CN118670700B - Precision performance testing device and testing platform for ultra-precision hydrostatic guideway - Google Patents
Precision performance testing device and testing platform for ultra-precision hydrostatic guideway Download PDFInfo
- Publication number
- CN118670700B CN118670700B CN202410942889.9A CN202410942889A CN118670700B CN 118670700 B CN118670700 B CN 118670700B CN 202410942889 A CN202410942889 A CN 202410942889A CN 118670700 B CN118670700 B CN 118670700B
- Authority
- CN
- China
- Prior art keywords
- ultra
- laser
- seat
- working platform
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
- G01B5/06—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
- G01B7/31—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
- G01M5/0041—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining deflection or stress
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
- G01M5/0041—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining deflection or stress
- G01M5/005—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining deflection or stress by means of external apparatus, e.g. test benches or portable test systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/16—Investigating or analyzing materials by the use of thermal means by investigating thermal coefficient of expansion
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Aviation & Aerospace Engineering (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to the technical field of testing of ultra-precise hydrostatic guide rails, and provides a performance testing device of the ultra-precise hydrostatic guide rail, which comprises a base, a working platform, a guide rail component, a mounting seat, a protective cover, a laser interference component, a displacement bracket and an adjusting seat, the base is provided with a plurality of air-float vibration isolation pieces, the working platform is connected with the air-float vibration isolation pieces and is positioned above the base, the air-float vibration isolation pieces are used for supporting the working platform, and the working platform is used for supporting all parts. The working platform can be isolated from the influence caused by vibration through the arrangement of the air floatation vibration isolation piece, and the protective cover is arranged, so that the laser component can avoid the influence of external environment, and the measurement precision is improved and the device can be suitable for ultra-precise measurement. Further, through the position layout of the guide rail component, the displacement bracket and the mounting seat, and the matching of the guide rail component, the laser interference component, the rigidity testing component and the straightness testing component, the testing of a plurality of performance indexes on the same working platform is realized, and the testing efficiency is improved.
Description
Technical Field
The invention relates to the technical field of testing of ultra-precise hydrostatic guide rails, in particular to a precision performance testing device and a testing platform of the ultra-precise hydrostatic guide rail.
Background
The ultra-precise hydrostatic guideway is an important core functional component of the ultra-precise machine tool, and the performance of the ultra-precise hydrostatic guideway directly influences the surface quality of a workpiece processed by the ultra-precise machine tool, so the ultra-precise hydrostatic guideway is particularly important for detecting various performance indexes of the ultra-precise hydrostatic guideway.
In the related art, most of testing devices can only realize measurement of a single performance index of a hydrostatic guideway with a high precision, which leads to a larger measurement error of the ultra-precision, and single performance index measurement can lead to the fact that the hydrostatic guideway needs to be moved when testing a plurality of performance indexes, on one hand, the risk that the measurement precision is higher due to the increase of an unstable factor can be reduced, and the efficiency of the test can be reduced.
Disclosure of Invention
The invention provides a precision performance testing device and a testing platform for an ultra-precise hydrostatic guideway, which are used for solving the defects that the detection of each performance index of the ultra-precise hydrostatic guideway is difficult to realize and single equipment can only provide single performance index detection in the prior art.
The invention provides a performance testing device of an ultra-precise hydrostatic guideway, which comprises a base, a working platform, a guideway assembly, a mounting seat, a protective cover, a laser interference assembly, a displacement bracket and an adjusting seat, wherein the base is provided with a plurality of air-floating vibration isolation pieces, the working platform is connected with the air-floating vibration isolation pieces and is positioned above the base, the air-floating vibration isolation pieces are used for supporting the working platform, the guideway assembly is arranged on the working platform, the guideway assembly comprises two sliding rails which are arranged at intervals, position sensors are arranged at two ends of the sliding rails, a mounting space is formed between the two sliding rails, the mounting seat is arranged in the mounting space, a sliding platform for mounting a workpiece to be tested is arranged on the mounting seat, the sliding platform is in sliding connection with the mounting seat, the sliding platform is configured to slide along a first direction, the protective cover is arranged on the working platform, one end of the protective cover extends along the first direction so as to enable the protective cover to cross the mounting seat in the first direction, an internal channel is formed by the protective cover, the laser interference assembly is arranged at least arranged at one end of the laser interference assembly, the laser interference assembly is arranged at least arranged at one side of the laser interference assembly, the laser interference assembly is arranged at least one end of the laser interference assembly is arranged at one side of the laser interference assembly, and the laser interference assembly is arranged at least one end of the laser interference assembly is used for testing the performance testing precision, the illustrated placement stage is used to mount a function detection assembly.
According to the precision performance testing device for the ultra-precise hydrostatic guideway provided by the invention, the base is a rectangular base, the air floatation vibration isolation pieces are arranged at the four corners of the base, one end of each air floatation vibration isolation piece is connected with the base, the other end of each air floatation vibration isolation piece is connected with the working platform, the four air floatation vibration isolation pieces are connected with the regulator through the pipeline system, and the input end of the regulator is connected with the air source so as to regulate the air pressure of each air floatation vibration isolation piece through the regulator.
According to the precision performance testing device for the ultra-precise hydrostatic guideway provided by the invention, the displacement bracket is constructed into a door frame-shaped structure, and the rigidity testing components are arranged on the top of the displacement bracket and at least one side of the displacement bracket.
According to the precision performance testing device for the ultra-precise hydrostatic guideway provided by the invention, the bottom of the displacement bracket is provided with the locking component, and the locking component is configured to prevent the displacement bracket from moving in a locking state.
According to the precision performance testing device for the ultra-precise hydrostatic guideway provided by the invention, the supporting frames are arranged near the two ends of the protective cover, the bottoms of the supporting frames are fixedly arranged on the working platform, and the tops of the supporting frames are connected with the protective cover so as to support the protective cover.
The precision performance testing device for the ultra-precise hydrostatic guideway comprises a laser interferometer, a supporting component, an interference mirror and a reflecting mirror, wherein the laser interferometer is arranged on the supporting component, the supporting component is fixedly connected with the working platform, the interference mirror and the laser interferometer are arranged at intervals in the first direction, the interference mirror is positioned in the inner channel so that a laser beam emitted by the laser interferometer passes through the interference mirror, the reflecting mirror is arranged on the mounting seat, the reflecting mirror is positioned in the inner channel, and the reflecting mirror is used for reflecting part of the laser beam after passing through the interference mirror.
The precision performance testing device for the ultra-precise hydrostatic guideway comprises a supporting seat, a lifting platform, a magnetic gauge seat and a cradle head, wherein the supporting seat is fixedly arranged on a working platform, a lifting rod is arranged at the bottom of the lifting platform and is in sliding connection with the supporting seat, the bottom of the magnetic gauge seat is arranged on the lifting platform, the top of the magnetic gauge seat is connected with the cradle head, the cradle head is used for installing the laser interferometer, and an adjusting part is arranged on the supporting seat and can be abutted with the lifting rod to limit the movement of the lifting rod.
According to the precision performance testing device for the ultra-precise hydrostatic guideway provided by the invention, the two sides of the installation seat are provided with the fixed blocks, and each fixed block is provided with a plurality of adjusting seats.
According to the precision performance testing device for the ultra-precise hydrostatic guideway provided by the invention, the bottom of the base is fixedly connected with a plurality of sizing blocks, and the sizing blocks are used for supporting the base.
A second aspect of the present invention provides a test platform, including a data processing system and a precision performance testing apparatus for an ultra-precise hydrostatic guideway according to any one of the above embodiments, where the data processing system is communicatively connected to the precision performance testing apparatus.
According to the precision performance testing device for the ultra-precise hydrostatic guideway, provided by the invention, the working platform is provided with the gap between the working platform and the base through the arrangement of the air floatation vibration isolation piece, so that the working platform can isolate the influence caused by vibration, and the arrangement of the protective cover can prevent the influence of the laser component on the external environment, thereby preventing the influence of external influence factors on the testing result, improving the measuring precision and being suitable for ultra-precise measurement. Further, through the position layout of the guide rail component, the displacement bracket and the mounting seat, and the matching of the guide rail component, the laser interference component, the rigidity testing component and the straightness testing component, the testing of a plurality of performance indexes on the same working platform is realized, and the testing efficiency is improved.
Drawings
In order to more clearly illustrate the invention or the technical solutions of the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the invention, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a performance testing apparatus for ultra-precise hydrostatic rails according to the present invention.
FIG. 2 is a schematic diagram of a second embodiment of a performance testing apparatus for ultra-precise hydrostatic rails according to the present invention.
FIG. 3 is a schematic diagram of the arrangement of laser components in the performance test apparatus for ultra-precise hydrostatic guideway provided by the present invention.
Fig. 4 is a schematic structural diagram of an air floatation vibration isolator arrangement in the performance test device of the ultra-precise hydrostatic guideway provided by the invention.
FIG. 5 is a schematic structural diagram of a stiffness testing assembly in the performance testing apparatus of an ultra-precise hydrostatic guideway provided by the present invention.
FIG. 6 is a schematic view of a partial structure of a displacement bracket in an ultra-precise hydrostatic guideway performance test apparatus according to the present invention.
Fig. 7 is a schematic structural diagram of straightness detection in the performance test device of the ultra-precise hydrostatic guideway provided by the invention.
Reference numerals:
1. The vibration isolator comprises a base, 11, sizing blocks, 12, an air-floatation vibration isolator, 121, a regulator, 122, an output pipeline, 123, a main pipeline, 124, a first communication pipeline, 125, a second communication pipeline, 2, a working platform, 3, a guide rail assembly, 31, a guide rail, 32, a position sensor, 4, a mounting seat, 40, a workpiece to be tested, 41, a sliding platform, 42, a slide carriage, 43, an amorphous, 5, a protective cover, 51, a support frame, 6, a laser interference assembly, 61, a support assembly, 611, a support seat, 612, a lifting platform, 613, a magnetic meter seat, 614, a cradle head, 62, a support seat, 63, a laser interferometer, 64, an interference mirror, 65, a reflector, 7, a displacement bracket, 71, a rigidity testing assembly, 711, a cylinder, 712, a pressure sensor, 8, an adjusting seat, 81, an inductance meter, 82, a fixed block and 9, an operating platform.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the embodiments of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In describing embodiments of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "connected," "connected," and "coupled" should be construed broadly, and may be, for example, fixedly connected, detachably connected, integrally connected, mechanically connected, electrically connected, directly connected, or indirectly connected via an intermediate medium. The specific meaning of the above terms in embodiments of the present invention will be understood in detail by those of ordinary skill in the art.
