CN117720101A - Graphene film containing folds and preparation method thereof - Google Patents
Graphene film containing folds and preparation method thereof Download PDFInfo
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Abstract
本发明涉及一种含有褶皱的石墨烯薄膜及其制备方法,包括以下步骤:(1)使用化学气相沉积法在金属基底表面制备单层石墨烯;(2)在单层石墨烯表面旋涂一层高分子支撑体,加热使高分子支撑体凝结;(3)使用离子刻蚀剂刻蚀金属基底;(4)待金属基底刻蚀后,使用湿法转移法转移至待用基底,去除高分子支撑体后最终得到含有褶皱的石墨烯薄膜。与现有技术相比,本发明采用物理方法制备得到了不含有其他官能团、不含缺陷的含有褶皱的石墨烯薄膜,工艺简单,制备时间大大缩短。
The invention relates to a graphene film containing wrinkles and a preparation method thereof, which includes the following steps: (1) using a chemical vapor deposition method to prepare a single-layer graphene on the surface of a metal substrate; (2) spin-coating a layer of Layer a polymer support and heat it to condense the polymer support; (3) Use an ion etchant to etch the metal substrate; (4) After the metal substrate is etched, use a wet transfer method to transfer it to the substrate to be used, and remove the After adding the molecular support, a graphene film containing wrinkles is finally obtained. Compared with the existing technology, the present invention uses physical methods to prepare a wrinkle-containing graphene film that does not contain other functional groups and does not contain defects. The process is simple and the preparation time is greatly shortened.
Description
技术领域Technical field
本发明属于二维纳米材料技术领域,尤其是涉及一种含有褶皱的石墨烯薄膜及其制备方法。The invention belongs to the technical field of two-dimensional nanomaterials, and in particular relates to a graphene film containing wrinkles and a preparation method thereof.
背景技术Background technique
石墨烯是一种以sp2杂化连接的碳原子紧密堆积成单层二维蜂窝状晶格结构的新材料,因其优异的光学、热学、力学等性质,在材料方面的各个应用领域中都备受关注,常用于制备复合材料等。在平整的二维材料石墨烯表面引入褶皱,使其不完全平整,将会引起该材料的物理性质等发生变化,含有褶皱的石墨烯被发现有潜力应用于制作压力传感器、滤水膜、超疏水表面等材料,其使用范围也是日渐拓宽。Graphene is a new material in which carbon atoms connected by sp 2 hybridization are closely packed into a single-layer two-dimensional honeycomb lattice structure. Because of its excellent optical, thermal, mechanical and other properties, it has been used in various application fields of materials. have attracted much attention and are often used in the preparation of composite materials. Introducing wrinkles to the surface of the flat two-dimensional material graphene to make it not completely flat will cause changes in the physical properties of the material. Graphene containing wrinkles has been found to have the potential to be used in the production of pressure sensors, water filtration membranes, and ultrasonic sensors. The scope of use of materials such as hydrophobic surfaces is also expanding day by day.
目前一般使用化学方法并使用氧化还原石墨烯来制备褶皱石墨烯薄膜。对于氧化石墨烯或者氧化还原石墨烯,其表面含有大量的官能团,表面还会存在缺陷等,并不是纯净的以sp2杂化连接的碳原子紧密堆积成单层二维蜂窝状晶格结构,这将会改变褶皱石墨烯薄膜的物理性质,直接影响使用效果。因此,仍需研发一种表面完整无缺陷的褶皱石墨烯薄膜。Currently, chemical methods are generally used to prepare wrinkled graphene films using redox graphene. For graphene oxide or redox graphene, its surface contains a large number of functional groups, and there are also defects on the surface. It is not pure carbon atoms connected by sp 2 hybridization that are closely packed into a single-layer two-dimensional honeycomb lattice structure. This will change the physical properties of the wrinkled graphene film and directly affect the use effect. Therefore, it is still necessary to develop a wrinkled graphene film with an intact and defect-free surface.
