CN119733584B - Probe cold and hot table and probe adjusting method thereof - Google Patents
Probe cold and hot table and probe adjusting method thereof Download PDFInfo
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- CN119733584B CN119733584B CN202411935636.5A CN202411935636A CN119733584B CN 119733584 B CN119733584 B CN 119733584B CN 202411935636 A CN202411935636 A CN 202411935636A CN 119733584 B CN119733584 B CN 119733584B
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Abstract
本发明公开了一种探针冷热台及其探针调节方法，其中探针冷热台包括底座、端盖和探针；底座的测试腔的中部设有样品台，探针安装于测试腔的探针台上且探针的一端指向样品台；端盖通过密封条可拆分连接于底座的上端；还包括连接于探针和探针台之间的定位组件，定位组件包括配重球、外定位球壳和内定位球壳；外定位球壳的外部固定于探针台上，以及外定位球壳的内表面设有第一阻力柱；内定位球壳通过纵向转轴转动连接于外定位球壳的内部。本发明取消了现有外置的操纵器与底座之间的传动结构，利用横向永磁体和纵向永磁体与外置电磁控制器之间的磁力隔底座传递力矩，解决了因随使用时间增长或使用次数增加导致传动间隙增大而出现气密性降低的问题。
The invention discloses a probe hot and cold table and a probe adjustment method thereof, wherein the probe hot and cold table comprises a base, an end cover and a probe; a sample table is provided in the middle of a test cavity of the base, the probe is mounted on the probe table of the test cavity and one end of the probe points to the sample table; the end cover is detachably connected to the upper end of the base through a sealing strip; it also comprises a positioning assembly connected between the probe and the probe table, the positioning assembly comprises a weighted ball, an outer positioning spherical shell and an inner positioning spherical shell; the outer portion of the outer positioning spherical shell is fixed on the probe table, and a first resistance column is provided on the inner surface of the outer positioning spherical shell; the inner positioning spherical shell is rotatably connected to the inner portion of the outer positioning spherical shell through a longitudinal rotating shaft. The invention cancels the transmission structure between the existing external manipulator and the base, and utilizes the magnetic force between the transverse permanent magnet and the longitudinal permanent magnet and the external electromagnetic controller to transmit torque through the base, thereby solving the problem of reduced air tightness due to an increase in transmission gap as the use time increases or the number of uses increases.
Description
Technical Field
The invention belongs to the field of cold and hot tables, and particularly relates to a probe cold and hot table and a probe adjusting method thereof.
Background
The probe cold-hot table is a product designed for a variable-temperature electrical test in the material research process, and can characterize the characteristic that the electrical property of the material changes along with the temperature in the material temperature rise and temperature reduction stages. The fields suitable for the probe cold-hot table mainly comprise the semiconductor industry (for testing the electrical properties of semiconductor chips, devices and the like at different temperatures), the material science research field (such as the superconducting transition temperature of metal materials, the dielectric properties of ceramic materials and the like), the photoelectric field (such as the research of the photoelectric conversion efficiency of solar cells at different temperatures, the change of the luminous characteristics of light-emitting diodes along with the temperature and the like) and the like. In addition, the probe cooling and heating stage is extended to biomedicine, such as researching structural changes of viruses at low temperature and electrical responses of biochips at different temperatures. For example, cell electrophysiological studies, by precisely controlling the temperature, study the change of electrical properties of cells at different temperatures. The method can also simulate the temperature environment of unconventional cells such as pathological cells, cancer cells and the like under physiological and pathological states, observe the morphological, structural and functional changes of the cells, or the reaction under low-temperature preservation or high-temperature stress, and the influence of temperature on the metabolism, proliferation, differentiation and apoptosis of the unconventional cells.
The existing probe cold and hot bench structure mainly comprises a stainless steel main body (a detachable base and an end cover), a sample bench, a probe system, a temperature control system, a manipulator and the like, wherein the sample bench is positioned in the middle of the upper surface of the base and has good flatness and thermal uniformity so as to ensure that samples placed on the sample bench are uniformly distributed in temperature in the testing process. The temperature control system comprises a temperature sensor and a temperature controller, wherein the temperature sensor is fixed in the base, and the temperature controller is used as an external device and is electrically connected with a binding post of the base through a wire. The temperature sensor monitors the temperature of the sample stage in real time and feeds back a temperature signal to the temperature controller, and a standard PID temperature control and self-setting control mode is generally adopted, wherein the temperature resolution can reach 0.1 ℃. The probe system is associated with the manipulator and comprises a probe, a probe arm and a probe seat, wherein the probe is generally made of materials such as tungsten needles and the like, and has higher hardness and conductivity. The probe arm is installed on the base through the probe seat and is adjacent to the sample stage, the probe arm is connected with an external manipulator, and accurate movement of the probe in a specified direction is realized through the manipulator. The external manipulator mostly adopts a sliding rail component, a screw rod component and the like to realize transmission connection, but has tightness, and auxiliary components, such as a corrugated pipe, are required to be equipped to maintain tightness of the test cavity.
Common problems existing in the current probe cold and hot stage include temperature uniformity problems, test space limitations, airtight failure and the like, wherein the airtight failure is closely related to an external manipulator. The circuit part of the base is completely sealed by sealant, and the vacuum control pipe joint and the atmosphere control pipe joint of the base are sealed by sealing rings, so that the circuit part and the pipe joint part are fixed, no gap exists at the joint, and the possibility of air leakage is very low. The external manipulator needs to keep a transmission relation with the probe arm, the external manipulator cannot be fixedly connected with the base, the movable gap between the manipulator and the base is increased along with the increase of the use time or the use frequency, and the external manipulator is one of main reasons for the airtight failure of the probe cold-hot table. Because the biomedical field has extremely high requirements on the isolation (air tightness) of the probe cold and hot stage, such as activity research of infectious viruses in cold and hot environments, metabolism and proliferation research of lesion cells, and the like, if the probe cold and hot stage has an air tightness failure fault, sample leakage threatens researchers in a research room, so that a probe control structure and a probe adjusting method which have higher safety and better air tightness and can replace the existing manipulator are needed.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a probe cold and hot table which comprises a base, an end cover and a probe; the middle part of the test cavity of the base is provided with a sample table, the probe is arranged on the probe table of the test cavity, and one end of the probe points to the sample table; the end cover is detachably connected to the upper end of the base through a sealing strip, so that the test cavity is sealed; the electromagnetic controller comprises a probe, a probe platform, a positioning assembly, a first damping pin, a second damping pin, a transverse permanent magnet, an external permanent magnet, an electromagnetic controller, a magnetic sensor, a probe, a magnetic sensor, and a probe and a positioning and a positioning and positioning and between and between the probe and between and between and positioning and between and positioning, also between and positioning, between positioning, between, positioning, and the probe swings on the horizontal plane and is rubbed with the first resistance column by the first damping needle to control the swinging angle of the probe in the plane, or one end of the longitudinal permanent magnet is magnetically attracted by the external electromagnetic controller to further swing the probe on the vertical plane and is rubbed with the second resistance column by the second damping needle to control the swinging angle of the probe in the vertical plane.
The probe cold and hot table has the beneficial effects that:
1. The transmission structure between the existing external manipulator and the base is canceled, the base is separated by utilizing the magnetic force between the transverse permanent magnet and the longitudinal permanent magnet and the external electromagnetic controller to transfer torque, namely, the probe is driven to swing by utilizing the magnetic force to separate air, and the base and the external electromagnetic controller have no direct connection structure, so that the problem that the air tightness is reduced due to the increase of transmission gaps caused by the increase of the service time or the increase of the service times is thoroughly solved.
2. The counterweight ball and the positioning ball shell of the positioning assembly realize the longitudinal accurate positioning of the probe through the second resistance columns and all the second damping needles, the outer positioning ball shell and the positioning ball shell of the positioning assembly realize the transverse accurate positioning of the probe through the first resistance columns and all the first damping needles, the angle between every two adjacent first damping needles and the angle between every two adjacent second damping needles can be set according to practical conditions, for example, the angle between every two adjacent first damping needles is 1 degree, the unit swing angle of the probe in the horizontal plane is 1 degree correspondingly, the angle between every two adjacent second damping needles is 1 degree correspondingly, and the unit swing angle of the probe in the vertical plane is 1 degree correspondingly.
3. The external electromagnetic controller adopts an electric control mode to adjust the angle, can be matched with an online control system to realize remote adjustment, can be arranged outside a study room by researchers, and can completely avoid potential safety hazards caused by leakage compared with a manual adjustment mode in the study room.
The invention has the preferable scheme that the first resistance column and the second resistance column are respectively provided with a U-shaped groove, the U-shaped grooves are internally provided with a wear-resistant layer, and the first damping needles or the second damping needles with different lengths pass through the corresponding U-shaped grooves and rub with the wear-resistant layer, so that the swinging angle of the probe is controlled. The friction resistance between the unit length of each first damping needle and the unit length of each second damping needle is the same as that between the wear-resistant layers, the wear-resistant layers prescribe the friction times, the wear-resistant layers are replaced after the friction times are reached, and the value change of the friction resistance of the unit length is within the allowable error range.
The invention has the preferable scheme that a resistance pad is arranged between the counterweight ball and the inner positioning ball shell and between the outer positioning ball shell and the inner positioning ball shell, and the rotation moment of the probe on the positioning assembly is balanced through the friction resistance of the resistance pad. In order to avoid the probe from swinging under the condition of being not controlled by the external electromagnetic controller, the resistance of the two resistance pads just balances the rotation moment of the probe in the longitudinal direction and the transverse direction, so that the output moment of the external electromagnetic controller can be reduced, namely the load of the external electromagnetic controller is reduced.
The probe is provided with magnetic poles at two ends of a longitudinal permanent magnet in a specific control mode in the vertical direction, the middle of the longitudinal permanent magnet is connected to the tail end of the probe in a sliding mode through a first telescopic rod, and the middle of the longitudinal permanent magnet is hinged to the first telescopic rod. The external electromagnetic controller comprises a vertical upper electromagnet and a vertical rocker motor, wherein the vertical upper electromagnet and the vertical rocker motor are arranged above the end cover, the magnetic pole of the vertical upper electromagnet is opposite to the magnetic pole at the upper end of the vertical permanent magnet, the vertical upper electromagnet is fixedly connected with a rocker arm of the vertical rocker motor, the vertical upper electromagnet is driven by the vertical rocker motor to synchronously swing along with a probe in a vertical plane, the magnetic pole of the vertical upper electromagnet is kept to be always opposite to the magnetic pole at the upper end of the vertical permanent magnet, the external electromagnetic controller comprises a vertical lower electromagnet and another vertical rocker motor, the magnetic pole of the vertical lower electromagnet is opposite to the magnetic pole at the lower end of the vertical permanent magnet, the vertical lower electromagnet is fixedly connected with a rocker arm corresponding to the vertical rocker motor, and the vertical lower electromagnet is driven by the corresponding vertical rocker motor to synchronously swing along with the probe in the vertical plane, and the magnetic pole of the vertical lower electromagnet is kept to be always opposite to the magnetic pole at the lower end of the vertical permanent magnet.