In embodiments of the invention, unless expressly specified and limited otherwise, a first feature "up" or "down" on a second feature may be that the first and second features are in direct contact, or that the first and second features are in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the embodiments of the present invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
The invention relates to a performance testing device of an ultra-precise hydrostatic guideway, which is described below with reference to fig. 1-5, and comprises a base 1, a working platform 2, a guideway assembly 3, a mounting seat 4, a protective cover 5, a laser interference assembly 6, a displacement bracket 7 and an adjusting seat 8, wherein the base 1 is provided with a plurality of air floatation vibration isolation pieces 12, the working platform 2 is connected with the air floatation vibration isolation pieces 12 and is positioned above the base 1, the air floatation vibration isolation pieces 12 are used for supporting the working platform 2, and the working platform 2 is used for supporting all components.
The base 1 is arranged on the bottom surface or other placing platforms, the working platform 2 is connected with the base 1 through the air floatation vibration isolation piece 12, namely the air floatation vibration isolation piece 12 is arranged between the base 1 and the working platform 2, and the air floatation vibration isolation piece 12 can realize vibration isolation, so that the influence of an external environment on the test results of all parts on the working platform is avoided, the detection precision is improved, and the ultra-precision detection can be realized. Specifically, the working platform 2 is supported above the base 1 by the air-floating vibration isolator 12, and has a certain gap between the bases 1.
The guide rail assembly 3 is arranged on the working platform 2, the guide rail assembly 3 comprises two slide rails 31 which are arranged at intervals, two ends of each slide rail 31 are respectively provided with a position sensor 32, an installation space is formed between the two slide rails 31, the installation seat 4 is arranged in the installation space, the installation seat 4 is provided with a sliding platform 41 for installing a workpiece 40 to be tested, the sliding platform 41 is in sliding connection with the installation seat 4, and the sliding platform 41 is configured to slide along the first direction X.
The two sliding rails 31 are fixedly arranged on the working platform 2, the space between the two sliding rails 31 is an installation space, the installation seat 4 is arranged in the installation space, the sliding platform 41 can slide along the first direction X, the flexibility of the workpiece 40 to be tested can be improved through the arrangement, and the testing of a plurality of performance indexes is facilitated.
The protection cover 5 is arranged on the working platform 2, the protection cover 5 extends along a first direction X from one end of the installation seat 4, so that the protection cover 5 spans across the installation seat 4 in the first direction X, an internal channel is formed in the protection cover 5, the laser interference component 6 is arranged at one end of the protection cover 5 far away from the installation seat 4, a laser emitting end of the laser interference component 6 is arranged in the internal channel, and the laser interference component 6 is configured to detect the precision performance of a workpiece 40 to be detected. In the case of measuring the position accuracy, the repeatability accuracy and the like of an ultra-precise hydrostatic guideway, the measurement is often required to be realized by laser.
The setting of protection casing 5 for the inside of protection casing 5 is formed with the inner space, and the laser emission end of laser interference subassembly 6 is located the internal passage, makes the laser beam of transmission can avoid the influence of outside environment, thereby can realize super-accuracy's hydrostatic guideway and measure.
The displacement support 7 is in sliding connection with the sliding rail 31, the displacement support 7 is provided with a rigidity testing component 71, the rigidity testing component 71 is used for testing rigidity performance of the workpiece 40 to be tested, the adjusting seat 8 is arranged on at least one side of the mounting seat 4, and the adjusting seat 8 is provided with a straightness detecting component which is used for detecting straightness of the workpiece 40 to be tested. In this embodiment, through the arrangement of the floating vibration isolation piece and the protection cover 5, the interference of the external environment can be avoided when the test is performed, so that the accurate measurement of each performance index can be realized, and the measurement of the ultra-precise hydrostatic guideway is realized.
It will be appreciated that some typical approaches in the related art use a sealed special environment for measurement, which is too costly overall due to special environmental limitations and not conducive to flexible placement. In this embodiment, the influence of external vibration on the workbench can be isolated and reduced by the air-floating vibration isolator 12, so that the configuration of the device can be facilitated, and the stability of the workbench 2 can be realized, thereby improving the detection accuracy. The arrangement of the protective cover 5 enables the laser interference assembly 6 to realize accurate measurement of the workpiece 40 to be measured in a relatively airtight environment, and improves the measurement precision.
The workpiece 40 to be measured described in the present specification is an ultraprecise hydrostatic guideway, and the ultraprecise hydrostatic guideway is slidably mounted on the sliding platform 41, so that the workpiece 40 to be measured can cooperate to act when different positions or different performance indexes are required to be tested. The slide platform 41 is slidably provided on the mount 4, and reference is made to the construction of the carriage in the related art. That is, the sliding platform 41 is similar to a supporting sliding platform of a slide carriage, the installation seat 4 is provided with a slidable guide rail sliding platform which is slidably arranged on a sliding rail, wherein a driving piece for driving the sliding platform to move is also arranged in the installation seat 4, and the driving piece can be a hydraulic cylinder or other linear driving devices.
