and sand the upper surface of the polishing pad with the dressing disc. Grinding the upper surface of the new polishing pad has the effect of opening the micropores on the surface to warm up the machine. Use a dressing disk to polish the upper surface of the new polishing pad to open the micropores on the surface of the polishing pad, and then chemically and mechanically polish the abrasive liquid during the wafer grinding process. It can fully enter the micropores of the polishing pad, so that the polishing rate of the wafer can be achieved. In addition, polishing the polishing pad can remove residual particles on the surface of the polishing pad and maintain the activated state of the polishing pad surface to ensure the stability of the polishing rate. The particles generated during the grinding process of the wafer will enter the micropores of the polishing pad. At this time, the dressing disc can be polished on the polishing pad to remove the particles, so that the grinding fluid can enter the micropores of the polishing pad to continue to maintain the polishing rate.

Regarding the above related technologies, the applicant believes that in the existing process, if the dresser pressure is too high, the dressing disc will cause excessive consumption of the upper surface of the polishing pad; if the dresser pressure is too small, the dressing disc will have insufficient removal power of particles on the upper surface of the polishing pad, and the dresser will Too much or too little pressure will also affect the polishing rate of the wafer. When the above situation occurs, it generally requires shutdown and inspection, and specific tools need to be used to detect the dresser pressure. The problem cannot be found and solved in time. The specific tool is a special jig used to check the dresser pressure. The jig is divided into two parts. One part is the dresser pressure plate, which needs to be removed and installed on the dresser. The other part is the detection device. Place it on the grinding pad, which is located on the grinding disc; after installation, the dresser drives the dresser pressure plate to press down on the detection device, and the dresser transmits the dresser pressure to the detection device through the dresser pressure plate. Calibrate the dresser pressure using the results obtained from the measuring device.

Contents of the invention

In view of the deficiencies in the prior art, the purpose of the present invention is to provide a feedback trimming device and method for detecting the pressure of a CMP trimmer, and a CMP trimmer.

In order to achieve the above object, in the first aspect, the present invention provides a feedback trimming device for detecting the pressure of a CMP trimmer, including a pressure detection device for detecting the pressure of the trimmer;

A dressing disk is installed on the dresser;

When the dresser is in an idle state, the dressing disc is set correspondingly to the detection part of the pressure detection device, and the dresser in the idle state is used to drive the dressing disc to be pressed to the corresponding detection part, and the dresser pressure passes through the dressing disc. passed to the detection site;

The pressure detection device detects the dresser pressure transmitted through the dressing disc through the detection part;

When the dresser is in the working state, the dressing disc is set correspondingly with the grinding pad placed on the grinding disc, and the dresser in the working state is used to drive the dressing disc to be pressed against the grinding surface of the corresponding grinding pad, and the dresser pressure is passed through The dressing disc is transferred to the polishing pad and the polishing surface of the polishing pad is polished by the dressing disc.

Preferably, the detection part and the polishing surface of the polishing pad are on the same plane.

Preferably, the pressure detection device includes a detection disk and a detection sensor;

The detection location is located on the front side of the detection disk;

The detection sensor is located on the back of the detection disk.

Preferably, a cleaning device for cleaning the trimming disk is embedded in the front surface of the detection disk.

Preferably, a drain outlet for discharging waste water from the cleaning device is provided in the front surface of the detection disk;

The front surface of the detection disk is arranged in a funnel shape, and the drain outlet is located at the bottom of the front surface of the detection disk.

Preferably, the detection sensor includes a plurality of pressure sensors, and the plurality of pressure sensors are arranged in a triangular arrangement on the back of the detection disk.

Preferably, the feedback trimming device further includes a feedback processing device;

The feedback processing device adjusts the dresser pressure according to the dresser pressure detected by the pressure detection device.

Preferably, the feedback processing device sets the pressure preset value and transmits the pressure preset value to the dresser in the idle state;

The dresser in the idle state drives the dressing disc to be pressed against the detection part according to the preset pressure value, and the dresser pressure is transmitted to the detection part through the dressing disc;

The pressure detection device detects the dresser pressure transmitted through the dressing plate through the detection part, obtains the actual pressure value, and transmits the actual pressure value to the feedback processing device;

The feedback processing device receives the actual pressure value, compares the actual pressure value with the preset pressure value, obtains the processing result, and adjusts the dresser pressure according to the processing result.

