CN119282280A - Visualization device and method for electrostatic induction mask electrochemical machining of body wave induced surface waves - Google Patents

Abstract

A visualization device and a method for electrostatic induction mask electrolytic machining of bulk wave induced surface waves belong to the field of electrolytic machining. The workpiece in the device is fixed on one side of an insulating baffle plate with square through holes by an insulating adhesive tape and is inserted into a clamping groove in an electrolytic tank. The plane of the piezoelectric ceramic plate and the plane of the workpiece are at an angle of 45 degrees, and the water outlet of the electrolytic tank sprays electrolyte flow which is at an angle of 45 degrees with the plane of the workpiece. The high-speed camera, the piezoelectric ceramic plate, the water outlet and the workpiece are positioned at the same horizontal position. Based on the device, wireless processing of the workpiece can be realized. The bulk wave excited by the piezoelectric ceramic sheet induces a surface wave on the surface of the workpiece, so that electrolysis products such as bubbles are timely discharged, and the electrolyte flow sprayed by the water outlet holes timely updates the electrolyte. And directly observing the bubble derivatization process in the processing process by a high-speed camera. The invention has simple operation, can effectively discharge bubbles in the blind holes and improves the electrolytic machining precision of the mask.

Description

Visualization device and method for electrostatic induction mask electrolytic machining of bulk wave induced surface wave

Technical Field

The invention relates to a mask electrolytic machining device and method, in particular to a visualization device and method for electrostatic induction mask electrolytic machining of bulk wave induced surface waves, and belongs to the field of electrolytic machining.

Background

The mask electrolytic machining utilizes the anode dissolution principle to selectively remove the area without photoresist protection, is one of the main technologies for preparing the metal microstructures in a large scale, and has the advantages of no burrs, no processing stress, large scale, low cost and the like. However, since a semi-closed micro blind hole structure is formed between the photoresist and the workpiece in the processing process, the discharge of the electrolytic product is very difficult in the mask electrolytic processing process, so that the processing rate of the position covered by the electrolytic product is slower, the processing rate of the position uncovered by the electrolytic product is faster, and the processing uniformity is poor. This non-uniform processing result severely affects product consistency and reliability.

In order to solve the mass transfer problem in the micro blind holes, chinese patent No. CN107116274A proposes a cavitation jet auxiliary mask electrolytic machining method, which utilizes micro water jet formed by collapse of cavitation jet electrolyte to discharge electrolytic products, thereby improving the quality of the machined surface. The Chinese patent No. 106312206A proposes an electrolytic machining device and method with movable mask, which is to cling a metal porous medium to an anode workpiece, pump electrolyte above the porous medium, and flow the electrolyte out from the periphery of the porous medium, so that the mass transfer between electrodes is smooth, and the machining precision is improved. The Chinese patent No. 117139754A proposes a device and a method for assisting mask electrolysis by using surface acoustic waves, which remove electrolysis products by using the surface acoustic wave acoustic flow, thereby improving the processing uniformity.

The method plays a certain role in promoting the development of mask electrolytic machining technology. However, the problem of bubble discharge in the electrolysis product is not well solved. In the micro blind holes, the bubble adhesion force is very strong, and the bubbles are difficult to remove effectively by a conventional method. At present, there are few methods for removing bubbles in the electrolysis process, so it is necessary to invent a device and a method for effectively removing bubble products, observe the bubble derivatization process in the processing process, discover bubbles and timely discharge the bubbles so as to improve the processing uniformity.

Disclosure of Invention

In order to solve the problems, the invention provides a visualization device and a method for electrostatic induction mask electrolytic machining of bulk wave induced surface waves, which utilize high sound pressure gradient in the bulk wave induced surface waves to realize timely discharge of electrolysis products including bubbles. Meanwhile, the visualization technology is utilized to monitor the electrolytic product in real time, so that the electrolytic product can be found and discharged in time, and further, the mask electrolytic machining uniformity of the metal microstructure is improved.

In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:

The visualization device mainly comprises a power supply 1, a power amplification plate 2, a power line 3, a signal line 4, an anode 5, an induction electrode 6, an electrolytic tank 7, two pumps 8, four hoses 9, a spotlight 10, a camera support 11, a high-speed camera 12, a cathode 13 and two transducers 14. The induction electrode 6 is arranged in a clamping groove 710 in the middle of the electrolytic tank 7, the anode 5 and the cathode 13 are respectively arranged in two electrode brackets 702 on the inner sides of the front side wall 701 and the rear side wall 701 of the electrolytic tank 7, two transducers 14 are respectively arranged in transducer brackets 707 on the inner sides of the front side wall 701 and the rear side wall 701 of the electrolytic tank 7, one ends of four hoses 9 are respectively fastened on four hose interfaces 703 on the outer sides of the front side wall 701 and the rear side wall 701 of the electrolytic tank 7, wherein the other end of a1 st (or 3) hose 9 connected with the hose interface 703 on the upper side of the front (or rear) side wall 701 is connected with the water outlet of a1 st (or 2) pump 8, and the other end of a2 nd (or 4) hose 9 connected with the hose interface 703 on the lower side of the front (or rear) side wall 701 is connected with the water inlet of the 1 st (or 2) pump 8. The power supply 1 supplies power to the anode 5 and the cathode 13 through the power line 3, the power amplification board 2 drives the two transducers 14 through the signal line 4 to remove electrolysis products 17, and the pump 8 realizes electrolyte circulation in the electrolytic tank 7 through the hose 9. Wherein the electrolytic product 17 is generated during the machining of the machined surface and the non-machined surface of the workpiece 601 on the sensing electrode 6. The high-speed camera 12 is fixed on the camera support 11, is illuminated by the spotlight 10, and observes the processing of the workpiece 601 in real time through the front (or rear) side wall 701 of the electrolytic cell 7.

