CN110249267A - High-pressure discharge lamp with a discharge vessel having a discharge chamber with a discharge chamber - Google Patents

Abstract

The insulator (30) has an opening (34) that connects a space (s) formed between the other side tube portion (15) of the light-emitting tube (10) and the insertion hole (23) of the reflector (20) to the outside. In addition, the length (L1) of one side tube portion (14) is longer than the length (L2) of the other side tube portion (15). Thus, a high-pressure discharge lamp is provided that can improve cooling efficiency and achieve increased light intensity.

Description

High pressure discharge lamp

technical field

The present invention relates to a high-pressure discharge lamp, and more specifically, to a high-pressure discharge lamp constituting a light source portion of a multi-lamp of an exposure apparatus.

Background technique

In recent years, in exposure apparatuses used in the production of color filters and printed wiring boards of flat panel display devices, in order to expand the exposure range, it is necessary to increase the output of the light source section. Therefore, various techniques are known in which the light source portion is constituted by using a plurality of high-pressure discharge lamps having comparatively low light intensity, which are advantageous in terms of manufacturing cost and the like (for example, refer to Patent Document 1).

As shown in FIG. 8 , the conventional high pressure discharge lamp 100 mainly includes: an arc tube 110 that discharges and emits light; a reflector 120 that makes the light emitted from the arc tube 110 have directivity and emits it; a fixed arc tube 110 and a reflector The insulator 130 of the device 120; Inside the luminous tube 110, there are: a luminous part 111 having an inner space, the inner space is sealed with halogen gas, mercury, argon gas for activation, etc.; a pair of sealing parts 112, 113, which seal the inner space of the luminous part 111; and a pair of electrodes 114 and 115 arranged to face each other in the light-emitting portion 111 .

In addition, in the light source device described in Patent Document 1, in order to check whether the discharge lamp 100 is a genuine product with high accuracy, in a short time and at low cost, an incandescent lamp 131 is provided inside the insulator 130 .

Furthermore, in the light irradiation device described in Patent Document 2, in a configuration in which a plurality of lamps are positioned in a case and used, a cooling path for cooling each lamp is formed in a base member of each lamp.

prior art literature

Patent Literature

Patent Document 1: Japanese Patent Laid-Open No. 2016-200751

Patent Document 2: Japanese Patent Laid-Open No. 2012-113269

SUMMARY OF THE INVENTION

The technical problem to be solved by the invention

In high pressure discharge lamps, however, it is also desirable to increase the light intensity per lamp. Therefore, since the energy at the bright spot within the light-emitting portion increases, further improvement in cooling efficiency is required.

The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide a high-pressure discharge lamp capable of improving the cooling efficiency and realizing the improvement of the light intensity.

technical means to solve the problem

The above-mentioned object of the present invention is achieved by the following configuration.

(1) A high-pressure discharge lamp, characterized in that it has:

An arc tube made of glass, the arc tube having: an ellipsoid-shaped or spherical arc-shaped arc tube portion in which a pair of electrodes are arranged to face each other; a pair of side tubes extending with a long axis;

a reflector having: an opening portion provided on one side in the direction of the long axis, and one of the side pipe portions protruding; a parabolic reflective surface formed around the long axis; and formed on the long axis the other side in the long axis direction, and the other insertion hole into which the side tube portion can be inserted with a gap; and

an insulator, which fixes the light-emitting tube and the reflector respectively,

The insulator has an open portion that communicates the space formed between the other side pipe portion and the insertion hole of the reflector with the outside,

The length of the one side tube portion is longer than the length of the other side tube portion.

(2) The high-pressure discharge lamp according to (1), wherein the one side tube portion is arranged in a dead space of the lamp.

(3) The high-pressure discharge lamp according to (1) or (2) above, wherein the reflector is provided with a flat surface that is adjacent to the opening and is perpendicular to the long axis direction, and In the long axis direction, when the distance from the center of the arc tube portion to the flat surface of the reflector is L4, the distance from the flat surface of the reflector to the one side tube portion is The distance L3 is 0.2×L4≤L3≤1.0×L4.

Invention effect

According to the high pressure discharge lamp of the present invention, the insulator has an open portion that communicates the space formed between the other side pipe portion of the arc tube and the insertion hole of the reflector with the outside, and the length ratio of the one side pipe portion is The length of the other side tube portion is long. Thereby, the cooling efficiency at the two side tube portions of the arc tube can be improved, and the illumination intensity of the lamp itself can be improved.

Description of drawings

FIG. 1 is a perspective view of a high pressure discharge lamp according to an embodiment of the present invention.

FIG. 2 is a side view of the high pressure discharge lamp shown in FIG. 1 .

FIG. 3 is a cross-sectional view of the high pressure discharge lamp shown in FIG. 1 .

FIG. 4 is a cross-sectional view of the high pressure discharge lamp shown in FIG. 1 cut at a position orthogonal to FIG. 3 .

FIG. 5( a ) is a diagram showing an orientation distribution of light emitted from a bright spot, and FIG. 5( b ) is a diagram showing an orientation distribution and a dead zone of light reflected by the reflecting surface of the reflector.

6 is a perspective view showing a state in which the high pressure discharge lamp of the present embodiment is attached to a lamp holder.

FIG. 7 is a diagram showing a circuit for managing the life time of lamps.

8 is a cross-sectional view showing a conventional high pressure discharge lamp.

Symbol Description

1 High pressure discharge lamp

10 LEDs

11, 12 electrodes

13 Light Emitting Tube Department

14, 15 side pipe

20 reflectors

21 opening

22 reflective surfaces

23 Insertion holes

25 flat surface

30 Insulators

34 Open Ministry

A dead zone

s space

L1 Length of one side tube

The length of the other side tube of L2

Detailed ways

Hereinafter, the high pressure discharge lamp according to one embodiment of the present invention will be described in detail with reference to FIGS. 1 to 6 .

As shown in FIG. 1 , the high-pressure discharge lamp 1 of the present embodiment mainly includes: a glass arc tube 10 that discharges and emits light; a reflector 20 that makes the light emitted from the arc tube 10 have directivity and emits it; an insulator 30 , which fix the luminous tube 10 and the reflector 20 respectively; and wire harnesses 16 and 17 , which are electrically connected to the luminous tube 10 (refer to FIG. 4 ).

As shown in FIG. 3 , the arc tube 10 includes an ellipsoid-shaped arc tube portion 13 in which a pair of electrodes 11 and 12 are arranged to face each other; A pair of side pipe portions 14, 15 extending from the long axis X of 12. In addition, halogen gas, mercury, argon gas for starting, and the like are sealed in the inner space of the arc tube portion 13 , and the inner space of the arc tube portion 13 is sealed by a pair of side tube portions 14 and 15 . It should be noted that the shape of the arc tube portion 13 may be spherical.

The reflector 20 is provided on one side in the direction of the long axis X, and has: an opening 21 from which the side tube portion 14 on one side protrudes; a parabolic reflecting surface 22 formed around the long axis X; and the other side formed in the direction of the long axis X One side and the other side pipe part 15 can be inserted into the insertion hole 23 with a gap g.

The arc tube 10 has one electrode 11 extending in one side tube portion 14 as an anode, and the other electrode 12 extending in the other side tube portion 15 as a cathode (cathode). Generally, in a DC discharge lamp, the size of the tip shape of the electrode is (cathode) smaller than (anode), so the angle at which light emitted by discharge is blocked on the anode side is larger than the angle blocked on the cathode side. On the other hand, in the reflector 20, in order to increase the angle at which the light is received on the side of the opening 21, the reflector 20 needs to be deepened. Therefore, the size of the reflector 20 can be reduced compared to providing the cathode on the opening 21 side of the reflector 20 by arranging the anode with a large angle of blocking light on the opening 21 side of the reflector 20 .

The electric wires extending from the distal end portion of the one side pipe portion 14 and the base end portion of the other side pipe portion 15 are connected to a pair of wire harnesses 16 and 17 for power supply, respectively. In addition, the wire harness 16 connected to the one side pipe part 14 is led out to the outside via the base 24 attached to the reflector 20 .

In the reflector 20, the base portion 31 of the insulator 30 is placed on the outside of the bowl-shaped bottom portion, and the joint portion thereof is fixed with an adhesive (see FIG. 4). Moreover, the cylindrical center part of the base part 31 of the insulator 30 is provided with the holding part 32 which holds the base end side part of the other side pipe part 15 inserted in the insertion hole 23 of the reflector 20. The other side pipe portion 15 is fixed to the insulator 30 at the holding portion 32 with an adhesive.

Therefore, the reflector 20 and the other side tube portion 15 of the arc tube 10 are respectively fixed to the insulator 30, the reflector 20 and the arc tube 10 are not bonded, and the other side tube portion 15 and the insertion hole 23 of the reflector 20 are The gap between them forms a space s.

The insulator 30 includes the above-described base portion 31 and a cover portion 33 that includes the holding portion 32 and covers the base portion 31 from the rear. The bottom portion 33a of the cover portion 33 is formed flat.

Therefore, the lamp 1 may be fixed to the lamp holder 40 by contacting the flat bottom portion 33a with a lamp cover (not shown) and connecting the lamp cover to the lamp holder 40 shown in FIG. 6 .

Returning to FIG. 3 , the base portion 31 of the insulator 30 has two openings 34 that allow the space s between the other side pipe portion 15 and the insertion hole 23 of the reflector 20 to communicate with the outside, and that allow the other side pipe to communicate with the outside. The portion 15 is open to the outside. Furthermore, as shown in FIG. 6 , in the state where the lamp 1 is mounted on the lamp holder 40 , the air sucked in from the front of the lamp 1 passes through the space s and the opening 34 by sucking and discharging air behind the lamp holder 40 . to cool the luminous tube 10 . Therefore, the space s and the open portion 34 form a cooling path.

In addition, as shown in FIG. 4, the incandescent lamp 35 as a resistor is arrange|positioned in the accommodation space between the base part 31 of the insulator 30 and the cover part 33, and it is connected to the external power supply harness 36. Since the filament 35a of the incandescent lamp 35 is a resistor, the resistance value changes due to the influence of the surrounding temperature. It should be noted that the power supply harness 36 is connected to a power source of a system different from that of the harnesses 16 and 17 . In addition, the incandescent lamp 35 is arranged in the accommodating space so as not to be cooled by the air passing through the cooling path. For example, by supplying current to the incandescent lamp 35 and measuring the voltage across the filament 35a of the incandescent lamp 35 and comparing the voltage with a database of voltages and temperatures studied in advance, the temperature and cooling state of the lamp can be managed. Alternatively, a sufficiently large current is supplied to the incandescent lamp 35 to fuse the filament 35 a of the incandescent lamp 35 . The judgment circuit can be used to confirm the presence or absence of a fuse, and to manage the usage history.

In addition to the incandescent lamp 35, a metal film resistor, a carbon resistor, a metal wire harness, a thermocouple, a bimetal, etc. may be used as the resistor for life management and temperature management.

In addition, the incandescent lamp 35 may be located inside the insulator 30 of the lamp 1 , or may be arranged outside the insulator 30 and connected to the power supply harness 36 .

In addition, the outer edge of the opening 21 of the reflector 20 is formed into a substantially square shape whose corners have been chamfered, but one of the four corners is used as a cut-out portion 26 for alignment, and is formed with 3 corners with different shapes. Thus, when the lamps 1 are mounted to the lamp holder 40, the lamps 1 are all aligned in the same orientation.

Since the temperature of the portion located on the upper side of the arc tube 10 increases, the cooling efficiency increases when the amount of air passing through the upper side is large.

Therefore, in the lighting device in which the lamp holder 40 is incorporated, it is preferable that the lamp 1 is aligned and attached to the lamp holder 40 so that the two openings 34 formed in the insulator 30 are positioned in the up-down direction.

In addition, the shape of the insulator 30 may be asymmetric so that the opening area of the opening portion 34 located on the upper side is larger than that of the opening portion 34 located on the lower side, thereby further improving the cooling efficiency. For example, in the present embodiment, as shown in FIG. 1 , the opening gap g of the opening portion 34 is defined by two planes passing through the long axis X, and the opening gap g can be changed by changing the angle formed by the two planes, In turn, the opening area is changed.

Here, in the lamp 1 of the present embodiment, in order to increase the light intensity, the energy at the arc tube portion 13 is increased, and accordingly, the temperature at the arc tube portion 13 becomes higher than before. On the other hand, the connection portion of the electric wires extending from the one side pipe portion 14 and the other side pipe portion 15 and the wire harnesses 16 and 17 needs to be relatively lowered in temperature from the viewpoint of heat resistance.

Therefore, in the present embodiment, the length L1 of the one side pipe portion 14 is designed to be longer than the length L2 of the other side pipe portion 15 . That is, since the other side pipe portion 15 is exposed to the air passing through the cooling path, the heat release effect is higher than that of the one side pipe portion 14 . On the other hand, by providing one side tube portion 14 longer than the other side tube portion 15, the distance from the arc tube portion 13 to the connecting portion of the electric wire from the one side tube portion 14 and the wire harness 16 is increased, thereby further increasing the distance. A reduction in temperature at the connection portion is achieved. Therefore, the cooling efficiency at the tube portions 14 and 15 on both sides of the arc tube 10 can be improved.

Specifically, in the present embodiment, the length L1 of the one side pipe portion 14 is set to be 1.1 to 1.4 times the length L2 of the other side pipe portion 15 .

In addition, as shown in FIG. 4 , one side tube portion 14 is arranged in the dead space A of the lamp 1 so as not to obstruct the light emitted from the lamp 1 .

As shown in FIG. 5( a ), in the arc tube portion 13 , the light generated at the bright spot P by the discharge between the pair of electrodes 11 and 12 is radially widened. Since the electrodes 11 and 12 exist, the orientation of the light is The distribution forms shadows in the direction in which the electrodes 11 and 12 extend like the shaded portion B.

In addition, as shown in FIG.5(b), the reflector 20 is a paraboloid, and the bright point P of the arc tube 10 is arrange|positioned at the focal point of the paraboloid. Therefore, the light rays emitted from the bright spot P are reflected on the reflection surface 22 of the reflector 20 as indicated by the one-dot chain line and become parallel light. However, since there is a deviation of the bright spot P from the focal point and the bright spot P has a limited size, it actually contains rays as shown by the dotted lines, so not all of them are parallel lights. When the directions of all the light rays including the parallel light are considered, the light reflected by the reflector 20 further passes through the whole of the shaded portion C shown in FIG. 5( b ). On the other hand, when the position where all the reflected light does not pass through is defined as the dead zone A, as shown in FIG. Light reflected by the reflector 20 is obstructed. The dead zone A can be formed by designing the shape of the paraboloid of the reflector 20 .

Therefore, although the reflector 20 is provided with a flat surface 25 which is adjacent to the opening 21 and defines an axial end of the radiator 20 and is perpendicular to the direction of the long axis X, one side tube portion 14 protrudes from the flat surface 25. length becomes longer. That is, as shown in FIG. 3 , when the distance from the center of the arc tube portion 13 to the flat surface 25 of the reflector 20 in the direction of the long axis X is L4, the distance from the flat surface 25 of the reflector 20 is L4. The distance L3 to the tip of the one side pipe portion 14 is set to 0.2×L4≦L3≦1.0×L4.

The pipe diameters of the side pipe portions 14 and 15 are set to a thickness that can ensure strength relative to the lengths L1 and L2 of the side pipe portions 14 and 15 , and one side pipe portion 14 does not penetrate the dead space A of the lamp 1 . stretch out.

Here, as shown in FIG. 3 , the pipe diameter of each side pipe portion 14 and 15 is set to D1, and the length L1 of one side pipe portion 14 is set to be D1≦0.4×L1.

In addition, the one side pipe part 14 and the other side pipe part 15 are each made into a cylindrical shape, and the mutual pipe diameter is set to be the same as D1. The side tube parts 14 and 15 are connected to the arc tube part 13 , and the arc tube part 13 is connected to the wire harnesses 16 and 17 via the side tube parts 14 and 15 . The temperature of the arc tube portion 13 is very high, but the temperature of the wire harnesses 16 and 17 needs to be lowered to prevent oxidation.

By setting the pipe diameters D1 of the side pipe portions 14 and 15 to be the same, it is easy to set the temperature gradient in the vicinity of the connection to the arc pipe portion 13 to be the same at both poles. On the other hand, when the difference in temperature gradient between the poles of the arc tube portion 13 increases, strain accumulates inside the glass, which causes cracking.

The reflector 20 is preferably set to D2/f1=7-10 when the aperture diameter of the reflector 20 is D2, and when the focal position of the virtual paraboloid PA is f1. By setting it to this range, the condensing position becomes approximately 1 m or more, and the light can be efficiently condensed on the fly-eye lens.

As shown in FIG. 6, the high-pressure discharge lamp 1 comprised in this way is attached to the lamp holder 40 in plural in the vertical direction and the horizontal direction, and is used as a light source part for an exposure apparatus. In addition, air from the front side of the lamp holder 40 is drawn into the lamp 1 using the space s of each high pressure discharge lamp 1 as a cooling path by exhausting the air on the back side of the lamp holder 40 by the exhaust device not shown. , so that each lamp 1 can be cooled. In addition, the back side of the lamp holder 40 may constitute a sealed space together with the lamp gland, and air may be exhausted from this sealed space.

As described above, according to the high pressure discharge lamp of the present embodiment, the insulator 30 has the open portion 34 that connects the space s formed between the other side tube portion 15 of the arc tube 10 and the insertion hole 23 of the reflector 20 to The outside is communicated, and the length L1 of the one side pipe portion 14 is longer than the length L2 of the other side pipe portion 15 . In this way, the cooling efficiency at the tube portions 14 and 15 on both sides of the arc tube 10 can be improved, and the light intensity of the lamp itself can be improved.

In addition, this invention is not limited to the above-mentioned embodiment, A deformation|transformation, improvement, etc. are possible suitably.

For example, in the present invention, the method of connecting the arc tube and the wire harness and the configuration inside the arc tube are not limited to the form of the present embodiment, and any existing forms can be applied.

In addition, in the present invention, the life time management may be performed using a circuit as shown in FIG. 7 . That is, the resistors Ri and the fuses Fi (each i=1, 2, . The resistance values of the resistors Ri are different, and the current values cut off by the fuses Fi are different. When managing the life time, each fuse Fi is cut off in accordance with the elapse of a predetermined time by flowing different currents from the power supply unit 50 . In addition, r of the power supply part 50 represents the internal resistance of a power supply.

In addition, by controlling the voltage of the power supply unit 50, the fuses Fi may be cut off in sequence, thereby performing life management.

Furthermore, by judging the total resistance value of all the resistors Ri and the fuse Fi by the judgment circuit, the specification of the lamp 1 can be judged. In this case, even in a state where the lamps 1 of different specifications are turned on, life management can be performed, and normal and safe lighting can be performed.

It should be noted that, in the above circuit, the fuse Fi may not be provided, but a plurality of resistors Ri with different resistance values may be arranged in parallel, and each resistor Ri may be blown in sequence according to the elapse of a predetermined time due to the flow of different currents from the power supply unit 50 . .

In addition, the resistance may be inside the insulator of the lamp 1 , or may be connected to a connection portion (not shown) that makes electrical contact between the power supply harness 36 and the outside. In this case, the resistor needs to be connected to a power source of a different system from the harnesses 16 and 17 that supply power to the lamp electrodes.

The present invention is based on Japanese Patent Application (Japanese Patent Application No. 2017-017856 ) filed on February 2, 2017, the contents of which are incorporated herein by reference.

Claims (3)

1. a kind of high-pressure discharge lamp, which is characterized in that have:

The luminous tube of glass system, the luminous tube include the ellipsoid shaped of the opposed configuration of a pair of electrodes or the luminous tube of dome shape Portion；A pair of of the side tube section for connecting with the both ends of the pipe portion that shines, and extending along the long axis of the pair of electrode；

Reflector, the reflector includes the side that the long axis direction is arranged in, and a side tube section is outstanding Opening portion；The parabolic reflecting surface formed around the long axis；With the other side for being formed in the long axis direction, and Another described side tube section can have the insertion hole being inserted into gap；And

Insulator, the insulator fix the luminous tube and the reflector respectively,

The insulator is with the space that will be formed between another described side tube section and the insertion hole of the reflector and outside The opening portion of portion's connection,

The length of one side tube section is longer than the length of side tube section described in another.

2. high-pressure discharge lamp as described in claim 1, which is characterized in that

One side tube section is configured in the dead zone of the lamp.

3. high-pressure discharge lamp as claimed in claim 1 or 2, which is characterized in that

Flat surface adjacent with the opening portion and vertical with the long axis direction is provided in the reflector,

On the long axis direction, when by the distance until the center to the flat surface of the reflector of the luminous pipe portion When being set as L4, distance L3 until from the flat surface of the reflector to one side tube section be 0.2 × L4≤L3≤ 1.0×L4。