CN118423368B - Air bearing - Google Patents

Abstract

The invention provides an air bearing, and relates to the technical field of bearings. The air bearing can comprise a body and a rotating part, wherein the body comprises an air cavity, the air cavity comprises a center column, and the center column comprises uniformly arranged first air outlet holes, so that external air can flow to the air cavity from the first air outlet holes. The rotating part is sleeved at the center column and comprises a deflection pipe, an air inlet of the deflection pipe is close to the first air outlet, so that air coming out of the first air outlet can flow through the deflection pipe and then flow to the air cavity, and the rotating part is pushed to rotate, so that air discharged from the deflection pipe can be more uniformly distributed in the whole air cavity, the uniformity of air film supporting force is improved, the running stability of the air bearing is obviously improved, and the problem of unbalanced bearing caused by uneven air flow distribution is avoided.

Description

Air bearing

Technical Field

The invention relates to the technical field of bearings, in particular to an air bearing.

Background

The air bearing is an important component applied to an ultra-precise large-stroke two-dimensional air bearing positioning platform, and takes air (also can be other gases) as a sliding bearing of a lubricant. In operation, the sliding pair surfaces are completely separated by an air film, and the load is supported by means of a pressure air film formed between the bearing sliding pair surfaces. The pressure air film has the advantages of good homogenization effect, small vibration, high motion precision, low air viscosity, small friction loss, small heating deformation, long service life and the like. In the prior art, a plane air bearing made of porous plane materials is common, and the static characteristics of the plane air bearing are very good. However, due to the inconsistency of porous materials, it is difficult to find a group of planar air bearing with exactly equal air film pressure, so that the buoyancy of each air bearing is not exactly consistent. Even if the air bearing is arranged on the same plane, the ventilation amount of the ventilated gas in unit time is not completely the same in different areas of the air bearing, so that when the precision of an application scene is higher, tiny vibration of operation process seeds can occur, and the uniformity and the stability of the operation process seeds are poorer.

Disclosure of Invention

An object of the first aspect of the present invention is to provide an air bearing, which solves the problem of insufficient stability and uniformity of an air film in the prior art.

In particular, the present invention also provides an air bearing comprising:

The body comprises an air cavity, wherein a center column is arranged in the air cavity; an air inlet channel is arranged in the middle column; the center column is provided with at least one first air outlet hole which is uniformly arranged along the radial direction, and each first air outlet hole is communicated with the air inlet channel and the air cavity, so that external air flows into the first air outlet holes from the air inlet channel and then enters the air cavity; and

The rotating part is rotatably sleeved at the middle column; the rotary part is internally provided with at least one deflection pipe, the deflection pipe comprises an air inlet and an air outlet, and at least part of air flowing out of the first air outlet flows into the deflection pipe from the air inlet and then flows into the air cavity from the air outlet, so that the rotary part is pushed to rotate around the center column.

Optionally, the sum of the cross-sectional areas of all the first outlet holes is larger than the sum of the cross-sectional areas of all the inlet openings of the deflection tube.

Optionally, the rotating member has a through hole, the center pillar passes through the through hole, and a preset distance is left between an inner sidewall of the through hole and an outer sidewall of the center pillar.

Optionally, the preset distance between the inner side wall of the through hole above the deflection tube and the outer side wall of the center pillar is smaller than the preset distance between the inner side wall of the through hole below the deflection tube and the outer side wall of the center pillar.

Optionally, each of the deflection pipes includes a first pipe and a second pipe, the first pipe is located in the rotating component, and the second pipe is located outside the rotating component, where an included angle between the first pipe and the second pipe is greater than or equal to 90 degrees and less than 180 degrees.

Optionally, the number of the deflection pipes is plural, and the air outlet directions of all the deflection pipes in the circumferential direction of the rotating part are the same;

The axial thickness of the rotating member is smaller and smaller in the radially outward direction.

