CN119407218A - A high-speed, high-rigidity, ultra-precision air-floating spindle unit device - Google Patents
A high-speed, high-rigidity, ultra-precision air-floating spindle unit device Download PDFInfo
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- CN119407218A CN119407218A CN202411850417.7A CN202411850417A CN119407218A CN 119407218 A CN119407218 A CN 119407218A CN 202411850417 A CN202411850417 A CN 202411850417A CN 119407218 A CN119407218 A CN 119407218A
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- air
- wall
- fixedly connected
- floating
- rigidity
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/70—Stationary or movable members for carrying working-spindles for attachment of tools or work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention discloses high-speed high-rigidity ultra-precise air-floatation main shaft unit equipment which comprises a base, a shell, an end cover, bolts, shaft shoulders, a second annular groove, a second air hole, a fourth sealing ring, a second air return hole, a suspension rotor, an electromagnet, a coil, a third joint, a second main air passage, a second branch air passage, a fixture, a working shaft, a cavity, a limiting block and an inner shaft, wherein the first air return hole is formed in the base; according to the invention, by introducing a magnetic suspension technology, the air-bearing main shaft can enjoy more stable support during operation, the rigidity of the main shaft is enhanced, and the main shaft can still maintain excellent stability during high-load or high-speed operation, and the air-bearing main shaft can exhibit higher processing precision and longer service life in the precision processing field, and the stability of the shaft shoulder is ensured through the shaft shoulder stabilizing structure, so that better support and stability are provided when external impact or load is applied, the rotation precision of the main shaft is improved, and the overall production efficiency and product quality are improved.
Description
Technical Field
The invention relates to the technical field of air floatation spindles, in particular to high-speed high-rigidity ultra-precise air floatation spindle unit equipment.
Background
The air bearing spindle is a sliding bearing using air (usually air, but possibly other air) as a lubricant, and is formed by a motor, a bearing, a gas supply system and the like through high-speed rotation, wherein the gas supply system supplies compressed air with certain pressure and flow rate to the bearing part during operation, the air is controlled through a regulating valve and a filter to ensure stability and precision, when the compressed air enters the bearing part, a thin-layer air film rotating at high speed is formed during rotation, and the air film generates an upward supporting force so that the spindle can be suspended above the air film and can freely rotate.
The existing air-bearing spindle has the defects that firstly, the air-bearing spindle is required to rotate at a high speed and has low friction, meanwhile, the air-bearing spindle is often accompanied with the compromise in rigidity, the rigidity is poor in stability of the spindle when the air-bearing spindle bears a large load or is processed at a high precision, the processing precision is affected, the rigidity is limited to be applied to the spindle in a wider industrial field, particularly in precision manufacturing requiring high rigidity and stability, the problem is particularly remarkable, secondly, in practical application, the precision is difficult to reach theoretical expectation due to the interference of various factors, the precision is insufficient, the processed product cannot meet strict tolerance requirements, the overall product quality and the production efficiency are affected, and thirdly, friction and abrasion can still occur between a journal and a bearing under long-time operation or severe working conditions despite the fact that the air-bearing spindle is subjected to gas lubrication, the friction and abrasion can reduce the rotation precision and the stability of the spindle, ageing and damage of the spindle can be accelerated, and the service life of the spindle is shortened.
Disclosure of Invention
The invention aims to provide high-speed high-rigidity ultra-precise air floatation main shaft unit equipment so as to solve the problems in the background technology.
In order to achieve the purpose, the high-speed high-rigidity ultra-precise air floatation main shaft unit device comprises a base, wherein an outer shell is fixedly connected to the outer wall of one side of the base, an inner shell is fixedly connected to the inner wall of the outer shell, an air floatation sleeve is fixedly connected to the inner wall of the inner shell, a main shaft body is sleeved in the air floatation sleeve, a suspension rotor is fixedly connected to the outer wall of the main shaft body, an electromagnet is sleeved on the suspension rotor and fixedly connected to the inner wall of the inner shell, a coil is arranged on the electromagnet, an inner shaft is sleeved in the main shaft body, a limiting block is arranged on the outer wall of the inner shaft, and the limiting block is slidably connected to the inner wall of the main shaft body.
As a further technical scheme of the invention, a first annular groove is formed in the outer wall of the air floatation sleeve, a first air hole is formed in the inner wall of the first annular groove, an air return annular groove is formed in the inner wall of the air floatation sleeve, a first air return hole is formed in the inner wall of the air return annular groove, a cavity is formed between the outer shell and the inner shell, the first air return hole is connected in the cavity in a conducting manner, an air return connector is fixedly connected to the outer shell, and a third sealing ring is sleeved at two ends of the air floatation sleeve.
