CN119687986B - A photoelectric detection device calibration system and method based on fast reflector - Google Patents
A photoelectric detection device calibration system and method based on fast reflectorInfo
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- CN119687986B CN119687986B CN202411883559.3A CN202411883559A CN119687986B CN 119687986 B CN119687986 B CN 119687986B CN 202411883559 A CN202411883559 A CN 202411883559A CN 119687986 B CN119687986 B CN 119687986B
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Abstract
The invention provides a photoelectric detection device calibration system and a photoelectric detection device calibration method based on a quick reflector, and relates to the photoelectric detection technology, wherein the photoelectric detection device comprises a power supply, a test computer, a photoelectric detection device, the quick reflector and a laser beam analyzer, wherein the photoelectric detection device, the quick reflector and the laser beam analyzer are sequentially arranged along the light path propagation direction; the rapid reflecting mirror is arranged right in front of the initial orientation of the multi-axis turntable, the initial direction of the mirror surface normal is 45 degrees with the initial orientation of the multi-axis turntable, and the laser beam analyzer is arranged right in front of the reflected light of the initial laser after being reflected by the rapid reflecting mirror. The scheme has the advantages of lower cost and simple operation, and can realize the rapid calibration of the photoelectric detection device.
Description
Technical Field
The invention relates to the technical field of photoelectric detection, in particular to a photoelectric detection device calibration system and method based on a quick reflector.
Background
In recent years, the components of the photoelectric detection device often comprise components such as an optical detector, a turntable, laser and a complex light path, and in the use and maintenance process, the system error is required to be calibrated to ensure that the system precision meets the requirements, and how to quickly and effectively calibrate the photoelectric detection device is researched, so that the photoelectric detection device has important significance in improving the function and performance of the photoelectric detection device.
The common calibration method of the photoelectric detection device adopts a mode of designing an auto-collimation light path or utilizing auto-collimation measuring instrument equipment to measure system errors, the method is complex in design, extra space or devices are required to be added in the system, the cost is high, and the method cannot be adopted for special occasions or small-sized systems.
Based on this, a calibration system and method for a photoelectric detection device based on a fast mirror are needed to solve the above technical problems.
Disclosure of Invention
The embodiment of the invention provides a photoelectric detection device calibration system and method based on a quick reflector, which can conveniently and flexibly calibrate the photoelectric detection device quickly.
In a first aspect, an embodiment of the present invention provides a rapid-reflector-based calibration system for a photodetection device, including a power supply, a test computer, and a photodetection device, a rapid-reflector, and a laser beam analyzer sequentially disposed along a propagation direction of an optical path, where:
The photoelectric detection device comprises a multi-axis turntable and a laser fixed on the multi-axis turntable, wherein the multi-axis turntable is used for adjusting the light emergent angle of the laser, and the laser is used for emitting detection laser;
The multi-axis turntable and the quick reflector are both fixed on the base;
the quick reflector is arranged right in front of the initial orientation of the multi-axis turntable, and the initial direction of the mirror surface normal is 45 degrees with the initial orientation of the multi-axis turntable;
the laser beam analyzer is arranged right in front of the reflected light of the initial laser after being reflected by the fast reflector;
the test computer is electrically connected with the laser beam analyzer and is used for receiving the target surface laser coordinate data and analyzing the result;
the power supply is used for supplying power to each device in the system.
In a second aspect, an embodiment of the present invention further provides a method for calibrating a photoelectric detection device based on a fast reflector, including:
measuring initial coordinate data of laser when the quick reflector and the multi-axis turntable are in initial directions by using the laser beam analyzer;
The laser beam analyzer is used for respectively measuring first coordinate data of the laser after the multi-axis turntable rotates by a preset angle and second coordinate data of the laser after the multi-axis turntable rotates by an equivalent angle, wherein the equivalent angle is determined by the preset angle;
Calculating a first difference between the initial coordinate data and the first coordinate data and a second difference between the initial coordinate data and the second coordinate data using the test computer;
and carrying out coordinate conversion on the first difference value and the second difference value by using the test computer to obtain an error calibration value of the photoelectric detection device.