Optionally, a plurality of second air outlet holes which are communicated with the air cavity and the air floating end face of the body are also formed in the body; the air outlet ends of the second air outlet holes are uniformly distributed at the air floatation end face.

Optionally, the distance between the air inlet end of the second air outlet hole and the center pillar is greater than the distance between the air outlet of the deflection tube and the center pillar.

Optionally, the body includes:

The supporting plate is provided with a first groove body and a second groove body, the second groove body is positioned above the first groove body, and the size of the second groove body is larger than that of the first groove body; and

The cover plate is positioned at the second groove body and matched with the first groove body to form the air cavity; the middle column extends from the bottom of the first groove body to the bottom position of the cover plate.

Optionally, the air chamber further comprises a first sealing piece, wherein the first sealing piece is arranged between the supporting plate and the cover plate so as to prevent the air in the air chamber from leaking from between the supporting plate and the cover plate; and

And the second sealing piece is arranged between the top of the center column and the bottom of the cover plate so as to prevent gas in the first gas outlet hole from flowing into the gas cavity from the top of the center column.

The air bearing of this scheme can include body and rotating member, and this internal air cavity that includes again includes the center pillar in this, and center pillar department includes the first venthole of evenly arranging, can flow to the air cavity with external gas by first venthole. The rotating part is sleeved at the center column and comprises a deflection pipe, an air inlet of the deflection pipe is close to the first air outlet, so that air coming out of the first air outlet can flow through the deflection pipe and then flow to the air cavity, and the rotating part is pushed to rotate, so that air discharged from the deflection pipe can be more uniformly distributed in the whole air cavity, the uniformity of air film supporting force is improved, the running stability of the air bearing is obviously improved, and the problem of unbalanced bearing caused by uneven air flow distribution is avoided.

According to the scheme, the middle column is preferably abutted between the bottom and the top of the air cavity, so that an additional air circulation path is provided, the supporting force of the middle part on the upper part of the air cavity is enhanced, the structural strength of the whole air bearing is further improved, the air bearing can bear larger load, and the air bearing is suitable for high-requirement precise application occasions.

In the scheme, the deflection pipe is arranged at the rotating part, so that the ingenious design of the deflection pipe ensures that the resistance can be effectively reduced when the gas is discharged, and the kinetic energy loss of the gas is reduced. In addition, the utilization of the gyroscopic effect is not only beneficial to maintaining the dynamic balance of the system, but also can resist external interference such as vibration or inclination to a certain extent, so that the air bearing still keeps high-level performance under the dynamic working condition.

The preset distance is reserved between the rotating part and the center pillar, so that the rotating part can rotate better by taking the center pillar as a rotating shaft, and friction between the rotating part and the center pillar is reduced.

According to the scheme, the sum of the cross-sectional areas of all the first air outlet holes is designed to be larger than the sum of the cross-sectional areas of the air inlets of all the deflection pipes, so that at least part of air flowing out of the first air outlet holes cannot enter the deflection pipes and then flows out of gaps between the rotating part and the middle column, an air film is formed between the rotating part and the outer side wall of the middle column, and friction force between the gyro disc and the middle column is further reduced. In addition, the sum of the cross-sectional areas of the air inlets of the deflection pipes is matched with the sum of the cross-sectional areas of the first air outlets, so that reasonable control of the air flow is ensured, the air film is formed more rapidly and stably, and the accuracy and the response speed of the moving part are improved.

The gap between the rotating part and the center column below the deflection pipe is designed to be larger than the gap above the deflection pipe, so that the gas flowing out from the lower part is larger than the gas flowing out from the upper part, and the pressure difference of the gas is enabled to give the rotating part an upward supporting force, so that the rotating part is suspended in the air cavity, and the friction force between the rotating part and the bottom of the air cavity is reduced. In addition, the air flowing out from the upper part of the rotating part also gives a certain supporting force to the top of the air cavity (namely a certain supporting force to the middle column of the cover plate), so that the structural strength of the cover plate is increased.

The design of the flow equalizing ring grooves and the flow equalizing transverse grooves effectively balances the pressure consistency of the gas around the exhaust holes, improves the rigidity of the gas film to a certain extent, further ensures the uniform distribution of the supporting force of the gas film, is important for improving the positioning precision and reducing the tiny vibration, and is particularly suitable for the application of an ultra-precise positioning platform.

The above, as well as additional objectives, advantages, and features of the present invention will become apparent to those skilled in the art from the following detailed description of a specific embodiment of the present invention when read in conjunction with the accompanying drawings.

Drawings

Some specific embodiments of the invention will be described in detail hereinafter by way of example and not by way of limitation with reference to the accompanying drawings. The same reference numbers will be used throughout the drawings to refer to the same or like parts or portions. It will be appreciated by those skilled in the art that the drawings are not necessarily drawn to scale. In the accompanying drawings:

FIG. 1 is a cross-sectional view of an air bearing according to a specific embodiment of the present invention;

FIG. 2 is a top view of a rotating component positioned at a center post according to one particular embodiment of the present invention;

FIG. 3 is a top view of a rotating member positioned at a center post according to another specific embodiment of the present invention;

fig. 4 is a bottom view of a body according to one specific embodiment of the present invention.

Reference numerals illustrate:

An air bearing-100;

a body-200; air cavity-210; center pillar-220; a first outlet port-221; an intake passage-230; a first channel-231; a second channel-232; a pallet-240; a first tank body-241; second tank body-242; a cover plate-250; a second air outlet hole-260; an air-floating end face-270; flow equalizing ring grooves-280; flow equalization cross slot-290;

a rotating member-300; a deflection tube-310; an inlet-311; an air outlet-312; a first line-313; second line-314; a via-320;

A first seal-400;

A second seal-500.

Detailed Description

In the description of the present embodiment, it should be understood that the terms "length", "width", "height", "upper", "lower", "left", "right", "vertical", "horizontal", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.

As a specific embodiment of the present invention, as shown in fig. 1, the present embodiment provides an air bearing 100, and the air bearing 100 may include a body 200 and a rotating member 300. Wherein, the body 200 may include an air chamber 210, and a center pillar 220 is disposed in the air chamber 210. An intake passage 230 is provided in the center pillar 220. The center pillar 220 is provided with at least one first outlet hole 221 uniformly arranged in a radial direction, and each first outlet hole 221 communicates with the air inlet channel 230 and the air chamber 210, so that external air flows into the first outlet hole 221 from the air inlet channel 230 and then enters the air chamber 210. The rotating member 300 is rotatably sleeved at the center pillar 220. At least one deflection tube 310 is provided in the rotating member 300, and the deflection tube 310 may include an air inlet 311 and an air outlet 312. The inlet 311 is close to the center pillar 220, and the outlet 312 is far from the center pillar 220. The gas flowing out of the first gas outlet 221 flows into the deflection tube 310 from the gas inlet 311, flows into the gas chamber 210 from the gas outlet 312, and further pushes the rotating member 300 to rotate around the axis of the center pillar 220.

Specifically, the axial thickness of the rotating member 300 of the present embodiment is smaller and smaller in the radially outward direction, and it may be configured as a gyro disk, or a gyro-like disk structure.

Specifically, the air bearing 100 of the present embodiment may include a body 200 and a rotating member 300, where the body 200 includes an air cavity 210, the air cavity 210 includes a center pillar 220, and the center pillar 220 includes uniformly arranged first air outlet holes 221, so that external air can flow from the first air outlet holes 221 to the air cavity 210. The rotating member 300 is sleeved at the center pillar 220, and the rotating member 300 comprises a deflection pipe 310, the air inlet 311 of the deflection pipe 310 is close to the first air outlet 221, so that air coming out of the first air outlet 221 can flow through the deflection pipe 310 and then flow to the air cavity 210, and the rotating member 300 is further pushed to rotate, so that air discharged from the deflection pipe 310 can be more uniformly distributed in the whole air cavity 210, the uniformity of air film supporting force is improved, the operation stability of the air bearing 100 is also remarkably improved, and the problem of unbalanced load caused by uneven air flow distribution is avoided.

