CN118760284B - Thermal balance calculation method, adjustment method and system of electric heating device under cooling state - Google Patents
Thermal balance calculation method, adjustment method and system of electric heating device under cooling state Download PDFInfo
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Abstract
本发明属于芯片加工用温度控制技术领域，具体涉及一种供冷状态下电加热装置热平衡计算方法、调节方法及系统。本发明的供冷状态下电加热装置热平衡计算方法，首先基于高温敏感性芯片的加工特点，实现了供冷状态下的电加热装置以及表冷器变频器的输出百分比的计算功能，计算实时性高，且计算结果高效而准确；通过电加热装置和表冷器变频器的协同控制，能够为高温敏感性芯片的高精密降温控制策略的研究提供基础保障；随后，本发明还提供了相应的系统及调节方法，从而具体化的实现高精密降温控制目的。
The present invention belongs to the technical field of temperature control for chip processing, and specifically relates to a method for calculating the thermal balance of an electric heating device under cooling conditions, an adjustment method and a system. The method for calculating the thermal balance of an electric heating device under cooling conditions of the present invention firstly realizes the calculation function of the output percentage of the electric heating device and the surface cooler inverter under cooling conditions based on the processing characteristics of high-temperature sensitive chips. The calculation has high real-time performance, and the calculation results are efficient and accurate. Through the coordinated control of the electric heating device and the surface cooler inverter, it can provide a basic guarantee for the research of high-precision cooling control strategies for high-temperature sensitive chips. Subsequently, the present invention also provides a corresponding system and adjustment method, so as to concretely realize the purpose of high-precision cooling control.
Description
Technical Field
The invention belongs to the technical field of temperature control for chip processing, and particularly relates to a method for calculating heat balance of an electric heating device in a cooling state, a method for adjusting the heat balance and a system for the heat balance.
Background
The key equipment for manufacturing the chip is a photoetching machine, the photoetching machine is ultra-precise processing equipment, the working environment is very high, particularly the temperature is high, the temperature stability of the internal gas is an important factor affecting the resolution and imaging quality of the photoetching machine, and among a plurality of microenvironment parameters, the influence of temperature fluctuation on the photoetching precision is the greatest. Therefore, reasonable temperature range, accurate temperature measurement and control have important roles in guaranteeing three key indexes of the photoetching machine, namely resolution, overlay accuracy and yield. The thermal control device for the photoetching machine belongs to the subdivision field in precise environmental control, the ideal temperature control precision of the thermal control device is required to reach +/-0.05 ℃ and the higher temperature control precision is required to reach +/-0.02 ℃, currently, products in the same industry can reach +/-1 ℃ in the temperature control precision, and manufacturers with high temperature control level can reach +/-0.5 ℃ and have a certain distance from the ideal temperature control precision. To this, patent document of application number 202110647092.2 discloses a high accuracy temperature regulating device of cross radiation convection, and accessible water pump frequency conversion adjusts cross radiation convection device flow size, and automatic adaptation measurement platform goes up the heat source and changes, improves heat exchange efficiency to accurate control collector temperature through fine tuning heating device reaches the controllable adjustable purpose of measurement platform temperature. However, the above solution does not give enough details of radiation versus temperature control, and according to the description of the content, the convection and radiation power of the device cannot be completely decoupled, and the advantages of high-precision temperature control of heat radiation and rapid temperature control of heat convection cannot be exerted. Particularly, for the current chip processing field, the sensitivity of certain chips to high temperature is extremely high, namely when the working environment temperature is lower than the set temperature for a certain time, the photoetching precision of the chips cannot be greatly influenced, but once the working environment temperature is higher than the set temperature for a long time, the chips are susceptible to the occurrence of defective products due to the high temperature sensitivity of the chips, and the final yield is influenced. Obviously, at present, although the self temperature control can be realized by the organic-borne PID, the gap between the actual temperature control temperature and the ideal temperature control precision cannot be quickly made up by the existing temperature control technology, and the method is difficult to be suitable for processing occasions of high-temperature sensitive chips which need quick and accurate temperature reduction so as to perform temperature control processing in a set temperature range as far as possible. Therefore, a solution is needed.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, firstly provides a heat balance calculation method of an electric heating device in a cooling state based on the processing characteristics of a high-temperature sensitive chip, thereby realizing the calculation function of the output percentages of the electric heating device and a surface cooler frequency converter in the cooling state, having high calculation instantaneity and high efficiency and accuracy, providing basic guarantee for the research of a high-precision cooling control strategy of the high-temperature sensitive chip through the cooperative control of the electric heating device and the surface cooler frequency converter, and then providing a corresponding system and a corresponding regulation method, thereby realizing the high-precision cooling control aim in a concrete way.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
The method for calculating the heat balance of the electric heating device in the cooling state is characterized by comprising the following steps of:
When (when) In the time-course of which the first and second contact surfaces,
The output percentage outc of the frequency converter of the real-time surface cooler and the output percentage out of the real-time electric heating device in the cooling state are calculated respectively by the following steps:
,
;
When (when) In the time-course of which the first and second contact surfaces,
Outc =0% and the output percentage out of the real-time electric heating device in the cold state is calculated from the following formula:
;
Wherein:
h tin is the air enthalpy corresponding to the real-time return air dry bulb temperature, and the unit is kJ/kg;
h tout is the air enthalpy value corresponding to the temperature of the air-dried ball in real time, and the unit is kJ/kg;
Q m is the air supply quantity of the air conditioner, and the unit is m 3/h;
vssout is the specific volume of air at the temperature of the air-dried ball in real time, and the unit is m 3/kg;
Xssout is the absolute humidity of air at the temperature of the air-dried ball in real time, and the unit is kg/kg;
R is the lowest load node value of the electric heating device;
the unit is the cold capacity overflow quantity of the surface cooler;
t cout is the real-time outlet water temperature of chilled water, and the unit is DEG C;
t cin is the real-time inlet temperature of chilled water, and the unit is DEG C;
F cm100% is the flow rate of chilled water of the frequency converter of the surface cooler in the 100% output state, and the unit is m 3/h;
r is a calculation constant;
q wind-out electric heating 100% is the heating amount of the electric heating device of the air conditioning box in 100% output state, and the unit is W.
Preferably, the adjustment method is characterized by comprising the steps of:
S1, setting the temperature of an air-dried ball by taking t sd as a setting value, and taking t out as the temperature of the air-dried ball in real time;
When t sd＞tout, the air conditioning box is in a heat supply state, when t sd＜tout, the air conditioning box is in a cold supply state, and the temperature of the air-dried balls is regulated in real time by using the PID in the system PLC by default in the two states until t sd=tout or the difference value of the two is in a tolerance zone;
S2, when the set time period is continuously monitored twice, the air conditioner is found to be in a cooling state, the difference value exceeds the tolerance zone, the output percentage of the real-time electric heating device is calculated according to the electric heating device heat balance calculation method in the cooling state, the output percentage of the frequency converter of the surface air cooler is matched for adjustment, the purpose of active temperature control and adjustment is achieved, and then the step S1 is repeated.
Preferably, the tolerance zone = ±0.3 ℃.
Preferably, at t sd＞tout, the temperature control logic of the PID is:
A1. Calculating real-time heat Q q according to the real-time air-dried ball temperature, the real-time return air dry ball temperature and the air supply quantity;
A2. the electric heating quantity of the electric heating device of the air conditioner box is Q Z, the maximum cooling quantity of the surface cooler is Q C, and then:
When Q q-QZ is less than 0, the output percentage of the electric heating device is [ (Q Z-Qq）/QC ] ×100%, and the output percentage of the frequency converter of the surface cooler is 0%;
When Q q-QZ is more than 0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler is as follows:
[(QZ-Qq）/QC]×100%;
When Q q-QZ =0, the output percentage of the electric heating device is 40%, and the output percentage of the frequency converter of the surface cooler is 50%;
Preferably, at t sd＜tout, the temperature control logic of the PID is:
When Q q-QZ is less than 0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler is as follows:
[(QC-Qq）/QC]×100%;
When Q q-QZ is more than 0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler is 100%;
When Q q-QZ =0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler is 100%.
Preferably, at t sd=tout, the temperature control logic of the PID is:
When Q q-QZ is less than 0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler is 100%;
When Q q-QZ is more than 0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler is 100%;
When Q q-QZ =0, the output percentage of the electric heating device is 40%, and the output percentage of the frequency converter of the surface cooler is 50%.
The system is characterized by comprising a temperature control box body and an air supply box body which form an air conditioning box, wherein a circulating air path is formed between the temperature control box body and the air supply box body through an air supply channel and an air return channel, a flow mixing device and a high-efficiency filter are sequentially arranged at the top end of the temperature control box body along the air flow direction, the high-efficiency filter and the inner wall and the side wall of the top end of the temperature control box body jointly enclose to form a static pressure cavity, a space below the flow mixing device forms a temperature control cavity, an electric heating device and a surface cooler are adjacently arranged in the temperature control cavity from top to bottom, a fan for blowing air to the flow mixing device is arranged above the electric heating device, a primary filter is arranged in the air return channel, a wind-damp ball temperature measuring point and a wind-dry ball temperature measuring point are arranged in the air supply channel, and a return dry ball temperature measuring point is arranged in the air return channel.
Preferably, water in the constant temperature water tank is conveyed into the surface cooler through a circulating pump positioned on a water inlet transmission pipeline and is returned into the constant temperature water tank through a water outlet transmission pipeline to fulfill the heat exchange requirement, a water regulating valve V1 for accurately regulating the water quantity entering the surface cooler is further arranged on the water inlet transmission pipeline, and a group of electromagnetic switch valves EV are respectively arranged on the two water transmission pipelines.
Preferably, the cold source of the constant temperature water tank is a water-cooling compression condensing unit which supplies heat by adopting an electric heating mode, an evaporating coil of the water-cooling compression condensing unit is immersed in water of the constant temperature water tank and exchanges heat by forced convection through a stirrer, and the water-cooling compression condensing unit is controlled by a cooling water circulating pump in a variable frequency mode.
Preferably, the air supply box body is also internally provided with a dry bulb temperature measuring point in the box and a wet bulb temperature measuring point in the box.
The invention has the beneficial effects that:
1. the calculation accuracy is high.
The calculation method is suitable for the research of a high-precision cooling control strategy of a high-temperature sensitive chip and the corresponding photoetching temperature control occasion, and can quickly determine the output percentage of the frequency converter of the surface cooler and the output percentage of the real-time electric heating device when the air conditioning box is in a cooling state by only providing a certain amount of basic temperature parameters and combining the conditions of air specific volume, air enthalpy value, air absolute humidity and the like during calculation, thereby realizing joint regulation and control and having accurate and high calculation precision.
2. The regulating performance is excellent.
The calculation method of the invention based on the processing characteristics of the high temperature sensitive chip can be independently used, and can rapidly realize the calculation of the output percentage of the electric heating device and the output percentage of the frequency converter of the surface air cooler on the basis of the current coarse temperature regulation and control of the existing airborne PID, thereby realizing the rapid and accurate cooling effect of the chip processing environment, meanwhile, the cooling state gradually changes along with the influence of each temperature parameter in a calculation formula, approaches to the set temperature, the regulation trend is more obvious, the output percentage of the frequency converter of the surface air cooler is mainly expressed as gradually not participating in the regulation and control any more, so that the temperature control effect is rapidly close to the ideal set temperature range, the optimal operation temperature regulation and control effect from the high temperature region to the set temperature region of the high temperature sensitive chip is realized, the defects of long regulation time, relatively coarse temperature control and need to reciprocally regulate temperature caused by the traditional PID coarse regulation technology are overcome, and the method has the characteristics of excellent regulation performance and high control precision.
3. The design method is quick and simple.
The calculation method can algebraically obtain the output percentage of the real-time electric heating device and the like by only inputting design parameters, has simple and quick calculation process, and also ensures the high efficiency and practicability in engineering calculation.
Drawings
Fig. 1 is a schematic diagram of the system of the present invention.
The actual correspondence between each label and the component name of the invention is as follows:
T cs1, a wind-damp ball temperature measuring point, T cg1, a wind-damp ball temperature measuring point, T hg1, a return air dry ball temperature measuring point, V1, a water regulating valve, EV, an electromagnetic switch valve, T cg2, and a wet ball temperature measuring point in the box, wherein the dry ball temperature measuring point in the box is T cs2;
a-static pressure cavity, b-temperature control cavity;
11-temperature control box body, 12-air supply box body, 13-air supply channel and 14-return air channel;
A 22-high efficiency filter;
31-an electric heating device, 32-a surface cooler and 33-a surface cooling water pump;
40-fans;
50-primary filter;
60-constant temperature water tank;
70-water-cooling compression condensing unit and 71-cooling water circulating pump.
Detailed Description
For ease of understanding, the specific structure and operation of the present invention will be further described herein with reference to fig. 1:
The volume of the air feeding box body 12 is 3+/-0.5 m 3. And the temperature control box 11 for air supply is designed as a whole. The temperature control box 11 comprises a primary filter 50, a surface cooler 32, an electric heating device 31, a fan 40, a flow mixer 21, a high-efficiency filter 22 and an air supply channel 13, wherein the high-efficiency filter 22 and the inner wall and the side wall of the top end of the temperature control box 11 are enclosed together to form a static pressure cavity a, and a space below the flow mixer 21 forms a temperature control cavity b. Meanwhile, the inlet temperature measuring point of the surface cooler and the outlet temperature measuring point of the surface cooler can be considered, in addition, the back air dry ball temperature measuring point is arranged behind the primary filter 50, and the air-out dry ball temperature measuring point and the air-out wet ball temperature measuring point are arranged in the air supply channel 13. The water inlet temperature of the surface cooler 32 needs to be precisely controlled and regulated, so that the water supply equipment of the surface cooler 32, namely the constant-temperature water tank 60, is also integrated in the system. The cold source of the constant temperature water tank 60 is a water-cooling compression condensing unit 70, and the heat source is an electric heating mode. In operation, the evaporating coil of the water-cooled compression condensing unit 70 is immersed in the water in the constant temperature water tank 60, and forced convection heat exchange is performed by the stirrer, so as to transfer the cold energy of the cold source to the water in the constant temperature water tank 60. Since the accuracy of controlling the water temperature in the constant temperature water tank 60 is very high, the cooling capacity of the water-cooled compression condensing unit 70 is required to be highly accurately controlled to the order of ten thousand, and the water-cooled compression condensing unit 70 is controlled by the cooling water circulation pump 71 in a variable frequency manner. When the variable-frequency water-cooled compression condensing unit 70 is used, the water inlet temperature and the water outlet temperature of the cooling water are monitored and regulated, the water inlet temperature and the water outlet temperature of the water-cooled compression condensing unit 70 are controlled, and the running frequency of the water-cooled compression condensing unit 70 is regulated by combining the variable frequency, so that the refrigerating capacity of the unit can be regulated more accurately until the regulation precision of ten thousand grades is achieved.
The water in the constant temperature water tank 60 is conveyed into the surface cooler 32 through the surface cooling water pump 33, so that the heat exchange requirement is finished. The water regulating valve V1 on the water inlet transmission pipeline is used for accurately regulating the water quantity entering the surface cooler 32, so that the entering cold quantity is controlled, and the cold quantity of the whole air supply system is accurately regulated. The electromagnetic switch valve EV is used for rapidly switching the waterway, because cold water transmission is more delayed than an electromagnetic valve if the valve is used for manual operation, when cold water is not needed to enter the surface cooler 32, water enters the surface cooler 32 for a few seconds, so that the cold energy of an air supply system is superfluous, the air supply temperature is abnormally increased or reduced, and the structure of the invention can avoid the problems.
The primary filter 50 and the high efficiency filter 22 are used to filter the circulating air to ensure that the supply air reaches the desired cleanliness. The above-mentioned mixed application of the present invention can greatly raise the flow velocity of the air flow, ensure uniform temperature of the wind field, and make the circulating air flow pass through the mixer 21 at a very high speed, so as to fully mix and agitate the circulating air flow, ensure uniform degree of the air flow when entering the high-efficiency filter 22, and fully utilize the filtering effect of the high-efficiency filter 22 to the greatest extent. Therefore, the invention can solve the contradiction between wind speed, wind field uniformity and filtering effect, and is perfect coupling between wind field uniformity and clean air supply products.
The system formed by the components of the invention has the advantages of structural characteristics and control modes, including:
① The air-out ball temperature measuring point T cg1 and the air-out ball temperature measuring point T cs1 of the system are arranged in the air supply channel 13, and the two temperature points are used for measuring and adjusting the heat and the cold input by the electric heating device 31 and the surface cooler 32. Meanwhile, the constant temperature control room is coupled with the clean room, and the constant temperature control room is relatively close to the surface cooler 32 and the electric heater, so that the adjustment speed is relatively high, and the measurement is accurate. In the processing area where the chip is placed in the air supply box 12, a dry ball temperature measuring point T cg2 in the box and a wet ball temperature measuring point T cs1 in the box are arranged for regulating and controlling the temperature in the box, the precision range can reach +/-0.01 ℃, and the two temperature points are arranged to be close to the processing point of the processing area as much as possible. According to the invention, the air-drying ball temperature measuring point T cg1, the air-drying ball temperature measuring point T cs1, the dry ball temperature measuring point T cg2 in the box and the wet ball temperature measuring point T cs2 in the box are respectively arranged, so that the adjusting speed and the adjusting precision can be greatly improved. The return air dry bulb temperature measuring point T hg1 is used for obtaining the real-time return air dry bulb temperature, the real-time air-out bulb temperature can be obtained through an air conditioner set air-out temperature measuring point sensor, the sensor is arranged at an air outlet of an air conditioner, and the air-out is discharged to a used space and is not repeated.
② Because the collection of the temperature of the dry ball in the box T cg2 and the wet ball in the box T cs2 has high precision and dense collection time, a large amount of data is generated in the collection of the temperature, the requirements on the configuration of the collector and the configuration of computer software are very high, and a very large hard disk is required, so that certain requirements on construction are generated. When the conventional equipment is supplied, after the air-supplying box body 12 is independently installed at the using position, the site construction is required, and the air-supplying temperature-control box body 11 is connected with the constant-temperature water tank 60 even by the water-cooling compression condensing unit 70 serving as a cold source. The air supply channel 13 and the return air channel 14 are usually constructed, installed and connected after the air supply box body 12 is positioned at a later stage, and a high-precision equipment manufacturing process is required, but obviously, when the construction quality is difficult to ensure, the problems of air leakage, air cooling leakage and the like can be caused, and the air supply precision is affected. The components are all integrated into a whole to form an integral modularized product, so that after the precision and standard of production and processing are ensured, the product leaves a factory to a client, and the high-precision air supply box body 12 can be used only by integrally positioning, so that the actual measurement effect is obvious.
Based on the above hardware structure, the actual control flow of the present invention will be described in the following examples, taking a specific high temperature sensitive chip as an object and a processing temperature of 23±0.3 ℃.
Examples:
The actual regulation and control flow of the invention is divided into coarse regulation logic and precise temperature control regulation steps endowed by the calculation method, the thinking is that when coarse regulation is not realized or the time is too slow, the system can cut into the precise temperature control regulation steps to assist in regulation, and the invention comprises the following steps:
1. Coarse tuning logic:
After the machine is started and operated for 30 seconds, calculating real-time heat Q q according to the real-time air-drying ball temperature, the real-time return air dry ball temperature and the air supply quantity, wherein:
the air supply rate is maintained at 750m 3/h, and a setting window of the air supply rate parameter needs to be opened, so that different air supply rate values can be input. The real-time air-drying ball temperature and the real-time return air dry ball temperature are taken from the installed high-precision platinum resistor. The water quantity is 0.7m 3/h when the surface cooling water pump 33 is started by default to 100%, and the inlet and outlet temperature of the surface cooler 32 is equal to the self-carried temperature of the water cooling compression condensing unit 70. The input cooling capacity of the surface cooler 32 is obtained through the water quantity and water inlet and outlet temperature difference, the maximum cooling capacity of the surface cooler 32 is Q C, and in the embodiment, Q C =1.2 kw is adopted.
In actual operation, the air supply quantity is 750m 3/h, the self-electrified heating quantity Q Z= 1.5.5 kW of the air conditioning box and the maximum cooling quantity Q C= 1.2.2 kW of the surface cooler can be dynamically input. In addition, when calculating the real-time heat Q q, since all are sensible heat, the formula used is q=cm Δt, where m is calculated by using the product of the air volume and the density corresponding to air, and specifically, in this embodiment, the formula is as follows:
according to the real-time air-dried ball temperature t out, the real-time return air dried ball temperature t in and the air supply quantity, the real-time heat Q q is calculated, for example:
Given t out=21℃;tin=24℃;Qm=750m3/h=0.208 m3/s, an air constant pressure specific heat of 1.005 kJ/(kg X K) and an air density of 1.29kg/m 3, then:
Qq=(tin-tout)×Qm×1.005×1.29=0.81kw=810w。
Subsequently, the output of each device is dynamically adjusted by the relationship of Q q、QZ and Q C, and as an example, t out =23 ℃, specifically includes:
Z1. when the temperature t out of the air-dried ball is less than 23 ℃ in real time, namely t sd＞tout, and
When Q q -1.5<0, the output percentage of the electric heating device is [ (Q Z-Qq)/1.5 ]. Times.100%, and the output percentage of the frequency converter of the surface cooler 32 is 0%;
When Q q -1.5>0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler 32 is as follows:
[(QZ-Qq)/ 1.2]×100%;
when Q q -1.5=0, the output percentage of the electric heating device is 40%, so as to neutralize the cooling capacity of the surface cooler 32, and the output percentage of the frequency converter of the surface cooler 32 is 50%, so as to exhaust the surface cooling water pump 33.
Z2. when the real-time air-dried ball temperature is >23 ℃, i.e. t sd＜tout, and
When Q q -1.5<0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler 32 is as follows:
[(QC-Qq)/1.2]×100%;
When Q q -1.5>0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler 32 is 100%;
When Q q -1.5=0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler 32 is 100%;
Z3. when air-dried ball temperature=23℃, i.e. t sd=tout, in real time, and
When Q q -1.5>0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler 32 is 100%;
When Q q -1.5<0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler 32 is 100%;
when Q q -1.5=0, the output percentage of the electric heating device is 40%, so as to neutralize the cooling capacity of the surface cooler 32, and the output percentage of the frequency converter of the surface cooler 32 is 50%, so as to exhaust the surface cooling water pump 33.
And in a certain period, such as 60s, after Z4. steps of operation, the temperature of the air-dried ball can be read once again, and the temperature of the return air dried ball can be calculated again, so that Q q is calculated again. When the real-time air-dried ball temperature is less than 23 ℃ and when the real-time air-dried ball temperature is more than 23 ℃, the operation is carried out according to the step Z1 or Z2 until t sd=tout or the difference value of the two is within the tolerance zone plus or minus 0.3 ℃ and is adjusted by self-contained PID by default.
2. And a precise temperature control and adjustment step:
Under the rough adjustment logic, if the difference values are continuously read twice (i.e. within 120 s) and the temperature of the air-dried balls is larger than 23 ℃ in real time, the trend of long-time overheat of the chip operation environment is shown, and the active accelerated cooling and the real-time accelerated temperature control are required to be carried out along with PID, and then a Z5 step, namely a precise temperature control and adjustment step is carried out, wherein the method specifically comprises the following steps:
Z5 taking t sd =23° as an example, firstly, it is necessary to determine And R, as follows:
Z51. when the real-time air-dried ball temperature t out =25 ℃, the real-time return air dried ball temperature t in =27℃:
as can be seen from the lookup table, h tin= 67.19kJ/kg;htout = 60.563kJ/kg;
According to the real-time air-dried ball temperature t out, vssout =0.864 m 3/kg and Xssout = 0.013913kg/kg;
Qm=750m3/h;
R is the lowest load node value of the electric heating device, taking r=360;
substitution calculations were as follows:
Visible >360;
at this time, the output percentage outc of the inverter of the real-time surface cooler and the output percentage out of the real-time electric heating device in the cooling state are calculated by the following formulas, respectively:
,
;
Wherein:
=10%;
tcout=12℃;tcin=7°C
Fcm100%=0.35m3/h;
r =1.165;
q wind-out electric heating 100% is the touch screen input value, i.e., the constant value is 1500W.
Substitution calculations were as follows:
,
;
Z52. when the real-time air-dried ball temperature t out =23.5 ℃, the real-time return air dried ball temperature t in =23.7 ℃):
As can be seen from the lookup table, h tin= 56.512kJ/kg;htout = 55.904kJ/kg;
According to the real-time air-dried ball temperature t out, vssout =0.858 m 3/kg and Xssout = 0.012689kg/kg;
Qm=750m3/h;R=360;
substitution calculations were as follows:
;
At this time, the output percentage outc =0% of the inverter of the real-time surface cooler is maintained, and the output percentage out of the real-time electric heating device in the cooling state is calculated separately from the following formula:
;
And then, after 60 seconds, repeatedly executing a round of operation of the step Z4, and selecting one operation between the step Z2 and the step Z5 as required at t sd＜tout so as to realize rapid and accurate cooling according to requirements, avoid the high-temperature sensitive chip from being in a high-temperature area for a long time and ensure that the high-temperature sensitive chip can perform temperature control processing within a set temperature range.
It will be understood by those skilled in the art that the present invention is not limited to the details of the foregoing exemplary embodiments, but includes the same or similar manner which may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description.
The technical sections of the present invention that are not described in detail are known in the art.
Claims (9)
1. The method for calculating the heat balance of the electric heating device in the cooling state is characterized by comprising the following steps of:
When (when) In the case of > R,
The output percentage outc of the frequency converter of the real-time surface cooler and the output percentage out of the real-time electric heating device in the cooling state are calculated respectively by the following steps:
outc =,
And out= ;
When (when)When R is less than or equal to R,
Outc =0% and the output percentage out of the real-time electric heating device in the cold state is calculated from the following formula:
out =;
Wherein:
h tin is the air enthalpy corresponding to the real-time return air dry bulb temperature, and the unit is kJ/kg;
h tout is the air enthalpy value corresponding to the temperature of the air-dried ball in real time, and the unit is kJ/kg;
Q m is the air supply quantity of the air conditioner, and the unit is m 3/h;
vssout is the specific volume of air at the temperature of the air-dried ball in real time, and the unit is m 3/kg;
Xssout is the absolute humidity of air at the temperature of the air-dried ball in real time, and the unit is kg/kg;
CT is the cold capacity overflow amount of the surface cooler, and the unit is percent;
R is the lowest load node value of the electric heating device;
t cout is the real-time outlet water temperature of chilled water, and the unit is DEG C;
t cin is the real-time inlet temperature of chilled water, and the unit is DEG C;
F cm100% is the flow rate of chilled water of the frequency converter of the surface cooler in the 100% output state, and the unit is m 3/h;
r is a calculation constant;
q wind-out electric heating 100% is the heating amount of the electric heating device of the air conditioning box in 100% output state, and the unit is W.
2. The adjusting method is characterized by comprising the following steps:
S1, setting the temperature of an air-dried ball by taking t sd as a setting value, and taking t out as the temperature of the air-dried ball in real time;
When t sd＞tout, the air conditioning box is in a heat supply state, when t sd＜tout, the air conditioning box is in a cold supply state, and the temperature of the air-dried balls is regulated in real time by using the PID in the system PLC by default in the two states until t sd=tout or the difference value of the two is in a tolerance zone;
s2, when the set time period is continuously monitored twice, the air conditioner is found to be in a cooling state, and the difference value exceeds the tolerance zone, according to the method for calculating the heat balance of the electric heating device in the cooling state as set forth in claim 1, the output percentage of the frequency converter of the surface cooler in real time and the output percentage of the electric heating device in real time are calculated, the purpose of active temperature control and adjustment is achieved, and then the step S1 is repeated.
3. The method of claim 2, wherein the tolerance zone is = + -0.3 ℃.
4. The method according to claim 2 or 3, wherein at t sd＞tout, the PID temperature control logic is:
A1. Calculating real-time heat Q q according to the real-time air-dried ball temperature, the real-time return air dry ball temperature and the air supply quantity;
A2. the electric heating quantity of the electric heating device of the air conditioner box is Q Z, the maximum cooling quantity of the surface cooler is Q C, and then:
When Q q-QZ is less than 0, the output percentage of the electric heating device is [ (Q Z - Qq）/ QC ]. 100%, the output percentage of the frequency converter of the surface cooler is 0%;
When Q q-QZ is more than 0, the output percentage of the electric heating device is 0 percent, and the output percentage of the frequency converter of the surface cooler is [ (Q Z- Qq）/QC ]. Times.100 percent;
When Q q-QZ =0, the output percentage of the electric heating device is 40%, and the output percentage of the frequency converter of the surface cooler is 50%.
5. The method according to claim 4, wherein at t sd＜tout, the PID temperature control logic is:
When Q q-QZ is less than 0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler is [ (Q C - Qq）/QC ]. Times.100%;
When Q q-QZ is more than 0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler is 100%;
When Q q-QZ =0, the output percentage of the electric heating device is 0%, and the output percentage of the frequency converter of the surface cooler is 100%.
6. The system is characterized by comprising a temperature control box body (11) and an air supply box body (12) which form an air conditioning box, wherein a circulating air path is formed between the temperature control box body (11) and the air supply box body (12) through an air supply channel (13) and an air return channel (14), a flow mixing device (21) and an efficient filter (22) are sequentially arranged at the top end of the temperature control box body (11) along the air flow direction, the efficient filter (22) and the inner wall and the side wall at the top end of the temperature control box body (11) jointly enclose to form a static pressure cavity (a), a space below the flow mixing device (21) forms a temperature control cavity (b), an electric heating device (31) and a surface air cooler (32) are adjacently arranged in the temperature control cavity (b) from top to bottom, a fan (40) for blowing air to the flow mixing device (21) is arranged above the electric heating device (31), an initial filter (50) is arranged in the air return channel (14), a wind-out ball temperature (cs1) and a wind-out ball temperature (cg1) are arranged in the air return channel (14), and a wind-out ball temperature (hg1) is arranged in the air return channel (14).
7. The system according to claim 6, wherein the water in the constant temperature water tank (60) is conveyed into the surface cooler (32) through a surface cooling water pump (33) positioned on a water inlet transmission pipeline, and is returned into the constant temperature water tank (60) through a water outlet transmission pipeline to fulfill the heat exchange requirement, a water regulating valve (V1) for accurately regulating the water quantity entering the surface cooler (32) is further arranged on the water inlet transmission pipeline, and a group of electromagnetic switch valves (EV) are respectively arranged on the two water transmission pipelines.
8. The system according to claim 7, wherein the cold source of the constant temperature water tank (60) is a water-cooled compression condensing unit (70) for supplying heat by adopting an electric heating mode, an evaporation coil of the water-cooled compression condensing unit (70) is immersed in water of the constant temperature water tank (60) and subjected to forced convection heat exchange through a stirrer, and the water-cooled compression condensing unit (70) is subjected to variable frequency control through a cooling water circulating pump (71).
9. The system according to claim 7 or 8, wherein an in-box dry bulb temperature measuring point (T cg2) and an in-box wet bulb temperature measuring point (T cs2) are also arranged in the air box body (12).
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