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CN119000857B - Fiber optic eddy current nondestructive testing device and testing method for coupled indentation testing - Google Patents

Fiber optic eddy current nondestructive testing device and testing method for coupled indentation testing Download PDF

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Publication number
CN119000857B
CN119000857B CN202411083173.4A CN202411083173A CN119000857B CN 119000857 B CN119000857 B CN 119000857B CN 202411083173 A CN202411083173 A CN 202411083173A CN 119000857 B CN119000857 B CN 119000857B
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module
eddy current
indentation
optical fiber
axis displacement
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CN119000857A (en
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赵忠毓
刘战强
王赵鑫
王兵
赵金富
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Shandong University
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Shandong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/9093Arrangements for supporting the sensor; Combinations of eddy-current sensors and auxiliary arrangements for marking or for rejecting
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0047Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes measuring forces due to residual stresses
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/9006Details, e.g. in the structure or functioning of sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40Investigating hardness or rebound hardness
    • G01N3/42Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/20Recycling

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  • General Physics & Mathematics (AREA)
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  • General Health & Medical Sciences (AREA)
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  • Health & Medical Sciences (AREA)
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  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)

Abstract

本发明公开了一种耦合压痕测试的光纤涡流无损检测装置及测试方法,涉及无损检测技术领域。包括:底板,支撑架与底板固定连接,支撑架的横梁与底板间隔设置,光纤涡流无损检测模块固定在横梁上,残余应力压痕检测模块固定在横梁上,光纤涡流/压痕检测功能切换模块固定在底板上,自适应夹具模块固定在光纤涡流/压痕检测功能切换模块远离底板的一端,光纤涡流无损检测模块、残余应力压痕检测模块、光纤涡流/压痕检测功能切换模块和自适应夹具模块均与控制模块电性连接。本发明提供的耦合压痕测试的光纤涡流无损检测装置,能够实现加工表面或亚表面碳纤维复合材料几何形貌、损伤缺陷以及残余应力等多参量的同步同位测试。

The present invention discloses a fiber optic eddy current nondestructive testing device and a testing method for coupled indentation testing, and relates to the technical field of nondestructive testing. It comprises: a base plate, a support frame fixedly connected to the base plate, a crossbeam of the support frame and the base plate spaced apart, a fiber optic eddy current nondestructive testing module fixed on the crossbeam, a residual stress indentation detection module fixed on the crossbeam, a fiber optic eddy current/indentation detection function switching module fixed on the base plate, an adaptive fixture module fixed on the end of the fiber optic eddy current/indentation detection function switching module away from the base plate, and the fiber optic eddy current nondestructive testing module, the residual stress indentation detection module, the fiber optic eddy current/indentation detection function switching module and the adaptive fixture module are all electrically connected to a control module. The fiber optic eddy current nondestructive testing device for coupled indentation testing provided by the present invention can realize synchronous co-location testing of multiple parameters such as geometric morphology, damage defects and residual stress of processed surface or sub-surface carbon fiber composite materials.

Description

Optical fiber eddy current nondestructive testing device and method for coupling indentation test
Technical Field
The invention relates to the technical field of nondestructive testing, in particular to an optical fiber eddy current nondestructive testing device and a testing method for coupling indentation testing.
Background
In recent years, various advanced composite materials represented by carbon fibers are widely applied to various industrial fields of aerospace aircrafts, automobiles, wind power generation and the like, and development of aerospace, national defense and military industry and automobile manufacturing are important guarantees of national strategy and social folk life, and the advanced composite materials are one of bottlenecks breaking through the development of the fields and are one of research hotspots at home and abroad at present.
However, the composite material is similar to the common material, and various damage defects such as defects of geometric shapes, cracks, residual stress and the like appear in the production and actual operation processes. Timely defect detection of composite materials is a key step for ensuring safe, reliable and high-performance application. Whereas, for defect damage assessment of composite surfaces or subsurface, nondestructive testing techniques developed in the last hundred years are certainly the ideal means of primary consideration. The nondestructive testing has the advantages of high speed, no damage, easy on-line integration and the like, and the technology can be used for qualitatively analyzing the defect types and quantitatively deducing the relevant characteristics of the defects, so that the nondestructive testing becomes one of the main technical means for testing and characterizing the microscopic damage and failure behavior prediction of the composite material.
Meanwhile, with the development of indentation detection technology, an indentation method-based residual stress detection technology is developed, and the method is a method for evaluating the internal residual stress of the material surface by carrying out an indentation test on the material surface. The method has the advantages of simple operation, non-destructive property and the like, and is widely applied to the fields of material science and engineering.
However, although the types of nondestructive testing techniques which can be used for composite materials and are developed to be mature are not few, each technique has specific application range and advantages and disadvantages, a single method is difficult to realize the detection of various types of defects, the research of the online nondestructive testing technique for the processing surface or subsurface of the composite material shows that the output parameters are single, and the multi-parameter synchronous parity testing for the geometric shape, damage defects, residual stress and the like of the carbon fiber composite material facing the processing surface or subsurface is difficult to realize. Therefore, the processing and manufacturing precision of the advanced composite material and the service durability and stability of complex working conditions are limited, and the deep research work of the advanced nondestructive testing technology in a plurality of key fields is severely restricted.
Therefore, the design and development of nondestructive testing instruments for synchronous co-location testing of multiple parameters such as geometric shapes, damage defects, residual stress and the like of composite materials are key points of hot spots and technological breakthroughs in the field of composite material damage detection.
Disclosure of Invention
In view of the above, the invention provides an optical fiber eddy current nondestructive testing device for coupling indentation test, which can realize synchronous parity testing of geometric morphology, damage defect, residual stress and other parameters of a processed surface or subsurface carbon fiber composite material, and adopts the following technical scheme:
The invention provides a fiber vortex nondestructive testing device for coupling indentation test, which comprises:
A bottom plate;
The support frame is fixedly connected with the bottom plate, and the cross beam of the support frame is arranged at intervals with the bottom plate;
the optical fiber eddy current nondestructive testing module is fixed on the cross beam and used for detecting the geometric shape and internal damage defects of the surface of the workpiece;
the residual stress indentation detection module is fixed on the cross beam and used for detecting the residual stress in the workpiece;
the optical fiber vortex/indentation detection function switching module is fixed on the bottom plate and used for adjusting the position of a workpiece;
The self-adaptive clamp module is fixed at one end of the optical fiber vortex/indentation detection function switching module, which is far away from the bottom plate, and clamps a workpiece;
The optical fiber eddy current nondestructive testing module, the residual stress indentation testing module, the optical fiber eddy current/indentation testing function switching module and the self-adaptive clamp module are electrically connected with the control module.
Further, the optical fiber eddy current nondestructive testing module comprises a Z-axis displacement platform I and an optical fiber eddy current nondestructive testing unit, wherein the Z-axis displacement platform I is fixed on the cross beam, the optical fiber eddy current nondestructive testing unit is fixed on the Z-axis displacement platform I, and the Z-axis displacement platform I drives the optical fiber eddy current nondestructive testing unit to move in the vertical direction.
Further, the Z-axis displacement platform I comprises a servo motor II, a coupler II, a ball screw module II, a Z-axis displacement platform nut seat I, a guide rail slide block module II and a Z-axis displacement platform base I, wherein the output end of the servo motor II is connected with the coupler II, the output end of the coupler II is connected with the ball screw module II, the ball screw module II and the coupler II are arranged inside the Z-axis displacement platform base I and are rotationally connected with the Z-axis displacement platform base I, the Z-axis displacement platform nut seat I is rotationally connected with the ball screw module II, the guide rail slide block module II is fixed on the Z-axis displacement platform base I, the Z-axis displacement platform nut seat I slides along the guide rail slide block module II, the Z-axis displacement platform base I is fixed on a cross beam, and the optical fiber nondestructive vortex detection unit is fixedly connected with the Z-axis displacement platform nut seat I.
Further, the optical fiber eddy current nondestructive testing unit comprises a flexible hinge I, a piezoelectric stack I, a flexible hinge gasket, an inner hexagonal socket head cap screw, a hexagonal nut, a clamping probe base, a clamping probe cover plate and a composite type detection probe, wherein the flexible hinge I is of a hollow structure, the flexible hinge gasket is installed at two ends of the flexible hinge I, the piezoelectric stack I is arranged in the flexible hinge I, the inner hexagonal socket head cap screw penetrates through the flexible hinge I and is fixedly connected with the flexible hinge I through the hexagonal nut, one end of the flexible hinge I is fixedly connected with a Z-axis displacement table nut seat I, the other end of the flexible hinge I is fixedly connected with the clamping probe base, the clamping probe cover plate is matched with the clamping probe base to clamp the composite type detection probe, and the clamping probe cover plate is detachably connected with the clamping probe base.
Further, limit travel switches II are arranged at two ends of the displacement table base I.
Further, the combined type detection probe comprises an optical fiber probe and an eddy current coil, the eddy current coil and the optical fiber probe are coaxially arranged, one end, far away from the eddy current coil, of the optical fiber probe is clamped by the clamping probe base and the clamping probe cover plate, and the optical fiber probe and the piezoelectric stack I are electrically connected with the control module.
Further, the residual stress indentation detection module comprises a Z-axis displacement platform II and a residual stress detection unit, wherein the Z-axis displacement platform II comprises a servo motor III, a coupler III, a ball screw module III, a Z-axis displacement platform nut seat II, a guide rail sliding block module III and a Z-axis displacement platform base II, the output end of the servo motor III is connected with the coupler III, the output end of the coupler III is connected with the ball screw module III, the ball screw module III and the coupler III are arranged in the Z-axis displacement platform base II and are in rotary connection with the Z-axis displacement platform base II, the Z-axis displacement platform nut seat II is in rotary connection with the ball screw module III, the guide rail sliding block module III is fixed on the Z-axis displacement platform base II, the Z-axis displacement platform nut seat II slides along the guide rail sliding block module III, the Z-axis displacement platform base II is fixed on a cross beam, and the optical fiber vortex nondestructive detection unit is fixedly connected with the Z-axis displacement platform nut seat II.
Further, the residual stress detection unit comprises a small manual displacement table, a flexible hinge II, a piezoelectric stack II, a hexagon head bolt, a force sensor, a displacement sensor base, a capacitance displacement sensor, a cylindrical pin I, a cylindrical pin II, a displacement measuring plate, an indentation head sleeve and an indentation head, wherein the small manual displacement table is fixed on one side of a Z-axis displacement table nut seat II, the flexible hinge II is installed and fixed on one end of the Z-axis displacement table nut seat II away from the Z-axis displacement table base II, the piezoelectric stack II is installed at the middle hollow position of the flexible hinge II, one end of the flexible hinge II is screwed into the hexagon head bolt, the displacement sensor base is fixed on the small manual displacement table, the capacitance displacement sensor is installed in a through hole of the displacement sensor base through the cylindrical pin II, one end of the force sensor is in threaded connection with one end of the flexible hinge away from the hexagon head sleeve, the other end of the force sensor is in threaded connection with the indentation head sleeve, the displacement measuring plate is arranged between the indentation head and the force sensor, and the indentation head is fixed on one end of the force sensor away from the force sensor through the cylindrical pin I.
Further, the self-adaptive clamp module comprises an angle position table module, a connecting plate, a fractal vice and a detection workpiece, wherein one side of the angle position table module is fixed on the optical fiber vortex/indentation detection function switching module, the other side of the angle position table module is connected to the connecting plate, the fractal vice is fixed on the other side of the connecting plate, the fractal vice clamps and positions the detection workpiece, the angle position table module comprises an upper electric angle position table I and a lower electric angle position table II, the two electric angle position tables are arranged in a crisscross manner, one end of the upper electric angle position table I, which is far away from the lower electric angle position table II, is connected with the connecting plate, and one end of the lower electric angle position table II, which is far away from the upper electric angle position table I, is fixed on the optical fiber vortex/indentation detection function switching module.
Further, a specific test method of the optical fiber eddy current nondestructive testing device for coupling indentation test,
The method comprises the steps that S1, a detection workpiece is clamped on a fractal vice, an industrial control upper computer of a control module sends out a signal through a motion controller to control an optical fiber vortex/indentation detection function switching module to move horizontally, so that the detection workpiece reaches a target detection position, and the industrial control upper computer of the control module sends out a signal through the motion controller to control an optical fiber vortex nondestructive detection module and a residual stress indentation detection module to perform large-range rough displacement in the vertical direction, so that a composite detection probe reaches the working range, and an indentation head reaches the surface of the workpiece;
S2, the displacement signals acquired by the optical fiber probes in the composite detection probes are read into a signal acquisition card after being processed by a charge amplifier of a control module, then the signals of the signal acquisition card are transmitted to an industrial control upper computer of the control module, and the industrial control upper computer analyzes the displacement feedback signals and then sends out precise rotary motion instructions to the angular platform module;
s3, in the process of scanning the workpiece with the complex geometric shape, the industrial control upper computer finishes analysis of the displacement signal acquired by the optical fiber probe and then sends a feedback control signal to the piezoelectric stack I through the piezoelectric amplifier of the control module, so that the flexible hinge I generates micro motion, and the distance between the composite detection probe and the surface of the workpiece is adjusted;
S4, analyzing the displacement feedback signal of the optical fiber probe in the scanning process by the industrial control upper computer to obtain the damage condition of the surface defect;
S5, aiming at the detection of the residual stress in a detected workpiece, an indentation method is adopted, a capacitance displacement sensor is firstly adjusted to be within a range through a small manual displacement table, a moment force sensor of an indentation head touching the surface of the detected workpiece acquires load signal change, the load signal is amplified by a charge amplifier and then read into a signal acquisition card, the load signal is then transmitted to an industrial control upper computer, the industrial control upper computer sends a motion instruction to a Z-axis displacement platform II to stop the motion instruction to the motion controller after analysis, then the capacitance displacement sensor sends a displacement feedback signal, the signal is transmitted to the industrial control upper computer in the same way, the upper computer analyzes the signal and then sends a feedback control signal to a piezoelectric stack II through a piezoelectric amplifier to control the indentation head to continuously micro, meanwhile, the force sensor continuously monitors the load change condition of the indentation head, the load feedback signal is amplified by the charge amplifier and then read into a signal acquisition card, the signal acquisition card is transmitted to the industrial control upper computer, the load displacement curve of a material is obtained through calculation and analysis of the industrial control upper computer, and the specific connection between the residual stress and indentation response parameters is established, and the residual stress is qualitatively and quantitatively detected;
And S6, aiming at the detection of the damage defect and the verification of the residual stress in the detected workpiece, a signal generator generates a high-frequency waveform, the waveform passes through a power amplifier and then sends out an excitation signal through an eddy current coil, and the eddy current coil processes the received eddy current signal through the power amplifier and a phase-locked amplifier and then reads the eddy current signal into a signal acquisition card, and finally the eddy current signal is transmitted to relevant analysis software of an industrial control upper computer for calculation and analysis.
Compared with the prior art, the optical fiber eddy current nondestructive testing device for coupling indentation testing provided by the invention detects the geometric shape of the surface of a workpiece through the optical fiber eddy current nondestructive testing module, detects the residual stress in the workpiece through the residual stress indentation testing module, adjusts the position of the workpiece through the optical fiber eddy current/indentation testing function switching module, clamps the workpiece through the self-adaptive clamp module, and controls the optical fiber eddy current nondestructive testing module, the residual stress indentation testing module, the optical fiber eddy current/indentation testing function switching module and the self-adaptive clamp module through the control module so as to realize synchronous parity testing of the geometric shape, damage defects, residual stress and other parameters of the processed surface or subsurface carbon fiber composite material.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a perspective view of a fiber optic eddy current nondestructive testing device for coupling indentation testing provided by the invention;
FIG. 2 is a front view of a fiber optic eddy current non-destructive testing device for coupling indentation testing according to the present invention;
FIG. 3 is a side view of a fiber optic eddy current non-destructive testing apparatus for coupling indentation testing according to the present invention;
FIG. 4 is a top view of a fiber optic eddy current non-destructive testing apparatus for coupling indentation testing according to the present invention;
FIG. 5 is a front view of an adaptive clamp module in a fiber optic eddy current nondestructive testing device for coupling indentation testing provided by the present invention;
FIG. 6 is a front view of a fiber vortex nondestructive testing module in a fiber vortex nondestructive testing device for coupling indentation testing provided by the invention;
FIG. 7 is a front view of a residual stress indentation detection module in a fiber optic eddy current nondestructive testing device for coupling indentation testing provided by the invention;
FIG. 8 is an exploded view of a fiber optic eddy current nondestructive testing unit in a fiber optic eddy current nondestructive testing device for coupling indentation testing provided by the invention;
FIG. 9 is a front view of a composite probe in a fiber optic eddy current nondestructive testing device for coupling indentation testing provided by the present invention;
FIG. 10 is an exploded view of a residual stress detection unit in a fiber optic eddy current nondestructive testing device for coupling indentation testing provided by the present invention;
FIG. 11 is a schematic diagram of a detection method of a fiber eddy current nondestructive detection device for coupling indentation test provided by the invention.
In the figure, 1, an optical fiber vortex nondestructive testing module; 11, Z-axis displacement platform I;111, a servo motor II;112, coupling II, 113, ball screw module II, 114, guide rail slide block module II, 115, Z-axis displacement table nut seat I, 116, limit travel switch II, 117, Z-axis displacement table seat I, 12, optical fiber vortex nondestructive detection unit, 121, flexible hinge I, 122, hexagonal nut, 123, piezoelectric stack I, 124, flexible hinge gasket, 125, hexagon socket head cap screw, 126, clamping probe cover plate, 127, composite detection probe, 1271, optical fiber probe, 1272, eddy current coil, 128, clamping probe seat, 2, residual stress indentation detection module, 21, Z-axis displacement table II, 211, servo motor III, 212, coupling III, 213, ball screw module III, 214, guide rail slide block module III, 215, Z-axis displacement table nut seat II, 216, limit travel switch III, 217, Z-axis displacement table seat II, 22, residual stress detection unit, 221, flexible hinge II, 222, hexagonal bolt, 223, piezoelectric stack II, 224, small-sized manual displacement table, 225, displacement sensor seat, 226, capacitance displacement table, 227, pin roll-on pin roll-on pin roll on, 33, 12, coupling III, 33, 16, guide shaft roll axis displacement table seat III, Z-axis displacement table seat III, Z, base, base, base roll, seat, base, seat, seat, base, seat, base, base, seat, the device comprises an encoder bracket 338, an encoder 339, a linear grating ruler 3310, a limit travel switch I, a 4, an adaptive clamp module 41, an angle table module 411, an electric angle table II, 412, an electric angle table I, 42, a connecting plate 43, a fractal vice 44, a detection workpiece 5, a cross beam 6 and a bottom plate.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-11, an embodiment of the invention discloses a fiber vortex nondestructive testing device for coupling indentation test, comprising:
A bottom plate 6;
The support frame is fixedly connected with the bottom plate 6, and the cross beam 5 of the support frame is arranged at intervals with the bottom plate 6;
The optical fiber eddy current nondestructive testing module 1 is fixed on the cross beam 5 and is used for detecting the surface geometric morphology and internal damage defects of the workpiece 44;
The residual stress indentation detection module 2 is fixed on the cross beam 5 and is used for detecting the residual stress in the workpiece 44;
The optical fiber vortex/indentation detection function switching module 3, wherein the optical fiber vortex/indentation detection function switching module 3 is fixed on the bottom plate 6 for adjusting the position of the detection workpiece 44;
The self-adaptive clamp module 4 is fixed at one end of the optical fiber vortex/indentation detection function switching module 3 far away from the bottom plate 6 and clamps the detection workpiece 44;
The control module, the optical fiber vortex nondestructive testing module 1, the residual stress indentation testing module 2, the optical fiber vortex/indentation testing function switching module 3 and the self-adaptive clamp module 4 are electrically connected with the control module.
In some embodiments, the optical fiber eddy current nondestructive testing module 1 comprises a Z-axis displacement platform I11 and an optical fiber eddy current nondestructive testing unit 12, wherein the Z-axis displacement platform I11 is fixed on the beam 5, the optical fiber eddy current nondestructive testing unit 12 is fixed on the Z-axis displacement platform I11, and the Z-axis displacement platform I11 drives the optical fiber eddy current nondestructive testing unit 12 to move in the vertical direction.
The Z-axis displacement platform I11 comprises a servo motor II111, a coupler II112, a ball screw module II113, a Z-axis displacement platform nut seat I115, a guide rail slide block module II114 and a Z-axis displacement platform base I117, wherein the output end of the servo motor II111 is connected with the coupler II112, the output end of the coupler II112 is connected with the ball screw module II113, the ball screw module II113 and the coupler II112 are arranged inside the Z-axis displacement platform base I117 and are rotationally connected with the Z-axis displacement platform base I117, the Z-axis displacement platform nut seat I115 is rotationally connected with the ball screw module II113, the guide rail slide block module II114 is fixed on the Z-axis displacement platform base I117, the Z-axis displacement platform nut seat I115 slides along the guide rail slide block module II114, the Z-axis displacement platform base I117 is fixed on the cross beam 5, and the optical fiber vortex nondestructive testing unit 12 is fixedly connected with the Z-axis displacement platform nut seat I115.
The optical fiber eddy current nondestructive testing unit 12 comprises a flexible hinge I121, a piezoelectric stack I123, a flexible hinge gasket 124, a hexagon socket head cap screw 125, a hexagonal nut 122, a clamping probe base 128, a clamping probe cover plate 126 and a composite type testing probe 127, wherein the flexible hinge I121 is of a hollow structure, the flexible hinge gasket 124 is installed at two ends of the flexible hinge I121, the piezoelectric stack I123 is arranged in the flexible hinge I121, the hexagon socket head cap screw 125 penetrates through the flexible hinge I121 and is fixedly connected with the flexible hinge I121 through the hexagonal nut 122, one end of the flexible hinge I121 is fixedly connected with a Z-axis displacement table nut seat I115, the other end of the flexible hinge I is fixedly connected with the clamping probe base 128, the clamping probe cover plate 126 is matched with the clamping probe base 128 to clamp the composite type testing probe 127, and the clamping probe cover plate 126 is detachably connected with the clamping probe base 128.
In some embodiments, limit travel switches II116 are arranged at two ends of the displacement table base I.
In some embodiments, the servo motor II111 drives the Z-axis displacement table nut seat I115 and the optical fiber eddy current nondestructive testing unit 12 to perform rough large-stroke linear displacement in the vertical direction, and the two limit travel switches II116 are fixed on two sides of the Z-axis displacement table seat I117, so as to limit the moving range of the guide rail slider module II114, and avoid interference and collision.
The flexible hinge I121 is driven by the piezoelectric stack I123 to generate micro motion, so that the displacement of the composite detection probe 127 in the Z-axis direction is precisely adjusted, the lifting distance of the composite detection probe 127 is ensured to be constant, and the problems of inherent lifting effect and poor adaptability in the eddy current detection of workpieces with complex geometric shapes are solved.
The piezoelectric stack I123 is tightly screwed and fixed through the hexagonal nut 122 to apply pretightening force, the clamping probe base 128 and the clamping probe cover plate 126 clamp and fix the composite detection probe 127, and damage scanning work of the detection workpiece 44 is realized through the composite detection probe 127.
In some embodiments, the composite detection probe 127 includes a fiber optic probe 1271 and an eddy current coil 1272, the eddy current coil 1272 is disposed coaxially with the fiber optic probe, one end of the fiber optic probe remote from the eddy current coil 1272 is clamped by the clamping probe base 128 and the clamping probe cover plate 126, and the fiber optic probe 1271 and the piezoelectric stack I123 are electrically connected to the control module.
In some embodiments, the residual stress indentation detection module 2 comprises a Z-axis displacement platform II21 and a residual stress detection unit 22, wherein the Z-axis displacement platform II21 comprises a servo motor III211, a coupler III212, a ball screw module III213, a Z-axis displacement platform nut seat II215, a guide rail sliding block module III214 and a Z-axis displacement platform base II217, the output end of the servo motor III211 is connected with the coupler III212, the output end of the coupler III212 is connected with the ball screw module III213, the ball screw module III213 is arranged in the Z-axis displacement platform base II217 and is in rotary connection with the Z-axis displacement platform base II217, the Z-axis displacement platform nut seat II215 is in rotary connection with the ball screw module III213, the guide rail sliding block module III214 is fixed on the Z-axis displacement platform base II217, the Z-axis displacement platform nut seat II215 slides along the guide rail sliding block module III214, the Z-axis displacement platform base II217 is fixed on the cross beam 5, and the optical fiber vortex nondestructive detection unit 12 is fixedly connected with the Z-axis displacement platform nut seat II 215.
The residual stress detection unit 22 comprises a small manual displacement table 224, a flexible hinge II221, a piezoelectric stack II223, a hexagon head bolt 222, a force sensor 2212, a displacement sensor base 225, a capacitance displacement sensor 226, a cylindrical pin I2210, a cylindrical pin II227, a displacement plate 228, an indentation head sleeve 2211 and an indentation head 229, wherein the small manual displacement table 224 is fixed on one side of a Z-axis displacement table nut seat II215, the flexible hinge II221 is installed and fixed on one end of the Z-axis displacement table nut seat II215 far away from the Z-axis displacement table base II217, the piezoelectric stack II223 is installed at the middle hollow position of the flexible hinge II221, one end of the flexible hinge II221 is screwed into the hexagon head bolt 222, the displacement sensor base 225 is fixed on the small manual displacement table 224, one end of the force sensor 2212 is in a through hole of the displacement sensor base 225 through the cylindrical pin II227, the other end of the force sensor 2212 is in threaded connection with one end of the flexible hinge far away from the hexagon head sleeve 2211 through the force sensor, the displacement plate 228 is arranged between the indentation head 229 and 229, and one end of the indentation head sleeve 2212 far away from the indentation head sleeve 2210 through the cylindrical pin 1.
In some embodiments, the manual control small-sized manual displacement table 224 adjusts the distance between the probe of the capacitive displacement sensor 226 and the displacement plate 228 within the range of the capacitive displacement sensor 226, the piezo-electric stack II223 drives the flexible hinge II221 to perform micro motion, so as to control the indentation head 229 to produce an indentation on the surface of the detection workpiece 44 in cooperation with the displacement signal measured by the capacitive displacement sensor 226, and the force sensor 2212 captures the change of the load signal at the moment the indentation head 229 contacts the surface of the detection workpiece 44, and obtains the corresponding values of the displacement and the load of the indentation head 229 in cooperation with the capacitive displacement sensor 226 in the indentation production process.
In some embodiments, the fiber vortex/indentation detection function switching module 3 includes an X-axis linear motion platform 31, a Y-axis linear motion platform 33 and a support platform 32, the Y-axis linear motion platform 33 includes a servo motor I331, a coupler I332, a ball screw module I333, a Y-axis displacement platform base 334, a Y-axis displacement platform nut base 335, a guide rail slider module I336, an encoder bracket 337, an encoder 338 and a linear grating scale 339, an output end of the servo motor I331 is connected with an input end of the coupler I332, an output end of the coupler is connected with the ball screw module I333, the Y-axis displacement platform nut base 335 is matched with the ball screw module I333 and the guide rail slider module I336 to realize sliding, the encoder bracket 337 is mounted on the Y-axis displacement platform nut base 335, the encoder 338 is mounted on the encoder bracket 337, the linear grating scale 339 is mounted on a stroke end of the Y-axis displacement platform base 334, displacement data of the workpiece 44 is detected by the encoder 338, the Y-axis displacement platform base 334 is connected with the X-axis displacement platform base 32 through the X-axis displacement platform base 321 and the support platform base 32, and the Y-axis displacement platform base 33 is connected with the support platform 32 through the Y-axis displacement platform base 321.
The linear displacement of the parts mounted on the nut seat 335 of the Y-axis displacement table in the X-axis direction is realized by the X-axis linear movement platform 31, the load is supported by the supporting platform 32, and the displacement of the self-adaptive clamp module 4 in the Y-axis direction is realized by the connection of the Y-axis linear movement platform 33 and the self-adaptive clamp module 4 through the nut seat 335 of the Y-axis displacement table.
In some embodiments, the adaptive fixture module 4 includes an angular stage module 41, a connecting plate 42, a fractal vice 43 and a detection workpiece 44, one side of the angular stage module 41 is fixed on the optical fiber vortex/indentation detection function switching module 3, the other side is connected on the connecting plate 42, the fractal vice 43 is fixed on the other side of the connecting plate 42, the fractal vice 43 clamps and positions the detection workpiece 44, the angular stage module 41 includes an upper electric angular stage I412 and a lower electric angular stage II411, the two electric angular stages are disposed in a crisscross manner, one end of the upper electric angular stage I412, which is far from the lower electric angular stage II411, is connected with the connecting plate 42, and one end of the lower electric angular stage II411, which is far from the upper electric angular stage I412, is fixed on the optical fiber vortex/indentation detection function switching module 3.
In some embodiments, the angular stage module 41 achieves angular adjustment of the inspection workpiece 44, minimizes the distance between the composite inspection probe 127 and the surface of the inspection workpiece 44 in both XZ and YZ planes, and solves the problem of inclination of the mounting angle of the composite inspection probe 127.
Limit travel switches I3310 are arranged at two ends of the Y-axis displacement table base 334.
Limit travel switches III216 are arranged at two ends of the Z-axis displacement table base II 217.
The method comprises the following steps of S1, clamping a detection workpiece 44 on a fractal vice 43, wherein an industrial control upper computer of a control module sends out a signal through a motion controller to control an optical fiber vortex/indentation detection function switching module 3 to move horizontally, so that the detection workpiece 44 reaches a target detection position, and the industrial control upper computer of the control module sends out a signal through the motion controller of the control module to control an optical fiber vortex nondestructive detection module 1 and a residual stress indentation detection module 2 to perform large-range rough displacement in the vertical direction, so that a composite detection probe 127 reaches within a working range, and an indentation head 229 reaches the surface of the workpiece;
S2, the displacement signals acquired by the optical fiber probe 1271 in the composite detection probe 127 are read into a signal acquisition card of the control module after being processed by a charge amplifier of the control module, then the signals of the signal acquisition card are transmitted to an industrial control upper computer of the control module, and the industrial control upper computer analyzes the displacement feedback signals and then sends out precise rotary motion instructions to the angular position table module 41, so that the distance between the composite detection probe 127 and the surface of the detection workpiece 44 in two planes of XZ and YZ is minimized, and the problem of inclination of the probe installation angle is solved;
S3, in the process of scanning the workpiece with the complex geometric shape, the industrial control upper computer finishes analysis of the displacement signal acquired by the optical fiber probe 1271 and then sends a feedback control signal to the piezoelectric stack I123 through the piezoelectric amplifier of the control module, so that the flexible hinge I121 generates micro motion, and the distance between the composite detection probe 127 and the surface of the workpiece is adjusted;
S4, analyzing the displacement feedback signal of the optical fiber probe 1271 in the scanning process by an industrial control upper computer to obtain the damage condition of the surface defect;
s5, aiming at the detection of the residual stress in the detected workpiece 44, an indentation method is adopted, a capacitance displacement sensor 226 is firstly regulated to be within a range through a small manual displacement table 224, an indentation head 229 is contacted with an instant force sensor 2212 on the surface of the detected workpiece 44 to acquire load signal change, the load signal is amplified by a charge amplifier and then read into a signal acquisition card, the load signal is then transmitted to an industrial control upper computer, the industrial control upper computer sends a motion instruction to a Z-axis displacement platform II21 to stop the motion of the Z-axis displacement platform, a displacement feedback signal is then sent by the capacitance displacement sensor 226, the signal is transmitted to the industrial control upper computer in the same way, a feedback control signal is sent to a piezoelectric stack II223 through a piezoelectric amplifier after the signal is analyzed by the upper computer, the indentation head 229 is controlled to continuously micro-move, meanwhile, the force sensor 2212 continuously monitors the load change condition of the indentation head 229, the load feedback signal is read into a signal acquisition card after being amplified by the charge amplifier, the load signal is then transmitted to the industrial control upper computer, a load displacement curve of a material is obtained through calculation and analysis of the industrial control upper computer, and the specific relation between the residual stress and indentation response parameters is established, and the residual stress is quantitatively detected;
S6, aiming at the detection of the damage defect and the verification of the residual stress in the detected workpiece 44, a signal generator generates a high-frequency waveform, the waveform passes through a power amplifier and then sends out an excitation signal through an eddy current coil 1272, and the eddy current coil 1272 processes the received eddy current signal through the power amplifier and a lock-in amplifier and then reads the eddy current signal into a signal acquisition card, and finally the signal acquisition card is transmitted to relevant analysis software of an industrial control upper computer for calculation and analysis.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (5)

1.一种耦合压痕测试的光纤涡流无损检测装置,其特征在于,包括:1. An optical fiber eddy current nondestructive testing device coupled with indentation testing, characterized in that it comprises: 底板;Base plate; 支撑架,所述支撑架与所述底板固定连接,所述支撑架的横梁与所述底板间隔设置;A support frame, wherein the support frame is fixedly connected to the bottom plate, and a crossbeam of the support frame is spaced apart from the bottom plate; 光纤涡流无损检测模块,所述光纤涡流无损检测模块固定在所述横梁上,以用于检测工件表面几何形貌及内部损伤缺陷;An optical fiber eddy current nondestructive testing module, which is fixed on the crossbeam to detect the surface geometry and internal damage defects of the workpiece; 残余应力压痕检测模块,所述残余应力压痕检测模块固定在所述横梁上,以用于检测工件内部残余应力;A residual stress indentation detection module, wherein the residual stress indentation detection module is fixed on the crossbeam to detect the residual stress inside the workpiece; 光纤涡流或压痕检测功能切换模块,所述光纤涡流或压痕检测功能切换模块固定在所述底板上,以用于调节工件的位置;An optical fiber eddy current or indentation detection function switching module, wherein the optical fiber eddy current or indentation detection function switching module is fixed on the bottom plate to adjust the position of the workpiece; 自适应夹具模块,所述自适应夹具模块固定在所述光纤涡流或压痕检测功能切换模块远离所述底板的一端并对工件进行夹持;An adaptive fixture module, wherein the adaptive fixture module is fixed to an end of the optical fiber eddy current or indentation detection function switching module away from the base plate and clamps the workpiece; 控制模块,所述光纤涡流无损检测模块、残余应力压痕检测模块、光纤涡流或压痕检测功能切换模块和自适应夹具模块均与所述控制模块电性连接;A control module, the optical fiber eddy current nondestructive testing module, the residual stress indentation testing module, the optical fiber eddy current or indentation testing function switching module and the adaptive fixture module are all electrically connected to the control module; 所述光纤涡流无损检测模块包括Z轴位移平台Ⅰ和光纤涡流无损检测单元,所述Z轴位移平台Ⅰ固定在所述横梁上,所述光纤涡流无损检测单元固定在所述Z轴位移平台Ⅰ上,所述Z轴位移平台Ⅰ带动所述光纤涡流无损检测单元在竖直方向运动;The optical fiber eddy current nondestructive testing module includes a Z-axis displacement platform I and an optical fiber eddy current nondestructive testing unit, wherein the Z-axis displacement platform I is fixed on the crossbeam, and the optical fiber eddy current nondestructive testing unit is fixed on the Z-axis displacement platform I, and the Z-axis displacement platform I drives the optical fiber eddy current nondestructive testing unit to move in the vertical direction; 所述Z轴位移平台Ⅰ包括:伺服电机Ⅱ、联轴器Ⅱ、滚珠丝杠模组Ⅱ、Z轴位移台螺母座Ⅰ、导轨滑块模组Ⅱ和Z轴位移台底座Ⅰ,所述伺服电机Ⅱ的输出端与所述联轴器Ⅱ连接,所述联轴器Ⅱ的输出端与所述滚珠丝杠模组Ⅱ连接,所述滚珠丝杠模组Ⅱ与所述联轴器Ⅱ设置在所述Z轴位移台底座Ⅰ内部并与所述Z轴位移台底座Ⅰ转动连接,所述Z轴位移台螺母座Ⅰ与所述滚珠丝杠模组Ⅱ转动连接,所述导轨滑块模组Ⅱ固定在所述Z轴位移台底座Ⅰ上,所述Z轴位移台螺母座Ⅰ沿所述导轨滑块模组Ⅱ滑动,所述Z轴位移台底座Ⅰ固定在所述横梁上,所述光纤涡流无损检测单元与所述Z轴位移台螺母座Ⅰ固定连接;The Z-axis displacement platform I comprises: a servo motor II, a coupling II, a ball screw module II, a Z-axis displacement platform nut seat I, a guide rail slider module II and a Z-axis displacement platform base I, the output end of the servo motor II is connected to the coupling II, the output end of the coupling II is connected to the ball screw module II, the ball screw module II and the coupling II are arranged inside the Z-axis displacement platform base I and are rotatably connected to the Z-axis displacement platform base I, the Z-axis displacement platform nut seat I is rotatably connected to the ball screw module II, the guide rail slider module II is fixed on the Z-axis displacement platform base I, the Z-axis displacement platform nut seat I slides along the guide rail slider module II, the Z-axis displacement platform base I is fixed on the crossbeam, and the optical fiber eddy current nondestructive testing unit is fixedly connected to the Z-axis displacement platform nut seat I; 所述光纤涡流无损检测单元包括柔性铰链Ⅰ、压电堆叠Ⅰ、柔性铰链垫片、内六角圆柱头螺钉、六角螺母、夹紧探头底座、夹紧探头盖板和复合式检测探头,所述柔性铰链Ⅰ为空心结构,所述柔性铰链Ⅰ两端安装柔性铰链垫片,所述压电堆叠Ⅰ设置在所述柔性铰链Ⅰ内,所述内六角圆柱头螺钉贯穿所述柔性铰链Ⅰ并通过所述六角螺母与柔性铰链Ⅰ固定连接,所述柔性铰链Ⅰ的一端与所述Z轴位移台螺母座Ⅰ固定连接,另一端与所述夹紧探头底座固定连接,所述夹紧探头盖板与所述夹紧探头底座配合对所述复合式检测探头进行夹持,所述夹紧探头盖板与所述夹紧探头底座可拆卸连接;The optical fiber eddy current nondestructive testing unit includes a flexible hinge I, a piezoelectric stack I, a flexible hinge gasket, a hexagon socket cylindrical head screw, a hexagonal nut, a clamping probe base, a clamping probe cover plate and a composite detection probe, wherein the flexible hinge I is a hollow structure, and flexible hinge gaskets are installed at both ends of the flexible hinge I, the piezoelectric stack I is arranged in the flexible hinge I, the hexagon socket cylindrical head screw passes through the flexible hinge I and is fixedly connected to the flexible hinge I through the hexagonal nut, one end of the flexible hinge I is fixedly connected to the Z-axis translation stage nut seat I, and the other end is fixedly connected to the clamping probe base, the clamping probe cover plate cooperates with the clamping probe base to clamp the composite detection probe, and the clamping probe cover plate is detachably connected to the clamping probe base; 所述残余应力压痕检测模块包括Z轴位移平台Ⅱ和残余应力检测单元,所述Z轴位移平台Ⅱ包括:伺服电机Ⅲ、联轴器Ⅲ、滚珠丝杠模组Ⅲ、Z轴位移台螺母座Ⅱ、导轨滑块模组Ⅲ和Z轴位移台底座Ⅱ,所述伺服电机Ⅲ的输出端与所述联轴器Ⅲ连接,所述联轴器Ⅲ的输出端与所述滚珠丝杠模组Ⅲ连接,所述滚珠丝杠模组Ⅲ与所述联轴器Ⅲ设置在所述Z轴位移台底座Ⅱ内并与所述Z轴位移台底座Ⅱ转动连接,所述Z轴位移台螺母座Ⅱ与所述滚珠丝杠模组Ⅲ转动连接,所述导轨滑块模组Ⅲ固定在所述Z轴位移台底座Ⅱ上,所述Z轴位移台螺母座Ⅱ沿所述导轨滑块模组Ⅲ滑动,所述Z轴位移台底座Ⅱ固定在所述横梁上,所述光纤涡流无损检测单元与所述Z轴位移台螺母座Ⅱ固定连接;The residual stress indentation detection module includes a Z-axis displacement platform II and a residual stress detection unit. The Z-axis displacement platform II includes: a servo motor III, a coupling III, a ball screw module III, a Z-axis displacement platform nut seat II, a guide rail slider module III and a Z-axis displacement platform base II. The output end of the servo motor III is connected to the coupling III, and the output end of the coupling III is connected to the ball screw module III. The ball screw module III and the coupling III are arranged in the Z-axis displacement platform base II and are rotatably connected to the Z-axis displacement platform base II. The Z-axis displacement platform nut seat II is rotatably connected to the ball screw module III. The guide rail slider module III is fixed on the Z-axis displacement platform base II. The Z-axis displacement platform nut seat II slides along the guide rail slider module III. The Z-axis displacement platform base II is fixed on the crossbeam, and the optical fiber eddy current nondestructive detection unit is fixedly connected to the Z-axis displacement platform nut seat II. 所述残余应力检测单元包括小型手动位移台、柔性铰链Ⅱ、压电堆叠Ⅱ、六角头螺栓、力传感器、位移传感器底座、电容位移传感器、圆柱销Ⅰ、圆柱销Ⅱ、测位移板、压痕头套和压痕头,所述小型手动位移台固定在Z轴位移台螺母座Ⅱ的一侧,柔性铰链Ⅱ安装固定在所述Z轴位移台螺母座Ⅱ远离所述Z轴位移台底座Ⅱ的一端,所述压电堆叠Ⅱ安装在柔性铰链Ⅱ的中间空心位置,所述柔性铰链Ⅱ一端旋入所述六角头螺栓,所述位移传感器底座固定在小型手动位移台上,通过圆柱销Ⅱ将所述电容位移传感器安装在所述位移传感器底座的通孔中,所述力传感器的一端与柔性铰链远离所述六角头螺栓的一端螺纹连接,所述力传感器的另一端与压痕头套通过螺纹连接,所述测位移板设置在所述压痕头与力传感器之间,所述压痕头通过圆柱销Ⅰ固定在所述压痕头套远离所述力传感器的一端。The residual stress detection unit includes a small manual translation stage, a flexible hinge II, a piezoelectric stack II, a hexagonal bolt, a force sensor, a displacement sensor base, a capacitive displacement sensor, a cylindrical pin I, a cylindrical pin II, a displacement measuring plate, an indentation head cover and an indentation head. The small manual translation stage is fixed on one side of a nut seat II of a Z-axis translation stage, the flexible hinge II is fixedly installed on one end of the nut seat II of the Z-axis translation stage away from the base II of the Z-axis translation stage, the piezoelectric stack II is installed in the middle hollow position of the flexible hinge II, one end of the flexible hinge II is screwed into the hexagonal bolt, the displacement sensor base is fixed on the small manual translation stage, the capacitive displacement sensor is installed in the through hole of the displacement sensor base through the cylindrical pin II, one end of the force sensor is threadedly connected to one end of the flexible hinge away from the hexagonal bolt, the other end of the force sensor is threadedly connected to the indentation head cover, the displacement measuring plate is arranged between the indentation head and the force sensor, and the indentation head is fixed to one end of the indentation head cover away from the force sensor through the cylindrical pin I. 2.根据权利要求1所述的耦合压痕测试的光纤涡流无损检测装置,其特征在于,所述位移台底座Ⅰ两端设置有限位行程开关Ⅱ。2. The optical fiber eddy current nondestructive testing device for coupled indentation testing according to claim 1 is characterized in that limit travel switches II are provided at both ends of the displacement stage base I. 3.根据权利要求1所述的耦合压痕测试的光纤涡流无损检测装置,其特征在于,所述复合式检测探头包括光纤探头和涡流线圈,所述涡流线圈与光纤探针同轴设置,所述光纤探针远离所述涡流线圈一端被所述夹紧探头底座和夹紧探头盖板夹持,所述光纤探头和压电堆叠Ⅰ与所述控制模块电性连接。3. The optical fiber eddy current nondestructive testing device for coupled indentation testing according to claim 1 is characterized in that the composite detection probe comprises an optical fiber probe and an eddy current coil, the eddy current coil is coaxially arranged with the optical fiber probe, the end of the optical fiber probe away from the eddy current coil is clamped by the clamping probe base and the clamping probe cover, and the optical fiber probe and piezoelectric stack I are electrically connected to the control module. 4.根据权利要求1所述的耦合压痕测试的光纤涡流无损检测装置,其特征在于,所述自适应夹具模块包括角位台模组、连接板、分形虎钳和检测工件,所述角位台模组一侧固定在所述光纤涡流或压痕检测功能切换模块上,另一侧连接在所述连接板上,所述分形虎钳固定在连接板另一侧,所述分形虎钳对所述检测工件进行夹持定位,所述角位台模组包括上部电动角位台Ⅰ和下部电动角位台Ⅱ,两电动角位台呈十字交叉设置,上部电动角位台Ⅰ远离所述下部电动角位台Ⅱ的一端与连接板连接,下部电动角位台Ⅱ远离上部电动角位台Ⅰ的一端固定在所述光纤涡流或压痕检测功能切换模块上。4. The fiber optic eddy current nondestructive testing device for coupled indentation testing according to claim 1 is characterized in that the adaptive fixture module includes an angle table module, a connecting plate, a fractal vise and a detection workpiece, one side of the angle table module is fixed on the fiber optic eddy current or indentation detection function switching module, and the other side is connected to the connecting plate, the fractal vise is fixed on the other side of the connecting plate, and the fractal vise clamps and positions the detection workpiece, the angle table module includes an upper electric angle table I and a lower electric angle table II, the two electric angle tables are arranged in a cross shape, the upper electric angle table I is connected to the connecting plate at one end away from the lower electric angle table II, and the lower electric angle table II is fixed to the fiber optic eddy current or indentation detection function switching module at one end away from the upper electric angle table I. 5.一种耦合压痕测试的光纤涡流无损检测装置的测试方法,其特征在于,所述测试方法应用权利要求1-4任一项所述的耦合压痕测试的光纤涡流无损检测装置,所述测试方法包括:5. A test method for an optical fiber eddy current nondestructive testing device coupled with indentation testing, characterized in that the test method applies the optical fiber eddy current nondestructive testing device coupled with indentation testing according to any one of claims 1 to 4, and the test method comprises: S1:将检测工件装夹在分形虎钳上,控制模块的工控上位机经过运动控制器发出信号控制光纤涡流或压痕检测功能切换模块进行水平方向的移动,从而使检测工件达到目标检测位置,控制模块的工控上位机经过运动控制器发出信号控制光纤涡流无损检测模块和残余应力压痕检测模块进行竖直方向上的大范围粗略位移,从而使复合式检测探头到达工作范围以内,压痕头到达工件表面;S1: The inspection workpiece is clamped on the fractal vise, and the industrial control host computer of the control module sends a signal through the motion controller to control the fiber optic eddy current or indentation detection function switching module to move in the horizontal direction, so that the inspection workpiece reaches the target inspection position, and the industrial control host computer of the control module sends a signal through the motion controller to control the fiber optic eddy current nondestructive testing module and the residual stress indentation detection module to perform a large-scale rough displacement in the vertical direction, so that the composite detection probe reaches the working range and the indentation head reaches the workpiece surface; S2:复合式检测探头中的光纤探头采集到的位移信号经过控制模块的电荷放大器处理以后读入到信号采集卡中,而后信号采集卡的信号传输到工控上位机,工控上位机分析位移反馈信号后对运动控制器向角位台模组发出精密旋转运动指令;S2: The displacement signal collected by the optical fiber probe in the composite detection probe is processed by the charge amplifier of the control module and then read into the signal acquisition card. Then the signal of the signal acquisition card is transmitted to the industrial control host computer. After analyzing the displacement feedback signal, the industrial control host computer sends a precise rotation motion instruction to the angular stage module through the motion controller; S3:在扫描复杂几何形貌工件过程中,工控上位机完成光纤探头采集到的位移信号的分析后经过控制模块的压电放大器向压电堆叠Ⅰ发出反馈控制信号,使柔性铰链Ⅰ产生微动,调节复合式检测探头与工件表面之间的距离;S3: During the scanning of workpieces with complex geometric shapes, the industrial control host computer analyzes the displacement signal collected by the optical fiber probe and then sends a feedback control signal to the piezoelectric stack I through the piezoelectric amplifier of the control module, so that the flexible hinge I produces micro-movement and adjusts the distance between the composite detection probe and the workpiece surface; S4:通过工控上位机对扫描过程中光纤探头位移反馈信号进行分析得出表面缺陷损伤情况;S4: Analyze the displacement feedback signal of the optical fiber probe during scanning through the industrial control host computer to obtain the surface defect damage; S5:针对检测工件内部残余应力的检测,采用压痕法,首先通过小型手动位移台将电容位移传感器调整到量程范围之内,压痕头触碰到检测工件表面的瞬间力传感器采集到载荷信号变化,载荷信号经电荷放大器放大后读入信号采集卡,随后传输到工控上位机中,经分析后工控上位机向Z轴位移平台Ⅱ发出运动指令使其停动,随后电容位移传感器发出位移反馈信号,信号以同样方式传输到工控上位机中,上位机分析信号后经过压电放大器向压电堆叠Ⅱ发出反馈控制信号,控制压痕头持续微动,同时力传感器持续监测压痕头载荷变化情况,并将载荷反馈信号经电荷放大器放大后读入信号采集卡,随后传输到工控上位机中,通过工控上位机的计算分析得到材料的载荷位移曲线并从中建立残余应力与压痕响应参数的具体联系,从而对残余应力做出定性和定量的检测;S5: For the detection of residual stress inside the workpiece, the indentation method is adopted. First, the capacitive displacement sensor is adjusted to within the measuring range through a small manual displacement stage. The moment the indentation head touches the surface of the workpiece, the force sensor collects the load signal change. The load signal is amplified by the charge amplifier and read into the signal acquisition card, and then transmitted to the industrial control host computer. After analysis, the industrial control host computer sends a motion command to the Z-axis displacement platform II to stop it. Then the capacitive displacement sensor sends a displacement feedback signal, and the signal is transmitted to the industrial control host computer in the same way. After the host computer analyzes the signal, it sends a feedback control signal to the piezoelectric stack II through the piezoelectric amplifier to control the continuous micro-movement of the indentation head. At the same time, the force sensor continuously monitors the load change of the indentation head, and the load feedback signal is amplified by the charge amplifier and read into the signal acquisition card, and then transmitted to the industrial control host computer. The load displacement curve of the material is obtained through the calculation and analysis of the industrial control host computer, and the specific relationship between the residual stress and the indentation response parameters is established, so as to make qualitative and quantitative detection of the residual stress; S6:针对检测工件内部损伤缺陷的检测和残余应力的验证,由信号发生器产生高频波形,波形经过功率放大器后经涡流线圈发出激励信号,而后涡流线圈将接收的电涡流信号经功率放大器、锁相放大器处理后读入信号采集卡,最终传输到工控上位机的相关分析软件中进行计算分析。S6: For the detection of internal damage defects of workpieces and the verification of residual stress, the signal generator generates a high-frequency waveform, which is then passed through a power amplifier and then sent out an excitation signal through an eddy current coil. The eddy current coil then processes the received eddy current signal through a power amplifier and a phase-locked amplifier and reads it into a signal acquisition card, which is finally transmitted to the relevant analysis software of the industrial control host computer for calculation and analysis.
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