Specifically, the air cavity 210 in this embodiment is designed with the center column 220, and the center column 220 is preferably abutted between the bottom and the top of the air cavity 210, which not only provides an additional air flow path, but also enhances the supporting force at the middle position of the upper part of the air cavity 210, thereby enhancing the structural strength of the whole air bearing 100, so that the air bearing can bear larger load, and is suitable for higher-requirement precision application occasions.

Specifically, the body 200 of the present embodiment may include a pallet 240 and a cover plate 250. Wherein, the supporting plate 240 is provided with a first groove 241 and a second groove 242, the second groove 242 is located above the first groove 241, and the second groove 242 is larger than the first groove 241. The cover plate 250 is located at the second groove body 242 and cooperates with the first groove body 241 to form the air cavity 210. The center pillar 220 extends from the bottom of the first groove 241 to the bottom position of the cover plate 250.

In this embodiment, the center column 220 abuts against the bottom of the cover plate 250, so that the supporting force in the middle of the cover plate 250 can be improved, and the structural strength of the whole air bearing 100 can be further improved.

Specifically, the gas in the gas chamber 210 of the present embodiment needs to form a gas film, and thus the first seal 400 is provided between the cover plate 250 and the pallet 240 to prevent the gas in the gas chamber 210 from leaking through the gap between the cover plate 250 and the pallet 240. In particular, the first seal 400 may be a sealing ring. The sealing ring may be disposed between the bottom of the cover plate 250 and the bottom of the second groove body 242.

More specifically, this embodiment may provide a groove at the bottom of the cover plate 250 or the bottom of the second groove 242, preferably having a cross-sectional dimension slightly smaller than the cross-sectional dimension of the seal ring. Before installation, the sealing ring is arranged at the groove, and then the cover plate 250 and the supporting plate 240 are mutually buckled.

Specifically, the air intake passage 230 in the center pillar 220 of the present embodiment extends from the bottom of the center pillar 220 to the top position of the center pillar 220. As one example, the air intake passage 230 is sealed at a top position of the center pillar 220. The gas introduced into the inlet passage 230 of the center pillar 220 can flow out only from the first outlet hole 221. As another example, the gas inlet passage 230 is perforated at the top of the center pillar 220, and in order to prevent gas in the gas inlet passage 230 from flowing out from the top, a second seal 500 is provided between the top of the center pillar 220 and the bottom of the cover plate 250. Thus, the gas introduced into the gas inlet passage 230 can still flow out only from the first gas outlet hole 221. In particular, the second seal 500 may be a sealing ring.

Specifically, the intake passage 230 may include a first passage 231 and a second passage 232, the first passage 231 being disposed within the center pillar 220 and extending along an axis of the center pillar 220. The second passage 232 communicates the first passage 231 with the outside of the body 200. Specifically, the second channel 232 is located at the support plate 240 and extends to the outside of the support plate 240, so that the air can flow into the air chamber 210 through the first air inlet hole after entering the first channel 231 through the second channel 232 by inputting the air into the second channel 232.

As a specific embodiment of the present invention, as shown in fig. 1,2 and 3, the number of the deflection pipes 310 in this embodiment may be one, and the extending direction of the air outlet 312 of the deflection pipe 310 is not radial.

As another specific embodiment of the present invention, the number of the deflection pipes 310 in this embodiment is plural, and the extending direction of the air outlet 312 of at least one deflection pipe 310 is not radial.

Preferably, the number of the deflection pipes 310 in the present embodiment is plural, and the extending directions of the air outlets 312 of all the deflection pipes 310 are not radial. The preset angles at which the air outlets 312 of the different deflection pipes 310 extend may be the same or different.

