CN110021542B - Container door plate supporting structure - Google Patents

Abstract

The invention discloses a container door plate supporting structure, which comprises a container with an opening; a door plate which is covered with the opening; the supporting piece is arranged on the door plate; and a plurality of holding units closely arranged on the holding member, each holding unit comprising: a spacer; at least one convex angle arranged on the gasket; at least one reentrant angle arranged on the pad; and at least two elastic arms connected with the left and right sides of the gasket.

Description

Container door panel supporting structure

Technical field

The present invention relates to container door panel supporting structure technology, and in particular to a container door panel supporting structure composed of a rounded petal, at least one convex angle, at least one concave angle and a gasket into a starburst structure.

Background technique

In the existing semiconductor industry, the storage and transportation of related thin-plate items such as wafers, masks, or substrates play an important role. Due to microscopic manufacturing processes, components such as wafers, masks, or substrates may have tiny particles attached to them or may be damaged due to collision during storage and transportation, which will affect the yield of the entire semiconductor manufacturing process.

In view of the above reasons, many types of containers have been designed specifically for such high-precision dust-free operations to store or carry related thin-plate items such as wafers, masks or substrates. Please refer to Figure 1, which is a schematic diagram of the existing container door panel supporting structure.

In existing containers, such as the Front Opening Unified Pod (FOUP) shown in Figure 1 as an example, its structure includes a container 10 with an opening 12 on one side of the container 10 to provide wafers. Input and output, and several slots 11 are provided inside the container to accommodate several wafers. A door panel 20 is closed with the opening 12 of the container 10 to protect several wafers inside the container 10 .

The door panel 20 has an outer surface 24 and an inner surface 22. The outer surface 24 of the door panel 20 may be provided with at least one latch structure (not shown) for opening or closing the container 10.

In technology, the inner surface 22 of the door panel 20 is usually provided with a resisting member 30, which is disposed on the inner surface 22 of the door panel 20 close to the center line of the door panel 20, and has several resisting units 32 closely arranged on the resisting member 30. on the component 30 to prevent the wafer from being displaced or moving toward the center of the opening 12 due to vibration.

In the technology of FIG. 1 , a plurality of resisting units 32 are mostly arranged using two arms to clamp two symmetrical points on the wafer to limit damage caused by vibration of the wafer. However, no matter what kind of mechanism is designed for clamping or supporting, most of the existing mechanism designs have many shortcomings, including the complexity of the mechanism of the double-arm design and the disadvantage of increased mold opening costs.

In addition, the design of the two arms will increase the contact area of the several resisting units 32 when resisting or clamping the wafer. As a result, there will be an increased risk of particle generation, or the wafer may be damaged or fall into the gaps between several resisting units 32 due to uneven force.

Contents of the invention

The present invention proposes a container door panel resisting structure, aiming to solve the problem of the wafer restricting parts of the prior art wafer box having a complex structure and the wafer easily falling into the gap between the restricting parts, causing damage to the wafer. In order to achieve the above object, the present invention proposes a container door panel resisting structure, which includes a container with an opening; a door panel that covers the opening; a resisting member located on the door panel; and several The resisting units are closely arranged on the resisting member. Each resisting unit includes: a gasket; at least one convex angle provided on the gasket; at least one concave angle provided on the gasket on; and at least two elastic arms connected to the left and right sides of the gasket.

Wherein, the several resisting units that are immediately adjacent to each other bring the gaskets into close proximity through the at least one convex angle and the at least one concave angle, and the at least one convex shape on each of the gaskets The number of angles is equal to the at least one concave angle. Through the structure of the gaskets including at least one convex angle and at least one concave angle, the gaps between the gaskets are irregularly shaped to prevent thin plate-shaped items such as wafers or substrates from being displaced due to sudden vibrations during transportation. Falling into the gap between the gaskets can cause damage. In addition, reducing the contact area between items such as wafers or substrates and several resisting units is also one of the effects of the present invention.

The above brief description of the present invention is intended to provide a basic explanation of several aspects and technical features of the present invention. The Summary of the Invention is not a detailed description of the invention, and therefore its purpose is not to specifically enumerate key or important components of the invention, nor to define the scope of the invention. It is merely to present several concepts of the invention in a concise manner.

Description of the drawings

In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are only These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on the structures shown in these drawings without exerting creative efforts.

Figure 1 is a schematic diagram of the existing container door panel supporting structure;

Figure 2 is a schematic diagram of the inner surface of the door panel according to the preferred embodiment of the present invention;

Figure 3 is a schematic diagram of the resisting unit according to the preferred embodiment of the present invention;

Figure 4 is a schematic diagram of the inner surface of the door panel according to another preferred embodiment of the present invention;

Figure 5 is a schematic diagram of a resisting unit according to another embodiment of the present invention.

The realization of the purpose, functional features and advantages of the present invention will be further described with reference to the embodiments and the accompanying drawings.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present invention.

In the present invention, unless otherwise clearly stated and limited, the terms "connection", "fixing", etc. should be understood in a broad sense. For example, "fixing" can be a fixed connection, a detachable connection, or an integral body; It can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an internal connection between two elements or an interactive relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

The container 10 of the embodiment of the present invention can be referred to the container diagram in Figure 1, which mainly includes a container 10. An opening 12 is provided on one side of the container 10 to provide wafer input and output, and several slots 11 are provided inside the container. To accommodate several wafers; a door panel 20 is closed with the opening 12 of the container 10 to protect the several wafers inside the container 10. The door panel 20 has an outer surface 24 and an inner surface 22. The outer surface of the door panel 20 The surface 24 may be provided with at least one latch structure (not shown) for opening or closing the container 10 .

Referring to Figure 2, Figure 2 is a schematic diagram of the inner surface of the door panel according to the preferred embodiment of the present invention. Based on the structure of the container 10 provided in Figure 1, Figure 2 of the present invention shows a resistor 30 according to an embodiment of the present invention, which is disposed on the inner surface 22 of the door panel 20 close to the center line of the door panel 20; and a plurality of resistor units 32, which are closely connected to each other. Arranged on the resisting member 30 to prevent the wafer from being displaced or moving toward the center of the opening 12 due to vibration.

In this embodiment, the container 10 is a front opening standard wafer pod (Front Opening Unified Pod, FOUP). In other possible embodiments, the container 10 can also be a standard wafer transfer pod (Standard Mechanical Interface, SMIF). Or Front Opening Shipping Box (FOSB), etc. All plate-shaped sheet containers 10 or carriers to which the structure of the present invention can be applied should be included in the scope of the present invention, and the present invention does not limit the type of the container 10 .

As in this embodiment, the container 10 responsible for storing wafers is a front-opening standard wafer pod (Front Opening Unified Pod, FOUP). The number of slots 11 provided inside it is 13, and they are arranged in The number of the resisting units 32 on the resisting member 30 is also thirteen.

In this embodiment, the number of wafers that the container 10 can hold is 13 (13 Slots). In other possible embodiments, the number of slots 11 , the number of resisting units 32 and The number of wafers that the container 10 can accommodate may be greater than or less than 13, and the present invention should not be limited thereto.

Please refer to FIG. 2 and FIG. 3 at the same time. FIG. 3 is a schematic diagram of the resisting unit according to the preferred embodiment of the present invention. In this embodiment, the inner surface 22 of the door panel 20 is also provided with a groove 26 near the center line for engaging the resisting member 30. The main purpose of the groove 26 is to buffer several wafers inside the container 10. In addition, the front and rear diameter dimensions of the entire container 10 can also be reduced.

In this embodiment, each resisting unit 32 closely arranged on the resisting member 30 includes a gasket 32a; at least one protruding corner 32b is provided on the gasket 32a, and each of the at least one The convex corner 32b protrudes from the gasket 32a by a distance of about 7-9 millimeters (mm), preferably by a distance of 9 millimeters (mm).

At least one concave corner 32c is provided on the gasket 32a, and each of the at least one concave corner 32c is recessed into the gasket 32a by a distance of about 7-9 millimeters (mm), preferably 9 millimeters (mm). ); and two elastic arms 32d are respectively connected to the left and right sides of the gasket 32a.

In this embodiment, the elastic arm 32d is designed in an arc shape to support the gasket 32a so that the gasket 32a is approximately 9 millimeters (mm) away from the door panel 20 .

Thereby, when the door panel 20 and the container 10 in this embodiment are closed, the wafer resisting the gasket 32a can be buffered by the two elastic arms 32d on the left and right sides of the gasket 32a. Among the several resisting units 32 that are immediately adjacent to each other, the gaskets 32a are closely approached through the at least one convex angle 32b and the at least one concave angle 32c, and each of the gaskets 32a has a The number of the at least one convex angle 32b and the at least one concave angle 32c is equal; more precisely, since each gasket 32a must be combined end-to-end, at least one between two adjacent gaskets 32a The number of mechanisms of the convex angle 32b and at least one concave angle 32c must be consistent so that they can match.

When the door panel 20 and the container 10 are ready to be closed, the wafers contained in the container 10 will first contact the gasket 32a of the resisting unit 32, and at the same time drive the two elastic arms 32d to deform, so that the two elastic arms 32d move into the door panel 20 The groove 26 on the surface 22 is recessed inward. When each wafer contained in the container 10 is completely closed with the door panel 20 and the container 10 , it can be firmly held on the gasket 32 a and restrict the wafer from moving toward the opening 12 direction movement.

In addition, through the structure of at least one convex corner 32b and at least one concave corner 32c on the gasket 32a, and at least one convex corner 32b and the at least one concave corner 32c bring the gaskets 32a into close proximity, it is possible to avoid the wafer due to transportation During the process, a sudden vibration causes the wafer to be out of position, and the wafer falls into the gap between the gaskets 32a, causing damage or fragmentation of the wafer.

Please refer to FIG. 4 , which is a schematic diagram of the inner surface of the door panel according to another preferred embodiment of the present invention. In this embodiment, each resisting unit 32 closely arranged on the resisting member 30 includes: a gasket 32a; at least one convex corner 32b, which is provided on the gasket 32a, and each of at least A convex corner 32b protrudes from the gasket by a distance of about 7-9 millimeters (mm), preferably a distance of 9 millimeters (mm); at least one concave corner 32c is provided on the gasket 32a, and each The at least one concave corner 32c is recessed into the gasket 32a by a distance of about 7-9 millimeters (mm), preferably a distance of 9 millimeters (mm); and four elastic arms 32d', two elastic arms 32d'. It is connected to the left and right sides of the gasket 32a, and each elastic arm 32d' is arc-shaped to support the gasket 32a so that the gasket 32a is approximately 9 millimeters (mm) away from the door panel 20. distance.

Similar to the embodiments in Figures 2 and 3, the design of the single elastic arm 32d' of the embodiment in Figure 4 is close to a continuous S-shaped mechanism design. Please refer to FIG. 5 first. FIG. 5 is a schematic diagram of a resisting unit according to another embodiment of the present invention. The description of the single elastic arm 32 d' in the embodiment of Figure 5 can also be applied to the embodiments of Figures 2 and 3, and the present invention is not limited thereto. In the embodiment of Figure 5, the elastic arm 32d' props up the elastic arm 32d' a first distance d1 through the first bend 41 in the opposite direction, and then moves the gasket through the second bend 42. 32a supports the second distance d2. In the above embodiments, the sum of the first distance d1 and the second distance d2 is a distance of 9 millimeters (mm) between the gasket 32 a and the door panel 20 .

Thereby, when the door panel 20 and the container 10 are closed, the wafer resisting the gasket 32a can be buffered by the four elastic arms 32d' on the left and right sides of the gasket 32a. Among them, the several resisting units 32 that are immediately adjacent to each other bring the gaskets 32a into close proximity through the at least one convex angle 32b and the at least one concave angle 32c, and all the elements on each of the gaskets 32a are The at least one convex angle 32b is equal in number to the at least one concave angle 32c.

The embodiment of Figure 4 uses four elastic arms 32d' connected in pairs to the left and right sides of the gasket 32a, which can effectively and further prevent the seesaw movement caused by the gasket 32a; thereby further preventing friction or damage to the wafer. risks of. In addition, considering the possibility of load-bearing of the gasket 32a, in the embodiment of Figures 2 to 3, its elastic arm 32d (32d') can be more like the embodiment in Figure 5, with each elastic arm 32 d' is provided with a support portion 32f on one side close to the inner surface 22 of the door panel 20 .

In the embodiment of Figure 5, the support portion 32f may be a rounded triangle. Of course, the outer shape of the support portion 32f can also be a geometric shape such as a circle or a rectangle, and the present invention is not limited thereto. The support portion 32f can provide additional support force applied to the elastic arm 32d' when the gasket 32a bears a heavy load, thereby achieving a better resistance effect.

In addition, in other possible embodiments, if the load-bearing capacity of the gasket 32a is to be further increased, a cross-shaped cross can be set on the back of the gasket 32a (ie, the side close to the inner surface 22 of the door panel 20) with its center of gravity as an intersection point. Or an equiangular cross rib. The structural thickness provided by the cross ribs further greatly improves the load-bearing capacity and structural stability of the gasket 32a, which is not limited by the present invention.

Therefore, when the door panel 20 and the container 10 are ready to be closed, the wafers accommodated inside the container 10 will first contact the gasket 32a of the resisting unit 32, and at the same time drive the four elastic arms 32d' to deform, so that the four elastic arms 32d' The groove 26 on the inner surface 22 of the door panel 20 is recessed inward, so that each wafer contained in the container 10 can be firmly held on the gasket 32a and restrain the wafer when the door panel 20 and the container 10 are completely closed. The circle moves toward opening 12.

In addition, one elastic arm 32d' is added to the left and right sides of the gasket 32a, so that the four elastic arms 32d' are deformed and the process of the lever driving the elastic arm 32d' can be more stable. In addition, through the structure of at least one convex corner 32b and at least one concave corner 32c on the gasket 32a, and at least one convex corner 32b and the at least one concave corner 32c bring the gaskets 32a into close proximity, it is possible to avoid the wafer due to transportation During the process, a sudden vibration causes the wafer to be out of position, and the wafer falls into the gap between the gaskets 32a, causing damage or fragmentation of the wafer.

In addition, for a round wafer, the design of single-point contact with the pad 32a to reduce the contact area can also effectively reduce the tiny particles generated due to friction.

In the above embodiments, the gasket 32a may also include four rounded petals 32e, two or two located around the gasket 32a, and the two sides of the at least one convex corner 32b. The rounded petal-shaped portions 32e are symmetrical to each other; the rounded-cornered petal-shaped portions 32e on both sides of the at least one concave corner 32c are symmetrical to each other, and the four rounded-cornered petal-shaped portions 32e, the at least one convex corner 32b, and the The at least one concave corner 32c and the gasket 32a form a star-shaped structure.

The star-shaped structure referred to in this embodiment refers to the rounded petal-shaped portion 32e, at least one convex corner 32b, at least one concave corner 32c and the gasket 32a. Starting from the center of gravity of the gasket 32a, each rounded-cornered petal-shaped portion 32e and at least The extending distance of each convex angle 32b is almost equal, which reduces the change of the moment when the force is uneven, thereby reducing the risk of damage to the resisting unit 32.

In other possible embodiments, the gasket 32a can also be a triangle, a pentagon or other irregular shapes with at least one convex corner 32b and at least one concave corner 32c. The present invention should not be limited to this, and its purpose is to This prevents the wafer from being out of position due to sudden vibration during transportation and falling into the gap between the gaskets 32a to cause damage to the wafer.

In the above embodiments of FIGS. 2 to 5 , the plurality of resisting units 32 can be an integrally formed elastic structure, such as a thermoplastic elastic structure. In addition to achieving the deformation of at least two elastic arms 32d (32d'), the wafer can be Firmly supported on the gasket 32a, the elastic structure also has a shock-absorbing effect, which can prevent the wafer from being displaced or moving toward the opening 12 of the container 10 due to sudden vibration. Several resisting units 32 are closely arranged on the resisting member 30 , and the resisting member 30 is engaged with the groove 26 on the inner surface 22 of the door panel 20 . In other possible embodiments based on the concept of the present invention, the resisting member 30 may also be directly integrally formed with the inner surface 22 of the door panel 20 .

In other possible embodiments, the place where the gasket 32a contacts the wafer can be surface-coated with a wear-resistant consumable material, such as polyetheretherketone (PEEK) material, to reduce friction and the generation of particulate dust. In this embodiment, the height and width of the spacers 32a can be greater than the thickness of the wafer to prevent the wafer from moving up and down and falling into the gap between the spacers 32a.

The above are only preferred embodiments of the present invention, and do not limit the patent scope of the present invention. Under the inventive concept of the present invention, equivalent structural transformations can be made using the contents of the description and drawings of the present invention, or direct/indirect applications. Other related technical fields are included in the patent protection scope of the present invention.

Claims (12)

1. A container door panel resisting structure, characterized in that the container door panel resisting structure includes: A container having an opening; a door panel to cover the opening; A resisting member is provided on the door panel; And several resisting units are closely arranged on the resisting member. Each resisting unit includes: a gasket; At least one convex angle is provided on the gasket; At least one concave angle is provided on the gasket; and at least two elastic arms connected to the left and right sides of the gasket; Wherein, the several resisting units that are immediately adjacent to each other bring the gaskets into close proximity through the at least one convex angle and the at least one concave angle, and the at least one convex shape on each of the gaskets The number of angles is equal to the at least one concave angle. 2. The container door panel holding structure according to claim 1, characterized in that the container is a front-opening standard wafer box. 3. The container door panel resisting structure according to claim 1, wherein the door panel is further provided with a groove, and the groove engages the resisting member. 4. The container door panel resisting structure according to claim 1, wherein each of the at least one convex angle protrudes from the gasket by a distance of 7-9 mm. 5. The container door panel resisting structure according to claim 1, wherein each of the at least one concave corner is recessed into the gasket by a distance of 7-9 mm. 6. The container door panel resisting structure according to claim 1, wherein the thickness of the resisting member is 9 mm. 7. The container door panel resisting structure according to claim 1, wherein the at least two elastic arms are arc-shaped, and the at least two elastic arms support the gasket so that the gasket is at a certain distance from the gasket. The distance between the door panels is 9 mm. 8. The container door panel resisting structure according to claim 1, wherein the gasket further includes four rounded petal-shaped portions, two of which are arranged around the gasket. 9. The container door panel resisting structure according to claim 8, wherein the rounded petals on both sides of the at least one convex corner are symmetrical to each other, and the rounded corners on both sides of the at least one concave corner are symmetrical to each other. The petals are symmetrical to each other. 10. The container door panel resisting structure according to claim 8, wherein the gasket further includes a starburst-shaped structure, the starburst-shaped structure consists of the four rounded petals, at least one The convex angle, at least one concave angle and the gasket are formed together. 11. The container door panel resisting structure according to claim 1, wherein at least one support portion is provided on the bottom surface of each of the at least two elastic arms. 12. The container door panel resisting structure as claimed in claim 1, wherein a cross rib is provided on the back side of the gasket.