In a third aspect, an embodiment of the present invention further provides an electronic device, including a memory and a processor, where the memory stores a computer program, and when the processor executes the computer program, the method described in any embodiment of the present specification is implemented.
In a fourth aspect, embodiments of the present invention also provide a computer-readable storage medium having stored thereon a computer program which, when executed in a computer, causes the computer to perform a method according to any of the embodiments of the present specification.
In a fifth aspect, a computer program product is provided, comprising a computer program which, when executed by a processor, implements a method as described in any of the embodiments of the present description.
The embodiment of the invention provides a photoelectric detection device calibration system and a photoelectric detection device calibration method based on a quick reflector, wherein the system comprises a photoelectric detection device, the quick reflector, a laser beam measuring instrument, a test computer, a base and a power supply, wherein the quick reflector is fixed right in front of an initial laser emission direction, the initial direction of a mirror surface normal and the initial laser emission direction form a 45-degree angle, the laser beam measuring instrument is placed right in front of reflected light after laser emission light is reflected by the quick reflector, and the test computer is connected with the laser beam measuring instrument and receives target surface laser coordinate data and analyzes results. The system utilizes the advantages of high precision and high sensitivity of the quick reflector, does not need to design a complex auto-collimation light path or add instruments and equipment such as an auto-collimator in the photoelectric detection device, has low cost and simple operation, and has the characteristics of flexibility and convenience, thereby realizing quick calibration of the photoelectric detection device.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a calibration system of a rapid-mirror-based photo-detector according to an embodiment of the present invention;
FIG. 2 is a flowchart of a method for calibrating a photo-detector based on a fast mirror according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a definition of a fast mirror coordinate system according to an embodiment of the present invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments, and all other embodiments obtained by those skilled in the art without making any inventive effort based on the embodiments of the present invention are within the scope of protection of the present invention.
Referring to fig. 1, an embodiment of the present invention provides a calibration system for a photoelectric detection device based on a fast reflector, the system includes a power supply, a test computer, and a photoelectric detection device, a fast reflector, and a laser beam analyzer sequentially arranged along a propagation direction of an optical path, wherein:
The photoelectric detection device comprises a multi-axis turntable and a laser fixed on the multi-axis turntable, wherein the multi-axis turntable is used for adjusting the light emergent angle of the laser, and the laser is used for emitting detection laser;
The multi-axis turntable and the quick reflector are both fixed on the base;
the quick reflector is arranged right in front of the initial orientation of the multi-axis turntable, and the initial direction of the mirror surface normal is 45 degrees with the initial orientation of the multi-axis turntable;
the laser beam analyzer is arranged right in front of the reflected light of the initial laser after being reflected by the fast reflector;
the test computer is electrically connected with the laser beam analyzer and is used for receiving the target surface laser coordinate data and analyzing the result;
the power supply is used for supplying power to each device in the system.
Through carrying the photoelectric detection device with the high-precision high-response-speed quick reflector, the response precision and the bandwidth of the device can be improved, and meanwhile, the quick calibration of the photoelectric detection device can be realized in an auxiliary way by utilizing the quick reflector, so that the photoelectric detection device has the characteristics of low cost, simplicity in realization and convenience and flexibility.
As shown in fig. 2, an embodiment of the present invention provides a method for calibrating a rapid mirror-based photoelectric detection device, which is applied to the rapid mirror-based photoelectric detection device calibration system mentioned in any one of the foregoing embodiments, and includes:
step 200, measuring initial coordinate data of laser when the quick reflector and the multi-axis turntable are in initial directions by using the laser beam analyzer;
step 202, respectively measuring first coordinate data of laser after the multi-axis turntable rotates by a preset angle and second coordinate data of laser after the multi-axis turntable rotates by an equivalent angle by using the laser beam analyzer, wherein the equivalent angle is determined by the preset angle;
Step 204 of calculating a first difference between the initial coordinate data and the first coordinate data and a second difference between the initial coordinate data and the second coordinate data using the test computer;
and 206, performing coordinate conversion on the first difference value and the second difference value by using the test computer to obtain an error calibration value of the photoelectric detection device.
