CN110148616B

CN110148616B - Display substrate, manufacturing method thereof, display device and equipment for manufacturing display substrate

Info

Publication number: CN110148616B
Application number: CN201910430275.1A
Authority: CN
Inventors: 周敏; 廖加敏; 李宗祥; 吴振钿; 王进; 石常洪; 程浩; 吕耀朝; 邱鑫茂; 黄雅雯; 刘耀
Original assignee: BOE Technology Group Co Ltd; Fuzhou BOE Optoelectronics Technology Co Ltd
Current assignee: BOE Technology Group Co Ltd; Fuzhou BOE Optoelectronics Technology Co Ltd
Priority date: 2019-05-22
Filing date: 2019-05-22
Publication date: 2021-04-27
Anticipated expiration: 2039-05-22
Also published as: CN110148616A

Abstract

Provided are a display substrate and a manufacturing method thereof, a display device, and an apparatus for manufacturing the display substrate. The display substrate includes a plurality of display units on a base substrate, each display unit includes an organic light-emitting layer, a first electrode and a second electrode, the first electrode and the second electrode are spaced apart from each other, and the The second electrode includes a hollow area, and the first electrode and the organic light emitting layer are located in the hollow area. The organic light-emitting layer can be produced by means of inkjet printing, which can reduce costs and improve production efficiency.

Description

Display substrate, manufacturing method thereof, display device and equipment for manufacturing display substrate

Technical Field

At least one embodiment of the disclosure relates to a display substrate, a manufacturing method of the display substrate, a display device and equipment for manufacturing the display substrate.

Background

With the rapid development of science and technology, display media become an important part of people's life. A new type of Organic Light Emitting Diode (OLED) display medium has excellent color and picture quality due to its self-luminescence. An OLED display is a self-luminous display device using an electroluminescent organic thin film as a light emitter. The organic thin film of the OLED display is completed by an evaporation process, which is an essential part of the OLED manufacturing process. However, the actual operation of the evaporation process is very complicated, such as controlling the pixel area, the alignment of the pixels, controlling the film thickness, etc., and the parameters such as the environmental conditions are strict, and the efficiency is extremely low on the premise of high film-forming quality, and the production of a large substrate is difficult to realize by focusing on a small display device. In addition, the evaporation equipment monopolizes limited resources and is high in cost, which is a main reason for hindering the large-area production of the OLED display panel.

Disclosure of Invention

At least one embodiment of the present disclosure relates to a display substrate, a method of manufacturing the same, a display device, and an apparatus for manufacturing the display substrate.

At least one embodiment of the present disclosure provides a display substrate including a plurality of display units on a substrate, each display unit including an organic light emitting layer, a first electrode and a second electrode, the first electrode and the second electrode being disposed at an interval from each other, the second electrode including a hollow area, the first electrode and the organic light emitting layer being located in the hollow area.

According to one or more embodiments of the present disclosure, there is provided a display substrate, in which a size of the second electrode in a direction perpendicular to the substrate is larger than a size of the organic light emitting layer in a direction perpendicular to the substrate.

According to one or more embodiments of the present disclosure, there is provided a display substrate, in which the first electrode and the second electrode are oppositely disposed in a direction parallel to the substrate.

According to one or more embodiments of the present disclosure, a display substrate is provided, which further includes a first insulating layer, wherein the second electrode and the organic light emitting layer are both in contact with a surface of the first insulating layer away from the substrate.

According to one or more embodiments of the present disclosure, the first electrode protrudes from the surface of the first insulating layer away from the substrate.

According to one or more embodiments of the present disclosure, a display substrate is provided, which further includes a first gate electrode, and an orthographic projection of the organic light emitting layer on the substrate falls within an orthographic projection of the first gate electrode on the substrate.

According to the display substrate provided by one or more embodiments of the present disclosure, the plurality of display units form a plurality of rows and a plurality of columns, the first gates in the same row are electrically connected by the same first gate line, and the first electrodes in the same column are electrically connected by the same first data line.

According to one or more embodiments of the present disclosure, there is provided a display substrate, in which the second electrode partially overlaps the first data line in a direction perpendicular to the substrate.

According to the display substrate provided by one or more embodiments of the present disclosure, the plurality of second electrodes in the plurality of display units are of an integral structure.

According to one or more embodiments of the present disclosure, a display substrate further includes a second insulating layer between the first electrode and the first gate electrode, wherein the first gate electrode and the first electrode are insulated from each other by the second insulating layer.

According to the display substrate provided by one or more embodiments of the present disclosure, an oil-repellent layer is disposed on one side of the second electrode, which is far away from the substrate; and the orthographic projection of the oil drainage layer on the substrate falls into the orthographic projection of the second electrode on the substrate.

According to one or more embodiments of the present disclosure, there is provided a display substrate further including a driving transistor, one of a source and a drain of the driving transistor being connected to the first gate electrode, and the other of the source and the drain of the driving transistor being connected to a second data line.

According to one or more embodiments of the present disclosure, there is provided a display substrate in which the organic light emitting layer is a semiconductor layer and the organic light emitting layer covers the first electrode.

According to the display substrate provided by one or more embodiments of the present disclosure, the hollow area includes at least one of a circle and a rectangle, and the first electrode is located in the center of the hollow area.

At least one embodiment of the present disclosure further provides a display device including any one of the above display substrates.

At least one embodiment of the present disclosure further provides a method for manufacturing a display substrate, including: forming a first electrode on a substrate; forming a first insulating layer on the substrate base plate, wherein the first electrode protrudes out of the first insulating layer from the surface of the first insulating layer far away from the substrate base plate; forming a second electrode on the first insulating layer, wherein the second electrode comprises a hollow area, the first electrode is positioned in the hollow area, and the first electrode and the second electrode are arranged at intervals; and forming an organic light-emitting layer in the hollow area by adopting an ink-jet printing process.

According to the manufacturing method of the display substrate provided by one or more embodiments of the present disclosure, the first electrode is formed first, and then the first insulating layer is formed.

According to the manufacturing method of the display substrate provided by one or more embodiments of the present disclosure, the first insulating layer is formed first, then the via hole penetrating through the first insulating layer is formed, and then the first electrode is formed, wherein a part of the first electrode is located in the via hole.

According to the manufacturing method of the display substrate provided by one or more embodiments of the present disclosure, the first electrode and the second electrode are formed by using the same patterning process.

According to the manufacturing method of the display substrate provided by one or more embodiments of the present disclosure, a plurality of organic light emitting layers capable of emitting light of different colors are simultaneously formed.

At least one embodiment of the present disclosure further provides an apparatus for manufacturing any one of the display substrates, including a plurality of inkjet printing units, each inkjet printing unit including an ink inlet and a plurality of ink diversion channels connected to the ink inlet, each ink diversion channel having an ink ejection port.

According to the device for manufacturing the display substrate, provided by one or more embodiments of the disclosure, the ink jetting port is gradually narrowed from a direction close to the ink inlet to a direction far away from the ink inlet.

According to one or more embodiments of the present disclosure, there is provided an apparatus for fabricating a display substrate, wherein the shape of the ink ejection port includes at least one of a circle and a square.

According to one or more embodiments of the present disclosure, there is provided an apparatus for fabricating a display substrate, wherein at least three different ink inlets are configured to input a first ink, a second ink and a third ink, respectively, and each two of the first ink, the second ink and the third ink are different.

According to one or more embodiments of the present disclosure, there is provided an apparatus for manufacturing a display substrate, wherein the at least three different ink inlets are configured to simultaneously input the first ink, the second ink and the third ink, respectively.

Drawings

To more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings of the embodiments will be briefly introduced below, and it is apparent that the drawings in the following description relate only to some embodiments of the present disclosure and are not limiting to the present disclosure.

Fig. 1 is a schematic top view of a display substrate according to an embodiment of the disclosure;

fig. 2A is a schematic cross-sectional view of a display unit in a display substrate according to an embodiment of the disclosure;

fig. 2B is a schematic cross-sectional view of a display unit in a display substrate according to another embodiment of the disclosure;

fig. 3 is a schematic perspective view of a first electrode and a second electrode in a display substrate according to an embodiment of the disclosure;

fig. 4 is a schematic top view of a first gate, a first electrode and a second electrode in a display substrate according to an embodiment of the disclosure;

FIG. 5 is a schematic top view of the second electrode shown in FIG. 4;

fig. 6 is a schematic top view of a first gate electrode and a first gate line in the display substrate shown in fig. 4;

FIG. 7A is a schematic top view of the first electrode and the first data line on the display substrate shown in FIG. 4;

fig. 7B is a schematic top view of a first gate electrode, a first gate line, a first data line, and a first electrode in a display substrate according to an embodiment of the disclosure.

Fig. 8A is a cross-sectional view of a display substrate according to an embodiment of the disclosure;

fig. 8B is a cross-sectional view of a display substrate according to another embodiment of the present disclosure;

fig. 8C is a schematic view of a second gate line, a first data line, a second data line, a first gate electrode, and a first electrode in a display substrate according to an embodiment of the disclosure;

fig. 9 is a schematic view of an apparatus for manufacturing a display substrate for forming an organic light emitting layer according to an embodiment of the disclosure;

fig. 10 is a schematic view of an inkjet printing unit in an apparatus for manufacturing a display substrate according to an embodiment of the present disclosure;

fig. 11 is a schematic view of an inkjet unit in an inkjet printing unit in an apparatus for manufacturing a display substrate according to an embodiment of the present disclosure;

fig. 12 is a schematic view of an inkjet unit in an inkjet printing unit in an apparatus for manufacturing a display substrate according to an embodiment of the present disclosure;

fig. 13 is a schematic top view of a rectangular ink ejection port in an ink ejection unit of an apparatus for fabricating a display substrate according to an embodiment of the disclosure;

fig. 14 is a schematic perspective view of a rectangular ink ejection port in an ink ejection unit of an apparatus for manufacturing a display substrate according to an embodiment of the disclosure; and

fig. 15 is a schematic structural diagram of an inkjet unit in an apparatus for manufacturing a display substrate according to an embodiment of the present disclosure.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present disclosure more apparent, the technical solutions of the embodiments of the present disclosure will be described clearly and completely with reference to the drawings of the embodiments of the present disclosure. It is to be understood that the described embodiments are only a few embodiments of the present disclosure, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the disclosure without any inventive step, are within the scope of protection of the disclosure.

Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The use of "first," "second," and similar terms in this disclosure is not intended to indicate any order, quantity, or importance, but rather is used to distinguish one element from another. Likewise, the word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.

In a general Organic light-emitting Diode (OLED) display, an Organic light-emitting layer needs an evaporation process, and the process conditions are strict and it is difficult to achieve a large area. The method for manufacturing the OLED luminescent material by adopting the ink-jet printing mode is the best mode for realizing the production of the low-cost OLED, and enables the OLED to participate in the middle-end market competition. The inkjet printing method is an efficient process, and the inkjet printing method has less material waste compared to the evaporation method, and can be very fast.

The preparation method of the OLED screen for ink-jet printing mainly comprises the steps of dissolving OLED organic materials by using a solvent, and then directly spraying and printing the materials on the surface of a substrate to form organic light-emitting functional layers such as red (R), green (G), blue (B) and the like. Compared with the evaporation technology, the inkjet printing OLED technology has obvious advantages in the aspects of manufacturing process, yield, cost and the like. For example, the organic light emitting function layer includes at least one of a hole injection layer, a hole transport layer, a light emitting material layer, an electron transport layer, an electron injection layer, and the like. The organic light-emitting functional layer may be selected as desired.

Due to the large molecular weight of polymers, solution processing into films, such as spin coating or printing, is mainly used, and inkjet printing technology is the best method for preparing luminescent polymer solutions. In recent years, a great deal of effort has been made to improve the pixel resolution, the film uniformity, and the lifetime of the display panel, and the research on depositing the electro-optic material by ink-jet printing has been actively conducted. For example, the hole transport layer, the luminescent layer, the cathode material and other film layers of the display screen can be prepared by using an ink-jet printing technology, and a foundation is laid for manufacturing the display screen by adopting a full-printing mode.

Fig. 1 is a schematic top view of a display substrate according to an embodiment of the disclosure. As shown in fig. 1, the display substrate 1 includes a plurality of display cells 100 on a substrate 101. For example, as shown in fig. 1, the plurality of display units 100 are arranged in an array, and the first direction X is a row direction and the second direction Y is a column direction, but is not limited thereto. The number of display units 100 included in the display substrate 1 is not limited to that shown in fig. 1. For example, the display unit 100 includes an organic light emitting transistor, but is not limited thereto. For example, the display unit 100 may also be referred to as a light emitting unit. For example, as shown in fig. 1, the first column of display units may be a first color display unit, the second column of display units may be a second color display unit, and the third column of display units may be a third color display unit, but is not limited thereto. In other embodiments, the display units in the same row may be display units of the same color. The first to third display units may form a pixel row, and the display substrate may include a plurality of pixel rows repeatedly arranged in sequence along the row direction.

For example, one display unit 100 may correspond to one sub-pixel. The plurality of display units 100 may include a plurality of first sub-pixels, a plurality of second sub-pixels, and a plurality of third sub-pixels. For example, the first sub-pixel, the second sub-pixel, and the third sub-pixel may be sub-pixels of different colors. For example, the first sub-pixel, the second sub-pixel, and the third sub-pixel may be a red sub-pixel, a green sub-pixel, and a blue sub-pixel, respectively, but are not limited thereto.

Fig. 2A is a schematic cross-sectional view of a display unit in a display substrate according to an embodiment of the disclosure. As shown in fig. 2A, each display unit 100 includes an organic light emitting layer 108 disposed on a substrate 101, a first electrode 104 and a second electrode 106, and the first electrode 104 and the second electrode 106 are disposed at a distance from each other, the second electrode 106 includes a hollow area 16, and the first electrode 104 and the organic light emitting layer 108 are located in the hollow area 16. For example, the organic light emitting layer 108 may be a light emitting layer of a semiconductor material. The first electrode 104 is located in the hollow area 16 of the second electrode 106, forming a horizontal organic light emitting diode.

The display substrate provided by an embodiment of the present disclosure can adopt an inkjet printing method to manufacture the organic light emitting layer 108, which can reduce the cost and improve the production efficiency.

For example, as shown in fig. 2A, the display substrate 1 further includes a first gate electrode 102, and the first gate electrode 102 overlaps with the organic light emitting layer 108 in a direction perpendicular to the base substrate 101, so that a current between the first electrode 104 and the second electrode 106 can be controlled by adjusting a voltage of the first gate electrode. For example, the first electrode 104 may be applied with a data signal, and the second electrode 106 may be connected to a reference voltage terminal. For example, the reference voltage terminal may be a fixed voltage. For example, the second electrode 106 may be grounded, but is not limited thereto. For example, as shown in fig. 2A, when a scan signal is applied to the first gate electrode 102 and a data signal is applied to the first electrode 104, a current may be generated between the first electrode 104 and the second electrode 106, and the display unit 100 emits light to perform display. For example, when the first gate electrode 102 is not applied with the scan signal, the display unit does not emit light.

When a bias voltage is applied between the first electrode 104 and the second electrode 106 of the display unit 100, the injected holes and electrons are recombined in the light emitting layer to emit light by exciton radiation. By applying a voltage to the first gate electrode, a carrier injection barrier between the first electrode 104 and the organic light emitting layer can be changed, injection efficiency of holes (electrons) can be improved, light emission can be realized, and the display unit 100 can have both a switching function of a transistor and a light emitting function, so that independent control of each display unit 100 can be realized. That is, the display unit 100 functions as both a switching transistor and a light emitting transistor. For example, whether the light emitting cell 100 emits light is related to at least one of a voltage between the first gate electrode 102 and the first electrode 104, and a voltage between the first gate electrode 102 and the second electrode 106, but is not limited thereto. For example, the light emitting intensity of the light emitting unit 100 is related to the voltage difference between the first electrode 104 and the second electrode 106, but is not limited thereto.

For example, the first electrode 104 and the second electrode 106 may be made of a metal material to improve light emitting efficiency. For example, one of the first electrode 104 and the second electrode 106 may serve as a source of a light emitting transistor, and the other of the first electrode 104 and the second electrode 106 may serve as a drain of the light emitting transistor. For example, the organic light emitting layer 108 may also be referred to as a channel light emitting layer. For example, in some embodiments, the first electrode 104 can be considered a cathode of an OLED and the second electrode 106 can be considered an anode of the OLED, but is not limited thereto. In other embodiments, the first electrode 104 may be considered an anode of the OLED and the second electrode 106 may be considered a cathode of the OLED.

For example, the display unit 100 in fig. 1 may include the hollow area 16 corresponding to the second electrode 106 shown in fig. 2A. That is, the hollow area 16 is circular, but is not limited thereto. For example, in other embodiments, the hollow area 16 may be rectangular, but is not limited thereto. When the hollow area 16 is circular, or when the display unit 100 is circular, and the organic light emitting layer 108 is formed by an inkjet printing method, the ink droplets are circular, which is beneficial to improving the uniformity of film formation.

For example, as shown in fig. 2A, the first electrode 104 and the second electrode 106 have a space therebetween. For example, as shown in fig. 2A, the first electrode 104 is located at the center of the hollow area 16, but is not limited thereto. When the first electrode 104 is located at the center of the hollow area 16, it is beneficial for the horizontal display unit to emit light uniformly.

For example, as shown in fig. 2A, the organic light emitting layer 108 covers the first electrode 104 to improve the light emitting efficiency of the display unit. Of course, in other embodiments, the organic light emitting layer 108 may not cover the first electrode 104, that is, the first electrode 104 protrudes from the organic light emitting layer 108.

For example, as shown in fig. 2A, the size of the second electrode 106 in the direction perpendicular to the substrate 101 is larger than the size of the organic light emitting layer 108 in the direction perpendicular to the substrate 101, so as to facilitate the fabrication of the organic light emitting layer 108 by inkjet printing.

For example, as shown in fig. 2A, the first electrode 104 and the second electrode 106 are oppositely disposed in a direction parallel to the base substrate 101. As shown in fig. 2A, the first electrode 104 and the second electrode 106 have opposing areas.

For example, as shown in fig. 2A, the organic light emitting layer 108 includes a bottom surface S1 near the substrate base plate 101, a top surface S2 facing away from the substrate base plate 101, and a side surface S3 between the bottom surface S1 and the top surface S2, the second electrode 106 is in contact with the side surface S3 of the organic light emitting layer 108, and the first electrode 104 is in contact with the bottom surface S1 of the organic light emitting layer 108. For example, since the organic light emitting layer 108 is formed after the first electrode 104 is formed, the bottom surface S1 of the organic light emitting layer 108 is not flat. For example, when the organic light emitting layer 108 is manufactured by an inkjet printing method, the top surface S2 of the organic light emitting layer 108 is an arc surface, but is not limited thereto.

For example, as shown in fig. 2A, the second electrode 106 is provided with an oil-repellent layer 107 on a side away from the base substrate 101. For example, the orthographic projection of the oil-repellent layer 107 on the substrate base 101 falls within the orthographic projection of the second electrode 106 on the substrate base 101. The oil-repellent layer 107 can prevent formation of comet-shaped ink droplets during formation of the organic light-emitting layer 108 by ink-jet printing, and can avoid influencing the quality of devices. Of course, instead of providing the oil-repellent layer 107, micro-nano processing may be performed on the surface of the second electrode 106 on the side away from the substrate 101 to avoid formation of comet-like ink droplets during formation of the organic light-emitting layer 108 by inkjet printing.

For example, as shown in fig. 2A, the display substrate further includes a first insulating layer 105, and the second electrode 106 and the organic light emitting layer 108 are both in contact with the same surface of the first insulating layer 105. For example, as shown in fig. 2A, the same surface is a surface S0 of the first insulating layer 105 that is far from the base substrate 101.

For example, as shown in fig. 2A, the first electrode 104 protrudes from the surface of the first insulating layer 105 away from the substrate 101 to the first insulating layer 105, so as to form a first electrode 104 and a second electrode 106 which are oppositely disposed.

For example, as shown in fig. 2A, the first electrode 104 penetrates the first insulating layer 105 and exceeds the first insulating layer 105 in a direction perpendicular to the base substrate 101 to facilitate formation of the first electrode 104 and the second electrode 106 having opposite areas.

For example, in some embodiments of the present disclosure, the first gate electrode 102 overlaps the organic light emitting layer 108 in a direction perpendicular to the base substrate 101. For example, an orthogonal projection of the organic light emitting layer 108 on the base substrate 101 falls within an orthogonal projection of the first gate electrode 102 on the base substrate 101.

For example, in some embodiments of the present disclosure, the first gate electrode 102 coincides with the organic light emitting layer 108 in a direction perpendicular to the base substrate 101. For example, an orthogonal projection of the first gate electrode 102 on the base substrate 101 coincides with an orthogonal projection of the organic light emitting layer 108 on the base substrate 101.

For example, as shown in fig. 2A, the display substrate further includes a second insulating layer 103 located between the first electrode 104 and the first gate 102, the first gate 102 and the first electrode 104 are insulated by the second insulating layer 103, and the first gate 102 and the second electrode 106 are insulated by the first insulating layer 105 and the second insulating layer 103.

For example, as shown in fig. 2A, the display substrate 2 further includes an encapsulation layer 109. The encapsulation layer 109 serves to prevent water and oxygen attack in the external environment.

For example, as shown in fig. 2A, the dimension in the direction parallel to the base substrate 101 of the side of the first electrode 104 close to the base substrate 101 is larger than the dimension in the direction parallel to the base substrate 101 of the side of the first electrode 104 away from the base substrate 101. At this time, the first electrode 104 is formed first, and then the first insulating layer 105 is formed.

In the display substrate provided in the embodiment shown in fig. 2A, the first electrode 104 may be connected to the first data line 140 (not shown in fig. 2A, refer to fig. 7A). The first electrode 104 may be integrally formed with the first data line 140, but is not limited thereto. The first data line is configured to input a data signal to the first electrode 104, for example, a data voltage to the first electrode 104.

Fig. 2B is a schematic cross-sectional view of a display unit in a display substrate according to another embodiment of the disclosure. As shown in fig. 2B, the display substrate includes a first data line 211, and the first data line 211 and the first electrode 104 are separately formed. At this time, the first data line 104 may be formed first, then the first insulating layer 105 may be formed, and a via hole may be formed in the first insulating layer 105. Then, a conductive film layer is formed and patterned to simultaneously form the first electrode 104 and the second electrode 106. As shown in fig. 2B, the first electrode 104 and the second electrode 106 have a space therebetween, and the second electrode 106 has a hollow area 16.

Fig. 3 is a schematic perspective view of a first electrode and a second electrode in a display substrate according to an embodiment of the disclosure. Fig. 3 shows the first electrode 104, the second electrode 106, the hollowed-out area 16 of the second electrode 106, and the space 46 between the first electrode 104 and the second electrode 106. As shown in fig. 3, the second electrode 106 has a surface 1061 away from the substrate base plate 101 and a side 1062 contiguous with the surface 1061 and configured to form the hollow area 16. As shown in fig. 3, the side 1062 and the first electrode 104 have a space 46 therebetween.

Fig. 4 is a schematic top view of a first gate, a first electrode, and a second electrode in a display substrate according to an embodiment of the disclosure. Fig. 4 may be a schematic top view of the first gate, the first electrode, and the second electrode at a dashed-line frame a in fig. 1. As shown in fig. 4, an orthogonal projection of the first electrode 104 on the base substrate 101 falls within an orthogonal projection of the first gate electrode 102 on the base substrate 101. An orthographic projection of the hollow-out region 16 of the second electrode 106 on the substrate 101 falls within an orthographic projection of the first gate 102 on the substrate 101. For example, the cross-sectional view along line B-C in FIG. 4 may be as shown in FIG. 2A or as shown in FIG. 2B. Depicted in fig. 4 is a schematic diagram of the positional relationship of the first gate electrode, the first electrode, and the second electrode. As described earlier, the first gate 102 and the first electrode 104 are insulated from each other, the first gate 102 and the second electrode 106 are insulated from each other, and the first electrode 104 and the second electrode 106 are disposed at a distance from each other.

For example, as shown in fig. 4 and 1, a plurality of display cells 100 form a plurality of rows and a plurality of columns. For example, the horizontal direction is a row and the vertical direction is a column.

For example, as shown in fig. 4 and 2A, the orthographic projection of the second electrode 106 on the base substrate 101 is out of the orthographic projection of the first electrode 104 on the base substrate 101.

For example, as shown in fig. 4 and 2A, the orthographic projection of the second electrode 106 on the substrate base plate 101 is beyond the orthographic projection of the first gate 102 on the substrate base plate 101 to facilitate separation of the first gate 102 of adjacent display units 100.

Fig. 5 is a schematic top view of the second electrode shown in fig. 4. As shown in fig. 5, the second electrode 106 includes a hollow area 16.

For example, as shown in fig. 5, the plurality of second electrodes 106 in the plurality of display units are of an integral structure.

Fig. 6 is a schematic top view of the first gate electrode and the first gate line in the display substrate shown in fig. 4. For example, as shown in fig. 6, the display substrate further includes a first gate line 120. For example, the first gate line 120 is electrically connected to the first gate electrode 102.

For example, as shown in fig. 6, the first gates 102 in the same row are electrically connected through the same first gate line 120. For example, the first gate line 120 and the first gate electrode 105 of the same row of display units may be integrally formed, but is not limited thereto. For example, the first gate line 120 and the first gate electrode 102 may be formed of the same film layer by using the same patterning process, but is not limited thereto.

For example, as shown in fig. 6, the first gate electrode 102 and the first gate line 120 partially overlap in a direction perpendicular to the substrate base plate 101.

Fig. 7A is a schematic top view of the first electrode and the first data line in the display substrate shown in fig. 4. For example, as shown in fig. 7A, the display substrate further includes a first data line 140. For example, the first data line 140 is electrically connected to the first electrode 104 to provide a data signal to the first electrode 104. For example, as shown in fig. 7A, the first electrodes 104 in the same column are electrically connected through the same first data line 140. For example, the first electrodes 104 of the same column and the same first data line 140 are integrally formed, but not limited thereto. For example, the first electrode 104 and the first data line 140 may be formed of the same film layer using the same patterning process, but are not limited thereto.

For example, as shown in fig. 7A, the second electrode 106 partially overlaps the first data line 140 in a direction perpendicular to the base substrate 101.

Fig. 7B is a schematic top view of a first gate electrode, a first gate line, a first data line, and a first electrode in a display substrate according to an embodiment of the disclosure. For example, as shown in fig. 7B, the first data line 140 is disposed to cross the first gate line 120, and further for example, the first data line 140 may be perpendicular to the first gate line 120. Fig. 7B schematically illustrates a positional relationship among the first gate line 120, the first gate electrode 102, the first data line 140, and the first electrode 104, and in an embodiment of the present disclosure, the first data line 140 and the first gate line 120 are insulated from each other. For example, as shown in fig. 7B, both sides of the first gate electrode 102 in a direction perpendicular to the extending direction of the first gate line 120 protrude from the first gate line 120. Fig. 7B may be a top view of a portion of the structure in the display substrate shown in fig. 2A or fig. 2B.

In the embodiments of the present disclosure, the display substrate may also adopt other structures, and is not limited to the structures shown in fig. 2A and 2B.

Fig. 8A is a cross-sectional view of a display substrate according to an embodiment of the disclosure. As shown in fig. 8A, the display substrate 2 includes a display unit 200, and the display unit 200 may further include a driving transistor 120T. Only one display unit 200 is shown in fig. 8A. The number of display units 200 may be determined as desired. As shown in fig. 8A, the driving transistor 120T includes a second gate electrode 121, a semiconductor layer 123, a drain electrode 124, a source electrode 125, and a gate insulating layer 122 between the second gate electrode 121 and the semiconductor layer 123. As shown in fig. 8A, the display substrate 2 further includes a third insulating layer 126 on a side of the layer where the source 125 and the drain 124 are located away from the substrate 101, and the first gate 102 is connected to the drain 124 of the driving transistor 120T through a via hole penetrating through the third insulating layer 126. For example, in the embodiment shown in fig. 8A, compared with the embodiment shown in fig. 2A, the first gate electrode 102 of each display cell 200 is not connected to the first gate line 120, but connected to the drain electrode 124 of one driving transistor 120T, another data line (the second data line 125a, see fig. 8C) is connected to the source electrode 125, the second gate electrode 121 is connected to the second gate line 121a (see fig. 8C), and the first electrode 104 shown in fig. 8A is also connected to the first data line, so that independent control of each display cell 200 can be realized. The display substrate shown in fig. 8A is simple in driving method. The second data line may be formed of the same film layer as the source electrode 125 using the same patterning process, for example, the second data line may be integrally formed with the source electrode 125. For example, the first data line may extend in the second direction Y, and the second data line may extend in the second direction Y, but is not limited thereto. For example, the first data line and the second data line may be parallel to each other, but are not limited thereto.

For example, in the embodiments of the present disclosure, the source and the drain are relatively replaceable. For example, one of the source 125 and the drain 124 of the driving transistor 120T is connected to the first gate 102, and the other of the source 125 and the drain 124 of the driving transistor 120T is connected to the second data line 125 a.

For example, as shown in fig. 8A, the second insulating layer 103 is also provided between the first gate electrode 102 and the first insulating layer 105. For example, the first data line and the first electrode are of an integral structure and are integrally formed.

Fig. 8B is a cross-sectional view of a display substrate according to an embodiment of the disclosure. For example, as shown in fig. 8B, the first data line 211 may be separately provided by one layer. A first data line 211 is disposed on the second insulating layer 103, a first insulating layer 105 is disposed on the first data line 211, a via hole is disposed in the first insulating layer 105, a first electrode 104 and a second electrode 106 are disposed on the first insulating layer 105, and the first electrode 104 is connected to the first data line 211.

For example, as shown in fig. 8B, the first electrode 104 and the second electrode 106 may be formed from the same film layer using the same patterning process. For example, as shown in fig. 8B, the cross-section of the first electrode 104 may include a hexagon, but is not limited thereto.

In addition to the above description corresponding to fig. 8A and 8B, the remaining structures and their related descriptions shown in fig. 2A and 2B, respectively, are not repeated herein.

For example, in some embodiments of the present disclosure, as shown in fig. 8A and 8B, an orthogonal projection of the driving transistor 120T on the substrate base 101 falls within an orthogonal projection of the organic light emitting layer 108 on the substrate base 101. For example, as shown in fig. 8A and 8B, the orthographic projection of the driving transistor 120T on the substrate base plate 101 falls within the orthographic projection of the hollow area 16 on the substrate base plate 101.

For example, as shown in fig. 8A and 8B, the source electrode 125 and the second data line 125a may be a unitary structure. In some embodiments of the present disclosure, the source electrode 125, the second data line 125a, and the drain electrode 124 may be formed of the same film layer by using the same patterning process.

Fig. 8C is a schematic view of a second gate line, a first data line, a second data line, a first gate electrode, and a first electrode in a display substrate according to an embodiment of the disclosure. For example, as shown in fig. 8C, the first data line 211 crosses the second gate line 121a, and further for example, the first data line 140 may be perpendicular to the second gate line 121 a. For example, as shown in fig. 8C, the second data line 125a is disposed to cross the second gate line 121a, and further for example, the second data line 125a may be perpendicular to the second gate line 121a, i.e., the first data line 140 is parallel to the second data line 125 a. Fig. 8C schematically illustrates a positional relationship among the second gate line 121a, the first data line 211, the second data line 125a, the first gate electrode 102, and the first electrode 104. In the embodiment of the present disclosure, the first data line 140 and the second gate line 121a are insulated from each other, and the second data line 125a and the first data line 140 are insulated from each other. Fig. 8C may be a top view of a portion of the structure in the display substrate shown in fig. 8A or 8B.

For example, referring to fig. 8A, 8B and 8C, the second gate line 121a is connected to the second gate electrode 121, the first gate electrode 102 is connected to the drain electrode 124, and the first gate electrode 102 and the second gate line 121a are insulated from each other. For example, the second gate line 121a and the second gate electrode 121 may be an integral structure, i.e., formed by the same film layer using the same patterning process.

For example, as shown in fig. 2A, 2B, 8A, and 8B, a portion of the first electrode 104 is located within the via of the first insulating layer 105.

For example, in the embodiment of the disclosure, when the driving transistor is not disposed (for example, the display substrate is as shown in fig. 2A and fig. 2B), a scan signal may be input to the first gate line 120, a data signal may be input to the first data line 140, a reference signal may be input to the second electrode 106, and the first gate line 120 and the first data line 140 cooperate to realize light emission control of a single display unit 100, thereby realizing image display. A signal of the first gate line 120 is applied to the first gate electrode 102, and when a signal is applied to the first electrode 104 through the first data line 140, a channel current is generated, and the display unit 100 emits light. For example, each display unit can be independently controlled in a progressive scanning manner to realize picture display.

For example, in the embodiment of the present disclosure, when the driving transistor is disposed (for example, the display substrate is as shown in fig. 8A and 8B), a scan signal may be input to the second gate line 121a, a source signal may be input to the second data line 125a, a data signal may be input to the first data line 211, and a reference signal may be input to the second electrode 106, so that image display is achieved. For example, the second gate line 121a and the second data line 125a cooperate to determine whether a signal is applied to the first gate electrode 102 of a single display unit 200. When the driving transistor 120T in the display unit 200 is turned on, a source signal inputted to the source 125a through the second data line 125a can be conducted to the drain 124 and further to the first gate 102 of the display unit 200. The display unit 200 emits light by generating a channel current by the data signal on the first gate electrode 102 and the first electrode 104. For example, each display unit can be independently controlled in a progressive scanning manner to realize picture display.

At least one embodiment of the present disclosure provides a display device including any one of the above display substrates.

At least one embodiment of the present disclosure provides a method for manufacturing a display substrate, including the following steps.

S10, the first electrode 104 is formed on the base substrate 101.

S20, a first insulating layer 105 is formed on the base substrate 101, and the first electrode 104 protrudes from the surface of the first insulating layer 105 away from the base substrate 101 to the first insulating layer 105.

S30, forming a second electrode 106 on the first insulating layer 105, where the second electrode 106 includes a hollow area 16, the first electrode 104 is located in the hollow area 16, and the first electrode 104 and the second electrode 106 are spaced apart from each other.

S40, forming an organic light emitting layer 108 in the hollow area 16.

For example, the organic light emitting layer 108 is formed in the hollow area 16 by an inkjet printing process.

For example, the method for manufacturing the display substrate shown in fig. 2A includes the following steps.

S201, forming a first gate electrode 102 and a first gate line 120 (not shown in fig. 2A, refer to fig. 6) on the substrate 101.

S202, a second insulating layer 103 is formed on the first gate electrode 102 and the first gate line 120.

S203, the first electrode 104 and the first data line 140 are formed on the second insulating layer 103 (not shown in fig. 2A, refer to fig. 7A).

S204, a first insulating layer 105 is formed on the first electrode 104 and the first data line 140, and the first electrode 104 protrudes from the first insulating layer 105 from a surface of the first insulating layer 105 far from the substrate 101.

S205, forming a second electrode 106 on the first insulating layer 105, where the second electrode 106 has a hollow area, the first electrode 104 is located in the hollow area 16, and the first electrode 104 and the second electrode 106 are disposed at an interval.

And S206, forming an oil-repellent layer 107 on the second electrode 106.

And S207, forming the organic light-emitting layer 108 in the hollow area of the second electrode 106 by adopting an ink-jet printing mode.

And S208, forming the packaging layer 109.

For example, when forming the second electrode 106, a conductive film layer may be formed first, and then the conductive film layer is patterned to form the second electrode 106 having a hollow area.

For example, the method for manufacturing the display substrate shown in fig. 2B includes the following steps.

S211, a first gate electrode 102 and a first gate line 120 (not shown in fig. 2A, refer to fig. 6) are formed on the substrate base plate 101.

S212, forming a second insulating layer 103 on the first gate electrode 102 and the gate line 120.

S213, forming a first electrode 104 on the second insulating layer 103;

s214, forming a first insulating film on the first electrode 104;

s215, forming a via hole penetrating through the first insulating film in the first insulating film to form a first insulating layer 105;

s216, forming a first electrode 104 and a second electrode 106 on the first insulating layer 105, where the second electrode 106 has a hollow area, protruding from the surface of the first insulating layer 105 away from the substrate 101 to the first insulating layer 105, the first electrode 104 is located in the hollow area 16, and the first electrode 104 and the second electrode 106 are disposed at an interval.

And S217, forming an oil-repellent layer 107 on the second electrode 106.

S218, forming the organic light emitting layer 108 in the hollow area of the second electrode 106 by ink jet printing.

And S219, forming the packaging layer 109.

For example, the method for manufacturing the display substrate shown in fig. 8A includes the following steps.

S801, a second gate electrode 121 and a second gate line 121a are formed on the base substrate 101 (not shown in fig. 8A, refer to fig. 8C).

S802, a gate insulating layer 122 is formed on the second gate electrode 121 and the second gate line 121 a.

S803, a semiconductor layer 123 is formed on the gate insulating layer 122.

S804, the second data line 125a, the drain electrode 124, and the source electrode 125 are formed on the semiconductor layer 123, and the second data line 125a and the source electrode 125 are integrally formed.

And S805, forming a third insulating layer 126 on the drain electrode 124 and the source electrode 125.

And S806, forming a via hole penetrating through the third insulating layer 126 in the third insulating layer 126.

S807, forming a first grid electrode 102, wherein the first grid electrode 102 is connected with the drain electrode 124 through a through hole;

s808, forming a second insulating layer 103 on the first gate 102;

s809, forming a first electrode 104 and a first data line on the second insulating layer 103;

s810, forming a first insulating layer 105 on the first electrode 104 and the first data line, wherein the first electrode 104 protrudes from the first insulating layer 105 from a surface of the first insulating layer 105 far from the substrate 101.

S811, forming a second electrode 106 on the first insulating layer 105, where the second electrode 106 has a hollow area, the first electrode 104 is located in the hollow area 16, and the first electrode 104 and the second electrode 106 are disposed at an interval.

And S812, forming the oil-repellent layer 107 on the second electrode 106.

S813, forming the organic light emitting layer 108 in the hollow area of the second electrode 106 by ink jet printing.

And S814, forming the packaging layer 109.

For example, in the display substrate shown in fig. 8B, the first electrode 104 and the second electrode 106 may be formed by the same film layer using the same patterning process. For example, the first data line 211 is formed first, then the first insulating film is formed, a via hole is formed in the first insulating film to form the first insulating layer 105, a conductive film is formed on the first insulating layer 105, the conductive film is patterned to simultaneously form the first electrode 104 and the second electrode 106, the first electrode 104 protrudes from the first insulating layer 105, and the first electrode 104 and the second electrode 106 are spaced apart from each other.

For example, the display substrate provided in the embodiments of the present disclosure may also be manufactured in other manners, and is not limited to the manners described above.

For example, in the embodiment of the present disclosure, the first insulating layer 105, the second insulating layer 103, the third insulating layer 126, and the gate insulating layer 122 may be made of insulating materials. For example, the insulating material includes an inorganic insulating material and an organic insulating material. For example, at least one of an inorganic insulating material of silicon oxide, silicon nitride, and silicon oxynitride. For example, the organic insulating material includes polyimide or the like.

For example, in the embodiment of the present disclosure, the substrate base plate 101 may be a rigid base plate or a flexible base plate. For example, the rigid substrate includes a glass substrate. For example, the flexible substrate includes a polyimide substrate.

For example, in the embodiment of the present disclosure, the first gate 102, the second gate 121, the source 125, and the drain 124 may be made of a metal material.

For example, in the embodiments of the present disclosure, the encapsulation layer 109 may be made of an organic material or an inorganic material. For example, the encapsulation layer 109 may be formed using a first inorganic material layer, an organic material, and a second inorganic material layer sequentially disposed on a substrate base substrate.

For example, the organic light emitting layer 108 may be formed using at least one of the following apparatuses for manufacturing a display substrate.

Fig. 9 is a schematic view of an apparatus for manufacturing a display substrate for forming an organic light emitting layer according to an embodiment of the disclosure. As shown in fig. 9, the apparatus 4 for manufacturing a display substrate includes a plurality of inkjet printing units 401, each inkjet printing unit 401 including an ink inlet 402 and an inkjet unit 403. For example, each inkjet printing unit 401 may correspond to a row or a column of display units.

Fig. 10 is a schematic view of an inkjet printing unit in an apparatus for manufacturing a display substrate according to an embodiment of the present disclosure. As shown in fig. 10, each inkjet printing unit 401 includes an ink inlet 402 and a plurality of ink flow-dividing channels 404 connected to the ink inlet 402, each ink flow-dividing channel 404 having an ink ejection port 43. The ink ejection unit 403 includes a plurality of ink ejection ports 43, and each ink ejection port 43 corresponds to one ink diversion passage 404. The number of the ink flow-dividing passages 404 may be the same as the number of the ink ejection ports 43.

For example, the ink ejection port 43 is tapered from a direction close to the ink inlet port 402 to a direction away from the ink inlet port 402.

For example, the shape of the ink ejection port 43 includes at least one of a circle and a square, but is not limited thereto, and may be set according to the shape of a light emitting region of the display unit.

Fig. 11 is a schematic diagram of an inkjet unit in an inkjet printing unit in an apparatus for manufacturing a display substrate according to an embodiment of the present disclosure. As shown in fig. 11, the ink ejection unit 403 includes a plurality of circular ink ejection ports 43.

Fig. 12 is a schematic diagram of an inkjet unit in an inkjet printing unit in an apparatus for manufacturing a display substrate according to an embodiment of the present disclosure. As shown in fig. 12, the ink ejection unit 403 includes a plurality of rectangular ink ejection ports 43.

Fig. 13 is a schematic top view of a rectangular ink ejection port in an ink ejection unit of an apparatus for fabricating a display substrate according to an embodiment of the disclosure.

Fig. 14 is a schematic perspective view of a rectangular ink ejection port in an ink ejection unit of an apparatus for manufacturing a display substrate according to an embodiment of the disclosure.

Fig. 15 is a schematic structural diagram of an inkjet unit in an apparatus for manufacturing a display substrate according to an embodiment of the present disclosure. As shown in fig. 15, the ink ejection unit 403 includes a plurality of ink ejection ports 43 arranged in an array.

For example, the ink inlet 402 is connected to an external pipeline, different inks can be input into different inlets 402 after the ink jet printing device is integrated with the device, for example, red, green and blue (RGB) organic solutions are respectively injected into three ports, the ink diversion channel mainly has the function of diverting the ink at one ink inlet into a plurality of branches to the ink jetting port 43 according to needs to correspond to a single sub-pixel, the ink jet printing device can control the ink jet printing of the ink through an external driving circuit, and the ink jetting port 43 is designed to realize the efficient formation of the ink, and the droplets fall into the sub-pixel to form an organic light emitting layer. For example, in fig. 9, three ink inlets 402 arranged in sequence from left to right are configured to input a first ink, a second ink, and a third ink, respectively, and the first ink, the second ink, and the third ink are different from each other, wherein each two of the first ink, the second ink, and the third ink are different from each other. For example, a first ink is configured to form a column or row of first subpixels, a second ink is configured to form a column or row of second subpixels, and a third ink is configured to form a column or row of third subpixels. For example, a first ink, a second ink, and a third ink are simultaneously input into three different ink inlets 402 to simultaneously complete the fabrication of a first sub-pixel, a second sub-pixel, and a third sub-pixel. For example, the at least three ink inlets 402 are configured to simultaneously input a first ink, a second ink, and a third ink, respectively. Of course, in the same device for manufacturing the display substrate, a plurality of first ink jetting ports for inputting the first ink, a plurality of second ink jetting ports for inputting the second ink, and a plurality of third ink jetting ports for inputting the third ink may be included, so as to improve the efficiency of ink jet printing.

For example, the equipment for manufacturing the display substrate can accurately print the ink in a shunting and ink-jetting mode to the corresponding sub-pixels, the problem of uneven organic film layers and the like is avoided, in addition, the ink of three different solvents such as RGB can be simultaneously and efficiently printed on the substrate, and the limitation of film forming efficiency and large area is broken.

For example, the embodiment of the invention provides the OLED display substrate capable of ink-jet printing and the printing device thereof, so that the film forming efficiency and quality of the organic light emitting layer of the OLED display substrate are improved, and the technical bottleneck that the evaporation process is difficult to realize large area is solved, thereby solving the technical problems that the OLED display panel is difficult to realize high-efficiency mass production and the substrate is difficult to realize large area.

It is noted that the thickness of layers or regions in the drawings used to describe embodiments of the present disclosure are exaggerated for clarity. It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, it can be "directly on" or "under" the other element or intervening elements may be present.

In the embodiments of the present disclosure, the patterning or patterning process may include only a photolithography process, or include a photolithography process and an etching step, or may include printing, inkjet, or other processes for forming a predetermined pattern. The photolithography process includes processes of film formation, exposure, development and the like, and forms a pattern by using a photoresist, a mask plate, an exposure machine and the like. The corresponding patterning process may be selected according to the structures formed in embodiments of the present disclosure.

Features of the same embodiment of the disclosure and of different embodiments may be combined with each other without conflict.

The above description is only for the specific embodiments of the present disclosure, but the scope of the present disclosure is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present disclosure, and all the changes or substitutions should be covered within the scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.

Claims

1. A display substrate includes a plurality of display units on a substrate, each display unit including an organic light emitting layer, a first gate electrode, a first electrode and a second electrode, the first electrode and the second electrode being spaced apart from each other, the second electrode including a hollow area, the first electrode and the organic light emitting layer being located in the hollow area,

wherein the organic light emitting layer, the first electrode and the second electrode are located above the first gate, and an orthographic projection of the organic light emitting layer on the substrate falls within an orthographic projection of the first gate on the substrate.

2. The display substrate according to claim 1, wherein a dimension of the second electrode in a direction perpendicular to the substrate is larger than a dimension of the organic light emitting layer in a direction perpendicular to the substrate.

3. The display substrate of claim 1, wherein the first electrode and the second electrode are oppositely disposed in a direction parallel to the substrate.

4. A display substrate according to any one of claims 1 to 3, further comprising a first insulating layer, wherein the second electrode and the organic light-emitting layer are both in contact with a surface of the first insulating layer remote from the base substrate.

5. The display substrate of claim 4, wherein the first electrode protrudes from the first insulating layer from the surface of the first insulating layer away from the substrate.

6. The display substrate according to any one of claims 1 to 3, further comprising a first insulating layer and a second insulating layer, wherein the second insulating layer is on the first gate electrode, the first insulating layer is on the second insulating layer, the second electrode and the organic light emitting layer are both in contact with a surface of the first insulating layer remote from the base substrate, and the first electrode protrudes from the first insulating layer from the surface of the first insulating layer remote from the base substrate.

7. The display substrate according to any one of claims 1 to 3, wherein the plurality of display cells form a plurality of rows and a plurality of columns, the first gate electrodes of the same row are electrically connected by the same first gate line, and the first electrodes of the same column are electrically connected by the same first data line.

8. The display substrate according to claim 7, wherein the second electrode partially overlaps the first data line in a direction perpendicular to the substrate.

9. The display substrate according to any one of claims 1 to 3, wherein the plurality of second electrodes in the plurality of display units are of a unitary structure.

10. The display substrate according to any one of claims 1 to 3, further comprising a second insulating layer between the first electrode and the first gate electrode, wherein the first gate electrode and the first electrode are insulated from each other by the second insulating layer.

11. A display substrate according to any one of claims 1 to 3, wherein a side of the second electrode remote from the substrate is provided with an oil-phobic layer; and the orthographic projection of the oil drainage layer on the substrate falls into the orthographic projection of the second electrode on the substrate.

12. A display substrate according to any one of claims 1 to 3, further comprising a driving transistor, wherein one of a source and a drain of the driving transistor is connected to the first gate electrode, and the other of the source and the drain of the driving transistor is connected to a second data line.

13. A display substrate according to any one of claims 1 to 3, wherein the organic light emitting layer is a semiconductor layer, and the organic light emitting layer covers the first electrode.

14. The display substrate of any of claims 1-3, wherein the hollowed-out area comprises at least one of a circle and a rectangle, and the first electrode is located at a center of the hollowed-out area.

15. A display device comprising the display substrate of any one of claims 1-14.

16. A manufacturing method of a display substrate comprises the following steps:

forming a first electrode on a substrate;

forming a first insulating layer on the substrate, wherein the first electrode protrudes from the surface of the first insulating layer far away from the substrate;

forming a second electrode on the first insulating layer, wherein the second electrode comprises a hollow area, the first electrode is positioned in the hollow area, and the first electrode and the second electrode are arranged at intervals; and

forming an organic light-emitting layer in the hollow area by adopting an ink-jet printing process,

the manufacturing method further comprises the following steps: forming a first gate electrode on the substrate base plate and a second insulating layer on the first gate electrode before forming the first electrode on the substrate base plate, wherein the first electrode is formed on the second insulating layer;

wherein an orthographic projection of the organic light emitting layer on the substrate falls within an orthographic projection of the first gate electrode on the substrate.

17. The method of claim 16, wherein the first electrode is formed first and then the first insulating layer is formed.

18. The method of manufacturing a display substrate according to claim 16, wherein the first insulating layer is formed first, a via hole penetrating the first insulating layer is formed, and then the first electrode is formed, and a portion of the first electrode is located in the via hole.

19. The method of manufacturing a display substrate according to claim 18, wherein the first electrode and the second electrode are formed by using the same patterning process.

20. The method of manufacturing a display substrate according to any one of claims 16 to 19, wherein a plurality of organic light emitting layers that can emit light of different colors are formed simultaneously.