CN110217741A - A kind of box erecting machine - Google Patents
A kind of box erecting machine Download PDFInfo
- Publication number
- CN110217741A CN110217741A CN201910374048.1A CN201910374048A CN110217741A CN 110217741 A CN110217741 A CN 110217741A CN 201910374048 A CN201910374048 A CN 201910374048A CN 110217741 A CN110217741 A CN 110217741A
- Authority
- CN
- China
- Prior art keywords
- backboard
- sliding rail
- rail frame
- erecting machine
- box erecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 34
- 238000000034 method Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67B—APPLYING CLOSURE MEMBERS TO BOTTLES JARS, OR SIMILAR CONTAINERS; OPENING CLOSED CONTAINERS
- B67B7/00—Hand- or power-operated devices for opening closed containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of box erecting machines, including backboard, backboard is equipped with the acquisition mechanism for fixing door-plate, the side of backboard is connected with sliding rail frame by revolute, the other side of backboard is connect by buffer gear with sliding rail frame, and sliding rail frame can move both horizontally and vertically respectively under the action of horizontal drive mechanism and vertical driving mechanism.It is easier to be turned on the invention enables door-plate, also reduces the vibration of wafer cassette, simplification opens box step, shortens out the box time.
Description
Technical field
The present invention relates to semiconductors manufacture relevant device technical fields, more particularly to a kind of box erecting machine.
Background technique
Wafer is the substrate in manufacture of semiconductor, in semiconductor fabrication factory, is usually transported using the wafer cassette of sealing
Send wafer.As the precision of modern processing procedure is higher and higher, need to meet process requirements for vacuumizing in wafer cassette.And it is traditional
Wafer cassette box erecting machine only can by the door-plate integral level of wafer cassette movement vertically moved again to open wafer cassette, for machinery
Hand, which enters, takes wafer, but since wafer cassette has carried out vacuumize process, by the active force of atmospheric pressure end of door plate, traditional opens box
Machine can not remove door-plate from wafer cassette, if increasing the opening force of box erecting machine, biggish vibration can be caused to wafer cassette
Noise pollution is moved and generated, the quality of wafer is reduced.Somebody proposes that injection unit code insurance protects into wafer cassette first with relief valve
Gas is then turned on door-plate after making internal and external pressure balance, increases although so box operation can be opened using traditional box erecting machine completion
Process, extends the production time, increases the production cost of chip.
Summary of the invention
The object of the present invention is to provide a kind of box erecting machines, to solve the above-mentioned problems of the prior art, make internal in true
The door-plate of the wafer cassette of dummy status, which need not shift to an earlier date pressure release, can also be opened.
To achieve the above object, the present invention provides following schemes:
The present invention provides a kind of box erecting machine, including backboard, the backboard is equipped with the acquisition mechanism for fixing door-plate,
The side of the backboard is connected with sliding rail frame by revolute, and the other side of the backboard passes through buffer gear and the sliding rail frame
Connection, the sliding rail frame can be under the action of horizontal drive mechanisms and vertical driving mechanism respectively in the horizontal direction and Vertical Square
To movement.
Preferably, the backboard is rectangle, and any angle or adjacent two corners in the quadrangle of the backboard pass through the rotation
Turn pair to connect with the sliding rail frame, remaining angle of the backboard passes through the buffer gear and connect with the sliding rail frame.
Preferably, the revolute includes the first fixed plate and is connect with first fixed plate by shaft second solid
Fixed board, first fixed plate and second fixed plate are affixed with the backboard and the sliding rail frame respectively.
Preferably, the adjacent two corners of the backboard are connect by the revolute with the sliding rail frame, two rotations
Pair shares a shaft.
Preferably, the revolute is located at the downside of the backboard.
Preferably, the buffer gear includes pin rod, connection sheet and spring, and the connection sheet and the sliding rail frame, which are fixed, to be connected
It connects, the pin rod is through the connection sheet and one end is fixedly connected with the backboard, and one end of the spring is against the connection
On piece, the other end of the spring are against in the plunger of the pin rod other end, and the spring is applied with precompression.
Preferably, the buffer gear further includes sleeve, and the sleeve is set in outside the pin rod, one end of the sleeve
It is fixedly connected with the connection sheet.
Preferably, the acquisition mechanism is sucker.
Preferably, the unlocking mechanism for opening the lock on the door-plate is additionally provided on the backboard.
The present invention achieves following technical effect compared with the existing technology:
The present invention drives backboard to move horizontally and holds using revolute and buffer gear connecting sliding rail frame and backboard in sliding rail frame
Row open box movement when, due to by door-plate pull of vacuum effect, rotate vice division chief backboard can be prior to buffer gear at
Door-plate is opened a seam or tilts an angle by backboard, so that external gas enters in wafer cassette, reduces the inside and outside of wafer cassette
Pressure difference to reduce the vibration of wafer cassette, simplifies so that door-plate is easier to be turned on and opens box step, the box time is opened in shortening.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the schematic perspective view of box erecting machine of the present invention；
Fig. 2 is the side structure schematic view of box erecting machine of the present invention；
Wherein: 1- sliding rail frame, 2- backboard, 3- buffer gear, 4- revolute, the first fixed plate of 5-, 6- shaft, 7- second are solid
Fixed board, 8- unlocking mechanism, 9- pin rod, 10- connection sheet, 11- spring, 12- plunger, 13- sleeve.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
It is to be appreciated that term "front", "rear", "left", "right", "upper", "lower", "top", "bottom", "inner", "outside" etc.
The orientation or positional relationship of instruction is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of the description present invention and letter
Change description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with specific orientation construct and
Operation, therefore should not be understood as limiting the scope of the invention.
It is as Figure 1-Figure 2: to present embodiments provide a kind of box erecting machine, including backboard 2, backboard 2 is generally rectangular and has
There is preferable rigidity, (right side of Fig. 2 dorsulum 2) is equipped with for the fixed door-plate being fastened on box body before backboard 2
Acquisition mechanism, when and being additionally provided on opening-door plate on backboard 2 for when opening wafer cassette, acquisitions mechanism to be sucker
The unlocking mechanism 8 of lock.And when being used as the unlatching of other box bodys and door-plate, obtaining mechanism need to be with the opening structure phase of door-plate
Match.
Two angles of the downside of backboard 2 are connected with sliding rail frame 1 by revolute 4, sliding rail frame 1 can in horizontal drive mechanism and
It is moved both horizontally and vertically respectively under the action of vertical driving mechanism.Horizontal drive mechanism and vertical driving mechanism are equal
Ball screw framework, gear and rack teeth mechanism, electronics push rod, hydraulic cylinder or pneumatic cylinder can be selected, specifically can according to use environment and
Selection, and the connection of horizontal drive mechanism and vertical driving mechanism and sliding rail frame 1 and rack and control are those skilled in the art
Known, details are not described herein.
Preferably, revolute 4 includes the first fixed plate 5 and passes through the second fixed plate that shaft 6 is connect with the first fixed plate 5
7, the first fixed plate 5 and the second fixed plate 7 are affixed by bolt with backboard 2 and sliding rail frame 1 respectively, two rotations of the present embodiment
Pair 4 shares a shaft 6, and the first fixed plate 5 is fixedly connected with shaft 6, and the second fixed plate 7 is rotatablely connected with shaft 6, to protect
It is rotated synchronously at left and right sides of card backboard 2, keeps tilting angle on the downside of door-plate or so consistent.It should be understood that revolute 4 is set
Seated position and quantity can change according to specific structure, and angle this field skill of the structure of revolute 4 and rotary centerline
Art personnel can select according to the size of door-plate, as long as at least any angle or adjacent two corners that meet in the quadrangle of backboard 2 lead to
It crosses revolute 4 to connect with sliding rail frame 1, remaining angle of backboard 2 passes through buffer gear 3 and connect with sliding rail frame 1, equally can
It realizes and first tilts a part of door-plate, to form gap to separate with box body, supplied gas circulation reduces box body inner and outer air pressure
Purpose.
In the present embodiment, the upside two corners of backboard 2 pass through a buffer gear 3 respectively and connect with sliding rail frame 1.Specifically,
Buffer gear 3 includes pin rod 9, connection sheet 10 and spring 11, and connection sheet 10 and the top of sliding rail frame 1 are bolted to connection,
Pin rod 9 is through connection sheet 10 and right end is fixedly connected with backboard 2, and can be connected through a screw thread also can weld connection, and the one of spring 11
End is against in connection sheet 10, and the other end of spring 11 is against in the plunger 12 of 9 left end of pin rod, and spring 11 is applied with precompression.It is slow
Punch mechanism 3 further includes sleeve 13, and sleeve 13 is set in outside pin rod 9 and spring 11, and the right end and connection sheet 10 of sleeve 13 are fixed to be connected
It connects.It should be noted that the structure of buffer gear 3 is without being limited thereto, drawing is delayed relative to lower end in all upper ends that can make backboard 2
The structure of dynamic door-plate is applicable.
The working principle of the present embodiment are as follows:
Horizontal drive mechanism drives backboard 2 mobile by sliding rail frame 1, close to the door-plate of wafer cassette, then obtain mechanism with
Door-plate is reliably connected, and horizontal drive mechanism drives backboard 2 to move horizontally round about by sliding rail frame 1, dynamic carrying out out box
The beginning of work, due to the pull of vacuum effect by door-plate, the backboard 2 at buffer gear 3 is pulled by door-plate, and spring 11 is pressed
It contracts and wouldn't move, since revolute 4 is rigid connection, the backboard 2 at revolute 4 can incite somebody to action under the drive of horizontal drive mechanism
A seam is opened on the downside of door-plate, so that external gas enters in wafer cassette, reduces the internal and external pressure difference of wafer cassette, so that
Door-plate is easier to be turned on, and as horizontal drive mechanism continues to move to, backboard 2 can drive entire door-plate to separate with wafer cassette,
Then vertical driving mechanism drives backboard 2 to move down by sliding rail frame 1, enters convenient for manipulator and obtains wafer in wafer cassette.It can be with
Understand, the fastening process of door-plate with above-mentioned to open box process opposite.
The box erecting machine of the present embodiment greatly reduces the pulling force of opening-door plate needs, and helping reduces the dynamic of horizontal mobile mechanism
Power reduces the overall stiffness requirement of equipment, in addition, the present embodiment can also reduce vibration when wafer cassette opens box, and simplification is opened
The box time is opened in box step, shortening.
It should be understood that the box erecting machine of the present embodiment is applicable not only to the unlatching of the door-plate of wafer cassette, for any envelope
The door-plate for closing box body, which is opened, has general applicability, is particularly suitable for because tray interior is in vacuum or negative pressure state, door-plate is not easy
The operating condition directly opened.
Apply that a specific example illustrates the principle and implementation of the invention in this specification, above embodiments
Explanation be merely used to help understand method and its core concept of the invention；At the same time, for those skilled in the art,
According to the thought of the present invention, there will be changes in the specific implementation manner and application range.In conclusion in this specification
Appearance should not be construed as limiting the invention.
Claims (9)
1. a kind of box erecting machine, it is characterised in that: including backboard, the backboard is equipped with the acquisition mechanism for fixing door-plate, institute
The side for stating backboard is connected with sliding rail frame by revolute, and the other side of the backboard is connected by buffer gear and the sliding rail frame
It connects, the sliding rail frame can be distinguished both horizontally and vertically under the action of horizontal drive mechanism and vertical driving mechanism
Movement.
2. box erecting machine according to claim 1, it is characterised in that: the backboard is rectangle, in the quadrangle of the backboard
Any angle or adjacent two corners are connect by the revolute with the sliding rail frame, remaining angle of the backboard passes through described slow
Punch mechanism is connect with the sliding rail frame.
3. box erecting machine according to claim 1 or 2, it is characterised in that: the revolute include the first fixed plate and with institute
State the second fixed plate that the first fixed plate is connected by shaft, first fixed plate and second fixed plate respectively with it is described
Backboard and the sliding rail frame are affixed.
4. box erecting machine according to claim 3, it is characterised in that: the adjacent two corners of the backboard by the revolute with
The sliding rail frame connection, two revolutes share a shaft.
5. box erecting machine according to claim 4, it is characterised in that: the revolute is located at the downside of the backboard.
6. box erecting machine according to claim 1 or 2, it is characterised in that: the buffer gear includes pin rod, connection sheet and bullet
Spring, the connection sheet are fixedly connected with the sliding rail frame, and the pin rod is through the connection sheet and one end is fixed with the backboard
Connection, one end of the spring are against in the connection sheet, and the other end of the spring is against the plunger of the pin rod other end
On, the spring is applied with precompression.
7. box erecting machine according to claim 6, it is characterised in that: the buffer gear further includes sleeve, the sleeve set
It is located at outside the pin rod, one end of the sleeve is fixedly connected with the connection sheet.
8. box erecting machine according to claim 1, it is characterised in that: the acquisition mechanism is sucker.
9. box erecting machine according to claim 1, it is characterised in that: be additionally provided on the backboard for opening the door-plate
Lock unlocking mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910374048.1A CN110217741B (en) | 2019-05-07 | 2019-05-07 | Box opening machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910374048.1A CN110217741B (en) | 2019-05-07 | 2019-05-07 | Box opening machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110217741A true CN110217741A (en) | 2019-09-10 |
| CN110217741B CN110217741B (en) | 2020-12-25 |
Family
ID=67820612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910374048.1A Active CN110217741B (en) | 2019-05-07 | 2019-05-07 | Box opening machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110217741B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116008003A (en) * | 2022-12-16 | 2023-04-25 | 西安奕斯伟材料科技有限公司 | Device and method for collecting ions in wafer box |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11288991A (en) * | 1998-04-03 | 1999-10-19 | Shinko Electric Co Ltd | Load port |
| US6168364B1 (en) * | 1999-04-19 | 2001-01-02 | Tdk Corporation | Vacuum clean box, clean transfer method and apparatus therefor |
| TW460035U (en) * | 2000-09-08 | 2001-10-11 | Ind Tech Res Inst | Automatic front-opening load-in device for wafer box |
| CN1465091A (en) * | 2000-07-10 | 2003-12-31 | 纽波特公司 | Thin film semiconductor device and its production method |
| CN1505128A (en) * | 2002-11-28 | 2004-06-16 | Tdk株式会社 | Chip mapping apparatus |
| CN102376609A (en) * | 2010-08-07 | 2012-03-14 | 昕芙旎雅有限公司 | Load port |
| US20130011223A1 (en) * | 2011-07-08 | 2013-01-10 | Tdk Corporation | Load port apparatus |
| CN104576461A (en) * | 2014-12-31 | 2015-04-29 | 上海新阳半导体材料股份有限公司 | Cover opening device for wafer storage box |
| CN207558771U (en) * | 2017-11-24 | 2018-06-29 | 上海大族富创得科技有限公司 | Rotatable wafer cassette box opener |
| CN208507641U (en) * | 2018-07-18 | 2019-02-15 | 华景电通股份有限公司 | Wafer cassette carrier and wafer cassette carrier equipment |
-
2019
- 2019-05-07 CN CN201910374048.1A patent/CN110217741B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11288991A (en) * | 1998-04-03 | 1999-10-19 | Shinko Electric Co Ltd | Load port |
| US6186723B1 (en) * | 1998-04-03 | 2001-02-13 | Shinko Electric Co., Ltd. | Load port |
| US6168364B1 (en) * | 1999-04-19 | 2001-01-02 | Tdk Corporation | Vacuum clean box, clean transfer method and apparatus therefor |
| CN1465091A (en) * | 2000-07-10 | 2003-12-31 | 纽波特公司 | Thin film semiconductor device and its production method |
| TW460035U (en) * | 2000-09-08 | 2001-10-11 | Ind Tech Res Inst | Automatic front-opening load-in device for wafer box |
| CN1505128A (en) * | 2002-11-28 | 2004-06-16 | Tdk株式会社 | Chip mapping apparatus |
| CN102376609A (en) * | 2010-08-07 | 2012-03-14 | 昕芙旎雅有限公司 | Load port |
| US20130011223A1 (en) * | 2011-07-08 | 2013-01-10 | Tdk Corporation | Load port apparatus |
| CN104576461A (en) * | 2014-12-31 | 2015-04-29 | 上海新阳半导体材料股份有限公司 | Cover opening device for wafer storage box |
| CN207558771U (en) * | 2017-11-24 | 2018-06-29 | 上海大族富创得科技有限公司 | Rotatable wafer cassette box opener |
| CN208507641U (en) * | 2018-07-18 | 2019-02-15 | 华景电通股份有限公司 | Wafer cassette carrier and wafer cassette carrier equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116008003A (en) * | 2022-12-16 | 2023-04-25 | 西安奕斯伟材料科技有限公司 | Device and method for collecting ions in wafer box |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110217741B (en) | 2020-12-25 |
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