CN118533863B

CN118533863B - Display device defect detection method, detection system and detection device

Info

Publication number: CN118533863B
Application number: CN202411009192.2A
Authority: CN
Inventors: 魏巍; 王刚
Original assignee: Suzhou HYC Technology Co Ltd
Current assignee: Suzhou HYC Technology Co Ltd
Priority date: 2024-07-26
Filing date: 2024-07-26
Publication date: 2025-09-23
Anticipated expiration: 2044-07-26
Also published as: CN118533863A

Abstract

The application provides a display equipment defect detection method, a detection system and a detection device, which relate to the technical field of display, wherein the detection method adopts detection beams to detect the display equipment, the detection beams are scanned for non-contact detection, the problem of damage of a light-emitting unit caused by contact of a probe during the detection of the display equipment is avoided, and the detection beam is controlled to scan the light-emitting unit area along a set track or a set pattern, so that the detection beam received by the light-emitting unit is more uniform, the state of the light-emitting unit during scanning of the detection beam is acquired at the moment, the defect point of the display device is determined according to the state of the light-emitting unit, the detection precision of the defect point of the display device can be increased, and the error rate is reduced.

Description

Display equipment defect detection method, detection system and detection device

Technical Field

The present application relates to the field of display technologies, and in particular, to a method, a system, and a device for detecting defects of a display device.

Background

Display devices are widely used as information presentation devices for displays, televisions, projection devices, and terminal devices. With the continuous expansion of the application field of display devices, the requirements of people on the display size and the display performance of the display devices are continuously improved.

In the manufacturing/manufacturing process of display devices, particularly advanced display technologies such as Micro (mu) LEDs, various types of optical and other types of devices need to be detected in the manufacturing/manufacturing process due to the limitation of yield. However, the existing detection mode cannot meet the detection requirement of products, and the detection error is large and products are easy to damage when the light-emitting units in the display equipment are detected.

Disclosure of Invention

Based on the above, it is necessary to provide a display device defect detection method, a detection system and a detection device for solving the problems of large detection error, easy damage to products and the like in the detection process of the prior art.

In order to achieve the above object, in one aspect, the present invention provides a display device defect detection method, the detection method comprising:

the display device comprises a substrate and a light emitting unit positioned on the substrate, and the detection method comprises the following steps:

Transmitting a detection beam;

The detection beam is controlled to scan a plurality of light-emitting unit areas, and the light-emitting unit areas comprise single light-emitting units or a plurality of light-emitting units arranged in an array;

Acquiring the state of the light emitting unit during scanning of the detection beam;

determining a defective point of the display device based on a state of the light emitting unit;

the scanning mode of the detection beam comprises scanning along a set track or fixed-point scanning according to a set pattern.

The application also provides a display device defect detection system, the display device comprises a substrate and a light-emitting unit positioned on the substrate, the detection system comprises:

the transmitting module is used for transmitting the detection beam;

the scanning module is used for controlling the detection beam to scan a plurality of light-emitting unit areas, and the light-emitting unit areas comprise a single light-emitting unit or a plurality of light-emitting units arranged in an array;

an acquisition device for acquiring the state of the light emitting unit when the detection beam is scanned;

a determining module for determining a defect point of the display device based on a state of the light emitting unit;

The application also provides a display device defect detection device, the display device comprises a substrate and a light-emitting unit positioned on the substrate, the detection device comprises:

The electron beam emitting device is used for emitting detection beams and scanning a plurality of light emitting unit areas through the detection beams, and the light emitting unit areas comprise single light emitting units or a plurality of light emitting units arranged in an array;

control means for determining a defective point of the display device based on the state of the light emitting unit;

The application provides a display device defect detection method, a detection system and a detection device, wherein in the detection method, detection beams are adopted to detect the display device, detection beam scanning is non-contact detection, the problem that a light emitting unit is damaged due to contact of a probe during detection of the display device is avoided, the detection beams are controlled to scan a light emitting unit area along a set track or a set pattern, the detection beams received by the light emitting unit can be more uniform, the state of the light emitting unit during detection beam scanning is acquired at the moment, the defect point of the display device is determined according to the state of the light emitting unit, the detection precision of the defect point of the display device can be increased, and the error rate is reduced.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments or the conventional techniques of the present application, the drawings required for the descriptions of the embodiments or the conventional techniques will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to the drawings without inventive effort for those skilled in the art.

Fig. 1 is a schematic flow chart of a method for detecting defects of a display device according to an embodiment of the present application;

Fig. 2 is a schematic diagram of an arrangement structure of a light emitting unit according to an embodiment of the present application;

Fig. 3 is a schematic structural diagram of a detection beam scanning light-emitting unit according to an embodiment of the present application;

fig. 4 is a scanning schematic diagram of a first scanning manner according to an embodiment of the present application;

Fig. 5 is a scanning schematic diagram of a second scanning manner according to an embodiment of the present application;

fig. 6 is a schematic diagram of scanning with a preset direction being a scanning direction according to an embodiment of the present application;

fig. 7 is a schematic diagram of another scan with a predetermined direction being a scan direction according to an embodiment of the present application;

FIG. 8 is a schematic diagram of a detection system according to an embodiment of the present application;

FIG. 9 is a schematic diagram of a defect detecting device for display equipment according to an embodiment of the present application;

Fig. 10 is a schematic structural diagram of an electron beam emitting device according to an embodiment of the present application;

FIG. 11 is a schematic diagram of an acquiring apparatus according to the present application;

FIG. 12 is a schematic diagram of another display device defect detecting apparatus according to an embodiment of the present application;

FIG. 13 is a schematic diagram of a defect detecting apparatus for a display device according to an embodiment of the present application;

FIG. 14 is a schematic diagram of a defect detecting apparatus for a display device according to an embodiment of the present application;

FIG. 15 is a schematic diagram of a defect detecting apparatus for a display device according to an embodiment of the present application;

fig. 16 is a schematic structural diagram of another display device defect detecting apparatus according to an embodiment of the present application.

The reference numerals indicate a-detection beam, 01-emission module, 02-scanning module, 03-acquisition module, 04-determination module, 11-light emitting unit, 12-electron beam emitting device, 13-acquisition device, 14-control device, 15-vacuum chamber, 16-substrate, 17-electron beam emitting module, 18-emission control module, 19-electron beam deflection unit, 20-electron beam positioning unit, 21-parameter control unit, 22-image acquisition unit, 23-image processing unit, 24-image output unit, 25-image detection control unit, 26-image acquisition control unit, 27-auxiliary lighting unit, 28-data acquisition unit, 29-repair device, 30-adjustment device, 31-wavelength filtering device, 32-equipment interface, 33-central controller, 34-signal generator, 35-vacuum pump, 36-cover plate.

Detailed Description

In order that the application may be readily understood, a more complete description of the application will be rendered by reference to the appended drawings. Embodiments of the application are illustrated in the accompanying drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

It will be understood that when an element is referred to as being "on," "adjacent to," "connected to" another element, it can be directly on, adjacent to, or connected to the other element or intervening elements may be present. In contrast, when an element is referred to as being "directly on," "directly adjacent to," or "directly connected to" another element, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. may be used to describe various ways, elements, these ways, elements should not be limited by these terms. These terms are only used to distinguish one mode or element from another mode or element. Thus, a first manner or element discussed below could be termed a second manner or element without departing from the teachings of the present invention.

As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," and/or the like, specify the presence of stated features, integers, steps, operations, elements, components, or groups thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or groups thereof. Also, in this specification, the term "and/or" includes any and all combinations of the associated listed items.