Preferably, the air outlets 312 of all the deflection pipes 310 extend in the same direction. The situation that when the deflection angles of some deflection pipes 310 face one direction and the deflection angles of other deflection pipes 310 face the other direction, mutual offset is avoided, and the situation that the rotating part 300 is difficult to rotate or even does not rotate is avoided.

Specifically, the structure and the extending direction of the deflector tube 310 at other positions than the extending direction at the air outlet 312 may not be particularly limited.

As one example, as shown in fig. 2 and 3, each deflection pipe 310 may include a first pipe 313 and a second pipe 314, the first pipe 313 being located inside the rotating member 300, and the second pipe 314 being located outside the rotating member 300, wherein the first pipe 313 extends along a radial direction of the rotating member 300 in this example. The extending direction of the second pipeline 314 is consistent with the extending direction of the air outlet 312, and the included angle beta between the first pipeline 313 and the second pipeline 314 is greater than or equal to 90 degrees and less than 180 degrees. For example, the angle β may be 90 °, 120 °, 175 °, or 179 °.

Specifically, the number of deflection pipes 310 of the present embodiment is plural and uniformly distributed in the rotating member 300.

More specifically, the plurality of deflection pipes 310 of the present embodiment have the same air outlet direction in the circumferential direction of the rotating member 300.

More specifically, the air outlet directions of the plurality of deflection pipes 310 in the circumferential direction of the rotating member 300 in this embodiment are tangential directions. More specifically, the deflection pipes 310 of the present embodiment are four in number and are uniformly distributed at the rotating member 300.

Specifically, in this embodiment, the deflection tube 310 is disposed at the rotating member 300, and the smart design of the deflection tube 310 ensures that the resistance can be effectively reduced when the gas is discharged, and the kinetic energy loss of the gas is reduced. In addition, the gyroscopic effect is not only helpful to maintain the dynamic balance of the system, but also to resist external disturbances such as vibration or tilting to some extent, so that the air bearing 100 still maintains a high level of performance under dynamic conditions.

As a specific embodiment of the present invention, the rotating member 300 of the present embodiment has a through hole 320, the center post 220 passes through the through hole 320, and a predetermined distance is left between the inner sidewall of the through hole 320 and the outer sidewall of the center post 220.

The preset distance is left between the rotating member 300 and the center pillar 200 in this embodiment, and the preset distance can enable the rotating member 300 to rotate with the center pillar 220 as a rotating shaft better, so as to reduce friction between the rotating member 300 and the center pillar 220.

As a specific embodiment of the present invention, the sum of the cross-sectional areas of all the first outlet holes 221 of the present embodiment is larger than the sum of the cross-sectional areas of the inlet ports 311 of all the deflection pipes 310.

The cross section of the deflection tube 310 in this embodiment refers to a cross section taken through a plane perpendicular to the axis of the deflection tube 310, unless otherwise specified. The cross section of the first gas outlet hole 221 refers to a cross section cut through a plane perpendicular to the axis of the first gas outlet hole 221.

Specifically, the present embodiment designs the sum of the cross-sectional areas of all the first gas outlet holes 221 to be larger than the sum of the cross-sectional areas of all the gas inlets 311 of the deflection pipes 310, so that at least part of the gas flowing out of the first gas outlet holes 221 cannot enter the deflection pipes 310 and then flow out of the gap between the rotating member 300 and the center pillar 220, thereby forming a gas film between the rotating member 300 and the outer side wall of the center pillar 220, and further reducing the friction force between the rotating member 300 and the center pillar 220. In addition, the sum of the cross-sectional areas of the inlet 311 of the deflection tube 310 is matched with the sum of the cross-sectional areas of the first outlet 221, so that reasonable control of the gas flow is ensured, the gas film formation is more rapid and stable, and the accuracy and the response speed of the moving parts are improved.

