CN117387744A - Dynamic and static cilia type bionic hydrophone - Google Patents
Dynamic and static cilia type bionic hydrophone Download PDFInfo
- Publication number
- CN117387744A CN117387744A CN202311269156.5A CN202311269156A CN117387744A CN 117387744 A CN117387744 A CN 117387744A CN 202311269156 A CN202311269156 A CN 202311269156A CN 117387744 A CN117387744 A CN 117387744A
- Authority
- CN
- China
- Prior art keywords
- cilia
- static
- dynamic
- hydrophone
- static cilia
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000004081 cilia Anatomy 0.000 title claims abstract description 220
- 230000003068 static effect Effects 0.000 title claims abstract description 98
- 239000011664 nicotinic acid Substances 0.000 title claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 230000002093 peripheral effect Effects 0.000 claims abstract description 6
- 239000010408 film Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 8
- 239000002033 PVDF binder Substances 0.000 claims description 7
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 7
- VRBFTYUMFJWSJY-UHFFFAOYSA-N 28804-46-8 Chemical compound ClC1CC(C=C2)=CC=C2C(Cl)CC2=CC=C1C=C2 VRBFTYUMFJWSJY-UHFFFAOYSA-N 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 238000013461 design Methods 0.000 abstract description 2
- 239000000084 colloidal system Substances 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 230000003321 amplification Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000003199 nucleic acid amplification method Methods 0.000 description 5
- 241000251468 Actinopterygii Species 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 210000005036 nerve Anatomy 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- ISRUGXGCCGIOQO-UHFFFAOYSA-N Rhoden Chemical compound CNC(=O)OC1=CC=CC=C1OC(C)C ISRUGXGCCGIOQO-UHFFFAOYSA-N 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 210000002768 hair cell Anatomy 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008447 perception Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 230000005236 sound signal Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003592 biomimetic effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 210000001190 lateral line system Anatomy 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 210000002569 neuron Anatomy 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 210000000697 sensory organ Anatomy 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/30—Assessment of water resources
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
The invention provides a dynamic and static cilia type bionic hydrophone, which comprises: dynamic cilia, static cilia and a substrate support; the substrate support is provided with the movable cilia and a plurality of static cilia, and the static cilia are positioned on the periphery side of the movable cilia; the dynamic cilia include: cilia roof and cilia shaft; one end of the cilia rod is connected with the substrate support, the other end of the cilia rod is connected with the cilia top, and the static cilia is bonded with the peripheral side of the cilia top. The structural design of dynamic and static cilia combination amplifies and transmits the deformation at the vibration picking center to the piezoelectric layer through the lever principle, so that the sensitivity of the hydrophone is improved.
Description
Technical Field
The invention relates to the field of underwater acoustic sensors, in particular to a dynamic and static cilia type bionic hydrophone.
Background
Biological studies have found that the fish side line plays an important role in its environmental perception as a body surface sensory organ specific to fish and amphibians. Particularly for some fish living in a cave, the long-term dark environment completely degenerates the vision, and the fish still can well finish actions such as group play, prey capture and communication. The nerve dome is a basic functional unit of a lateral line system and consists of hair cells, supporting cells, nerve cells and the like. Wherein the cilia bundles in the hair cells consist of a single moving cilia and a plurality of static cilia. When the artificial cilia are stimulated by external acoustic signals, the dynamic cilia drive the static cilia to bend and change nerve electrical signals, so that the transformation from the underwater acoustic vibration signals to nerve signals is realized.
Compared with flow field detection, the underwater sound signal is weaker, and the sensor is required to have higher vibration pickup sensitivity. In view of the high sensitivity of the lateral line nerve mounds, much development work has been done in recent years on related biomimetic sensors. The patent CN109470281B discloses a bionic side-line flow sensor, comprising: a gel top, a sensor housing, and a polyvinylidene fluoride piezoelectric film; the colloid top comprises a colloid top part and a first cylinder, the colloid top part is positioned on the first cylinder, and the bottom area of the colloid top part is smaller than that of the bottom surface of the first cylinder; the bottom of the first cylinder is provided with a first groove, the bottom of the colloid top is provided with a second groove, the bottom area of the second groove is smaller than that of the first groove, and the first groove is communicated with the second groove; the sensor shell comprises a second cylindrical shell and a bulge, the bulge is arranged on the top surface of the second cylindrical shell, and the size of the bulge is matched with the size of the first groove, so that the sensor shell is fixedly connected with the colloid top; one end of the polyvinylidene fluoride piezoelectric film is inserted into the bulge, and the other end of the polyvinylidene fluoride piezoelectric film is inserted into the second groove. Patent CN114323147a discloses a high-sensitivity underwater bionic side line structure, which comprises electrodes respectively led out from two sides of the bottom of an IPMC multi-cilia-like sensor, wherein the bottom of the IPMC multi-cilia-like sensor and the electrodes forming an integral structure are fixed in a sensor fixing base, a bionic sensitive top is filled with a filling solution, and the sensor base is reversely inserted into the bionic sensitive top filled with the filling solution and is fixedly connected with the sensor base through bolts and nuts.
The traditional bionic hydrophone mostly adopts a structural form that cilia are bonded to the center of a bottom cross beam. The cilia are transferred to the cross beam after picking up the vibration signal, and the piezoelectric or piezoresistive material on the beam is used for realizing the sound-electricity conversion. However, the cross beam is easily broken during the process of cilia adhesion and use, which restricts the practical application to a certain extent. Another common form of construction is to arrange the piezoelectric material directly on the vibrofibrium pick-up. However, the structure is not amplified by deformation after vibration pickup, and the deformation of the piezoelectric material is small. Therefore, the vibration signal transmission path after the bionic cilia vibration pickup is changed, the structural reliability of the bionic cilia vibration pickup is improved, the deformation size of the piezoelectric layer is increased, and the bionic cilia vibration pickup has positive significance for engineering application of pushing the cilia bionic hydrophone.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a dynamic and static cilia type bionic hydrophone.
The invention provides a dynamic and static cilia type bionic hydrophone, which comprises: dynamic cilia, static cilia and a substrate support;
the substrate support is provided with the movable cilia and a plurality of static cilia, and the static cilia are positioned on the periphery side of the movable cilia;
the dynamic cilia include: cilia roof and cilia shaft;
one end of the cilia rod is connected with the substrate support, the other end of the cilia rod is connected with the cilia top, and the static cilia is bonded with the peripheral side of the cilia top.
Preferably, the static cilia include: a first static cilia, a second static cilia, a third static cilia, and a fourth static cilia;
the first static cilia, the second static cilia, the third static cilia and the fourth static cilia are identical in structure shape and are long-strip-shaped.
Preferably, the first, second, third or fourth electrostatic cilia comprises an outer waterproof layer, an outer electrode layer, a piezoelectric film layer, an inner electrode layer, a flexible substrate layer, and an inner waterproof layer, which are sequentially connected.
Preferably, the cilia shaft has a circular cross section, the cilia tip has a quadrangular prism shape, and the first, second, third and fourth electrostatic cilia are respectively stuck to one side of the cilia tip.
Preferably, the substrate support is provided with a circular groove, 4 strip-shaped slits and a through hole;
the cilia rod is embedded into the circular groove, one end of the static cilia is embedded into the strip-shaped slit, and the through hole is used for fixedly mounting the hydrophone.
Preferably, the outer electrode layer leads out a signal line and the inner electrode layer leads out a ground line.
Preferably, the first and third opposing outer electrode signals of the first and fourth opposing outer electrode signals of the second and fourth electrostatic cilia are differentiated.
Preferably, the piezoelectric film layer is made of polyvinylidene fluoride, the outer electrode layer and the inner electrode layer are made of silver electrodes, copper electrodes, gold electrodes and other metal electrodes, and are prepared by magnetron sputtering or chemical plating, the outer waterproof layer and the inner waterproof layer are made of Parylene C materials (known high polymer coating materials), and the thicknesses of the outer waterproof layer and the inner waterproof layer are 10um-15um.
Preferably, the cilia tip has a side length of 10-15 times the diameter of the cilia shaft, which is 15-20 times the thickness of the static cilia.
Preferably, the cilia roof and the cilia shaft are integrally formed.
Compared with the prior art, the invention has the following beneficial effects:
1. the structural design of dynamic and static cilia combination transmits the deformation at the vibration pickup center to the piezoelectric layer in an amplified manner through the lever principle, so that the sensitivity of the hydrophone is improved;
2. the movable cilia are directly arranged on the substrate support, and the movable cilia are arranged in parallel and attached, so that the problem that the thin layer structure where the piezoelectric layer is arranged needs to bear the gravity of the vibration pickup component and is easy to break is avoided.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a perspective view of a dynamic and static ciliated bionic hydrophone;
FIG. 2 is an exploded view of a dynamic and static ciliated bionic hydrophone;
FIG. 3 is a schematic diagram of a dynamic cilia structure;
FIG. 4 is a schematic view of the structure of static cilia;
FIG. 5 is a top view of a substrate support;
FIG. 6 is a schematic diagram of sound intensity and sound source direction perception of a hydrophone;
FIG. 7 is a cross-sectional view (A-A) of FIG. 5;
FIG. 8 is a schematic diagram (I) of the principle of deformation amplification of a dynamic and static cilia structure;
FIG. 9 is a schematic diagram of the deformation magnification principle of the dynamic and static cilia structure (II);
FIG. 10 is a graph showing simulated results of deformation and displacement of the dynamic cilia under the action of sound waves;
FIG. 11 is a plot of the sensitivity frequency domain response of a hydrophone;
fig. 12 is a directivity diagram of a hydrophone.
The figure shows:
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present invention.
Example 1
As shown in fig. 1 to 3, the present embodiment includes: a dynamic cilia 1, a static cilia and a substrate support 6; the substrate support 6 is mounted with the movable cilia 1 and a plurality of static cilia located at the peripheral side of the movable cilia 1. The cilia apex 101 has a side length of 10-15 times the diameter of the cilia shaft 102 and the cilia shaft 102 has a diameter of 15-20 times the thickness of the static cilia.
The static cilia include: a first electrostatic cilia 2, a second electrostatic cilia 3, a third electrostatic cilia 4, and a fourth electrostatic cilia 5; the first electrostatic cilia 2, the second electrostatic cilia 3, the third electrostatic cilia 4 and the fourth electrostatic cilia 5 are identical in structural shape and are elongated. The motor cilia 1 includes: a ciliated tip 101 and a ciliated shaft 102; the cilia shaft 102 has one end connected to the substrate support 6 and the other end connected to the cilia tip 101, and the cilia tip 101 and the cilia shaft 102 are integrally formed. The static cilia are bonded to the peripheral side of the cilia apex 101. Specifically, the cilia shaft 102 has a circular cross section, the cilia tip 101 has a quadrangular prism shape, and the first electrostatic cilia 2, the second electrostatic cilia 3, the third electrostatic cilia 4, and the fourth electrostatic cilia 5 are attached to one side of the cilia tip 101, respectively.
As shown in fig. 4, the first electrostatic cilia 2, the second electrostatic cilia 3, the third electrostatic cilia 4, or the fourth electrostatic cilia 5 include an outer waterproof layer 201, an outer electrode layer 202, a piezoelectric film layer 203, an inner electrode layer 204, a flexible substrate layer 205, and an inner waterproof layer 206 (inside on the side of the cilia shaft 102 close to the movable cilia 1) connected in this order. The outer electrode layer 202 leads out a signal line, the inner electrode layer 204 leads out a ground line, the difference between the signals of the outer electrodes of the first electrostatic cilia 2 and the opposite third electrostatic cilia 4 is output as a signal V1, and the difference between the signals of the outer electrodes of the second electrostatic cilia 3 and the opposite fourth electrostatic cilia 5 is output as a signal V2. The piezoelectric film layer 203 is made of polyvinylidene fluoride film, and the thickness can be selected from the thicknesses of 28um, 50um, 100um and the like in combination with the sensitivity requirement and the requirement of the impedance matching angle of the pre-amplification circuit on the capacitance. The outer electrode layer 202 and the inner electrode layer 204 are prepared by adopting metal electrodes such as silver electrodes, copper electrodes and gold electrodes through a magnetron sputtering or chemical plating method, the outer waterproof layer 201 and the inner waterproof layer 206 are made of a Parylene C material, a compact waterproof film is formed through a vacuum vapor deposition coating process, and the deposition time is controlled so that the thickness of the outer waterproof layer 201 and the inner waterproof layer 206 is 10um-15um.