发明内容Contents of the invention
本发明的目的就是为了得到表面完整无缺陷的褶皱石墨烯薄膜而提供一种含有褶皱的石墨烯薄膜及其制备方法。The purpose of the present invention is to provide a graphene film containing wrinkles and a preparation method thereof in order to obtain a wrinkled graphene film with a complete and defect-free surface.
本发明的目的可以通过以下技术方案来实现:The object of the present invention can be achieved through the following technical solutions:
一种含有褶皱的石墨烯薄膜的制备方法,包括以下步骤:A method for preparing a wrinkle-containing graphene film, including the following steps:
(1)使用化学气相沉积法在金属基底表面制备单层石墨烯;(1) Use chemical vapor deposition to prepare single-layer graphene on the surface of a metal substrate;
(2)在单层石墨烯表面旋涂高分子支撑体,加热使高分子支撑体凝结;(2) Spin-coat a polymer support on the surface of single-layer graphene, and heat to condense the polymer support;
(3)使用离子刻蚀剂刻蚀金属基底;(3) Use ion etchant to etch the metal substrate;
(4)待金属基底刻蚀后,使用湿法转移法转移至待用基底,去除高分子支撑体后最终得到含有褶皱的石墨烯薄膜。(4) After etching the metal substrate, use a wet transfer method to transfer it to the substrate to be used. After removing the polymer support, a graphene film containing wrinkles is finally obtained.
进一步地,步骤(1)中,所述化学气相沉积法为在金属基底上加热、分解含有碳源的气体,使分解后的碳沉积在金属基底上成为单层石墨烯薄膜。Further, in step (1), the chemical vapor deposition method is to heat and decompose the gas containing the carbon source on the metal substrate, so that the decomposed carbon is deposited on the metal substrate to form a single-layer graphene film.
进一步地,步骤(1)中,所述金属基底包括铜或镍中的一种,优选为铜。Further, in step (1), the metal substrate includes one of copper or nickel, preferably copper.
进一步地,步骤(2)中,所述旋涂的转速为1500-2500rpm,优选为1500-2000rpm。Further, in step (2), the rotation speed of the spin coating is 1500-2500rpm, preferably 1500-2000rpm.
进一步地,步骤(2)中,所述旋涂的时间为25-35s,优选为30s。Further, in step (2), the spin coating time is 25-35s, preferably 30s.
进一步地,步骤(2)中,所述高分子支撑体为松香高分子凝胶。Further, in step (2), the polymer support is a rosin polymer gel.
进一步地,所述松香高分子凝胶为45-55wt%的松香溶液加热凝结得到,松香的浓度优选为50wt%。Further, the rosin polymer gel is obtained by heating and coagulating a 45-55 wt% rosin solution, and the rosin concentration is preferably 50 wt%.
进一步地,步骤(2)中,所述加热的温度为35-45℃,优选为40℃。Further, in step (2), the heating temperature is 35-45°C, preferably 40°C.
进一步地,步骤(2)中,所述加热的时间为10-20min,优选为15min。Further, in step (2), the heating time is 10-20 min, preferably 15 min.
更进一步地,步骤(2)中,所述加热使松香高分子凝胶凝结而不凝固。Furthermore, in step (2), the heating causes the rosin polymer gel to coagulate without solidifying.
进一步地,步骤(3)中,所述离子刻蚀剂为FeCl3溶液。Further, in step (3), the ion etching agent is FeCl 3 solution.
进一步地,步骤(3)中,所述离子刻蚀剂的浓度为0.3-0.5g/ml,优选为0.4g/ml。Further, in step (3), the concentration of the ion etching agent is 0.3-0.5g/ml, preferably 0.4g/ml.
进一步地,步骤(4)中,所述湿法转移法为待金属基底刻蚀溶解后,使高分子支撑体与石墨烯的复合支撑体同金属基底分离,经洗涤后与待用基底材料结合。Further, in step (4), the wet transfer method is to separate the composite support of the polymer support and graphene from the metal substrate after etching and dissolving the metal substrate, and then combine it with the substrate material to be used after washing. .
