CN119588682A - A precision metal slit protection device for optical imaging system and use method thereof - Google Patents
A precision metal slit protection device for optical imaging system and use method thereof Download PDFInfo
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- CN119588682A CN119588682A CN202411685997.9A CN202411685997A CN119588682A CN 119588682 A CN119588682 A CN 119588682A CN 202411685997 A CN202411685997 A CN 202411685997A CN 119588682 A CN119588682 A CN 119588682A
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- metal slit
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Optical Measuring Cells (AREA)
Abstract
A precise metal slit protecting device for an optical imaging system and a use method thereof are provided, wherein the metal slit protecting device is matched with a metal slit cleaning plate and a metal slit protecting component to realize the functions of pollution prevention and cleaning of the metal slit. The metal slit protection component comprises a metal slit placing plate and a protection component upper cover plate, and a finished product of the metal slit is placed in the metal slit protection component to realize physical protection of the metal slit. The surface of the metal slit cleaning plate is processed with two cleaning tanks for cleaning the metal slits. The invention can effectively avoid the potential pollution problem of the metal slit in the links of processing, cleaning, transferring, storing and the like, provides powerful guarantee for the debugging and assembly of the metal slit in the subsequent complete machine equipment, solves the protection problem of the precise metal slit, ensures the reliability of the optical performance of the precise metal slit, and has remarkable guarantee supporting function for the development of various high-end precise optical imaging equipment.
Description
Technical Field
The invention relates to the field of high-end equipment manufacturing industry, in particular to a device for preventing pollution and cleaning a precise metal slit of a high-resolution optical imaging system and a use method thereof.
Background
The metal slit in the high-resolution optical imaging system is one of key core parts for light splitting, and the mechanical machining precision index of the metal slit directly determines the spectral resolution of the optical imaging system. Therefore, the geometric accuracy index of the metal slit is very important, and the width index of the metal slit is one of the two indexes. However, since a large amount of suspended particles and dust exist in the air environment, the particle size varies from 0.001 μm to 1000 μm, and when the width of the precise metal slit is less than 50 μm, the slit is extremely easily contaminated by these particles and sweat stains of human skin in the links of processing, cleaning, transferring, preserving, and human touching, etc. When the metal slit is polluted, geometric indexes such as slit width and the like are directly influenced, so that an imaging view field of the optical system can be blocked, imaging quality is influenced, reworking of the development process of the optical imaging system is brought, and labor and material cost is increased. In order to prevent the precise metal slit from affecting the normal working index of the optical imaging system due to the pollution problem, protection measures must be arranged in advance in the links of metal slit processing, cleaning, transferring, preserving, clamping and the like. Therefore, designing a dedicated contamination prevention and cleaning apparatus for the contamination prevention problem of a precise metal slit in a high-resolution optical imaging system has become an urgent problem to be solved.
At present, no report is made on a precise metal slit pollution prevention device of a high-resolution optical imaging system, and in order to improve the stability of the optical imaging system, development is needed for a precise metal slit pollution prevention and cleaning device of the high-resolution optical imaging system and a using method thereof.
The utility model discloses a dustproof device for an ultra-narrow slit of a spectrometer, which is characterized in that parameters such as dustproof glass materials, shapes, thicknesses, film systems and the like at two ends of the slit are optimally designed, and the problem of slit pollution of the space spectrometer is realized through the installation position of the dustproof glass and the design of an incomplete sealing port. However, the dust-proof device according to the present utility model is suitable for the slit to be installed in the use environment of the spectrometer, but is not suitable for the pollution prevention of the metal slit in the links of processing, cleaning, transferring, preserving, clamping and the like, and thus has limitations. A spectrometer with dust guard is disclosed in the patent publication CN211741039U, which provides a spectrometer with dust guard, thereby reducing the possibility of dust accumulating in the slit. However, the dust-proof device of the utility model is suitable for the slit to be installed in the use environment of the spectrometer, and is not suitable for pollution prevention of the metal slit in the links of processing, cleaning, transferring, preserving, clamping and the like, and the slit of the utility model is a disc-type slit turntable, which is basically different from the metal slit of the utility model, so the limitation is obvious.