As a further technical scheme of the invention, the outer walls of the two sides of the base are fixedly connected with first connectors, the inner shell is internally provided with a first main air passage, the first connectors are connected in a conducting manner in the first main air passage, the first main air passage is connected with a first branch air passage in a conducting manner, and the first branch air passage is connected in the first annular groove in a conducting manner.
As a further technical scheme of the invention, a fixed plate is fixedly connected in the base, a first piston is arranged on one side of the fixed plate, a second piston is arranged on the other side of the fixed plate, the first piston and the second piston are both sleeved in the base, a connecting column is fixedly connected on the outer wall of one side of the first piston, the other end of the connecting column is fixedly connected with the second piston, a coupler is rotatably connected on the second piston, the other end of the coupler is fixedly connected on the inner shaft, a first sealing ring is sleeved on the first piston, and a second sealing ring is sleeved on the second piston.
As a further technical scheme of the invention, a spring is arranged on the outer wall of one side of the fixed plate, the other end of the spring is arranged on the outer wall of one side of the first piston, and a third joint is fixedly connected on the outer wall of one side of the base.
As a further technical scheme of the invention, the main shaft body is fixedly connected with a rotary rotor, the rotary rotor is sleeved with a stator, and the stator is fixedly connected to the inner wall of the inner shell.
As a further technical scheme of the invention, the spindle body is fixedly connected with the shaft shoulder, the position of the spindle body corresponding to the shaft shoulder is sleeved with the fixing sleeve, the fixing sleeve is fixedly connected to the inner wall of the inner shell, the fixing sleeve is internally provided with the floating groove, the shaft shoulder is arranged in the floating groove, and the fixing sleeve is sleeved with the fourth sealing ring.
As a further technical scheme of the invention, a second ring groove is arranged on the outer wall of the fixed sleeve, a second air hole is arranged in the second ring groove and is connected in a conducting manner in the floating groove, a second air return hole is arranged on the inner wall of the inner shell at the position corresponding to the second ring groove, and the second air return hole is connected in a conducting manner in the cavity.
As a further technical scheme of the invention, the outer walls of the two sides of the base are fixedly connected with second connectors, a second main air passage is arranged in the inner shell, a second branch air passage is connected to the second main air passage in a conducting way, and the second branch air passage is connected to the second annular groove in a conducting way.
As a further technical scheme of the invention, one end of the outer shell is provided with an end cover, a bolt is sleeved on the end cover, the other end of the bolt is connected with the inner shell in a threaded manner, one end of the inner shaft is fixedly connected with a clamp, and the clamp is internally and fixedly connected with a working shaft.
Compared with the prior art, the invention has the beneficial effects that the magnetic levitation technology is introduced, so that the air levitation main shaft can enjoy more stable support during operation, the rigidity of the main shaft is enhanced, the main shaft can still maintain excellent stability when bearing high load or high-speed operation, the air levitation main shaft can show higher processing precision and longer service life in the precision processing field, the stability of the shaft shoulder is ensured through the shaft shoulder stabilizing structure, better support and stability are provided when the shaft shoulder is subjected to external impact or load, the rotation precision of the main shaft is improved, the overall production efficiency and the product quality are improved, meanwhile, the magnetic levitation technology is introduced, the suspension effect is improved, the friction and abrasion of the shaft neck at one end of the main shaft are reduced, the service life of the main shaft is prolonged, the heat and noise generated by friction are also reduced, the air levitation main shaft is more stable and quiet during operation, the precision stability of the main shaft is maintained, and excellent processing performance can still be maintained after long-time operation.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic elevational view of the present invention;
FIG. 3 is a schematic view of a three-dimensional cut-away structure of the present invention;
FIG. 4 is an enlarged schematic view of the area A in FIG. 3;
FIG. 5 is a schematic elevational view in cross-section of the present invention;
FIG. 6 is an enlarged schematic view of the area B in FIG. 5;
FIG. 7 is an enlarged schematic view of the area C in FIG. 5;
fig. 8 is an enlarged schematic view of the area D in fig. 5.