For step 202, the calculation process of the equivalent angle includes:
As shown in fig. 3, according to a first azimuth angle and a first pitch angle of the multi-axis turntable in a first turntable coordinate system in an initial direction, a second azimuth angle epsilon 2 and a second pitch angle beta 2 of the multi-axis turntable in a second turntable coordinate system after the multi-axis turntable rotates by a preset angle are calculated;
Calculating the incident coordinate of the incident light under a third coordinate system of the quick reflector according to the cosine [0,1,0] of the direction of the incident light under the second turntable coordinate system;
and converting the incident coordinate into the emergent coordinate according to the light reflection relation of the quick reflector, and calculating the emergent coordinate, the second azimuth angle and the second pitch angle in parallel to obtain the equivalent angle.
Specifically, the second azimuth angle epsilon 2 and the second pitch angle beta 2 are calculated by the following formula:
r is a transformation matrix from a first turntable coordinate system to a second turntable coordinate system, and the first azimuth angle and the first pitch angle are both 0 degrees.
The incident coordinates are calculated by the following formula:
wherein T is a transformation matrix from the second turntable coordinate system to the third coordinate system, delta x is an equivalent rotation angle of the X axis of the quick reflector, delta y is an equivalent rotation angle of the Y axis of the quick reflector.
The equivalent angle is calculated by the following formula:
Wherein, delta x is the equivalent rotation angle of the X axis of the quick reflector, delta y is the equivalent rotation angle of the Y axis of the quick reflector.
In the embodiment of the invention, after the first coordinate data and the second coordinate data are obtained by executing the measurement in the step 202, the method further comprises the steps of changing the rotation angle of the multi-axis turntable for a plurality of times according to different preset angle values, and carrying out measurement for at least 10 times under each rotation angle to obtain a plurality of groups of first coordinate data and second coordinate data.
It can be understood that the method embodiment provided by the embodiment of the present invention and the device embodiment belong to the same inventive concept, so that the method embodiment and the device embodiment have the same beneficial effects, and are not described herein.
The embodiment of the invention also provides electronic equipment, which comprises a memory and a processor, wherein the memory stores a computer program, and when the processor executes the computer program, the method for calibrating the photoelectric detection device based on the rapid reflector in any embodiment of the invention is realized.
The embodiment of the invention also provides a computer readable storage medium, and the computer readable storage medium is stored with a computer program, when the computer program is executed by a processor, the processor is caused to execute the method for calibrating the photoelectric detection device based on the quick reflector in any embodiment of the invention.
Specifically, a system or apparatus provided with a storage medium on which a software program code realizing the functions of any of the above embodiments is stored, and a computer (or CPU or MPU) of the system or apparatus may be caused to read out and execute the program code stored in the storage medium.
In this case, the program code itself read from the storage medium may realize the functions of any of the above-described embodiments, and thus the program code and the storage medium storing the program code form part of the present invention.
Examples of storage media for providing program code include floppy disks, hard disks, magneto-optical disks, optical disks (e.g., CD-ROMs, CD-R, CD-RWs, DVD-ROMs, DVD-RAMs, DVD-RWs, DVD+RWs), magnetic tapes, nonvolatile memory cards, and ROMs. Alternatively, the program code may be downloaded from a server computer by a communication network.
Further, it should be apparent that the functions of any of the above-described embodiments may be implemented not only by executing the program code read out by the computer, but also by causing an operating system or the like operating on the computer to perform part or all of the actual operations based on the instructions of the program code.
Further, it is understood that the program code read out by the storage medium is written into a memory provided in an expansion board inserted into a computer or into a memory provided in an expansion module connected to the computer, and then a CPU or the like mounted on the expansion board or the expansion module is caused to perform part and all of actual operations based on instructions of the program code, thereby realizing the functions of any of the above embodiments.
It is noted that relational terms such as first and second, and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one.," does not exclude that an additional identical element is present in a process, method, article, or apparatus that comprises the element.
It will be appreciated by those of ordinary skill in the art that implementing all or part of the steps of the above method embodiments may be accomplished by hardware associated with program instructions, and that the above program may be stored in a computer readable storage medium which, when executed, performs the steps comprising the above method embodiments, where the above storage medium includes various media that may store program code, such as ROM, RAM, magnetic or optical disks.
It should be noted that the above-mentioned embodiments are merely for illustrating the technical solution of the present invention, and not for limiting the same, and although the present invention has been described in detail with reference to the above-mentioned embodiments, it should be understood by those skilled in the art that the technical solution described in the above-mentioned embodiments may be modified or some technical features may be equivalently replaced, and these modifications or substitutions do not make the essence of the corresponding technical solution deviate from the spirit and scope of the technical solution of the embodiments of the present invention.
Claims (5)
1. The method for calibrating the photoelectric detection device based on the quick reflector is characterized by being applied to a calibration system comprising a power supply, a test computer, and a photoelectric detection device, a quick reflector and a laser beam analyzer which are sequentially arranged along the propagation direction of an optical path, wherein:
The photoelectric detection device comprises a multi-axis turntable and a laser fixed on the multi-axis turntable, wherein the multi-axis turntable is used for adjusting the light emergent angle of the laser, and the laser is used for emitting detection laser;
The multi-axis turntable and the quick reflector are both fixed on the base;
the quick reflector is arranged right in front of the initial orientation of the multi-axis turntable, and the initial direction of the mirror surface normal is 45 degrees with the initial orientation of the multi-axis turntable;
the laser beam analyzer is arranged right in front of the reflected light of the initial laser after being reflected by the fast reflector;
the test computer is electrically connected with the laser beam analyzer and is used for receiving the target surface laser coordinate data and analyzing the result;
the power supply is used for supplying power to each device in the system;
The method comprises the following steps:
measuring initial coordinate data of laser when the quick reflector and the multi-axis turntable are in initial directions by using the laser beam analyzer;
The laser beam analyzer is used for respectively measuring first coordinate data of the laser after the multi-axis turntable rotates by a preset angle and second coordinate data of the laser after the multi-axis turntable rotates by an equivalent angle, wherein the equivalent angle is determined by the preset angle;
Calculating a first difference between the initial coordinate data and the first coordinate data and a second difference between the initial coordinate data and the second coordinate data using the test computer;
performing coordinate conversion on the first difference value and the second difference value by using the test computer to obtain an error calibration value of the photoelectric detection device;
The equivalent angle is determined by:
according to the first azimuth angle and the first pitch angle of the multi-axis turntable in the first turntable coordinate system of the initial direction, calculating to obtain a second azimuth angle of the multi-axis turntable in the second turntable coordinate system after rotating by a preset angle And a second pitch angle;
Calculating the incident coordinate of the incident light under a third coordinate system of the quick reflector according to the cosine [0,1,0] of the direction of the incident light under the second turntable coordinate system;
Converting the incident coordinate into the emergent coordinate according to the light reflection relation of the quick reflector, and calculating the emergent coordinate, the second azimuth angle and the second pitch angle in parallel to obtain the equivalent angle;
The second azimuth angle And the second pitch angleThe method is calculated by the following formula:
=
r is a transformation matrix from a first turntable coordinate system to a second turntable coordinate system, wherein the first azimuth angle and the first pitch angle are both 0 degrees;
The incidence coordinate is calculated by the following formula:
wherein T is a transformation matrix from the second turntable coordinate system to the third coordinate system; Is the equivalent rotation angle of the X axis of the quick reflector; Is the equivalent rotation angle of the Y axis of the quick reflector;
the equivalent angle is calculated by the following formula:
In the formula, Is the equivalent rotation angle of the X axis of the quick reflector; Is the equivalent rotation angle of the Y axis of the quick reflector.
2. The method of claim 1, further comprising, after measuring the first coordinate data and the second coordinate data:
changing the rotation angle of the multi-axis turntable for a plurality of times according to different preset angle values;
And measuring for at least 10 times under each rotation angle to obtain a plurality of groups of first coordinate data and second coordinate data.