Further, the electrolytic cell 7 mainly comprises a side wall 701, two electrode holders 702, four hose connectors 703, four transducer holders 707, two nozzles 708, two limiting plates 709, and a clamping groove 710. Of these, two electrode holders 702, four transducer holders 707, two nozzles 708 are located inside the front and rear side walls 701 of the electrolytic cell 7, and four hose connectors 703 are located outside the front and rear side walls 701 of the electrolytic cell 7. The two limiting plates 709 are in a concave plate structure, are parallel to the two side walls 701, are positioned in the middle of the electrolytic tank 7, and form a clamping groove 710 between the two limiting plates 709. The clamping groove 710 is used for inserting the induction electrode 6, and divides the electrolytic tank 7 into two parts which are symmetrical front and back. The front and rear side walls 701 are plate structures with two positioning holes 705 and two side wall holes 706, wherein the two positioning holes 705 are positioned on the left side of the side wall 701 for securing the transducer mount 707, and the two side wall holes 706 are positioned on the right side of the side wall 701 for positioning the hose interface 703 and the nozzle 708. The hose connector 703 is a hollow square structure with one open end, the side surface is provided with a connector 704 which is fixedly connected with the hose 9, and the open end covers the outer side of the side wall hole 706. The transducer support 707 is a convex plate structure, the convex buckle 714 is fastened inside the positioning hole 705 on the side wall 701, and the middle of the plate is provided with a rectangular ceramic fixing hole 713 diagonally arranged for fixing the transducer 14. The electrode support 702 is 匚 -shaped and is positioned on the left side of the transducer support 707, and forms a through hole together with the inner side of the side wall 701 for fixing the cathode 13 and the anode 5. The nozzle 708 is in a hollow right triangular prism structure, the lower surface of the nozzle is in an isosceles right triangle shape, a side surface corresponding to the right angle side is provided with a round hole 711 which is the same as the side wall hole 706, the round hole 711 is completely attached to the side wall hole 706 above the side wall 701 at the inner side of the side wall 701, and the side surface corresponding to the bevel edge is provided with a vertical rectangular water outlet 712.

Further, the anode 5, the cathode 13, the transducer 14 and the induction electrode 6 are all fixed on the electrolytic tank 7 in a riveting mode, so that the electrolytic tank is convenient to replace and detach at any time. The induction electrode 6 is inserted into the middle of the electrolytic tank 7 to divide the electrolytic tank 7 into a front part and a rear part, the anode 5 and the cathode 13 which are arranged in the electrolytic tank 7 are symmetrically arranged about the induction electrode 6, the two transducers 14 are symmetrically arranged about the induction electrode 6, and the two nozzles 708 in the electrolytic tank 7 are symmetrically arranged about the induction electrode 6. The transducer 14 is inserted into a ceramic mounting hole 713 in the transducer mount 707, the transducer 14 being positioned between the anode 5 or cathode 13 and the nozzle 708. The anode 5 and the cathode 13 are inserted into the electrode holder 702. The centers of the workpiece 601 on the induction electrode 6, the water outlet 712 on the nozzle 708 and the piezoelectric ceramic plate 141 on the transducer 14 are positioned at the same horizontal position. The normal line passing through the center of the water outlet 712 of the nozzle 708 and perpendicular to the side surface of the water outlet 712 passes through the center of the workpiece 601 on the sensing electrode 6, and the water outlet 712 sprays electrolyte flow 15 with 45 degrees to the plane of the workpiece 601. The direction of the sound wave 16 excited by the piezoelectric ceramic plate 141 is 45 degrees with the plane of the workpiece 601 by passing through the center of the piezoelectric ceramic plate 141 on the transducer 14 and perpendicular to the normal line of the piezoelectric ceramic plate 141 and passing through the center of the workpiece 601 on the sensing electrode 6.

Further, the induction electrode 6 mainly includes a workpiece 601, an insulating baffle 602, an insulating tape 603, and a slider 605. A square through hole 604 is formed in the middle of the insulating baffle 602. The workpiece 601 is made by coating photoresist 607 on one side of a metal plate 606, wherein the photoresist 607 is an insulating material with a hollowed-out pattern, the side of the metal plate 606 coated with the photoresist 607 is a processed surface, and the side not coated with the photoresist is a non-processed surface. The non-processing surface of the workpiece 601 is covered on the square through hole 604 of the insulating baffle 602, and the insulating tape 603 is used for sticking the non-processing positions around the processing surface of the workpiece 601 on any side of the insulating baffle 602. The slider 605 is mounted above the insulating shutter 602. In particular, the sensing electrode 6 is not connected with any electric wire, the machined surface of the workpiece 601 is positioned on the same side as the cathode 13 when the sensing electrode 6 is inserted into the clamping groove 710, the non-machined surface of the workpiece 601 is positioned on the same side as the anode 5, and the sliding block 605 can slide along the limiting plate 709 in the electrolytic tank 7 so as to ensure that the center of the machined surface of the workpiece 601 in the sensing electrode 6 is positioned at the right center of the electrolytic tank 7.

Further, the transducer 14 mainly includes a piezoelectric ceramic plate 141, a rubber ring 142, and a fixing plate 143. The piezoelectric ceramic piece 141 is a wafer with the frequency of 1.7MHz, the front surface is completely covered with a positive electrode and an insulating film, wherein the insulating film plays an insulating role outside the positive electrode, the center of the back surface of the piezoelectric ceramic piece 141 is provided with a negative electrode, the positive electrode is turned to the edge of the back surface, and the positive electrode and the negative electrode are respectively connected with the positive electrode and the negative electrode of the signal wire 4. The rubber ring 142 is an inner groove ring, and the piezoelectric ceramic plate 141 is embedded into the inner groove of the rubber ring 142. The fixing plate 143 is of a convex plate structure, a boss of the fixing plate 143 is inserted into a ceramic fixing hole 713 on the transducer support 707, and the fixing plate 143 is attached to a rubber ring plane on the back surface of the piezoelectric ceramic plate 141 and is insulated and sealed by epoxy resin. Only the front insulating film of the piezoelectric ceramic plate 141 is exposed in the transducer 14, and when the transducer 14 is inserted into the transducer support 707, the outer normal line passing through the center of the insulating film faces the center of the workpiece 601, so as to ensure that the direction of the sound wave 16 excited by the piezoelectric ceramic plate 141 is 45 ° with the plane of the workpiece 601.