As a specific embodiment of the present invention, the size of the through hole 320 located above the deflection tube 310 is smaller than the size of the through hole 320 located below the deflection tube 310, such that the preset distance between the inner sidewall of the through hole 320 located above the deflection tube 310 and the outer sidewall of the center pillar 220 is smaller than the preset distance between the inner sidewall of the through hole 320 located below the deflection tube 310 and the outer sidewall of the center pillar 220.

Specifically, in this embodiment, a portion of the gas flowing out of the first gas outlet 221 enters the deflection tube 310, and a portion of the gas flows out of the gap between the rotating member 300 and the center pillar 220, and the gas flowing out of the upper portion of the rotating member 300 also provides a certain supporting force to the top of the gas chamber 210 (i.e. a certain supporting force to the cover plate 250), so as to increase the structural strength of the cover plate 250. The gap between the rotating member 300 and the center pillar 220 below the deflection tube 310 is designed to be larger than the gap above the deflection tube 310, so that the gas flowing out from below is larger than the gas flowing out from above, and the pressure difference of the gas is further caused to give the rotating member 300 an upward supporting force, so that the rotating member 300 is suspended in the air cavity 210, and the friction between the rotating member 300 and the bottom of the air cavity 210 is reduced.

As a specific embodiment of the present invention, as shown in fig. 1 and 4, a plurality of second air outlet holes 260 are further disposed in the body 200 of the present embodiment, and are used for communicating the air chamber 210 with the air-floating end 270 of the body 200. The air outlet ends of the plurality of second air outlet holes 260 are uniformly distributed at the air floating end face 270.

The second air outlet hole 260 of the present embodiment is disposed at the supporting plate 240, and extends from the air cavity 210 of the supporting plate 240 to the air-floating end surface 270 at the bottom, so that the air in the air cavity 210 is led out to the air-floating end surface 270, and then an air film is formed on the air-floating end surface 270. The air outlet ends of the plurality of second air outlet holes 260 are uniformly arranged at the air-floating end face 270, so that the uniformity of the air-floating end face 270 can be increased.

As a specific embodiment of the present invention, the distance from the air inlet end of the second air outlet 260 to the center pillar 220 is greater than the distance from the air outlet 312 of the deflection tube 310 to the center pillar 220.

Specifically, the air chamber 210 of the present embodiment is continuously rotated by the rotating member 300, so that the uniformity of the air in the air chamber 210 is better, but since the air of the rotating member 300 flows into the air chamber 210 from the air outlet end of the deflecting pipe 310, the uniformity of the air at the outer side of the air outlet end of the deflecting pipe 310 is better, and the air pressure is larger, the air inlet end of the second air outlet hole 260 is disposed at the outer side of the air outlet end of the deflecting pipe 310, so that the air flowing into the air floating end face 270 is more uniform.

As a specific embodiment of the present invention, the dimension of each second air outlet hole 260 near the air cavity 210 is larger than the dimension of the second air outlet hole near the air floating end face 270.

Specifically, the size of the second air outlet hole 260 at the air inlet end is larger than the size at the air outlet end in this embodiment may further increase the uniformity of the gas reaching the air-floating end face 270.

As a specific embodiment of the present invention, as shown in fig. 1 and fig. 4, at least one flow equalizing ring groove 280 is further disposed on the air floating end face 270 of the body 200 in this embodiment, and the flow equalizing ring groove 280 communicates the air outlet ends of all the second air outlet holes 260 located on the air floating end face 270.

Specifically, the structure of the flow equalizing ring groove 280 in this embodiment matches the structure of the air floating end face 270, and the number of flow equalizing ring grooves 280 may be one or more. The design of the flow equalizing ring groove 280 can increase the uniformity of the air floating end face 270, thereby increasing the uniformity of the air film supporting force.

Specifically, the air-floating end face 270 of the present embodiment is a circle, and the air-outlet ends of the second air-outlet holes 260 are uniformly arranged along the circle, so that the flow equalizing ring grooves 280 are also circular, and all the air-outlet ends of the second air-outlet holes 260 are communicated.

As other specific embodiments, the air outlet ends of the second air outlet holes 260 may be arranged along a plurality of concentric circles, and the flow equalizing ring grooves 280 may form a plurality of circles.

Of course, the flow equalizing ring groove 280 is not limited to a circular shape, and may have other shapes similar to a circular shape, such as a hexagon, an octagon, etc.

Specifically, the longitudinal section of the flow equalizing ring groove 280 in this embodiment is semicircular or square.

As a specific embodiment of the present invention, at least one flow equalizing cross groove 290 is further disposed on the air floating end face 270 of the body 200 in this embodiment, and each flow equalizing cross groove 290 communicates with all flow equalizing ring grooves 280.

Specifically, in this embodiment, the flow equalization cross grooves 290 can communicate between different positions of the same flow equalization ring groove 280 or between different flow equalization ring grooves 280. Specifically, the design of the flow equalizing ring grooves 280 and the flow equalizing transverse grooves 290 effectively balances the pressure consistency of the gas around the exhaust holes, improves the rigidity of the gas film to a certain extent, further ensures the uniform distribution of the supporting force of the gas film, is important for improving the positioning precision and reducing the tiny vibration, and is particularly suitable for the application of an ultra-precise positioning platform.

As a specific embodiment, the structure and the working principle of the air bearing 100 of this embodiment are as follows:

The rotating member 300, the pallet 240 and the cover plate 250 are first formed as desired. The support plate 240 is provided with a first groove 241, a second groove 242, a center pillar 220, and an air inlet passage 230. The center pillar 220 is located in the middle of the first groove body 241 and extends upward. The air inlet passage 230 extends from the outside of the carrier 240 to the center pillar 220. A first outlet hole 221 communicating the inlet passage 230 with the first groove 241 is provided at the center pillar 220. The second air outlet 260 is also arranged in the supporting plate 240, and the air floating end face 270 of the supporting plate 240 is provided with a flow equalizing ring groove 280 and a flow equalizing cross groove 290. The rotating member 300 is designed in a gyro shape, and has a through hole 320 provided in a central axial direction thereof, an axial thickness being smaller and smaller in a direction extending in a radial direction, and a deflection tube 310 provided in the radial direction.

The through hole 320 of the rotating member 300 is sleeved at the center post 220, and the cover plate 250 is covered on the second groove 242 of the supporting plate 240 to form the air cavity 210 in cooperation with the first groove 241. A first seal 400 is provided between the center post 220 and the cover plate 250, and a second seal 500 is provided between the cover plate 250 and the carrier 240.

In operation, gas is supplied inwardly through the gas inlet channel 230 and flows along the first gas outlet hole 221 to the gas chamber 210. Since the sum of the cross-sectional areas of the first air outlet holes 221 is greater than the sum of the cross-sectional areas of the air inlet holes 311 of the deflection pipe 310, after a part of the air enters the deflection pipe 310 of the rotating member 300, the rotating member 300 starts to rotate, and the air discharged from the deflection pipe 310 is relatively uniformly distributed in the air chamber 210, thereby increasing the uniformity of the air discharged from the air discharge holes. Another part of the gas flows out between the inner sidewall of the through hole 320 of the rotating member 300 and the outer sidewall of the center pillar 220, so that a gas film is formed between the inner sidewall of the passage and the outer sidewall of the center pillar 220 to reduce friction between the rotating member 300 and the center pillar 220. In addition, the size of the through hole 320 located below the deflection tube 310 is designed to be larger than the size of the through hole located above the deflection tube 310, so that the gas flowing out from below the through hole 320 is larger than the gas flowing out from above the through hole, thereby suspending the rotating member 300 within the air chamber 210, further reducing friction between the rotating member 300 and the bottom of the air chamber 210. The gas in the air cavity 210 flows from the second air outlet 260 to the air floating end face 270, and the flow equalizing ring grooves 280 and the flow equalizing cross grooves 290 at the air floating end face 270 can further improve the uniformity of the gas, thereby improving the uniformity of the gas film supporting force.