In a second aspect, the present invention provides a feedback trimming method for detecting CMP dresser pressure. The feedback trimming device for detecting CMP dresser pressure as described in any one of the first aspects is applied, including the following steps:

Pressure setting step: Set the pressure preset value and transmit the pressure preset value to the dresser in idle state;

Pressure detection step: The dresser in idle state drives the dressing plate to be pressed against the detection part according to the preset pressure value, and transmits the pressure of the dresser to the detection part through the dressing plate; the pressure detection device detects the pressure through the detection part. Measure the dresser pressure transmitted through the dressing disc to obtain the actual pressure value;

Pressure adjustment step: Compare the actual pressure value and the preset pressure value to obtain the processing result, and adjust the dresser pressure according to the processing result.

In a third aspect, the present invention provides a CMP dresser, including a dresser body and any feedback trimming device for detecting the pressure of the CMP dresser described in the first aspect.

Compared with the prior art, the present invention includes the following beneficial effects:

When the dresser of the present invention is in an idle state, it can drive the dressing plate to be pressed against the detection part, and the pressure of the dresser is transmitted to the detection part through the dressing plate. The pressure detection device detects the pressure transmitted through the dressing plate through the detection part. The dresser pressure is adjusted according to the detected dresser pressure. When the dresser is in working condition, it drives the dresser disc to be pressed against the grinding surface of the grinding pad, and the adjusted dresser pressure is transmitted to the grinder through the dresser disc. Pad and polish the abrasive surface of the abrasive pad with the dressing disc. The present invention can clearly detect the dresser pressure through the pressure detection device, so as to facilitate the adjustment of the dresser pressure according to the detected dresser pressure, thereby reducing the impact of the dresser pressure being too high or too low on the wafer grinding rate, thereby ensuring The stable polishing rate effectively removes residual particles on the surface of the polishing pad. In addition, there is no need to disassemble the dressing disk, and there is no need to place the pressure detection device on the polishing pad for detection, which reduces the risk of the pressure detection device contaminating the polishing pad and saves replacement. Grinding pad and dressing disc time, no need to shut down regularly to check the dresser pressure, which can improve the use rate of the dresser.

Description of the drawings

Figure 1 is a schematic structural diagram of a dresser in the prior art;

Figure 2 is a schematic structural diagram of a dresser with a feedback dressing device according to Embodiment 1 of the present invention;

Figure 3 is a schematic diagram of the dresser in an idle state according to Embodiment 1 of the present invention;

Figure 4 is a schematic diagram of the dresser in a working state according to Embodiment 1 of the present invention;

Figure 5 is a schematic diagram of the pressure detection device according to Embodiment 1 of the present invention;

Figure 6 is a schematic diagram showing the distribution of the feedback processing device and the pressure detection device according to Embodiment 1 of the present invention.

Reference signs:

1. Dresser; 2. Dressing disc; 3. First cleaning nozzle; 4. Pressure detection device; 5. Drainage outlet; 6. Detection disc; 7. Pressure sensor; 8. Second cleaning nozzle.

Detailed ways

In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the present invention. Obviously, the described embodiments are part of the present invention. Examples, not all examples. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present invention. Unless otherwise defined, technical or scientific terms used herein shall have their ordinary meaning understood by one of ordinary skill in the art to which this invention belongs. The use of "comprising" and similar words herein means that the elements or things appearing before the word include the elements or things listed after the word and their equivalents, without excluding other elements or things.

Embodiment 1 of the present invention discloses a feedback trimming device for detecting the pressure of a CMP trimmer. As shown in Figure 2, it includes a pressure detection device 4 for detecting the pressure of the trimmer 1. The trimmer 1 is equipped with a trimming disk. 2.

As shown in Figures 3 and 4, the dresser 1 can perform position conversion between the idle state and the working state. When the dresser 1 is in the idle state, the dressing disc 2 is set correspondingly to the detection part of the pressure detection device 4, and is in the idle state. The dresser 1 is used to drive the dressing disc 2 to be pressed to the corresponding detection part, and transmit the pressure of the dresser 1 to the detection part through the dressing disc 2. The pressure detection device 4 detects the pressure of the dresser 1 transmitted through the dressing disc 2 through the detection part. Among them, the detection part is the part where the pressure detection device 4 contacts the trimming disc 2 . When the dresser 1 is in the idle state, the dresser 1 is at the initial position.

When the dresser 1 is in the working state, the dressing disc 2 is arranged corresponding to the grinding pad placed on the grinding disc, and the dresser 1 in the working state is used to drive the dressing disc 2 to be pressed against the grinding surface of the corresponding grinding pad, and the dressing disc 2 is pressed against the grinding surface of the corresponding grinding pad. The pressure of the device 1 is transmitted to the polishing pad through the dressing disc 2, and the polishing surface of the polishing pad is polished through the dressing disc 2. Wherein, the polishing surface of the polishing pad is the upper surface of the polishing pad.