Similarly, the specific control mode of the probe in the horizontal direction is that magnetic poles are respectively arranged at two ends of the transverse permanent magnet, the middle part of the transverse permanent magnet is connected to the tail end of the first telescopic rod in a sliding manner through the second telescopic rod, and the middle part of the transverse permanent magnet is hinged to the second telescopic rod. The external electromagnetic controller comprises a left electromagnet and a left rocker arm motor which are positioned on the left side of the base, wherein the magnetic pole of the left electromagnet is opposite to the magnetic pole at the left end of the transverse permanent magnet, the left electromagnet is fixedly connected with a rocker arm of the left rocker arm motor, the left electromagnet is driven by the left rocker arm motor to synchronously swing along with the probe in the horizontal plane, the magnetic pole of the left electromagnet is further kept to be always opposite to the magnetic pole at the left end of the transverse permanent magnet, the external electromagnetic controller comprises a right electromagnet and a right rocker arm motor which are positioned on the right side of the base, the magnetic pole of the right electromagnet is opposite to the magnetic pole at the right end of the transverse permanent magnet, the right electromagnet is fixedly connected with the rocker arm of the right rocker arm motor, and the right electromagnet is driven by the right rocker arm motor to synchronously swing along with the probe in the horizontal plane, and further the magnetic pole of the right electromagnet is kept to be always opposite to the magnetic pole at the right end of the transverse permanent magnet.
The balance weight ball is characterized in that the outer surface of the balance weight ball and the inner surface of the inner positioning ball shell are respectively provided with a notch for swinging of the first damping needle, and the outer surface of the inner positioning ball shell and the inner surface of the outer positioning ball shell are respectively provided with a notch for swinging of the second damping needle. The first damping needles swing along with the inner positioning spherical shell and the second damping needles do not collide along with the balance weight ball, all the first damping needles only rub with the first resistance column, and all the second damping needles only rub with the second resistance column.
The invention has the preferable scheme that any one first damping needle is longer or shorter than the adjacent other first damping needle by L, and any one second damping needle is longer or shorter than the adjacent other second damping needle by L. The lengths of all the first damping needles are sequentially increased, the increased lengths are equal, and the friction resistance of the first damping needles from the shortest first damping needle to the longest first damping needle is also increased by equal amount, so that the external electromagnetic controller is convenient to adjust the corresponding electromagnetic force. For example, the shortest first pin requires a force f through the first resistance column, then the adjacent first pin requires a force 2f through the first resistance column, and so on, and the nth first pin requires a force Nf through the first resistance column. The size of the output magnetic force regulated by the external electromagnetic controller is adjustable, the output magnetic force passes through the base and is F, if 2F > F > F, the second short first damping needle can not pass through the first resistance column, namely, the second short first damping needle can be clamped on the first resistance column, so that the positioning control of the probe in the horizontal direction is realized. And the positioning control of the probe in the vertical direction is realized by a second damping needle and a second resistance column, and the control direction is the same as the positioning control mode in the horizontal direction.
The invention also provides a probe adjusting method of the probe cold and hot stage, based on the probe cold and hot stage, the external electromagnetic controller comprises a controller body, and the controller body is respectively connected with the two longitudinal rocker arm motors, the left rocker arm motor, the right rocker arm motor, the longitudinal upper electromagnet, the longitudinal lower electromagnet, the left electromagnet and the right electromagnet in a ferroelectric manner.
S1, placing a sample on a sample table, and pressing an end cover on a base through a bolt so as to seal a test cavity;
s2, adjusting the probe to the leftmost end and the highest point, wherein the leftmost end corresponds to the shortest first damping needle, the highest point corresponds to the shortest second damping needle, the controller body drives the two longitudinal rocker arm motors to enable the upper electromagnet and the lower electromagnet to be opposite to the upper end and the lower end of the longitudinal permanent magnet respectively, and drives the left rocker arm motor and the right rocker arm motor to enable the left electromagnet and the right electromagnet to be opposite to the left end and the right end of the transverse permanent magnet respectively;
S3, swinging the front end of the probe to an A position according to the test requirement, wherein the A position corresponds to the A first damping needle and the A second damping needle;
s301, enabling a controller body to enable a left electromagnet to be electrified, wherein magnetic force generated by the left electromagnet is smaller than friction force between an A first damping needle and a first resistance column and larger than friction force between an A-1 first damping needle and the first resistance column;
S302, the controller body enables the upper electromagnet to be electrified, the magnetic force of the upper electromagnet is smaller than the friction force between the A second damping needle and the second resistance column and is larger than the friction force between the A-1 second damping needle and the second resistance column, the upper electromagnet attracts the upper end of the longitudinal permanent magnet through magnetic force, the probe swings towards the lower end until the A second damping needle is clamped at the second resistance column due to the fact that the friction resistance is larger than the magnetic force, and the upper electromagnet is powered off, so that the front end of the probe swings to the A position.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings may be obtained according to the drawings without inventive effort to those skilled in the art.