According to the embodiment of the invention, the base 1 is a rectangular base 1, the four corners of the base 1 are respectively provided with the air floatation vibration isolation pieces 12, one end of each air floatation vibration isolation piece 12 is connected with the base 1, the other end of each air floatation vibration isolation piece 12 is connected with the working platform 2, the four air floatation vibration isolation pieces 12 are connected with the regulator 121 through the pipeline system, and the input end of the regulator 121 is connected with the air source so as to regulate the air pressure of each air floatation vibration isolation piece 12 through the regulator 121. The air supporting vibration isolation member 12 can realize the isolation to the vibration, avoids outside vibration transmission to the workstation to will under the precision that leads to the test, make the workstation more stable through the mode that sets up air supporting vibration isolation member 12 on every angle, and then can promote each part measuring precision on the workstation.
In a specific setting, the adjusting seat 8 can be further provided with an inductance gauge 81 and other instruments and equipment to realize floating amount detection, thermal deformation experiment and the like.
As shown in fig. 4, in a specific embodiment, the pipeline system includes an output pipeline 122, a main pipeline 123, a first communication pipeline 124 and a second communication pipeline 125, where the main pipeline 123 has a first output port and a second output port, the first output port is connected to the first communication pipeline 124, the first communication pipeline 124 is connected to two air-floating vibration isolation members 12 on the same side, the two air-floating vibration isolation members 12 on the other side are connected through the second communication pipeline 125, and one of the air-floating vibration isolation members 12 is connected to the second output port. When vibration isolation is carried out, each air floatation vibration isolation piece 12 is required to have proper air pressure conditions, in the embodiment, the four air floatation vibration isolation pieces 12 are linked through a pipeline system, so that air pressure balance of the four air floatation vibration isolation pieces 12 is realized, the stability of the whole pipeline system is improved, the stability of the working platform 2 is improved, and further high-precision measurement can be realized.
In a further example, the sliding rail 31 is laid along the first direction X, the displacement bracket 7 is slidably connected with the sliding rail 31, and the rigidity testing assembly 71 is disposed on the displacement bracket 7, and the rigidity testing assembly 71 can detect the rigidity of the workpiece 40 to be tested. An adjusting seat 8 is arranged on at least one side of the mounting seat 4, a straightness detection assembly is arranged on the adjusting seat 8, and straightness measurement of the workpiece 40 to be measured is realized through the straightness detection assembly. In this embodiment, the laser interference assembly 6 can measure performance indexes such as position accuracy and repeatability accuracy of the workpiece 40 to be measured, and the stiffness and straightness index measurement can be achieved through the stiffness test assembly 71 and the straightness detection assembly.
In a specific embodiment, the stiffness testing assembly 71 includes a hydraulic station, a cylinder 711, and a pressure sensor 712, where the cylinder 711 is communicated with the hydraulic station, the pressure sensor 712 is disposed on a piston rod of the cylinder 711, and a displacement sensor is disposed on the piston rod or the cylinder 711, and the displacement of the piston rod can be monitored through the displacement sensor. The whole adopts a closed-loop control system, an initial voltage command is sent from the operation desk 9, a proportional valve on a hydraulic station is controlled to output air pressure with certain pressure to the air cylinder 711, a piston rod of the air cylinder 711 pushes the pressure sensor 712 to move forwards, and the air cylinder 711 pushes the pressure sensor 712 to the upper surface or the side surface of the guide rail, so that certain pressure is generated and fed back to the operation desk 9. The operation table 9 compares the initial set pressure value with the feedback pressure value, and corrects the output voltage value until the feedback pressure value coincides with the set value. The inductance gauge 81 picks up the amount of rail position change generated under different loading loads. Static rigidity of the guide rail calculated by the platform software. Drawing a force-displacement relationship and a stiffness-force relationship.
According to one embodiment of the invention, the displacement bracket 7 is configured as a door frame like structure, and the top of the displacement bracket 7 and at least one side of the displacement bracket 7 are provided with a rigidity testing assembly 71. The displacement bracket 7 can slide along the slide rail 31 so as to reach any position of the workpiece 40 to be detected, thereby realizing the rigidity detection of each part of the workpiece 40 to be detected.
When specifically setting up, door frame form displacement support 7 top has the crossbeam structure, and rigidity test assembly 71 is connected with the crossbeam to can realize the rigidity test on the vertical direction, the both ends of crossbeam structure are equipped with the stand, are equipped with rigidity test assembly 71 on at least one stand, thereby can realize the rigidity test of side direction. In a further example, a handle is provided on the outer side wall of the upright, by means of which the displacement bracket 7 is conveniently moved.
It will be appreciated that the height of the displacement bracket 7 is higher than the highest position of the protective cover 5 and the mounting seat 4, the sliding rail 31 extends in the first direction and can cover the entire length of the mounting seat 4, and one end of the sliding rail 31 exceeds the end of the mounting seat 4, so that a section of the sliding rail 31 is located at an outer position of the mounting seat 4, and the displacement bracket 7 slides along the sliding rail 31. When the displacement bracket 7 is positioned on one section outside the sliding rail 31, the protective cover 5 can be conveniently detached, because the protective cover 5 is required to be detached for measurement when the position accuracy and the repeatability accuracy are not required to be measured through the laser interference assembly 6. Stiffness measurement is achieved by sliding the displacement bracket 7 to a designated position when stiffness testing is required.
In a specific embodiment, the bottom of the displacement bracket 7 is provided with a locking member configured to prevent the displacement bracket 7 from moving in the locked state. When the rigidity test is required, the displacement bracket 7 needs to be moved to a designated position, and the displacement needs to be stopped to be kept stable after reaching the designated position, and in this embodiment, the locking of the displacement bracket 7 is realized by means of the locking portion.
In the specific application, the locking part includes the rotation handle, and the rotation handle is connected with the rotation round pin axle, and the bottom of displacement support 7 is located to the rotation round pin axle, and the bottom that is the stand has spacing portion on the rotation round pin axle, this makes the spacing portion can realize the locking in slide rail 31 cooperation after the rotation round pin axle rotates certain angle, ensures the stability of displacement support 7.
According to one embodiment of the present invention, the two ends close to the protective cover 5 are respectively provided with a supporting frame 51, the bottom of the supporting frame 51 is fixedly arranged on the working platform 2, and the top of the supporting frame 51 is connected with the protective cover 5 to support the protective cover 5. The protective cover 5 can be conveniently disassembled in a supporting frame 51 mode, and the protective cover 5 can be quickly disassembled and assembled.
When specifically setting up, be equipped with fixed block 82 respectively at mount pad 4 along the both ends of first direction, fixed block 82 is connected with work platform 2, and support frame 51 locates on fixed block 82. The fixing block 82 has a connecting slot along the length direction, and the supporting frame 51 is disposed in the connecting slot, so as to support the protection cover 5 in such a manner that the protection cover is convenient to be quickly disassembled and assembled.
In the specific application, be equipped with the handle at the both ends at protection casing 5 top, make things convenient for protection casing 5 to take off through the handle, can realize the quick assembly disassembly of protection casing 5.
According to one embodiment of the present invention, the laser interferometer assembly 6 includes a laser interferometer 63, a support assembly 61, an interferometer 64 and a mirror 65, wherein the laser interferometer 63 is disposed on the support assembly 61, the support assembly 61 is fixedly connected with the working platform 2, the interferometer 64 and the laser interferometer 63 are spaced apart in a first direction, and the interferometer 64 is disposed in an internal channel so that a laser beam emitted from the laser interferometer 63 passes through the interferometer 64, the mirror 65 is disposed on the mount 4, and the mirror 65 is disposed in the internal channel, and the mirror 65 is used for reflecting a part of the laser beam after passing through the interferometer 64.
When specifically setting up, mount pad 4 and work platform 2 fixed connection are equipped with slide table 41 on mount pad 4, and workpiece 40 to be measured slides and sets up on slide table 41, is equipped with carriage 42 on the surface of workpiece 40 to be measured, and reflector 65 is connected with carriage 42, detects various position accuracy through light path reflection when detecting.
In performing position accuracy measurement on the workpiece 40 to be measured, the laser interferometer 63 emits a laser beam, which is split into two beams by the interference mirror 64, one beam being used as reference light and the other beam being used for irradiation onto the workpiece 40 to be measured, and the mirror 65 is provided on the split reference light beam, which reflects a part of the light beam emitted from the laser light source so as to interfere with the light beam reflected from the surface of the workpiece 40 to be measured, thereby realizing various position accuracy detection. In this embodiment, the internal channel in the protective cover 5 is used as the optical path channel of the laser, the laser beam is emitted by the laser interferometer 63, and then the laser beam acts through the interference mirror 64, and finally high-precision measurement on the workpiece 40 to be measured is realized.
When specifically setting, the interference mirror 64 is connected through a support 62, and the bottom of support 62 is connected through bolt and fixed block 82, and the top of support 62 is located the below of protection casing 5, and the interference mirror 64 sets up in the top of support 62, and the height of support 62 can make interference mirror 64 body part be located the internal passageway.
In a specific embodiment, the supporting component 61 includes a supporting seat 611, a lifting platform 612, a magnetic gauge stand 613 and a cradle head 614, wherein the supporting seat 611 is fixedly arranged on the working platform 2, a lifting rod is arranged at the bottom of the lifting platform 612 and is slidably connected with the supporting seat 611, the bottom of the magnetic gauge stand 613 is arranged on the lifting platform 612, the top of the magnetic gauge stand 613 is connected with the cradle head 614, the cradle head 614 is used for installing the laser interferometer 63, and an adjusting part is arranged on the supporting seat 611 and is configured to be abutted with the lifting rod so as to limit the movement of the lifting rod. The laser interferometer 63 is located on the head 614, and can change the optical path of the laser beam by adjusting the lift 612, and can realize detection of position accuracy in cooperation with the interference mirror 64 and the reflecting mirror 65.