The electrostatic induction mask electrolytic machining method of the bulk wave induced surface wave is realized based on the device and comprises the following steps of:

S1, manufacturing a workpiece 601. The photoresist 607 is coated on the processing surface of the metal plate 606, and the film is patterned by photoresist homogenizing, photoresist exposing and developing processes.

S2, manufacturing the induction electrode 6. The non-processing surface of the workpiece 601 is covered on the square through hole 604 of the insulating baffle 602, and the non-processing position around the processing surface of the workpiece 601 is adhered to any side of the insulating baffle 602 by using the insulating tape 603.

S3, electrostatic induction mask electrolytic machining of the bulk wave induced surface wave. The induction electrode 6 is inserted into the clamping groove 710 of the electrolytic cell 7 so that the processing surface of the workpiece 601 is positioned on the same side as the cathode 13, the non-processing surface of the workpiece 601 is positioned on the same side as the anode 5, and the induction electrode 6 is slightly moved to ensure that the surface to be processed is positioned at the very center of the electrolytic cell 7. The spotlight 10, the high-speed camera 12, the two pumps 8, the power amplification board 2 and the power supply 1 are turned on in sequence, and meanwhile, electrostatic induction mask electrolytic machining and monitoring of bulk wave induced surface waves are carried out. The opening sequence of the spotlight 10, the high-speed camera 12, the two pumps 8 and the power amplifier board 2 can be arbitrarily adjusted. The power supply 1 is finally turned on. The process comprises the following steps:

The power supply drives the anode 5 and the cathode 13 to perform oxidation reaction and reduction reaction, and generates an electric field in the electrolyte, and under the action of the electric field, the processing surface of the workpiece 601 induces positive charges, performs oxidation reaction and generates an electrolysis product 17, and the non-processing surface induces negative charges, performs reduction reaction and generates an electrolysis product 17.

The insulating film on the front surface of the bare-leaky piezoelectric ceramic plate 141 in the transducer 14 is contacted with electrolyte, under the action of 1.7MHz alternating current output by the power amplification plate 2, two piezoelectric ceramic plates 141 symmetrical about the induction electrode 6 generate high-frequency vibration sound waves 16 due to the inverse piezoelectric effect, the sound waves 16 propagate in the electrolyte in a bulk wave mode through the insulating film and respectively propagate to the processing surface and the non-processing surface of the workpiece 601 in a direction of 45 degrees with the plane of the workpiece 601, after encountering the workpiece 601, one part of the bulk wave propagating in the electrolyte propagates in the interface of the workpiece 601 and the electrolyte in the form of surface waves, and the other part of the bulk wave is reflected back to the electrolyte in the form of reflection waves. Because the bulk wave induces surface waves, the incident and reflected waves create a large pressure gradient in the electrolyte around the machined and non-machined surfaces of the workpiece 601, thereby creating acoustic streaming that promotes timely removal of the electrolytic products 17 from the machined and non-machined surfaces of the workpiece 601. In particular, since bulk wave-induced surface waves produce a large pressure gradient only near the machined and unmachined surfaces of the workpiece 601, the machined and unmachined surfaces of the workpiece 601 have a strong acoustic streaming effect and acoustic streaming away from the machined and unmachined surfaces of the workpiece 601 is weak.

The water inlets of the two pumps 8 respectively pump electrolyte in the electrolytic tank 7 from hose interfaces 703 below the outer sides of the front side wall 701 and the rear side wall 701 of the electrolytic tank 7, and the water outlets of the two pumps 8 convey the electrolyte to hoses 9, hose interfaces 703 above the front side wall 701 and the rear side wall 701 of the electrolytic tank 7 and nozzles 708, so that the water outlet 712 sprays electrolyte flow 15 which is 45 degrees with the plane of the workpiece 601. In a laminar flow state, the electrolyte flow 15 has a high flow velocity at a position far from the processing surface, so that the electrolytic product 17 of the processing surface and the non-processing surface of the workpiece 601, which is discharged by the bulk wave-induced surface wave, is washed away in time.

The high-speed camera 12 can directly observe the bubble derivatization process in the processing process, and after observing bubble accumulation, the bubble removal rate can be improved by increasing the power of the power amplification plate 2.

S4, post-treatment. And taking out the induction electrode 6, tearing off the insulating adhesive tape 603, and removing the photoresist 607 in the photoresist removing solution to obtain the processed metal microstructure.

The beneficial effects of the invention are as follows:

(1) The invention improves the mass transfer efficiency. The pump promotes the macroscopic circulation of the electrolyte, and the bulk wave induces the surface wave to realize the efficient mass transfer in the microscopic confined space, thereby eliminating the negative influence of electrolysis products such as bubbles and the like in the electrolysis process.

(2) The invention improves the mass transfer environment in the processing process of the through hole structure. The mask electrolytic machining is realized by utilizing the electrostatic induction principle, a back mask process in the traditional mask electrolytic machining process is eliminated, the original blind hole structure (formed by the back mask and the through holes) is changed into the through hole structure, and the mass transfer resistance is reduced.

(3) The invention can realize wireless processing of workpieces and has stronger manufacturability. The workpiece does not need a back mask process or power-on treatment, and the operation process is simplified.