FIG. 1 is a schematic diagram of a probe cold and hot stage according to the present invention;
FIG. 2 is a top view of the hidden controller body and end cap of FIG. 1;
FIG. 3 is a perspective view of FIG. 2;
FIG. 4 is a cross-sectional view taken along the direction A-A in FIG. 2;
FIG. 5 is an enlarged view of a portion of FIG. 4;
FIG. 6 is an enlarged view at B in FIG. 5;
Fig. 7 is an enlarged view at C in fig. 5.
The device comprises a base 1, an end cover 2, a probe 3, a sample table 4, a probe table 5, a wiring pile 6, a pipe joint 7, a sealing strip 8, a counterweight ball 9, an outer positioning ball shell 10, an inner positioning ball shell 11, a first resistance post 12, a longitudinal rotating shaft 13, a first damping pin 14, a wear-resisting layer 15, a transverse rotating shaft 16, a second damping pin 17, a second resistance post 18, a notch 19, a transverse permanent magnet 20, a longitudinal permanent magnet 21, a first telescopic rod 22, a second telescopic rod 23, a longitudinal upper electromagnet 24, a longitudinal rocker arm motor 25, a rocker arm 26, a longitudinal lower electromagnet 27, a left electromagnet 28, a left rocker arm motor 29, a right electromagnet 30, a right rocker arm motor 31, a resistance pad 32 and a controller body.
Detailed Description
In view of the shortcomings in the prior art, the inventor of the present application has long studied and practiced in a large number of ways to propose the technical scheme of the present application. The technical scheme, implementation process and principle of the present application will be further explained with reference to the drawings and specific embodiments in the embodiments of the present application.
It should be noted that the embodiments described below by referring to the drawings are exemplary only for explaining the present invention and are not to be construed as limiting the present invention, and the described embodiments are only some embodiments of the present invention, not all embodiments. The invention is to cover alternatives, modifications, equivalents, and variations of the invention as may be included within the spirit, principles and scope of the invention as defined by the appended claims as would be apparent to one of ordinary skill in the art to which the invention pertains without inventive faculty.
In the description of the present application, unless explicitly specified and limited otherwise, terms of art or science are used in a general sense as understood by those skilled in the art to which the present application pertains, and terms such as "mounted," "connected," and "connected" are to be construed broadly, and may be either fixed or removable or contradictory or integral, and the detailed meaning of the terms in the present application may be understood as specific to those skilled in the art.
Embodiment one;
as shown in fig. 1, 2 and 3, a first embodiment provides a probe cooling and heating stage, which comprises a base 1, an end cover 2 and a probe 3. The middle part of the test cavity of the base 1 is provided with a sample table 4, the probe 3 is arranged on a probe table 5 of the test cavity, one end of the probe 3 points to the sample table 4, and the end cover 2 is detachably connected to the upper end of the base 1 through a sealing strip 8 so as to seal the test cavity. In addition, the side of the base 1 is also provided with a connection peg 6 electrically connected to the heating element of the probe station 5, and a pipe joint 7 communicating with an external refrigeration pipe.
As shown in fig. 4, 5 and 6, in order to achieve accurate horizontal positioning of the probe 3, the present embodiment further includes a positioning assembly connected between the probe 3 and the probe stage 5, the positioning assembly including a weight ball 9, an outer positioning ball housing 10 and an inner positioning ball housing 11. The outer positioning spherical shell 10 is fixed on the probe platform 5, a first resistance column 12 is arranged on the inner surface of the outer positioning spherical shell 10, the inner positioning spherical shell 11 is rotatably connected to the inner part of the outer positioning spherical shell 10 through a longitudinal rotating shaft 13, a row of first damping needles 14 which are distributed at equal intervals along the circumferential direction of the inner positioning spherical shell 11 and sequentially increase in length are arranged on the outer surface of the inner positioning spherical shell 11, each increased length is a unit length L, namely, any one first damping needle 14 is longer or shorter than the adjacent other first damping needle 14, the first resistance column 12 and all the first damping needles 14 are parallel to the horizontal plane, and the longitudinal rotating shaft 13 forms an included angle of 90 degrees with the first resistance column 12. The first resistance column 12 is provided with a U-shaped groove, and a wear-resistant layer 15 is arranged in the U-shaped groove, and the first damping needles 14 with different lengths pass through the corresponding U-shaped groove and rub against the wear-resistant layer 15, so that the swinging angle of the probe 3 is controlled. The friction resistance between the unit length L of each first damping pin 14 and the wear-resistant layer 15 is the same, the wear-resistant layer 15 prescribes the friction times, the wear-resistant layer 15 is replaced after the friction times are reached, and the value change of the friction resistance of the unit length is within the allowable error range. I.e. the length of all the first damper needles 14 increases in sequence and the increasing length is equal, the frictional resistance to the first resistance column 12 increases equally from the shortest first damper needle 14 to the longest first damper needle 14. For example, the shortest first damping pin 14 requires a force f through the first resistance post 12, then the adjacent first damping pin 14 requires a force 2f through the first resistance post 12, and so on, the nth first damping pin 14 requires a force Nf through the first resistance post 12.