The detection part of the pressure detection device 4 is on the same horizontal plane as the polishing surface of the polishing pad.

As shown in Figures 3 and 5, the pressure detection device 4 includes a detection disk 6 and a detection sensor; the detection part of the pressure detection device 4 is located on the front of the detection disk 6; the detection sensor is located on the detection disk 6 6 on the back of the plate. When the dresser 1 is in an idle state, the positions of the dressing disc 2 and the detection sensor are fixed, and the dressing disc 2 and the detection disc 6 are in a concentric upper-lower relationship.

A cleaning device for cleaning the trimming disk 2 is embedded in the front of the detection disk 6 , and the cleaning device is embedded in the detection disk 6 . The cleaning device is used to clean the remaining grinding pad particles and grinding fluid on the surface of the dressing disc 2 .

A drain outlet 5 for discharging waste water from the cleaning device is provided in the front of the detection pan 6; the front of the detection pan 6 is arranged in a funnel shape, and the drain outlet 5 is located at the bottom of the front of the detection pan 6. The detection disk 6 is funnel-shaped to facilitate drainage. After drainage, using the trimming disk 2 to contact the detection disk 6 will not cause errors in detection.

Since the front surface of the detection disk 6 is funnel-shaped, the trimming disk 2 contacts the detection part of the detection disk 6 in line contact. For example, the dressing disc 2 is circular, the outer diameter of the detection disc 6 is larger than the outer diameter of the dressing disc 2 , and the detection part in the detection disc 6 contacts the edge of the dressing disc 2 .

The cleaning device is located on the inner wall of the funnel, higher than the drain outlet 5. The cleaning device is one or more first cleaning nozzles 3 . When there are multiple first cleaning nozzles 3 , the cleaning nozzles 3 are arranged around the drain outlet 5 . For example, three first cleaning nozzles 3 are provided for cleaning the remaining polishing pad particles on the surface of the dressing disc 2 .

The detection sensor includes a plurality of pressure sensors 7 , and the plurality of pressure sensors 7 are arranged in a triangular arrangement on the back of the detection disk 6 . For example, three pressure sensors 7 are provided, each located at the three vertices of an equilateral triangle, so that the detection disk can be balanced.

As shown in FIG. 2 , a plurality of second cleaning nozzles 8 are provided around the dresser 1 for cleaning the remaining polishing pad particles and polishing fluid on the surface of the dresser 1 .

As shown in Figures 2 and 5, both the first cleaning nozzle 3 and the second cleaning nozzle 8 use on-off valves for switching control, and the cleaning liquid used by the first cleaning nozzle 3 and the second cleaning nozzle 8 is deionized water.

The feedback trimming device also includes a feedback processing device. The feedback processing device adjusts the pressure of the dresser 1 according to the pressure of the dresser 1 detected by the pressure detection device 4 .

The feedback processing device sets the pressure preset value and transmits the pressure preset value to the dresser 1 in the idle state; the dresser 1 in the idle state drives the dressing disc 2 to be pressed against the detection part according to the pressure preset value. The pressure of the dresser 1 is transmitted to the detection part through the dressing disc 2; the pressure detection device 4 detects the pressure of the dresser 1 transmitted through the dressing disc 2 through the detection part, obtains the actual pressure value, and transmits the actual pressure value to Feedback processing device; the feedback processing device receives the actual pressure value, compares the actual pressure value with the preset pressure value, obtains the processing result, and adjusts the pressure of the dresser 1 according to the processing result. The adjusted dresser 1 pressure is used as the dresser 1 pressure used by the dresser 1 in working condition.

Specifically, as shown in Figure 6, the feedback processing device includes an integration module, a command module and a pressure controller. The integrated module is, for example, an HMIPC integrated module, and HMIPC is a human-machine interface computer. The command module is the equipment PLC. User is the user, and the I/O module is the input and output module. The integrated module sets the pressure preset value and transmits the pressure preset value to the dresser 1 in the idle state. The dresser 1 in the idle state drives the dressing disc 2 to be pressed against the detection part according to the preset pressure value, and the pressure of the dresser 1 is transmitted to the detection part through the dressing disc 2; the pressure detection device 4 detects the pressure through the detection part. Measure the pressure of the dresser 1 transmitted through the dressing disc 2, obtain the actual pressure value, and transmit the actual pressure value to the integrated module. The integrated module receives the actual pressure value, compares the actual pressure value with the preset pressure value, obtains the processing result, and sends the processing result to the instruction module. The instruction module sends control instructions to the pressure controller according to the processing results. The pressure controller receives the control instruction and adjusts the pressure of the dresser 1 according to the control instruction.