Drawings

FIG. 1 is a general view of a visualization device for electrostatic induction mask electrolytic machining of bulk wave-induced surface waves;

FIG. 2 is a top view of a visualization device for electrostatic induction mask electrolytic machining of bulk wave-induced surface waves;

FIG. 3 is a front view of a visualization device for electrostatic induction mask electrolytic machining of bulk wave-induced surface waves;

FIG. 4 is an isometric view of an electrolyzer;

FIG. 5 is an isometric view of a hose interface;

FIG. 6 is an isometric view of an electrode holder;

FIG. 7 is an isometric view of the electrolyzer with the hose connection and electrode support hidden;

FIG. 8 is an isometric view of an electrolytic cell with a hose connector, electrode support and one sidewall hidden;

FIG. 9 is an isometric view of a nozzle;

FIG. 10 is an isometric view of a transducer mount;

FIG. 11 is an isometric view of an induction electrode;

FIG. 12 is an isometric view of an insulating barrier;

FIG. 13 is an isometric view of a transducer;

FIG. 14 is a schematic diagram of an electrostatic induction mask electrolytic machining process for bulk wave induced surface waves;

Fig. 15 is a graph comparing micro-clamp of electrostatic induction mask electrolytic processing of bulk wave induced surface waves and conventional mask electrolytic processing.

In the figure, a power supply 1, a power amplification board 2, a power supply line 3, a signal line 4, an anode 5, a sensing electrode 6, an electrolytic cell 7, a pump 8, a hose 9, a spotlight 10, a camera bracket 11, a high-speed camera 12, a cathode 13, a transducer 14, an electrolyte flow 15, an acoustic wave 16 and an electrolytic product 17 are shown;

601 a workpiece, 602 an insulating baffle, 603 an insulating adhesive tape, 604 square through holes, 605 a slider, 606 a metal plate and 607 photoresist;

701 side walls, 702 electrode supports, 703 hose interfaces, 704 joints, 705 positioning holes, 706 side wall holes, 707 transducer supports, 708 nozzles, 709 limiting plates, 710 clamping grooves, 711 round holes, 712 water outlet holes, 713 ceramic fixing holes and 714 buckles;

141 piezoelectric ceramic plates, 142 rubber rings and 143 fixing plates.

Detailed Description

The invention provides a visualization device and a method for electrostatic induction mask electrolytic machining of bulk wave induced surface waves, which utilize an electrostatic induction principle to process, break a semi-closed structure formed by photoresist and a workpiece, reduce mass transfer resistance, utilize high sound pressure gradient of bulk wave induced surface acoustic waves to realize timely discharge of electrolytic products including bubbles, and utilize a visualization technology to realize timely discovery and discharge of electrolytic products so as to improve mask electrolytic machining uniformity of a metal microstructure.

The invention will be described in further detail below with reference to the embodiments shown in the drawings. It is apparent that the described examples are only some, but not all, of the embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.

In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:

A visualization device for electrostatic induction mask electrolytic machining of bulk wave induced surface waves. Fig. 1 is a general view of a visualization device for electrostatic induction mask electrolytic machining of bulk wave-induced surface waves, fig. 2 is a plan view of a visualization device for electrostatic induction mask electrolytic machining of bulk wave-induced surface waves, and fig. 3 is a front view of a visualization device for electrostatic induction mask electrolytic machining of bulk wave-induced surface waves. In fig. 3, the spotlight 10, the camera holder 11, the high-speed camera 12 and the side walls 701 are not shown. The partial enlarged view in fig. 3 is a portion presented in the field of view of the high-speed camera 12.

As shown in fig. 1 to 3, the visualization device for electrostatic induction mask electrolytic machining of bulk wave induced surface waves according to an embodiment of the present invention mainly includes a power source 1, a power amplification board 2, a power line 3, a signal line 4, an anode 5, an induction electrode 6, an electrolytic cell 7, a pump 8, a hose 9, a spotlight 10, a camera support 11, a high-speed camera 12, a cathode 13, and a transducer 14. The induction electrode 6 according to one embodiment of the invention is arranged in a clamping groove 710 in the middle of the electrolytic tank 7, the anode 5 and the cathode 13 are respectively arranged in two electrode brackets 702 on the inner sides of the front side wall 701 and the rear side wall 701 of the electrolytic tank 7, two transducers 14 are respectively arranged in transducer brackets 707 on the inner sides of the front side wall 701 and the rear side wall 701 of the electrolytic tank 7, one ends of four hoses 9 are respectively fastened to four hose interfaces 703 on the outer sides of the front side wall 701 and the rear side wall 701 of the electrolytic tank 7, wherein the other end of a1 st (or 3) hose 9 connected with the hose interface 703 above the front (or rear) side wall 701 is connected with a water outlet of a1 st (or 2) pump 8, and the other end of a2 nd (or 4) hose 9 connected with the hose interface 703 below the front (or rear) side wall 701 is connected with a water inlet of the 1 st (or 2) pump 8. The power supply 1 supplies power to the anode 5 and the cathode 13 through the power line 3, the power amplification board 2 drives the two transducers 14 through the signal line 4 to remove electrolysis products 17, and the pump 8 realizes electrolyte circulation in the electrolytic tank 7 through the hose 9. Wherein the electrolytic product 17 according to an embodiment of the present invention is generated during the machining of the machined surface and the non-machined surface of the workpiece 601 on the sensing electrode 6. The high-speed camera 12 is fixed to the camera mount 11, and is illuminated by the spotlight 10 to observe the processing of the workpiece 601 in real time through the front (or rear) side wall 701 of the electrolytic cell 7.

Fig. 4 is an isometric view of an electrolyzer, fig. 5 is an isometric view of a hose port, fig. 6 is an isometric view of an electrode holder, fig. 7 is an isometric view of an electrolyzer with a hose port and an electrode holder hidden, fig. 8 is an isometric view of an electrolyzer with a hose port, an electrode holder and one sidewall hidden, fig. 9 is an isometric view of a nozzle, and fig. 10 is an isometric view of a transducer holder. Fig. 4 to 10 illustrate the structure of each component of the electrolytic bath 7 and the relative positional relationship therebetween. The electrolytic tank 7 is formed by splicing transparent acrylic plates in an adhesive mode, and all parts of the electrolytic tank are in fastening connection.