Based on the content in the background art, a display device is widely used as an information display device for a display, a television, a projection device, a terminal device, such as a mobile phone, a Pad, a smart watch, an augmented Reality (AR, augmented Reality)/a Virtual Reality (VR), and the like. From the perspective of display panel technology, display technologies such as Cathode Ray Tube (CRT), plasma display (PDP, plasma Display Panel), liquid Crystal Display (LCD) CRYSTAL DISPLAY), light-Emitting Diode (LED) and the like are included. With the continuous expansion of application fields, the requirements of people on the display size and the display performance of display devices are continuously improved, display technologies such as Organic Light-Emitting Diode (OLED), active-Matrix Organic Light-Emitting Diode (AMOLED) and the like are widely applied to different fields, such as lighting, advertisement lamps (cards), automobile display, indicator lamps, screens, flat panel display, medical display and the like, and particularly with the continuous improvement of application to ultra-large display fields, such as commercial fields of monitoring command, high-definition performance, high-end cinema, medical diagnosis, advertisement display, conference exhibition, office display, virtual reality and the like, advanced display technologies such as Mini LEDs and Micro (μ) LEDs are gradually brought into our field of view to solve technical bottlenecks.

However, in the preparation process of the display device, especially in advanced display technologies such as Micro (mu) LEDs, various optical and other types of devices need to be tested in the preparation process due to the limitation of yield, but probes are needed for contact detection, and the manufacturing difficulty and cost of the probes are higher and higher due to the fact that the light-emitting units are smaller and smaller, and the traditional detection mode also causes damage to the light-emitting units, so that the false detection rate is further increased, and the detection precision is reduced.

Based on the detection, the application provides a method, a system and a device for detecting defects of display equipment, wherein the detection method adopts detection beams to detect the display equipment, detection beam scanning is non-contact detection, the problem that a light emitting unit is damaged due to contact of a probe during detection of the display equipment is avoided, the detection beams are controlled to scan a light emitting unit area along a set track according to a set pattern, the detection beams received by the light emitting unit are more uniform, the state of the light emitting unit during detection beam scanning is acquired at the moment, the defect point of the display equipment is determined according to the state of the light emitting unit, the detection precision of the defect point of the display equipment is increased, and the error rate is reduced.

In order that the manner in which the above recited objects, features and advantages of the present application are obtained will become more readily apparent, a more particular description of the application briefly described above will be rendered by reference to the appended drawings.

Referring to fig. 1, fig. 1 is a flow chart of a method for detecting defects of a display device according to an embodiment of the application, wherein the display device includes a substrate and a light emitting unit disposed on the substrate, and the method includes:

and S100, transmitting a detection beam.

S101, controlling the detection beam to scan a plurality of luminous unit areas.

The light-emitting unit area comprises a single light-emitting unit or a plurality of light-emitting units arranged in an array.

S102, acquiring the state of the light emitting unit during detection beam scanning.

And S103, determining defect points of the display device based on the states of the light emitting units.

In particular, the type of the light emitting units is not specifically limited, the light emitting units can be a plurality of same light emitting units or a plurality of different light emitting units, in this embodiment, micro (μ) LEDs are taken as an example to describe the arrangement positions of the light emitting units, the light emitting units can be arranged in an array or according to a required pattern, it is required to describe that the light emitting units at least comprise a group of red, green and blue phosphor powder to form pixels, each pixel has three primary colors of red (R), green (G) and blue (B), the pixels in the light emitting units can be lightened when the detection beam scans to the position where the light emitting units are located, when the light emitting units are defective, the light emitting units cannot be lightened, or the light emitting brightness is too bright, or the light emitting brightness is too dark, and the like, and at this time, whether the light emitting units in the display device are defective can be detected according to the state of the light emitting units. Wherein, the detection beam irradiates the pixel to emit light with the set track continuously, so as to obtain the state of the light emitting unit during the scanning of the detection beam. In other embodiments, if the size of the detection beam can cover a larger range, the scanning can be performed by transmitting the beam at a fixed point location, and the scanning position is not required to be adjusted according to the set track, i.e. the fixed point scanning is performed according to the set pattern.

In step S100, the detection system emits the detection beam, which is not limited to the direction of the detection beam.

Alternatively, in another embodiment of the present application, the detection beam a is a single electron beam, the single electron beam covers a single light emitting unit area, and parameters of the single electron beam are adjustable.

Specifically, the detection beam may be a single electron beam, and the single electron beam may cover a light emitting unit area, where the light emitting unit area may include a single light emitting unit, or may include a plurality of light emitting units arranged in an array, that is, the single electron beam may cover a single light emitting unit or cover a light emitting unit of an array area, which is not limited specifically, and it should be noted that the single electron beam may determine parameters such as intensity, size, and direction according to the location and type of the light emitting unit. In addition, the detection beam may further include one detection beam or a plurality of detection beams, which are not particularly limited.

In step S101, the embodiment is illustrated by taking an array-arranged light-emitting unit as an example, referring to fig. 2, fig. 2 is a schematic diagram of an arrangement structure of light-emitting units provided by the embodiment of the present application, referring to fig. 3, fig. 3 is a schematic diagram of a detection beam scanning light-emitting unit provided by the embodiment of the present application, a detection beam a scans a plurality of light-emitting unit regions, a detection beam a may scan a single light-emitting unit 11 or a plurality of array-arranged light-emitting units 11, and the array-arranged light-emitting units 11 may include a2×2 array or a3×3 array, which is not limited specifically. The detection beam a does not specifically limit the set track during scanning, and the set track includes a preset clockwise track, a preset counterclockwise track, a preset serpentine track, a preset pattern track, and the like, and may be set as needed. The setting pattern of the detection beam a during scanning is not particularly limited, and may be set as needed. The detection beam a may be one beam or a plurality of beams. When a beam of detection beam a is used for detection, the beam of detection beam a scans the light emitting unit area according to a set track or a set pattern.

When the detection beams a are multiple, each detection beam a scans the light emitting unit area according to a set track or a set pattern, or each detection beam a scans a preset light emitting unit area, or part of the light emitting unit area can be scanned for part of the detection beams a, and the other part of the light emitting unit area can be scanned for the other part of the detection beams a, for example, when two detection beams a are adopted, one detection beam a scans part of the light emitting unit area and the other detection beam a scans the other light emitting unit area, or when multiple detection beams a are adopted, the first detection beam a scans the first light emitting unit area and then scans the second light emitting unit area, for example, when two detection beams a are adopted, the second detection beam a scans the second light emitting unit area and then scans the first light emitting unit area, so that the detection efficiency can be effectively improved, and the detection error can be reduced.

In step S102, the state of the light emitting unit 11 when the detection beam a is scanned may be the state in which the light emitting unit 11 is turned on after the detection beam a scans the light emitting unit area, the state of the light emitting unit 11 when the detection beam a is scanned is not particularly limited, or the state of the light emitting unit 11 representing a defect may be the state of the light emitting unit 11, and the mode of obtaining the state is not particularly limited. It should be noted that the lighting of the light emitting unit 11 is not necessarily a continuous process, and when the state of the light emitting unit 11 is obtained, the detection beam a may be continuously emitted to perform scanning, so as to obtain the state of the light emitting unit 11, or one may be lighted to obtain one, which is not particularly limited.

In step S103, after the state of the light emitting unit 11 is acquired, a defective point in the display device, that is, an abnormal light emitting unit 11 may be determined according to the state of the light emitting unit 11, for example, whether the light emitting unit 11 is defective may be determined according to the brightness state of the light emitting unit 11 scanned by the detection beam a, and the defective light emitting unit 11 includes a case where the light emitting unit 11 cannot be lighted, the brightness of the light emitting unit 11 is too bright, or the like.