As shown in fig. 4 to 7, in order to realize accurate vertical positioning of the probe 3, the weight ball 9 in this embodiment is rotatably connected to the inside of the positioning ball housing 11 through the transverse rotating shaft 16, and the inner surface of the weight ball 9 is provided with a row of second damping pins 17 distributed at equal intervals along the circumferential direction of the weight ball 9 and sequentially increasing in length, and the outside of the positioning ball housing 11 is provided with a second resistance column 18, and the second resistance columns 18 and all the second damping pins 17 are parallel to the vertical plane. The second resistance column 18 is identical in construction to the first resistance column 12, with an antifriction layer. The lengths of all the second damping needles 17 and all the first damping needles 14 are the same, the unit increment length is L, the number of the second damping needles 17 and the first damping needles 14 is the same, the angles between two adjacent second damping needles 17 or the angles between two adjacent first damping needles 14 are the same, or the angles between two adjacent first damping needles 14 and the angles between two adjacent second damping needles 17 can be set according to practical situations, for example, the angles between two adjacent first damping needles 14 are 1 DEG, the unit swing angle of the probe 3 in the horizontal plane is 1 DEG, the angle between two adjacent second damping needles 17 is 1 DEG, and the unit swing angle of the probe 3 in the vertical plane is 1 deg. The smaller the angle is, the smaller the unit deflection angle of the probe 3 is, the higher the control accuracy is, and the specific angle is not limited in this embodiment. In addition, the outer surface of the weight ball 9 and the inner surface of the inner positioning ball shell 11 are provided with notches 19 for the swinging of the first damping pin 14, and the outer surface of the inner positioning ball shell 11 and the inner surface of the outer positioning ball shell 10 are provided with notches 19 for the swinging of the second damping pin 17. The first damping needles 14 swing along with the inner positioning spherical shell 11 and the second damping needles 17 swing along with the counterweight balls 9, so that collision cannot happen, all the first damping needles 14 only rub with the first resistance columns 12, and all the second damping needles 17 only rub with the second resistance columns 18.
In order to realize the swing angle of the air-isolation control probe 3, the embodiment is realized by an external electromagnetic controller, a transverse permanent magnet 20 and a longitudinal permanent magnet 21, and the specific connection structure is as follows:
As shown in fig. 4 to 7, the other end of the probe 3 penetrates through the upper portion of the weight ball 9 and is respectively hinged with the transverse permanent magnet 20 and the longitudinal permanent magnet 21, magnetic poles are respectively arranged at two ends of the longitudinal permanent magnet 21, the middle portion of the longitudinal permanent magnet 21 is slidably connected to the tail end of the probe 3 through the first telescopic rod 22, and the middle portion of the longitudinal permanent magnet 21 is hinged with the first telescopic rod 22. Similarly, magnetic poles are respectively arranged at two ends of the transverse permanent magnet 20, the middle part of the transverse permanent magnet 20 is connected to the tail end of the first telescopic rod 22 in a sliding manner through the second telescopic rod 23, and the middle part of the transverse permanent magnet 20 is hinged with the second telescopic rod 23. The first telescopic rod 22 and the second telescopic rod 23 are intended to automatically adapt to the axial displacement of the probe 3 that occurs during oscillation. The external electromagnetic controller is positioned outside the base 1, is respectively opposite to two ends of the transverse permanent magnet 20 and two ends of the longitudinal permanent magnet 21 one by one, and is used for magnetically attracting one end of the transverse permanent magnet 20 so as to enable the probe 3 to swing in a horizontal plane and rub with the first resistance post 12 by the first damping needle 14 to control the swinging angle of the probe 3 in the plane, or is used for magnetically attracting one end of the longitudinal permanent magnet 21 so as to enable the probe 3 to swing in a vertical plane and rub with the second resistance post 18 by the second damping needle 17 to control the swinging angle of the probe 3 in the vertical plane. The transverse permanent magnet 20 is opposite to the magnetism of the magnetic pole of the opposite external electromagnetic controller and attracts in opposite directions. The same is true for the longitudinal permanent magnets 21.
As shown in fig. 2 and 3, the specific structure of the external electromagnetic controller comprises a vertical upper electromagnet 24 and a vertical rocker motor 25, wherein the vertical upper electromagnet 24 and the vertical rocker motor 25 are positioned above the end cover 2, the magnetic pole of the vertical upper electromagnet 24 is opposite to the magnetic pole at the upper end of the vertical permanent magnet 21, the vertical upper electromagnet 24 is fixedly connected with a rocker 26 of the vertical rocker motor 25, and the vertical upper electromagnet 24 is driven to synchronously swing along with the probe 3 in a vertical plane through the vertical rocker motor 25, so that the magnetic pole of the vertical upper electromagnet 24 is always opposite to the magnetic pole at the upper end of the vertical permanent magnet 21. The external electromagnetic controller further comprises a vertical lower electromagnet 27 and another vertical rocker motor 25, wherein the vertical lower electromagnet 27 and the other vertical rocker motor 25 are positioned below the base 1, the magnetic pole of the vertical lower electromagnet 27 is opposite to the magnetic pole at the lower end of the vertical permanent magnet 21, the vertical lower electromagnet 27 is fixedly connected with a rocker 26 corresponding to the vertical rocker motor 25, and the vertical lower electromagnet 27 is driven to synchronously swing along with the probe 3 in the vertical plane through the corresponding vertical rocker motor 25, so that the magnetic pole of the vertical lower electromagnet 27 is kept opposite to the magnetic pole at the lower end of the vertical permanent magnet 21 all the time. The external electromagnetic controller further comprises a left electromagnet 28 and a left rocker arm motor 29 which are positioned on the left side of the base 1, the magnetic pole of the left electromagnet 28 is opposite to the magnetic pole of the left end of the transverse permanent magnet 20, the left electromagnet 28 is fixedly connected with the rocker arm 26 of the left rocker arm motor 29, the left electromagnet 28 is driven to synchronously swing along with the probe 3 in the horizontal plane by the left rocker arm motor 29, and the magnetic pole of the left electromagnet 28 is kept opposite to the magnetic pole of the left end of the transverse permanent magnet 20 all the time. The external electromagnetic controller further comprises a right electromagnet 30 and a right rocker motor 31 which are positioned on the right side of the base 1, wherein the magnetic pole of the right electromagnet 30 is opposite to the magnetic pole at the right end of the transverse permanent magnet 20, the right electromagnet 30 is fixedly connected with the rocker 26 of the right rocker motor 31, and the right electromagnet 30 is driven to synchronously swing along with the probe 3 in the horizontal plane through the right rocker motor 31, so that the magnetic pole of the right electromagnet 30 is kept opposite to the magnetic pole at the right end of the transverse permanent magnet 20 all the time.
