CN110161629B - Integrated adjustable light delay line based on micro-ring array and preparation method thereof - Google Patents
Integrated adjustable light delay line based on micro-ring array and preparation method thereof Download PDFInfo
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- CN110161629B CN110161629B CN201910309871.4A CN201910309871A CN110161629B CN 110161629 B CN110161629 B CN 110161629B CN 201910309871 A CN201910309871 A CN 201910309871A CN 110161629 B CN110161629 B CN 110161629B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
- G02B6/2861—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using fibre optic delay lines and optical elements associated with them, e.g. for use in signal processing, e.g. filtering
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29338—Loop resonators
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Abstract
The invention provides an integrated adjustable light delay line based on a micro-ring array, which comprises an SOI substrate, wherein the upper surface of the SOI substrate is provided with the micro-ring array, an input waveguide and an output waveguide, wherein the micro-ring array consists of a plurality of coupling resonant cavity optical waveguides, a delay waveguide and a coupling waveguide; a plurality of coupling resonant cavity optical waveguides are sequentially distributed on the upper surface of the SOI substrate from left to right; an odd number of micro-rings which are cascaded in front and back are arranged in the optical waveguide of the coupling resonant cavity, wherein the two micro-rings positioned at the head and the tail are coupled and connected with the coupling waveguide; the adjacent coupling resonant cavity optical waveguides are connected through the coupling waveguide, and the coupling waveguide between the adjacent coupling resonant cavity optical waveguides is connected with the delay waveguide; the outer ends of the first and last micro-rings in the first coupling resonant cavity optical waveguide are respectively connected with the input waveguide and the output waveguide. The invention also provides a preparation method of the integrated adjustable light delay line based on the micro-ring array. The invention can generate the delay amount with higher delay precision for the input optical signal and increase the bandwidth of the optical signal.
Description
Technical Field
The invention relates to the field of optical device preparation, in particular to an integrated adjustable optical delay line based on a micro-ring array and a preparation method thereof.
Background
The adjustable light delay line is one of key modules in signal processing and communication, and is mainly used for delaying the microwave frequency band in the phased array radar. The traditional phased array radar has the restriction of factors such as aperture effect, transit time and the like, and the light-adjustable delay line can overcome the problems and realize instantaneous bandwidth under a large angle.
However, the existing optical delay line generally has the problems of large size and weight, poor portability, low delay precision, incapability of meeting the use requirement and the like. The Integrated tunable optical delay line is generally divided into two schemes, one scheme is based on SCISSOR (Side-coupled Integrated Spaced Of detectors) or photonic crystal waveguides, and the other scheme is to add different delay amounts to light with different wavelengths after filtering the input light. The former has the advantages of continuous time delay, large loss and narrow bandwidth; the latter is wide in bandwidth but the additional delay amount is a fixed minimum delay, resulting in insufficient delay accuracy.
Disclosure of Invention
In order to overcome the defects of large optical loss, narrow bandwidth, low delay precision and the like in the prior art, the invention provides the integrated adjustable optical delay line based on the micro-ring array and the preparation method thereof, which can enable an input optical signal to generate delay quantity with higher delay precision, reduce the loss of input light and increase the bandwidth.
In order to solve the technical problems, the technical scheme of the invention is as follows:
an integrated adjustable Optical delay line based on a micro-ring array comprises an SOI substrate, wherein the upper surface of the SOI substrate is provided with the micro-ring array consisting of a plurality of Coupled-Resonator Optical waveguides (CROW), a plurality of delay waveguides and a plurality of Coupled waveguides, an input Waveguide and an output Waveguide; a plurality of coupling resonant cavity optical waveguides are sequentially distributed on the upper surface of the SOI substrate from left to right; an odd number of micro-rings which are sequentially cascaded in sequence are arranged in each coupling resonant cavity optical waveguide, wherein the two micro-rings positioned at the head and the tail of the coupling resonant cavity optical waveguide are coupled and connected with a coupling waveguide at one end close to the outer side; the adjacent coupling resonant cavity optical waveguides are connected through the coupling waveguide, and the coupling waveguide between the adjacent coupling resonant cavity optical waveguides is connected with the delay waveguide; and one end of the coupling resonant cavity optical waveguide at one end of the micro-ring array, which is positioned at the first end and the last end of the two micro-rings and close to the outer side, is respectively connected with an input waveguide and an output waveguide.
In the technical scheme, the coupling resonant cavity optical waveguide formed by odd micro rings sequentially cascaded in front and at the back in the micro ring array can provide a continuous adjustable time delay function in a small range; because the product of the delay amount generated by the optical signal in the micro-ring and the generated bandwidth is approximately a constant, the micro-ring of the scheme is only used for providing a small-range delay, and the large-range stepping delay is realized by the delay waveguide, so that the bandwidth of the optical signal is increased; and the coupling waveguides in the micro-ring array are used for coupling and connecting the adjacent coupling resonant cavity optical waveguides and the delay waveguides. Specifically, when input light meets the resonance condition of the first coupling resonant cavity optical waveguide, the input light enters the first coupling resonant cavity optical waveguide and is directly output through the output waveguide; when the input light meets the resonance condition of the second coupling resonant cavity optical waveguide, the input light enters the first coupling resonant cavity optical waveguide, then passes through a section of time delay waveguide, then enters the second coupling resonant cavity optical waveguide, and then is output through the output waveguide. Therefore, the technical scheme can adjust the wavelength of the input light to the resonance wavelength of the target coupling resonant cavity optical waveguide by adjusting the wavelength of the input light, so that the input light can generate the required time delay.
Preferably, the central wavelengths of every two adjacent coupled-cavity optical waveguides in the micro-ring array are equally spaced, and the central wavelengths of the coupled-cavity optical waveguides are obtained by a resonance formula of the micro-ring, wherein the formula is as follows:
m·λ0＝neff·L
wherein m is the number of resonance stages, λ0Is a central wavelength, neffL is the perimeter of the microring, which is the effective index of the waveguide. According to the optimal scheme, by designing the center wavelengths at equal intervals, the resonance peaks of other coupling resonant cavity optical waveguides can be simultaneously accommodated between the two resonance peaks of one coupling resonant cavity optical waveguide, and the crosstalk of the adjacent coupling resonant cavity optical waveguides is avoided.
Preferably, the radii of the micro-rings in each of the coupled-resonator optical waveguides are the same, and the radii of the micro-rings in different coupled-resonator optical waveguides linearly increase from left to right according to the distribution positions of the coupled-resonator optical waveguides, wherein the radius difference of the micro-rings is determined according to the designed central wavelength interval.
Preferably, the coupling waveguide is disposed in a bent manner at a position where the coupling waveguide is coupled to the micro-ring, and the bent coupling waveguide is configured to satisfy a coupling coefficient requirement of the micro-ring.
Preferably, the coupling waveguide is wedge-shaped at the location where it connects to the delay waveguide.
Preferably, the SOI substrate is composed of a silicon substrate and a silicon dioxide buried layer deposited on the upper surface of the silicon substrate, a silicon core layer is arranged on the upper surface of the SOI substrate, a silicon dioxide cladding layer is arranged on the upper surface of the silicon core layer, and the micro-ring array, the input waveguide and the output waveguide are arranged in the silicon core layer.
Preferably, the thickness of the silicon dioxide cladding layer in the integrated adjustable light delay line is 900nm, the thickness of the silicon core layer is 220nm, the thickness of the silicon dioxide buried layer is 3 μm, and the thickness of the silicon substrate is 700 μm.
Preferably, the integrated tunable optical delay line further comprises a plurality of thermo-optic tuners, and one thermo-optic tuner is covered and arranged on the upper surface of each micro-ring. The preferred scheme provides a scheme when the wavelength of an input optical signal is fixed, and the resonant frequency of the micro-ring is shifted by inputting a control signal to the thermo-optical regulator, so that the number of input light passing through the optical waveguide of the coupling resonant cavity is changed, and the continuous adjustment of the delay amount of the input light is realized.
Preferably, the thermo-optic tuner is made of nickel-chromium and gold by sputtering nickel-chromium and gold on the corresponding positions of the micro-ring.
The invention also provides a preparation method of the integrated adjustable light delay line based on the micro-ring array, which comprises the following steps:
s1: coating electronic glue on the SOI, and transferring the patterns of the coupling resonant cavity optical waveguide, the delay waveguide, the coupling waveguide, the input waveguide and the output waveguide onto the electronic glue by using an electron beam exposure technology;
s2: and etching the exposure area by using an inductively coupled plasma etching method, and then removing photoresist to finish the preparation of the light delay line.
Compared with the prior art, the technical scheme of the invention has the beneficial effects that:
(1) the micro-ring array arranged on the upper surface of the SOI substrate can realize small-range continuous delay and large-range stepping delay, so that an input optical signal can generate delay quantity with higher delay precision;
(2) the micro-rings in the adjacent coupling resonant cavity optical waveguides are provided with radius differences, so that the micro-ring array has the property of a filter, and the crosstalk phenomenon of the adjacent coupling resonant cavity optical waveguides is avoided;
(3) the micro-ring in the optical waveguide of the coupling resonant cavity provides a small-range delay amount, so that the output bandwidth is larger;
(4) the integrated adjustable light delay line is manufactured on the basis of an SOI substrate, so that the integrated adjustable light delay line has the characteristic of stable performance;
(5) the silicon core layer with the micro-ring array is covered with a silicon dioxide cladding layer, so that the loss of optical signals is effectively reduced.
Drawings
Fig. 1 is a schematic structural diagram of an integrated tunable optical delay line according to this embodiment.
Fig. 2 is a schematic view of a partial structure of the micro-ring array of this embodiment.
Fig. 3 is a flowchart of a method for manufacturing an integrated tunable optical delay line based on a micro-ring array according to this embodiment.
Fig. 4 is a simulated spectral response graph of the present embodiment.
Fig. 5 is a diagram illustrating a test result of the corresponding spectrum curve and the delay data in this embodiment.
The optical waveguide comprises 1-coupling resonant cavity optical waveguide, 101-micro ring, 2-time delay waveguide, 3-coupling waveguide, 4-input waveguide and 5-output waveguide.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the patent;
for the purpose of better illustrating the embodiments, certain features of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product;
it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
The technical solution of the present invention is further described below with reference to the accompanying drawings and examples.
Example 1
Fig. 1 and 2 are schematic structural diagrams of the integrated tunable optical delay line based on the micro-ring array according to this embodiment.
The integrated tunable optical delay line based on the micro-ring array comprises an SOI substrate, wherein the upper surface of the SOI substrate is provided with a plurality of coupling resonant cavity optical waveguides 1, a plurality of delay waveguides 2, a plurality of coupling waveguides 3, an input waveguide 4 and an output waveguide 5, and the plurality of coupling resonant cavity optical waveguides 1 are sequentially distributed on the upper surface of the SOI substrate from left to right; an odd number of micro-rings 101 sequentially cascaded in sequence are arranged in each coupling resonant cavity optical waveguide 1, wherein two micro-rings 101 positioned at the head and the tail of the coupling resonant cavity optical waveguide 1 are coupled and connected with a coupling waveguide 3 at one end close to the outer side; the adjacent coupling resonant cavity optical waveguides 1 are connected through a coupling waveguide 3, the coupling waveguide 3 between the adjacent coupling resonant cavity optical waveguides 1 is connected with a delay waveguide 2, and the connecting position of the coupling waveguide 3 and the delay waveguide 2 is in a wedge shape; one end of the coupling resonant cavity optical waveguide 1 at one end of the micro-ring array, which is positioned at the head and the tail of the two micro-rings 101 and close to the outer side, is respectively connected with an input waveguide 4 and an output waveguide 5.
This embodiment is used to achieve 8 delays from 0 to 105ps with a delay step of 15ps, where the delay is 0 with respect to the first coupled-cavity optical waveguide 1.
The integrated tunable optical delay line of this embodiment includes 8 coupled cavity optical waveguides 1, and considering that the bandwidth of an optical signal output by only one micro-ring is too small and the excessive number of micro-rings may cause extra process errors, each coupled cavity optical waveguide 1 in this embodiment includes 3 micro-rings 101 cascaded in sequence.
In this embodiment, the distance between the central wavelengths of every two adjacent coupled cavity optical waveguides 1 in the micro-ring array is equal, and the central wavelength of the coupled cavity optical waveguide 1 is obtained by the resonance formula of the micro-ring, which is as follows:
m·λ0＝neff·L
wherein m is the number of resonance stages, λ0Is a central wavelength, neffL is the perimeter of the microring, which is the effective index of the waveguide. The center wavelength of the coupled-cavity optical waveguide 1 can be changed by changing the radius of the microring 101.
In this embodiment, the radii of the micro-rings 101 in the respective coupling cavity optical waveguides 1 are the same, and the radii of the micro-rings 101 in the different coupling cavity optical waveguides 1 are linearly increased from left to right according to the distribution positions of the coupling cavity optical waveguides 1.
Furthermore, considering that 7 resonant peaks need to be accommodated between two resonant peaks of a coupled-cavity optical waveguide 1, a larger free spectral range is required, corresponding to a relatively smaller microring radius.
Through simulation calculation, the radius difference of the micro-rings 101 in the adjacent coupled-cavity optical waveguides 1 in this embodiment is 12nm, wherein the radius of the micro-ring 101 in the first coupled-cavity optical waveguide 1 is 4 μm, the radius of the micro-ring 101 in the second coupled-cavity optical waveguide 1 is 4.012 μm, and so on, and the radius of the micro-ring 101 in the last coupled-cavity optical waveguide 1 is 4.084 μm. In addition, the width of the microring 101 in this embodiment is 480nm, the thickness is 220nm, and the width of the free spectral range is 22.7 nm.
In this embodiment, the coupling waveguides 3 disposed at both ends of the optical waveguide 1 of the coupling cavity have a width of 400nm and a thickness of 220nm, and the coupling waveguides 3 are disposed in a bent manner at positions where they are coupled to the micro-ring 101.
The length of the delay waveguide 2 in this embodiment is determined by the delay step, and the delay of light in the waveguide is determined by the following formula:
t＝ng·l/c
wherein t represents a delay, ngFor the group index, l is the length of the waveguide in the direction of light propagation, and c is the speed of light. Through simulation calculation and experimental tests, the loss of the waveguides with various widths and the delay amount are determined, the loss of the waveguides with various widths when the same delay amount is achieved is compared, and factors such as the size of a device are comprehensively considered, so that the loss can be minimum when the width of the delay waveguide 2 used between the adjacent micro-rings is 2 microns. Therefore, the width of the delay waveguide 2 used in this embodiment is 2 μm, the length is 590 μm, and the thickness is 220 nm. Since the width of the coupling waveguide 3 is 400nm and the width of the delay waveguide 2 is 2 μm, the requirement at the junction of the coupling waveguide 3 and the delay waveguide 2 is linearly widened from 400nm to 2 μm, or narrowed from 2 μm to 400nm, the coupling waveguide 3 is tapered at the position where it is connected to the delay waveguide 2.
The embodiment also relates to a preparation method of the integrated adjustable light delay line based on the micro-ring array, which comprises the following steps:
s1: spin-coating electronic glue on an SOI substrate, and transferring the patterns of a coupling resonant cavity optical waveguide 1, a delay waveguide 2, a coupling waveguide 3, an input waveguide 4 and an output waveguide 5 onto the electronic glue by using an electron beam exposure technology;
s2: and etching the exposure area by using an inductively coupled plasma etching method, and then removing photoresist to complete the preparation of the integrated tunable light delay line based on the micro-ring array.
In a specific implementation process, the present embodiment adjusts the wavelength of the input optical signal to the resonant wavelength corresponding to the target coupled resonant cavity optical waveguide group, so as to control the target coupled resonant cavity optical waveguide group through which the optical signal passes, thereby determining the number of delay waveguides through which the optical signal passes, and obtaining the required delay.
Input light is input through the input waveguide 4, and when the wavelength of the input light meets the resonance condition of the first coupling resonant cavity optical waveguide 1, the input light enters the first coupling resonant cavity optical waveguide 1 and then 0-delay light is output from the output waveguide 5; when the wavelength of input light meets the resonance condition of the second coupling resonant cavity optical waveguide 1, the input light enters the first coupling resonant cavity optical waveguide 1, then passes through a section of delay waveguide, then enters the second coupling resonant cavity optical waveguide 1, and then outputs light with the delay step of 15ps through the output waveguide 5; when the wavelength of the input light meets the resonance condition of the third coupling resonant cavity optical waveguide 1, the input light enters the first coupling resonant cavity optical waveguide 1, passes through the first section of delay waveguide, then enters the second coupling resonant cavity optical waveguide 1, passes through the second section of delay waveguide, then enters the third coupling resonant cavity optical waveguide 1, and is output through the output waveguide 5, and the delay of the output light is 30 ps.
As shown in fig. 4, a simulated spectral response graph of the present embodiment is shown, wherein the x-axis represents the wavelength of the input light and the y-axis represents the output power. Fig. 5 is a schematic diagram of a test result of the simulated spectral response curve and the delay data of the present embodiment, in which an x-axis represents a wavelength of input light, and a y-axis represents output power and delay duration. As can be seen, the crosstalk of the adjacent channels of this embodiment is about 40dB, and the 3dB bandwidth is about 1.1 nm.
In the embodiment, the coupled cavity optical waveguide 1 formed by the micro-rings 101 cascaded in tandem can provide a continuously adjustable delay function in a small range, and the delay waveguide 2 provides a step-by-step delay function in a large range. In the embodiment, by the combined application of the coupling cavity optical waveguide 1 and the delay waveguide 2, it is considered that the product of the delay and the bandwidth of light in the micro-ring is approximately a constant, that is, a larger delay is generated in the resonant peak of the micro-ring, and the bandwidth of the micro-ring is correspondingly reduced.
Example 2
The integrated tunable optical delay line based on the micro-ring array comprises an SOI substrate, wherein the upper surface of the SOI substrate is provided with a plurality of coupling resonant cavity optical waveguides 1, a plurality of delay waveguides 2, a plurality of coupling waveguides 3, an input waveguide 4 and an output waveguide 5, and the plurality of coupling resonant cavity optical waveguides 1 are sequentially distributed on the upper surface of the SOI substrate from left to right; an odd number of micro-rings 101 sequentially cascaded in sequence are arranged in each coupling resonant cavity optical waveguide 1, wherein two micro-rings 101 positioned at the head and the tail of the coupling resonant cavity optical waveguide 1 are coupled and connected with a coupling waveguide 3 at one end close to the outer side; the adjacent coupling resonant cavity optical waveguides 1 are connected through a coupling waveguide 3, the coupling waveguide 3 between the adjacent coupling resonant cavity optical waveguides 1 is connected with a delay waveguide 2, and the connecting position of the coupling waveguide 3 and the delay waveguide 2 is in a wedge shape; one end of the coupling resonant cavity optical waveguide 1 at one end of the micro-ring array, which is positioned at the head and the tail of the two micro-rings 101 and close to the outer side, is respectively connected with an input waveguide 4 and an output waveguide 5.
This embodiment is used to achieve 8 delays from 0 to 105ps with a delay step of 15ps, where the delay is 0 with respect to the first coupled-cavity optical waveguide 1.
The integrated tunable optical delay line of this embodiment includes 8 coupled cavity optical waveguides 1, and considering that the bandwidth of one micro-ring is too small and the excessive number of micro-rings may cause extra process errors, each coupled cavity optical waveguide 1 in this embodiment includes 3 micro-rings 101 cascaded in tandem.
The width of the coupling waveguide 3 in this embodiment is 400nm, the thickness is 220nm, and the coupling waveguide 3 is arranged in a bent manner at a position where it is coupled with the microring 101; the delay waveguide 2 has a width of 2 μm, a length of 590 μm and a thickness of 220 nm. Since the width of the delay waveguide 2 differs considerably from the width of the coupling waveguide 3, the coupling waveguide 3 is wedge-shaped at the location where it is connected to the delay waveguide 2.
The SOI substrate of the embodiment is composed of a silicon substrate and a silicon dioxide buried layer deposited on the upper surface of the silicon substrate, a silicon core layer is arranged on the upper surface of the SOI substrate, a silicon dioxide cladding layer is arranged on the upper surface of the silicon core layer, a micro-ring array, an input waveguide 4 and an output waveguide 5 are arranged in the silicon core layer, wherein the thickness of the silicon dioxide thin layer is 900nm, the thickness of the silicon core layer is 220nm, the thickness of the silicon dioxide buried layer is 3 microns, the thickness of the silicon substrate is 700 microns, and the micro-ring array, the input waveguide 4 and the output waveguide 5 are arranged in the silicon core layer.
In addition, in the present embodiment, 1 thermo-optic tuner is covered on the upper surface of each micro-ring 101, wherein the thermo-optic tuner is made of nickel-chromium and gold.
The flowchart of the method for preparing the integrated tunable optical delay line based on the micro-ring array is shown in fig. 3, and includes the following steps:
s1: coating electronic glue on the SOI, and transferring the patterns of the coupling resonant cavity optical waveguide, the delay waveguide, the coupling waveguide, the input waveguide and the output waveguide onto the electronic glue by using an electron beam exposure technology;
s2: etching the exposure area by using an inductively coupled plasma etching method, and then removing photoresist;
s3: covering a layer of silicon dioxide on the surface of the device by utilizing inductively coupled plasma chemical vapor deposition to prepare a silicon dioxide protective cladding;
s4: spin-coating a layer of photoresist on the silicon dioxide layer, transferring the resistor to the photoresist by using a photoetching technology, manufacturing a layer of nickel-chromium as a resistor layer by using an electron beam evaporation technology, and then removing the photoresist;
s5: spin-coating a layer of photoresist on the silicon dioxide layer, transferring the electrode to the photoresist by using a photolithography technique, manufacturing a layer of gold electrode as a conducting layer by using an electron beam evaporation technique, and then removing the photoresist to complete the preparation of the integrated tunable light delay line based on the micro-ring array.
In the specific implementation process, the wavelength of input light is adjusted to the resonance wavelength of the target coupling resonant cavity optical waveguide, so that the target coupling resonant cavity optical waveguide group through which the input light passes can be controlled, the number of the time delay waveguides through which the light passes is determined, and the required time delay is obtained.
Input light is input through the input waveguide 4, and when the wavelength of the input light meets the resonance condition of the first coupling resonant cavity optical waveguide, the input light enters the first coupling resonant cavity optical waveguide 1 and then 0-delay light is output from the output waveguide 5; when the wavelength of input light meets the resonance condition of the second coupling resonant cavity optical waveguide 1, the input light enters the first coupling resonant cavity optical waveguide 1, then passes through a section of delay waveguide, then enters the second coupling resonant cavity optical waveguide 1, and then outputs light with the delay step of 15ps through the output waveguide 5; when the wavelength of the input light meets the resonance condition of the third coupling resonant cavity optical waveguide 1, the input light enters the first coupling resonant cavity optical waveguide 1, passes through the first section of delay waveguide, then enters the second coupling resonant cavity optical waveguide 1, passes through the second section of delay waveguide, then enters the third coupling resonant cavity optical waveguide 1, and is output through the output waveguide 5, and the delay of the output light is 30 ps.
The thermo-optic tuner added in this embodiment is used to provide a scheme when the wavelength of an input optical signal is fixed, and a control signal is input to the thermo-optic tuner to shift the resonant frequency of the micro-ring, so as to change the number of input light passing through the optical waveguide of the coupling resonant cavity, thereby implementing continuous adjustment of the delay amount of the input light, and simultaneously, eliminating the influence of wavelength drift caused by process errors.
The same or similar reference numerals correspond to the same or similar parts;
the terms describing positional relationships in the drawings are for illustrative purposes only and are not to be construed as limiting the patent;
it should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (7)
1. An integrated adjustable light delay line based on a micro-ring array is characterized in that: the micro-ring array comprises an SOI substrate, wherein the upper surface of the SOI substrate is provided with a micro-ring array, an input waveguide and an output waveguide, wherein the micro-ring array consists of a plurality of coupling resonant cavity optical waveguides, a plurality of delay waveguides and a plurality of coupling waveguides; a plurality of coupling resonant cavity optical waveguides are sequentially distributed on the upper surface of the SOI substrate from left to right; an odd number of micro-rings which are sequentially cascaded in sequence are arranged in each coupling resonant cavity optical waveguide, wherein the two micro-rings positioned at the head and the tail of the coupling resonant cavity optical waveguide are coupled and connected with a coupling waveguide at one end close to the outer side; the adjacent coupling resonant cavity optical waveguides are connected through the coupling waveguide, and the coupling waveguide between the adjacent coupling resonant cavity optical waveguides is connected with the delay waveguide; one end of the coupling resonant cavity optical waveguide at one end of the micro-ring array, which is positioned at the outer side of the first micro-ring and the last micro-ring, is respectively connected with an input waveguide and an output waveguide;
the radius of the micro-ring in each coupling resonant cavity optical waveguide is the same, and the radius of the micro-ring in different coupling resonant cavity optical waveguides is linearly increased from left to right according to the distribution position of the coupling resonant cavity optical waveguides;
the coupling waveguide is arranged in a bending mode at the position where the coupling waveguide is coupled with the micro-ring;
the coupling waveguide is wedge-shaped at the location where it connects to the delay waveguide.
2. The integrated tunable optical delay line of claim 1, wherein: the central wavelength intervals of every two adjacent coupled resonant cavity optical waveguides in the micro-ring array are equal, and the central wavelength of the coupled resonant cavity optical waveguides is obtained by a resonance formula of the micro-ring, wherein the formula is as follows:
m·λ0＝neff·L
wherein m is the number of resonance stages, λ0Is a central wavelength, neffBeing the effective refractive index of the waveguide, L being a microringPerimeter.
3. The integrated tunable optical delay line of claim 1, wherein: the SOI substrate is composed of a silicon substrate and a silicon dioxide buried layer deposited on the upper surface of the silicon substrate, a silicon core layer is arranged on the upper surface of the SOI substrate, a silicon dioxide cladding layer is arranged on the upper surface of the silicon core layer, and the micro-ring array, the input waveguide and the output waveguide are arranged in the silicon core layer.
4. The integrated tunable optical delay line of claim 3, wherein: the thickness of the silicon dioxide cladding layer is 900nm, the thickness of the silicon core layer is 220nm, the thickness of the silicon dioxide buried layer is 3 microns, and the thickness of the silicon substrate is 700 microns.
5. The integrated tunable optical delay line according to any one of claims 1 to 4, wherein: the integrated tunable optical delay line further comprises a plurality of thermo-optic tuners, and one thermo-optic tuner is covered on the upper surface of each micro-ring.
6. The integrated tunable optical delay line of claim 5, wherein: the thermo-optic tuner is made of nickel chromium and gold by sputtering the nickel chromium and the gold on the corresponding position of the micro-ring.
7. A preparation method of an integrated adjustable light delay line based on a micro-ring array is characterized by comprising the following steps:
s1: spin-coating electronic glue on an SOI substrate, and transferring the patterns of a coupling resonant cavity optical waveguide, a delay waveguide, a coupling waveguide, an input waveguide and an output waveguide onto the electronic glue by using an electron beam exposure technology;
s2: and etching the exposure area by using an inductively coupled plasma etching method, and then removing the photoresist to finish the preparation.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910309871.4A CN110161629B (en) | 2019-04-17 | 2019-04-17 | Integrated adjustable light delay line based on micro-ring array and preparation method thereof |
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| CN201910309871.4A CN110161629B (en) | 2019-04-17 | 2019-04-17 | Integrated adjustable light delay line based on micro-ring array and preparation method thereof |
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| CN110161629A CN110161629A (en) | 2019-08-23 |
| CN110161629B true CN110161629B (en) | 2021-03-30 |
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| CN110456454B (en) * | 2019-08-26 | 2020-07-17 | 光子算数(北京)科技有限责任公司 | Photon artificial intelligence chip interconnection device and inter-chip interconnection photon artificial intelligence chip |
| CN113093338B (en) * | 2020-01-08 | 2022-12-13 | 华为技术有限公司 | Up-and-down loading filter, optical add-drop multiplexer and wavelength control method |
| CN111817788B (en) * | 2020-06-23 | 2021-05-07 | 东北林业大学 | Optical pulse delay device with self-adjusting working wavelength |
| CN112415663B (en) * | 2020-11-16 | 2022-05-24 | 北京理工大学 | A Mach-Zehnder broadband low-power optical switch based on multilevel microdisk coupling |
| CN113325511B (en) * | 2021-05-10 | 2023-01-10 | 北京邮电大学 | Optical Delay Chip and Determination Method of Delay Time |
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