In the prior art, the results obtained by the detection device are manually input into the system for calibration. Generally, it is necessary to check the pressure value of the dresser 1 from 0 to 12 lbf. It usually takes 3 hours to pass the existing dresser pressure plate and detection device. ; Because this inspection requires operating on the polishing pad and there is a risk of contaminating the polishing pad, it takes 5 hours to replace the polishing pad and dressing disc 2 after the calibration. The present invention accurately adjusts the pressure of the dresser 1 through the pressure detection device 4 and the feedback processing device, improves the stability of the grinding rate, effectively removes residual particles on the surface of the polishing pad, maintains the activated state of the surface of the polishing pad, and eliminates the need for regular shutdowns for inspection and dressing. The pressure of the dresser 1 can improve the usage rate of the dresser 1.

Embodiment 2 of the present invention also discloses a feedback trimming device for detecting the pressure of a CMP trimmer. The difference from Embodiment 1 is that the detection part where the trimming disc 2 contacts the detection disc 6 is in surface contact. For example, the detection part The front surface of the disk 6 is a horizontal plane.

Embodiment 3 of the present invention also discloses a feedback trimming method for detecting CMP dresser pressure. The feedback trimming device for detecting CMP dresser pressure of the above embodiment includes the following steps: pressure setting step: setting pressure preset Set the value and transmit the pressure preset value to the dresser 1 in idle state. Pressure detection step: The dresser 1 in the idle state drives the dressing disc 2 to be pressed against the detection part according to the preset pressure value, and transmits the pressure of the dresser 1 to the detection part through the dressing disc 2; pressure detection device 4 The pressure of the dresser 1 transmitted through the dressing disc 2 is detected through the detection part to obtain the actual pressure value; the pressure adjustment step: compare the actual pressure value with the preset pressure value to obtain the processing result, and adjust the dresser 1 according to the processing result. pressure.

The activation conditions of the pressure detection device 4 in the feedback trimming method can be customized according to user needs, for example, based on the set time or the number of wafers.

The feedback trimming method specifically includes the following steps:

Step 1: When the dresser 1 is in an idle state, enable the pressure detection device 4 according to user requirements. When enabled, the dresser 1 stops rotating at the initial position, and the first cleaning nozzle 3 and the second cleaning nozzle 8 are closed through the switch valve control. Then set the preset pressure value of the dresser 1 through the integrated module, for example, set it to 5lbf, press down on the pressure detection device 4, and maintain it for 5 seconds to obtain a stable pressure. The dresser 1 in the idle state drives the dressing disc 2 to be pressed against the detection part according to the preset pressure value, and the pressure of the dresser 1 is transmitted to the detection part through the dressing disc 2; the pressure detection device 4 detects the pressure through the detection part. Measure the pressure of the dresser 1 transmitted through the dressing disc 2, obtain the actual pressure value, and transmit the actual pressure value to the integrated module. Among them, the pressure is set in the integrated module software parameters: for example, the dresser 1 pressure is 5lbf in the process menu of dresser 1, then the integrated module software parameters are also set to 5lbf.

Step 2: After completing step 1, the integrated module receives the actual pressure value and compares it with the pressure set value. If the error between the actual pressure value and the pressure set value is greater than 0.2lbf, the instruction module sends an instruction to the pressure controller. The pressure controller The pressure of the dresser 1 is adjusted by controlling the pressure regulating valve, otherwise the pressure of the dresser 1 is not adjusted. For example, if the actual pressure value obtained by the pressure detection device 4 is 4lbf, it is fed back to the integrated module for calculation and needs to be compensated by 1lbf, and the pressure controller is used to adjust to the required 5lbf.

Step 3: After adjustment, repeat steps 1 and 2, and check again whether the pressure of dresser 1 reaches the set value standard. If the pressure of dresser 1 still does not reach the set value standard after two adjustments, dresser 1 will sound an alarm and need to be shut down for inspection. After the pressure adjustment is completed, the dressing disc 2 rises, and the first cleaning nozzle 3 and the second cleaning nozzle 8 are opened through the switch valve control to continue cleaning the dresser 1 and the dressing disc 2.