Through ingenious design, the air bearing of the embodiment comprehensively improves the bearing capacity, stability, uniformity and dynamic response performance of the air bearing 100, and provides a more reliable suspension and positioning solution for ultra-precise equipment.

By now it should be appreciated by those skilled in the art that while a number of exemplary embodiments of the invention have been shown and described herein in detail, many other variations or modifications of the invention consistent with the principles of the invention may be directly ascertained or inferred from the present disclosure without departing from the spirit and scope of the invention. Accordingly, the scope of the present invention should be understood and deemed to cover all such other variations or modifications.

Claims (8)

1. An air bearing, comprising:

The body comprises an air cavity, wherein a center column is arranged in the air cavity; an air inlet channel is arranged in the middle column; the center column is provided with at least one first air outlet hole which is uniformly arranged along the radial direction, and each first air outlet hole is communicated with the air inlet channel and the air cavity, so that external air flows into the first air outlet holes from the air inlet channel and then enters the air cavity; and

The rotating part is rotatably sleeved at the middle column; at least one deflection pipe is arranged in the rotating part, the deflection pipe comprises an air inlet and an air outlet, and at least part of air flowing out of the first air outlet flows into the deflection pipe from the air inlet and then flows into the air cavity from the air outlet, so that the rotating part is pushed to rotate around the center column;

The rotating part is provided with a through hole, the center column penetrates through the through hole, and a preset distance is reserved between the inner side wall of the through hole and the outer side wall of the center column;

The preset distance between the inner side wall of the through hole, which is positioned above the deflection pipe, and the outer side wall of the center column is smaller than the preset distance between the inner side wall of the through hole, which is positioned below the deflection pipe, and the outer side wall of the center column.

2. The air bearing of claim 1, wherein the air bearing is formed of a hollow cylindrical material,

The sum of the cross-sectional areas of all the first air outlet holes is greater than the sum of the cross-sectional areas of all the air inlets of the deflection pipes.

3. An air bearing according to claim 1 or 2, wherein,

Each deflection pipe comprises a first pipeline and a second pipeline, wherein the first pipeline is positioned in the rotating part, the second pipeline is positioned outside the rotating part, and an included angle between the first pipeline and the second pipeline is larger than or equal to 90 degrees and smaller than 180 degrees.

4. An air bearing according to claim 1 or 2, wherein,

The deflection pipes are multiple, and the air outlet directions of all the deflection pipes in the circumferential direction of the rotating part are the same;

The axial thickness of the rotating member is smaller and smaller in the radially outward direction.

5. An air bearing according to claim 1 or 2, wherein,

The body is internally provided with a plurality of second air outlet holes which are communicated with the air cavity and the air floating end face of the body; the air outlet ends of the second air outlet holes are uniformly distributed at the air floatation end face.

6. The air bearing of claim 5, wherein the air bearing is formed of a hollow cylindrical material,

The distance between the air inlet end of the second air outlet hole and the center column is larger than the distance between the air outlet of the deflection tube and the center column.

7. An air bearing according to claim 1 or 2, wherein,

The body includes:

The supporting plate is provided with a first groove body and a second groove body, the second groove body is positioned above the first groove body, and the size of the second groove body is larger than that of the first groove body; and

The cover plate is positioned at the second groove body and matched with the first groove body to form the air cavity; the middle column extends from the bottom of the first groove body to the bottom position of the cover plate.

8. The air bearing of claim 7, wherein the air bearing is formed of a hollow cylindrical material,

Further comprises:

A first seal disposed between the tray and the cover plate to prevent leakage of gas within the air cavity from between the tray and the cover plate; and

And the second sealing piece is arranged between the top of the center column and the bottom of the cover plate so as to prevent gas in the first gas outlet hole from flowing into the gas cavity from the top of the center column.