CN119918349B - MEMS inertial unit vibration reduction decoupling design method based on space four-point vibration reduction - Google Patents
MEMS inertial unit vibration reduction decoupling design method based on space four-point vibration reductionInfo
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Abstract
The invention relates to the technical field of vibration reduction design, and discloses a method for designing vibration reduction decoupling of an MEMS inertial unit based on space four-point vibration reduction, which comprises the steps of selecting a space diagonal four-point vibration reduction scheme for MEMS inertial unit design; the method comprises the steps of carrying out fine modeling on the MEMS inertial measurement unit by utilizing three-dimensional modeling software, carrying out eccentricity analysis, designing first-order frequency of the vibration reduction system according to the design requirement of the vibration reduction system of the MEMS inertial measurement unit, determining amplification factor of vibration reduction system amplitude according to the damping characteristic of the vibration reduction system, adjusting a vibration reduction gasket according to the result of the eccentricity analysis, determining compression quantity of a vibration reduction pad, and designing a vibration absorber according to the first-order frequency of the vibration reduction system, the amplification factor of vibration reduction system amplitude and the compression quantity of the vibration reduction pad.
Description
Technical Field
The invention relates to the technical field of vibration reduction design, in particular to a vibration reduction decoupling design method of an MEMS inertial unit based on space four-point vibration reduction.
Background
The improvement of the hit precision of the missile is always a target for continuously pursuing and exploring weapon research and development, and the inertial device is a heart for controlling and guiding, and is directly related to the control and navigation precision of a weapon system, so that the precision of the inertial device is required to be higher and higher, and the precision under dynamic environments such as overload, vibration, impact and the like is required to be higher and higher.
At present, great progress is made in the aspects of MEMS design technology, processing technology and basic raw materials, and the performance index of the silicon micro-MEMS gyroscope in a static environment can reach the level of a low-precision optical fiber gyroscope. MEMS inertial measurement units are increasingly being used in a variety of weapon models with the advantages of small size, low cost, and the like. Compared with the fiber optic gyroscope, the silicon micro-MEMS gyroscope has the advantages that the accuracy is extremely easy to be influenced by dynamic environments such as overload, vibration, impact and the like due to the natural disadvantages of the working principle of the fiber optic gyroscope. Therefore, improving the dynamic environmental adaptability and reliability of MEMS inertial measurement units based on silicon micro-MEMS gyroscopes and watchmaking is a major issue in MEMS inertial measurement unit design work.
Aiming at the problems of insufficient environment adaptability on the bomb of the MEMS inertial measurement unit for guided bomb, abnormal large number and large response of the gyroscope under the vibration condition, out-of-tolerance zero offset in the meter vibration and the like, vibration reduction design measures are adopted for the MEMS inertial measurement unit. Under the condition that the vibration bearing capacity of the gyroscope and the accelerometer is limited, the vibration resisting capacity of the MEMS inertial measurement unit is improved, and the difficulty of limiting the MEMS inertial measurement unit to be applied in a severe environment is solved.
Disclosure of Invention
In view of the above, the invention provides a method for designing vibration reduction and decoupling of an MEMS inertial measurement unit based on spatial four-point vibration reduction, so as to solve the problem of how to perform vibration reduction design.
In a first aspect, the invention provides a method for designing vibration reduction and decoupling of an MEMS inertial measurement unit based on spatial four-point vibration reduction, which comprises the following steps:
a space diagonal four-point vibration reduction scheme is selected for MEMS inertial mass design;
carrying out fine modeling on the MEMS inertial measurement unit by utilizing three-dimensional modeling software, and carrying out eccentricity analysis;
according to the design requirement of the MEMS inertial mass damping system, designing the first-order frequency of the damping system;
determining the amplification factor of the amplitude of the vibration reduction system according to the damping characteristic of the vibration reduction system;
Adjusting the vibration damping gasket according to the analysis result of the eccentric amount to determine the compression amount of the vibration damping gasket;
the vibration damper is designed according to the first-order frequency of the vibration damping system, the amplification factor of the vibration damping system amplitude and the compression amount of the vibration damping pad.
According to the invention, the MEMS inertial unit design is performed by selecting a space diagonal four-point vibration reduction scheme capable of realizing decoupling, and further design analysis is performed on the eccentric quantity, the first-order frequency, the amplitude amplification factor and the compression quantity of the vibration reduction pad which affect decoupling, so that the main design parameters of the vibration reduction device are determined, and the environmental adaptability and reliability of vibration, impact and the like based on the MEMS inertial unit are improved.
In an alternative embodiment, the MEMS inertial measurement unit is modeled in a refinement manner by using three-dimensional modeling software, and the eccentric amount analysis is performed, including:
And carrying out fine modeling on the MEMS inertial measurement unit by utilizing three-dimensional modeling software, repeatedly adjusting the structure by taking the elastic center coordinate as a reference, calculating to obtain the eccentric quantity of the vibration reduction part of the MEMS inertial measurement unit, and controlling the eccentric quantity within a preset range.
According to the invention, the MEMS inertial measurement unit is subjected to fine modeling through three-dimensional modeling software, and the structure is repeatedly adjusted so as to control the eccentric amount, so that the design analysis on the eccentric amount affecting decoupling is realized.
In an alternative embodiment, the MEMS inertial mass damping system design requirements include that the angular vibration frequency of the damper be high and far from the measurement bandwidth of the inertial mass, and that the damper frequency should avoid the gyro drive frequency, the gyro pick-up frequency, and the frequency difference between the gyro drive frequency and the gyro pick-up frequency.
According to the invention, the angular vibration frequency of the damper is designed according to the design requirement of the MEMS inertial measurement unit vibration damping system, so that the amplification within the bandwidth is avoided, the measurement of real signals is prevented from being influenced, and the frequency of the damper is designed according to the relation between the frequency of the damper and the frequency of the gyroscope, so that the in-band signals are prevented from being amplified or attenuated.
In an alternative embodiment, determining the amplification of the vibration damping system amplitude based on the damping characteristics of the vibration damping system includes:
calculating the damping coefficient of the damping material according to the damping of the shock absorber, the mass of the damping system and the rigidity of the shock absorber;
And calculating the amplification factor of the vibration reduction system amplitude according to the damping coefficient of the vibration reduction material.