1, Base, 2, outer shell, 3, end cover, 4, bolt, 5, first piston, 6, fixed plate, 7, second piston, 8, spring, 9, first sealing ring, 10, second sealing ring, 11, connecting post, 12, coupling, 13, main shaft body, 14, stator, 15, rotary rotor, 16, inner shell, 17, air floating sleeve, 18, first ring groove, 19, first air hole, 20, first joint, 21, second joint, 22, return air joint, 23, first main air passage, 24, first branch air passage, 25, third sealing ring, 26, return air ring groove, 27, first return air hole, 28, fixed sleeve, 29, floating groove, 30, shaft shoulder, 31, second ring groove, 32, second air hole, 33, fourth sealing ring, 34, second return air hole, 35, suspending rotor, 36, electromagnet, 37, coil, 38, third joint, 39, second main air passage, 40, second branch air passage, 41, fixture, 42, shaft, 43, 45, inner shaft, and inner shaft.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-8, an embodiment of the present invention provides a high-speed high-rigidity ultra-precise air-floating main shaft unit device, which comprises a base 1, wherein an outer shell 2 is fixedly connected to an outer wall of one side of the base 1, an inner shell 16 is fixedly connected to an inner wall of the outer shell 2, an air-floating sleeve 17 is fixedly connected to an inner wall of the inner shell 16, a main shaft body 13 is sleeved in the air-floating sleeve 17, a suspension rotor 35 is fixedly connected to an outer wall of the main shaft body 13, an electromagnet 36 is sleeved on the suspension rotor 35, the electromagnet 36 is fixedly connected to an inner wall of the inner shell 16, a coil 37 is arranged on the electromagnet 36, an inner shaft 45 is sleeved in the main shaft body 13, a limiting block 44 is arranged on an outer wall of the inner shaft 45, and the limiting block 44 is slidably connected to an inner wall of the main shaft body 13; the outer wall of the air-floating sleeve 17 is provided with a first annular groove 18, the inner wall of the first annular groove 18 is provided with a first air hole 19, the inner wall of the air-floating sleeve 17 is provided with an air return annular groove 26, the inner wall of the air return annular groove 26 is provided with a first air return hole 27, a cavity 43 is arranged between the outer shell 2 and the inner shell 16, the first air return hole 27 is connected in the cavity 43 in a conducting way, the outer shell 2 is fixedly connected with an air return joint 22, the two ends of the air-floating sleeve 17 are sleeved with a third sealing ring 25, the first annular groove 18 and the first air hole 19 are used for guiding compressed air into the main shaft body 13, a thin-layer air film rotating at a high speed is formed in the rotating process, the air film can generate an upward supporting force, the main shaft body 13 can suspend in the air-floating sleeve 17 and can rotate freely, the outer walls of the two sides of the base 1 are fixedly connected with a first joint 20, the inner shell 16 is internally provided with a first main air passage 23, the first joint 20 is connected in the first main air passage 23 in a conducting way, a first branch air passage 24 is connected on the first main air passage 23 in a conducting way, the first branch air passage 24 is connected in the first annular groove 18 in a conducting way, a first joint 20, The first main air passage 23 and the first branch air passage 24 are used for conveying air into the first annular groove 18; the inner part of the base 1 is fixedly connected with a fixing plate 6, one side of the fixing plate 6 is provided with a first piston 5, the other side of the fixing plate 6 is provided with a second piston 7, the first piston 5 and the second piston 7 are sleeved in the base 1, a connecting column 11 is fixedly connected to the outer wall of one side of the first piston 5, the other end of the connecting column 11 is fixedly connected to the second piston 7, a coupler 12 is rotatably connected to the second piston 7, the other end of the coupler 12 is fixedly connected to an inner shaft 45, a first sealing ring 9 is sleeved on the first piston 5, a second sealing ring 10 is sleeved on the second piston 7, and the first piston 5 and the second piston 7 are used for pushing the inner shaft 45; the spring 8 is arranged on the outer wall of one side of the fixed plate 6, the other end of the spring 8 is arranged on the outer wall of one side of the first piston 5, a third joint 38 is fixedly connected on the outer wall of one side of the base 1, the spring 8 is used for resetting the first piston 5, the main shaft body 13 is fixedly connected with the rotary rotor 15, the stator 14 is sleeved on the rotary rotor 15 and fixedly connected with the inner wall of the inner shell 16, the rotary rotor 15 and the stator 14 are used for driving the main shaft body 13 to rotate, the main shaft body 13 is fixedly connected with a shaft shoulder 30, the position of the main shaft body 13 corresponding to the shaft shoulder 30 is sleeved with a fixed sleeve 28, the fixed sleeve 28 is fixedly connected with the inner wall of the inner shell 16, a floating groove 29 is formed in the fixed sleeve 28, the shaft shoulder 30 is arranged in the floating groove 29, a fourth sealing ring 33 is sleeved on the fixed sleeve 28, the shaft shoulder 30 is used for positioning and supporting, and providing additional supporting and stability when the main shaft body 13 is subjected to external impact or load, the outer wall of the fixed sleeve 28 is provided with a second ring groove 31, a second air hole 32 is arranged in the second ring groove 31, the second air hole 32 is connected in a conducting way in the floating groove 29, a second air return hole 34 is arranged on the inner wall of the inner shell 16 at the position corresponding to the second ring groove 31, the second air return hole 34 is connected in a conducting way in the cavity 43, the fixed sleeve 28, The floating groove 29, the second ring groove 31 and the second air hole 32 are used for keeping the shaft shoulder 30 in a floating state, the outer walls of the two sides of the base 1 are fixedly connected with the second joint 21, the inner shell 16 is internally provided with the second main air passage 39, the second main air passage 39 is connected with the second branch air passage 40 in a conducting way, the second branch air passage 40 is connected in the second ring groove 31 in a conducting way, the second joint 21, the second main air passage 39 and the second branch air passage 40 are used for supplying air into the second ring groove 31, one end of the outer shell 2 is provided with the end cover 3, the end cover 3 is sleeved with the bolt 4, the other end of the bolt 4 is connected with the inner shell 16 in a threaded way, one end of the inner shaft 45 is fixedly connected with the clamp 41, the inner clamp 41 is fixedly connected with the working shaft 42, the end cover 3 and the bolt 4 are used for closing the outer shell 2 and the inner shell 16, and the clamp 41 is used for connecting the working shaft 42.
Working principle: when the invention is used, the air source is connected through the first connector 20 on the base 1, is conveyed into the first annular groove 18 on the air floatation sleeve 17 through the first main air passage 23 and the first branch air passage 24 in the inner shell 16, and is conveyed to the outer wall of the main shaft body 13 through the first air hole 19, when compressed air enters the main shaft body 13, a thin-layer air film rotating at high speed is formed in the rotating process, the air film can generate an upward supporting force, so that the main shaft body 13 can suspend in the air floatation sleeve 17 and can freely rotate, the air floatation rotating purpose is realized, the air flow enters the cavity 43 between the outer shell 2 and the inner shell 16 through the first air return hole 27 in the air return annular groove 26 and circulates through the air return connector 22, the suspension rotor 35 on one side of the shaft shoulder 30 on the main shaft body 13 rotates in the electromagnet 36 in the rotating process, the electromagnet 36 is electrified through the coil 37 to generate a magnetic field so that the suspension rotor 35 is suspended in the electromagnet 36, the rigidity, stability and rotation precision of the shaft end are further improved, the shaft neck is protected, the power of the main shaft body 13 comes from the rotary rotor 15 at one end, when the stator 14 winding is electrified, the magnetic field is generated around the stator 14 iron core, the magnetic field of the rotary rotor 15 interacts with the rotary magnetic field generated by the stator 14 to generate attraction or repulsion force, the force acts on the rotary rotor 15 to start rotating, the main shaft body 13 is driven to rotate, the shaft shoulder 30 is positioned in the floating groove 29 in the fixed sleeve 28 in the rotating process, compressed air flow is conveyed into the second ring groove 31 through the second connector 21, the second main air passage 39 and the second branch air passage 40, and is conveyed to two sides of the shaft shoulder 30 through the second air holes 32, so that the shaft shoulder 30 keeps a floating state in the floating groove 29, the second air return hole 34 is used for returning air into the cavity 43, the position of the shaft shoulder 30 in the floating groove 29 is balanced by controlling the strength of air flows at two sides, the shaft shoulder 30 is prevented from being impacted, the rigidity and the stability of the air floatation main shaft are further improved, when the working shaft 42 needs to be replaced, air flows are fed through the third joint 38, the first piston 5 is pushed to move by the air flows, the first piston 5 drives the second piston 7 to synchronously move through the connecting column 11, meanwhile, the spring 8 on the fixing plate 6 is compressed, the second piston 7 pushes the inner shaft 45 through the coupler 12, the inner shaft 45 further pushes the clamping apparatus 41 out of the main shaft body 13, the clamping apparatus 41 is opened to replace the working shaft 42, and then the air floatation main shaft is reset under the action of the spring 8, wherein the end cover 3 and the bolt 4 are used for sealing the outer shell 2 and the inner shell 16, the first sealing ring 9, the second sealing ring 10, the third sealing ring 25 and the fourth sealing ring 33 are used for sealing, and the limiting block 44 is used for limiting the circumference of the inner shaft 45.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411850417.7A CN119407218A (en) | 2024-12-16 | 2024-12-16 | A high-speed, high-rigidity, ultra-precision air-floating spindle unit device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411850417.7A CN119407218A (en) | 2024-12-16 | 2024-12-16 | A high-speed, high-rigidity, ultra-precision air-floating spindle unit device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN119407218A true CN119407218A (en) | 2025-02-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202411850417.7A Pending CN119407218A (en) | 2024-12-16 | 2024-12-16 | A high-speed, high-rigidity, ultra-precision air-floating spindle unit device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN119407218A (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6288465B1 (en) * | 1997-04-28 | 2001-09-11 | Ntn Corporation | Combined externally pressurized gas-magnetic bearing assembly and spindle device utilizing the same |
| CN105149621A (en) * | 2015-09-01 | 2015-12-16 | 上海大学 | Electric spindle supported by magnetic suspension and lambdoid-groove dynamic pressure and static pressure gas combined bearings |
| CN107559304A (en) * | 2017-09-15 | 2018-01-09 | 广东工业大学 | A kind of combined type air-bearing |
| CN109571062A (en) * | 2018-10-26 | 2019-04-05 | 广州市昊志机电股份有限公司 | A kind of aperture-porous restriction combination air-float main shaft |
| CN109751331A (en) * | 2019-03-04 | 2019-05-14 | 扬州大学 | A gas-magnetic hybrid bearing device for stable suspension of high-speed spindle |
| CN210412572U (en) * | 2019-08-01 | 2020-04-28 | 杭州电子科技大学 | Air floatation main shaft axial dynamic stiffness self-adaption device based on micro-disturbance |
| CN210817491U (en) * | 2019-09-12 | 2020-06-23 | 东莞市显隆电机有限公司 | Ultrahigh-speed air-floating electric spindle with high precision and low energy consumption |
| CN111408744A (en) * | 2020-05-15 | 2020-07-14 | 东莞市显隆电机有限公司 | Knife handle type air-float high-speed electric spindle |
| WO2023087730A1 (en) * | 2021-11-19 | 2023-05-25 | 青岛海尔空调电子有限公司 | Compressor and refrigeration system |
| CN117359487A (en) * | 2023-11-28 | 2024-01-09 | 沈阳工业大学 | Magnetic and air hybrid support electric spindle |
-
2024
- 2024-12-16 CN CN202411850417.7A patent/CN119407218A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6288465B1 (en) * | 1997-04-28 | 2001-09-11 | Ntn Corporation | Combined externally pressurized gas-magnetic bearing assembly and spindle device utilizing the same |
| CN105149621A (en) * | 2015-09-01 | 2015-12-16 | 上海大学 | Electric spindle supported by magnetic suspension and lambdoid-groove dynamic pressure and static pressure gas combined bearings |
| CN107559304A (en) * | 2017-09-15 | 2018-01-09 | 广东工业大学 | A kind of combined type air-bearing |
| CN109571062A (en) * | 2018-10-26 | 2019-04-05 | 广州市昊志机电股份有限公司 | A kind of aperture-porous restriction combination air-float main shaft |
| CN109751331A (en) * | 2019-03-04 | 2019-05-14 | 扬州大学 | A gas-magnetic hybrid bearing device for stable suspension of high-speed spindle |
| CN210412572U (en) * | 2019-08-01 | 2020-04-28 | 杭州电子科技大学 | Air floatation main shaft axial dynamic stiffness self-adaption device based on micro-disturbance |
| CN210817491U (en) * | 2019-09-12 | 2020-06-23 | 东莞市显隆电机有限公司 | Ultrahigh-speed air-floating electric spindle with high precision and low energy consumption |
| CN111408744A (en) * | 2020-05-15 | 2020-07-14 | 东莞市显隆电机有限公司 | Knife handle type air-float high-speed electric spindle |
| WO2023087730A1 (en) * | 2021-11-19 | 2023-05-25 | 青岛海尔空调电子有限公司 | Compressor and refrigeration system |
| CN117359487A (en) * | 2023-11-28 | 2024-01-09 | 沈阳工业大学 | Magnetic and air hybrid support electric spindle |
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