When the lifting platform is specifically arranged, the top of the lifting platform 612 is provided with a platform part, the bottom surface of the platform part is connected with a lifting rod, the lifting rod is inserted into the supporting seat 611, the supporting seat 611 is connected with the working platform 2 through the fixing block 82, and the adjusting part is an adjusting bolt. Further, a lifting hole is formed along the axial direction of the supporting seat 611, a lifting rod is inserted into the lifting hole, an adjusting bolt is arranged along the radial direction of the supporting seat 611, when the laser interferometer 63 is in a working position, the adjusting bolt is abutted against the lifting rod by tightening the adjusting bolt, so that the limitation of the lifting table 612 is realized, and the stability of the laser interferometer 63 is ensured.
The bottom of the magnetic gauge stand 613 is provided with a magnetic attraction part, the magnetic attraction part is connected with the lifting table 612, so that the magnetic gauge stand 613 is convenient to disassemble, and a connecting rod is arranged on the magnetic gauge stand 613 and is fixedly connected with the cradle head 614.
According to an embodiment of the present invention, the two sides of the mounting base 4 are provided with fixing blocks 82, and each fixing block 82 is provided with a plurality of adjusting bases 8. The fixed block 82 is provided with a connecting groove along the length direction thereof, the mounting seat 4 is connected through the connecting groove, and the measurement of different performance indexes can be realized through a plurality of adjusting seats by means of the mode, so that the measurement function of the device is enriched.
In a specific setting, the top of the adjusting seat 8 is provided with a placing table, and a test instrument and the like can be arranged on the placing table so as to realize measurement on the workpiece 40 to be measured.
According to one embodiment of the present invention, a plurality of sizing blocks 11 are fixedly connected to the bottom of the base 1, and the plurality of sizing blocks 11 are used for supporting the base 1. The sizing block 11 can be reduced in contact surface with the ground or the placement platform, so that the influence of external vibration or the like can be reduced.
A plurality of test functions of the performance test apparatus provided by the above embodiment are described below by way of example.
Rigidity detection, namely, the static rigidity of the guide rail refers to the capacity of the guide rail of a machine tool to resist deformation in the load or the machining process, and the static rigidity is expressed by the load sum (vertical direction force/lateral force) born by unit deformation. The method reflects the precision holding capacity of the guide rail in the processing process, and is an important index for judging the performance of the guide rail. In this embodiment, the guide rail to be measured is first mounted on the sliding platform 41, the displacement bracket 7 is moved to make the displacement bracket 7 reach a predetermined position, then the displacement bracket 7 is locked, at this time, the rigidity testing component 71 is located at the center position of the guide rail to be measured, then the loading of the slide carriage 42 in the vertical direction and the lateral direction is achieved by using the cylinder 711 or the oil cylinder, and the displacement of the guide rail in the vertical direction and the lateral direction is measured by the displacement sensor (the displacement sensor built in the cylinder 711 or the oil cylinder). At the same time, four (or two) displacement sensor readings are detected, and the inductance gauge 81 averages the data as a deformation. Wherein, when the rigidity detection in the vertical direction is performed, the pressure sensor 712 (or the inductance gauge head) is fixed vertical to the horizontal plane of the guide rail, and when the rigidity detection in the lateral direction is performed, the pressure sensor 712 (or the inductance gauge head) is fixed vertical to the side surface of the guide rail.
Straightness detection As shown in FIG. 7, the straightness of the hydrostatic guideway reflects the guiding precision of the ultra-precise machine tool and is an important index in the geometric precision detection of the machine tool. The flat crystal 43 (the flat crystal 43 is in a cuboid block structure) is placed on the slide carriage 42, the smoothest surface of the flat crystal 43 is used as a measuring surface, the inductance gauge 81 seat for measuring the performance is fixed on the adjusting seat 8, and the gauge head is contacted with the measuring surface of the flat crystal 43. Leveling crystal 43, making the values of inductance meter 81 at two ends equal, moving slide carriage 42, recording the maximum value and minimum value of the reading of inductance meter 81, and making straightness detection, where the difference between the two values is straightness error.
The guide rail position precision detection, in particular to detection positioning precision and repeated positioning precision can be realized through the laser interference assembly 6. Specifically, the protective cover 5 is installed, and the laser interferometer 63, the interference mirror 64 and the reflecting mirror 65 are all adjusted to proper positions, and the laser interferometer 63 is turned on to perform measurement. Reference is specifically made to the detection method specifically described in GB/T17421.1-1998 for A13.
The floating amount detection comprises the steps of installing a detected guide rail on a sliding platform 41, fixing an inductance measuring head on an adjusting seat 8, discharging pressure oil in a hydrostatic guide rail at the position of the detection end of the inductance measuring head vertical to four corners of the horizontal plane of the guide rail, zeroing an inductance meter 81, detecting thickness change of oil films of four points of the guide rail before and after oil passing through by using a displacement sensor, zeroing a dial indicator and reading. And then oil pressure is regulated or load is regulated for multi-parameter detection.
Micro-feed experiments, the purpose of which is to determine the motion resolution of the direction of motion of the guide rail in which the experiments are performed, i.e. the minimum step distance of the guide rail. At any point in the travel in the first direction, carriage 42 is successively moved ten steps in reverse in ten steps of forward movement in the first direction at a step pitch of 0.005 μm, and the minimum resolution of the movement in the first direction is tested. Specifically, when the laser interferometer 63 is used, the detection method is described in GB/T17421.1-1998, specifically in A13.
