CN119739094A - Radio frequency ion source transient response power supply control system - Google Patents
Radio frequency ion source transient response power supply control system Download PDFInfo
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Abstract
The invention discloses a radio frequency ion source transient response power supply control system, which belongs to the technical field of power supplies and comprises an MCU controller and a protection circuit module, wherein the MCU controller is connected with a digital controller, the MCU controller is connected with a PID control algorithm, the MCU controller is connected with a power supply main chip, the power supply main chip is connected with an ion source, and the power supply main chip is connected with feedback monitoring; according to the invention, by arranging the MCU controller, the digital controller, the PID control algorithm, the power main chip, the ion source, the feedback monitoring, the switching frequency adjusting module and the protection circuit module, under the mutual coordination of the modules, the power supply can be stably transited in the starting and closing processes, the fluctuation of current and voltage can be effectively reduced, the stability and the reliability of the power supply control system are comprehensively improved, the service lives of the power supply and the whole power supply control system can be remarkably prolonged, and the transient response capability of the power supply can be improved.
Description
Technical Field
The invention belongs to the technical field of power supplies, and particularly relates to a transient response power supply control system of a radio frequency ion source.
Background
The power source is a device that converts other forms of energy into electrical energy. The main function of the power supply is to provide electric energy for the circuit, and the power supply is mainly divided into two major types of direct current power supply and alternating current power supply according to different conversion modes. The DC power supply outputs current and voltage in a constant direction, which are commonly found in batteries, DC regulated power supplies and the like, while the AC power supply outputs current and voltage which periodically change, such as household mains supply.
The conventional radio frequency ion source and Hall ion source power supply system responds slowly when the conventional radio frequency ion source and Hall ion source power supply system face load transient impact, so that the power supply damage or the unstable phenomenon of the power supply system can be caused, and particularly the problems of current overshoot and voltage rebound easily occur when the power supply system is started or shut down, so that the stability of the power supply and the power supply system cannot be ensured, and therefore, the radio frequency ion source transient response power supply control system is required to solve the problems.
Disclosure of Invention
The present invention is directed to a power control system for transient response of a rf ion source, so as to solve the above-mentioned problems in the prior art.
In order to achieve the purpose, the radio frequency ion source transient response power supply control system comprises an MCU controller and a protection circuit module, wherein the MCU controller is connected with a digital controller, the MCU controller is connected with a PID control algorithm, the MCU controller is connected with a power supply main chip, the power supply main chip is connected with an ion source, the power supply main chip is connected with feedback monitoring, the feedback monitoring is connected with the MCU controller, the MCU controller is connected with a switching frequency adjusting module, the switching frequency adjusting module is connected with the power supply main chip, and the protection circuit module is connected with the power supply main chip.
Through setting up above-mentioned structure, feedback monitoring can real-time accurate collection power output's current, parameters such as voltage, and feedback to MCU controller rapidly, digital controller in the MCU controller can coordinate each module work, its built-in PID control algorithm can be according to feedback information, and then produce suitable control signal, the power owner chip is under this control signal effect, can the rapid adjustment output waveform in order to adapt to the abrupt change of load, ensure that the load is when taking place the violent change, the power can respond rapidly and keep stable output, switching frequency adjustment module can change the switching frequency of power owner chip in a flexible way according to the instruction that MCU controller transmitted, and then can further optimize power output characteristic, and can improve the fast adaptability of power to load change, and protection circuit module can real-time monitoring power owner chip's operating condition, in case detect the excessive pressure, overflow, the abnormal conditions such as overheat, protection circuit module can start protection mechanism immediately and adjust the power, and then can avoid the circumstances emergence of power component impact because of the load, under the mutually supporting of each module, can make steady start and shut down in and transient response in the power and the transient response of the power system can be effectively controlled simultaneously with the stability and the stability of the transient response of the power system is improved.
As a preferable scheme, the MCU controller comprises a digital controller and a PID control algorithm, and the MCU controller can adjust the output of the power supply in real time through the digital controller and the PID control algorithm.
As a preferable scheme, the digital controller is responsible for digitally managing and controlling the whole power control system, can receive and process various signals and coordinate the work of each module, and is a command center of the power control system.
As a preferable scheme, the PID control algorithm can calculate a proper control quantity according to the deviation between the actual output provided by feedback monitoring and a set value, and can adjust the power supply output in real time so that the output of a power supply main chip is as close to the set value as possible.
As a preferable scheme, the power supply main chip is a core power device of the power supply control system and is responsible for converting the input electric energy into output electric energy meeting the requirements.
As a preferable scheme, the ion source is a load of the whole system, and generates physical phenomena such as ion beams and the like under the action of electric energy provided by the power supply main chip, and the ion source is used in experiments requiring ions.
As a preferable scheme, the feedback monitoring can monitor the output voltage and current of the power supply main chip in real time and can feed back the actual values to the MCU controller so that the MCU controller can know the working state of the power supply main chip.
As a preferred scheme, the switching frequency adjusting module can adjust the output characteristic of the power supply by changing the switching frequency of the power supply main chip, and can optimize the conversion efficiency and dynamic response performance of the power supply.
As a preferred scheme, the protection circuit module can perform overvoltage, overcurrent and overheat protection on the power supply control system, and when the power supply control system is abnormal, the protection circuit module can rapidly adjust the power supply to prevent the damage of the power supply main chip and other elements.
By arranging the feedback monitoring and switching frequency adjusting module, the feedback monitoring can not only provide real-time output parameter feedback for the MCU controller, but also analyze the monitored data, when detecting that certain parameters exceed the normal range, the feedback monitoring and switching frequency adjusting module can send out fault early warning signals in advance to remind operators to check and process in time, so that further expansion of faults can be avoided, the switching frequency adjusting module can not only improve transient response capacity of a power supply, but also adjust switching frequency according to the size and characteristics of a load so as to optimize conversion efficiency of the power supply, and therefore efficiency of the whole power supply control system can be improved.
Compared with the prior art, the invention has the beneficial effects that:
According to the invention, through setting the MCU controller, the digital controller, the PID control algorithm, the power supply main chip, the ion source, the feedback monitoring, the switching frequency adjusting module and the protection circuit module, the feedback monitoring can accurately collect parameters such as current and voltage output by the power supply in real time and rapidly feed back the parameters to the MCU controller, the digital controller in the MCU controller can coordinate the work of each module, the built-in PID control algorithm can accurately calculate output deviation according to feedback information so as to generate a proper control signal, the power supply main chip can rapidly adjust output waveforms to adapt to abrupt change of loads under the action of the control signal, the power supply can rapidly respond to and keep stable output when the load is severely changed, the switching frequency adjusting module can flexibly change the switching frequency of the power supply main chip according to instructions transmitted by the MCU controller, the power supply output characteristics can be further optimized, and the rapid adaptability of the power supply to the load change can be improved, the protection circuit module can timely monitor the working state of the power supply main chip, the abnormal conditions such as overvoltage, overcurrent and overheat are detected, the protection circuit module can be immediately started for protection so as to adjust the power supply, the power supply can be further controlled to be in a stable state, the transient state and the power supply can be completely and stable, the power supply can be prevented from being completely and effectively stressed, and stably responds to the power supply can be controlled by the power supply, and has the power supply has the advantages of the overall stability.
According to the invention, by arranging the feedback monitoring and switching frequency adjusting module, the feedback monitoring can not only provide real-time output parameter feedback for the MCU controller, but also analyze the monitored data, and when detecting that certain parameters exceed the normal range, the feedback monitoring can send out fault early warning signals in advance to remind operators to check and process in time, so that further expansion of faults can be avoided, and the switching frequency adjusting module can not only improve the transient response capability of the power supply, but also adjust the switching frequency according to the size and the characteristics of the load so as to optimize the conversion efficiency of the power supply, thereby improving the efficiency of the whole power supply control system.
Drawings
FIG. 1 is a schematic diagram of the working principle of the present invention;
FIG. 2 is a schematic diagram of the modular connection of the present invention;
Fig. 3 is a schematic structural diagram of connection of the MCU controller module of the present invention.
In the figure, the device comprises a MCU controller, a digital controller, a PID control algorithm, a power supply main chip, an ion source, a feedback monitor, a switching frequency adjusting module and a protection circuit module, wherein the MCU controller, the digital controller, the PID control algorithm, the power supply main chip, the ion source, the feedback monitor, the switching frequency adjusting module and the protection circuit module are all arranged in sequence.
Detailed Description
The invention is further described below with reference to examples.
The following examples are illustrative of the present invention but are not intended to limit the scope of the invention. The conditions in the examples can be further adjusted according to specific conditions, and simple modifications of the method of the invention under the premise of the conception of the invention are all within the scope of the invention as claimed.
Referring to fig. 1-3, the invention provides a transient response power supply control system of a radio frequency ion source, which comprises an MCU controller 1 and a protection circuit module 6, wherein the MCU controller 1 is connected with a digital controller 101, the MCU controller 1 is connected with a PID control algorithm 102, the MCU controller 1 is connected with a power supply main chip 2, the power supply main chip 2 is connected with an ion source 3, the power supply main chip 2 is connected with a feedback monitoring 4, the feedback monitoring 4 is connected with the MCU controller 1, the MCU controller 1 is connected with a switching frequency adjusting module 5, the switching frequency adjusting module 5 is connected with the power supply main chip 2, the protection circuit module 6 is connected with the power supply main chip 2, the parameters of current, voltage and the like output by the power supply can be accurately collected in real time by arranging the MCU controller 1, the digital controller 101, the PID control algorithm 102, the power supply main chip 2, the ion source 3, the feedback monitoring 4, the switching frequency adjusting module 5 and the protection circuit module 6, the digital controller 101 in the MCU controller 1 can coordinate the work of each module, the built-in PID control algorithm 102 can accurately calculate the output deviation according to the feedback information, and then generate a proper control signal, the power supply main chip 2 can quickly adjust the output waveform to adapt to the abrupt change of the load under the action of the control signal, ensure that the power supply can quickly respond and keep stable output when the load is severely changed, the switching frequency adjusting module 5 can flexibly change the switching frequency of the power supply main chip 2 according to the instruction transmitted by the MCU controller 1, further optimize the power supply output characteristic, and improve the quick adaptation capability of the power supply to the load change, the protection circuit module 6 can monitor the working state of the power supply main chip 2 in real time, and once the overvoltage is detected, the protection circuit module 6 can immediately start a protection mechanism to adjust a power supply under abnormal conditions such as overcurrent and overheat, so that the situation that a power supply element is damaged due to load impact can be avoided as much as possible, under the mutual cooperation of the modules, the power supply can be enabled to stably transition in the starting and closing processes, fluctuation of current and voltage can be effectively reduced, the stability and reliability of a power supply control system are comprehensively improved, the service lives of the power supply and the whole power supply control system can be remarkably prolonged, and the transient response capability of the power supply can be improved.
The MCU controller 1 includes a digital controller 101 and a PID control algorithm 102, and the MCU controller 1 can adjust the output of the power supply in real time through the digital controller 101 and the PID control algorithm 102.
The digital controller 101 is responsible for digitally managing and controlling the entire power control system, and is capable of receiving and processing various signals and coordinating the operation of the modules, and is a "command center" of the power control system.
The PID control algorithm 102 can calculate a suitable control amount according to the deviation between the actual output provided by the feedback monitor 4 and the set value, and can adjust the power output in real time, so that the output of the power main chip 2 is as close to the set value as possible.
The power supply main chip 2 is a core power device of the power supply control system and is responsible for converting input electric energy into output electric energy meeting the requirements.
The ion source 3 is a load of the whole system, and generates physical phenomena such as ion beams and the like under the action of electric energy provided by the power supply main chip 2, so as to be used in experiments requiring ions.
The feedback monitor 4 can monitor the output voltage and current of the power supply main chip 2 in real time, and can feed back these actual values to the MCU controller 1 so that the MCU controller 1 knows the working state of the power supply main chip 2.
The switching frequency adjusting module 5 can adjust the output characteristic of the power supply by changing the switching frequency of the power supply main chip 2, and can optimize the conversion efficiency and dynamic response performance of the power supply.
The protection circuit module 6 can perform overvoltage, overcurrent and overheat protection on the power supply control system, when the power supply control system has abnormal conditions, the protection circuit module 6 can rapidly adjust the power supply to prevent the power supply main chip 2 and other elements from being damaged, by arranging the feedback monitoring 4 and the switching frequency adjusting module 5, the feedback monitoring 4 can not only provide real-time output parameter feedback for the MCU controller 1, but also analyze monitored data, and when detecting that certain parameters exceed the normal range, the protection circuit module can send fault early warning signals in advance to remind operators to timely check and process, so that faults can be prevented from being further enlarged, and the switching frequency adjusting module 5 can not only improve the transient response capacity of the power supply, but also can adjust the switching frequency according to the size and characteristics of loads to optimize the conversion efficiency of the power supply, so that the efficiency of the whole power supply control system can be improved.
The power supply control system monitors the power supply output in real time through the feedback monitoring 4, and feeds back the parameters such as current and voltage of the power supply output monitored in real time to the MCU controller 1, after the digital controller 101 in the MCU controller 1 receives feedback signals, the deviation between the current output and a set value is calculated through the PID control algorithm 102, the quantity to be regulated is calculated according to the deviation, then the MCU controller 1 sends control signals to the power supply main chip 2, meanwhile, the switching frequency regulating module 5 is controlled to regulate the switching frequency, so that the power supply main chip 2 can regulate the output waveform rapidly according to the change of loads, fluctuation of the current and the voltage is reduced, the protection circuit module 6 continuously monitors the working state of the power supply main chip 2 in the whole process, and once abnormal conditions such as overvoltage, overcurrent and overheat of the power supply main chip 2 are found, the protection circuit module 6 immediately starts a protection mechanism to ensure the safety of the power supply and the power supply control system, and when the power supply is started and closed, the power supply is more stable in output of the power supply and can effectively reduce the damage of load impact to the power supply element and transient response capability of the power supply.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
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| CN202510251855.XA CN119739094A (en) | 2025-03-05 | 2025-03-05 | Radio frequency ion source transient response power supply control system |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080129209A1 (en) * | 2006-11-30 | 2008-06-05 | Veeco Instruments, Inc. | Adaptive controller for ion source |
| CN102904477A (en) * | 2012-09-05 | 2013-01-30 | 盐城工学院 | Bidirectional Pulse Electroplating Switching Power Supply Based on CPLD Control |
| CN111176356A (en) * | 2019-12-31 | 2020-05-19 | 中山市博顿光电科技有限公司 | Ion source constant current control device and method and ion source system |
| CN115233179A (en) * | 2022-07-30 | 2022-10-25 | 常州夸克涂层科技有限公司 | Filament ion source control method and device of vacuum coating equipment |
| CN116437553A (en) * | 2023-04-03 | 2023-07-14 | 中国科学院微电子研究所 | Radio frequency power source system |
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- 2025-03-05 CN CN202510251855.XA patent/CN119739094A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080129209A1 (en) * | 2006-11-30 | 2008-06-05 | Veeco Instruments, Inc. | Adaptive controller for ion source |
| CN102904477A (en) * | 2012-09-05 | 2013-01-30 | 盐城工学院 | Bidirectional Pulse Electroplating Switching Power Supply Based on CPLD Control |
| CN111176356A (en) * | 2019-12-31 | 2020-05-19 | 中山市博顿光电科技有限公司 | Ion source constant current control device and method and ion source system |
| CN115233179A (en) * | 2022-07-30 | 2022-10-25 | 常州夸克涂层科技有限公司 | Filament ion source control method and device of vacuum coating equipment |
| CN116437553A (en) * | 2023-04-03 | 2023-07-14 | 中国科学院微电子研究所 | Radio frequency power source system |
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