As shown in fig. 5, the substrate holder 6 is provided with a circular groove 601, a bar slit 602, and a through hole 603; the cilia rod 102 is embedded in the circular groove 601, one end of the static cilia is embedded in the strip-shaped slit 602, and the through holes 603 are used for fixedly mounting the hydrophone.
Example 2
Example 2 is a preferred example of example 1.
As shown in fig. 1 to 3, the present embodiment includes: the method comprises the steps of moving cilia 1, first static cilia 2, second static cilia 3, third static cilia 4, fourth static cilia 5 and a substrate support 6.
Specifically, the dynamic cilia 1 includes a integrally formed cilia tip 101 and a cilia shaft 102, the cilia tip 101 having a quadrangular prism shape with a square horizontal cross section, and the cilia shaft 102 having a cylindrical shape. The center of the bottom of the cilia top 101 is connected with the top of the cilia rod 102, the bottom of the cilia rod 102 is embedded into the groove 601 of the substrate support 6, and the side length of the cilia top 101 is 12 times of the diameter of the cilia rod 102.
As shown in fig. 4, the first electrostatic cilia 2, the second electrostatic cilia 3, the third electrostatic cilia 4, and the fourth electrostatic cilia 5 are elongated and have the same inner layered structure. Taking the first static cilia 2 as an example, it is composed of an outer waterproof layer 201, an outer electrode layer 202, a piezoelectric film layer 203, an inner electrode layer 204, a flexible substrate layer 205 and an inner waterproof layer 206 in this order. The upper ends of the four static cilia are respectively bonded with the four sides of the cilia top 101, and the bottoms of the static cilia are respectively embedded into the corresponding strip-shaped slits 602 of the substrate support 6.
In one embodiment, the piezoelectric thin film layer 203 is made of polyvinylidene fluoride and has a thickness of 100um; the outer electrode layer 202 and the inner electrode layer 204 are prepared by a magnetron sputtering method by adopting silver electrodes; the signal wires are led out from the outer electrode layer 202, and the grounding wires are led out from the inner electrode layer 204; the thickness of the outer waterproof layer 201 and the inner waterproof layer 206 is 15um; the first static cilia 2 has an overall thickness of one twentieth of the diameter of the cilia shaft 102, and the second static cilia 3, the third static cilia 4 and the fourth static cilia 5 have the same structure, material, etc. as the first static cilia 2.
In one embodiment, as shown in FIG. 5, the substrate support 6 is a short cylinder with a circular recess 601 and 4 bar-shaped slits 602 in its upper surface. The base support 6 has 4 through holes 603 for fixedly mounting the hydrophone. The dimensions of the circular recess 601 and the dimensions of the ciliated shaft 102 cooperate with each other.
Working principle:
in practical application, when the first-direction underwater sound signal shown in fig. 6 acts on the dynamic and static cilia type bionic hydrophone, the dynamic cilia 1 generate co-vibration under the action of the sound wave vibration signal. As shown in fig. 8 and 9, the deformation of the movable cilia 1 is transmitted to the first static cilia 2 and the third static cilia 4 through the lever amplification of the cilia tip 101, and in order to specifically characterize the deformation amplification effect of the cilia tip, the deformation displacement amount of the cilia tip 101 of the movable and static cilia type bionic hydrophone under the action of sound waves is subjected to simulation analysis. As shown in figure 10, the ciliated apex 101 is displaced in a height direction and the overall displacement profile, wherein the height direction and the horizontal direction are referenced in the view of figure 7. It can be seen that both the height-wise displacement and the total displacement on the ciliated apex 101 increase with increasing distance from the center of the ciliated apex 101.
Further, the first static cilia 2 are deformed in tension in the height direction, and the third static cilia 4 are deformed in compression in the height direction. So that the first and third static cilia 2 and 4 generate opposite charges on the outer electrodes, the charge signals are collected and subjected to differential processing, and the sound source intensity can be obtained by outputting the signals after differential processing. The sensitivity frequency domain response curve of the dynamic and static ciliated bionic hydrophone is shown in fig. 11, and it can be seen that the dynamic and static ciliated bionic hydrophone satisfies the rule of 6dB increase in sensitivity per octave, and the sensitivity at 1kHz is-209.9 dB (0 db=1V/μpa).
When the second direction underwater acoustic signal as shown in fig. 6 acts on the moving cilia type bionic hydrophone, the moving cilia 1 can be stressed to be decomposed along two orthogonal components X, Y. The deformation amplification transfer causes the first and second electrostatic cilia 2 and 3 to be tensile-deformed in the height direction, and the third and fourth electrostatic cilia 4 and 5 to be compression-deformed in the height direction. The direction of the signals is determined according to the proportional relation of the signal sizes between the differential output signals V1 and V2, simulation calculation is carried out by using far-field plane waves of 500Hz and 1Pa, and the distribution situation of the differential output signals V1 and V2 under the action of sound waves in different incidence directions is shown in figure 12. It can be seen that the differential output signals V1, V2 each exhibit an "8" cosine directivity.
In the description of the present application, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, merely to facilitate description of the present application and simplify the description, and do not indicate or imply that the devices or elements being referred to must have a specific orientation, be configured and operated in a specific orientation, and are not to be construed as limiting the present application.
The foregoing describes specific embodiments of the present invention. It is to be understood that the invention is not limited to the particular embodiments described above, and that various changes or modifications may be made by those skilled in the art within the scope of the appended claims without affecting the spirit of the invention. The embodiments of the present application and features in the embodiments may be combined with each other arbitrarily without conflict.
Claims (10)
1. A dynamic and static cilia type bionic hydrophone, comprising: a dynamic cilia (1), a static cilia and a substrate support (6);
-mounting said moving cilia (1) and a plurality of said static cilia on said substrate support (6), a plurality of said static cilia being located on the peripheral side of said moving cilia (1);
the motor cilia (1) comprises: a ciliated roof (101) and ciliated stems (102);
one end of the cilia rod (102) is connected with the substrate support (6), the other end is connected with the cilia top (101), and the static cilia is adhered to the peripheral side of the cilia top (101).
2. The moving and static cilia type bionic hydrophone of claim 1, wherein the moving and static cilia comprises: a first static cilia (2), a second static cilia (3), a third static cilia (4) and a fourth static cilia (5);
the first static cilia (2), the second static cilia (3), the third static cilia (4) and the fourth static cilia (5) are identical in structural shape and are long-strip-shaped.
3. The dynamic and static cilia type bionic hydrophone of claim 2, wherein: the first static cilia (2), the second static cilia (3), the third static cilia (4) or the fourth static cilia (5) comprise an outer waterproof layer (201), an outer electrode layer (202), a piezoelectric film layer (203), an inner electrode layer (204), a flexible substrate layer (205) and an inner waterproof layer (206) which are sequentially connected.
4. A dynamic and static cilia type bionic hydrophone according to claim 3, characterized in that: the cross section of the cilia rod (102) is circular, the cilia top (101) is quadrangular, and the first static cilia (2), the second static cilia (3), the third static cilia (4) and the fourth static cilia (5) are respectively stuck to one side of the cilia top (101).
5. The dynamic and static cilia type bionic hydrophone of claim 1, wherein: the substrate support (6) is provided with a circular groove (601), a strip-shaped slit (602) and a through hole (603);
the cilia rod (102) is embedded in the circular groove (601), one end of the static cilia is embedded in the strip-shaped slit (602), and the through holes (603) are used for fixedly mounting the hydrophone.
6. A dynamic and static cilia type bionic hydrophone according to claim 3, characterized in that: the outer electrode layer (202) leads out a signal line, and the inner electrode layer (204) leads out a ground line.
7. A dynamic and static cilia type bionic hydrophone according to claim 3, characterized in that: and the signals of the outer side electrodes of the first static cilia (2) and the opposite third static cilia (4) are differentiated, and the signals of the outer side electrodes of the second static cilia (3) and the opposite fourth static cilia (5) are differentiated.
8. A dynamic and static cilia type bionic hydrophone according to claim 3, characterized in that: the piezoelectric thin film layer (203) is made of polyvinylidene fluoride thin film, the outer electrode layer (202) and the inner electrode layer (204) are made of metal electrodes, the outer waterproof layer (201) and the inner waterproof layer (206) are made of Parylene C material, and the thicknesses of the outer waterproof layer (201) and the inner waterproof layer (206) are 10um-15um.
9. The dynamic and static cilia type bionic hydrophone of claim 1, wherein: the cilia tip (101) has a side length of 10-15 times the diameter of the cilia shaft (102), and the cilia shaft (102) has a diameter of 15-20 times the thickness of the static cilia.
10. The dynamic and static cilia type bionic hydrophone of claim 1, wherein: the cilia tip (101) and the cilia shaft (102) are integrally formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311269156.5A CN117387744A (en) | 2023-09-27 | 2023-09-27 | Dynamic and static cilia type bionic hydrophone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311269156.5A CN117387744A (en) | 2023-09-27 | 2023-09-27 | Dynamic and static cilia type bionic hydrophone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117387744A true CN117387744A (en) | 2024-01-12 |
Family
ID=89467515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311269156.5A Pending CN117387744A (en) | 2023-09-27 | 2023-09-27 | Dynamic and static cilia type bionic hydrophone |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117387744A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119984483A (en) * | 2025-02-28 | 2025-05-13 | 浙江大学 | A ciliary acoustic wave detection device and method |
-
2023
- 2023-09-27 CN CN202311269156.5A patent/CN117387744A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119984483A (en) * | 2025-02-28 | 2025-05-13 | 浙江大学 | A ciliary acoustic wave detection device and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11301077B2 (en) | Piezoelectric sensing apparatus and applications thereof | |
| US20070041273A1 (en) | Acoustic sensor | |
| CN112180116B (en) | Flexible bionic lateral line sensor of integrated IPMC sensing structure | |
| CN109561876A (en) | Ultrasonic transducer and its manufacturing method | |
| EP0237616A2 (en) | Line array transducer assembly | |
| CN117387744A (en) | Dynamic and static cilia type bionic hydrophone | |
| US4906886A (en) | Ultrasound sensor | |
| US20130144143A1 (en) | PROBE STRUCTURE CAPABLE OF MEASURING pH LEVEL | |
| US5774423A (en) | Acoustic sensor and array thereof | |
| Zhang et al. | Design and fabrication of a multipurpose cilia cluster MEMS vector hydrophone | |
| US10074798B2 (en) | Method of manufacturing ultrasonic probe | |
| CN206210845U (en) | A kind of piezoelectric sensing device | |
| US5257243A (en) | Flexible acoustic array with polymer hydrophones | |
| CN111596262B (en) | Vector hydrophone and multi-target direction estimation method based on vector hydrophone | |
| EP0381796B1 (en) | Ultrasonic sensor | |
| US9658205B2 (en) | Electrode array for analyzing electrical characteristics of cell spheroid | |
| Kusko et al. | Design, fabrication and characterization of a low-impedance 3D Electrode array system for neuro-electrophysiology | |
| CN110702940A (en) | Flow velocity sensor based on sheet IPMC material | |
| JP7685046B2 (en) | Impedance Matching Acoustic Transducer | |
| Izadi | Bio-inspired MEMS aquatic flow sensor arrays | |
| You et al. | Super-resolution imaging using multi-electrode CMUTs: Theoretical design and simulation using point targets | |
| Tao et al. | Bio-inspired directional sensor with piezoelectric microfiber and helical electrodes | |
| CN102551789A (en) | Novel heart sound sensor | |
| JPS5838542A (en) | Ultrasonic probe | |
| CN112526164A (en) | Otolith organ solid model based on annular liquid core organic piezoelectric material tube |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |