CN119437391B - Single-frequency laser interferometry vibration measurement system and method based on optical fiber sensing - Google Patents
Single-frequency laser interferometry vibration measurement system and method based on optical fiber sensing Download PDFInfo
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- CN119437391B CN119437391B CN202411730043.5A CN202411730043A CN119437391B CN 119437391 B CN119437391 B CN 119437391B CN 202411730043 A CN202411730043 A CN 202411730043A CN 119437391 B CN119437391 B CN 119437391B
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Abstract
本发明公开了一种基于光纤传感的单频激光干涉振动测量系统及方法，包括激光器、分束器、环形器、合束器、耦合器、法拉第旋转镜、光电探测器及数据采集和处理模块；激光器一发出的单频激光通过分束器分为两路，一路作为信号光经过环形器一和合束器后照射至被测物体表面，反射光经原路径返回；另一路作为本振光直接进入耦合器，与信号光混频生成两路干涉信号，一路经环形器二和法拉第旋转镜偏转90度后进入光电探测器，另一路直接进入光电探测器，输出正交I/Q信号，通过数据采集和处理模块，采用相位解算方法提取振动位移，并通过差分计算得到振动速度。本发明通过优化光路设计和引入正交信号处理，降低系统成本，提高测量精度和抗干扰能力。
The present invention discloses a single-frequency laser interference vibration measurement system and method based on optical fiber sensing, including a laser, a beam splitter, a circulator, a beam combiner, a coupler, a Faraday rotator, a photodetector and a data acquisition and processing module; the single-frequency laser emitted by the laser is divided into two paths through the beam splitter, one path is used as signal light and then passes through the circulator and the beam combiner to irradiate the surface of the object to be measured, and the reflected light returns through the original path; the other path directly enters the coupler as the local oscillator light, and is mixed with the signal light to generate two interference signals, one path is deflected 90 degrees by the circulator and the Faraday rotator mirror and then enters the photodetector, and the other path directly enters the photodetector, outputs an orthogonal I/Q signal, and extracts the vibration displacement by the phase resolution method through the data acquisition and processing module, and obtains the vibration speed by differential calculation. The present invention reduces the system cost and improves the measurement accuracy and anti-interference ability by optimizing the optical path design and introducing orthogonal signal processing.
Description
Technical Field
The invention relates to the technical field of laser interference, in particular to a single-frequency laser interference vibration measurement system and method based on optical fiber sensing.
Background
The laser vibration measurement technology has the characteristics of high measurement precision, large measurement range, no interference to the surface to be measured and the like, and has become the technology with the most development potential and application prospect in the field of vibration measurement. The laser vibration measurement technology not only can perform nano-scale or even sub-nano-scale measurement on macro-scale and micro-scale characteristics of an object to realize ultra-precision magnitude transmission and magnitude tracing, but also can precisely describe and record the space-time behavior process of substances from ultra-low frequency to high frequency on micro-nano scale to reveal interaction mechanisms and scientific rules among the substances.
The laser vibration measuring technique mainly comprises a laser triangulation method, a light intensity method, a speckle interferometry, a holographic interferometry, a single-frequency laser interferometry, a double-frequency laser interferometry and the like. The laser triangulation method and the light intensity method belong to direct detection methods, the laser triangulation method has small measurement range, low measurement precision and low resolution, the laser triangulation method is not suitable for measuring high-frequency and high-speed vibration, the light intensity method is easily interfered by environment and a light source, the measurement precision is low, and the two methods are not suitable for high-precision measurement. Speckle interferometry is sensitive to environmental disturbances, and can only measure simple harmonic vibration, but cannot measure non-simple harmonic motion and impact, and holographic interferometry is time-consuming in processing and cannot measure in real time. The dual-frequency laser interferometry has the advantages of small influence of direct current drift on signals, strong anti-interference capability and the like, but has larger measurement nonlinear errors and difficult real-time correction and compensation because the measurement speed is limited, thereby restricting the measurement accuracy.
For vibration measurement by a single-frequency laser interferometry, two implementation schemes are mainly adopted at present, one is to build an interference system through a discrete optical element, and the other is to design a silicon optical chip integrated optical device to realize the interference system in a chip. The two schemes have advantages and disadvantages, the discrete optical element is easy to realize, the device cost is high, the system volume is large, and the silicon optical chip scheme can realize functions in smaller volume due to the adoption of the latest silicon optical integration technology, and has high design difficulty, long development flow period and a large threshold.
Disclosure of Invention
Aiming at the defects of the existing single-frequency laser interferometry vibration measurement, the invention discloses a single-frequency laser interferometry vibration measurement system and a single-frequency laser interferometry vibration measurement method based on optical fiber sensing, which can reduce the complexity and the manufacturing cost of the system and improve the precision and the stability of vibration measurement by simplifying the optical design and the signal processing.
The technical scheme is that in order to achieve the technical purpose, the invention adopts the following technical scheme:
a single frequency laser interferometry vibration measurement system based on fiber sensing, comprising:
The first laser is used for emitting continuous single-frequency laser;
The beam splitter is used for dividing the single-frequency laser into two paths, wherein the light beam of the first light path passes through the circulator I and the beam combiner respectively, and irradiates the surface of the measured object after being combined with the single-frequency reference laser beam emitted by the laser II, and the light beam reflected by the measured object returns through the beam combiner and the circulator I and enters the coupler as signal light;
The coupler is used for mixing two paths of light beams and generating two paths of interference light signals, wherein one path of interference light signals is deflected by 90 degrees through the Faraday rotary mirror after passing through the second circulator;
The photoelectric detector I and the photoelectric detector II are respectively used for receiving two paths of interference light signals and converting the interference light signals into an I signal and a Q signal;
And the data acquisition and processing module is used for resolving the I signal and the Q signal and acquiring vibration information of the measured object.
The invention also discloses a single-frequency laser interferometry vibration measurement method based on optical fiber sensing, which is applied to the single-frequency laser interferometry vibration measurement system based on optical fiber sensing, and specifically comprises the following steps:
the laser emits continuous single-frequency laser, and the beam is divided into two paths through the beam splitter;
One path of light beam sequentially passes through the first circulator and the beam combiner, and irradiates the surface of the measured object after being combined with the single-frequency reference laser beam emitted by the second laser, the light beam reflected by the measured object returns back through the beam combiner and the first circulator and enters the coupler, and the other path of light beam directly enters the coupler as local oscillation light;
The two paths of light beams are mixed through a coupler, and two paths of interference light signals are generated after the mixing;
One of the two interference optical signals passes through the circulator two and is deflected by 90 degrees through the Faraday rotating mirror and then enters the photoelectric detector two, and the other one of the two interference optical signals directly enters the photoelectric detector one;
the photoelectric detector I and the photoelectric detector II receive the interference light signals after mixing and convert the interference light signals into an I signal and a Q signal respectively;
the data acquisition and processing module processes the I signal and the Q signal and extracts vibration information of the object.
The single-frequency laser interference vibration measuring system and method based on optical fiber sensing have the following beneficial effects:
The invention adopts a double-light path design, adjusts the polarization direction of the mixed light beam through the Faraday rotating mirror, ensures that the polarization states of the signal light and the local oscillation light are matched, not only improves the stability of interference signals and avoids signal attenuation and interference caused by polarization mismatch, but also greatly reduces the sensitivity of a system to vibration environment and temperature fluctuation through stable polarization control of the Faraday rotating mirror, and the traditional optical interference system usually depends on a complex frequency mixing device and a multistage polarization control element.
The method has the advantages that the quadrature I signal and the quadrature Q signal are generated through the photoelectric detector, the phase information is obtained through the quadrature resolving method, the phase ambiguity problem of the traditional method is avoided, the phase information can be resolved continuously in the whole period through the quadrature signal processing, the phase change and the displacement are directly connected through a calculation formula, the resolving method based on the optical phase can achieve the nanoscale displacement precision, the real-time sampling and resolving of the I/Q signal are suitable for dynamic vibration measuring scenes, and high-frequency vibration analysis is supported.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below.
FIG. 1 is a schematic diagram of a single frequency laser interferometry vibration measurement system according to the present invention;
FIG. 2 is a flow chart of a single frequency laser interferometry vibration measurement method of the present invention.
Detailed Description
The present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments of the invention are shown, but in which the invention is not so limited.
As shown in fig. 1, the invention discloses a single-frequency laser interference vibration measurement system based on optical fiber sensing, which comprises a first laser, a second laser, a beam splitter, a first circulator, a second circulator, a beam combiner, a coupler, a faraday rotating mirror, a first photoelectric detector, a second photoelectric detector and a data acquisition and processing module, wherein:
The first laser is used for emitting continuous single-frequency laser, and the first laser adopts 1550nm polarization-maintaining narrow linewidth laser as a signal source;
The laser device II is used for debugging the optical path and calibrating a system, a 650nm single-mode laser is used as an indication light source, the circulator I is used for guiding the signal light to enter the beam combiner, and the beam reflected from the object to be tested is led back to the system, and the beam combiner is used for combining the beam of the laser device I and the beam of the laser device II into a coaxial beam and irradiating the surface of the object to be tested.
The light beam of the second light path is used as local oscillation light to be mixed with the light beam reflected by the first light path through the coupler directly;
the coupler is used for mixing two paths of light beams and generating two paths of interference light signals, one path of interference light signals is deflected by 90 degrees through the Faraday rotator mirror after passing through the second circulator, and the second circulator and the Faraday rotator mirror are used for adjusting the polarization direction of the mixed light beams so as to adapt to the input characteristic of the photoelectric detector;
For the laser interferometer, according to the Netzfeld sampling theorem, the problem of overlong acquisition time caused by large acquired data volume exists, so that the existing laser interferometer technology can adopt a mixer to realize frequency spectrum shifting from a high-frequency band-pass signal to a low-frequency band-pass signal. The mixing has high requirements on the waveform of the input signal, and the distortion of the original input signal forms high-frequency noise after Fourier transformation, so that the frequency interference and nonlinear distortion of the mixing output are caused. Therefore, it is also necessary to connect a low-pass filter after mixing to filter the high-frequency components. The frequency spectrum is shifted through the frequency mixing and the low-pass filtering of the external device, so that the sampling rate required by collecting the laser interference signals is greatly reduced, and the time required by processing the interference signals is shortened. However, the external mixer and the low-pass filter are introduced, so that the complexity of the whole optical path is increased, the number of required discrete optical devices is increased, the system construction cost is increased, and the probability of introducing external interference is obviously improved. In particular, the presence of a mixer may cause problems in that (1) the mixer may introduce phase noise or frequency drift, in particular during frequency conversion, which may affect the phase lock of the interferometry system when the phase of one of the signals is unstable due to the fact that the mixer depends on the phase relationship of the two different frequency signals, (2) the mixer may generate a plurality of output signals of different frequencies when the frequency signals are mixed with each other, which frequency components may differ from the original interference signal frequency, resulting in undesired signal superposition or frequency disturbances during measurement, which affect the interference effect of the system, and (3) the working principle of the mixer is based on the mixing of the different frequency signals, which may introduce time delays or phase delays, in particular when the mixer is used for low frequency signal conversion, which time delay effects may be more pronounced.
The invention creatively adopts the Faraday rotary mirror to replace the mixer, and achieves the aims of reducing the complexity of the optical path structure and the construction cost by optimizing the optical path structure. The Faraday rotating mirror is used as a phase regulator to precisely control the phase change of light waves by regulating the angle or the intensity of a magnetic field of the rotating mirror, so as to realize the modulation and demodulation of interference signals. In addition, the Faraday rotary mirror can reduce the influence of an external magnetic field on the propagation path of the optical wave, and improve the measurement accuracy of the system.
When the Faraday rotary mirror is built into the novel single-frequency laser interferometer, the optical path structure of other parts of the system needs to be improved, and the newly designed optical path structure also realizes the span from theory to practice when the Faraday rotary mirror is applied to the single-frequency laser interferometer. The magnetic field dependence, the optical loss and the scattering problem are inevitably brought about by introducing the Faraday rotary mirror, and the influence of the magnetic field dependence, the optical loss and the scattering problem on the system measurement is reduced by changing the external optical path mechanism of the Faraday rotary mirror, so that the novel single-frequency laser interferometer vibration measurement system designed by the invention has the advantages of reducing the complexity of an optical path, reducing the number of used discrete optical devices and the influence on the system performance brought by a mixer, and simultaneously reducing the adverse influence on the system performance brought by using the Faraday rotary mirror to a certain extent by optimizing the optical path structure, and ensuring the system measurement precision and performance.
The photoelectric detector I and the photoelectric detector II are respectively used for receiving two paths of interference light signals and converting the interference light signals into an I signal and a Q signal;
The data acquisition and processing module is used for carrying out digital processing on the I signal and the Q signal, calculating the vibration displacement and vibration speed information of the measured object through phase calculation, and comprises a signal processing module, an analog-to-digital conversion module, an algorithm processor module and a data uploading module.
The system comprises a photoelectric detector, a signal processing module, an analog-to-digital conversion module, an algorithm processor module and a data uploading module, wherein the signal processing module is used for preprocessing an analog signal output by the photoelectric detector and comprises filtering, gain adjustment, orthogonal signal generation and the like, the analog-to-digital conversion module is used for converting the analog signal output by the signal processing module into a digital signal so as to facilitate subsequent algorithm processing, the algorithm processor module is responsible for extracting vibration information of an object from the digital signal and comprises calculation of phase, displacement and speed, and the data uploading module is used for uploading the calculated vibration information to an upper computer to realize display and storage of the vibration information.
The working principle of the single-frequency laser interferometry vibration measurement system is as follows, firstly, the wave equation of the change of the electric field of light along with the time and the distance is as follows:
Wherein, Indicating the amplitude of the electric field,Indicating the frequency of the light and,Indicating the wavelength of the light and,Representing the initial phase of the light wave;
According to the wave equation, the electric field equations of the signal light and the local oscillator light can be obtained, and the electric field equations are respectively:
Wherein, AndRespectively representing the electric field of the signal light and the electric field of the local oscillation light,AndThe electric field amplitude of the signal light and the electric field amplitude of the local oscillation light are respectively represented,AndThe frequency of the signal light and the frequency of the local oscillation light are respectively represented.
The electric field calculation formula of superposition of the electric fields of the signal light and the local oscillation light on the photosensitive surface of the photoelectric detector is as follows:
according to square rate characteristics of the photodetector, its output current And electric fieldThe relation is as follows:
Wherein R is the current response coefficient of the photoelectric detector, Representing the integration time, which is much greater than the optical frequency periodTime of (2);
According to the above formula, two paths of orthogonal current signals can be finally obtained And:
Wherein, Representing a noisy light field;
The quadrature current signal is passed through a transimpedance amplifier to obtain a quadrature voltage signal, and for an ideal state, the expression of the IQ signal is:
Wherein, AndRespectively representing an I signal and a Q signal,AndThe amplitudes of the I signal and the Q signal are represented respectively,Indicating the propagation distance of the signal light,Indicating the propagation distance of the local oscillation light, t indicating time,Indicating the wavelength of the light.
The above formula gives the relationship between phase and displacement in a single pass, and in actual measurement, the influence of the displacement of the object on the phase should consider the two-pass optical path, and the relationship between the displacement and the phase can be expressed as:
Wherein, Representing the vibration displacement of the object to be measured,Indicating the amount of change in the phase of the signal light.
And performing differential derivation according to the obtained displacement and sampling rate to obtain the object vibration speed as follows:
Wherein, Indicating the vibration velocity of the object to be measured,Representing the sampling time interval.
As shown in fig. 2, the invention further provides a single-frequency laser interferometry vibration measurement method based on optical fiber sensing, which is used for realizing the single-frequency laser interferometry vibration measurement system based on optical fiber sensing, and specifically comprises the following steps:
The laser emits 1550nm continuous single-frequency laser, the beam is divided into two paths by the beam splitter, one path is used as signal light for irradiating the surface of the measured object, and the other path is used as local oscillation light for mixing with the signal light and used as interference reference light;
one path of light beam sequentially passes through the first circulator and the beam combiner, and irradiates the surface of the measured object after being combined with the single-frequency reference laser beam emitted by the second laser, the light beam reflected by the measured object returns back through the beam combiner and the first circulator to be used as signal light to enter the coupler, and the other path of light beam is used as local oscillation light to directly enter the coupler;
The signal light path is that one path of light beam emitted by the first laser enters the beam combiner after passing through the first circulator, the light beam is combined with the visible light beam emitted by the second laser into a coaxial light beam, the combined light beam irradiates the surface of the measured object, the reflected light of the surface of the measured object carries the dynamic change information of the path length under the vibration action, and the reflected light returns to the beam combiner, is guided to the coupler through the first circulator and is mixed with local oscillation light.
The path of the local oscillation light is specifically that another beam separated by the laser directly enters the coupler from the beam splitter, and is overlapped with the returned signal light to generate a mixed frequency optical signal.
The two paths of light beams are mixed through a coupler, and two paths of interference light signals are generated after the mixing;
One of the two interference optical signals passes through the circulator two and is deflected by 90 degrees through the Faraday rotating mirror and then enters the photoelectric detector two, and the other one of the two interference optical signals directly enters the photoelectric detector one;
The photoelectric detector I and the photoelectric detector II receive the interference light signals after mixing and respectively convert the interference light signals into an I signal and a Q signal;
the data acquisition and processing module processes the I signal and the Q signal, and extracts vibration information of the object, wherein the vibration information comprises vibration displacement and vibration speed.
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.
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| CN107515017A (en) * | 2017-07-20 | 2017-12-26 | 北京航天控制仪器研究所 | A kind of optical frequency domain reflectometer of light wave frequency shift modulation |
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| CN112097813B (en) * | 2020-09-14 | 2022-05-17 | 中国人民解放军国防科技大学 | A 3×3 coupler photoelectric detection method and device based on optical frequency modulation |
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| CN106052843A (en) * | 2016-08-09 | 2016-10-26 | 北京航天控制仪器研究所 | Heterodyne-interference-type optical fiber hydrophone time division multiplexing array and demodulation method |
| CN107515017A (en) * | 2017-07-20 | 2017-12-26 | 北京航天控制仪器研究所 | A kind of optical frequency domain reflectometer of light wave frequency shift modulation |
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