As shown in fig. 4 to 10, the electrolytic cell 7 according to an embodiment of the present invention mainly includes a side wall 701, two electrode holders 702, four hose connectors 703, four transducer holders 707, two nozzles 708, two limiting plates 709, and a clamping groove 710. Of these, two electrode holders 702, four transducer holders 707, two nozzles 708 are located inside the front and rear side walls 701 of the electrolytic cell 7, and four hose connectors 703 are located outside the front and rear side walls 701 of the electrolytic cell 7.

As shown in fig. 7 and 8, two limiting plates 709 according to an embodiment of the present invention are in a concave plate structure, and are parallel to two side walls 701, and are located in the middle of the electrolytic tank 7, and a clamping groove 710 is formed between the two limiting plates 709. The clamping groove 710 is used for inserting the induction electrode 6, and divides the electrolytic tank 7 into two parts which are symmetrical front and back. The front and rear side walls 701 according to an embodiment of the present invention are plate structures having two positioning holes 705 and two side wall holes 706, wherein the two positioning holes 705 are located on the left side of the side wall 701 for securing the transducer mount 707 and the two side wall holes 706 are located on the right side of the side wall 701 for positioning the hose interface 703 and the nozzle 708.

As shown in fig. 4,5 and 7, a hose connector 703 according to an embodiment of the present invention has a hollow square structure with one open end, a connector 704 fastened to the hose 9 is provided on the side surface, and the open end covers the outside of the side wall hole 706.

As shown in fig. 7, 8 and 10, the transducer support 707 according to an embodiment of the present invention is a convex plate structure, and a convex buckle 714 is fastened inside a positioning hole 705 on a side wall 701, and a rectangular ceramic fixing hole 713 for fixing the transducer 14 is diagonally arranged in the middle of the plate.

As shown in fig. 4 and 6, the electrode holder 702 according to an embodiment of the present invention has a 匚 -shaped structure, and is located on the left side of the transducer holder 707, and together with the inner side of the sidewall 701, through holes for fixing the cathode 13 and the anode 5 are formed.

As shown in fig. 7, 8 and 9, a nozzle 708 according to an embodiment of the present invention has a hollow rectangular triangular prism structure, the lower surface is an isosceles right triangle, a round hole 711 identical to the side wall hole 706 is formed on one side corresponding to the right-angle side, the round hole 711 is completely attached to the side wall hole 706 above the side wall 701 on the inner side of the side wall 701, and a vertical rectangular water outlet 712 is formed on the side corresponding to the oblique side.

Fig. 11 is an isometric view of an induction electrode, fig. 12 is an isometric view of an insulating baffle, and fig. 14 is a schematic diagram of an electrostatic induction mask electrolytic machining method of bulk wave induced surface waves. Referring to fig. 11 and 12, the induction electrode 6 according to an embodiment of the present invention mainly includes a workpiece 601, an insulating barrier 602, an insulating tape 603, and a slider 605. A square through hole 604 is formed in the middle of the insulating baffle 602. As shown in fig. 14, the workpiece 601 is made by coating a photoresist 607 on one side of a metal plate 606, wherein the photoresist 607 is an insulating material with a hollowed pattern, the side of the metal plate 606 coated with the photoresist 607 is a processed surface, and the side not coated with the photoresist is a non-processed surface. As shown in fig. 11, the non-processing surface of the workpiece 601 is covered on the square through hole 604 of the insulating shutter 602, and the insulating tape 603 adheres the non-processing position around the processing surface of the workpiece 601 to either side of the insulating shutter 602. The slider 605 is mounted above the insulating shutter 602. In particular, as shown in fig. 1, 2 and 3, the sensing electrode 6 is not connected with any electric wire, when the sensing electrode 6 is inserted into the clamping groove 710, the processing surface of the workpiece 601 is positioned on the same side as the cathode 13, the non-processing surface of the workpiece 601 is positioned on the same side as the anode 5, and the sliding block 605 can slide along the limiting plate 709 in the electrolytic cell 7 so as to ensure that the center of the processing surface of the workpiece 601 in the sensing electrode 6 is positioned at the right center of the electrolytic cell 7.

Fig. 13 is an isometric view of a transducer. The transducer 14 according to an embodiment of the present invention mainly includes a piezoelectric ceramic plate 141, a rubber ring 142, and a fixing plate 143. The piezoelectric ceramic piece 141 is a wafer with the frequency of 1.7MHz, the front surface is completely covered with a positive electrode and an insulating film, wherein the insulating film plays an insulating role outside the positive electrode, the center of the back surface of the piezoelectric ceramic piece 141 is provided with a negative electrode, the positive electrode is turned to the edge of the back surface, and the positive electrode and the negative electrode are respectively connected with the positive electrode and the negative electrode of the signal wire 4. The rubber ring 142 is an inner groove ring, and the piezoelectric ceramic plate 141 is embedded into the inner groove of the rubber ring 142. The fixing plate 143 is of a convex plate structure, a boss of the fixing plate 143 is inserted into a ceramic fixing hole 713 on the transducer support 707, and the fixing plate 143 is attached to a rubber ring plane on the back surface of the piezoelectric ceramic plate 141 and is insulated and sealed by epoxy resin. As shown in fig. 2, only the front insulating film of the piezoelectric ceramic plate 141 is exposed in the transducer 14, and when the transducer 14 is inserted into the transducer support 707, the outer normal line passing through the center of the insulating film faces the center of the workpiece 601, so as to ensure that the direction of the sound wave 16 excited by the piezoelectric ceramic plate 141 is 45 ° with respect to the plane of the workpiece 601.

The electrolyte according to an embodiment of the present invention flows out from the sidewall hole 706 on the lower side of the front or rear sidewall 701 of the electrolytic bath 7, through the hose port 703, the hose 9, the pump 8, and then flows back to the electrolytic bath 7 through the hose port 703, the sidewall hole 706, and the nozzle 708 on the upper side of the hose 9 and the sidewall 701.

The anode 5, the cathode 13, the transducer 14 and the induction electrode 6 according to an embodiment of the invention are all fixed on the electrolytic tank 7 in a riveting manner, so that the electrolytic tank is convenient to replace and disassemble at any time. Wherein the induction electrode 6 is inserted into the middle of the electrolytic cell 7 to divide the electrolytic cell 7 into a front part and a rear part, the anode 5 and the cathode 13 which are arranged in the electrolytic cell 7 are symmetrically arranged about the induction electrode 6, the two transducers 14 are symmetrically arranged about the induction electrode 6, and the two nozzles 708 in the electrolytic cell 7 are symmetrically arranged about the induction electrode 6. The transducer 14 is inserted into a ceramic fixing hole 713 in the transducer support 707, the transducer 14 being located between the anode 5 or the cathode 13 and the nozzle 708. Anode 5 and cathode 13 are inserted into electrode holder 702.

In particular, the centers of the workpiece 601 on the sensing electrode 6, the water outlet 712 on the nozzle 708, and the piezoceramic sheet 141 on the transducer 14 are at the same horizontal position. The normal line passing through the center of the water outlet 712 of the nozzle 708 and perpendicular to the side surface of the water outlet 712 passes through the center of the workpiece 601 on the sensing electrode 6, so that the water outlet 712 sprays electrolyte flow 15 with 45 degrees to the plane of the workpiece 601. The normal line passing through the center of the piezoelectric ceramic plate 141 on the transducer 14 and perpendicular to the piezoelectric ceramic plate 141 passes through the center of the workpiece 601 on the sensing electrode 6, so that the direction of the sound wave 16 excited by the piezoelectric ceramic plate 141 is 45 degrees with the plane of the workpiece 601.

The anodes 5, 13 according to an embodiment of the present invention are replaced and cleaned when damaged or stained by consumption, or otherwise mounted in the electrode holder 702 in the electrolytic cell 7. The transducers 14 are replaced when the piezoceramic sheets fail or fail in insulation, otherwise they are mounted in the transducer support 707 in the electrolytic cell 7.

The electrostatic induction mask electrolytic machining method of the bulk wave induced surface wave according to the embodiment of the invention is realized based on the device and comprises the following steps:

s1, processing a workpiece 601. The photoresist 607 is coated on the processing surface of the metal plate 606, and the film is patterned by photoresist homogenizing, photoresist exposing and developing processes. Wherein the photoresist 607 pattern of the work piece 601 processing surface is a micro-clamp.

In particular, the pattern of photoresist 607 on the processing surface of workpiece 601 in accordance with an embodiment of the present invention is not limited to micro-clamps and may be any desired pattern. The non-processed surface of the workpiece 601 is not subjected to insulation treatment, a back mask process in the traditional mask electrolytic machining process is omitted, a blind hole structure (formed by a back mask and a through hole) in the traditional mask electrolytic machining process is changed into a through hole structure, and mass transfer resistance is reduced.

S2, manufacturing the induction electrode. The non-processing surface of the workpiece 601 is covered on the square through hole 604 of the insulating baffle 602, and the non-processing position around the processing surface of the workpiece 601 is adhered to any side of the insulating baffle 602 by using the insulating tape 603.

S3, electrostatic induction mask electrolytic machining of the bulk wave induced surface wave. The induction electrode 6 is inserted into the clamping groove 710 of the electrolytic cell 7 so that the processing surface of the workpiece 601 is positioned on the same side as the cathode 13, the non-processing surface of the workpiece 601 is positioned on the same side as the anode 5, and the induction electrode 6 is slightly moved to ensure that the surface to be processed is positioned at the very center of the electrolytic cell 7. The spotlight 10, the high-speed camera 12, the two pumps 8, the power amplification board 2 and the power supply 1 are turned on in sequence, and meanwhile, electrostatic induction mask electrolytic machining and monitoring of bulk wave induced surface waves are carried out. Wherein the electrolyte is 25%wt of sodium chloride, the power supply current is 0.5A, the processing time is 10s, and the power of the power amplifier board is 10W.

In particular, the opening sequence of the spotlight 10, the high-speed camera 12, the two pumps 8 and the power amplification board 2 can be arbitrarily adjusted. The power supply 1 is finally turned on.

Fig. 14 is a schematic diagram of an electrostatic induction mask electrolytic processing method of bulk wave induced surface waves according to an embodiment of the present invention. The power supply drives the anode 5 and the cathode 13 to perform oxidation reaction and reduction reaction, and generates an electric field in the electrolyte, and under the action of the electric field, the processing surface of the workpiece 601 induces positive charges, performs oxidation reaction and generates an electrolysis product 17, and the non-processing surface induces negative charges, performs reduction reaction and generates an electrolysis product 17.

Meanwhile, the front surface of the piezoelectric ceramic plate 141 with bare leakage in the transducer 14 is contacted with electrolyte, under the action of 1.7MHz alternating current output by the power amplification plate 2, the two piezoelectric ceramic plates 141 symmetrical about the induction electrode 6 generate high-frequency vibration sound waves 16 due to the inverse piezoelectric effect, the sound waves 16 propagate in the electrolyte in a bulk wave mode and respectively propagate to the processing surface and the non-processing surface of the workpiece 601 in a direction of 45 degrees with the plane of the workpiece 601, after the bulk wave in the electrolyte encounters the workpiece 601, one part propagates at the interface between the workpiece 601 and the electrolyte in a surface wave mode, and the other part reflects back to the electrolyte in a reflection wave mode. Because the bulk wave induces surface waves, the incident and reflected waves create a large pressure gradient in the electrolyte around the machined and non-machined surfaces of the workpiece 601, thereby creating acoustic streaming that promotes timely removal of the electrolytic products 17 from the machined and non-machined surfaces of the workpiece. In particular, the acoustic streaming forces involved in an embodiment of the present invention have a strong effect only near the machined and non-machined surfaces of the workpiece.

Simultaneously, the water inlets of the two pumps 8 respectively extract electrolyte in the electrolytic tank 7 from the hose interfaces 703 below the front side wall 701 and the rear side wall 701 of the electrolytic tank 7, and the water outlets of the two pumps 8 sequentially convey the electrolyte to the hose 9, the hose interfaces 703 below the front side wall 701 and the rear side wall 701 of the electrolytic tank 7 and the nozzles 708, so that the water outlet 712 sprays electrolyte flow 15 which is 45 degrees with the plane where the workpiece 601 is positioned. In a laminar flow state, the electrolyte flow 15 has a high flow velocity at a position far from the processing surface, so that the electrolytic product 17 of the processing surface and the non-processing surface of the workpiece 601, which is discharged by the bulk wave-induced surface wave, is washed away in time.

Meanwhile, the high-speed camera 12 can directly observe the bubble derivatization process in the processing process, and after observing bubble accumulation, the bubble removal rate can be improved by increasing the power of the power amplification board 2.

S4, post-treatment. And taking out the induction electrode 6, tearing off the insulating adhesive tape 603, and removing the photoresist 607 in the photoresist removing solution to obtain the processed metal microstructure.

The conventional mask electrolytic processing method according to a comparative example of the present invention comprises the steps of:

S11, processing the workpiece 601. The photoresist 607 is coated on the processing surface of the metal plate 606, and the film is patterned by photoresist homogenizing, photoresist exposing and developing processes. Wherein the photoresist 607 pattern of the work piece 601 processing surface is a micro-clamp. At the same time, the non-machined surface of the workpiece 601 is completely coated with an insulating photoresist and is not patterned.

S12, manufacturing an anode. Drilling holes at a non-processing position of the processing surface of the workpiece 601, connecting the positive electrode of the power line 3, and performing insulation treatment at the connecting position by adopting epoxy resin glue. The non-processing surface of the workpiece 601 is covered on the square through hole 604 of the insulating baffle 602, and the non-processing position around the processing surface of the workpiece 601 is adhered to any side of the insulating baffle 602 by using the insulating tape 603.

S13, conventional mask electrolytic machining. The insulating shutter 602 is inserted into the clamping groove 710 of the electrolytic cell 7 so that the machined surface of the workpiece 601 is positioned on the same side as the cathode 13, the workpiece 601 serves as an anode, and the workpiece 601 and the cathode 13 are supplied with power by the power source 1. While slightly moving the insulating shutter 602 ensures that the surface to be machined is in the very centre position of the electrolytic bath 7. The spotlight 10, the high-speed camera 12, the two pumps 8, the power supply 1 are turned on in sequence, and conventional mask electrolytic machining and monitoring are performed at the same time. Wherein the electrolyte is 25% wt sodium chloride, the power supply current is 0.5A, and the processing time is 10s.

S14, post-treatment. And taking out the insulating baffle 602, tearing off the insulating adhesive tape 603, and removing the photoresist 607 in the photoresist removing solution to obtain the processed metal microstructure.

Data analysis of examples and comparative examples:

Fig. 15 is a graph comparing the electrostatic induction mask electrolytic machining of bulk wave induced surface waves with the conventional mask electrolytic machining, wherein the left side of fig. 15 is the conventional mask electrolytic machining micro-clamp, and the right side is the electrostatic induction mask electrolytic machining micro-clamp of bulk wave induced surface waves. The static induction mask electrolytic machining method of the bulk wave induced surface wave overcomes the problems of bubble interference and poor uniformity existing in the traditional mask electrolytic machining technology, the bubble coverage rate Br=3% in the machining process, and the non-uniformity Nu=12.5% of the finally prepared micro clamp. Compared with the traditional mask electrolytic machining method (Br=95% and Nu=100%), the method provided by the invention has the advantages that Br is reduced by 96.8%, nu is reduced by 87.5%, and bubble coverage rate and uniformity are greatly improved. Therefore, the invention can effectively improve the mass transfer efficiency, reduce the surface coverage rate of bubbles and ensure the service performance of the microstructure device.

The examples described above represent only embodiments of the invention and are not to be understood as limiting the scope of the patent of the invention, it being pointed out that several variants and modifications may be made by those skilled in the art without departing from the concept of the invention, which fall within the scope of protection of the invention.

Claims (9)

1. The visualization device for the electrostatic induction mask electrolytic machining of the bulk wave induced surface wave is characterized by mainly comprising a power supply (1), a power amplification plate (2), a power line (3), a signal line (4), an anode (5), an induction electrode (6), an electrolytic tank (7), two pumps (8), four hoses (9), a cathode (13) and two transducers (14), wherein the visualization device comprises the following components:

The power supply (1) supplies power to the anode (5) and the cathode (13) through the power line (3), the anode (5) and the cathode (13) are respectively arranged on the inner sides of the front side wall and the rear side wall (701) of the electrolytic tank (7), the induction electrode (6) is arranged in the middle of the electrolytic tank (7), the two transducers (14) are respectively arranged on the inner sides of the front side wall and the rear side wall (701) of the electrolytic tank (7), the power amplification plate (2) drives the two transducers (14) through the signal line (4) to remove electrolytic products (17), four hoses (9) are respectively arranged on the outer sides of the front side wall and the rear side wall (701) of the electrolytic tank (7), one end of each first hose is connected with a hose interface (703) on the outer side of the front side wall (701), the other end of each first hose is communicated with a first pump (8), and the other end of each second hose is communicated with a second pump (8), and the pumps (8) realize circulation of electrolyte in the electrolytic tank (7) through the hoses (9);

The electrolytic product (17) is generated in the processing process of the processing surface and the non-processing surface of the workpiece (601) on the induction electrode (6), and when the induction electrode (6) is arranged in the middle of the electrolytic tank (7), the processing surface of the workpiece (601) and the cathode (13) are positioned on the same side, and the non-processing surface of the workpiece (601) and the anode (5) are positioned on the same side.

2. The visualization device for the electrostatic induction mask electrolytic machining of bulk wave induced surface waves according to claim 1, wherein the high-speed camera (12) is fixed on a camera bracket (11), and the machining process of the workpiece (601) is observed in real time through the front or rear side wall (701) of the electrolytic bath (7).

3. The visualization device for electrostatic induction mask electrolytic machining of bulk wave induced surface waves according to claim 2, wherein the electrolytic cell (7) comprises a side wall (701), an electrode holder (702), a hose connector (703), a transducer holder (707), a nozzle (708), a limiting plate (709), and a clamping groove (710), specifically:

The two electrode supports (702), the four transducer supports (707) and the two nozzles (708) are positioned on the inner sides of the front side wall and the rear side wall (701) of the electrolytic tank (7), the four hose connectors (703) are positioned on the outer sides of the front side wall and the rear side wall (701) of the electrolytic tank (7), the front side wall and the rear side wall (701) are of plate structures, the two limiting plates (709) are of concave plate structures and are parallel to the two side walls (701) and positioned in the middle of the electrolytic tank (7), and a clamping groove (710) is formed between the two limiting plates (709), and the clamping groove (710) is used for inserting the induction electrode (6).

4. A visualization apparatus for electrostatically induced masking electrolytic machining of bulk wave-induced surface waves as set forth in claim 3, wherein:

The induction electrode (6) divides the electrolytic tank (7) into a front part and a rear part, an anode (5) and a cathode (13) which are arranged in the electrolytic tank (7) are symmetrically arranged about the induction electrode (6), two transducers (14) are symmetrically arranged about the induction electrode (6), and two nozzles (708) in the electrolytic tank (7) are symmetrically arranged about the induction electrode (6);

The transducer (14) is inserted into a ceramic fixing hole (713) in the transducer bracket (707), and the transducer (14) is positioned between the anode (5) or the cathode (13) and the nozzle (708);

the centers of the workpiece (601) positioned on the induction electrode (6), the water outlet (712) positioned on the nozzle (708) and the piezoelectric ceramic plate (141) positioned on the transducer (14) are positioned at the same horizontal position;

the electrolyte flow (15) sprayed by the water outlet hole (712) on the nozzle (708) and the plane of the workpiece (601) are 45 degrees, and the direction of the sound wave (16) excited by the piezoelectric ceramic piece (141) of the transducer (14) and the plane of the workpiece (601) are 45 degrees.

5. The visualization device for electrostatic induction mask electrolytic machining of bulk wave induced surface waves according to claim 4, wherein the induction electrode (6) comprises a workpiece (601), an insulating baffle sound wave (602), an insulating adhesive tape (603) and a slider (605), and specifically:

a through hole (604) is formed in the middle of the insulating baffle sound wave (602);

The workpiece (601) is manufactured by coating photoresist (607) on one side of a metal plate (606), wherein the photoresist (607) is an insulating material with a hollowed pattern, the side of the metal plate (606) coated with the photoresist (607) is a processing surface, and the side not coated with the photoresist is a non-processing surface;

The slide block (605) is arranged above the insulating baffle sound wave (602), and the slide block (605) can slide on the limiting plate (709) in the electrolytic tank (7) so that the center of the processing surface of the workpiece (601) is positioned at the center of the electrolytic tank (7).

6. The visualization device for electrostatic induction mask electrolytic machining of bulk wave induced surface waves according to claim 5, wherein the anode (5), the cathode (13), the transducer (14) and the induction electrode (6) are all fixed to the electrolytic tank (7) by riveting.

7. A method of electrostatically induced masking electrolytic machining of bulk wave-induced surface waves implemented by a visualization device as claimed in any one of claims 1 to 6, comprising the steps of:

s1, manufacturing a workpiece (601);

coating photoresist (607) on the processing surface of the metal plate (606), and realizing the film patterning by photoresist homogenizing, photoresist exposure and developing processes;

s2, manufacturing an induction electrode (6);

covering the non-processing surface of the workpiece (601) with a through hole (604) of the insulating baffle sound wave (602), and adhering non-processing positions around the processing surface of the workpiece (601) on any side of the insulating baffle sound wave (602) by using an insulating adhesive tape (603);

s3, carrying out electrostatic induction mask electrolytic machining on the bulk wave induced surface wave;

inserting an induction electrode (6) into a clamping groove (710) of the electrolytic tank (7) to enable the processing surface of a workpiece (601) and a cathode (13) to be positioned on the same side, enabling the non-processing surface of the workpiece (601) and an anode (5) to be positioned on the same side, and simultaneously moving the induction electrode (6) to ensure that the surface to be processed is positioned at the right center of the electrolytic tank (7);

Under the action of an electric field, the processing surface and the non-processing surface of the workpiece (601) respectively generate electrolysis products (17), the transducer (14) generates sound waves (16), the sound waves (16) are transmitted in the electrolyte in a bulk wave mode through the insulating film and respectively transmitted to the processing surface and the non-processing surface of the workpiece (601) in a direction of 45 degrees with the plane of the workpiece (601) to generate sound flow, and the electrolysis products (17) are promoted to be timely discharged from the processing surface and the non-processing surface of the workpiece (601);

The water inlets of the two pumps (8) are used for pumping electrolyte in the electrolytic tank (7) through a hose, the water outlets are used for conveying the electrolyte to the nozzle (708) through the hose, so that the water outlet (712) sprays electrolyte flow (15) which is 45 degrees with the plane of the workpiece (601), and the electrolyte flow (15) is used for flushing away electrolyte products (17) which are discharged from the processing surface and the non-processing surface of the workpiece (601) by the bulk wave induced surface waves;

s4, post-processing to obtain the processed metal microstructure.

8. The method for electrostatically induced mask electrolytic machining of bulk wave induced surface waves realized by a visualization device according to claim 7, characterized in that the bubble derivatization process during the machining is observed by a high-speed camera (12), and after bubble accumulation is observed, the bubble removal rate is increased by increasing the power of the power amplifier board (2).

9. The method for electro-static induction mask processing of bulk wave induced surface waves by a visualization device according to claim 7, wherein the post-treatment process comprises the steps of taking out the induction electrode (6), tearing off the insulating tape (603), and removing the photoresist (607) in the photoresist removing solution to obtain the processed metal microstructure.