Thermal deformation experiments show that the environment temperature and the hydraulic oil temperature of the guide rail can change the temperature of the guide rail in the operation process, so that the posture of the guide rail is changed. After the guide rail is in oil feeding operation, the inductance gauge 81 is arranged on the adjusting seat 8, the inductance gauge 81 is zeroed, and the oil temperature change and the inductance gauge 81 number are observed when the guide rail moves.
A second aspect of the present invention provides a test platform, including a data processing system (not shown in the figures) and a precision performance testing apparatus for an ultra-precise hydrostatic guideway according to any one of the above embodiments, where the data processing system is communicatively connected to the precision performance testing apparatus. The data processing system is used for collecting all data in detection, and the collected data is processed, so that the output of a real-time detection result is realized. In particular, the data processing system comprises an operating table 9.
It should be noted that the above-mentioned embodiments are merely for illustrating the technical solution of the present invention, and not for limiting the same, and although the present invention has been described in detail with reference to the above-mentioned embodiments, it should be understood by those skilled in the art that the technical solution described in the above-mentioned embodiments may be modified or some technical features may be equivalently replaced, and these modifications or substitutions do not make the essence of the corresponding technical solution deviate from the spirit and scope of the technical solution of the embodiments of the present invention.
Claims (9)
1. The utility model provides a precision performance testing arrangement of ultraprecise hydrostatic guideway which characterized in that includes:
the base is provided with a plurality of air floatation vibration isolation pieces;
The working platform is connected with the air floatation vibration isolation piece and is positioned above the base, and the air floatation vibration isolation piece is used for supporting the working platform;
The guide rail assembly is arranged on the working platform and comprises two sliding rails arranged at intervals, two ends of each sliding rail are respectively provided with a position sensor, and an installation space is formed between the two sliding rails;
The mounting seat is arranged in the mounting space, a sliding platform for mounting a workpiece to be tested is arranged on the mounting seat, the sliding platform is in sliding connection with the mounting seat, and the sliding platform is configured to slide along a first direction;
the protective cover is arranged on the working platform, extends from one end of the mounting seat along the first direction, so that the protective cover spans across the mounting seat in the first direction, and an internal channel is formed in the protective cover;
the laser interference assembly is arranged at one end of the protective cover, which is far away from the mounting seat, the laser emission end of the laser interference assembly is positioned in the internal channel, and the laser interference assembly is configured to detect the precision performance of a workpiece to be detected;
the displacement bracket is in sliding connection with the sliding rail, and is provided with a rigidity testing assembly which is used for testing the rigidity performance of a workpiece to be tested;
The adjusting seat is arranged on at least one side of the mounting seat, a placing table is arranged on the adjusting seat, and the placing table is used for mounting the function detection assembly;
The laser interferometer is arranged on the support assembly, the support assembly is fixedly connected with the working platform, the interferometer and the laser interferometer are arranged at intervals in the first direction, the interferometer is located in the inner channel, so that laser beams emitted by the laser interferometer penetrate through the interferometer, the reflector is arranged on the mounting seat and located in the inner channel, the reflector is used for reflecting part of the laser beams after passing through the interferometer, the laser interferometer emits laser beams, one laser beam is used as reference light, the other laser beam is used for irradiating a workpiece to be measured, the reflector is arranged on the separated reference light beam, and a part of the laser beams emitted by the laser source are reflected to enable the laser beams to interfere with the light beams reflected from the surface of the workpiece to be measured, so that various position accuracy detection is achieved.
2. The precision performance testing device of the ultra-precise hydrostatic guideway according to claim 1, wherein the base is a rectangular base, the four corners of the base are respectively provided with the air floatation vibration isolation piece, one end of the air floatation vibration isolation piece is connected with the base, and the other end of the air floatation vibration isolation piece is connected with the working platform;
The four air-float vibration isolators are connected with the regulator through a pipeline system, and the input end of the regulator is connected with an air source so as to regulate the air pressure of the air-float vibration isolators through the regulator.
3. The precision performance testing device of the ultra-precise hydrostatic guideway according to claim 1, wherein the displacement bracket is constructed in a door frame-like structure, and the rigidity testing component is arranged on the top of the displacement bracket and at least one side of the displacement bracket.
4. The precision performance testing apparatus of an ultra-precise hydrostatic guideway according to claim 3, wherein a locking member is provided at a bottom of the displacement bracket, the locking member being configured to prevent the displacement bracket from moving in a locked state.
5. The precision performance testing device of the ultra-precise hydrostatic guideway according to claim 1, wherein supporting frames are arranged near two ends of the protective cover, the bottoms of the supporting frames are fixedly arranged on the working platform, and the tops of the supporting frames are connected with the protective cover to support the protective cover.
6. The precision performance testing device of the ultra-precise hydrostatic guideway according to claim 1, wherein the supporting component comprises a supporting seat, a lifting platform, a magnetic gauge seat and a cloud deck, wherein the supporting seat is fixedly arranged on the working platform, the bottom of the lifting platform is provided with a lifting rod, the lifting rod is in sliding connection with the supporting seat, the bottom of the magnetic gauge seat is arranged on the lifting platform, the top of the magnetic gauge seat is connected with the cloud deck, and the cloud deck is used for installing the laser interferometer;
the supporting seat is provided with an adjusting part, and the adjusting part is configured to be abutted with the lifting rod so as to limit the movement of the lifting rod.