According to the invention, the dynamic response characteristics of the vibration reduction system under different frequencies are evaluated by calculating the damping coefficient and the amplification factor according to the damping parameters of the vibration absorber.
In an alternative embodiment, adjusting the vibration damping shim according to the result of the eccentricity analysis to determine the amount of compression of the vibration damping shim includes:
Determining the deviation direction of the mass center according to the analysis result of the eccentric quantity;
The vibration damping pad is adjusted by adjusting the compression amount of the mass center in the deflection direction, so that the rigidity of the vibration damper in the deflection direction of the mass center is improved, and the linear angle coupling caused by the eccentric amount is counteracted.
According to the invention, the compression amount of the vibration reduction pad is adjusted according to the analysis result of the eccentric amount so as to offset the line angle coupling caused by the eccentric amount, thereby avoiding unnecessary vibration.
In an alternative embodiment, the method further comprises:
and performing simulation analysis on the vibration reduction system by using finite element analysis software, wherein the simulation analysis comprises modal analysis and random vibration simulation analysis.
According to the invention, by performing simulation analysis on the vibration reduction system, modal analysis and random vibration simulation analysis are performed on the vibration reduction system, so as to evaluate whether 6 degrees of freedom of the vibration reduction system are independent, whether first-order natural frequency meets design requirements, whether the strength of the material meets requirements and the analysis frequency response characteristics.
In a second aspect, the present invention provides a MEMS inertial mass damping decoupling design system based on spatial four-point damping, the system comprising:
the first design module is used for selecting a space diagonal four-point vibration reduction scheme to carry out MEMS inertial mass design;
the analysis module is used for carrying out fine modeling on the MEMS inertial measurement unit by utilizing three-dimensional modeling software and carrying out eccentric quantity analysis;
The second design module is used for designing the first-order frequency of the vibration reduction system according to the design requirement of the MEMS inertial measurement unit vibration reduction system;
the first determining module is used for determining the amplification factor of the vibration reduction system amplitude according to the damping characteristic of the vibration reduction system;
the second determining module is used for adjusting the vibration damping gasket according to the analysis result of the eccentric quantity and determining the compression quantity of the vibration damping gasket;
And the third design module is used for designing the vibration damper according to the first-order frequency of the vibration damping system, the amplification factor of the vibration damping system amplitude and the compression amount of the vibration damping pad.
In a third aspect, the invention provides a computer device, which comprises a memory and a processor, wherein the memory and the processor are in communication connection, the memory stores computer instructions, and the processor executes the computer instructions so as to execute the MEMS inertial measurement unit vibration reduction decoupling design method based on the spatial four-point vibration reduction in the first aspect or any corresponding embodiment.
In a fourth aspect, the present invention provides a computer readable storage medium, on which computer instructions are stored, where the computer instructions are configured to cause a computer to execute the MEMS inertial measurement unit vibration damping decoupling design method based on spatial four-point vibration damping according to the first aspect or any one of the embodiments corresponding to the first aspect.
In a fifth aspect, the present invention provides a computer program product, comprising computer instructions for causing a computer to perform the MEMS inertial mass damping decoupling design method based on spatial four-point damping according to the first aspect or any of its corresponding embodiments.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic illustration of different vibration damping modes according to an embodiment of the present invention;
FIG. 2 is a flow diagram of a method for designing MEMS inertial mass damping decoupling based on spatial four-point damping according to an embodiment of the present invention;
FIG. 3 is a schematic structural view of a MEMS inertial frame according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a six degree of freedom equivalent model according to an embodiment of the invention;
FIG. 5 is an amplitude and phase frequency characteristic at a low pass cutoff frequency of 120hz in accordance with an embodiment of the present invention;
FIG. 6 is a schematic illustration of the amount of eccentricity relative to the elastic center, according to an embodiment of the present invention;
FIG. 7 is a graph of amplitude magnification versus damping ratio for a second order damping system according to an embodiment of the present invention;
FIG. 8 is a schematic view of a structure of a shock absorber with an adjustable compression amount according to an embodiment of the present invention;
FIG. 9 is a schematic diagram of a modal simulation result in accordance with an embodiment of the invention;
FIG. 10 is a schematic illustration of the mode shapes of the first sixth order modes according to an embodiment of the invention;
FIG. 11 is a stochastic vibration simulation analysis stress cloud graph according to an embodiment of the invention;
FIG. 12 is a graph of random vibration simulation analysis deformation according to an embodiment of the present invention;
FIG. 13 is a schematic diagram of a gyro mount position X-axis translational PSD response in accordance with an embodiment of the present invention;
FIG. 14 is a schematic representation of a gyro mount position Y-axis translational PSD response in accordance with an embodiment of the present invention;
FIG. 15 is a schematic representation of a gyro mount position Z-axis translational PSD response in accordance with an embodiment of the present invention;
FIG. 16 is a plot of a random vibration PSD according to an embodiment of the present invention;
FIG. 17 is a graphical representation of changes in tri-axis gyro vibration data and tri-axis plus table vibration data without vibration damping in accordance with an embodiment of the present invention;
FIG. 18 is a graph showing the variation of the three-axis gyro 1s smooth vibration data and the three-axis plus Table 1s smooth vibration data without vibration damping according to an embodiment of the present invention;
FIG. 19 is a schematic representation of the variation of vibration data of a post-vibration-damping tri-axis gyroscope and tri-axis plus table vibration data in accordance with an embodiment of the present invention;
FIG. 20 is a graph showing the variation of the vibration data of the post-vibration-damping tri-axis gyroscope 1s and the vibration data of tri-axis plus table 1s according to an embodiment of the present invention;
FIG. 21 is a block diagram of a MEMS inertial mass damping decoupling design system based on spatial four-point damping in accordance with an embodiment of the present invention;
fig. 22 is a schematic diagram of a hardware structure of a computer device according to an embodiment of the present invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Aiming at the problem that the silicon micro-MEMS gyroscope and the accelerometer are extremely easy to be influenced by external environment, vibration reduction design measures are adopted to reduce the influence of stress such as vibration, impact, temperature change and the like on the performance of the sensitive element, and effectively improve the environment adaptability and long-term reliability of the sensitive element.
In engineering, due to the fact that the MEMS inertial mass is small in volume and light in weight, deviation is prone to exist between the mass center and the vibration damping elastic center, hardness and damping parameters of the vibration damper are difficult to match and design, difficulty exists in selecting a vibration damping scheme of the MEMS inertial mass and designing and analyzing the vibration damping scheme, and the difficulty needs to be solved in theoretical analysis, simulation analysis, experimental verification and the like, so that environmental adaptability and stability of the MEMS inertial mass and index accuracy under a dynamic environment are improved.
The existing MEMS inertial measurement unit vibration reduction technology mostly adopts eight-point vibration reduction, waist four-point vibration reduction and space four-point vibration reduction modes, and the eight-point vibration reduction method occupies a larger volume for the MEMS inertial measurement unit with a tiny volume, so that the MEMS inertial measurement unit loses the advantage of small volume. The four-point vibration reduction mode of the waist and the four-point vibration reduction mode of the space are easy to cause the coupling problem of linear motion and angular motion, and no substantial solution exists.
The MEMS inertial measurement unit is used as an inertial coordinate reference and an inertial measurement unit, and the working precision and reliability of the MEMS inertial measurement unit in a dynamic environment directly influence the flight precision of the aircraft. In general, the MEMS inertial damping system can translate along 3 coordinate axes, or rotate around 3 coordinate axes, and each translation or rotation of the system has its natural frequency, so there are 6 degrees of freedom.
In order to reduce the adverse effect caused by vibration, the MEMS inertial unit is often elastically connected to the elastomer through a rubber damper, i.e. an integral damping measure is adopted. The vibration damping mode is selected to influence the vibration damping performance of the MEMS inertial measurement unit and the measurement accuracy of the system, and the actually available vibration damping mode is very limited. At present, three damping modes which can be theoretically decoupled through theoretical analysis are mainly shown as a-c in fig. 1. The angular vibration of eight-point vibration damping and space diagonal four-point vibration damping modes in the three vibration damping modes can be completely higher than linear vibration, and the angular vibration frequency of the waist four-point vibration damping mode is reduced compared with that of other two vibration damping modes.
The MEMS inertial measurement unit is used as an inertial coordinate reference and an inertial measurement unit, and the working precision and reliability of the MEMS inertial measurement unit in a dynamic environment directly influence the flight precision of the aircraft. In general, the MEMS inertial damping system can translate along 3 coordinate axes, or rotate around 3 coordinate axes, and each translation or rotation of the system has its natural frequency, so there are 6 degrees of freedom.
Compared with vibration damping of other electronic instruments, the vibration damping requirement of the inertial product is more severe. Not only is the requirement on resonance frequency, amplification factor, vibration reduction efficiency and the like met, but also the special requirements on the design of the vibration damper are as follows:
(1) The vibration reduction mode is selected to vibrate in 6 degrees of freedom and is independent of each other, no coupling exists, unreal signals are prevented from being introduced to other degrees of freedom through vibration coupling, and error accumulation is generated in the control of an inertial navigation system;
(2) The angular vibration frequency of the shock absorber is high and is far away from the measurement bandwidth of the inertial measurement unit, so that amplification in a band is avoided, and the measurement of a real signal is influenced;
(3) The linear vibration frequency is lower than the angular vibration frequency as far as possible, and the lower the linear vibration frequency is, the better the vibration reduction effect on the high-frequency signal is;
(4) The designed vibration damper frequency should avoid the driving frequency, the picking frequency and the frequency difference of the gyro;
(5) The line vibration frequencies in the three directions should be as identical and concentrated as possible.
For MEMS inertial measurement units based on silicon microsensitive elements, the MEMS inertial measurement unit has the advantages of small volume and light weight, but has great difficulty in engineering on vibration decoupling, and particularly has the advantage of space diagonal four-point vibration damping. Compared with the same elastic center and the eccentric mass of the mass center of the fiber optic gyro inertial unit, the laser gyro inertial unit and the like, the MEMS inertial unit has small volume, the relative duty ratio of the eccentric mass is much larger, and the influence on vibration coupling is much larger. Therefore, for MEMS inertial measurement units, a reasonable design of the eccentricity is necessary. In addition, the design of main parameters such as the first-order natural frequency, the amplification factor and the like of the shock absorber is also of great importance.
In accordance with an embodiment of the present invention, there is provided an embodiment of a method of designing MEMS inertial mass damping decoupling based on spatial four-point damping, it being noted that the steps illustrated in the flow chart of the drawings may be performed in a computer system such as a set of computer executable instructions, and that although a logical sequence is illustrated in the flow chart, in some cases the steps illustrated or described may be performed in a different order than that illustrated herein.
In this embodiment, a method for designing vibration damping and decoupling of a MEMS inertial measurement unit based on spatial four-point vibration damping is provided, and fig. 2 is a flowchart of the method for designing vibration damping and decoupling of a MEMS inertial measurement unit based on spatial four-point vibration damping according to an embodiment of the present invention, as shown in fig. 2, where the flowchart includes the following steps:
Step S201, a space diagonal four-point vibration reduction scheme is selected for MEMS inertial mass design.
In the embodiment of the invention, based on the vibration reduction design requirement of the MEMS inertial unit, the vibration reduction space is increased as little as possible, and the MEMS inertial unit does not lose the advantage of small volume due to the addition of a vibration reduction system, so that a space diagonal four-point vibration reduction scheme is selected.
As shown in FIG. 3, the MEMS inertial unit comprises three silicon micro-MEMS gyroscopes, three MEMS accelerometers, a power circuit, a data processing circuit, a shock absorber, a mounting structure and a base structure. The weight of the whole machine is 89g, wherein the vibration reduction effective mass is 55g, and the overall dimension of the whole machine is 43-35 (unit mm).
When mechanical analysis is performed, the vibration damper is generally regarded as an elastomer, and the IMU part supported by the vibration damping system is regarded as a rigid body, so that a dynamics model of the strapdown inertial measurement unit adopting the space diagonal four-point vibration damping scheme can be approximately simulated by using the six-degree-of-freedom equivalent model shown in fig. 4. And establishing a rectangular coordinate system oxyz at the centroid position of the equivalent model, wherein the directions of coordinate axes are shown in figure 4. When neglecting the damping effect, the kinetic differential equation of the system as free-vibrating in space can be written as follows.
Wherein M is the total mass of the vibration reduction system, K is the total rigidity of the vibration reduction system, and x is the displacement of the vibration reduction system.
The kinetic differential equation decomposed into a coordinate system can be written as follows:
Ixx＝∫(y2+z2)dm,Iyy＝∫(x2+z2)dm,Izz＝∫(x2+y2)dm;
Ixy＝Iyx＝∫yzdm,Iyz＝Izy＝∫xzdm,Ixz＝Izx=∫xydm;
Wherein m is the mass of the vibration reduction system, I x、Iy、Iz is the rotational inertia of the inertial group around the x, y and z axes respectively, I xy、Iyz、Izx is the product of the inertia of the inertial group relative to the x, y and z axes respectively, K x、Ky、Kz is the total rigidity of the vibration reduction device along the x, y and z axes respectively, K xx、Kyy、Kzz is the torsional rigidity of the system when rotating around the coordinate axes, For the angular displacement amounts of rotation about three axes, R xy、Ryx、Rzx、Rxz、Ryz、Rzy is the linear revolution stiffness about each of the three coordinate planes of the system, k xi、kyi、kzi is the stiffness in the x, y and z axis directions of the i-th damper, n is the number of dampers, n=4, and l xi、lyi、lzi is the coordinate value of the i-th damper mounting, respectively.
Assuming that the centroid coincides with the elastic center, then in the model
Ixy＝Iyx＝Iyz＝Izy＝Izx＝Ixz=0
Kxy＝Kyx＝Kyz＝Kzy＝Kzx＝Kxz=0
Rxy＝Ryx＝Ryz＝Rzy＝Rzx＝Rxz=0
Carried into (1-2) to obtain
From the above equations (1-3), it can be seen that when the centroid coincides with the elastic center, the 6 degrees of freedom are theoretically independent of each other and no coupling occurs.
And S102, carrying out fine modeling on the MEMS inertial measurement unit by utilizing three-dimensional modeling software, and carrying out eccentricity analysis.
In the embodiment of the invention, through theoretical analysis, only when the mass center coincides with the elastic center (namely, the eccentric amount is zero), 6 degrees of freedom can be mutually independent, and no coupling is generated. However, in practical engineering application, the eccentric amount can only be as small as possible, but cannot be completely eliminated, if the eccentric amount is not zero, linear vibration in one direction can be coupled into angular motion in other directions, so that the inertial measurement unit gyroscope generates unrealistic output, and the control of the eccentric amount is extremely important for avoiding linear and angular coupling. Therefore, the MEMS inertial measurement unit is subjected to fine modeling by utilizing three-dimensional modeling software, and the eccentricity analysis is performed.
Step S103, designing first-order frequency of the vibration reduction system according to the design requirement of the MEMS inertial measurement unit vibration reduction system.
According to the 2 nd special requirements of the MEMS inertial measurement unit vibration reduction system design, the angular vibration frequency of the vibration absorber is high and is far away from the measurement bandwidth of the inertial measurement unit, so that amplification in a band is avoided, and the measurement of a real signal is prevented from being influenced.
The MEMS inertial measurement unit is used for a guided bomb system of a certain model, the measurement bandwidth required by the system is 100Hz, the phase delay is smaller than 90 DEG in order to ensure that the angular velocity and the linear acceleration measured by the MEMS inertial measurement unit are truly effective in a band, a 2-order IIR low-pass filter is generally required to be added in the MEMS inertial measurement unit according to the measurement bandwidth required by the system, the bandwidth is generally set to be 1.2-1.5 times of the bandwidth requirement for ensuring the bandwidth and the delay requirement, and as shown in fig. 5, the bandwidth is a amplitude frequency and phase frequency characteristic curve when the sampling frequency is 1k and the low-pass cutoff frequency is 120Hz, wherein a blue curve in fig. 5 is an amplitude frequency characteristic curve, and a green curve is a phase frequency characteristic curve.
For the inertial mass damping system, in order to ensure that the in-band signal is not amplified or attenuated, the first-order natural frequency engineering design of the damping system generally needs more than 2 times of measurement bandwidth, namely more than 240hz.
According to the special requirement of the inertial measurement unit vibration reduction system design, the designed vibration absorber frequency should avoid the driving frequency, the picking frequency and the frequency difference of the gyro.
The gyroscopes used in the embodiment of the invention are domestic silicon micro-MEMS gyroscopes, and the driving frequencies and frequency differences of the three gyroscopes are shown in the following table 1. The first third order frequencies of the designed damping system need to avoid the frequencies listed in the table. For convenience of design, the first-order natural frequency is generally greater than 80hz of the maximum frequency difference, i.e. the first-order natural frequency needs to be greater than 388hz.
TABLE 1 Gyroscope drive frequency and frequency offset
In summary, the first order natural frequency of the vibration damping system in the embodiment of the present invention needs to be greater than 400Hz.
Step S104, the amplification factor of the vibration reduction system amplitude is determined according to the damping characteristic of the vibration reduction system.
In the embodiment of the invention, the damping characteristic of the vibration reduction system determines the amplification factor of the vibration reduction system amplitude, and the damping characteristic of the vibration reduction system is determined by the vibration reduction device damping, the vibration reduction system mass and the vibration reduction device rigidity.
Step S105, adjusting the vibration damping pad according to the analysis result of the eccentric amount to determine the compression amount of the vibration damping pad.
In the embodiment of the invention, because the MEMS inertial measurement unit needs to ensure that zero position changes of the gyroscope and the meter are as small as possible in overload environments such as vibration, impact and the like, the vibration damping pad cannot be in a free state, and the compression quantity is needed. And adjusting the vibration damping gasket according to the analysis result of the eccentric quantity, and determining the compression quantity of the vibration damping gasket so as to compensate the eccentric problem.
And S106, designing the vibration damper according to the first-order frequency of the vibration damper system, the amplification factor of the vibration damper system amplitude and the compression amount of the vibration damper pad.
In the embodiment of the invention, the first-order frequency of the vibration reduction system, the amplification factor of the vibration reduction system amplitude and the compression amount of the vibration reduction pad are determined, namely, after the main design parameters of the vibration reduction device are determined, the vibration reduction device is designed.
According to the MEMS inertial unit vibration reduction decoupling design method based on the space four-point vibration reduction, the space diagonal four-point vibration reduction scheme capable of realizing decoupling is selected for MEMS inertial unit design, design analysis is further carried out on the eccentric quantity affecting decoupling, the first-order frequency, the amplitude amplification factor and the vibration reduction pad compression quantity of the vibration reduction device, main design parameters of the vibration reduction device are determined, and environmental adaptability and reliability of vibration, impact and the like based on the MEMS inertial unit are improved.
In this embodiment, a method for designing vibration damping and decoupling of an MEMS inertial measurement unit based on spatial four-point vibration damping is provided, and the process includes the following steps:
Step S201, a space diagonal four-point vibration reduction scheme is selected for MEMS inertial mass design, and the MEMS inertial mass comprises a vibration absorber.
Please refer to step S101 in the embodiment shown in fig. 1 in detail, which is not described herein.
And S202, carrying out fine modeling on the MEMS inertial measurement unit by utilizing three-dimensional modeling software, and carrying out eccentricity analysis.
Specifically, the step S202 includes:
And step S2021, carrying out fine modeling on the MEMS inertial measurement unit by utilizing three-dimensional modeling software, repeatedly adjusting the structure by taking the elastic center coordinate as a reference, calculating to obtain the eccentric quantity of the vibration reduction part of the MEMS inertial measurement unit, and controlling the eccentric quantity within a preset range.
In the embodiment of the invention, the inertia group is subjected to refined modeling by utilizing CREO three-dimensional modeling software, the eccentric amount of the vibration reduction part of the inertia group is calculated by taking the elastic center coordinate as a reference and through repeated adjustment of the structure, as shown in fig. 6, the eccentric amount of the system is extremely small and the error is controlled within 5 per mill through refined modeling adjustment.
And carrying out fine modeling on the MEMS inertial measurement unit through three-dimensional modeling software, and repeatedly adjusting the structure to control the eccentric amount, thereby realizing design analysis on the eccentric amount affecting decoupling.
Step S203, designing first-order frequency of the vibration damping system according to the design requirement of the MEMS inertial measurement unit vibration damping system.
Please refer to step S103 in the embodiment shown in fig. 1 in detail, which is not described herein.
Step S204, the amplification factor of the vibration reduction system amplitude is determined according to the damping characteristic of the vibration reduction system.
Specifically, the step S204 includes:
Step S2041, calculating damping coefficient of the damping material according to the damper damping, the mass of the damping system and the rigidity of the damper.
Step S2042, the amplification factor of the vibration damping system amplitude is calculated according to the damping coefficient of the vibration damping material.
In the embodiment of the invention, the damping characteristic of the vibration reduction system determines the amplification factor of the vibration reduction system, and the calculation formula is as follows:
Q≈1/2(1-4)
Wherein Q is the system amplitude magnification, ζ is the damping coefficient of the vibration absorbing material, Wherein c is the damper damping, m is the damper system mass, and k is the damper stiffness.
As shown in fig. 7, fig. 7 shows the system amplitude amplification curves under different damping coefficients, and as can be seen from fig. 7, the larger the damping, the smaller the system amplitude amplification. However, in practical applications, the damping coefficient is material dependent, cannot be uniformly small, and an acceptable size needs to be selected.
The magnitude of the magnification depends on the vibration resistance of the sensing element itself at the lower natural frequency (typically the first third order is considered) of the vibration reduction system. For example, the vibration resistance of the gyro sensitive element in the low-order natural frequency range is 1000g, and when the system needs to bear 500g of impact, the amplification factor of the vibration reduction system is required to be less than 2.
In general engineering, when the system needs to bear vibration and impact magnitude is smaller, the amplification factor is 3-5, and when the vibration and impact magnitude is larger, the amplification factor is 2-3.
After the amplification factor is determined, the damping coefficient of the selected material can be determined, and the maximum amplification factor is 2.5 according to the vibration resistance of the selected gyroscope and the additional table and the overload environment conditions such as vibration, impact and the like required to be born by the system in the project, so that the damping coefficient zeta of the rubber material of the shock absorber is more than or equal to 0.2.
And calculating the amplification factor by calculating the damping coefficient according to the damping parameter of the shock absorber so as to evaluate the dynamic response characteristics of the shock absorption system at different frequencies.
Step S205, adjusting the vibration damping pad according to the analysis result of the eccentric amount to determine the compression amount of the vibration damping pad.
Specifically, the step S205 includes:
step S2051, determining the mass center deflection direction according to the analysis result of the eccentric amount.
Step S2052, adjusting the vibration damping pad by adjusting the compression amount of the mass center deflection direction so as to improve the rigidity of the vibration damper of the mass center deflection direction and offset the line angle coupling caused by the eccentric amount.
In the embodiment of the invention, because the MEMS inertial measurement unit needs to ensure that zero position changes of the gyroscope and the meter are as small as possible in overload environments such as vibration, impact and the like, the vibration damping pad cannot be in a free state, and the compression quantity is needed. The compression amount of the shock absorber made of the rubber material is controlled to be 10% -20%, so that a good effect can be achieved.
By analyzing the eccentricity obtained in the eccentricity analysis, it is known in which direction the centroid is biased. The presence of the eccentricity causes the coupling of linear and angular movements of the inertial mass, which causes a false output of the inertial mass. In order to solve the problem that the design of the eccentric amount cannot be completely eliminated in the actual engineering, the gasket is adjusted by adjusting the compression amount in the corresponding direction, so that the rigidity of the shock absorber in the direction is slightly improved, and the linear angle coupling caused by the eccentric amount is counteracted. A shock absorber with adjustable compression amount is designed, and as shown in fig. 8, the eccentric problem is solved by adjusting the compression amount of a shock absorbing pad.
By adjusting the compression amount of the vibration reduction pad according to the analysis result of the eccentric amount, the line angle coupling caused by the eccentric amount is counteracted, and unnecessary vibration is avoided.
Step S206, designing the vibration damper according to the first-order frequency of the vibration damper system, the amplification factor of the vibration damper system amplitude and the compression amount of the vibration damper pad.
Please refer to step S106 in the embodiment shown in fig. 1 in detail, which is not described herein.
Step S207, performing simulation analysis on the vibration reduction system by using finite element analysis software, wherein the simulation analysis comprises modal analysis and random vibration simulation analysis.
In the embodiment of the invention, the vibration reduction effect of the vibration reduction system is subjected to simulation analysis by utilizing finite element analysis software ANSYS.
Mainly the following aspects are analyzed.
(1) Through modal analysis, whether 6 degrees of freedom of the vibration reduction system are independent or not is evaluated, and mutual coupling does not occur;
(2) Calculating the first-order natural frequency of the vibration reduction system through modal analysis, and judging whether the first-order natural frequency meets the design requirement;
(3) Analyzing the maximum stress and deformation of the system under the vibration condition through random vibration simulation analysis, and evaluating whether the strength of the material meets the requirement;
(4) And outputting a PSD response curve of the installation position of the sensitive element through random vibration simulation analysis, and analyzing the frequency response characteristic.
A) Modal analysis:
and setting material properties and boundary conditions, and carrying out modal simulation analysis on the inertial measurement unit, wherein the first 15-order modal response result is shown in fig. 9.
As can be seen from FIG. 9, the first-order mode of the inertial damping system is 742hz, which is more than 388hz, and meets the design requirements. The mode shape of the first sixth order mode is shown in fig. 10 below. From the figure it can be seen that the first six modes are motion along the z-axis, motion along the x-axis, motion along the y-axis, angular motion about the x-axis, angular motion about the z-axis, respectively. The modes of each order are independent from each other and are not mutually coupled. The front third-order linear motion mode is concentrated at (740-800) hz, the rear third-order angular motion mode is far away from the linear motion mode and is concentrated at (1100-1200) hz, and the requirements of the inertial unit vibration reduction design are met.
B) Random vibration simulation analysis
Simulation analysis is carried out according to a standard 6.06g random vibration test condition, and an axial direction with the largest stress is taken as an example, a stress cloud chart is shown in fig. 11, and a deformation chart is shown in fig. 12. The maximum stress is 1.69MPa, and the maximum stress is concentrated on the limit screw (made of 304 stainless steel) and is far smaller than the allowable strength of 205MPa of the material. The maximum deformation is 4.04um, and the maximum deformation occurs in the vibration-damping rubber pad and is within the allowable deformation of the rubber.
Taking the X direction as an example, analysis was performed. Random excitation of 1G 2/Hz is applied to the X direction of the system within the (20-2000) Hz range, and PSD response of the gyro installation position in the three directions is shown in figures 13-15. The random vibration PSD plot is shown in FIG. 16. The square of the resonance peak value (i.e. the amplification factor) of the amplitude-frequency characteristic of the system is the ordinate of the PSD response curve, and the resonance response frequency and the amplification factor are obtained after conversion and are shown in Table 2. As can be seen from Table 2, when a translational excitation is applied to the X-axis, the response is mainly in the X-axis, and the other two axes are small, indicating that no coupling is caused. It can be seen from fig. 13 that the system decays very rapidly after the resonance frequency, indicating that the damping system has a pronounced effect on the high frequency damping.
TABLE 2 response frequency and magnification (X-axis excitation)
| X-direction linear excitation | X-axis translation | Y-axis translation | Z-axis translation |
| Response frequency (Hz) | 814.61 | 849.46 | 921.68 |
| Magnification factor | 2.43 | 0.007 | 0.065 |
Simulation analysis shows that the maximum amplification factor of the vibration reduction system at the resonance frequency is 2.43, and the design requirement of the amplification factor is met.
According to the MEMS inertial unit vibration reduction decoupling design method based on the space four-point vibration reduction, the vibration reduction system is subjected to simulation analysis, and modal analysis and random vibration simulation analysis are performed on the vibration reduction system, so that whether 6 degrees of freedom of the vibration reduction system are independent, whether first-order natural frequency meets design requirements, whether the strength of a material meets requirements and the frequency response characteristics are evaluated.
The test verification process is described below:
(1) Test conditions
In order to verify the rationality of the design of the shock absorber and the correctness of the simulation analysis, a random vibration test is performed on the product. The random vibration conditions were as follows:
a) The frequency range is 20 Hz-2000 Hz;
b) The vibration applying direction is X, Y, Z;
c) The vibration time is 5min in each direction;
d) And (5) electrifying the product before and after vibration, and electrifying and monitoring data of the product in the random vibration process.
Fixing the product on a horizontal sliding table, and carrying out random vibration test on the product. The following description will take X-direction random vibration as an example.
1) Analysis of test data
The IMU matrix was secured to the base with a rigid pad and vibration data without damping was shown in fig. 17-18. As can be seen from the graph, the x-axis gyroscope and the z-axis gyroscope have large numbers in the vibration process, the maximum number is 200 degrees/s, and the zero bias in the Y-axis meter vibration is 12mg.
As shown in fig. 19-20, after vibration reduction is added, the gyroscope and meter data are normal, no large response is generated, and angular motion coupling is not caused by linear vibration.
The vibration damping effect of the vibration damping system is analyzed by comparing the maximum peak value in each axial vibration with the zero change condition before vibration and during vibration, and the result is shown in Table 3.
Table 3 comparison of vibration damping effect
As can be seen from Table 3, after the vibration reduction system is added, the peak-to-peak value of the vibration center of the MEMS inertial measurement unit is reduced by more than 55.6%, and the zero change before vibration and in vibration is reduced by more than 46.4%. By combining the two aspects, after the space diagonal four-point vibration reduction is added, the vibration reduction design is effective, the capacity of resisting the vibration environment of the MEMS inertial component product is improved, the performance index of the product in the vibration dynamic environment is greatly improved, and the problem that the MEMS inertial component cannot adapt to the vibration dynamic environment on a certain guided shell is solved.
According to the embodiment of the invention, decoupling can be realized by establishing an equivalent mechanical model and theoretically analyzing a spatial four-point vibration damping mode, and further design analysis is performed on the eccentric quantity and the main parameters of the vibration damper which affect decoupling in engineering, so that the main design parameters of the vibration damper are determined. In order to solve the problem that the design of the eccentric amount cannot be completely eliminated in actual engineering, a vibration damper with adjustable compression amount is designed, the eccentric problem is compensated by adjusting the compression amount of a vibration damper pad, and 6 degrees of freedom complete decoupling in engineering is realized. The 6 degrees of freedom complete decoupling based on the spatial four-point vibration reduction scheme in engineering is realized through finite element simulation analysis and experimental verification. Test data show that after the vibration reduction system is added, the peak value of the vibration middle peak of each axial direction of the MEMS inertial measurement unit is reduced by more than 55.6%, the zero change before vibration and in vibration is reduced by more than 46.4%, and the environmental adaptability and reliability of vibration, impact and the like based on the MEMS inertial measurement unit are improved.
The embodiment also provides a MEMS inertial measurement unit vibration reduction decoupling design system based on spatial four-point vibration reduction, which is used for realizing the embodiment and the preferred implementation mode, and is not described again. As used below, the term "module" may be a combination of software and/or hardware that implements a predetermined function. While the means described in the following embodiments are preferably implemented in software, implementation in hardware, or a combination of software and hardware, is also possible and contemplated.
The embodiment provides a MEMS inertial unit vibration reduction decoupling design system based on spatial four-point vibration reduction, as shown in fig. 21, including:
the first design module 2101 is used for selecting a spatial diagonal four-point vibration damping scheme for MEMS inertial mass design.
And the analysis module 2102 is used for carrying out fine modeling on the MEMS inertial measurement unit by utilizing three-dimensional modeling software and carrying out eccentricity analysis.
The second design module 2103 is used for designing the first-order frequency of the vibration damping system according to the design requirement of the MEMS inertial mass vibration damping system.
A first determining module 2104 for determining a magnification of the vibration damping system amplitude based on a damping characteristic of the vibration damping system.
And a second determining module 2105 for adjusting the damping pad according to the result of the eccentricity analysis to determine the compression amount of the damping pad.
A third design module 2106 for designing the vibration damper according to the first order frequency of the vibration damping system, the amplification factor of the vibration damping system amplitude and the compression amount of the vibration damping pad.
In some alternative embodiments, the first determining module 2104 includes:
And the first calculating unit is used for calculating the damping coefficient of the damping material according to the damping of the shock absorber, the mass of the damping system and the rigidity of the shock absorber.
And the second calculation unit is used for calculating the amplification factor of the vibration reduction system amplitude according to the damping coefficient of the vibration reduction material.
In some alternative embodiments, the second determining module 2105 includes:
and the determining unit is used for determining the centroid deflection direction according to the analysis result of the eccentricity.
And the adjusting unit is used for adjusting the vibration damping pad by adjusting the compression amount of the mass center in the deflection direction so as to improve the rigidity of the vibration damper in the deflection direction of the mass center and counteract the line angle coupling caused by the eccentric amount.
In some alternative embodiments, the apparatus further comprises:
and the simulation module is used for performing simulation analysis on the vibration reduction system by utilizing finite element analysis software, wherein the simulation analysis comprises modal analysis and random vibration simulation analysis.
Further functional descriptions of the above respective modules and units are the same as those of the above corresponding embodiments, and are not repeated here.
The MEMS inertial damping decoupling design system based on spatial four-point damping in this embodiment is presented in the form of functional units, where the units refer to ASIC (Application SPECIFIC INTEGRATED Circuit) circuits, processors and memories that execute one or more software or firmware programs, and/or other devices that can provide the above functions.
The embodiment of the invention also provides computer equipment, which is provided with the MEMS inertial measurement unit vibration reduction decoupling design system based on the spatial four-point vibration reduction shown in the figure 21.
Referring to fig. 22, fig. 22 is a schematic structural diagram of a computer device according to an alternative embodiment of the present invention, and as shown in fig. 22, the computer device includes one or more processors 10, a memory 20, and interfaces for connecting the components, including a high-speed interface and a low-speed interface. The various components are communicatively coupled to each other using different buses and may be mounted on a common motherboard or in other manners as desired. The processor may process instructions executing within the computer device, including instructions stored in or on memory to display graphical information of the GUI on an external input/output device, such as a display device coupled to the interface. In some alternative embodiments, multiple processors and/or multiple buses may be used, if desired, along with multiple memories and multiple memories. Also, multiple computer devices may be connected, each providing a portion of the necessary operations (e.g., as a server array, a set of blade servers, or a multiprocessor system). One processor 10 is illustrated in fig. 22.
The processor 10 may be a central processor, a network processor, or a combination thereof. The processor 10 may further include a hardware chip, among others. The hardware chip may be an application specific integrated circuit, a programmable logic device, or a combination thereof. The programmable logic device may be a complex programmable logic device, a field programmable gate array, a general-purpose array logic, or any combination thereof.
Wherein the memory 20 stores instructions executable by the at least one processor 10 to cause the at least one processor 10 to perform a method for implementing the embodiments described above.
The memory 20 may include a storage program area that may store an operating system, application programs required for at least one function, and a storage data area that may store data created according to the use of the computer device, etc. In addition, the memory 20 may include high-speed random access memory, and may also include non-transitory memory, such as at least one magnetic disk storage device, flash memory device, or other non-transitory solid-state storage device. In some alternative embodiments, memory 20 may optionally include memory located remotely from processor 10, which may be connected to the computer device via a network. Examples of such networks include, but are not limited to, the internet, intranets, local area networks, mobile communication networks, and combinations thereof.
The memory 20 may comprise volatile memory, such as random access memory, or nonvolatile memory, such as flash memory, hard disk or solid state disk, or the memory 20 may comprise a combination of the above types of memory.
The computer device further comprises input means 30 and output means 40. The processor 10, memory 20, input device 30, and output device 40 may be connected by a bus or other means, for example in fig. 22.
The input means 30 may receive input numeric or character information and generate key signal inputs related to user settings and function control of the computer device, such as a touch screen or the like. The output means 40 may comprise a display device or the like.
The embodiments of the present invention also provide a computer readable storage medium, and the method according to the embodiments of the present invention described above may be implemented in hardware, firmware, or as a computer code which may be recorded on a storage medium, or as original stored in a remote storage medium or a non-transitory machine readable storage medium downloaded through a network and to be stored in a local storage medium, so that the method described herein may be stored on such software process on a storage medium using a general purpose computer, a special purpose processor, or programmable or special purpose hardware. The storage medium may be a magnetic disk, an optical disk, a read-only memory, a random-access memory, a flash memory, a hard disk, a solid state disk, or the like, and further, the storage medium may further include a combination of the above types of memories. It will be appreciated that a computer, processor, microprocessor controller or programmable hardware includes a storage element that can store or receive software or computer code that, when accessed and executed by the computer, processor or hardware, implements the methods illustrated by the above embodiments.
Portions of the present invention may be implemented as a computer program product, such as computer program instructions, which when executed by a computer, may invoke or provide methods and/or aspects in accordance with the present invention by way of operation of the computer. Those skilled in the art will appreciate that the existence of computer program instructions in a computer-readable medium includes, but is not limited to, source files, executable files, installation package files, and the like, and accordingly, the manner in which computer program instructions are executed by a computer includes, but is not limited to, the computer directly executing the instructions, or the computer compiling the instructions and then executing the corresponding compiled programs, or the computer reading and executing the instructions, or the computer reading and installing the instructions and then executing the corresponding installed programs. Herein, a computer-readable medium may be any available computer-readable storage medium or communication medium that can be accessed by a computer.
Although embodiments of the present application have been described with reference to the accompanying drawings, various modifications and variations may be made by those skilled in the art without departing from the spirit and scope of the application, and such modifications and variations fall within the scope of the application.
Claims (10)
1. The MEMS inertial unit vibration reduction decoupling design method based on space four-point vibration reduction is characterized by comprising the following steps:
a space diagonal four-point vibration reduction scheme is selected for MEMS inertial mass design;
carrying out fine modeling on the MEMS inertial measurement unit by utilizing three-dimensional modeling software, and carrying out eccentricity analysis;
according to the design requirement of the MEMS inertial mass damping system, designing the first-order frequency of the damping system;
determining the amplification factor of the amplitude of the vibration reduction system according to the damping characteristic of the vibration reduction system;
Adjusting the vibration damping gasket according to the analysis result of the eccentric amount to determine the compression amount of the vibration damping gasket;
And designing the vibration damper according to the first-order frequency of the vibration damper system, the amplification factor of the vibration damper system amplitude and the compression amount of the vibration damper pad.
2. The method of claim 1, wherein the performing the fine modeling of the MEMS inertial measurement unit using three-dimensional modeling software for performing the eccentricity analysis comprises:
And carrying out fine modeling on the MEMS inertial measurement unit by utilizing three-dimensional modeling software, repeatedly adjusting the structure by taking the elastic center coordinate as a reference, calculating to obtain the eccentric quantity of the vibration reduction part of the MEMS inertial measurement unit, and controlling the eccentric quantity within a preset range.
3. The method of claim 1, wherein the MEMS inertial mass damping system design requirements include a high angular vibration frequency of the damper and a measurement bandwidth away from the inertial mass, and the damper frequency should avoid a gyro drive frequency, a gyro pick-up frequency, and a frequency difference between the gyro drive frequency and the gyro pick-up frequency.
4. The method of claim 1, wherein determining the amplification of the vibration damping system amplitude based on the damping characteristics of the vibration damping system comprises:
calculating the damping coefficient of the damping material according to the damping of the shock absorber, the mass of the damping system and the rigidity of the shock absorber;
And calculating the amplification factor of the vibration reduction system amplitude according to the damping coefficient of the vibration reduction material.
5. The method of claim 1, wherein adjusting the damping shim to determine the damping shim compression based on the result of the eccentricity analysis comprises:
Determining the deviation direction of the mass center according to the analysis result of the eccentric quantity;
The vibration damping pad is adjusted by adjusting the compression amount of the mass center in the deflection direction, so that the rigidity of the vibration damper in the deflection direction of the mass center is improved, and the linear angle coupling caused by the eccentric amount is counteracted.
6. The method according to claim 1, wherein the method further comprises:
and performing simulation analysis on the vibration reduction system by using finite element analysis software, wherein the simulation analysis comprises modal analysis and random vibration simulation analysis.
7. A MEMS inertial mass damping decoupling design system based on spatial four-point damping, the system comprising:
the first design module is used for selecting a space diagonal four-point vibration reduction scheme to carry out MEMS inertial mass design;
the analysis module is used for carrying out fine modeling on the MEMS inertial measurement unit by utilizing three-dimensional modeling software and carrying out eccentric quantity analysis;
The second design module is used for designing the first-order frequency of the vibration reduction system according to the design requirement of the MEMS inertial measurement unit vibration reduction system;
the first determining module is used for determining the amplification factor of the vibration reduction system amplitude according to the damping characteristic of the vibration reduction system;
the second determining module is used for adjusting the vibration damping gasket according to the analysis result of the eccentric quantity and determining the compression quantity of the vibration damping gasket;
and the third design module is used for designing the vibration damper according to the first-order frequency of the vibration damping system, the amplification factor of the vibration damping system amplitude and the compression amount of the vibration damping pad.
8. A computer device, comprising:
the system comprises a memory and a processor, wherein the memory and the processor are in communication connection, the memory stores computer instructions, and the processor executes the computer instructions, so that the MEMS inertial mass vibration reduction decoupling design method based on the spatial four-point vibration reduction is executed by the processor.
9. A computer-readable storage medium, wherein computer instructions for causing a computer to execute the MEMS inertial mass damping decoupling design method based on spatial four-point damping according to any one of claims 1 to 6 are stored on the computer-readable storage medium.
10. A computer program product comprising computer instructions for causing a computer to perform the MEMS inertial mass damping decoupling design method based on spatial four-point damping according to any one of claims 1 to 6.
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