CN117846985B - Molecular pump - Google Patents
Molecular pump Download PDFInfo
- Publication number
- CN117846985B CN117846985B CN202311798671.2A CN202311798671A CN117846985B CN 117846985 B CN117846985 B CN 117846985B CN 202311798671 A CN202311798671 A CN 202311798671A CN 117846985 B CN117846985 B CN 117846985B
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- China
- Prior art keywords
- molecular pump
- pump body
- stage
- wall
- permeable membrane
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- 239000012528 membrane Substances 0.000 claims abstract description 55
- 230000035699 permeability Effects 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 58
- 230000003204 osmotic effect Effects 0.000 description 10
- 230000006835 compression Effects 0.000 description 7
- 238000007906 compression Methods 0.000 description 7
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/002—Details, component parts, or accessories especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
本发明涉及真空设备技术领域，其目的是提供一种分子泵。这种分子泵可对气体进行选择性压缩，能筛选出所需特定气体。上述分子泵包括：分子泵泵体和渗透膜，且分子泵泵体具有进气口和排气口；分子泵泵体内部设置有叶片级，渗透膜设置于叶片级与分子泵泵体内壁之间；或分子泵泵体内部设置有拖动级，渗透膜设置于拖动级与分子泵泵体内壁之间；或分子泵泵体内部设置有叶片级和拖动级，叶片级靠近进气口一侧，拖动级靠近排气口一侧，渗透膜设置于叶片级与分子泵泵体内壁以及拖动级与分子泵泵体内壁之间。本发明解决了现有技术中的分子泵无法对气体进行选择性压缩，不能筛选出所需的特定气体的问题。
The present invention relates to the technical field of vacuum equipment, and its purpose is to provide a molecular pump. This molecular pump can selectively compress gas and filter out required specific gas. The molecular pump comprises: a molecular pump body and a permeable membrane, and the molecular pump body has an air inlet and an exhaust port; a blade stage is arranged inside the molecular pump body, and the permeable membrane is arranged between the blade stage and the inner wall of the molecular pump body; or a drag stage is arranged inside the molecular pump body, and the permeable membrane is arranged between the drag stage and the inner wall of the molecular pump body; or a blade stage and a drag stage are arranged inside the molecular pump body, the blade stage is close to the air inlet side, the drag stage is close to the exhaust side, and the permeable membrane is arranged between the blade stage and the inner wall of the molecular pump body and between the drag stage and the inner wall of the molecular pump body. The present invention solves the problem that the molecular pump in the prior art cannot selectively compress gas and cannot filter out required specific gas.
Description
Technical Field
The invention relates to the technical field of vacuum equipment, in particular to a molecular pump.
Background
The molecular pump has the advantages of easy cleaning, convenient operation, stable performance and the like, and is widely applied to the fields of pollution-free high vacuum and ultra-high vacuum. The molecular pump is a vacuum pump which uses a rotor rotating at a high speed to transfer momentum to gas molecules so as to obtain directional speed, thereby being compressed and driven to an exhaust port to be pumped out for a front stage.
The compression ratio is one of important indexes for measuring the performance of a molecular pump, and is specifically defined as the ratio of the pressure measured by a front vacuum flange to the pressure measured by a high vacuum flange under ideal test environment. This performance index is specific, i.e. the molecular pump has compressibility for all gas molecules, and the selective properties for gas compression do not differ much. For example, molecular pumps have compression characteristics for helium and nitrogen, and the compression ratio is different to a certain extent according to different molecular masses of gases. The existing molecular pump can not selectively compress the gas and can not screen out the required specific gas.
Disclosure of Invention
Therefore, the invention aims to overcome the defect that the molecular pump in the prior art cannot selectively compress the gas and cannot screen out the required specific gas, thereby providing the molecular pump capable of selectively compressing the gas and screening out the required specific gas.
In order to solve the above problems, the present invention provides a molecular pump comprising:
the molecular pump body and the permeable membrane, and the molecular pump body is provided with an air inlet and an air outlet;
the inside of the molecular pump body is provided with a blade stage, and the permeable membrane is arranged between the blade stage and the inner wall of the molecular pump body;
or a dragging stage is arranged in the molecular pump body, and the permeable membrane is arranged between the dragging stage and the inner wall of the molecular pump body;
or the inside of the molecular pump body is provided with the blade stage and the dragging stage, the blade stage is close to one side of the air inlet, the dragging stage is close to one side of the air outlet, and the permeable membrane is arranged between the blade stage and the inner wall of the molecular pump body and between the dragging stage and the inner wall of the molecular pump body.
Optionally, the osmotic membrane is connected with the molecular pump body through a fixed structure.
Optionally, the fixing structure is a clamping groove formed on the inner wall of the pump body of the molecular pump, and the permeable membrane is clamped with the clamping groove.
Optionally, the connection part between the fixing structure and the inner wall of the pump body of the molecular pump is airtight.
Optionally, the molecular pump further comprises a temperature control component, and the temperature control component is arranged on the outer wall of the pump body of the molecular pump.
Optionally, the temperature control assembly includes a temperature control plate.
Optionally, the temperature sensor is further included, and the temperature sensor is electrically connected with the temperature control plate.
Optionally, the permeable membrane is a quartz membrane.
Optionally, a main shaft is further disposed in the molecular pump body, and the vane stage and/or the drag stage are disposed on the main shaft.
Optionally, a plurality of permeable membranes are arranged between the vane stage and the inner wall of the molecular pump body and/or between the drag stage and the inner wall of the molecular pump body along the axial direction of the main shaft at intervals.
The invention has the following advantages:
1. The present invention provides a molecular pump comprising: the molecular pump body and the osmotic membrane, and the molecular pump body has air inlet and gas vent. The inside of the molecular pump body is provided with a vane stage, and the osmotic membrane is arranged between the vane stage and the inner wall of the molecular pump body; or a dragging stage is arranged in the molecular pump body, and the osmotic membrane is arranged between the dragging stage and the inner wall of the molecular pump body; or the inside of the molecular pump body is provided with a vane stage and a dragging stage, the vane stage is close to one side of the air inlet, the dragging stage is close to one side of the air outlet, and the permeable membrane is arranged between the vane stage and the inner wall of the molecular pump body and between the dragging stage and the inner wall of the molecular pump body. The three conditions correspond to three different molecular pump bodies, namely a turbo molecular pump, a traction molecular pump and a compound molecular pump, and the application range is wider. And because the permeable membrane is arranged at the blade stage and/or the dragging stage, the gas entering the molecular pump body from the gas inlet can be selectively compressed, and then the screened specific gas is discharged from the gas outlet.
2. According to the molecular pump provided by the invention, the osmotic membrane is connected with the pump body of the molecular pump through the fixing structure, and the preferential fixing structure can be a clamping groove, and the osmotic membrane is clamped with the clamping groove. The installation of the permeable membrane is realized by arranging the fixing structure, and the method is simple and reliable.
3. The molecular pump provided by the invention is airtight at the joint of the fixed structure and the inner wall of the molecular pump body, so that the gas at the gas inlet is prevented from flowing away from the joint of the fixed structure and the inner wall of the molecular pump body, and the effect of selectively compressing the gas of the molecular pump is prevented from being influenced.
4. The molecular pump provided by the invention further comprises a temperature control component, wherein the temperature control component is arranged on the outer wall of the molecular pump body. The temperature control component comprises a temperature control plate, the temperature control plate can be heated by being electrified, and the temperature of the temperature control plate can be adjusted by controlling the magnitude of current or voltage. The thermal motion of the gas molecules can be changed by heating the inside of the molecular pump body through the temperature control plate, so that the permeation quantity of the gas molecules is changed, and the compression ratio of the molecular pump to the gas molecules is changed. The molecular pump not only can selectively compress the gas, but also can realize different compression ratios, and the molecular pump has more excellent performance and wider application range.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a molecular pump of the present invention.
Reference numerals illustrate:
1. the molecular pump comprises a molecular pump body, 101, an air inlet, 102 and an air outlet;
2. a blade stage;
3. A drag stage;
4. A permeable membrane;
5. a clamping groove;
6. A temperature control plate;
7. A main shaft.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
As shown in fig. 1, which is a preferred embodiment of the molecular pump of the present invention, the molecular pump comprises: a molecular pump body 1 and a permeable membrane 4, and the molecular pump body 1 has an air inlet 101 and an air outlet 102. The inside of the molecular pump body 1 is provided with a vane stage 2, and a permeable membrane 4 is arranged between the vane stage 2 and the inner wall of the molecular pump body 1; or a dragging stage 3 is arranged in the molecular pump body 1, and a permeable membrane 4 is arranged between the dragging stage 3 and the inner wall of the molecular pump body 1; or the inside of the molecular pump body 1 is provided with a vane stage 2 and a dragging stage 3, the vane stage 2 is close to one side of the air inlet 101, the dragging stage 3 is close to one side of the air outlet 102, namely, the dragging stage 3 is positioned at the downstream of the vane stage 2, and the permeable membrane 4 is arranged between the vane stage 2 and the inner wall of the molecular pump body 1 and between the dragging stage 3 and the inner wall of the molecular pump body 1. The existing molecular pumps can be divided into a turbo molecular pump, a traction molecular pump and a compound molecular pump, and the compound molecular pump is equivalent to the combination of the turbo molecular pump and the traction molecular pump. The three different conditions in the molecular pump body 1 correspond to the three different molecular pump bodies 1, the turbine molecular pump body 1 is internally provided with only the vane stage 2, the traction molecular pump body 1 is internally provided with only the traction stage 3, and the composite molecular pump body 1 is internally provided with the vane stage 2 and the traction stage 3. Correspondingly, the osmotic membrane 4 is arranged between the vane stage 2 or the dragging stage 3 or between the vane stage 2 and the dragging stage 3 and the inner wall of the molecular pump body 1. The gas can be selectively compressed through the permeable membrane 4, specifically, the gas inlet 101 of the molecular pump body 1 is at a high vacuum end, the gas outlet 102 is at a low vacuum end, gas molecules can generate directional flow under the pressure difference of high vacuum and low vacuum and can be discharged out of the molecular pump, the permeable membranes 4 made of different materials have selectivity to different gases, that is, certain permeable membrane 4 has better permeability to certain specific gases, and the gas molecules without permeability are discharged from the gas outlet 102 due to the pressure difference effect of the high vacuum and the low vacuum of the gas inlet 101 and the gas outlet 102, so that the molecular pump can selectively compress the gases and screen out the required specific gases.
Specifically, in this embodiment, the inside of the molecular pump body 1 is provided with the vane stage 2 and the drag stage 3, the vane stage 2 is close to the air inlet 101, the drag stage 3 is close to the air outlet 102, that is, the drag stage 3 is located at the downstream of the vane stage 2, and the permeable membrane 4 is disposed between the vane stage 2 and the inner wall of the molecular pump body 1 and between the drag stage 3 and the inner wall of the molecular pump body 1. And the main shaft 7 is also arranged in the molecular pump body 1, the vane stage 2 and the dragging stage 3 are arranged on the main shaft 7, and the main shaft 7 can drive the vane stage 2 and the dragging stage 3 to rotate at a high speed.
In other embodiments, only the vane stage 2 may be disposed inside the molecular pump body 1, and correspondingly, the vane stage 2 is disposed on the main shaft 7, and the permeable membrane 4 is disposed between the vane stage 2 and the inner wall of the molecular pump body 1; or the inside of the molecular pump body 1 can be only provided with the dragging stage 3, correspondingly, the dragging stage 3 is arranged on the main shaft 7, and the permeable membrane 4 is arranged between the dragging stage 3 and the inner wall of the molecular pump body 1.
In addition, a plurality of the permeable membranes 4 between the vane stage 2 and the inner wall of the molecular pump body 1 and/or between the dragging stage 3 and the inner wall of the molecular pump body 1 are arranged along the axial direction of the main shaft 7 at intervals. As shown in fig. 1, in the present embodiment, a vane stage 2 and a drag stage 3 are provided inside a molecular pump body 1 at the same time, and a plurality of permeable membranes 4 are provided at intervals at each of the vane stage 2 and the drag stage 3.
The shape of the permeable membrane 4 may be annular, elongated, or the like, and is adaptively selected according to the inner wall of the molecular pump body 1. The type of the permeable membrane 4 may be selected according to the gas to be screened, for example, the permeable membrane 4 may be a quartz membrane, which has a good permeability to helium, and if a mixed gas of hydrogen and helium is introduced into the gas inlet 101, the helium can be screened out by the gas outlet 102, and only the hydrogen is discharged.
Further, the osmotic membrane 4 is connected to the molecular pump body 1 by a fixed structure. In this embodiment, the fixing structure is preferably a clamping groove 5 formed on the inner wall of the pump body 1 of the molecular pump, and the osmotic membrane 4 is clamped with the clamping groove 5 to achieve fixing, i.e. the number of the clamping grooves 5 is equal to the number of the osmotic membrane 4. And the connection part between the fixing structure and the inner wall of the molecular pump body 1 is required to be airtight, so that the gas is prevented from passing through the connection part, and the airtight method can be to arrange sealing elements or glue coating and the like.
In other embodiments, the fixing structure may also be a supporting frame, on which a plurality of limiting members are disposed, each limiting member is connected with the permeable membrane 4, and the limiting members may fix the permeable membrane 4 by grooving or clamping, etc.
The molecular pump also comprises a temperature control component, the interior of the molecular pump body 1 can be heated through the temperature control component, after the temperature is changed, the thermal motion of gas molecules can be changed, the permeation quantity of the same gas molecules permeating the permeable membrane 4 can be changed, and the compression ratio of the molecular pump to the gas molecules can be changed.
Specifically, the temperature control assembly comprises a temperature control plate 6, and the temperature control plate 6 can generate heat when being electrified, so that the temperature inside the molecular pump body 1 is changed. And the output temperature of the temperature control board 6 can be changed by changing the magnitude of the current or the voltage applied by the temperature control board 6, so that the temperature control is realized.
Further, the temperature control assembly further comprises a temperature monitor, the temperature monitor is electrically connected with the temperature control plate 6, and real-time temperature detection is carried out on the temperature control plate 6 through the temperature monitor, so that temperature regulation can be better and more accurately realized.
The following describes the operation of the molecular pump according to the present embodiment as follows:
For example, it is now necessary to prepare a gas C generated by the chemical reaction of the gas a and the gas B, and to pump the desired gas C from the reaction vessel by means of a molecular pump, and if an existing molecular pump is used, the gas a and the gas B as raw materials are discharged together with the gas C, resulting in waste of the gas a and the gas B and increased costs. In contrast, when the molecular pump according to the present embodiment is used, the permeable membrane 4 having high permeability to the gas a and the gas B can be provided in the molecular pump, so that the gas a and the gas B can be recycled without being discharged from the gas outlet 102 of the molecular pump during the gas suction, and only the gas C can be discharged. Thus saving raw materials and reducing cost.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311798671.2A CN117846985B (en) | 2023-12-25 | 2023-12-25 | Molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311798671.2A CN117846985B (en) | 2023-12-25 | 2023-12-25 | Molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117846985A CN117846985A (en) | 2024-04-09 |
| CN117846985B true CN117846985B (en) | 2024-11-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311798671.2A Active CN117846985B (en) | 2023-12-25 | 2023-12-25 | Molecular pump |
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| Country | Link |
|---|---|
| CN (1) | CN117846985B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1472440A (en) * | 2002-06-19 | 2004-02-04 | ���µ�����ҵ��ʽ���� | Fluid delivery system and method for fluid delivery system |
| CN110863997A (en) * | 2019-11-19 | 2020-03-06 | 北京中科科仪股份有限公司 | Magnetic suspension molecular pump with internal heating device |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05332285A (en) * | 1992-05-29 | 1993-12-14 | Daikin Ind Ltd | Vacuum pump |
| JP4504476B2 (en) * | 1999-07-23 | 2010-07-14 | キヤノンアネルバ株式会社 | Molecular pump |
| JP4352743B2 (en) * | 2003-04-03 | 2009-10-28 | パナソニック株式会社 | Oxygen enrichment equipment |
| KR20110007223U (en) * | 2010-01-13 | 2011-07-20 | 지효근 | The vacuum |
| CN113808906B (en) * | 2021-09-10 | 2024-11-22 | 中国计量科学研究院 | Ultra-high pressure deep-sea membrane sampling structure and mass spectrometry system |
| CN216897378U (en) * | 2022-06-02 | 2022-07-05 | 广东天一超硬材料有限公司 | Efficient fritting furnace |
| CN116498581A (en) * | 2023-04-24 | 2023-07-28 | 上海裕达实业有限公司 | Reverse diffusion multi-port molecular pump |
-
2023
- 2023-12-25 CN CN202311798671.2A patent/CN117846985B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1472440A (en) * | 2002-06-19 | 2004-02-04 | ���µ�����ҵ��ʽ���� | Fluid delivery system and method for fluid delivery system |
| CN110863997A (en) * | 2019-11-19 | 2020-03-06 | 北京中科科仪股份有限公司 | Magnetic suspension molecular pump with internal heating device |
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| Publication number | Publication date |
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| CN117846985A (en) | 2024-04-09 |
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