7. The precision performance testing device of the ultra-precise hydrostatic guideway according to claim 1, wherein both sides of the installation seat are provided with fixed blocks, and each fixed block is provided with a plurality of adjusting seats.
8. The precision performance testing device of the ultra-precise hydrostatic guideway according to claim 1, wherein the bottom of the base is fixedly connected with a plurality of sizing blocks, and the sizing blocks are used for supporting the base.
9. A test platform comprising a data processing system and an accuracy performance testing device for an ultra-precise hydrostatic rail according to any one of claims 1 to 8, said data processing system being in communication with said accuracy performance testing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410942889.9A CN118670700B (en) | 2024-07-15 | 2024-07-15 | Precision performance testing device and testing platform for ultra-precision hydrostatic guideway |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410942889.9A CN118670700B (en) | 2024-07-15 | 2024-07-15 | Precision performance testing device and testing platform for ultra-precision hydrostatic guideway |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN118670700A CN118670700A (en) | 2024-09-20 |
| CN118670700B true CN118670700B (en) | 2025-04-29 |
Family
ID=92719148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410942889.9A Active CN118670700B (en) | 2024-07-15 | 2024-07-15 | Precision performance testing device and testing platform for ultra-precision hydrostatic guideway |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN118670700B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103162067A (en) * | 2012-12-19 | 2013-06-19 | 哈尔滨工业大学 | Air flotation vibration isolation platform based on spring zero position criterion and laser self-alignment measurement |
| CN107367224A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of three optical axis laser interferometer measurements |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8575791B2 (en) * | 2010-12-17 | 2013-11-05 | National Formosa University | Manufacturing-process equipment |
| CN106352815B (en) * | 2016-09-18 | 2018-10-19 | 国防科学技术大学 | Laser beam measures and is directed toward control experimental system |
| CN106895773B (en) * | 2017-03-22 | 2020-04-24 | 广东工业大学 | Ultra-precise measuring platform |
| CN108267095B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Method and device for bilateral dislocation differential confocal detection of free-form surface topography |
| CN108362221B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Nano-precision detection method and device for free-form surface morphology |
| CN108225213B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Method and device for non-contact dimensionality reduction error separation detection of free-form surface |
| CN208026213U (en) * | 2018-04-20 | 2018-10-30 | 华中科技大学 | A kind of cylindrical part surface linearity testing apparatus |
| CN210625572U (en) * | 2019-05-07 | 2020-05-26 | 广州克勤教育咨询有限公司 | Hydrostatic guideway straightness measuring device |
| CN114485474B (en) * | 2022-02-24 | 2023-11-10 | 成都特密思科技有限公司 | Triaxial ultra-precise contour detection device |
-
2024
- 2024-07-15 CN CN202410942889.9A patent/CN118670700B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103162067A (en) * | 2012-12-19 | 2013-06-19 | 哈尔滨工业大学 | Air flotation vibration isolation platform based on spring zero position criterion and laser self-alignment measurement |
| CN107367224A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of three optical axis laser interferometer measurements |
Also Published As
| Publication number | Publication date |
|---|---|
| CN118670700A (en) | 2024-09-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113970299B (en) | A device for high-precision vertical measurement of the outline of a slender part | |
| CN101352817A (en) | Method of measuring position detection error in machine tool | |
| CN111121689B (en) | Linear displacement sensor calibration high-precision adjusting device | |
| CN107655412B (en) | A kind of ballbar length caliberating device and application method with self calibrating function | |
| CN106017366A (en) | A straightness comprehensive detection device | |
| CN109764839A (en) | A kind of planetary gear size detection equipment | |
| CN107367219A (en) | Lorentz force motor-direct-drive type inductance sensor calibration method and device | |
| CN219265216U (en) | Device for testing grid precision during multi-model straight line | |
| CN210719489U (en) | Grid cell clamping force detection device | |
| CN118670700B (en) | Precision performance testing device and testing platform for ultra-precision hydrostatic guideway | |
| CN111121638B (en) | Calibration method for displacement of material testing machine | |
| WO2021123745A1 (en) | Positioning apparatus with an associated transfer mechanism | |
| CN100521143C (en) | Carrying bench device | |
| CN214120969U (en) | Detection apparatus for car battery support | |
| CN205879134U (en) | Straightness accuracy comprehensive testing device | |
| CN219083997U (en) | Magnetostrictive displacement sensor calibration device | |
| CN113624135B (en) | Pose measuring system | |
| CN213336005U (en) | Plane detector | |
| CN211717410U (en) | High-precision adjusting device for calibrating linear displacement sensor | |
| CN114136253A (en) | Deflection detection device | |
| CN220818894U (en) | Displacement sensor calibrating device | |
| CN110307794B (en) | High-precision intelligent aperture testing device and testing method | |
| US4604810A (en) | Post process diameter gage | |
| CN114509137A (en) | Magnetostrictive liquid level meter verification and detection device and system | |
| CN217235045U (en) | Compact wide-range double-measurement type linear displacement sensor calibration device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |