CN119492888A - A high-precision quartz crystal vibration beam accelerometer - Google Patents
A high-precision quartz crystal vibration beam accelerometer Download PDFInfo
- Publication number
- CN119492888A CN119492888A CN202411689830.XA CN202411689830A CN119492888A CN 119492888 A CN119492888 A CN 119492888A CN 202411689830 A CN202411689830 A CN 202411689830A CN 119492888 A CN119492888 A CN 119492888A
- Authority
- CN
- China
- Prior art keywords
- semicircular
- base
- circular
- quartz crystal
- bases
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
A high-precision quartz crystal vibrating beam accelerometer comprises a base, a watch core and a shell, wherein a circuit board is packaged in the base, the watch core is packaged on the base through the shell, the watch core comprises a mass pendulum, two resonant beams and two circular damping plates, the mass pendulum is made of quartz crystal materials, the mass pendulum comprises two semicircular bases, two semicircular swinging tongues and a circular flexible layer, the two semicircular bases and the two semicircular swinging tongues are respectively and symmetrically bonded on two sides of the circular flexible layer, a yielding gap is formed between the semicircular bases and the semicircular swinging tongues, the resonant beams are radially arranged above a strip-shaped groove in the center of the outer end face of the semicircular base, one end of each resonant beam is bonded with the semicircular bases, the other end of each resonant beam is bonded with the semicircular swinging tongues and is electrically connected with the circuit board, the two circular damping plates are connected on two sides of the two semicircular bases through inner end face semi-symmetrical bonding, and the resonant beams are located in strip-shaped holes of the circular damping plates, and the semicircular concave tables and the semicircular swinging tongues are opposite to form the vibrating gap.
Description
Technical Field
The invention belongs to the technical field of accelerometers, and particularly relates to a high-precision quartz crystal vibrating beam accelerometer.
Background
The accelerometer is a basic measuring unit of an inertial navigation and inertial guidance system, is arranged inside a bullet (arrow), measures the movement acceleration of the bullet (arrow), and obtains the speed and the position of the bullet (arrow) through integrating the acceleration. The quartz vibrating beam accelerometer is a novel high-precision solid-state sensor based on the characteristic of quartz vibration Liang Lipin, and has the advantages of high precision, small volume, digital output and the like compared with the traditional vibrating wire type and pendulum type integral gyro accelerometer.
The quartz vibrating beam accelerometer generally consists of a resonant beam, a mass pendulum, a damping plate, a shell and an excitation oscillating circuit. When the acceleration of the external carrier is sensed, the mass pendulum swings along the input shaft of the accelerometer under the action of inertia force, the mechanical frequency of tension force of one quartz vibration beam is increased, and the mechanical frequency of tension force of the other quartz vibration beam is reduced. The carrier acceleration can be obtained by solving the frequency difference of the double vibration beams through the excitation circuit.
At present, the split quartz vibrating beam accelerometer with mature market adopts a composite design mode of a metal mass pendulum and a quartz resonant beam, and has the following engineering technical problems that 1) the processing technology of a high-elastic alloy metal mass pendulum flexible beam is complex, the cost is high, 2) the connection of the mass pendulum and the resonant beam adopts a cementing mode, the thermal expansion coefficients of materials are not matched, the precision of the accelerometer is difficult to improve due to creep of an adhesive, and the highest precision is not higher than 100 mu g at present.
Disclosure of Invention
The invention provides a high-precision quartz crystal vibrating beam accelerometer which overcomes the defects of the prior art.
The technical scheme includes that the high-precision quartz crystal vibrating beam accelerometer comprises a base, a watch core and a shell, wherein a circuit board is packaged in the base, the watch core is arranged on the base, and the shell is sleeved on the base to seal the watch core in the shell;
The mass pendulum comprises two semicircular bases, two semicircular pendulum tongues and a circular flexible layer, wherein the two semicircular bases and the two semicircular pendulum tongues are respectively and symmetrically connected to two sides of the circular flexible layer in a bonding way, and a yielding gap is formed between the semicircular bases and the straight sides of the semicircular pendulum tongues;
the center of the outer end surface of the semicircular base is radially provided with a strip-shaped groove communicated with the straight edge of the semicircular base, the resonant beam is radially arranged above the strip-shaped groove, one end of the resonant beam is connected with the semicircular base in a bonding way, the other end of the resonant beam is connected with the semicircular swing tongue in a bonding way, and the circuit board is electrically connected with the resonant beam;
The center of the circular damping plates is radially provided with a strip-shaped hole, one half of the inner end surface is provided with a semicircular concave table, the two circular damping plates are connected to two sides of the two semicircular bases through the other half of the inner end surface in a symmetrical bonding mode, and the resonance beam is positioned in the strip-shaped hole, and the semicircular concave table and the semicircular swing tongue are opposite to each other to form a vibration gap.
The thicknesses of the semicircular base, the semicircular swing tongue and the circular flexible layer are 1.2 mm-4.2 mm, the thickness of the circular flexible layer is 0.02 mm-0.2 mm, the diameters of the semicircular base, the semicircular swing tongue and the circular flexible layer are 22mm, and the area of the semicircular swing tongue is 70mm 2～250mm2.
The depth of the semicircular concave table is 30-60 mu m.
The inner end of the base is provided with a circular boss, the watch core is coaxially fixed at the end part of the circular boss, and the opening end of the shell is sleeved on the periphery of the circular boss and sealed by laser welding.
The shell is filled with nitrogen.
Compared with the prior art, the invention has the following beneficial effects:
1. The mass pendulum is of a three-layer composite structure, and the flexible layer is used for replacing the high-elastic alloy metal flexible beam in the traditional scheme, so that the processing difficulty and cost of the flexible beam can be effectively reduced, and the flexible layer material is the same as the material of the resonant beam, and has the advantages of small specific stiffness, small thermal expansion coefficient, high chemical stability, good elastic stability, low elastic modulus and the like.
2. The invention utilizes the characteristics of strong processability and mature processing technology of the existing quartz crystal material. The pendulum tongue, the base and the flexible layer are connected into the mass pendulum in a bonding mode, and the mass pendulum is connected with the upper resonant beam and the lower resonant beam in a bonding mode, so that compared with a traditional bonding method, bonding connection is firmer and more reliable, and particularly, the problem that in the long-term use process of the prior art, the adhesive creep, poor stability caused by unmatched thermal expansion coefficients, large change of zero deflection along with the environmental temperature and the like can be avoided due to connection of homogeneous materials, and the working adaptability of severe environments is improved.
3. According to the embodiment of the invention, through theoretical calculation, the indexes such as the accelerometer precision not higher than 50 mug, the scale factor not less than 80Hz/g, strong environmental adaptability (vibration resistance, impact and the like) and the like can be realized.
Drawings
FIG. 1 is an exploded schematic view of the structure of the present invention;
FIG. 2 is a schematic diagram of a pendulum structure of the present invention;
FIG. 3 is a schematic view of a circular damper plate structure of the present invention;
Fig. 4 is a schematic view of the external structure of the present invention.
Detailed Description
The invention will now be described in detail with reference to figures 1-4 and the detailed description.
Referring to fig. 1, a high-precision quartz crystal vibrating beam accelerometer comprises a base 1, a watch core 2 and a shell 3, wherein a circuit board 1-1 is packaged in the base 1, the watch core 2 is arranged on the base 1, the shell 3 is sleeved on the base 1 to seal the watch core 2 in the shell 3, and the watch core 2 comprises a mass pendulum 21, two resonance beams 22 and two circular damping plates 23 which are all made of quartz crystal materials;
Referring to fig. 2, the mass pendulum 21 comprises two semicircular bases 211, two semicircular swing tongues 212 and a circular flexible layer 213, wherein the two semicircular bases 211 and the two semicircular swing tongues 212 are respectively and symmetrically connected to two sides of the circular flexible layer 213 in a bonding way, a clearance is reserved between the semicircular bases 211 and the straight edges of the semicircular swing tongues 212, a strip-shaped groove 214 penetrating through the straight edges of the semicircular bases 211 is formed in the center of the outer end faces of the semicircular bases 211 in the radial direction, the resonant beam 22 is arranged above the strip-shaped groove 214 in the radial direction, one end of the resonant beam 22 is connected with the semicircular base 211 in a bonding way, the other end of the resonant beam 22 is connected with the semicircular swing tongues 212 in a bonding way, and the circuit board 1-1 is electrically connected with the resonant beam 22;
Referring to fig. 3, the circular damping plates 23 have a bar-shaped hole 231 in the center and a semicircular concave 232 at one half of the inner end surface, and the two circular damping plates 23 are symmetrically bonded to two sides of the two semicircular bases 211 through the other half of the inner end surface, so that the resonant beam 22 is located in the bar-shaped hole 231, and the semicircular concave 232 and the semicircular swing tongue 212 are opposite to each other to form a vibration gap.
In one embodiment, the thicknesses of the semicircular base 211 and the semicircular swing tongue 212 are 1.2 mm-4.2 mm, the thickness of the circular flexible layer 213 is 0.02 mm-0.2 mm, the diameters of the semicircular base 211, the semicircular swing tongue 212 and the circular flexible layer 213 are 22mm, and the area of the semicircular swing tongue 212 is 70mm 2-250 mm2. By increasing the area of the semicircular swing tongue 212, the beam accelerometer scale factor can be effectively raised.
In one embodiment, the depth of the semicircular recess 232 is 30-60 μm. By adjusting the depth of the semi-circular recess 232, proper compression damping is provided for the swing tongue.
In one embodiment, the inner end of the base 1 is provided with a circular boss 1-2, the watch core 2 is coaxially and fixedly adhered to the end part of the circular boss 1-2, and the open end of the shell 3 is sleeved on the periphery of the circular boss 1-2 and sealed by laser welding.
In one embodiment, the housing 3 is filled with dry nitrogen to keep the air pressure of the watch core stable.
In one embodiment, the circular damping plate 23 and the semicircular base 211 are correspondingly provided with through holes 4, and the external lead wires of the resonant beam 22 pass through the through holes 4 and are connected with the circuit board 1-1 at the point. The base 1 is provided with a lead hole 1-3, and leads of the circuit board 1-1 are led out from the lead hole 1-3.
The invention senses the input of the acceleration of the external environment through the mass pendulum 21, excites the vibration of the two quartz resonance beams 22 based on the piezoelectric effect principle and acquires the mechanical frequency characteristic of the vibration, the inner side of the circular damping plate 23 is provided with a concave table, the limiting function of the semicircular pendulum tongue is realized, the impact resistance and vibration resistance characteristics of the accelerometer are improved, meanwhile, the diaphragm pressing damping is provided for the pendulum tongue, the dynamic response characteristic of the accelerometer is improved, the circuit board 1-1 is provided with an excitation oscillating circuit for realizing the transmission and acquisition of the input and output signals of the accelerometer, and the shell 3 can realize the maintenance of the internal air pressure environment of the accelerometer and the protection of the surface core 2.
The invention can effectively improve the scale factor K of the vibrating beam accelerometer by increasing the area S of the semicircular swing tongue 212, increasing the inertia force arm L, reducing the reaction force arm I of the resonant beam, reducing the thickness t of the resonant beam and the width omega of the single-tone fork beam.
The base 1, the mass pendulum 21, the two resonance beams 22 and the two circular damping plates 23 are all made of the same crystal material, so that conditions are created for bonding connection. And the bonding connection between the parts can adopt an optical glue bonding or low-temperature bonding technology, and the bonding temperature is not higher than 500 ℃. In order to ensure that the bonding strength is not lower than 10MPa, the bonding surface roughness of the part is not more than 5nm, and the flatness is not more than 3 mu m.
The above embodiments are only preferred embodiments of the present invention and are not intended to limit the scope of the present invention, so that all equivalent modifications made by the appended claims shall be included in the scope of the present invention.
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411689830.XA CN119492888A (en) | 2024-11-25 | 2024-11-25 | A high-precision quartz crystal vibration beam accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411689830.XA CN119492888A (en) | 2024-11-25 | 2024-11-25 | A high-precision quartz crystal vibration beam accelerometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN119492888A true CN119492888A (en) | 2025-02-21 |
Family
ID=94624408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202411689830.XA Pending CN119492888A (en) | 2024-11-25 | 2024-11-25 | A high-precision quartz crystal vibration beam accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN119492888A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070022811A1 (en) * | 2005-07-26 | 2007-02-01 | Honeywell International, Inc. | Accelerometer having adjustable damping |
| US20110239440A1 (en) * | 2010-03-31 | 2011-10-06 | Honeywell International Inc. | Methods for making a sensitive resonating beam accelerometer |
| CN115825467A (en) * | 2022-11-08 | 2023-03-21 | 北京信息科技大学 | Sapphire pendulous reed of accelerometer and accelerometer |
| CN117335767A (en) * | 2023-10-11 | 2024-01-02 | 中国电子科技集团公司第四十三研究所 | Quartz resonator and method for manufacturing the same |
-
2024
- 2024-11-25 CN CN202411689830.XA patent/CN119492888A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070022811A1 (en) * | 2005-07-26 | 2007-02-01 | Honeywell International, Inc. | Accelerometer having adjustable damping |
| US20110239440A1 (en) * | 2010-03-31 | 2011-10-06 | Honeywell International Inc. | Methods for making a sensitive resonating beam accelerometer |
| CN115825467A (en) * | 2022-11-08 | 2023-03-21 | 北京信息科技大学 | Sapphire pendulous reed of accelerometer and accelerometer |
| CN117335767A (en) * | 2023-10-11 | 2024-01-02 | 中国电子科技集团公司第四十三研究所 | Quartz resonator and method for manufacturing the same |
Non-Patent Citations (1)
| Title |
|---|
| 王错;李醒飞;董九志;: "石英挠性加速度计的压膜阻尼分析", 电子测量与仪器学报, no. 02, 15 February 2016 (2016-02-15) * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6484578B2 (en) | Vibrating beam accelerometer | |
| CN205562088U (en) | Quartzy resonance power of integral type is sensing element and dynamometry module frequently | |
| CN205562087U (en) | Quartzy two roof beam tuning fork resonance sensing element of integral type and dynamometry module | |
| CN205861251U (en) | Integral type four quartz tuning-fork resonant sensitive element and force-measuring module | |
| JP5375624B2 (en) | Acceleration sensor and acceleration detection device | |
| JPH01302166A (en) | Pendulum type accelerometer | |
| CN107478862B (en) | Quartz vibrating beam accelerometer sensitive chip based on gold bonding | |
| CN102494813A (en) | Silicon micro-resonant mode pressure sensor based on differential motion structure with coupling beam | |
| CN109883581B (en) | A cantilever beam differential resonance pressure sensor chip | |
| CN100594384C (en) | Orthogonal loop type piezoelectric accelerometer | |
| JP2008232886A (en) | Pressure sensor | |
| US20030005768A1 (en) | Sensor | |
| CN203643470U (en) | A Quartz Vibrating Beam Accelerometer | |
| CN107055461B (en) | A kind of SOI base micro-inertia sensor encapsulation stress partition method | |
| CN111650401B (en) | A coplanar mounted metal-based integrated resonant accelerometer | |
| CN107101629B (en) | A Silicon Micromachined Graphene Beam Resonant Gyroscope | |
| US6450032B1 (en) | Vibrating beam force sensor having improved producibility | |
| CN112180121A (en) | Method for bonding pendulum component of high-stability quartz flexible accelerometer | |
| CN119492888A (en) | A high-precision quartz crystal vibration beam accelerometer | |
| CN115792279A (en) | Integrated full-quartz mass pendulum | |
| CN105865666A (en) | Integrated biquartz tuning fork resonance sensing element and force measuring module | |
| CN102147253A (en) | Vibrating-beam gyro of vibrating-beam-type dual-cantilever-face bracing structure | |
| JP2011169671A (en) | Inertia sensor and inertia sensor device | |
| CN114167082B (en) | Monocrystalline silicon flexible accelerometer | |
| JPS5821131A (en) | Semiconductor pressure sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |