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CN119935954A - Gas detection device and method based on V-type wavelength tuning and modulation technology - Google Patents

Gas detection device and method based on V-type wavelength tuning and modulation technology Download PDF

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CN119935954A
CN119935954A CN202510109598.6A CN202510109598A CN119935954A CN 119935954 A CN119935954 A CN 119935954A CN 202510109598 A CN202510109598 A CN 202510109598A CN 119935954 A CN119935954 A CN 119935954A
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CN119935954B (en
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李劲松
杜雨龙
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Anhui University
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Anhui University
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Abstract

The invention discloses a gas detection device based on V-shaped wavelength tuning and modulation technology, which comprises a V-shaped waveform modulator, a tunable laser, a parabolic mirror, a gas sample cell, a half-reflecting half-lens, an etalon, a total reflection mirror, a double-channel photoelectric detector, a signal demodulation and analysis module and a signal display and output module which are sequentially connected in series. The invention also discloses a gas detection method based on the V-shaped wavelength tuning and modulation technology. The invention utilizes the dependence characteristic of the output power and wavelength of the tunable semiconductor laser on the scanning current or voltage, combines the symmetry of the V-shaped waveform, realizes the wavelength scanning and modulation of the laser in an ultra-narrow range, and can effectively reduce the influence of the nonlinear effect of the laser in spectral signal processing and concentration inversion. Compared with the traditional wide-range wavelength scanning and modulation mode, the invention has the advantages of high response speed, high stability and measurement precision, more compact overall structure and higher general practicability in practical application.

Description

Gas detection device and method based on V-shaped wavelength tuning and modulation technology
Technical Field
The invention relates to the technical field of laser spectrum and gas detection, in particular to a gas detection device and method based on V-shaped wavelength tuning and modulation technology.
Background
The direct absorption spectrum technology is a spectrum analysis technology based on Lambert-Beer law, and can directly calculate parameter information such as concentration of gas to be analyzed by measuring light intensity of incident laser before and after passing through a gas absorption medium and combining known molecular spectral line parameters and experimental condition parameters (such as temperature, pressure and optical path) and spectrum linear functions. However, the physical quantity obtained by analyzing the light intensity variation in the direct absorption spectroscopy technique is absorbance representing the intensity of absorption of molecules, and is affected by various noises, and the detection sensitivity thereof is usually on the order of 10 -3. Aiming at the 1/f dependence characteristic of typical noise, the developed wavelength modulation spectrum technology has a good noise suppression effect in combination with a phase-locked demodulation principle, so that higher sensitivity can be realized, and the technology principle is mainly divided into a fixed wavelength modulation spectrum and a scanning wavelength modulation spectrum. The fixed wavelength modulation spectroscopy is characterized in that the output wavelength of a laser is fixed at the absorption spectrum line of a gas molecule to be measured, the gas absorption signal under the specific wavelength is directly measured, the implementation process is relatively simple, but in practical application, although the output wavelength of the laser can be regulated and controlled through feedback, the long-time stability is difficult to ensure, and the accuracy of a measurement result is further influenced. In contrast, the scanning wavelength modulation spectrum obtains full spectrum information of a molecular absorption signal by tuning the output wavelength of the laser, and the center position of the scanning wavelength modulation spectrum can be monitored and corrected in real time in the signal processing process, so that a measurement result has higher accuracy and is widely applied. However, tunable semiconductor lasers commonly used in wavelength modulation spectroscopy have significant dependence of the emission wavelength and output power on their operating current or voltage, and as the tuning current or voltage range increases, nonlinear effects of the emission wavelength and output power become more pronounced, thereby inducing so-called residual amplitude effects. Existing studies have shown that these effects have a non-negligible effect on wavelength modulation spectroscopy to detect trace gas concentrations. In addition, the wavelength modulation spectrum is used as an indirect analysis technology, the concentration inversion can be carried out on the measurement signal after the system is established to establish a correction model, and the reliability of the correction model is easily influenced by the long-term stability of the spectrum system.
Disclosure of Invention
The invention aims to provide a gas detection device and a method based on V-shaped wavelength tuning and modulation technology, so as to solve the defects.
In order to achieve the above object, the present invention provides the following technical solutions:
A gas detection device based on V-shaped wavelength tuning and modulation technology comprises a V-shaped waveform modulator, a tunable laser, a parabolic mirror, a gas sample cell, a half-reflecting half-lens, an etalon, a total-reflecting mirror, a double-channel photoelectric detector, a signal demodulation and analysis module and a signal display and output module which are sequentially connected in series, wherein V-shaped voltage or current waveform signals output by the V-shaped waveform modulator are input to the tunable laser to output laser beams, focused and reflected by the parabolic mirror and then directly coupled into the gas sample cell, reflected beams passing through the half-reflecting half-lens and beams passing through the half-reflecting half-lens, the etalon to be transmitted and the total-reflecting half-reflecting mirror are input to the double-channel photoelectric detector, demodulated and analyzed by the signal demodulation and analysis module, and finally input to the signal display and output module to be displayed and output.
