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CN110187177A - A kind of the opto-electronic device frequency response test device and method of All-in-One - Google Patents

A kind of the opto-electronic device frequency response test device and method of All-in-One Download PDF

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CN110187177A
CN110187177A CN201910406586.4A CN201910406586A CN110187177A CN 110187177 A CN110187177 A CN 110187177A CN 201910406586 A CN201910406586 A CN 201910406586A CN 110187177 A CN110187177 A CN 110187177A
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photodetector
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CN110187177B (en
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邹新海
亓林
刘宇
路永乐
郭俊启
黎人溥
邸克
崔巍
文丹丹
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Chongqing University of Post and Telecommunications
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0292Testing optical properties of objectives by measuring the optical modulation transfer function
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R23/00Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
    • G01R23/16Spectrum analysis; Fourier analysis
    • G01R23/17Spectrum analysis; Fourier analysis with optical or acoustical auxiliary devices

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  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

本发明请求保护一种多合一的光电子器件频率响应测试装置及方法。本发明由激光器、移频外差干涉模块、待测光电探测器和频谱分析模块组成,其中,移频外差干涉模块由待测电光调制器与移频器组成,且分别放置于干涉模块的马赫‑曾德上、下臂中,激光器、移频外差干涉模块和待测光电探测器依次光连接,微波信号源与待测电光调制器的输入电极端为电连接,待测光电探测器输出端与频谱分析模块为电连接;设置微波信号源在相同工作频率下的两次不同输出电压驱动的情况下,通过频谱分析模块,获得对应成分的功率比值,通过两次不同驱动下功率比值的比,实现对待测电光调制器的频率响应测试,进而反算出待测光电探测器频率响应,最终实现频率响应自校准测试。

The invention claims to protect an all-in-one optoelectronic device frequency response testing device and method. The invention is composed of a laser, a frequency-shifting heterodyne interference module, a photodetector to be tested and a spectrum analysis module, wherein the frequency-shifting heterodyne interference module is composed of an electro-optical modulator to be tested and a frequency shifter, and is respectively placed in the interference module In the upper and lower arms of Mach-Zehnder, the laser, the frequency-shifting heterodyne interference module and the photodetector to be tested are optically connected in sequence, the microwave signal source is electrically connected to the input electrode of the electro-optic modulator to be tested, and the photodetector to be tested The output terminal is electrically connected to the spectrum analysis module; when the microwave signal source is driven by two different output voltages at the same operating frequency, the power ratio of the corresponding components is obtained through the spectrum analysis module, and the power ratio of the corresponding components is obtained through the two different drives. The ratio is used to realize the frequency response test of the electro-optic modulator to be tested, and then back calculate the frequency response of the photodetector to be tested, and finally realize the self-calibration test of the frequency response.

Description

一种多合一的光电子器件频率响应测试装置及方法An all-in-one optoelectronic device frequency response testing device and method

技术领域technical field

本发明属于光电子技术领域,具体涉及一种多合一的光电子器件频率响应测试装置及方法。The invention belongs to the technical field of optoelectronics, and in particular relates to an all-in-one optoelectronic device frequency response testing device and method.

背景技术Background technique

随着5G移动通信的到来,人们对通信速率和数据容量的需求呈现爆炸式的增长。当前,光纤通信系统的快速发展是未来5G移动通信推广的基本保障,而作为光纤通信系统的基本组成部分-光电子器件,其特性参数是决定通信容量、带宽和速率的关键所在,同时,实现光电子器件的特性参数精确表征对于光电子器件研发、设计、制作和优化起着至关重要的作用,因此对光电子器件特性参数的研究显得尤为重要。With the advent of 5G mobile communication, people's demand for communication speed and data capacity has shown explosive growth. At present, the rapid development of optical fiber communication system is the basic guarantee for the promotion of 5G mobile communication in the future. As a basic component of optical fiber communication system - optoelectronic devices, its characteristic parameters are the key to determine the communication capacity, bandwidth and speed. At the same time, the realization of optoelectronic Accurate characterization of device characteristic parameters plays a vital role in the development, design, manufacture and optimization of optoelectronic devices, so the study of optoelectronic device characteristic parameters is particularly important.

目前测量光电子器件频率响应测试的方法是根据待测器件类型的不同,测试方法也不同。其中,在光域测试方法中,光谱分析法可以实现电光调制器频率响应的测量,(Y.Q.Shi,L.S.Yan,A.E.Willner,“High-speed electrooptic modulatorcharacterization using optical spectrum analysis,”Journal of LightwaveTechnology,2003,21(10):2358-2367),但是,该方案的测量精度严重依赖光谱分析仪的分辨率,通常存在测量频率分辨率低、精度不高的问题,此外,光谱分析法不能实现光电探测器频率响应的测试;在电域测量方法中,扫频法(Y.Q.Heng,M.Xue,W.Chen,S.L.Han,J.Q.Liu,and S.L.Pan,“Large-dynamic frequency fesponse measurement forbroadband electro-optic phase modulators,”IEEE Photonics Technology Letters,2019,31(4):291-294.D.A.Humphreys,“Integrated-optic system for high-speedphotodetector bandwidth measurements,”Electronics Letters,1989,25(23):1555-1557.)充分利用矢量网络分析仪的高精细测试特性,可实现高精度的光电子器件相对频率响应测试,然而,需要进行额外校准,且过程复杂;移频外差法(S.J.Zhang,C.Zhang,H.Wang,X.H.Zou,Y.L.Zhang,Y.Liu,and J.E.Bowers,“Self-calibrated microwavecharacterization of high-speed optoelectronic devices by heterodyne spectrummapping,”Journal of Lightwave Technology,35(10),1952-1961.)是利用外差干涉的原理,通过配置两个调制信号的频率关系,实现高精度、自校准的光电子器件绝对频率响应测试,然而,该方案需要额外的辅助宽带微波源和宽带调制器,用于消除系统其他器件频率响应的影响,系统开销大。The current method of measuring the frequency response of optoelectronic devices is based on the different types of devices to be tested, and the test methods are also different. Among them, in the optical domain test method, the spectral analysis method can realize the measurement of the frequency response of the electro-optic modulator, (Y.Q.Shi, L.S.Yan, A.E.Willner, "High-speed electrooptic modulator characterization using optical spectrum analysis," Journal of Lightwave Technology, 2003, 21(10):2358-2367), however, the measurement accuracy of this scheme depends heavily on the resolution of the spectrum analyzer, and there are usually problems of low measurement frequency resolution and low precision. In addition, the spectral analysis method cannot realize the photodetector Frequency response test; in the electrical domain measurement method, the frequency sweep method (Y.Q.Heng, M.Xue, W.Chen, S.L.Han, J.Q.Liu, and S.L.Pan, “Large-dynamic frequency frequency measurement for broadband electro-optic phase modulators , "IEEE Photonics Technology Letters, 2019, 31(4): 291-294. D.A. Humphreys, "Integrated-optic system for high-speed photodetector bandwidth measurements," Electronics Letters, 1989, 25(23): 1555-1557.) fully Utilizing the high-precision test characteristics of vector network analyzers, high-precision relative frequency response testing of optoelectronic devices can be achieved. However, additional calibration is required and the process is complicated; the frequency-shifting heterodyne method (S.J.Zhang, C.Zhang, H.Wang , X.H.Zou, Y.L.Zhang, Y.Liu, and J.E.Bowers, "Self-calibrated microwave characterization of high-speed optoelectronic devices by heterodyne spectrum mapping," Journal of Lightwave Technology, 35(10), 1952-1961.) is using heterodyne The principle of interference, by configuring the frequency relationship of two modulation signals, achieves high-precision, self-calibrating absolute frequency response testing of optoelectronic devices. However, this solution requires an additional auxiliary broadband microwave source and broadband modulator to eliminate other components in the system. The influence of frequency response, the system pin big.

发明内容Contents of the invention

本发明旨在解决以上现有技术的问题。提出了一种实现多器件、多参数的多合一光电子器件特性参数的高分辨率、高精度、低成本、自校准电域测量的多合一的光电子器件频率响应测试装置及方法。本发明的技术方案如下:The present invention aims to solve the above problems of the prior art. An all-in-one optoelectronic device frequency response testing device and method for realizing multi-device and multi-parameter all-in-one optoelectronic device characteristic parameters with high resolution, high precision, low cost, and self-calibration electrical domain measurement is proposed. Technical scheme of the present invention is as follows:

一种多合一的光电子器件频率响应测试装置,其包括激光器、信号源、移频外差干涉模块、待测光电探测器和频谱分析模块;其中,所述移频外差干涉模块由待测电光调制器和移频器组成,且分别置于移频外差干涉模块的马赫-曾德上、下臂中;所述信号源与待测电光调制器的输入电极端电连接;所述激光器、移频外差干涉模块、待测光电探测器之间依次光连接;所述待测光电探测器输出端与频谱分析模块之间电连接,所述激光器用于激射直流光波,信号源用于产生正弦微波信号,移频外差干涉模块用于实现光波的外差拍频,待测光电探测器用于光信号的探测,和频谱分析模块用于分析光电探测器输出信号的频谱信息,待测电光调制器用于加载正弦微波信号到直流光波上,和移频器用于实现直流光波的频率移动,设置信号源在相同工作频率下通过两次不同输出电压驱动,通过频谱分析模块获得对应成分的功率比值,通过两次不同驱动下功率比值的比,实现对待测电光调制器的频率响应测试,进而反算出待测光电探测器频率响应。An all-in-one frequency response testing device for optoelectronic devices, which includes a laser, a signal source, a frequency-shifting heterodyne interference module, a photodetector to be tested, and a spectrum analysis module; wherein, the frequency-shifting heterodyne interference module is composed of The electro-optic modulator and the frequency shifter are composed of an electro-optic modulator and a frequency shifter, and are respectively placed in the upper and lower arms of the Mach-Zehnder interference module of the frequency-shifting heterodyne; the signal source is electrically connected to the input electrode terminal of the electro-optic modulator to be tested; the laser , the frequency-shifting heterodyne interference module, and the photodetector to be tested are optically connected in sequence; the output end of the photodetector to be tested is electrically connected to the spectrum analysis module, and the laser is used for lasing DC light waves, and the signal source is used For generating sinusoidal microwave signals, the frequency-shifting heterodyne interference module is used to realize the heterodyne beat frequency of light waves, the photodetector to be tested is used to detect the optical signal, and the spectrum analysis module is used to analyze the spectral information of the output signal of the photodetector. The electro-optic modulator is used to load the sinusoidal microwave signal to the DC light wave, and the frequency shifter is used to realize the frequency shift of the DC light wave. The signal source is set to be driven by two different output voltages at the same operating frequency, and the corresponding component is obtained through the spectrum analysis module. The power ratio, through the ratio of the power ratio under two different driving conditions, realizes the frequency response test of the electro-optic modulator to be tested, and then back-calculates the frequency response of the photodetector to be tested.

进一步的,所述待测电光调制器为电光相位调制器或者电光强度调制器,用于对直流光波的相位或强度进行调制。Further, the electro-optic modulator to be tested is an electro-optic phase modulator or an electro-optic intensity modulator, which is used to modulate the phase or intensity of the direct current light wave.

进一步的,当待测电光调制器为电光相位调制器时,调制光信号电场EPM表示为:Further, when the electro-optic modulator to be tested is an electro-optic phase modulator, the electric field E PM of the modulated optical signal is expressed as:

其中,A1为上臂中光载波的幅值,m为待测电光调制器的调制系数,Jp(·)为第p阶的第一类贝塞尔函数,j为复数;Wherein, A 1 is the amplitude of the optical carrier in the upper arm, m is the modulation coefficient of the electro-optic modulator to be tested, J p ( ) is the first kind of Bessel function of the pth order, and j is a complex number;

待测探测器相对固定低频fs处的频率响应为:The frequency response of the detector to be tested at a relatively fixed low frequency f s is:

其中,J0(·)为第0阶的第一类贝塞尔函数,J1(·)为第1阶的第一类贝塞尔函数,R(fs)和R(f1±fs)分别为待测光电探测器在频率fs和f1±fs处的响应度。Among them, J 0 (·) is the 0th order Bessel function of the first kind, J 1 (·) is the 1st order Bessel function of the first kind, R(f s ) and R(f 1 ±f s ) are the responsivity of the photodetector to be tested at frequencies f s and f 1 ±f s , respectively.

进一步的,当待测电光调制器为电光强度调制器时,调制光信号电场EMZM表示为:Further, when the electro-optic modulator to be tested is an electro-optic intensity modulator, the electric field E MZM of the modulated optical signal is expressed as:

式中,φ为偏置电压引起的相位差;In the formula, φ is the phase difference caused by the bias voltage;

获得待测探测器相对固定低频fs处的频率响应为:Obtain the frequency response at the relatively fixed low frequency f s of the detector to be tested as:

一种基于所述装置的光电子器件频率响应测试方法,其包括以下步骤:A method for testing the frequency response of an optoelectronic device based on the device, comprising the following steps:

(1)信号源产生频率为f1和幅值为Vs的微波信号,通过待测电光调制器加载在光波上,调制信号与经移频器移频fs后的光载波进行合路,合路光信号送入光电探测器进行光电转换,获得混频信号,利用频谱分析模块记录混频信号中频率成份fs和f1±fs的幅值比;(1) The signal source generates a microwave signal with a frequency of f 1 and an amplitude of V s , which is loaded on the light wave through the electro-optic modulator to be tested, and the modulated signal is combined with the optical carrier after the frequency shift by the frequency shifter f s , The combined optical signal is sent to the photodetector for photoelectric conversion to obtain the mixed frequency signal, and the amplitude ratio of the frequency components f s and f 1 ±f s in the mixed frequency signal is recorded by the spectrum analysis module;

(2)在不改变微波信号源频率的情况下,改变输出微波信号的幅值为Vs'=rVs,利用频谱分析模块记录混频信号中频率成份fs和f1±fs的幅值比;(2) Without changing the frequency of the microwave signal source, change the amplitude of the output microwave signal to V s '=rV s , and use the spectrum analysis module to record the amplitudes of the frequency components f s and f 1 ±f s in the mixed frequency signal value ratio;

(3)通过步骤(1)、(2)两次幅值比的比值从而消除待测光电探测器的频响,由于两次调制信号幅值比r为已知,求得待测电光调制器的调制系数m;(3) Eliminate the frequency response of the photodetector to be tested by the ratio of the two amplitude ratios of steps (1) and (2). Since the amplitude ratio r of the two modulation signals is known, the electro-optic modulator to be tested is obtained The modulation factor m;

(4)获得待测电光调制器的调制系数后,通过频率成分幅值比反算出待测光电探测器的响应度R;(4) After obtaining the modulation coefficient of the electro-optic modulator to be tested, the responsivity R of the photodetector to be tested is calculated inversely through the frequency component amplitude ratio;

(5)改变微波信号源的频率f1,并重复上述过程,得到待测电光调制器和待测光电探测器在不同频率的频率响应,实现多合一的光电子器件频率响应的自校准测试。(5) Change the frequency f 1 of the microwave signal source and repeat the above process to obtain the frequency responses of the electro-optic modulator to be tested and the photodetector to be tested at different frequencies, so as to realize the self-calibration test of the frequency response of the all-in-one optoelectronic device.

进一步的,所述步骤(1)利用频谱分析模块记录混频信号中频率成份fs和f1±fs的幅值比,为:Further, the step (1) utilizes the spectrum analysis module to record the frequency component f s and the amplitude ratio of f 1 ± f s in the frequency mixing signal, which is:

式中,H表示混频信号中频率成份fs和f1±fs的幅值比,M为关于m的函数,R为待测光电探测器的响应度。In the formula, H represents the amplitude ratio of frequency components f s and f 1 ±f s in the mixed frequency signal, M is a function of m, and R is the responsivity of the photodetector to be tested.

进一步的,所述步骤(2)在不改变微波信号源频率的情况下,改变输出微波信号的幅值为Vs'=rVs,利用频谱分析模块记录混频信号中频率成份fs和f1±fs的幅值比,为:Further, the step (2) changes the amplitude of the output microwave signal to V s '=rV s without changing the frequency of the microwave signal source, and uses the frequency spectrum analysis module to record the frequency components f s and f in the mixed frequency signal The amplitude ratio of 1 ±f s is:

式中M'为关于r和m的函数;In the formula, M' is a function about r and m;

进一步的,所述两次微波信号驱动的幅值比r≠1。Further, the amplitude ratio r≠1 of the two microwave signal drives.

本发明的优点及有益效果如下:Advantage of the present invention and beneficial effect are as follows:

(1)本发明装置采用移频外差干涉结构,避免了干涉结构易受外部环境引起的抖动问题,实现了一种稳定的光电子器件频响测试结构。(1) The device of the present invention adopts a frequency-shifted heterodyne interference structure, which avoids the jitter problem that the interference structure is easily caused by the external environment, and realizes a stable frequency response test structure of optoelectronic devices.

(2)本发明在不拆除测试系统的情况下,利用两次不同微波信号电压驱动的原理,通过所需混频成分的比值,可消除测试系统中额外器件的频率响应,同时实现了电光调制器和光电探测器频率响应的自校准测试。(2) The present invention uses the principle of two different microwave signal voltage drives without dismantling the test system, and can eliminate the frequency response of additional devices in the test system through the ratio of the required mixing components, and realizes electro-optical modulation at the same time self-calibration test of the frequency response of detectors and photodetectors.

(3)只需同一测试系统就可以对不同类型的光电子器件频率响应进行测试,相比目前的移频外差干涉法,自校准测试无需额外的宽带微波源和宽带调制器,具有测试结构简单和成本低的优势,实现了一种低成本、多合一的自校准测试。(3) The frequency response of different types of optoelectronic devices can be tested with only the same test system. Compared with the current frequency-shifting heterodyne interferometry, the self-calibration test does not require additional broadband microwave sources and broadband modulators, and has a simple test structure. With the advantages of low cost and low cost, a low-cost, all-in-one self-calibration test is realized.

(4)本发明利用移频外差干涉的原理,将光波边带信息外差拍频映射到具有高精细分析能力的电域上进行分析与检测,只需调谐扫频测试的扫频间隔,可实现高分辨率的光电子器件频响测试。(4) The present invention utilizes the principle of frequency-shifting heterodyne interference to map the heterodyne beat frequency of the light wave sideband information to the electrical domain with high-precision analysis capability for analysis and detection, and only needs to tune the frequency sweep interval of the frequency sweep test, High-resolution frequency response testing of optoelectronic devices can be realized.

附图说明Description of drawings

图1是本发明提供优选实施例一种多合一的光电子器件频率响应测试装置连接结构图。Fig. 1 is a connection structure diagram of an all-in-one optoelectronic device frequency response testing device according to a preferred embodiment of the present invention.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、详细地描述。所描述的实施例仅仅是本发明的一部分实施例。The technical solutions in the embodiments of the present invention will be described clearly and in detail below with reference to the drawings in the embodiments of the present invention. The described embodiments are only some of the embodiments of the invention.

本发明解决上述技术问题的技术方案是:The technical scheme that the present invention solves the problems of the technologies described above is:

如图1所示,一种多合一的光电子器件频率响应测试装置,包括激光器、移频外差干涉模块、待测光电探测器和频谱分析模块;其中,移频外差干涉模块由待测电光调制器和移频器组成,且分别置于干涉模块的上、下臂中;微波信号源与待测电光调制器电连接;激光器、移频外差干涉模块、待测光电探测器之间依次光连接;待测光电探测器与频谱分析模块之间电连接;待测电光调制器可为电光相位调制器或者电光强度调制器。As shown in Figure 1, an all-in-one frequency response testing device for optoelectronic devices includes a laser, a frequency-shifting heterodyne interference module, a photodetector to be tested, and a spectrum analysis module; wherein the frequency-shifting heterodyne interference module consists of a The electro-optic modulator and frequency shifter are composed of the upper and lower arms of the interference module; the microwave signal source is electrically connected to the electro-optic modulator to be tested; the laser, the frequency-shifting heterodyne interference module, and the photodetector to be tested Optical connection in sequence; electrical connection between the photodetector to be tested and the spectrum analysis module; the electro-optic modulator to be tested can be an electro-optic phase modulator or an electro-optic intensity modulator.

本发明的一种多合一的光电子器件频率响应的测试原理及方法如下:The testing principle and method of the frequency response of an all-in-one optoelectronic device of the present invention are as follows:

激光器发出频率为f0的光载波进入到移频外差干涉模块中,在干涉模块上臂的光载波进入待测电光调制器中,被微波信号源产生的正弦信号v(t)=Vssin2πf1t进行电光调制。The optical carrier with the frequency f 0 emitted by the laser enters the frequency-shifted heterodyne interference module, and the optical carrier on the upper arm of the interference module enters the electro-optic modulator to be tested, and the sinusoidal signal v(t)=V s sin2πf generated by the microwave signal source 1 t for electro-optic modulation.

(1)当待测电光调制器为电光相位调制器时,调制光信号电场EPM表示为:(1) When the electro-optic modulator to be tested is an electro-optic phase modulator, the electric field E PM of the modulated optical signal is expressed as:

其中,A1为上臂中光载波的幅值,m(f1)为待测电光调制器的在调制频率f1处的调制系数,Jp(·)为第p阶的第一类贝塞尔函数,j为复数。Among them, A 1 is the amplitude of the optical carrier in the upper arm, m(f 1 ) is the modulation coefficient of the electro-optic modulator under test at the modulation frequency f 1 , and J p (·) is the first-type Bessel of the pth order Err function, j is a complex number.

在干涉模块下臂的光载波进入移频器中,移频fs后的光载波光场为:The optical carrier in the lower arm of the interference module enters the frequency shifter, and the optical field of the optical carrier after frequency shift f s is:

干涉臂输出的合路光信号通过待测光电探测器检测,输出的光电流为:The combined optical signal output by the interference arm is detected by the photodetector to be tested, and the output photocurrent is:

通过频谱分析模块,混频电信号中f1±fs和fs所对应幅度分别为:Through the spectrum analysis module, the amplitudes corresponding to f 1 ± f s and f s in the mixed frequency electrical signal are:

i(f1±fs)=2A1A2J1[m(f1)]R(f1±fs) (4a)i(f 1 ±f s )=2A 1 A 2 J 1 [m(f 1 )]R(f 1 ±f s ) (4a)

i(fs)=2A1A2J0[m(f1)]R(fs) (4b)i(f s )=2A 1 A 2 J 0 [m(f 1 )]R(f s ) (4b)

两个混频成分的幅值比为:The magnitude ratio of the two mixing components is:

调整调制信号的幅值为Vs'=rVs,同理获得两个混频成分的幅值比为:Adjust the amplitude of the modulation signal to be V s '=rV s , and similarly obtain the amplitude ratio of the two mixing components as:

两个幅值比的比值为:The ratio of the two amplitude ratios is:

求解式(7),可以获得待测相位调制器的调制系数m,并将m值代入公式(5)中,获得待测探测器相对固定低频fs处的频率响应为:Solving formula (7), the modulation coefficient m of the phase modulator to be tested can be obtained, and the value of m can be substituted into formula (5), and the frequency response of the relatively fixed low frequency f s of the detector to be tested can be obtained as follows:

(2)当待测电光调制器为电光强度调制器(以马赫-曾德调制器)时,调制光信号电场EMZM表示为:(2) When the electro-optic modulator to be tested is an electro-optic intensity modulator (in the form of a Mach-Zehnder modulator), the electric field E MZM of the modulated optical signal is expressed as:

式中,φ为偏置电压引起的相位差。In the formula, φ is the phase difference caused by the bias voltage.

同理,通过频谱分析模块,两次不同功率驱动时的幅值比分别为:Similarly, through the spectrum analysis module, the amplitude ratios of the two different power drives are:

两个幅值比的比值为:The ratio of the two amplitude ratios is:

当φ1=0,φ2=π时,求解式(11),可以获得待测强度调制器的调制系数m,并将m值代入公式(10a)中,获得待测探测器相对固定低频fs处的频率响应为:When φ 1 = 0, φ 2 = π, solve the formula (11), the modulation coefficient m of the intensity modulator to be tested can be obtained, and the value of m can be substituted into the formula (10a), and the relatively fixed low frequency f of the detector to be tested can be obtained The frequency response at s is:

因此在一个固定的测试系统中,本发明可以实现多种光电子器件频率响应的自校准测试。Therefore, in a fixed test system, the present invention can realize the self-calibration test of the frequency response of various optoelectronic devices.

实施例Example

激光器输出功率为10mW、频率f0=193THz(波长约为1550nm)的光载波。微波信号源产生频率为f1=20GHz的正弦信号对待测电光调制器进行调制,在移频外差干涉模块的下臂中,光载波移频量为70MHz,上、下臂耦合输出信号通过待测光电探测器探测,输出光电流通过频谱分析模块进行分析,两次不同信号驱动的功率分别为10dBm和4dBm,此时,驱动信号电压幅值比为r=0.5。(1)相位调制器和光电探测器频率响应测试时,两次不同信号驱动的混频信号幅值比分别为H=-16.52dB和H'=-22.65dB,则两次幅值比的比值为6.14dB,通过公式(7)可得,待测相位调制器在频率20GHz处的调制系数为m=0.371,带入公式(8)可得待测光电探测器在频率20GHz处相对固定低频fs=70MHz处的相对频率响应为-2.04dB;(2)马赫-曾德调制器和光电探测器频率响应测试时,当信号驱动的功率为10dBm,偏置电压引起的相位差为0时,混频信号幅值比为H=-21.56dB,当信号驱动的功率为4dBm,偏置电压引起的相位差为π时,混频信号幅值比为H'=17.53dB,则两次幅值比的比值为-39.09dB,通过公式(11)可得,待测相位调制器在频率20GHz处的调制系数为m=0.421,带入公式(10a)可得待测光电探测器在频率20GHz处相对固定低频fs=70MHz处的相对频率响应为-2.01dB。The output power of the laser is 10mW, and the optical carrier frequency is f 0 =193THz (wavelength is about 1550nm). The microwave signal source generates a sinusoidal signal with a frequency of f 1 = 20GHz to modulate the electro-optical modulator to be tested. In the lower arm of the frequency-shifting heterodyne interference module, the frequency shift of the optical carrier is 70MHz, and the coupled output signals of the upper and lower arms pass through the The photodetector detects, and the output photocurrent is analyzed by the spectrum analysis module. The power driven by two different signals is 10dBm and 4dBm respectively. At this time, the voltage amplitude ratio of the driving signal is r=0.5. (1) During the phase modulator and photodetector frequency response test, the amplitude ratios of the mixed frequency signals driven by two different signals are H=-16.52dB and H'=-22.65dB respectively, then the ratio of the two amplitude ratios is 6.14dB, obtained by the formula (7), the modulation coefficient of the phase modulator to be tested at the frequency of 20GHz is m=0.371, brought into the formula (8) to obtain the relative fixed low frequency f of the photodetector to be tested at the frequency of 20GHz The relative frequency response at s = 70MHz is -2.04dB; (2) During the frequency response test of the Mach-Zehnder modulator and photodetector, when the power driven by the signal is 10dBm and the phase difference caused by the bias voltage is 0, The amplitude ratio of the mixed frequency signal is H=-21.56dB, when the power driven by the signal is 4dBm, and the phase difference caused by the bias voltage is π, the amplitude ratio of the mixed frequency signal is H'=17.53dB, then the two amplitudes Ratio ratio is-39.09dB, can obtain by formula (11), and the modulation factor of the phase modulator to be tested is m=0.421 at the frequency 20GHz place, is brought into formula (10a) and can obtain the photodetector to be tested at the frequency 20GHz place The relative frequency response at a relatively fixed low frequency f s =70 MHz is -2.01 dB.

以上这些实施例应理解为仅用于说明本发明而不用于限制本发明的保护范围。在阅读了本发明的记载的内容之后,技术人员可以对本发明作各种改动或修改,这些等效变化和修饰同样落入本发明权利要求所限定的范围。The above embodiments should be understood as only for illustrating the present invention but not for limiting the protection scope of the present invention. After reading the contents of the present invention, skilled persons can make various changes or modifications to the present invention, and these equivalent changes and modifications also fall within the scope defined by the claims of the present invention.

Claims (8)

1.一种多合一的光电子器件频率响应测试装置,其特征在于,包括激光器、信号源、移频外差干涉模块、待测光电探测器和频谱分析模块;其中,所述移频外差干涉模块由待测电光调制器和移频器组成,且分别置于移频外差干涉模块的马赫-曾德上、下臂中;所述信号源与待测电光调制器的输入电极端电连接;所述激光器、移频外差干涉模块、待测光电探测器之间依次光连接;所述待测光电探测器输出端与频谱分析模块之间电连接,所述激光器用于产生直流光波,信号源用于产生正弦微波信号,移频外差干涉模块用于实现光波的外差拍频,待测光电探测器用于光信号的探测,和频谱分析模块用于分析光电探测器输出信号的频谱信息,待测电光调制器用于加载正弦微波信号到直流光波上,移频器用于实现直流光波的频率移动,设置信号源在相同工作频率下通过两次不同输出电压驱动,通过频谱分析模块获得对应成分的功率比值,通过两次不同驱动下功率比值的比,实现对待测电光调制器的频率响应测试,进而反算出待测光电探测器频率响应。1. An all-in-one optoelectronic device frequency response testing device, characterized in that it includes a laser, a signal source, a frequency-shifting heterodyne interference module, a photodetector to be tested and a spectrum analysis module; wherein the frequency-shifting heterodyne The interference module is composed of an electro-optic modulator to be tested and a frequency shifter, and is respectively placed in the upper and lower arms of the Mach-Zehnder interference module of frequency shifting heterodyne; the signal source is electrically connected to the input electrode terminal of the electro-optic modulator to be tested. connection; the laser, the frequency-shifting heterodyne interference module, and the photodetector to be tested are optically connected in sequence; the output terminal of the photodetector to be tested is electrically connected to the spectrum analysis module, and the laser is used to generate DC light waves , the signal source is used to generate sinusoidal microwave signals, the frequency-shifting heterodyne interference module is used to realize the heterodyne beat frequency of light waves, the photodetector to be tested is used to detect the optical signal, and the spectrum analysis module is used to analyze the output signal of the photodetector Spectrum information, the electro-optic modulator to be tested is used to load the sinusoidal microwave signal to the DC light wave, the frequency shifter is used to realize the frequency shift of the DC light wave, the signal source is set to be driven by two different output voltages at the same operating frequency, and obtained through the spectrum analysis module The power ratio of the corresponding components is compared through the ratio of the power ratios under two different driving conditions to realize the frequency response test of the electro-optic modulator to be tested, and then back-calculate the frequency response of the photodetector to be tested. 2.根据权利要求1所述的一种多合一的光电子器件频率响应测试装置,其特征在于,所述待测电光调制器为电光相位调制器或者电光强度调制器,用于对直流光波的相位或强度进行调制。2. A kind of all-in-one optoelectronic device frequency response testing device according to claim 1, characterized in that, the electro-optic modulator to be tested is an electro-optic phase modulator or an electro-optic intensity modulator, which is used for direct current light waves Phase or intensity modulation. 3.根据权利要求2所述的一种多合一的光电子器件频率响应测试装置,其特征在于,当待测电光调制器为电光相位调制器时,调制光信号电场EPM表示为:3. a kind of all-in-one optoelectronic device frequency response testing device according to claim 2, is characterized in that, when electro-optic modulator to be tested is electro-optic phase modulator, modulation light signal electric field E is expressed as: 其中,A1为上臂中光载波的幅值,m(f1)为待测电光调制器的在调制频率f1处的调制系数,Jp(·)为第p阶的第一类贝塞尔函数,j为复数;Among them, A 1 is the amplitude of the optical carrier in the upper arm, m(f 1 ) is the modulation coefficient of the electro-optic modulator under test at the modulation frequency f 1 , and J p (·) is the first-type Bessel of the pth order Er function, j is a complex number; 待测探测器相对固定低频fs处的频率响应为:The frequency response of the detector to be tested at a relatively fixed low frequency f s is: 其中,J0(·)为第0阶的第一类贝塞尔函数,J1(·)为第1阶的第一类贝塞尔函数,R(fs)和R(f1±fs)分别为待测光电探测器在频率fs和f1±fs处的响应度。Among them, J 0 (·) is the 0th order Bessel function of the first kind, J 1 (·) is the 1st order Bessel function of the first kind, R(f s ) and R(f 1 ±f s ) are the responsivity of the photodetector to be tested at frequencies f s and f 1 ±f s , respectively. 4.根据权利要求3所述的一种多合一的光电子器件频率响应测试装置,其特征在于,当待测电光调制器为电光强度调制器时,调制光信号电场EMZM表示为:4. a kind of all-in-one optoelectronic device frequency response testing device according to claim 3, is characterized in that, when electro-optic modulator to be tested is electro-optic intensity modulator, modulated optical signal electric field E MZM is expressed as: 式中,φ为偏置电压引起的相位差;In the formula, φ is the phase difference caused by the bias voltage; 获得待测探测器相对固定低频fs处的频率响应为:Obtain the frequency response at the relatively fixed low frequency f s of the detector to be tested as: 5.一种基于权利要求1-4之一所述装置的光电子器件频率响应测试方法,其特征在于,包括以下步骤:5. A method for testing the frequency response of an optoelectronic device based on the device according to one of claims 1-4, characterized in that it comprises the following steps: (1)信号源产生频率为f1和幅值为Vs的微波信号,通过待测电光调制器加载在光波上,调制信号与经移频器移频fs后的光载波进行合路,合路光信号送入光电探测器进行光电转换,获得混频信号,利用频谱分析模块记录混频信号中频率成份fs和f1±fs的幅值比;(1) The signal source generates a microwave signal with a frequency of f 1 and an amplitude of V s , which is loaded on the light wave through the electro-optic modulator to be tested, and the modulated signal is combined with the optical carrier after the frequency shift by the frequency shifter f s , The combined optical signal is sent to the photodetector for photoelectric conversion to obtain the mixed frequency signal, and the amplitude ratio of the frequency components f s and f 1 ±f s in the mixed frequency signal is recorded by the spectrum analysis module; (2)在不改变微波信号源频率的情况下,改变输出微波信号的幅值为Vs'=rVs,利用频谱分析模块记录混频信号中频率成份fs和f1±fs的幅值比;(2) Without changing the frequency of the microwave signal source, change the amplitude of the output microwave signal to V s '=rV s , and use the spectrum analysis module to record the amplitudes of the frequency components f s and f 1 ±f s in the mixed frequency signal value ratio; (3)通过步骤(1)、(2)两次幅值比的比值从而消除待测光电探测器的频响,由于两次调制信号幅值比r为已知,求得待测电光调制器的调制系数m;(3) Eliminate the frequency response of the photodetector to be tested by the ratio of the two amplitude ratios of steps (1) and (2). Since the amplitude ratio r of the two modulation signals is known, the electro-optic modulator to be tested is obtained The modulation factor m; (4)获得待测电光调制器的调制系数后,通过频率成分幅值比反算出待测光电探测器的响应度R;(4) After obtaining the modulation coefficient of the electro-optic modulator to be tested, the responsivity R of the photodetector to be tested is calculated inversely through the frequency component amplitude ratio; (5)改变微波信号源的频率f1,并重复上述过程,得到待测电光调制器和待测光电探测器在不同频率的频率响应,实现多合一的光电子器件频率响应的自校准测试。(5) Change the frequency f 1 of the microwave signal source and repeat the above process to obtain the frequency responses of the electro-optic modulator to be tested and the photodetector to be tested at different frequencies, so as to realize the self-calibration test of the frequency response of the all-in-one optoelectronic device. 6.根据权利要求5所述的光电子器件频率响应测试方法,其特征在于,6. optoelectronic device frequency response test method according to claim 5, is characterized in that, 所述步骤(1)利用频谱分析模块记录混频信号中频率成份fs和f1±fs的幅值比,为:Described step (1) utilizes frequency spectrum analysis module to record the amplitude ratio of frequency component f s and f 1 ± f s in the frequency mixing signal, for: 式中,H表示混频信号中频率成份fs和f1±fs的幅值比,M为关于m的函数,R为待测光电探测器的响应度。In the formula, H represents the amplitude ratio of frequency components f s and f 1 ±f s in the mixed frequency signal, M is a function of m, and R is the responsivity of the photodetector to be tested. 7.根据权利要求5所述的光电子器件频率响应测试方法,其特征在于,所述步骤(2)在不改变微波信号源频率的情况下,改变输出微波信号的幅值为Vs'=rVs,利用频谱分析模块记录混频信号中频率成份fs和f1±fs的幅值比,为:7. optoelectronic device frequency response test method according to claim 5, is characterized in that, described step (2) changes the amplitude of output microwave signal to be V s '=rV under the situation of not changing microwave signal source frequency s , use the frequency spectrum analysis module to record the frequency component f s and the amplitude ratio of f 1 ± f s in the mixed signal, which is: 式中M'为关于r和m的函数;In the formula, M' is a function about r and m; 8.根据权利要求5-7之一所述的光电子器件频率响应测试方法,其特征在于,所述两次微波信号驱动的幅值比r≠1。8. The method for testing the frequency response of an optoelectronic device according to any one of claims 5-7, wherein the amplitude ratio r≠1 of the two microwave signal drives.
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