进一步地,步骤(4)中,所述待用基底包括二氧化硅、聚二甲基硅氧烷或聚甲基丙烯酸甲酯中的一种或多种,优选为二氧化硅。Further, in step (4), the substrate to be used includes one or more of silicon dioxide, polydimethylsiloxane or polymethylmethacrylate, preferably silicon dioxide.
进一步地,步骤(4)中,使用丙酮去除高分子支撑体。Further, in step (4), acetone is used to remove the polymer support.
本发明还提供一种上述制备方法制备得到的含有褶皱的石墨烯薄膜。The invention also provides a graphene film containing wrinkles prepared by the above preparation method.
与现有技术相比,本发明具有以下有益效果:Compared with the prior art, the present invention has the following beneficial effects:
(1)本发明选用松香作为高分子支撑材料旋涂在石墨烯表面后,经湿法转移方式制备表面纯净无缺陷的石墨烯薄膜。通过对松香的含量、旋涂工艺以及凝结过程环境温度等综合条件的调控,使松香在快速凝结达到最低支撑石墨不开裂的条件(不用等待完全凝固),使可以有效制备含有褶皱的石墨烯薄膜。(1) In the present invention, rosin is used as a polymer support material and is spin-coated on the surface of graphene, and then a graphene film with a pure and defect-free surface is prepared by wet transfer. By controlling comprehensive conditions such as the rosin content, the spin coating process, and the ambient temperature during the condensation process, the rosin can quickly condense to reach the minimum condition that supports graphite from cracking (without waiting for complete solidification), so that graphene films containing wrinkles can be effectively prepared. .
(2)本发明选用的松香在10-20分钟内即可快速凝结达到最低支撑石墨不开裂的条件,而在自然条件下至少需要数小时才能凝结。本发明大大缩短了制备时间,提高了制备工艺的效率。(2) The rosin selected in the present invention can quickly condense within 10-20 minutes to reach the minimum condition to support graphite from cracking, while it takes at least several hours to condense under natural conditions. The invention greatly shortens the preparation time and improves the efficiency of the preparation process.
(3)本发明无需选用表面含有大量官能团和缺陷的氧化石墨烯或氧化还原石墨烯,而是选用纯净的以sp2杂化连接的碳原子紧密堆积成单层二维蜂窝状晶格结构,表面无官能团,不含有缺陷。(3) The present invention does not need to use graphene oxide or redox graphene with a large number of functional groups and defects on the surface, but uses pure carbon atoms connected by sp 2 hybridization to be closely packed into a single-layer two-dimensional honeycomb lattice structure. The surface has no functional groups and no defects.
(4)本发明无需采用化学法制备含褶皱的石墨烯薄膜,而是用物理方法形成褶皱的石墨烯薄膜,制备工艺简单,有望应用于大规模的工业化生产。(4) The present invention does not need to use chemical methods to prepare wrinkled graphene films, but uses physical methods to form wrinkled graphene films. The preparation process is simple and is expected to be applied to large-scale industrial production.
附图说明Description of the drawings
图1为本发明实施例1含有褶皱的石墨烯薄膜在300nm厚度二氧化硅片表面的光学显微镜图。Figure 1 is an optical microscope image of a graphene film containing wrinkles on the surface of a 300 nm thick silicon dioxide wafer in Example 1 of the present invention.
图2为本发明实施例1的拉曼光谱图。Figure 2 is a Raman spectrum chart of Example 1 of the present invention.
图3为对比例1的石墨烯薄膜在300nm厚度二氧化硅片表面的光学显微镜图。Figure 3 is an optical microscope image of the graphene film of Comparative Example 1 on the surface of a 300nm thick silicon dioxide wafer.
具体实施方式Detailed ways
下面结合附图和具体实施例对本发明进行详细说明。本实施例以本发明技术方案为前提进行实施,给出了详细的实施方式和具体的操作过程,但本发明的保护范围不限于下述的实施例。The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. This embodiment is implemented based on the technical solution of the present invention and provides detailed implementation modes and specific operating procedures. However, the protection scope of the present invention is not limited to the following embodiments.
除非特别说明,本发明采用的试剂,方法,仪器和设备为本领域常规试剂,方法,仪器和设备。除非特别说明,以下实施例所用的试剂和材料均为市购,分析纯级。其中,松香(CAS:8050-09-7)选自阿法埃莎,旋涂使用普通的旋涂机。Unless otherwise specified, the reagents, methods, instruments and equipment used in the present invention are conventional reagents, methods, instruments and equipment in the art. Unless otherwise stated, the reagents and materials used in the following examples are all commercially available and of analytical grade. Among them, the rosin (CAS: 8050-09-7) was selected from Alfa Aesar, and an ordinary spin coater was used for spin coating.
实施例1:Example 1:
(1)在乳酸乙酯溶液中按照50wt%的浓度溶解松香,用滴管吸取少量溶液,滴在生长有石墨烯的铜箔表面,以1500rpm的转速在旋涂机中旋涂均匀,旋涂时间为30s。其中,生长有石墨烯的铜箔为化学气相沉积法生长,具体为将铜箔放入石英管中,通入甲烷和氢气,加热至1050℃,将氢气流量设置为3sccm,通入甲烷其流量为54sccm,并保持压强在120pa,加热4min后将压强调整为600pa继续反应1min,自然冷却获得生长有单层石墨烯的铜箔。(1) Dissolve rosin in the ethyl lactate solution at a concentration of 50wt%, use a dropper to absorb a small amount of the solution, drop it on the surface of the copper foil on which graphene is grown, and spin-coat evenly in a spin-coating machine at a speed of 1500 rpm. The time is 30s. Among them, the copper foil with graphene grown is grown by the chemical vapor deposition method. Specifically, the copper foil is placed in a quartz tube, methane and hydrogen are introduced, heated to 1050°C, the hydrogen flow rate is set to 3 sccm, and the methane flow rate is introduced. The temperature is 54 sccm, and the pressure is maintained at 120 Pa. After heating for 4 minutes, adjust the pressure to 600 Pa and continue the reaction for 1 minute. After natural cooling, a copper foil with a single layer of graphene grown is obtained.
(2)将旋涂有松香凝胶的铜箔,置于40℃的加热台烘干15min,得到松香/石墨烯/铜箔复合材料;(2) Place the copper foil spin-coated with rosin gel on a heating table at 40°C for 15 minutes to obtain a rosin/graphene/copper foil composite material;
(3)将松香/石墨烯/铜箔放入0.4g/ml的FeCl3溶液中,松香/石墨烯/铜箔漂浮于FeCl3溶液表面,FeCl3与Cu反应,从而刻蚀铜箔;(3) Put the rosin/graphene/copper foil into a 0.4g/ml FeCl 3 solution. The rosin/graphene/copper foil floats on the surface of the FeCl 3 solution. FeCl 3 reacts with Cu to etch the copper foil;
(4)待铜箔完全刻蚀后,将松香/石墨烯用载玻片转移至去离子水表面,并多次用去离子水进行转移操作,清洗多余的FeCl3溶液,清洗干净后,转移至300nm厚度的二氧化硅片表面;(4) After the copper foil is completely etched, transfer the rosin/graphene to the surface of deionized water using a glass slide, and perform the transfer operation with deionized water several times to clean the excess FeCl 3 solution. After cleaning, transfer To the surface of silicon dioxide wafer with a thickness of 300nm;
(5)使用丙酮(分析纯,99%)充分浸泡以去除松香,随后在氮气流下干燥即可获得含有褶皱的石墨烯薄膜。(5) Fully soak in acetone (analytical grade, 99%) to remove rosin, and then dry under nitrogen flow to obtain a graphene film containing wrinkles.
对比例1:Comparative example 1:
(1)在乳酸乙酯溶液中按照30wt%的浓度溶解松香,以1500rpm的转速旋涂在生长有石墨烯的铜箔表面,旋涂时间为30s。(1) Dissolve rosin in the ethyl lactate solution at a concentration of 30wt%, and spin-coat it on the surface of the copper foil with graphene grown at a rotation speed of 1500rpm. The spin-coating time is 30s.
(2)将旋涂有松香凝胶的铜箔,置于40℃的加热台烘干15min,得到松香/石墨烯/铜箔复合材料;(2) Place the copper foil spin-coated with rosin gel on a heating table at 40°C for 15 minutes to obtain a rosin/graphene/copper foil composite material;
(3)将松香/石墨烯/铜箔放入0.4g/ml的FeCl3溶液中,松香/石墨烯/铜箔漂浮于FeCl3溶液表面,FeCl3与Cu反应,从而刻蚀铜箔;(3) Put the rosin/graphene/copper foil into a 0.4g/ml FeCl 3 solution. The rosin/graphene/copper foil floats on the surface of the FeCl 3 solution. FeCl 3 reacts with Cu to etch the copper foil;
(4)铜箔完全刻蚀后,使用湿法转移方法,转移至300nm厚度的二氧化硅片表面;(4) After the copper foil is completely etched, use the wet transfer method to transfer it to the surface of the silicon dioxide wafer with a thickness of 300nm;
(5)使用丙酮(分析纯,99%)充分浸泡以去除松香,随后在氮气流下干燥即可获得石墨烯薄膜。(5) Fully soak in acetone (analytical grade, 99%) to remove rosin, and then dry under nitrogen flow to obtain a graphene film.
图1为实施例1在二氧化硅片表面的光学显微镜图。由图可知,实施例1成功制备了无缺陷、含有褶皱的石墨烯薄膜。Figure 1 is an optical microscope picture of the surface of the silicon dioxide wafer in Example 1. As can be seen from the figure, Example 1 successfully prepared a defect-free graphene film containing wrinkles.
图2为图1中单层石墨烯拉曼图谱和褶皱处石墨烯拉曼图谱。将激光聚焦在褶皱处,通过拉曼表征为多层石墨烯,即为含有褶皱的石墨烯薄膜。Figure 2 shows the Raman spectrum of the single-layer graphene and the Raman spectrum of the wrinkled graphene in Figure 1. The laser is focused on the wrinkles and characterized by Raman as multilayer graphene, that is, a graphene film containing wrinkles.
图3为对比例1在二氧化硅片表面的光学显微镜图。由图可知,该对比例有明显的破洞,无法得到完整的石墨烯薄膜,形成不了无缺陷、有褶皱的石墨烯薄膜。因此,松香的浓度对于最终含褶皱的石墨烯的制备具有重要的影响。Figure 3 is an optical microscope image of Comparative Example 1 on the surface of a silica wafer. It can be seen from the figure that this comparative example has obvious holes, and a complete graphene film cannot be obtained, and a defect-free and wrinkled graphene film cannot be formed. Therefore, the concentration of rosin has an important influence on the preparation of the final wrinkled graphene.
对比例2:Comparative example 2:
(1)在乳酸乙酯溶液中按照50wt%的浓度溶解松香,以1500rpm的转速旋涂在生长有石墨烯的铜箔表面,旋涂时间为30s。(1) Dissolve rosin in the ethyl lactate solution at a concentration of 50wt%, and spin-coat it on the surface of the copper foil growing graphene at a rotation speed of 1500rpm. The spin-coating time is 30s.
(2)将旋涂有松香凝胶的铜箔,置于90℃的加热台烘干15min,得到松香/石墨烯/铜箔复合材料;(2) Place the copper foil spin-coated with rosin gel on a heating table at 90°C for 15 minutes to obtain a rosin/graphene/copper foil composite material;
(3)将松香/石墨烯/铜箔放入0.4g/ml的FeCl3溶液中,松香/石墨烯/铜箔漂浮于FeCl3溶液表面,FeCl3与Cu反应,从而刻蚀铜箔。(3) Put the rosin/graphene/copper foil into a 0.4g/ml FeCl 3 solution. The rosin/graphene/copper foil floats on the surface of the FeCl 3 solution. FeCl 3 reacts with Cu to etch the copper foil.
然而随着铜箔被刻蚀,高温加热的松香/石墨烯完全凝固,直接在FeCl3溶液中物理性裂开,不能完整漂浮在FeCl3溶液表面,无法完成湿法转移操作,也无法产生有褶皱的石墨烯。However, as the copper foil is etched, the rosin/graphene heated at high temperature is completely solidified and physically cracks directly in the FeCl 3 solution. It cannot completely float on the surface of the FeCl 3 solution, and the wet transfer operation cannot be completed, nor can it produce any traces. Crumpled graphene.
对比例3:Comparative example 3:
(1)在乳酸乙酯溶液中按照50wt%的浓度溶解松香,以1200rpm的转速旋涂在生长有石墨烯的铜箔表面,旋涂时间为30s。(1) Dissolve rosin in the ethyl lactate solution at a concentration of 50wt%, and spin-coat it on the surface of the copper foil on which graphene is grown at a rotation speed of 1200 rpm. The spin-coating time is 30 seconds.
(2)将旋涂有松香凝胶的铜箔,置于40℃的加热台烘干15min,得到松香/石墨烯/铜箔复合材料;(2) Place the copper foil spin-coated with rosin gel on a heating table at 40°C for 15 minutes to obtain a rosin/graphene/copper foil composite material;
(3)将松香/石墨烯/铜箔放入0.4g/ml的FeCl3溶液中,松香/石墨烯/铜箔漂浮于FeCl3溶液表面,FeCl3与Cu反应,从而刻蚀铜箔;(3) Put the rosin/graphene/copper foil into a 0.4g/ml FeCl 3 solution. The rosin/graphene/copper foil floats on the surface of the FeCl 3 solution. FeCl 3 reacts with Cu to etch the copper foil;
(4)铜箔完全刻蚀后,使用湿法转移方法,转移至300nm厚度的二氧化硅片表面。(4) After the copper foil is completely etched, use the wet transfer method to transfer it to the surface of the silicon dioxide wafer with a thickness of 300nm.
然而由于旋涂松香的转速较低,松香/石墨烯/铜箔中的松香含量较少,其依然为凝胶状态,并未充分凝结,无法完成湿法转移操作,不能产生有褶皱的石墨烯。However, due to the low speed of spin-coated rosin, the rosin content in the rosin/graphene/copper foil is still in a gel state and is not fully condensed. The wet transfer operation cannot be completed and wrinkled graphene cannot be produced. .
上述对实施例的描述是为便于该技术领域的普通技术人员能理解和使用发明。熟悉本领域技术的人员显然可以容易地对这些实施例做出各种修改,并把在此说明的一般原理应用到其他实施例中而不必经过创造性的劳动。因此,本发明不限于上述实施例,本领域技术人员根据本发明的揭示,不脱离本发明范畴所做出的改进和修改都应该在本发明的保护范围之内。The above description of the embodiments is to facilitate those of ordinary skill in the technical field to understand and use the invention. It is obvious that those skilled in the art can easily make various modifications to these embodiments and apply the general principles described herein to other embodiments without inventive efforts. Therefore, the present invention is not limited to the above embodiments. Based on the disclosure of the present invention, improvements and modifications made by those skilled in the art without departing from the scope of the present invention should be within the protection scope of the present invention.
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| CN108358197A (en) * | 2018-02-12 | 2018-08-03 | 杭州高烯科技有限公司 | A kind of preparation method and applications of the graphene oxide membrane of height fold |
| CN111362258A (en) * | 2020-02-12 | 2020-07-03 | 浙江大学 | Graphene film transfer method using beeswax as supporting layer |
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| CN104477886A (en) * | 2014-11-20 | 2015-04-01 | 中山大学 | Folded graphene and controllable preparation method thereof |
| CN108358197A (en) * | 2018-02-12 | 2018-08-03 | 杭州高烯科技有限公司 | A kind of preparation method and applications of the graphene oxide membrane of height fold |
| CN111362258A (en) * | 2020-02-12 | 2020-07-03 | 浙江大学 | Graphene film transfer method using beeswax as supporting layer |
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