As shown in fig. 5, the inner positioning spherical shell 11 in the present embodiment rotates in the outer positioning spherical shell 10 through the longitudinal rotating shaft 13, the inner positioning spherical shell 11 rotates in the outer positioning spherical shell 10 through the two symmetrical transverse rotating shafts 16, and in order to avoid the rotation of the probe 3 due to the gravity influence of the transverse permanent magnet 20 and the longitudinal permanent magnet 21, in the present embodiment, a resistance pad 32 is disposed between the weight ball 9 and the inner positioning spherical shell 11 and between the outer positioning spherical shell 10 and the inner positioning spherical shell 11, and the rotation moment of the probe 3 on the positioning assembly is balanced through the friction resistance of the resistance pad 32. In order to avoid the oscillation of the probe 3 without being controlled by the external electromagnetic controller, the resistance of the two resistance pads 32 just balances the rotation moment of the probe 3 in the longitudinal direction and the transverse direction, so that the output moment of the external electromagnetic controller can be reduced, namely the load of the external electromagnetic controller is reduced.
The transmission structure between the existing external manipulator and the base 1 is canceled, the base 1 is separated by utilizing the magnetic force between the transverse permanent magnet 20 and the longitudinal permanent magnet 21 and the external electromagnetic controller to transmit torque, namely, the magnetic force is used for separating and driving the probe 3 to swing, the base 1 and the external electromagnetic controller have no direct connection structure, and the problem that the air tightness is reduced due to the fact that the transmission clearance is increased as the service time is prolonged or the service times are increased is thoroughly solved.
In addition, in order to meet the experimental requirements, two probes 3, three probes, and the like in this embodiment may be provided, and each probe 3 corresponds to one positioning component, an external electromagnetic controller, a transverse permanent magnet 20, and a longitudinal permanent magnet 21. The specific number of probes 3 is dependent on the actual situation, and the present embodiment is not limited.
Embodiment two;
The second embodiment provides a probe adjusting method for a probe cooling and heating platform, and based on the probe cooling and heating platform of the first embodiment, the external electromagnetic controller includes a controller body 33, and the controller body 33 is electrically connected with two longitudinal rocker arm motors 25, a left rocker arm motor 29, a right rocker arm motor 31, a longitudinal upper electromagnet 24, a longitudinal lower electromagnet 27, a left electromagnet 28 and a right electromagnet 30 respectively. The two longitudinal rocker motors 25, the left rocker motor 29, the right rocker motor 31, the upper electromagnet 24, the lower electromagnet 27, the left electromagnet 28 and the right electromagnet 30 are all mounted outside the base 1 through external fixing frames, and the specific structure of the external fixing frames is not required to be protected in the embodiment and is not drawn in the figure.
The control method comprises the steps of firstly, adjusting the probe 3 to the leftmost end and the highest point, wherein the leftmost end corresponds to the shortest first damping pin 14, the highest point corresponds to the shortest second damping pin 17, the controller body 33 drives the two longitudinal rocker motors 25 to enable the upper electromagnet 24 and the lower electromagnet 27 to be opposite to the upper end and the lower end of the longitudinal permanent magnet 21 respectively, and drives the left rocker motor 29 and the right rocker motor 31 to enable the left electromagnet 28 and the right electromagnet 30 to be opposite to the left end and the right end of the transverse permanent magnet 20 respectively.
And then the front end of the probe 3 is swung to the position A according to the test requirement, and the position A corresponds to the first damping needle 14 and the second damping needle 17.
Finally, the controller body 33 energizes the left electromagnet 28, and the magnetic force generated by the left electromagnet 28 is smaller than the friction force between the A-th first damper needle 14 and the first resistance post 12 and larger than the friction force between the A-1 st first damper needle 14 and the first resistance post 12. The left electromagnet 28 attracts the left end of the transverse permanent magnet 20 through magnetic force, the probe 3 swings towards the right end until the A first damping pin 14 is clamped at the first resistance column 12 due to the fact that friction resistance is larger than the magnetic force, and the left electromagnet 28 is powered off. The controller body 33 energizes the upper-side electromagnet 24, the magnetic force of the upper-side electromagnet 24 is smaller than the friction force between the A second damping pin 17 and the second resistance post 18 and larger than the friction force between the A-1 second damping pin 17 and the second resistance post 18, the upper-side electromagnet 24 attracts the upper end of the longitudinal permanent magnet 21 through the magnetic force, the probe 3 swings towards the lower end until the A second damping pin 17 is clamped at the second resistance post 18 due to the fact that the friction resistance is larger than the magnetic force, and the upper-side electromagnet 24 is deenergized, so that the front end of the probe 3 swings to the A position. In order to facilitate the adjustment of the controller body 33, the output magnetic force of the external magnetic controller is set to an adjustable step value, for example, the first unit step magnetic force value is F, the second step magnetic force value is 2F, the third step magnetic force value is 3F, and so on. However, the magnetic force value F is a magnetic force value after being isolated and attenuated by the base 1, and although the base 1 and the end cover 2 are made of stainless steel, when the magnetic field encounters materials such as stainless steel, the magnetic field induces magnetic moment inside the materials. For magnetic stainless steel, the magnetic field can penetrate well, and magnetic force lines can pass smoothly because magnetic domains in the material can interact with an external magnetic field. For weak or non-magnetic austenitic stainless steel, although the magnetic force can penetrate, the magnetic force can be attenuated to some extent due to its shielding effect against the magnetic field. Thus, the value of F here is the magnitude of the magnetic force after passing through the base 1, and the magnetic force outside the base 1 may be greater than F, depending on the materials of the base 1 and the end cap 2.
Compared with the existing manual adjustment mode in a research room, the adjustment method for the probe 3 provided by the embodiment adopts an electric control mode to adjust the angle of the external electromagnetic controller, can be matched with an online control system to realize remote adjustment, and can completely avoid potential safety hazards caused by leakage.
It should be understood that the foregoing embodiments are merely illustrative of the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the present invention and to practice it accordingly, it should not be construed that the present invention is limited to the embodiments, and that several simple deductions or substitutions may be made by those skilled in the art without departing from the spirit of the present invention, and all equivalent changes or modifications according to the spirit of the present invention shall be covered in the scope of the present invention.
Claims (8)
1. The probe cold and hot table comprises a base, an end cover and a probe, wherein a sample table is arranged in the middle of a test cavity of the base, the probe is arranged on the probe table of the test cavity, and one end of the probe points to the sample table;
The probe is characterized by also comprising a positioning assembly connected between the probe and the probe platform, wherein the positioning assembly comprises a counterweight ball, an outer positioning ball shell and an inner positioning ball shell;
The outer part of the outer positioning spherical shell is fixed on the probe table, and the inner surface of the outer positioning spherical shell is provided with a first resistance column; the inner positioning spherical shell is rotationally connected to the inside of the outer positioning spherical shell through a longitudinal rotating shaft, and the outer surface of the inner positioning spherical shell is provided with a row of first damping needles which are distributed at equal intervals along the circumferential direction of the inner positioning spherical shell and sequentially increase in length;
The counterweight ball is rotationally connected with the inside of the inner positioning ball shell through a transverse rotating shaft, and the inner surface of the counterweight ball is provided with a row of second damping needles which are distributed at equal intervals along the circumferential direction of the counterweight ball and the lengths of the second damping needles are sequentially increased;
The other end of the probe penetrates through the upper part of the counterweight ball and is respectively hinged with the transverse permanent magnet and the longitudinal permanent magnet;
The external electromagnetic controller is arranged outside the base and is respectively opposite to two ends of the transverse permanent magnet and two ends of the longitudinal permanent magnet one by one, one end of the transverse permanent magnet is magnetically attracted by the external electromagnetic controller, so that the probe swings in the horizontal plane and is rubbed by the first damping needle and the first resistance column to control the swinging angle of the probe in the plane, or one end of the longitudinal permanent magnet is magnetically attracted by the external electromagnetic controller, so that the probe swings in the vertical plane and is rubbed by the second damping needle and the second resistance column to control the swinging angle of the probe in the vertical direction;
The two ends of the longitudinal permanent magnet are respectively provided with magnetic poles, the middle part of the longitudinal permanent magnet is connected to the tail end of the probe in a sliding way through a first telescopic rod, and the middle part of the longitudinal permanent magnet is hinged with the first telescopic rod;
The two ends of the transverse permanent magnet are respectively provided with magnetic poles, the middle part of the transverse permanent magnet is connected to the tail end of the first telescopic rod in a sliding manner through the second telescopic rod, and the middle part of the transverse permanent magnet is hinged with the second telescopic rod.
2. The cold and hot stand of claim 1, wherein the first and second resistance columns are provided with U-shaped grooves, and wear-resistant layers are arranged in the U-shaped grooves, and the first or second damping needles with different lengths pass through the corresponding U-shaped grooves and rub against the wear-resistant layers, so that the swinging angle of the probe is controlled.
3. The cold and hot stand of claim 1, wherein a resistance pad is disposed between the weight ball and the inner positioning ball shell and between the outer positioning ball shell and the inner positioning ball shell, and the rotation moment of the probe on the positioning assembly is balanced by the friction resistance of the resistance pad.
4. The probe cold and hot table of claim 1, wherein the external electromagnetic controller comprises a vertical upper electromagnet and a vertical rocker motor which are positioned above the end cover, wherein the magnetic pole of the vertical upper electromagnet is opposite to the magnetic pole at the upper end of the vertical permanent magnet, the vertical upper electromagnet is fixedly connected with a rocker arm of the vertical rocker motor, and the vertical upper electromagnet is driven by the vertical rocker motor to synchronously swing along with the probe in a vertical plane, so that the magnetic pole of the vertical upper electromagnet is always opposite to the magnetic pole at the upper end of the vertical permanent magnet;
the vertical lower electromagnet is driven to synchronously swing along with the probe in a vertical plane by the corresponding longitudinal rocker motor, so that the magnetic pole of the vertical lower electromagnet is always opposite to the magnetic pole of the lower end of the longitudinal permanent magnet.
5. The probe cooling and heating table of claim 4, wherein the external electromagnetic controller comprises a left electromagnet and a left rocker arm motor which are positioned at the left side of the base, wherein the magnetic pole of the left electromagnet is opposite to the magnetic pole at the left end of the transverse permanent magnet, the left electromagnet is fixedly connected with a rocker arm of the left rocker arm motor, and the left electromagnet is driven by the left rocker arm motor to synchronously swing along with the probe in a horizontal plane, so that the magnetic pole of the left electromagnet is always opposite to the magnetic pole at the left end of the transverse permanent magnet;
The device comprises a right electromagnet and a right rocker arm motor, wherein the right electromagnet and the right rocker arm motor are positioned on the right side of a base, the magnetic pole of the right electromagnet is opposite to the magnetic pole at the right end of a transverse permanent magnet, the right electromagnet is fixedly connected with a rocker arm of the right rocker arm motor, and the right electromagnet is driven to synchronously swing along with a probe in a horizontal plane through the right rocker arm motor, so that the magnetic pole of the right electromagnet is kept opposite to the magnetic pole at the right end of the transverse permanent magnet all the time.
6. The probe cooling and heating table according to claim 1, wherein the outer surface of the counterweight ball and the inner surface of the inner positioning ball shell are respectively provided with a notch for swinging of the first damping needle, and the outer surface of the inner positioning ball shell and the inner surface of the outer positioning ball shell are respectively provided with a notch for swinging of the second damping needle.
7. The cold and hot stage of claim 5, wherein any one of the first pins is longer or shorter than the adjacent other one of the first pins by L, and any one of the second pins is longer or shorter than the adjacent other one of the second pins by L.
8. The probe adjusting method for the probe cold and hot stage is characterized in that based on the probe cold and hot stage disclosed in claim 7, the external electromagnetic controller comprises a controller body, wherein the controller body is connected with two longitudinal rocker arm motors, a left rocker arm motor, a right rocker arm motor, a longitudinal upper electromagnet, a longitudinal lower electromagnet, a left electromagnet and a right electromagnet in a ferroelectric manner respectively;
the method comprises the following steps:
s1, placing a sample on a sample table, and pressing an end cover on a base through a bolt so as to seal a test cavity;
s2, adjusting the probe to the leftmost end and the highest point, wherein the leftmost end corresponds to the shortest first damping needle, the highest point corresponds to the shortest second damping needle, the controller body drives the two longitudinal rocker arm motors to enable the upper electromagnet and the lower electromagnet to be opposite to the upper end and the lower end of the longitudinal permanent magnet respectively, and drives the left rocker arm motor and the right rocker arm motor to enable the left electromagnet and the right electromagnet to be opposite to the left end and the right end of the transverse permanent magnet respectively;
S3, swinging the front end of the probe to an A position according to the test requirement, wherein the A position corresponds to the A first damping needle and the A second damping needle;
s301, enabling a controller body to enable a left electromagnet to be electrified, wherein magnetic force generated by the left electromagnet is smaller than friction force between an A first damping needle and a first resistance column and larger than friction force between an A-1 first damping needle and the first resistance column;
S302, the controller body enables the upper electromagnet to be electrified, the magnetic force of the upper electromagnet is smaller than the friction force between the A second damping needle and the second resistance column and is larger than the friction force between the A-1 second damping needle and the second resistance column, the upper electromagnet attracts the upper end of the longitudinal permanent magnet through magnetic force, the probe swings towards the lower end until the A second damping needle is clamped at the second resistance column due to the fact that the friction resistance is larger than the magnetic force, and the upper electromagnet is powered off, so that the front end of the probe swings to the A position.
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| US5062310A (en) * | 1990-03-01 | 1991-11-05 | Jade Systems, Inc. | Probe inlet apparatus and method |
| US5345170A (en) * | 1992-06-11 | 1994-09-06 | Cascade Microtech, Inc. | Wafer probe station having integrated guarding, Kelvin connection and shielding systems |
| TW201003077A (en) * | 2008-07-04 | 2010-01-16 | Microelectonics Technology Inc | Pinpoint testing device |
| TW201135239A (en) * | 2010-04-02 | 2011-10-16 | Pleader Yamaichi Co Ltd | High-frequency vertical elastic probe structure |
| GB201222927D0 (en) * | 2012-12-19 | 2013-01-30 | Maps Technology Ltd | Detecting failures in flexible multistrand steel structures |
| EP3382370A1 (en) * | 2017-03-30 | 2018-10-03 | University Of Oulu | Probe arrangement and method for rheometric measurements with a disposable probe and remote readability |
| CN116482421A (en) * | 2023-05-05 | 2023-07-25 | 深圳市森东宝科技有限公司 | Radial arm type anti-collision probe station and use detection method thereof |
| CN219870055U (en) * | 2023-05-09 | 2023-10-20 | 河南省计量测试科学研究院 | Calibration device for temperature module of oil quality analyzer and its device positioning bracket |
| CN220071704U (en) * | 2023-06-20 | 2023-11-24 | 武汉重光科技有限公司 | Vacuum cooling and heating table for material variable temperature resistivity experiment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN207423999U (en) * | 2017-11-16 | 2018-05-29 | 北京东方晨景科技有限公司 | A kind of three-dimensional magnetic field probe station |
| CN115684334A (en) * | 2022-09-14 | 2023-02-03 | 北京航空航天大学杭州创新研究院 | Cold conducting structure of low-temperature magnetic field probe station, probe station and temperature control method |
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