3. A computer device, characterized in that it comprises a memory for storing a computer program and a processor for executing the computer program stored on the memory for implementing the steps of the method according to any of the preceding claims 1-2.
4. A computer-readable storage medium, characterized in that the storage medium has stored therein a computer program which, when executed by a processor, implements the steps of the method of any of claims 1-2.
5. A computer program product comprising a computer program which, when executed by a processor, implements the steps of the method of any of claims 1-2.
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL115964A0 (en) * | 1994-11-15 | 1996-01-31 | Hughes Aircraft Co | Error detector apparatus with digital coordinate transformation |
| JP2012138597A (en) * | 2004-06-18 | 2012-07-19 | Electro Scientific Industries Inc | Semiconductor structure process using plurality of laser beam spots |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8049135B2 (en) * | 2004-06-18 | 2011-11-01 | Electro Scientific Industries, Inc. | Systems and methods for alignment of laser beam(s) for semiconductor link processing |
| CN100342210C (en) * | 2005-05-10 | 2007-10-10 | 北京航空航天大学 | Laser self-collimation zero reference error angle measuring method |
| CN101476844B (en) * | 2008-12-09 | 2013-06-05 | 南瑶 | Calibration method and standard target plate for carrier optoelectronic series on-site dynamic self-calibration |
| CN109520425B (en) * | 2018-12-29 | 2020-12-01 | 湖北航天技术研究院总体设计所 | Precise tracking error testing device and testing method |
| US10697755B1 (en) * | 2019-03-07 | 2020-06-30 | Bae Systems Information And Electronic Systems Integration Inc. | Calibration of rotating mirror systems |
| CN110715795B (en) * | 2019-10-14 | 2021-06-01 | 中国科学院光电技术研究所 | Calibration and measurement method for fast reflector in photoelectric tracking system |
| CN210570543U (en) * | 2019-11-20 | 2020-05-19 | 福建富兰光学有限公司 | Device for rapidly detecting angle of laser radar reflector |
| CN111238374B (en) * | 2020-03-16 | 2021-03-12 | 天目爱视(北京)科技有限公司 | Three-dimensional model construction and measurement method based on coordinate measurement |
| CN113489547B (en) * | 2021-06-29 | 2022-11-11 | 西安理工大学 | A laser beam fast alignment system and method thereof |
| CN114739428B (en) * | 2022-05-05 | 2024-08-13 | 西安应用光学研究所 | Tracking accuracy measuring device based on two-dimensional fast control reflector |
| CN115326107B (en) * | 2022-07-21 | 2024-11-22 | 武汉华中天经通视科技有限公司 | A digital calibration method for normal line error of scanning mirror |
| CN115950388A (en) * | 2022-12-14 | 2023-04-11 | 海宁集成电路与先进制造研究院 | Device and method for measuring translation errors of two shafts and reflecting mirror of reflective laser tracker |
| CN116015433B (en) * | 2022-12-30 | 2024-06-28 | 东南大学 | Beam estimation and adjustment method based on quick reflector |
| CN116222372A (en) * | 2023-03-03 | 2023-06-06 | 北京瑞控信科技股份有限公司 | Quick reflector angle calibration method and system |
| CN117555357A (en) * | 2023-11-10 | 2024-02-13 | 网络通信与安全紫金山实验室 | Control method and system of quick reflector, electronic equipment and storage medium |
| CN117590755B (en) * | 2024-01-18 | 2024-05-07 | 季华实验室 | Dual-fast-reflector beam pointing control method and related equipment |
| CN118089597B (en) * | 2024-04-24 | 2024-07-09 | 天津揽海慧听科技有限公司 | Laser scanning angle measuring device and method |
-
2024
- 2024-12-19 CN CN202411883559.3A patent/CN119687986B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL115964A0 (en) * | 1994-11-15 | 1996-01-31 | Hughes Aircraft Co | Error detector apparatus with digital coordinate transformation |
| JP2012138597A (en) * | 2004-06-18 | 2012-07-19 | Electro Scientific Industries Inc | Semiconductor structure process using plurality of laser beam spots |
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