The detection method for the defects of the display equipment does not need to adopt a detection probe, and the non-contact detection method reduces the damage to the light-emitting unit 11 and improves the detection precision. And because the detection beam a scans a plurality of light-emitting unit areas along a set track or a set pattern, the detection beam a received by the light-emitting units 11 can be more uniform, the state of the light-emitting units 11 during scanning of the detection beam a is acquired at this time, and the defect points of the display device are determined according to the state of the light-emitting units 11, so that the detection precision of the defect points of the display device can be increased, and the error rate is reduced.

Optionally, in another embodiment of the present application, referring to fig. 4, fig. 4 is a scanning schematic diagram of a first scanning manner provided by an embodiment of the present application, referring to fig. 5, fig. 5 is a scanning schematic diagram of a second scanning manner provided by an embodiment of the present application, referring to fig. 6, fig. 6 is a scanning schematic diagram of a preset direction provided by an embodiment of the present application as a scanning direction, referring to fig. 7, fig. 7 is a scanning schematic diagram of another preset direction provided by an embodiment of the present application as a scanning direction, and controlling a detection beam a to scan a plurality of light emitting unit areas includes:

And controlling the detection beam a to scan the plurality of light-emitting unit areas by adopting a first scanning mode and/or a second scanning mode and/or a third scanning mode.

The first scanning mode comprises scanning a plurality of light-emitting unit areas in a preset area A.

The second scanning mode comprises scanning a plurality of light-emitting unit areas at preset positions B.

The third scanning mode includes scanning the light-emitting unit areas with the preset direction L as the scanning direction.

Specifically, in the present embodiment, the detection beam a is taken as one beam, and the light emitting unit area includes a single light emitting unit 11 as an example, and when the light emitting unit 11 is detected, the detection beam a scans the light emitting unit 11 according to a required scanning manner. As shown in fig. 4, the first scanning manner may scan the light emitting units 11 in the preset area a, that is, the area where the defect may occur in the light emitting units 11 is divided in advance, the area is taken as the preset area a, and only the light emitting units 11 in the preset area a are scanned, so that the scanning time is saved, the scanning rate is increased, and the defective light emitting units 11 are rapidly determined.

As shown in fig. 5, the second scanning manner may scan the light emitting units 11 at the preset position point B, that is, for one or more light emitting units 11 known in advance, the positions of the light emitting units 11 are taken as the preset position point B, so that the light emitting units 11 at the preset position point B can be accurately scanned, and whether the light emitting units 11 at the preset position point B have defects can be accurately determined, so that defect detection becomes more accurate.

The third scanning manner may scan the light emitting units 11 with the preset direction L as a scanning direction, where the preset direction L is not limited specifically, and may be a row direction (as shown in fig. 7) or a column direction (as shown in fig. 6) of the plurality of light emitting units 11, and the preset direction L may be other directions, and may be set as needed, so that when detecting along the preset direction L, the defective light emitting units 11 may be scanned more quickly and accurately. The preset direction L may be changed according to the position of the light emitting unit 11 to be detected, and the preset direction L may further be scanned by using a set track, for example, in the row direction, the preset track may also be a serpentine track.

It should be noted that, in a frame, the light emitting units 11 may be scanned by a first scanning method, a second scanning method, or a third scanning method, or the light emitting units 11 may be scanned by at least two scanning methods of the first scanning method, the second scanning method, and the third scanning method, for example, in a frame, the light emitting units 11 with defects may be scanned in the first scanning method, the positions of the light emitting units 11 may be set as the preset position points B, the light emitting units 11 with defects detected in the first scanning method may be scanned again by the second scanning method, or in a frame, the light emitting units 11 with defects may be scanned in the third scanning method, the preset direction L may be determined first, and then all the light emitting units 11 may be scanned in the preset direction L.

The scanning method is not particularly limited in one frame, and any one of the first scanning method, the second scanning method, and the third scanning method may be used, or at least two of the first scanning method, the second scanning method, and the third scanning method may be combined, or three different methods may be used for combined scanning.

When the detection beam a is adopted for detection, the detection beam a is a beam, and the detection of the light emitting units 11 is single, for example, a single light emitting unit 11 or a single light emitting unit 11 in an array area, the detection beam a scans and detects a plurality of light emitting unit areas, and the detection beam a received by each light emitting unit area is the same, so that the scanning mode can greatly improve the detection precision and reduce the false detection rate.

Optionally, in another embodiment of the present application, any frame for scanning the detection image includes a plurality of subframes, and the scanning mode of the detection beam a in any subframe is a first scanning mode, a second scanning mode, or a third scanning mode.

Specifically, in a frame, four subframes are taken as an example for illustration, and the scanning manner of each subframe in the four subframes may be different. The scanning mode can improve the scanning accuracy and reduce the false detection rate. Of course, the scanning manner of any subframe may be the same, that is, the scanning manner in each subframe is the same in all of the four subframes, for example, the first scanning manner, and is not limited specifically. Note that, in the third scanning manner, different scanning manners may be distinguished according to the preset direction L.

When the detection beams a are multiple, each detection beam a may detect different light emitting unit areas according to a set pattern in different subframes in one frame, or each detection beam a may scan and detect multiple light emitting unit areas along a set track, which is not limited specifically.

In the detection method, a repair process can be further included after the detection, namely, firstly, scanning of defects or abnormal points is completed on one or more subframes of one frame of image, and secondly, defect or abnormal points are confirmed and repaired on one or more subsequent subframes.

Optionally, in another embodiment of the present application, any frame of the scanned detection image includes a plurality of subframes, and the controlling the detection beam to scan a plurality of the light emitting unit areas further includes:

in the first subframe, the detection beam a is controlled to scan the light emitting unit area in the preset area A.

In the second subframe, the detection beam a is controlled to scan a light-emitting unit area of a preset position point B, wherein the preset position point B is a defect point which is initially positioned in the first subframe.

And in the third subframe, controlling the repairing beam to repair the light-emitting unit area of the defect point.

In the fourth subframe, the detection beam a is controlled to scan the light-emitting unit area in the preset area A to finish rechecking.

Specifically, in this embodiment, the detection beam a is taken as one beam, the light emitting unit area includes a single light emitting unit 11 as an example, and in one frame, a plurality of subframes may be included, and four subframes are taken as an example for illustration, in the first subframe, the detection beam a is controlled to scan the light emitting units 11 in a preset area a, where the preset area a may include a part of the light emitting units 11 on the display panel, or may include all the light emitting units 11 on the display panel, without specific limitation, and scan is performed in the preset area a, and at this time, a defect point of the display device in the preset area a may be obtained. Then in the second subframe, the defect points obtained in the first subframe are adopted as preset position points B, the detection beam a is controlled to scan the light emitting units 11 of the preset position points B, at this time, whether the light emitting units 11 of the defect points are abnormal can be further determined, and in the third subframe, the repair beam is adopted to repair the defective light emitting units 11 for the defective light emitting units 11, and it is noted that the repair beam can be a laser beam or the like, and is not limited specifically. After the repair is completed, in the fourth subframe, the detection beam a is controlled to scan the light emitting units 11 in the preset area a to complete the recheck.

Note that, the scanning of the light emitting unit 11 in the preset area a includes scanning along a set track or a set pattern, and scanning modes may be different in different subframes, where in the third scanning mode, when the light emitting unit area in the preset area a is scanned, the first direction and the second direction may be respectively used as a scanning direction in different subframes, and the first direction and the second direction are disposed to intersect, for example, the first direction and the second direction are disposed perpendicularly, and of course, the first direction and the second direction are not limited.

Of course, in other embodiments, the scanning manner on different subframes may be the same, and the scanning determination is performed through a plurality of subframes, so as to accurately locate the defect point and further repair the defect point. The detection method can repair and recheck the defective point in time when detecting the defective point.