Preferably, the half-reflecting and half-reflecting lens divides the incident light beam into two vertical light beams, namely a reflected light beam and a transmitted light beam, wherein the reflected light beam passing through the half-reflecting mirror is directly reflected to the two-channel photoelectric detector and marked as a first channel signal, and the transmitted light beam passing through the half-reflecting mirror is transmitted through the etalon and is reflected to the two-channel photoelectric detector through the total reflecting mirror and marked as a second channel signal.
Preferably, the signal demodulation and analysis module comprises a signal demodulation module and a signal analysis module, wherein the signal demodulation module demodulates the first channel signal into a second harmonic signal with gas absorption by combining the V-shaped waveform modulation signal output by the V-shaped waveform modulator (1), and then the second harmonic signal and the interference signal of the etalon (6) in the second channel are simultaneously transmitted to the signal analysis module for analysis and treatment.
Preferably, the signal analysis module performs analysis processing by adopting a method comprising a spectrum signal center position correction algorithm, a signal filtering denoising and signal averaging algorithm, a wavelength correction algorithm and a concentration inversion algorithm.
Preferably, the signal display and output module comprises an LCD liquid crystal display unit and a signal output unit, wherein the signal output unit has a Bluetooth wireless communication output function and a wired serial port communication output and network port communication output interface.
Preferably, the spectral signal center position correction algorithm, the signal filtering denoising and the signal averaging algorithm are as follows:
The method comprises the steps of firstly, primarily estimating a minimum value position P of a second harmonic signal acquired by a first channel, secondly, selecting data sets D (P-10, P+10) of about 10 point ranges near the minimum value position P, smoothly filtering the data sets D (P-10, P+10), then, solving the accurate minimum value position P of the filtered data sets, carrying out similar correction and filtering processing on each measuring signal by taking the accurate minimum value position P as the optimal center position, and finally, carrying out average processing on all signals of the first channel according to defined signal average times to acquire an original spectrum signal with higher signal to noise ratio.
Preferably, the wavelength correction algorithm is specifically as follows:
The method is used for the interference signal analysis processing of the etalon (6), the positions corresponding to the peaks in the interference fringe signals are calculated firstly, then the positions of the peaks are used as the abscissa, an integral array [1,2, ], which is established by the total number N of the peaks, is used as the ordinate, a corresponding curve is established, a polynomial fitting formula is obtained by carrying out higher-order polynomial fitting on the corresponding curve, then the integral array [1,2, ], which is corresponding to the total number N of the peaks, is used as the independent variable, the independent variable is substituted into the obtained polynomial fitting formula, and the free spectral region FSR value of the etalon is multiplied, so that the relative wave number range of the laser emission wavelength can be calculated. And finally, calculating the difference between the relative wave number and the absolute wave number by combining the relative central position of the gas molecule absorption spectrum to be analyzed when the relative wave number is the abscissa and the absolute position of the corresponding spectral line in the database, and adding the difference and the relative wave number, thereby realizing wave number correction of the wavelength tuning range of the laser.
Preferably, the concentration inversion algorithm comprises two methods, namely a multidimensional linear regression algorithm and a linear fitting algorithm, and the method comprises the following specific steps:
the multidimensional linear regression algorithm is characterized in that the number of sampling points of a spectrum signal is assumed to be n, n is a natural number, a measuring signal is Amb, a background signal is Bgr, a calibrated signal after background correction is Cal, the concentration of gas to be analyzed is c, a solving function is defined as xi, and a specific expression is shown as follows:
the concentration inversion calculation process combines a multidimensional linear regression algorithm and a least mean square algorithm, the algorithm calculation process obtains an optimal c value by solving the minimum value of a function xi, and the combination differential calculation formula is as follows:
The linear fitting algorithm adopts a hard collision linear type H (x, y) and a soft collision linear type G (x, y, z) aiming at different molecular characteristics, and theoretical expressions of the linear fitting algorithm can be respectively described by the following function models:
Wherein: M is a confluent super-geometric function, D is Dicke narrowing coefficients and eta is an optical diffusion coefficient, pi represents a circumference ratio, S represents spectral line intensity, w (u) represents a complex function related to a variable u, i represents complex imaginary units, and gamma D and gamma L represent Doppler line width and Lorentz line width respectively.
Using the two linear functions above, the calculation was fitted by integrating the area a of the absorption signal in the molecular absorption spectrum:
wherein, alpha (v) represents an absorption coefficient, L represents an absorption optical path, v represents an integral variable wave number, v 0 represents a molecular spectral line center wave number, S (T) represents a spectral line intensity related to temperature T, and N (T, P) represents a molecular number related to temperature T and pressure P.
The combination of the linear function meets the normalization condition, and the method can be simplified as follows:
A=S(T)·N·L,
Wherein S (T) and L are as defined above, and N represents the number of molecules of the absorption medium to be detected.
Finally, under the condition of the related experimental conditions including known temperature T, pressure P, optical path L and molecular spectral line intensity S to be detected, the molecular number or concentration of the absorbed molecules can be inversed by fitting the calculated molecular integral absorption area A, and on the contrary, the spectral line parameters of the molecules can be calculated.
Preferably, a gas detection method based on V-type wavelength tuning and modulation technology comprises the following steps:
S1, adjusting and outputting a V-shaped voltage or current waveform signal according to a load working parameter through a V-shaped waveform modulator 1, inputting the V-shaped voltage or current waveform signal into a tunable laser 2, and driving the tunable laser 2 to output a laser beam in a certain wavelength range;
S2, the output laser beam is focused and reflected by the parabolic mirror 3, the reflected beam is directly coupled into the gas sample cell 4, the mutual absorption process is carried out between the gas sample cell 4 and a gas medium to be detected, and finally the beam is emitted;
S3, the emitted light beam is reflected and transmitted through the half-reflecting and half-reflecting mirror 5, the reflected light beam through the half-reflecting mirror 5 is directly reflected to the double-channel photoelectric detector 8 and marked as a first channel signal, the transmitted light beam through the half-reflecting mirror 5 is transmitted through the etalon 6 to generate an interference signal for laser output wavelength correction, and finally the interference signal is incident into the total reflecting mirror 7 and reflected to the double-channel photoelectric detector 8 and marked as a second channel signal;
S4, the light beam signals marked by the double-channel photoelectric detector 8 are input into the signal demodulation and analysis module 9, the demodulation module is used for demodulating the first channel signals into second harmonic signals with gas absorption by combining the V-shaped waveform modulation signals output by the V-shaped waveform modulator 1, and the second harmonic signals and interference signals of the second channel etalon 6 are simultaneously transmitted to the signal analysis module for analysis;
S5, inputting the analyzed gas concentration signal subjected to the analysis processing into the signal display and output module 10 for display and output, so that gas detection based on the V-shaped wavelength tuning and modulation technology is realized.
The invention has the beneficial effects that:
(1) The gas detection device and the method based on the V-shaped wavelength tuning and modulation technology not only improve the response time of a system and effectively reduce the influence of nonlinear effect of the laser on a spectrum signal by driving the tunable semiconductor laser through the ultra-narrow-range V-shaped wave signal, but also effectively solve the signal distortion phenomenon after spectrum averaging caused by the drift of the center wavelength of the laser by adopting a center position correction algorithm, a signal filtering denoising and a signal averaging algorithm through a signal demodulation and analysis module, and effectively improve the measurement precision and accuracy of a measurement result by adopting a multidimensional linear regression algorithm and a least mean square algorithm to analyze the concentration of the spectrum signal.
(2) The gas detection device and method based on the V-shaped wavelength tuning and modulation technology, disclosed by the invention, utilize the dependence characteristic of the output power and wavelength of the tunable semiconductor laser on the scanning current or voltage, combine the symmetry of the V-shaped waveform, realize the wavelength scanning and modulation of the laser in an ultra-narrow range, and can effectively reduce the influence of the nonlinear effect of the laser in spectral signal processing and concentration inversion. Compared with the traditional wide-range wavelength scanning and modulation mode, the invention has the advantages of high response speed, high stability and measurement precision, more compact overall structure and higher general practicability in practical application.
Drawings
FIG. 1 is a structural frame diagram of a gas detection device based on V-type wavelength tuning and modulation technique of the present invention;
FIG. 2 is a graph of nonlinear effects of typical tunable semiconductor laser emission spectral range and drive voltage;
FIG. 3 is a diagram showing the comparison of a conventional ramp wave with a V-shaped scan modulation signal and its corresponding second harmonic signal;
FIG. 4 is a plot of the etalon interference signal and peak position calibration of the present invention;
FIG. 5 is a schematic diagram of a concentration inversion flow based on a multidimensional linear regression algorithm and a least mean square algorithm of the present invention;
fig. 6 is a schematic diagram of an integral area affit based on a linear fitting algorithm according to the present invention.
Detailed Description
The invention is further described below with reference to examples, which are merely illustrative and explanatory of the principles of the invention, and various modifications and additions may be made to the described embodiments by those skilled in the art, or similar thereto, without departing from the spirit of the invention or beyond the scope of the appended claims.
Example 1:
Fig. 1 is a structural frame diagram of a gas detection device based on V-type wavelength tuning and modulation techniques. As shown in fig. 1, the gas detection device based on the V-shaped wavelength tuning and modulation technology comprises a V-shaped waveform modulator 1, a tunable laser 2, a parabolic mirror 3, a gas sample cell 4, a half-reflecting half-lens 5, an etalon 6, a full-reflecting mirror 7, a double-channel photoelectric detector 8, a signal demodulation and analysis module 9 and a signal display and output module 10 which are sequentially connected in series.
The V-shaped waveform modulator 1 adjusts and outputs a V-shaped voltage or current waveform signal according to the load operation parameters.
And a tunable laser 2, wherein a V-shaped voltage or current waveform signal output by the V-shaped waveform modulator 1 is input into the tunable laser 2, and the tunable laser 2 is driven to output a laser beam within a certain wavelength range.
The parabolic mirror 3 is capable of focusing and reflecting the laser beam output from the tunable laser 2.
The gas sample cell 4 contains a gas medium to be detected. The reflected light beam of the parabolic mirror 3 is directly coupled into the gas sample cell 4, and the mutual absorption process occurs between the gas sample cell 4 and the gas medium to be detected, and finally the light beam is emitted.
The half-reflecting half-lens 5 divides the incident light beam into two perpendicular light beams, a reflected light beam and a transmitted light beam. The reflected light beam passing through the half mirror 5 is directly reflected to the double-channel photodetector 8 and marked as a first channel signal, while the transmitted light beam passing through the half mirror 5 is transmitted through the etalon 6 and reflected by the total reflection mirror 7 and then input to the double-channel photodetector 8 and marked as a second channel signal.
The demodulation and analysis module 9 comprises a signal demodulation module and a signal analysis module, wherein the signal demodulation module demodulates the first channel signal into a second harmonic signal with gas absorption by combining the V-shaped waveform modulation signal output by the V-shaped waveform modulator 1, and then the second harmonic signal and the interference signal of the etalon 6 in the second channel are simultaneously transmitted to the signal analysis module for analysis and processing.
The signal display and output module 10 comprises an LCD liquid crystal display unit and a signal output unit, wherein the signal output unit has a Bluetooth wireless communication output function and a wired serial port communication output and network port communication output interface so as to meet the requirements of different display terminals. The gas concentration signal to be analyzed, which is subjected to demodulation and analysis processing by the signal demodulation and analysis module 9, is input into the signal display and output module 10 for display and output, so that gas detection based on V-shaped wavelength tuning and modulation technology is realized.
A gas detection method based on V-shaped wavelength tuning and modulation technology comprises the following steps:
S1, a V-shaped waveform modulator 1 is used for adjusting and outputting a V-shaped voltage or current waveform signal according to a load working parameter, and then the V-shaped voltage or current waveform signal is input into a tunable laser 2 to drive the tunable laser 2 to output a laser beam in a certain wavelength range.
In this example, a semiconductor laser having a center wavelength of about 6046.5cm -1 and a method of measuring methane gas molecules are described as an example. If the laser sources matched with other molecules are selected, the high-precision measurement and analysis of different gas components can be realized.
Fig. 2 is a graph of nonlinear effects of the spectral range of emission and drive voltage of a typical tunable semiconductor laser. As shown in fig. 2, the strong absorption spectrum characteristic of the methane (CH 4) molecule at 6046.5cm -1 exists, and the wavelength tuning characteristic of the semiconductor laser commonly used in this band has a significant nonlinear effect, such as polynomial fitting result in the figure.
Fig. 3 is a diagram showing a comparison between a conventional ramp wave and a V-waveform scan modulation signal and a corresponding second harmonic signal thereof, in which fig. 3 (a) is a diagram showing a conventional ramp wave scan modulation signal, fig. 3 (b) is a diagram showing a V-waveform scan modulation signal, fig. 3 (c) is a diagram showing a second harmonic signal corresponding to a conventional ramp wave, and fig. 3 (d) is a diagram showing a second harmonic signal corresponding to a V-waveform of the present invention. As shown in FIG. 3, the conventional ramp tuning and modulation mode requires about 1.0 point resolution to obtain the complete second harmonic signal spectrogram, while the V-waveform tuning and modulation mode provided by the invention only requires about 0.4 point resolution to obtain the complete second harmonic signal spectrogram.
S2, the output laser beam is focused and reflected by the parabolic mirror 3, the reflected beam is directly coupled into the gas sample cell 4, the mutual absorption process is carried out between the gas sample cell 4 and the gas medium to be detected, and finally the beam is emitted.
S3, the emitted light beam is reflected and transmitted through the half-reflecting and half-reflecting mirror 5, the reflected light beam through the half-reflecting mirror 5 is directly reflected to the double-channel photoelectric detector 8 and marked as a first channel signal, and the transmitted light beam through the half-reflecting mirror 5 is transmitted through the etalon 6 to generate an interference signal for laser output wavelength correction, and finally the interference signal is incident into the total reflecting mirror 7 and reflected to the double-channel photoelectric detector 8 and marked as a second channel signal.
S4, the light beam signals marked by the double-channel photoelectric detector 8 are input into the signal demodulation and analysis module 9, the first channel signals are demodulated by the demodulation module through combining with the V-shaped waveform modulation signals output by the V-shaped waveform modulator 1 to obtain second harmonic signals with gas absorption, and the second harmonic signals and the second channel signals are simultaneously transmitted to the signal analysis module for analysis and processing.
The signal analysis module performs analysis processing, and the adopted method comprises a spectrum signal center position correction algorithm, a signal filtering denoising and signal averaging algorithm, a wavelength correction algorithm and a concentration inversion algorithm.
The spectrum signal center position correction algorithm, the signal filtering denoising and signal averaging algorithm comprise the following steps of firstly, primarily estimating a minimum value position P of a second harmonic signal acquired by a first channel, secondly, selecting data sets D (P-10, P+10) of about 10 point ranges near the minimum value position P, then carrying out smooth filtering on the data sets D (P-10, P+10), then solving the accurate minimum value position P of the filtered data sets, carrying out similar correction and filtering processing on each measuring signal by taking the accurate minimum value position P as the optimal center position, and finally, carrying out average processing on all signals in the first channel according to defined signal average times so as to acquire an original spectrum signal with higher signal to noise ratio.
The wavelength correction algorithm is mainly used for analysis and processing of interference signals of the etalon (6) in the second channel signal. FIG. 4 is a plot of the etalon interference signal and peak position calibration of the present invention. As shown in fig. 4, the wavelength correction algorithm is specifically as follows:
The relative wave number range of the laser can be calculated by firstly calculating the position corresponding to each Peak value (Peak) in the interference fringe signal, then taking the Peak value position as an abscissa, taking an integral sequence [1,2, ], N ] established by the total number N of Peak values as an ordinate, establishing a corresponding curve and carrying out higher-order polynomial fitting on the corresponding curve to obtain a polynomial fitting formula, then taking the integral sequence [1,2, ], N ] corresponding to the total number N of Peak values as an independent variable, substituting the independent variable into the obtained polynomial fitting formula, and multiplying the independent spectrum region FSR value of the etalon 6. And finally, calculating the difference between the relative wave number and the absolute wave number by combining the relative central position of the gas molecule absorption spectrum to be analyzed when the relative wave number is the abscissa and the absolute position of the corresponding spectral line in the database, and adding the difference and the relative wave number, thereby realizing wave number correction of the wavelength tuning range of the laser.
The concentration inversion algorithm mainly comprises a multidimensional linear regression algorithm and a linear fitting algorithm, and specifically comprises the following steps:
the multidimensional linear regression algorithm is characterized in that the number of sampling points of a spectrum signal is assumed to be n, n is a natural number, a measuring signal is Amb, a background signal is Bgr, a calibrated signal after background correction is Cal, the concentration of gas to be analyzed is c, a solving function is defined as xi, and a specific expression is shown as follows:
Fig. 5 is a schematic diagram of a concentration inversion flow based on a multidimensional linear regression algorithm and a least mean square algorithm, as shown in fig. 5, in a concentration inversion calculation process, in combination with the multidimensional linear regression algorithm and the least mean square algorithm, the algorithm calculation process obtains an optimal c value by solving a minimum value of a function ζ, and in combination with a differential calculation formula as follows:
The linear fitting algorithm adopts a hard collision linear type H (x, y) and a soft collision linear type G (x, y, z) aiming at different molecular characteristics, and theoretical expressions of the linear fitting algorithm can be respectively described by the following function models:
Wherein: M is a confluent super-geometric function, D is Dicke narrowing coefficients and eta is an optical diffusion coefficient, pi represents a circumference ratio, S represents spectral line intensity, w (u) represents a complex function related to a variable u, i represents complex imaginary units, and gamma D and gamma L represent Doppler line width and Lorentz line width respectively.
Using the two linear functions above, the calculation was fitted by integrating the area a of the absorption signal in the molecular absorption spectrum:
wherein, alpha (v) represents an absorption coefficient, L represents an absorption optical path, v represents an integral variable wave number, v 0 represents a molecular spectral line center wave number, S (T) represents a spectral line intensity related to temperature T, and N (T, P) represents a molecular number related to temperature T and pressure P.
The combination of the linear function meets the normalization condition, and the method can be simplified as follows:
A=S(T)·N·L,
Wherein S (T) and L are as defined above, and N represents the number of molecules of the absorption medium to be detected.
Finally, under the condition that relevant experimental conditions (such as parameters of temperature T, pressure P, optical path L, line intensity S of a molecule to be detected and the like) are known, the number or concentration of molecules to be absorbed can be inverted through the molecular integral absorption area A calculated through fitting, and on the contrary, the line parameters (such as line intensity) of the molecules can be calculated. Fig. 6 is a schematic diagram of fitting of an integral area a based on a linear fitting algorithm according to the present invention, as shown in fig. 6, the fitting residuals of two linear models are smaller than 8×10 -5, so that the linear models are very high in matching degree with experimental data, and high-precision concentration inversion can be achieved.
Finally, under the condition of the related experimental conditions including known temperature T, pressure P, optical path L and molecular spectral line intensity S to be detected, the molecular number or concentration of the absorbed molecules can be inversed by fitting the calculated molecular integral absorption area A, and on the contrary, the spectral line parameters of the molecules can be calculated.
S5, inputting the analyzed gas concentration signal subjected to the analysis processing into the signal display and output module 10 for display and output, so that gas detection based on the V-shaped wavelength tuning and modulation technology is realized.
The gas detection device and the method based on the V-shaped wavelength tuning and modulation technology not only improve the response time of a system and effectively reduce the influence of nonlinear effect of the laser on a spectrum signal by driving the tunable semiconductor laser through the ultra-narrow-range V-shaped wave signal, but also effectively solve the signal distortion phenomenon after spectrum averaging caused by the drift of the center wavelength of the laser by adopting a center position correction algorithm, a signal filtering denoising and a signal averaging algorithm through a signal demodulation and analysis module, and effectively improve the measurement precision and accuracy of a measurement result by adopting a multidimensional linear regression algorithm and a least mean square algorithm to analyze the concentration of the spectrum signal.
The gas detection device and method based on the V-shaped wavelength tuning and modulation technology, disclosed by the invention, utilize the dependence characteristic of the output power and wavelength of the tunable semiconductor laser on the scanning current or voltage, combine the symmetry of the V-shaped waveform, realize the wavelength scanning and modulation of the laser in an ultra-narrow range, and can effectively reduce the influence of the nonlinear effect of the laser in spectral signal processing and concentration inversion. Compared with the traditional wide-range wavelength scanning and modulation mode, the invention has the advantages of high response speed, high stability and measurement precision, more compact overall structure and higher general practicability in practical application.
While the invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not to be limited to the disclosed embodiment, but on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.

Claims (9)

1.一种基于V型波长调谐和调制技术的气体检测装置,其特征在于,包括:依次串联的V型波形调制器(1)、可调谐激光器(2)、抛物面镜(3)、气体样品池(4)、半反半透镜(5)、标准具(6)、全反镜(7)、双通道光电探测器(8)、信号解调和分析模块(9)、信号显示和输出模块(10);所述V型波形调制器(1)输出的V型电压或电流波形信号,输入到可调谐激光器(2)输出激光光束,由抛物面镜(3)聚焦和反射,再直接耦合进入气体样品池(4),经半反半透镜(5)的反射光束以及依次经半反半透镜(5)投射、标准具(6)透射、全反镜(7)反射的光束均输入至双通道光电探测器(8),再经信号解调和分析模块(9)进行解调及分析处理,最后输入到信号显示和输出模块(10)进行显示及输出。1. A gas detection device based on V-type wavelength tuning and modulation technology, characterized in that it comprises: a V-shaped waveform modulator (1), a tunable laser (2), a parabolic mirror (3), a gas sample pool (4), a half-reflecting half-mirror (5), an etalon (6), a full-reflecting mirror (7), a dual-channel photoelectric detector (8), a signal demodulation and analysis module (9), and a signal display and output module (10) which are sequentially connected in series; the V-shaped voltage or current waveform signal output by the V-shaped waveform modulator (1) is input into the laser beam output by the tunable laser (2), is focused and reflected by the parabolic mirror (3), and is then directly coupled into the gas sample pool (4); the reflected beam through the half-reflecting half-mirror (5) and the beams sequentially projected by the half-reflecting half-mirror (5), transmitted by the etalon (6), and reflected by the full-reflecting mirror (7) are all input into the dual-channel photoelectric detector (8), then demodulated and analyzed by the signal demodulation and analysis module (9), and finally input into the signal display and output module (10) for display and output. 2.根据权利要求1所述的基于V型波长调谐和调制技术的气体检测装置,其特征在于,所述半反半透镜(5)将入射光束分成两束垂直光束:反射光束和透射光束,经半透半反镜(5)的反射光束直接反射至双通道光电探测器(8),被标记为第一通道信号;而经半透半反镜(5)的透射光束,再经标准具(6)透射、全反镜(7)反射至双通道光电探测器(8),被标记为第二通道信号。2. According to claim 1, the gas detection device based on V-type wavelength tuning and modulation technology is characterized in that the semi-reflective and semi-transparent mirror (5) divides the incident light beam into two vertical light beams: a reflected light beam and a transmitted light beam. The reflected light beam through the semi-transparent and semi-reflective mirror (5) is directly reflected to the dual-channel photodetector (8) and is marked as the first channel signal; while the transmitted light beam through the semi-transparent and semi-reflective mirror (5) is transmitted through the standard device (6) and reflected by the full-reflective mirror (7) to the dual-channel photodetector (8) and is marked as the second channel signal. 3.根据权利要求2所述的基于V型波长调谐和调制技术的气体检测装置,其特征在于,所述信号解调和分析模块(9)包括信号解调模块和信号分析模块,所述信号解调模块结合V型波形调制器(1)输出的V型波形调制信号将第一通道信号解调出带有气体吸收的二次谐波信号,再和第二通道中标准具(6)干涉信号同时输送到所述信号分析模块进行分析处理。3. According to claim 2, the gas detection device based on V-type wavelength tuning and modulation technology is characterized in that the signal demodulation and analysis module (9) includes a signal demodulation module and a signal analysis module, and the signal demodulation module combines the V-type waveform modulation signal output by the V-type waveform modulator (1) to demodulate the first channel signal into a second harmonic signal with gas absorption, and then transmits it to the signal analysis module for analysis and processing at the same time as the interference signal of the standard device (6) in the second channel. 4.根据权利要求3所述的基于V型波长调谐和调制技术的气体检测装置,其特征在于,信号分析模块进行分析处理,采用的方法包括光谱信号中心位置校正算法、信号滤波去噪和信号平均算法,波长校正算法,以及浓度反演算法。4. According to claim 3, the gas detection device based on V-type wavelength tuning and modulation technology is characterized in that the signal analysis module performs analysis and processing, and the methods adopted include spectral signal center position correction algorithm, signal filtering denoising and signal averaging algorithm, wavelength correction algorithm, and concentration inversion algorithm. 5.根据权利要求1所述的基于V型波长调谐和调制技术的气体检测装置,其特征在于,所述信号显示和输出模块(10)包括:LCD液晶显示单元、信号输出单元,信号输出单元具有蓝牙无线通讯输出功能和有线串口通讯输出和网口通讯输出接口。5. According to claim 1, the gas detection device based on V-type wavelength tuning and modulation technology is characterized in that the signal display and output module (10) includes: an LCD liquid crystal display unit, a signal output unit, and the signal output unit has a Bluetooth wireless communication output function and a wired serial port communication output and an Ethernet port communication output interface. 6.根据权利要求4所述的基于V型波长调谐和调制技术的气体检测装置,其特征在于,光谱信号中心位置校正算法、信号滤波去噪和信号平均算法,其具体如下:6. The gas detection device based on V-type wavelength tuning and modulation technology according to claim 4 is characterized in that the spectral signal center position correction algorithm, signal filtering and denoising and signal averaging algorithm are specifically as follows: 首选,对第一通道中获取的二次谐波信号初步估算最小值位置P;其次,选取最小值位置P附近左右各10个点范围的数据集D(P-10,P+10),再对数据集D(P-10,P+10)进行平滑滤波;然后,对滤波之后的数据集求解出精确的最小值位置P,并以其为最佳中心位置对各个测量信号进行类似校正和滤波处理;最后,依据定义的信号平均次数对一通道中所有信号进行平均处理,以获取较高信噪比的原始光谱信号。First, preliminarily estimate the minimum position P of the second harmonic signal obtained in the first channel; secondly, select a data set D(P-10, P+10) with 10 points around the minimum position P, and then smooth the data set D(P-10, P+10); then, solve the precise minimum position P of the filtered data set, and use it as the optimal center position to perform similar correction and filtering processing on each measurement signal; finally, average all signals in one channel according to the defined signal averaging times to obtain the original spectral signal with a higher signal-to-noise ratio. 7.根据权利要求6所述的基于V型波长调谐和调制技术的气体检测装置,其特征在于,所述波长校正算法,其具体如下:7. The gas detection device based on V-type wavelength tuning and modulation technology according to claim 6 is characterized in that the wavelength correction algorithm is specifically as follows: 用于标准具(6)干涉信号分析处理,首先计算出干涉条纹信号中各个峰值所对应的位置,然后以峰值位置作为横坐标,且以峰值总数N建立的整数列[1,2,...,N]为纵坐标,建立对应曲线并对其进行高阶多项式拟合,获取多项式拟合公式;最后,以峰值总数N对应的整数列[1,2,...,N]为自变量,代入获取的多项式拟合公式,再乘以标准具的自由光谱区FSR值,即可计算出激光器的相对发射波数范围。Used for analyzing and processing the interference signal of the standard instrument (6), firstly, the position corresponding to each peak in the interference fringe signal is calculated, then the peak position is used as the horizontal coordinate, and the integer sequence [1, 2, ..., N] established by the total number of peaks N is used as the vertical coordinate, a corresponding curve is established and a high-order polynomial fitting is performed on it to obtain the polynomial fitting formula; finally, the integer sequence [1, 2, ..., N] corresponding to the total number of peaks N is used as the independent variable, substituted into the obtained polynomial fitting formula, and then multiplied by the free spectrum range FSR value of the standard instrument, the relative emission wave number range of the laser can be calculated. 8.根据权利要求7所述的基于V型波长调谐和调制技术的气体检测装置,其特征在于,所述浓度反演算法,包括两种方法:多维线性回归算法和线型拟合算法,其具体如下:8. The gas detection device based on V-type wavelength tuning and modulation technology according to claim 7 is characterized in that the concentration inversion algorithm includes two methods: a multidimensional linear regression algorithm and a linear fitting algorithm, which are specifically as follows: 多维线性回归算法:假设光谱信号采样点数为n,n为自然数,测量信号为Amb,背景信号为Bgr,背景校正后的标定信号为Cal,待分析气体浓度为c,求解函数定义为ξ,具体表达式如下所示:Multidimensional linear regression algorithm: Assume that the number of spectral signal sampling points is n, where n is a natural number, the measured signal is Amb, the background signal is Bgr, the calibration signal after background correction is Cal, the concentration of the gas to be analyzed is c, and the solution function is defined as ξ. The specific expression is as follows: 浓度反演计算过程结合多维线性回归算法和最小均方算法,算法计算过程通过求解函数ξ的最小值而获得最佳的c值,结合微分计算公式如下:The concentration inversion calculation process combines the multidimensional linear regression algorithm and the least mean square algorithm. The algorithm calculation process obtains the optimal c value by solving the minimum value of the function ξ. The differential calculation formula is as follows: 线型拟合算法:针对不同分子特性,采用硬碰撞线型H(x,y)和软碰撞线型G(x,y,z),其理论表达式可分别由如下函数模型描述:Linear fitting algorithm: According to different molecular characteristics, hard collision linear shape H(x,y) and soft collision linear shape G(x,y,z) are used. Their theoretical expressions can be described by the following function models: 其中:M为合流超几何函数,D为Dicke变窄系数和η为光学漫射系数,π表示圆周率;S表示为谱线线强,w(u)表示关于变量u的复变函数,i表示复数的虚数单位,γD和γL分别表示多普勒线宽和洛伦兹线宽。in: M is the confluence hypergeometric function, D is the Dicke narrowing coefficient and η is the optical diffusion coefficient, π represents pi; S represents the spectral line intensity, w(u) represents the complex function with respect to the variable u, i represents the imaginary unit of the complex number, γ D and γ L represent the Doppler linewidth and the Lorentz linewidth, respectively. 利用以上两种线型函数,通过对分子吸收光谱中的吸收信号进行积分面积A拟合计算:Using the above two linear functions, the integral area A of the absorption signal in the molecular absorption spectrum is fitted and calculated: 其中,α(v)表示吸收系数,L表示吸收光程;v表示积分变量波数,v0表示分子谱线中心位置波数,S(T)表示温度T相关的谱线线强,N(T,P)表示温度T和压力P相关的分子数。Among them, α(v) represents the absorption coefficient, L represents the absorption path length, v represents the integrated variable wave number, v0 represents the wave number of the center position of the molecular spectral line, S(T) represents the spectral line intensity related to temperature T, and N(T,P) represents the number of molecules related to temperature T and pressure P. 结合线型函数满足归一化条件,上式可化简为:Combined with the linear function to meet the normalization conditions, the above formula can be simplified to: A=S(T)·N·L,A=S(T)·N·L, 其中,S(T)和L定义同上,N表示待测吸收介质分子数。Wherein, S(T) and L are defined as above, and N represents the number of molecules of the absorption medium to be measured. 最后,在相关实验条件,包括温度T、压力P、光程L和待测分子谱线线强S已知的情况下,通过以上拟合计算出的分子积分吸收面积A,即可反演出吸收分子的分子数或浓度;反之,可计算出分子的谱线参数。Finally, when the relevant experimental conditions, including temperature T, pressure P, optical path L and line intensity S of the molecular spectral line to be measured, are known, the molecular integrated absorption area A calculated by the above fitting can be used to invert the number or concentration of the absorbing molecules; conversely, the spectral line parameters of the molecules can be calculated. 9.一种基于V型波长调谐和调制技术的气体检测方法,根据权利要求1~8任意一项所述的基于V型波长调谐和调制技术的气体检测装置,其特征在于,包括如下步骤:9. A gas detection method based on V-type wavelength tuning and modulation technology, according to the gas detection device based on V-type wavelength tuning and modulation technology according to any one of claims 1 to 8, characterized in that it comprises the following steps: S1、通过V型波形调制器(1),依据负载工作参数进行调节并输出V型电压或电流波形信号;再输入到可调谐激光器(2)中,驱动可调谐激光器(2)在一定波长范围内输出激光光束;S1, adjusting and outputting a V-shaped voltage or current waveform signal according to load working parameters through a V-shaped waveform modulator (1); then inputting the signal into a tunable laser (2), driving the tunable laser (2) to output a laser beam within a certain wavelength range; S2、输出的激光光束,由抛物面镜(3)聚焦和反射,反射光束再直接耦合进入气体样品池(4),在气体样品池(4)内与待检测气体介质发生相互吸收过程,最后射出光束;S2, the output laser beam is focused and reflected by the parabolic mirror (3), and the reflected beam is directly coupled into the gas sample pool (4), where it undergoes a mutual absorption process with the gas medium to be detected, and finally emits a beam; S3、射出的光束经半反半透镜(5)反射和透射,经半透半反镜(5)的反射光束直接反射至双通道光电探测器(8),被标记为第一通道信号;而经半透半反镜(5)的透射光束,再经标准具(6)透射,产生干涉信号用于激光器输出波长校正,最后入射到全反射镜(7)反射至双通道光电探测器(8)中,被标记为第二通道信号;S3, the emitted light beam is reflected and transmitted by the half-reflecting mirror (5), and the reflected light beam by the half-transparent mirror (5) is directly reflected to the dual-channel photoelectric detector (8), and is marked as the first channel signal; and the transmitted light beam by the half-transparent mirror (5) is further transmitted by the standard tool (6) to generate an interference signal for laser output wavelength correction, and finally enters the total reflection mirror (7) and is reflected to the dual-channel photoelectric detector (8), and is marked as the second channel signal; S4、经双通道光电探测器(8)标记的光束信号,再输入到信号解调和分析模块(9)中,通过解调模块结合V型波形调制信号将第一通道信号解调出带有气体吸收的二次谐波信号,再和第二通道信号同时输送到信号分析模块进行分析处理;S4, the light beam signal marked by the dual-channel photoelectric detector (8) is input into the signal demodulation and analysis module (9), and the first channel signal is demodulated into a second harmonic signal with gas absorption by the demodulation module in combination with the V-shaped waveform modulation signal, and then transmitted to the signal analysis module for analysis and processing together with the second channel signal; S5、分析处理后的反演出的待分析气体浓度信号输入到信号显示和输出模块(10)中进行显示及输出,从而实现基于V型波长调谐和调制技术的气体检测。S5. The inverted gas concentration signal to be analyzed after the analysis is input into the signal display and output module (10) for display and output, thereby realizing gas detection based on V-type wavelength tuning and modulation technology.
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