Embodiment 4 of the present invention also discloses a CMP dresser, which includes a dresser body and a feedback trimming device for detecting the pressure of the CMP dresser of the above embodiment.

Although the embodiments of the present invention have been described in detail above, it will be obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the invention as described in the claims. Furthermore, the invention described herein is capable of other embodiments and of being practiced or carried out in various ways.

Claims (10)

1. A feedback trimming device for detecting the pressure of a CMP trimmer, characterized in that it includes a pressure detection device (4) for detecting the pressure of the trimmer (1); A dressing disk (2) is installed on the dresser (1); When the dresser (1) is in an idle state, the dressing disc (2) is arranged corresponding to the detection part of the pressure detection device (4), and the dresser (1) in the idle state is used to drive the dressing disc (2) to press. Connect it to the corresponding detection part, and transfer the pressure of the dresser (1) to the detection part through the dressing disc (2); The pressure detection device (4) detects the pressure of the dresser (1) transmitted through the dressing disk (2) through the detection part; When the dresser (1) is in the working state, the dressing disc (2) is arranged corresponding to the grinding pad placed on the grinding disc, and the dresser (1) in the working state is used to drive the dressing disc (2) to be pressed to the corresponding grinding pad. On the polishing surface of the polishing pad, the pressure of the dresser (1) is transferred to the polishing pad through the dressing disc (2), and the polishing surface of the polishing pad is polished through the dressing disc (2). 2. The feedback dressing device for detecting pressure of a CMP dresser according to claim 1, wherein the detection part is on the same plane as the polishing surface of the polishing pad. 3. The feedback trimming device for detecting CMP trimmer pressure according to claim 1, characterized in that the pressure detection device (4) includes a detection disk (6) and a detection sensor; The detection location is located on the front of the detection disk (6); The detection sensor is located on the back of the detection disk (6). 4. The feedback trimming device for detecting CMP trimmer pressure according to claim 3, characterized in that a cleaning device for cleaning the trimming disc (2) is embedded in the front of the detection disc (6). 5. The feedback trimming device for detecting CMP trimmer pressure according to claim 4, characterized in that a drain outlet (5) for discharging waste water from the cleaning device is provided in the front of the detection tray (6); The front surface of the detection disk (6) is arranged in a funnel shape, and the drain outlet (5) is located at the bottom of the front surface of the detection disk (6). 6. The feedback trimming device for detecting CMP trimmer pressure according to claim 3, characterized in that the detection sensor includes a plurality of pressure sensors (7), and the plurality of pressure sensors (7) are on the detection disk. (6) The back of the disk is arranged in a triangular arrangement. 7. The feedback trimming device for detecting CMP trimmer pressure according to claim 1, wherein the feedback trimming device further includes a feedback processing device; The feedback processing device adjusts the pressure of the dresser (1) according to the pressure of the dresser (1) detected by the pressure detection device (4). 8. The feedback trimming device for detecting CMP trimmer pressure according to claim 7, characterized in that the feedback processing device sets a pressure preset value and transmits the pressure preset value to the trimmer in an idle state. (1); The dresser (1) in the idle state drives the dresser disc (2) to be pressed against the detection part according to the preset pressure value, and transmits the pressure of the dresser (1) to the detection part through the dresser disc (2); The pressure detection device (4) detects the pressure of the dresser (1) transmitted through the dressing disk (2) through the detection part, obtains the actual pressure value, and transmits the actual pressure value to the feedback processing device; The feedback processing device receives the actual pressure value, compares the actual pressure value with the preset pressure value, obtains the processing result, and adjusts the dresser (1) pressure according to the processing result. 9. A feedback trimming method for detecting CMP trimmer pressure, characterized in that applying the feedback trimming device for detecting CMP trimmer pressure according to any one of claims 1 to 8 includes the following steps: Pressure setting step: set the pressure preset value and transmit the pressure preset value to the dresser in idle state (1); Pressure detection step: The dresser (1) in idle state drives the dressing disc (2) to be pressed against the detection part according to the preset pressure value, and the pressure of the dresser (1) is transmitted to the detection part through the dressing disc (2). position; the pressure detection device (4) detects the pressure of the dresser (1) transmitted through the dressing disc (2) through the detection position, and obtains the actual pressure value; Pressure adjustment step: Compare the actual pressure value and the preset pressure value to obtain the processing result, and adjust the dresser (1) pressure according to the processing result. 10. A CMP dresser, characterized in that it includes a dresser body and a feedback dressing device for detecting CMP dresser pressure according to any one of claims 1 to 8.