Alternatively, in another embodiment of the present application, acquiring the state of the light emitting unit 11 when the detection beam a is scanned includes:

and acquiring a scanning detection image of the light-emitting unit area during scanning of the detection beam a.

Based on the scanning detection image, the state of the light emitting unit 11 is acquired.

Specifically, when the detection beam a scans the light emitting unit 11, the state of the light emitting unit 11 needs to be acquired, in this embodiment, taking an image obtained after the light emitting unit 11 is turned on as an example, the abnormal light emitting unit 11 after the detection beam a scans may be distinguished from other normal light emitting units 11, or may not be turned on, or may emit light too much or emit light too dark, at this time, the scan detection image of the light emitting unit 11 may highlight the light emitting unit 11 that is not turned on, or may be too bright or too dark, and the state of the light emitting unit 11 may be acquired according to the scan detection image, thereby detecting the defective light emitting unit 11. Note that, the state acquisition of the light emitting unit 11 is not particularly limited.

Based on the above detection method, referring to fig. 8, fig. 8 is a schematic diagram of a detection system provided by an embodiment of the present application, and the present application further provides a display device defect detection system, where the above detection method is applied to the detection system, and the detection system includes:

And the transmitting module 01 is used for transmitting the detection beam a.

The scanning module 02 is configured to control the detection beam a to scan a plurality of light emitting unit areas, where the light emitting unit areas include a single light emitting unit 11 or a plurality of light emitting units 11 arranged in an array.

An acquisition module 03 for acquiring a state of the light emitting unit 11 when the detection beam a is scanned;

a determining module 04 for determining a defect point of the display device based on the state of the light emitting unit 11.

Specifically, the emission module 01 is only configured to emit a detection beam a, where the detection beam a is a single electron beam, the detection beam may be one beam or may be multiple beams, and not specifically limited, the scanning module 02 is configured to control the detection beam a to scan a plurality of light emitting unit areas along a set track or perform fixed-point scanning according to a set pattern, because the light emitting unit areas include a single light emitting unit 11 or a plurality of light emitting units 11 arranged in an array, the light emitting units 11 in the light emitting unit areas may be simultaneously lit up, after the scanning module 02 scans the plurality of light emitting unit areas, the light emitting units 11 in different light emitting unit areas may be simultaneously or sequentially lit up, the defective light emitting unit 11 may not be lit up, or light emitting too bright or light too dark, and the acquisition module 03 acquires a state of the light emitting unit 11 when the detection beam a scans, for example, the acquisition module 03 may acquire a scanned detection image of the light emitting unit 11 when the detection beam a scans, the determination module 04 may acquire the state of the light emitting unit 11 by scanning the detection image, and determine the defective light emitting unit 11 according to the state of the light emitting unit 11.

The detection system adopts the detection method to detect, the detection system transmits the detection beam a through the transmitting module 01, scans the plurality of light emitting units 11 through the scanning module 02, then acquires the states of the light emitting units 11 during scanning through the acquisition module 03, and can determine the defective light emitting units 11 according to the states of the light emitting units 11.

Optionally, in another embodiment of the present application, the detection system further includes:

and the repair module is used for transmitting repair beams and scanning the light-emitting unit areas through the repair beams so as to repair the light-emitting unit areas of the defect points.

Specifically, the repairing module may emit a repairing beam to the light emitting units 11 in the light emitting unit area of the defect point when the defect point is detected, where the repairing beam may be a laser beam, and the repairing beam scans and repairs the light emitting units of the defect point, where the repairing principle is that each light emitting unit 11 includes a group of normal light emitting control units and at least one group of standby light emitting control units, when the light emitting units 11 of the defect point are detected, it is indicated that the group of light emitting control units are defective or abnormal, and the transmitting repairing beam cuts off the connection of the group of light emitting control units and starts another group of standby light emitting control units, so as to realize normal display.

In some embodiments, if the light emitting unit 11 is damaged and on-line repair cannot be completed, the defect position point may be recorded, and then the defect point is stripped and replaced by a laser or the like.

It should be noted that the repair module may repair after the whole detection is completed, or repair while detecting, for example, in one frame, the first subframe and the second subframe determine the light emitting unit 11 of the defect point, and the third subframe repair, which is not limited specifically.

Based on the display device defect detection method, the application also provides a display device defect detection device, referring to fig. 9, fig. 9 is a schematic structural diagram of the display device defect detection device provided by the embodiment of the application, where the detection device includes:

and the electron beam emitting device 12 is used for emitting a detection beam a and scanning a plurality of light emitting unit areas through the detection beam a, wherein the light emitting unit areas comprise a single light emitting unit 11 or a plurality of light emitting units 11 arranged in an array.

Acquisition means 13 for acquiring the state of the light emitting unit 11 at the time of scanning the detection beam a.

Control means 14 for determining defective points of the display device based on the state of the light emitting unit 11.

The scanning mode of the detection beam a comprises scanning along a set track or fixed-point scanning according to a set pattern.

Specifically, the detection device is placed under vacuum condition during detection, for example, the light-emitting unit 11 to be detected and the electron beam generating device 12 can be placed in the vacuum cavity 15, and the detection beam a is emitted to scan and detect the light-emitting unit areas. In this embodiment, the light emitting units 11 may be arranged in an array on the substrate 16, or may be arranged in a predetermined pattern. It should be noted that the control device 14 further includes a hardware acceleration controller for accelerating the algorithm.

The electron beam emitting device 12 is configured to emit a detection beam a, and is located at one side of the light emitting unit 11, and the electron beam emitting device 12 may emit one detection beam a or multiple detection beams a, where the detection beam a is a single electron beam.

In this embodiment, taking the detection beam a as one beam, the light emitting unit area includes a single light emitting unit 11 as an example, and the electron beam emitting device 12 is located in the vacuum cavity 15 and on a side of the light emitting unit 11 away from the substrate 16, so that the detection beam a emitted by the electron beam emitting device 12 can reach the light emitting unit 11, and the electron beam emitting device 12 emits one detection beam a and scans the plurality of light emitting units 11 by using the detection beam a, where the scanning manner may include a first scanning manner, a second scanning manner, a third scanning manner, and the like, and is not limited specifically. The electron beam emitting device 12 is connected to the control device 14.

Optionally, referring to fig. 10, fig. 10 is a schematic structural diagram of an electron beam emitting device according to an embodiment of the present application, in another embodiment of the present application, the electron beam emitting device 12 includes:

An electron beam emitting module 17 for emitting a detection beam a.

The emission control module 18 is configured to control the emission parameters and the emission positions of the detection beam a, so as to realize scanning of the light emitting unit area.

Specifically, in this embodiment, the electron beam emitting module 17 is only used for emitting the detection beam a, the detection beam a emitted by the electron beam emitting module 17 is a single electron beam, the positional relationship between the electron beam emitting module 17 and the light emitting unit 11 and the emission outlet are not specifically limited, for example, the electron beam emitting module 17 may also be a position in a dashed line in fig. 9, and when the detection beam a is emitted, the emission control module 18 changes the emission position of the detection beam a to realize the scanning of the plurality of light emitting units 11.

Alternatively, as shown in FIG. 10, in another embodiment of the present application, the emission control module 18 includes:

An electron beam deflection unit 19, disposed at the output end of the electron beam emitting module 17, is used for deflecting the detection beam a to adjust the scanning direction and the scanning position.

Specifically, the electron beam deflecting unit 19 is configured to deflect the detection beam a, for example, when the detection beam a scans from the first light emitting unit 11 to the second light emitting unit 11, the electron beam deflecting unit 19 deflects the detection beam a, the scanning direction is turned to the position of the second light emitting unit 11, and the electron beam deflecting unit 19 is further configured to accurately position and obtain the position information of the actual light emitting unit 11, so as to control the deflection direction of the detection beam a to scan the specified precise position.

Optionally, as shown in fig. 10, in another embodiment of the present application, the emission control module 18 further includes:

an electron beam positioning unit 20, disposed at the output end of the electron beam deflection unit 19, for precisely positioning the scanning position of the detection beam a.

Specifically, the electron beam positioning unit 20 can accurately position the scanning position of the detection beam a according to the position of the light emitting unit 11, that is, when the second light emitting unit 11 needs to be scanned, the position of the second light emitting unit 11 is first confirmed, and then the electron beam positioning unit 20 is used to determine that the scanning position of the detection beam a is the position of the second light emitting unit 11, so that the detection accuracy can be increased.

In addition, as shown in fig. 10, the emission control module 18 further includes a parameter control unit 21 disposed at an output end of the electron beam emission module 17, for adjusting parameters of the detection beam a.

Specifically, when the light emitting unit 11 to be detected changes, the parameter control unit 21 may control the size and intensity parameter of the detection beam a according to the parameter of the light emitting unit 11, so that the parameter of the detection beam a is adapted to the parameter of the light emitting unit 11, so as to perform accurate detection, and in addition, the control device 14 may also control the parameter control unit 21 to complete the control of the size of the detection beam a under the single/single row/single column and/or multiple/multiple rows/multiple columns according to the actual size of the light emitting unit and the scanning track of the detection beam, and the control accuracy is within the actual controllable range of the control device 14. The parameter control unit 21 may also control the intensity of the detection beam a according to the size of the vacuum chamber formed by the vacuum chamber 15 and the distance to the light emitting unit array, and complete the detection of the light emitting unit 11 without damaging the light emitting unit 11.

It should be noted that, in the present embodiment, the positions of the electron beam deflection unit 19, the electron beam positioning unit 20 and the parameter control unit 21 in the emission control module 18 may be that the parameter control unit 21 is located at a side of the electron beam emission module 17, the electron beam deflection unit 19 is located at a side of the parameter control unit 21 away from the electron beam emission module 17, and the electron beam positioning unit 20 is located at a side of the electron beam deflection unit 19 away from the electron beam emission module 17, but the positions of the electron beam deflection unit 19, the electron beam positioning unit 20 and the parameter control unit 21 in the emission control module 18 are not particularly limited, and the present embodiment is merely illustrative.

Furthermore, the emission control module 18 may further include:

The first control unit is respectively connected with the electron beam deflection unit 19, the electron beam positioning unit 20 and the parameter control unit 21 and is used for controlling the electron beam deflection unit 19, the electron beam positioning unit 20 and the parameter control unit 21, and the first control unit is also used for completing the transmission of detection results and data and the analysis and the display of detection items. The first control unit may be replaced by the control device 14, and may be provided when necessary, and this embodiment is merely exemplified.

The detection device adopts the detection beam a to detect the display equipment, and the scanning detection of the detection beam a is non-contact detection, so that the problem that the light-emitting unit 11 is damaged due to the contact of the probe during the detection of the display equipment is avoided, and the false detection rate is further reduced. In addition, the detection beam a in the detection device is a single electron beam, and the detection beam a received by the light-emitting unit 11 is more uniform during scanning, so that the detection precision is increased.

Alternatively, in another embodiment of the present application, the acquisition means 13 includes image acquisition means for acquiring a scanning detection image of the light emitting unit 11.

Specifically, the acquiring device 13 may be an image acquiring device, which may be an industrial camera, where after the scanning of the detection beam a by the light emitting unit 11, the defective light emitting unit 11 may emit no light, or emits too bright light or too dark light, and the defective light emitting unit 11 may be photographed by the image acquiring device, and at this time, the state of the defective light emitting unit 11 may be seen in the photographed scanning detection image.

Referring to fig. 11, fig. 11 is a schematic structural diagram of an image capturing device according to the present application, where the image capturing device includes:

an image acquisition unit 22, the image acquisition unit 22 being configured to acquire a scanning detection image of the light emitting unit 11.

An image processing unit 23, the image processing unit 23 for processing the scan detection image.

And an image output unit 24, the image output unit 24 being configured to output the processed scan detection image.

Specifically, the image acquisition unit 22 may include, but is not limited to, a CCD camera, an image acquisition auxiliary device such as a cradle, or the like, and acquires a scanning detection image of the light emitting unit 11 by photographing the light emitting unit 11. The image processing unit 23 may acquire the scan detection image by the image acquisition unit 22 and process the scan detection image, including but not limited to performing preliminary correction on the scan detection image, generating a processed scan detection image, and delivering it to the image output unit 24, etc. The image output unit 24 includes, but is not limited to, a scan detection image, a luminance of the scan detection image, a chromaticity of the scan detection image, and the like, generation of a sub-pixel adjustment control matrix, sub-pixel control, acquisition and generation of an initial scan detection image or a precise positioning image, and the like.

Further, in another embodiment of the present application, as shown in FIG. 11, the image acquisition apparatus further includes an image detection control unit 25 and an image acquisition control unit 26. The image detection control unit 25 is used for controlling the start and stop of the image acquisition control unit 26, and the image acquisition control unit 26 is used for controlling the acquisition device 13.

Specifically, the image detection control unit 25 is connected to the control device 14, and is configured to receive or feed back various signaling, and perform corresponding operations, for example, perform a command for acquiring a scanning detection image output by the control device 14, control the image acquisition control unit 26 to start the acquisition device 13, and the image acquisition control unit 26 is configured to receive a control command, and turn on or off the acquisition device 13 according to a timing sequence of the control command.

Further, in another embodiment of the present application, as shown in FIG. 11, the image acquisition apparatus further includes an auxiliary illumination unit 27, the auxiliary illumination unit 27 being for providing an illumination environment when the image acquisition unit acquires the scan detection image.

Specifically, when acquiring the scan detection image, if the light of the acquisition environment is too dark, the acquired scan detection image may not be clear, and the auxiliary lighting unit 27 may be turned on when the light of the acquisition environment is too dark to provide an illumination environment, so that the acquisition of the scan detection image is clearer. In addition, different detection results can be obtained by turning on or off the auxiliary lighting unit 27 at different detection procedures or protocol stages.

Furthermore, in another embodiment of the present application, as shown in FIG. 11, the image acquisition apparatus further includes a data acquisition unit 28, and the data acquisition unit 28 is configured to buffer and process the scan detection image.

Specifically, the data acquisition unit 28 may rapidly store the data of the scan detection image acquired by the image acquisition unit 22, may compress and transmit the image data at a high speed, and/or may further process the post-processing detection data by the image processing unit 23, and/or may further process the scan detection image output by the image output unit 24. The data acquisition unit 28 is provided to reduce the processing pressure of the subsequent stage on the acquired scanning detection image data while effectively reducing the total amount of transmission image data.

In addition, in another embodiment of the present application, the image acquisition apparatus further includes a hardware accelerator controller (not shown) for acquiring the spatial coordinates of the detection beam. In the embodiment of the present application, the image acquisition apparatus is described as an example, but the present application is not limited to this.

Optionally, in another embodiment of the present application, referring to fig. 12, fig. 12 is a schematic structural diagram of another display device defect detecting apparatus provided in the embodiment of the present application, where the detecting apparatus further includes:

repair means 29 for emitting a repair beam to repair the defective lighting unit 11.