In summary, in order to avoid the problem that the metal slit may be polluted in the steps of processing, cleaning, transferring, preserving, clamping and the like, and ensure the normal assembly and use efficiency of the optical system in the later period, it is highly desirable to provide an anti-pollution and cleaning device for the precise metal slit of the high-resolution optical imaging system and a use method thereof.
Disclosure of Invention
In order to effectively avoid the problem that the metal slit is possibly polluted in the links of processing, cleaning, transferring, storing, clamping and the like, and ensure the normal assembly and use efficacy of the optical system in the later stage, the invention provides a precise metal slit protection device for an optical imaging system and a use method thereof.
The precise metal slit protecting device for the optical imaging system provided by the invention is matched with the metal slit cleaning plate and the metal slit protecting component for use, so that the two functions of pollution prevention and cleaning of the metal slit are realized.
The metal slit protection assembly comprises the metal slit placing plate, a protection assembly upper cover plate and a vacuum valve, wherein the protection assembly upper cover plate is fixed on the upper surface of the metal slit placing plate, and the vacuum valve is positioned on the upper surface of the protection assembly upper cover plate and is installed on the vacuum valve installation hole. And after the metal slit is completed, placing the finished product of the metal slit in the metal slit protection component to realize physical protection of the metal slit.
The upper cover plate of the protection component is also a rectangular plate. The vacuum valve mounting holes are positioned on the symmetry line of the upper cover plate of the protection assembly in the width direction.
The upper surface of the metal slit placing plate is parallelly provided with two strip-shaped metal slit placing grooves, and a separation plate is arranged between the two metal slit placing grooves. The size of the inner cavity of the metal slit placing groove is the same as the outline size of the metal slit. And sealing grooves are processed at the periphery of the two strip-shaped metal slit placing grooves.
Connecting holes are distributed on the upper surfaces of the four edges of the metal slit placing plates, and upper cover plate positioning pin holes are distributed on the four surfaces of the two metal slit placing grooves and the upper surface of the partition plate. And the metal slit placing plate is fixedly connected with the upper cover plate of the protection assembly through the connecting hole and the upper cover plate positioning pin hole.
A plurality of upper cover plate positioning pins are distributed on the lower surface of the upper cover plate of the protection assembly, and each upper cover plate positioning pin corresponds to an upper cover plate positioning pin hole on the metal slit placing plate. Connecting holes are also distributed on the four edges of the upper cover plate of the protection component, and each connecting hole corresponds to the connecting hole on the metal slit placing plate.
After the upper cover plate of the protection component is assembled with the metal slit placing plate, a gap is formed between the lower surface of the upper cover plate of the protection component and the upper surface of the metal slit placing plate through a sealing ring arranged in the sealing groove, so that the metal slit placing groove is vacuumized through a vacuum valve.
The surface of the metal slit cleaning plate is provided with two cleaning tanks, and the positions of the two cleaning tanks correspond to the positions of the metal slit placing tanks. The inner cavity of the cleaning tank is the same as the metal slit placing tank in size. There will be a plurality of grooves parallel to each other in the cleaning tank, which is a cleaning liquid circulation tank.
The specific process for protecting by using the metal slit protecting device provided by the invention is as follows:
step1, cleaning a device and a tool:
And the metal slit protecting device is subjected to ultrasonic cleaning, so that the cleaning is ensured.
Step 2, placing a precise metal slit:
and respectively clamping two precise metal slits, and respectively placing the two precise metal slits in the metal slit placing grooves of the metal slit placing plate to finish the metal slit placing.
Step 3, sealing and protecting:
And a sealing ring is arranged in the sealing groove of the metal slit placing plate.
The upper cover plate of the protection component is buckled on the upper surface of the metal slit placing plate and positioned by the positioning pins of the upper cover plates, and the upper cover plate of the protection component is fixed with the metal slit placing plate.
Step 4, sealing and protecting:
and installing the vacuum valve in a vacuum valve installation hole of the upper cover plate of the protection component.
The protective assembly is evacuated to a low vacuum. And (5) filling the protective component into a vacuum bag and sealing to finish the sealing protection of the metal slit.
Thus, the precise metal slit pollution protection process of the optical imaging system is completed.
The specific process for cleaning by using the metal slit protecting device provided by the invention is as follows:
step 1, cleaning preparation:
and when the metal slit is cleaned, the protective assembly positioned in the vacuum seal is taken out of the vacuum bag, and the vacuum valve is removed.
Step 2, replacing the metal slit cleaning plate:
And replacing the upper cover plate of the protection component with the metal slit cleaning plate, and enabling the metal slit placing groove on the metal slit placing plate to be in face-to-face lamination with the cleaning groove on the metal slit cleaning plate.
The metal slit placing plate and the metal slit cleaning plate are turned over and attached together, so that the metal slit placing plate is positioned on the upper surface of the metal slit cleaning plate, and then the metal slits arranged in the metal slit placing grooves fall into the cleaning grooves on the metal slit cleaning plate. And placing the metal slit cleaning plate with the metal slit into an ultrasonic cleaning tank for cleaning.
The ultrasonic cleaning is turned on for 10min. During cleaning, the ultrasonic power is 50-80 KHz.
The metal slit cleaning is completed.
The invention can effectively avoid the potential pollution problem of the metal slit in the links of processing, cleaning, transferring, storing and the like, and provides powerful guarantee for the debugging and assembly of the metal slit in the subsequent complete machine equipment.
Compared with the prior art, the invention has the beneficial effects that:
When the precise metal slit is required to be cleaned, the metal slit is transferred into a cleaning tank of the metal slit cleaning plate through the cooperation of the metal slit placing plate and the metal slit cleaning plate, then the metal slit cleaning plate is placed into the cleaning tank for cleaning, and the characteristics of a cleaning liquid circulation tank effectively ensure the convection of ultrasonic cleaning media, thereby realizing the non-contact effective cleaning of the precise metal slit. Fig. 7 is a three-dimensional optical imaging instrument detection diagram of a slit after the precise metal slit is exposed in the air for a period of time, and the granular foreign matters at the slit can be obviously seen, while fig. 8 is a three-dimensional optical imaging instrument detection diagram of the precise metal slit cleaned and stored by the device provided by the invention, and obviously, the invention not only realizes pollution prevention of the precise metal slit, but also has the non-contact cleaning effect of the precise metal slit. Therefore, the device and the use method thereof can effectively prevent dust, suspended particles and the like in the air of the precise metal slit from adhering to the precise metal slit in the processes of processing, cleaning, transferring, preserving and the like, solve the protection problem of the precise metal slit, ensure the reliability of the optical performance of the precise metal slit, and have remarkable guarantee supporting effect on the development of various high-end precise optical imaging equipment.
Drawings
Fig. 1 is a three-dimensional view of a metal slit placing plate.
Fig. 2 is a three-dimensional view of the upper cover plate of the protective assembly.
Fig. 3 is a three-dimensional view of a metal slit cleaning plate.
Fig. 4 is a cross-sectional view of a metal slit cleaning plate.
Fig. 5 is a three-dimensional view of a metal slit.
Fig. 6 is a three-dimensional assembly view of the precision metal slit contamination prevention apparatus.
Fig. 7 is a view of an unprotected metal slit optical imager.
Fig. 8 is a view showing the detection of a metal slit optical imager stored by the contamination prevention device.
1, A metal slit placing groove; the upper cover plate positioning pin hole, the sealing groove, the connecting hole, the metal slit placing plate, the upper cover plate positioning pin, the upper cover plate fixing hole, the vacuum valve mounting hole, the upper cover plate of the protective assembly, the cleaning liquid circulation groove, the cleaning groove, the metal slit cleaning plate, the slit, the metal slit, the vacuum valve and the screw, wherein the metal slit placing plate is arranged in the upper cover plate positioning pin hole, the upper cover plate positioning pin is arranged in the upper cover plate positioning pin hole, the vacuum valve positioning pin is arranged in the upper cover plate positioning pin hole, the upper cover plate of the protective assembly is arranged in the upper cover plate positioning pin hole.
Detailed Description
Example 1:
the embodiment is a device for preventing pollution and cleaning a precise metal slit of an optical imaging system in the links of processing, cleaning, transferring and preserving, and the pollution prevention and cleaning of the precise metal slit are realized through the matched use of a metal slit placing plate, a protective component upper cover plate, a metal slit cleaning plate and the like.
The metal slit protecting device is matched with the metal slit cleaning plate 12 and the metal slit protecting component to realize the functions of pollution prevention and cleaning of the metal slit.
The metal slit protection assembly comprises the metal slit placing plate 5, a protection assembly upper cover plate 9 and a vacuum valve 15, wherein the protection assembly upper cover plate is fixed on the upper surface of the metal slit placing plate, and the vacuum valve is arranged on the upper surface of the protection assembly upper cover plate and is arranged on the vacuum valve mounting hole 8. And placing the finished product of the metal slit in the metal slit protection component to realize physical protection of the metal slit.
The metal slit placing plate 5 is a rectangular plate, two strip-shaped metal slit placing grooves 1 are processed on the upper surface of the metal slit placing plate in parallel, and a separation plate is arranged between the two metal slit placing grooves. The size of the inner cavity of the metal slit placing groove is the same as the outline size of the metal slit. A sealing groove 3 is processed at the periphery of the two strip-shaped metal slit placing grooves.
Connecting holes 4 are distributed on the upper surfaces of the four edges of the metal slit placing plates, and upper cover plate positioning pin holes 2 are distributed on the four surfaces of the two metal slit placing grooves and the upper surface of the partition plate. The metal slit placing plate 5 is fixedly connected with the upper cover plate 9 of the protection component through the connecting holes and the upper cover plate positioning pin holes.
The upper cover plate 9 of the protection component is also a rectangular plate. A plurality of upper cover plate positioning pins 6 are distributed on the lower surface of the upper cover plate of the protection component, and each upper cover plate positioning pin corresponds to an upper cover plate positioning pin hole on the metal slit placing plate. Connecting holes are also distributed on the four edges of the upper cover plate of the protection component, and each connecting hole corresponds to the connecting hole 4 on the metal slit placing plate. The upper cover plate of the protection component is provided with a vacuum valve mounting hole 8, and the vacuum valve mounting hole is positioned on a symmetrical line of the width direction of the upper cover plate of the protection component.
After the upper cover plate of the protection component is assembled with the metal slit placing plate, a gap is formed between the lower surface of the upper cover plate of the protection component and the upper surface of the metal slit placing plate through a sealing ring arranged in the sealing groove 3, so that the metal slit placing groove is vacuumized through a vacuum valve.
The metal slit cleaning plate 12 is also a rectangular plate, and two cleaning tanks 11 are processed on the surface of the metal slit cleaning plate, and the positions of the two cleaning tanks correspond to the positions of the metal slit placing tank 1. The inner cavity of the cleaning tank is the same as the metal slit placing tank in size. There will be a plurality of grooves parallel to each other in the cleaning tank, which are cleaning liquid circulation tanks 10.
In this embodiment, the metal slit placing plate 5 is made of a light-weight high-strength aluminum alloy material, and is mainly characterized in that two metal slit placing grooves 1 with the same length, width and thickness as those of the metal slit are machined on the upper surface of the metal slit placing plate 5, and the metal slit placing grooves 1 are symmetrically distributed on the upper surface of the metal slit placing plate 5. The upper surfaces of the two long side edges of the two metal slit placing grooves 1 are respectively provided with 2 connecting holes 2, the upper surfaces of the two short side edges of the two metal slit placing grooves are respectively provided with 1 connecting hole 2, and the upper surfaces of the four side edges of the two metal slit placing grooves 1 are respectively provided with 12 connecting holes 2. A circle of sealing groove 3 is formed around the two metal slit placing grooves 1. The upper surface of the four edges of the metal slit placing plate 5 is provided with 8 connecting holes 4, wherein the upper surface of the long edge of the metal slit placing plate 5 is provided with 3 connecting holes 4, and the upper surface of the short edge is provided with 3 connecting holes 4.
The upper cover plate 9 of the protection component is made of a light high-strength aluminum alloy material and is mainly characterized in that the outer dimension of the upper cover plate is the same as that of the metal slit placing plate 5. The upper cover plate positioning pins 6 corresponding to the upper cover plate positioning pin holes 2 on the upper surface of the metal slit placing plate 5 are machined on the lower surface of the upper cover plate 9 of the protection component, the total of 12 upper cover plate positioning pins 6 are the same in height as the depth of the upper cover plate positioning pin holes 2, and the upper cover plate positioning pins 6 can prevent random movement of the precise metal slits 14 after the metal slit placing plate 5 is assembled with the upper cover plate 9 of the protection component. The lower surface of the upper cover plate 9 of the protection component is provided with an upper cover plate fixing hole 7 corresponding to the upper cover plate connecting hole 4 on the upper surface of the metal slit placing plate 5, and the upper cover plate fixing hole is used for fastening the metal slit placing plate 5 and the upper cover plate 9 of the protection component by using screws after being assembled. The upper cover plate 9 of the protection component is provided with a vacuum valve mounting hole 8, and the vacuum valve mounting hole 8 is positioned on a symmetrical line of the upper cover plate 9 of the protection component in the width direction.
The metal slit cleaning plate 12 is made of a light high-strength aluminum alloy material, has the same structural characteristics as the metal slit placing plate 5, and is mainly different in that the sealing groove 3 is not machined on the upper surface of the metal slit cleaning plate 12, and 12 penetrating cleaning liquid circulation grooves 10 are machined on the bottom surfaces of the two metal slit placing grooves 1 with the same length, width and thickness along the length direction of the metal slit placing grooves, so that the metal slit cleaning plate is used for disassembling the upper cover plate 9 of the protection component when the metal slit is cleaned, then directly assembling the metal slit cleaning plate 12 with the metal slit placing plate 5 in an abutting mode, and transferring the metal slit into the metal slit placing groove 11 of the metal slit cleaning plate 12 through overturning, so that the pollution problem caused by manual operation on the metal slit in the ultrasonic cleaning process is avoided.
During assembly, the rubber sealing ring is arranged in the sealing groove 3 of the metal slit placing plate 5 so as to realize sealing after being assembled with the upper cover plate 9 of the protection component. The screws 16 are sequentially installed in the upper cover plate fixing holes 7 of the upper cover plate 9 of the protection component and are sequentially screwed down to complete locking and fixing of the device. The vacuum valve 15 is arranged at the position of the vacuum valve mounting hole 8 of the upper cover plate 9 of the protection component and is screwed down to be used as an interface for subsequent vacuumizing.
Example 2:
the embodiment is a protection method for a precise metal slit of an optical imaging system in various links of processing, cleaning, transferring and storing.
The precise metal slit 14 is made of pure tungsten alloy, the thickness is 0.1mm and 0.2mm, and the slit width of the slit 13 distributed on the surface is 40 μm.
The specific process of this embodiment is:
step1, cleaning a device and a tool:
Distilled water is adopted to carry out ultrasonic cleaning on the metal slit placing plate 5, the upper cover plate 9 of the protective component, the metal slit cleaning plate 12, the vacuum valve 15, the screw 16 and tweezers and the sealing ring used when the precise metal slit is clamped, so that the cleaning is ensured.
Step 2, placing a precise metal slit:
Clean tweezers are used, the heads of the tweezers are provided with rubber sleeves, 2 pieces of precise metal slits 14 are respectively clamped and placed in the metal slit placing grooves 1 of the metal slit placing plate 5, and therefore metal slit placing is completed.
Step 3, installing a sealing ring:
after the step 2 is completed, a sealing ring is placed in the sealing groove 3 of the metal slit placing plate 5.
Step 4, assembling the metal slit placing plate and the upper cover plate of the protection component:
And (3) completely matching each upper cover plate positioning pin 6 of the upper cover plate 9 of the protective component with each upper cover plate positioning pin hole 2, and correspondingly matching each upper cover plate positioning pin 6 with each upper cover plate positioning pin hole 2 to complete the assembly of the metal slit placing plate 5 and the upper cover plate 9 of the protective component.
Step 5, locking and fixing the device:
Screws 16 are sequentially arranged at the upper cover plate fixing holes 7 of the upper cover plate 5 of the protective component, so that the metal slit placing plate 5and the upper cover plate 9 of the protective component are tightly assembled to complete locking and fixing of the device.
Step 6, mounting a vacuum valve:
The vacuum valve 15 is arranged in the vacuum valve mounting hole 8 of the upper cover plate 9 of the protection component and is used for vacuumizing, so that the vacuum valve 15 is mounted.
Step 7, vacuumizing, bagging and sealing:
A vacuum valve 15 is provided to evacuate the protective assembly to a low vacuum. And (5) filling the protective component into a vacuum bag and sealing to finish the sealing protection of the metal slit.
Thus, the precise metal slit pollution protection process of the optical imaging system is completed.
Experiments show that dust and suspended particles in air can be effectively prevented from adhering to the precise metal slit in the process of processing, cleaning, transferring and preserving the precise metal slit by using the method, so that the reliability of the optical characteristics of the precise metal slit is ensured.
Example 3:
The embodiment is a method for cleaning a precise metal slit of an optical imaging system by using the metal slit cleaning plate, wherein the precise metal slit 14 is made of pure tungsten alloy, the thickness is 0.1mm, 6 slits are distributed on the surface, and the slit width of the slit 13 is 40 μm.
The specific process is as follows:
step 1, cleaning preparation:
When the metal slit 14 is cleaned, the protective assembly positioned in the vacuum seal is taken out of the vacuum bag, and the vacuum valve 15 and the connecting screw are removed.
Step 2, replacing the metal slit cleaning plate:
The upper cover plate 9 of the protection component is replaced by the metal slit cleaning plate 12, the metal slit placing plate 5 and the metal slit cleaning plate 12 are aligned in the geometric length-width direction after replacement, and the metal slit placing groove 1 on the metal slit placing plate 5 and the cleaning groove 11 on the metal slit cleaning plate 12 are bonded face to face.
The metal slit placing plate and the metal slit cleaning plate are turned over and attached together, so that the metal slit placing plate is positioned on the upper surface of the metal slit cleaning plate, and then the metal slits arranged in the metal slit placing grooves fall into the cleaning grooves on the metal slit cleaning plate. The metal slit cleaning plate 12 having the metal slit is put into an ultrasonic cleaning tank to be cleaned.
The ultrasonic cleaning is turned on for 10min. During cleaning, the ultrasonic power is 50-80 KHz.
The metal slit cleaning is completed.
Experiments show that the invention can effectively clean the precise metal slit, thereby ensuring the reliability of the optical characteristics of the precise metal slit.
Claims (8)
1. A precise metal slit protecting device for an optical imaging system is characterized in that a metal slit cleaning plate (12) and a metal slit protecting component are matched for use, so that two functions of pollution prevention and cleaning of the metal slit are realized.
The metal slit protection assembly comprises the metal slit placing plate (5), a protection assembly upper cover plate (9) and a vacuum valve (15), wherein the protection assembly upper cover plate is fixed on the upper surface of the metal slit placing plate, and the vacuum valve is arranged on the upper surface of the protection assembly upper cover plate and is arranged on the vacuum valve mounting hole (8). And placing the finished product of the metal slit in the metal slit protection component to realize physical protection of the metal slit.
The upper cover plate (9) of the protection component is also a rectangular plate. The vacuum valve mounting holes are positioned on the symmetry line of the upper cover plate of the protection assembly in the width direction.
2. The precise metal slit protecting apparatus for an optical imaging system according to claim 1, wherein the upper surface of the metal slit placing plate (5) is processed with two elongated metal slit placing grooves (1) in parallel, and a partition plate is provided between the two metal slit placing grooves. The size of the inner cavity of the metal slit placing groove is the same as the outline size of the metal slit. And sealing grooves (3) are processed at the periphery of the two strip-shaped metal slit placing grooves.
3. The precise metal slit protecting device for the optical imaging system according to claim 1, wherein connecting holes (4) are distributed on the upper surfaces of the four edges of the metal slit placing plates, and upper cover plate positioning pin holes (2) are distributed on the four surfaces of the two metal slit placing grooves and the upper surface of the partition plate. The metal slit placing plate (5) is fixedly connected with the upper cover plate (9) of the protection component through the connecting holes and the positioning pin holes of the upper cover plate.
4. The precise metal slit protecting apparatus for an optical imaging system according to claim 1, wherein a plurality of upper cover plate positioning pins (6) are distributed on the lower surface of the upper cover plate of the protecting assembly, and each upper cover plate positioning pin corresponds to an upper cover plate positioning pin hole on the metal slit placing plate. Connecting holes are also distributed on the four edges of the upper cover plate of the protection component, and each connecting hole corresponds to the connecting hole (4) on the metal slit placing plate.
5. The precise metal slit protecting apparatus for an optical imaging system according to claim 1, wherein after the protecting assembly upper cover plate is assembled with the metal slit placing plate, a gap is formed between the lower surface of the protecting assembly upper cover plate and the upper surface of the metal slit placing plate by a sealing ring placed in the sealing groove (3) to vacuumize the metal slit placing groove through a vacuum valve.
6. The precise metal slit protecting apparatus for an optical imaging system according to claim 1, wherein the surface of the metal slit cleaning plate is processed with two cleaning tanks (11) and the positions of the two cleaning tanks are made to correspond to the positions of the metal slit placing grooves (1). The inner cavity of the cleaning tank is the same as the metal slit placing tank in size. There will be a plurality of grooves parallel to each other in the cleaning tank, which are cleaning liquid circulation tanks (10).
7. A protection method using the metal slit protection apparatus according to claim 1, characterized in that the specific process is:
step1, cleaning a device and a tool:
And the metal slit protecting device is subjected to ultrasonic cleaning, so that the cleaning is ensured.
Step 2, placing a precise metal slit:
two precise metal slits (14) are respectively clamped and respectively placed in the metal slit placing grooves (1) of the metal slit placing plate (5) so as to finish metal slit placing.
Step 3, sealing and protecting:
and a sealing ring is arranged in the sealing groove (3) of the metal slit placing plate.
The upper cover plate (9) of the protection component is buckled on the upper surface of the metal slit placing plate and positioned through the positioning pins of the upper cover plates, and the upper cover plate of the protection component is fixed with the metal slit placing plate.
Step 4, sealing and protecting:
and a vacuum valve (15) is arranged in a vacuum valve mounting hole (8) of the upper cover plate of the protection component.
The protective assembly is evacuated to a low vacuum. And (5) filling the protective component into a vacuum bag and sealing to finish the sealing protection of the metal slit.
Thus, the precise metal slit pollution protection process of the optical imaging system is completed.
8. A cleaning method using the metal slit protecting apparatus according to claim 1, characterized by comprising the following steps:
step 1, cleaning preparation:
The vacuum valve (15) is removed by removing the vacuum-tight protective assembly from the vacuum bag while cleaning the metal slit (14).
Step 2, replacing the metal slit cleaning plate:
The upper cover plate (9) of the protection component is replaced by the metal slit cleaning plate (12), and the metal slit placing groove (1) on the metal slit placing plate (5) is in face-to-face lamination with the cleaning groove (11) on the metal slit cleaning plate.
The metal slit placing plate and the metal slit cleaning plate are turned over and attached together, so that the metal slit placing plate is positioned on the upper surface of the metal slit cleaning plate, and then the metal slits arranged in the metal slit placing grooves fall into the cleaning grooves on the metal slit cleaning plate. And placing the metal slit cleaning plate (12) with the metal slit into an ultrasonic cleaning tank for cleaning.
The ultrasonic cleaning is turned on for 10min. During cleaning, the ultrasonic power is 50-80 KHz.
The metal slit cleaning is completed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411685997.9A CN119588682A (en) | 2024-11-24 | 2024-11-24 | A precision metal slit protection device for optical imaging system and use method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411685997.9A CN119588682A (en) | 2024-11-24 | 2024-11-24 | A precision metal slit protection device for optical imaging system and use method thereof |
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| CN119588682A true CN119588682A (en) | 2025-03-11 |
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| CN202411685997.9A Pending CN119588682A (en) | 2024-11-24 | 2024-11-24 | A precision metal slit protection device for optical imaging system and use method thereof |
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