Specifically, as shown in fig. 12, the repairing device 29 may be disposed in the vacuum chamber 15 and is adjacent to the electron beam emitting device 12, and the repairing device 29 is configured to emit a repairing beam, where the repairing beam may include, but is not limited to, a laser beam, and after the detecting beam a completes scanning detection on the light emitting unit 11, the position information of the defective light emitting unit 11 is sent to the repairing device 29, and the repairing device 29 emits a repairing beam, where the repairing beam repairs the light emitting unit 11 having the defect. The repairing device 29 may be disposed outside the vacuum chamber 15, and when disposed outside the vacuum chamber 15, is located at a side close to the electron beam emitting device 12, and at this time, the sidewall of the vacuum chamber 15 needs to be made of a transparent material so that the repairing beam is irradiated to the light emitting unit 11, and it should be noted that the repairing device 29 may also perform a clean inspection or the like. In addition, as shown in fig. 12, when the repairing device 29 is located in the vacuum chamber 15, the obtaining device 13 may also be located inside the vacuum chamber 15. The positions of the acquisition device 13 and the repair device 29 are not particularly limited.

Optionally, referring to fig. 13, fig. 13 is a schematic structural diagram of another display device defect detecting apparatus according to an embodiment of the present application, where the detecting apparatus further includes:

an adjusting device 30 for adjusting the position of the acquisition device 13 to adapt the scanning position of the electron beam emitting device 12.

In particular, the adjusting device 30 may be a guide rail located at one side of the vacuum chamber 15, and the adjusting device 30 is connected to the acquiring device 13, for moving and adjusting the position of the acquiring device 13. In this embodiment, the adjusting device 30 may be located outside the vacuum cavity 15 and located on a side of the light emitting unit 11 away from the electron beam emitting device 12, where the adjusting device 30 is connected to the acquiring device 13, and is used for moving the acquiring device 13 to adapt to the scanning position of the electron beam emitting device 12, for example, when the detecting beam a scans the light emitting unit 11 at the first end of the light emitting unit 11 arranged in array, the acquiring device 13 moves to a position opposite to the first end along the adjusting device 30, and when the detecting beam a scans the light emitting unit 11 at the second end of the light emitting unit 11 arranged in array, the acquiring device 13 moves to a position opposite to the second end along the adjusting device 30, so as to ensure the synchronicity of the status image acquisition of the detecting beam a and the light emitting unit 11, so that the accuracy of acquiring the scanned detecting image by the acquiring device 13 can be improved.

Optionally, referring to fig. 14, fig. 14 is a schematic structural diagram of another display device defect detecting apparatus provided by an embodiment of the present application, referring to fig. 15, fig. 15 is a schematic structural diagram of another display device defect detecting apparatus provided by an embodiment of the present application, where the detecting apparatus further includes:

wavelength filtering means 31, located between the acquisition means 13 and the light emitting unit 11, for filtering the light of different wavelengths emitted by the light emitting unit 11.

Specifically, as shown in fig. 14, the wavelength filtering device 31 may be located outside the vacuum chamber 15 and between the light emitting unit 11 and the obtaining device 13, where the obtaining device 13 is located outside the vacuum chamber 15, and the substrate 16 on which the light emitting unit 11 is placed may be a transparent substrate, as shown in fig. 15, the wavelength filtering device 31 may be located inside the vacuum chamber 15 and between the light emitting unit 11 and the obtaining device 13, where the obtaining device 13 may be located inside the vacuum chamber 15, and the substrate 16 on which the light emitting unit 11 is placed may be an opaque substrate. After the detection beam a scans the light emitting unit 11, the wavelength range of the light emitted from the light emitting unit 11 is large, and if only the defect of the light emitted from the light emitting unit 11 in a certain wavelength range is detected, the wavelength filtering device 31 is provided, and the wavelength filtering device 31 can detect whether the defect of the light emitted from the light emitting unit 11 in the wavelength range is detected only by the light in the wavelength range.

Optionally, in another embodiment of the present application, referring to fig. 16, fig. 16 is a schematic structural diagram of another display device defect detecting apparatus provided in an embodiment of the present application, where the detecting apparatus further includes:

and a device interface 32, wherein one end of the device interface 32 is connected with the control device 14, and the other end is connected with an external device, and is used for receiving detection data of the external device and/or feeding back a detection result to the external device.

Specifically, the device interface 32 is configured to connect an external device and a detecting device, one end of the device interface 32 is connected to the control device 14, the other end is connected to the external device, the external device may perform secondary detection or detection confirmation on the light emitting unit 11, for example, the control device 14 may transmit a detection result to the external device through the device interface 32, perform secondary analysis or detection on the detection result through the external device, including analysis or detection of a defect of the light emitting unit 11, repair result of the light emitting unit 11, and the like, and in addition, the external device may perform other detection on the light emitting unit 11 and transmit detection data to the control device 14 through the device interface 32, to assist the external device to perform secondary detection and the like, where the device interface 32 is connected to the external device by using a bidirectional control bus. The external device is not particularly limited.

The repairing device 29, the adjusting device 30, the wavelength filtering device 31 and the device interface 32 in the detecting device may be selectively set, and are not limited specifically.

Optionally, in another embodiment of the present application, the control device 14 further includes:

And a central controller 33 for controlling the starting and running of the whole detection device.

The signal generator 34 is configured to generate a control signal according to the central controller 33.

Specifically, the central controller 33 is configured to control all peripheral devices on the detection apparatus according to the embodiment of the present application, including but not limited to self-detection of the detection apparatus, determination and implementation of AI-type autonomous system fault detection and repair processes and/or procedures, determination of detection parameters and/or detection items, AI-type autonomous determination of a required test process and/or procedure, etc., and it should be noted that the central controller 33 includes but not limited to a computer, an industrial personal computer, an independent high-speed storage device, such as various RAMs, SSDs, etc., an independent hardware accelerator card, a data acquisition unit, etc. The scanning mode of the detection beam a and the flexible use of the parameters of the acquisition device 13 controlled by the central controller 33 can accelerate the detection speed of the detection device of the application.

The signal generator 34 includes, but is not limited to, a hybrid signal/pattern generator for generating various types of signals and patterns for use in detection method applications, including but not limited to, generation of scan signals and/or patterns for the detection beam a, match signals and/or patterns for the electron beam emitting device 12, detection parameters and/or detection item signals and/or patterns, walk-through signals and/or patterns for the adjustment device 30, repair signals and/or patterns for the repair device 29, secondary detection/detection validation of the instrument interface 32, and the like.

As shown in fig. 16, in the embodiment of the present application, the detecting device includes a plurality of control buses, which will be described below. The first control bus 100 includes a forward control line 100a and a feedback line 100b, and connects the central controller 33 and the electron beam emitting device 12, and is used for the central controller 33 to send control signals and/or signaling to the electron beam emitting device 12 and receive feedback information from the electron beam emitting device 12. The second control bus 101 is connected with the central controller 33 and the repairing device 29, and is used for controlling the repairing device 29 by the central controller 33 to realize real-time repairing after detection. The third control bus 102 is a bidirectional control bus, and is used for connecting the signal generator 34 and the electron beam emitting device 12, and is used for the electron beam emitting device 12 to receive the designated signal/pattern to complete the emission of the detection beam, and meanwhile, the electron beam emitting device 12 feeds back the size and/or intensity/precise positioning information of the detection beam to the signal generator 34 to realize the precise emission of the detection beam. A fourth control bus 103, connecting the electron beam emitting device 12 and the repairing device 29, for repairing the size and/or intensity/precise positioning of the repairing beam of the repairing device 29, and precisely controlling the generation of repairing signals/patterns to achieve the repairing of the light emitting unit. The fifth control bus 104 connects the signal generator 34 and the prosthetic device 29 for precisely controlling and generating the size and/or intensity/precise positioning of the prosthetic beam for the prosthetic device, as well as precisely controlled prosthetic signals/patterns. The sixth control bus 105 connects the central controller 33 with the acquisition device 13, the adjustment device 30, and the wavelength filter device 31, and is used for position control, image acquisition, and timing control on the acquisition device 13 when the central controller 33 is precisely positioned, but is not limited thereto. Seventh control bus 106 connects electron beam emitting device 12 and acquiring device 13, and is used for confirming accurate positioning of position information of detecting beam and acquiring device 13, mapping of position information, and the like, but is not limited thereto. The eighth control bus 107, which connects the device interface 32 and the central controller 33, is a bidirectional control bus, and is used for the central controller 33 to receive data detected by other external devices, and according to the detection result of the embodiment of the present application, feed back the detection result and the light emitting unit repair result to the external detection device, and assist the external device in performing operations such as secondary detection, but is not limited thereto. The ninth control bus 108 may implement bidirectional control for performing secondary verification, i.e. reinspection, of the repair and precise positioning of the repair device 29.

Further, as shown in fig. 15, the detection device further includes:

And a vacuum pump 35 for performing a vacuum pumping process on the vacuum chamber 15.

A first opening in the vacuum chamber 15, and a cover plate 36 connected to the vacuum chamber 15, the cover plate 36 being adapted to cover the first opening.

Specifically, in the embodiment of the present application, the vacuum cavity 15 is provided with the cover plate 36, the cover plate 36 is used for covering the first opening on the vacuum cavity 15, the cover plate 36 can be opened to place the display device to be detected in the vacuum cavity 15, in addition, the material of the cover plate 36 can also be a transparent material, and when the orthographic projection of the light emitting unit 11 to be detected is located on the cover plate 36, the cover plate 36 can also be used as an observation window to ensure the observation and detection of the acquisition device 13.

The detection device is further provided with a vacuum pump 35, and the vacuum pump 35 is used for vacuumizing the vacuum cavity 15, so that the electron beam emitting device 12 in the vacuum cavity 15 can emit the detection beam a, and the vacuumizing vacuum degree can be less than or equal to 10 ^-5 Torr. The central controller 33 monitors the vacuum degree and/or the vacuum holding time of the detecting device in real time, if the vacuum degree does not reach the actual requirement of the detecting parameter and/or the detecting item, the central controller 33 stops the normal working state of all the peripheral devices, waits for the restoration of the vacuum degree to avoid the damage and/or the damage of the light emitting unit and/or the devices on the system, and if the vacuum holding time does not reach the preset threshold value, the central controller 33 needs to feed back the maintenance information on the vacuum pump and/or the vacuum system.

Based on the detection device in the embodiment of the application, a defect detection method of the display device is further described.

When the detection device is used for detection, the cover plate 36 is opened to place the display equipment to be detected in the vacuum cavity 15, the display equipment comprises the substrate 16 and the light emitting units 11 positioned on the substrate 16, the light emitting units 11 can be arranged in an array, as shown in fig. 15, wherein the light emitting units 11 can be Micro-LEDs, the electron beam emitting device 12 is positioned on one side of the light emitting units 11 away from the substrate 16 so as to emit detection beams a to the light emitting units 11, and then the cover plate 36 is closed to seal the vacuum cavity 15. After the light emitting unit 11 is placed, it is confirmed that the central controller 33 on the control device 14 is connected to the peripheral devices on all the detecting devices, and the acquisition device 13 is connected to the peripheral devices on all the detecting devices. Wherein the central controller 33 is used for performing control.

And S1, performing self-checking on the detection device.

Step S2, controlling the electron beam emitting device 12 to emit the detection beam a, and controlling the detection beam a to scan the light emitting unit area along the set track or according to the set pattern.

Step S3, the control acquisition means 13 acquires the state of the light emitting unit 11.

Step S4 of determining defective points of the display device based on the state of the light emitting unit 11.

Specifically, in step S1, performing self-checking on the detection device to enable the detection device to operate normally includes:

Step S1001, the central controller 33 completes the self-inspection of the display device defect detecting device according to the preset procedure/flow and is in a working preparation state, if the self-inspection fails, step S1002 is performed, otherwise step S1003 is performed.

Step S1002, the central controller 33 performs AI-type autonomous system fault detection and repair procedure/procedure determination and performs the procedure/procedure, and returns to step S1.

In step S1003, the central controller 33 determines the detection parameters and/or detection items, and determines the actual detection procedure/procedure, and the peripheral devices to be used.

In step S1004, the central controller 33 controls the vacuum pump 35 to vacuumize the vacuum cavity 15 to reach the vacuum degree, if the vacuum degree does not reach the actual requirement of the detection parameter and/or the detection item, step S1005 is performed, otherwise, step S1006 is performed.

In step S1005, the central controller 33 stops the normal operation of the detecting device, waits for the recovery of the vacuum degree, and returns to step S1004.

In step S1006, the central controller 33 controls the preparation and operation timing of all the peripheral devices to be used to complete the detection parameters and/or the detection parameters of the detection items.

Step S1007, the obtaining device 13 completes the self-checking of the display device testing device according to the preset procedure/flow and proceeds to the working preparation state, if the self-checking fails, the process proceeds to step S1008, otherwise, the process proceeds to step S1009.

Step S1008 the image detection control unit 25 in the acquisition device 13 performs AI-type autonomous system fault detection and repair procedure/procedure determination and performs the procedure/procedure, returning to execution of step S1007.

After the self-checking is completed, the light emitting unit is detected, that is, step 2, step 3 and step 4 are executed, including:

In step S1009, the central controller 33 determines the actual position of the light emitting unit, and then controls the coordinates of the electron beam emitting device 12 to perform accurate alignment with the coordinates of the light emitting unit.

In step S1010, the electron beam emitting device 12 is controlled to emit the detection beam a, and the detection beam a is controlled to scan the light emitting unit.

The central controller 33 determines the actual position of the light emitting unit, which can be determined according to the electron beam positioning unit 20 in the obtaining device 13, but is not limited to, the electron beam emitting module 17 emits the detection beam a, the first control unit controls the parameter control unit 21 to determine the size and intensity of the detection beam a according to the type of the light emitting unit, controls the electron beam deflection unit 19 to adjust the scanning direction of the detection beam a so that the detection beam a can be scanned, and the electron beam positioning unit 20 determines the scanning position of the detection beam a.

The acquisition of the scanning detection image by the acquisition device 13 is performed simultaneously with the scanning, and the method comprises the following steps:

in step S1011, the image detection control unit 25 acquires preparation and operation timings of the detection parameters and/or the detection parameters of the detection items.

In step S1012, the image detection control unit 25 initializes a preset station detection procedure/flow detection station.

Step S1013, the image detection control unit 25 enables the image acquisition control unit 26 according to the acquired operation timing, and if the auxiliary illumination unit 27 needs to be enabled, proceeds to step S1014, otherwise proceeds to step S1015.

In step S1014, the image acquisition control unit 26 activates the auxiliary illumination unit 27.

In step S1015, the image acquisition control unit 26 turns on the image acquisition unit 22 according to the acquired detection parameters and/or the detection parameters of the detection items and the operation timing.

Step S1016 the image processing unit 23 acquires image data of the scanning detection image of the micro light emitting unit, if the acquisition device 13 enables the image data preprocessing procedure/flow, step S1017 is performed, otherwise step S1018 is performed.

In step S1017, the image acquisition unit 22 enables the data acquisition unit 28, and the image acquisition unit 22 acquires a plurality of scan detection images, so that the image data of the scan detection image buffered before is read while the image data of the current scan detection image is buffered, and analysis processing is performed.

Step S1018 the image acquisition unit 22 transmits the image data of the scan detection image to the image processing unit 23, and if the acquisition device 13 enables the image data preprocessing procedure/flow, step S1019 is performed, otherwise step S1020 is performed.

In step S1019, the image acquisition unit 22 enables the data acquisition unit 28, caches the image data of the scan detection image processed by the image processing unit 23, and reads the image data of the scan detection image cached before, and performs analysis processing.

Step S1020 the image processing unit 23 sends the image data of the processed scan detection image to the image output unit 24, and if the acquisition device 13 enables the image data preprocessing procedure/flow, step S1021 is performed, otherwise step S1022 is performed.

In step S1021, the image output unit 24 enables the data acquisition unit 28, buffers the image data, and reads the image data of the scan detection image buffered before, and performs analysis processing.

In step S1022, the image output unit 24 outputs the image data of the effective scan detection image acquired by the acquisition device.

In step S1023, the image acquisition control unit 26 stops the acquisition device 13, and completes the acquisition of the scanning detection image of the light emitting unit 11.

At this time, the image data of the scanning detection image is the state of the light emitting unit 11 at the time of scanning.

Step S1024 the central controller 33 determines a defective point of the display device according to the state of the light emitting unit.

The detection result obtained by the central controller 33 is the defective light emitting unit 11, and after the detection result is obtained, the position of the defective light emitting unit is transmitted to the repairing device 29, and the repairing device 29 repairs the emitted repairing beam according to the positions of the defective light emitting units.

For the above detection process, after completing the above steps, the central controller 33 may further include receiving the detection parameters and/or the detection items and/or the detection results, and if the detection is abnormal, the central controller 33 uses the fault detection procedure and/or procedure of the AI-based detection parameters and/or the detection items and/or the detection results, including controlling the vacuum pump 35 and/or the acquisition device 13 and/or the electron beam emitting device 12 to dynamically adjust the vacuum degree, the shutter speed of the camera, the beam scanning mode, and so on to generate new detection embodiments for re-detection. Otherwise, the detection parameters and/or detection items and/or detection results are detected, and all the AI-type autonomously determined various processes and/or procedures used in the detection are classified to establish new test cases so as to facilitate the use of subsequent detection.

The detection device in the embodiment of the application can be suitable for various types of light-emitting units 11 and arrangement modes, has higher adaptability, can flexibly configure the electron beam emitting device 12, can adapt to detection of the light-emitting units 11 with different types, surface shapes and patterns, can flexibly control the detection beam a by the electron beam emitting device 12, can realize detection (items) with different purposes and types, and accurate positioning, detection, repair and the like of the light-emitting units (arrays), and remarkably improves the detection efficiency and detection precision.

Claims

1. A display device defect detection method, wherein the display device comprises a substrate and a light emitting unit positioned on the substrate, the detection method comprising:

Transmitting a detection beam;

Acquiring position information of a light-emitting unit area and accurately positioning a scanning position of the detection beam, wherein the light-emitting unit area comprises a single light-emitting unit or a plurality of light-emitting units arranged in an array;

controlling deflection of the detection beam to scan a plurality of light-emitting unit areas according to the scanning position so as to lighten the light-emitting units;

Shooting the luminous state of the luminous unit when the detection beam is scanned;

The scanning form of the detection beam comprises scanning along a set track or fixed-point scanning according to a set pattern;

any frame of the scanning detection image comprises a plurality of subframes, the detection beam is controlled to scan a plurality of luminous unit areas, and the method further comprises the following steps:

in a first subframe, controlling the detection beam to scan the light-emitting unit area in a preset area;

In a second subframe, controlling the detection beam to scan the luminous unit area of a preset position point, wherein the preset position point is the defect point which is initially positioned in the first subframe;

In a third subframe, controlling a repairing beam to repair the light-emitting unit area of the defect point on line, wherein the light-emitting unit comprises a group of normal light-emitting control units and at least one group of standby light-emitting control units, and when the light-emitting unit of the defect point is detected, the repairing beam cuts off the connection of the normal light-emitting control units with defects or anomalies, and enables one group of standby light-emitting control units to realize normal display;

in a fourth subframe, controlling the detection beam to scan the light-emitting unit area in the preset area to finish rechecking,

The detection beam is a single electron beam, the single electron beam covers a single light emitting unit, and the intensity, the size and the direction of the single electron beam are determined according to the position and the type of the light emitting unit.

2. The method of claim 1, wherein the controlling the detection beam to scan the plurality of light-emitting unit areas further comprises controlling the detection beam to scan the plurality of light-emitting unit areas after the online repairing to complete the re-inspection.

3. The method of claim 1, wherein the controlling the detection beam to scan the plurality of light unit areas comprises:

controlling the detection beam to scan a plurality of light-emitting unit areas by adopting a first scanning mode and/or a second scanning mode and/or a third scanning mode;

The first scanning mode comprises the steps of scanning the light-emitting unit area in a preset area;

the second scanning mode comprises the step of scanning the luminous unit area of the preset position point;

the third scanning mode includes scanning the light emitting unit area with a preset direction as a scanning direction.

4. The method according to claim 3, wherein any frame of the scanned detection image includes a plurality of subframes, and the scanning method of the detection beam in any of the subframes is the first scanning method, the second scanning method, or the third scanning method.

5. A display device defect detection apparatus for implementing the method of any one of claims 1-4, wherein the display device comprises a substrate and a light emitting unit on the substrate, the detection apparatus comprising:

The electron beam emitting device is used for emitting detection beams, acquiring position information of a light emitting unit area and accurately positioning scanning positions of the detection beams, and scanning a plurality of light emitting unit areas according to the scanning positions by deflecting the detection beams to light the light emitting units, wherein the light emitting unit area comprises a single light emitting unit or a plurality of light emitting units arranged in an array;

An acquisition device for shooting the light emitting state of the light emitting unit when the detection beam is scanned;

The repairing device is used for transmitting repairing beams to repair defective light-emitting units on line, the light-emitting units comprise a group of main light-emitting control units and at least one group of standby light-emitting control units, the repairing beams cut off the connection of the main light-emitting control units of the defective light-emitting units and enable the group of standby light-emitting control units, and the scanning mode of the detecting beams comprises scanning along a set track or fixed-point scanning according to a set pattern;

the detection beam is a single electron beam, the single electron beam covers a single light-emitting unit, and the intensity, the size and the direction of the single electron beam are determined according to the position and the type of the light-emitting unit;

the electron beam emitting device comprises an emission control module for controlling the emission parameters and the emission positions of the detection beams so as to realize the scanning of the light emitting unit area;

The emission control module comprises a parameter control unit, and the parameters of the parameter control unit control the size and intensity parameters of the electron beam.

6. The apparatus according to claim 5, wherein the electron beam emitting device comprises:

and the electron beam transmitting module is used for transmitting the detection beam.

7. The detection apparatus according to claim 6, wherein the emission control module includes:

the electron beam deflection unit is arranged at the output end of the electron beam emission module and used for deflecting the detection beam so as to adjust the scanning direction and the scanning position;

And the electron beam positioning unit is arranged at the output end of the electron beam deflection unit and used for accurately positioning the scanning position of the detection beam.

8. The apparatus according to claim 6, wherein the parameter control unit is disposed at an output end of the electron beam emitting module.

9. The detection apparatus according to claim 5, characterized in that the detection apparatus further comprises:

an adjusting device for adjusting the position of the acquiring device to adapt the scanning position of the electron beam emitting device;

and/or, the detection device further comprises:

and the wavelength filtering device is positioned between the acquisition device and the light-emitting unit and is used for filtering light with different wavelengths emitted by the light-emitting unit.