CN110284038B - A kind of PVD coating with strong (111) texture and preparation method thereof - Google Patents
A kind of PVD coating with strong (111) texture and preparation method thereof Download PDFInfo
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- B22F3/10—Sintering only
- B22F3/1003—Use of special medium during sintering, e.g. sintering aid
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- C22C29/067—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds comprising a particular metallic binder
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Abstract
Description
技术领域technical field
本发明涉及一种具有强(111)织构的PVD涂层及其制备方法,属于粉末冶金复合材料技术领域和切削刀具领域。The invention relates to a PVD coating with strong (111) texture and a preparation method thereof, belonging to the technical field of powder metallurgy composite materials and the field of cutting tools.
背景技术Background technique
涂层硬质材料由硬质材料基体和涂层两部分组成。硬质材料基体表面结构对与其直接接触的涂层形核与生长具有重要影响。如果涂层是多层复合涂层,后续生长的涂层对这种影响依次具有继承性。涂层形核与生长环境的改变会影响涂层的性能及其切削刀具的使用寿命。Coated hard material consists of hard material base and coating. The surface structure of the hard material substrate has an important influence on the nucleation and growth of the coating in direct contact with it. If the coating is a multi-layer composite coating, subsequently grown coatings will in turn inherit this effect. Changes in coating nucleation and growth conditions can affect the performance of the coating and its cutting tool life.
WC基硬质合金和TiCN基金属陶瓷分别是指以WC和TiCN作为主体成分的硬质合金和金属陶瓷,属于典型的硬质材料。硬质材料由硬质相和韧性粘结相组成。硬质材料的“粘结金属”对应原始添加态,如Co、Ni和Co–Ni等;硬质材料的“粘结相”对应烧结后合金态。在烧结过程中,硬质相合金组元通常会在粘结金属中产生固溶,形成以固溶体状态存在的粘结相。WC-based cemented carbide and TiCN-based cermet refer to cemented carbide and cermet with WC and TiCN as the main components, respectively, which are typical hard materials. Hard materials consist of a hard phase and a tough binder phase. The "binder metal" of hard materials corresponds to the original added state, such as Co, Ni and Co-Ni, etc.; the "binder phase" of hard materials corresponds to the alloy state after sintering. During the sintering process, the hard phase alloy components usually generate solid solution in the binder metal to form a binder phase that exists in a solid solution state.
金属氮化物是涂层硬质材料中涂层的常见材质。以AlTiN、TiSiN、AlCrN等作主体成分的金属氮化物是目前较常见的商业化涂层成分。上述金属氮化物通常具有与AlN或TiN相同的晶体结构,其它合金元素通常固溶在AlN或TiN晶格中,形成固溶体。上述氮化物中,当其中Ti的摩尔分数高于其它金属组元总量时,则形成与TiN相同的晶体结构;当其中Al的摩尔分数高于其它金属组元总量时,则形成与AlN相同的晶体结构。所述TiN和AlN通常为立方晶体结构。Metal nitrides are a common material for coatings in coated hard materials. Metal nitrides with AlTiN, TiSiN, AlCrN, etc. as the main components are the most common commercial coating components. The above-mentioned metal nitrides usually have the same crystal structure as AlN or TiN, and other alloy elements are usually solid-dissolved in the AlN or TiN lattice to form a solid solution. In the above nitrides, when the mole fraction of Ti is higher than the total amount of other metal components, the same crystal structure as TiN is formed; when the mole fraction of Al is higher than the total amount of other metal components, the same crystal structure as AlN is formed. the same crystal structure. The TiN and AlN are generally cubic crystal structures.
涂层的各向异性通常用织构系数TC(hkl)进行表征,其计算公式如下:The anisotropy of the coating is usually characterized by the texture coefficient TC(hkl), which is calculated as follows:
式中,N为计算时所取的晶面总数;h、k、l为衍射晶面的晶面指数;I(hkl)和I0(hkl)分别为实际测量和粉末衍射标准联合委员会(JCPDS)认定的数据库中相应标准样品在(hkl)晶面的衍射峰强度。In the formula, N is the total number of crystal planes taken in the calculation; h, k, l are the crystal plane indices of the diffraction crystal planes; I (hkl) and I 0 (hkl) are the actual measurement and the Joint Committee on Powder Diffraction Standards (JCPDS), respectively ) the diffraction peak intensity of the corresponding standard sample in the (hkl) crystal plane in the database identified.
对晶面随机取向的晶体,其织构系数为1。TC(hkl)>2.5的材料,其(hkl)晶面具有显著的择优取向。涂层的织构系数越高,其结晶的完整性越好,从而有利于其抗裂纹扩展能力和耐磨性的改善,有利于涂层刀具使用寿命的提高。目前尚未见TC(111)>2.5的PVD涂层的报道。For crystals with randomly oriented crystal planes, the texture coefficient is 1. For materials with TC(hkl)>2.5, the (hkl) crystal plane has a significant preferred orientation. The higher the texture coefficient of the coating, the better the integrity of its crystallization, which is conducive to the improvement of its crack growth resistance and wear resistance, and is conducive to the improvement of the service life of the coating tool. There are no reports on PVD coatings with TC(111)>2.5.
发明内容SUMMARY OF THE INVENTION
本发明的第一个目的是提供一种(111)晶面织构系数TC(111)>2.5的PVD涂层,从而显著改善涂层抗裂纹扩展能力和耐磨性,显著提高涂层刀具的使用寿命。The first object of the present invention is to provide a PVD coating with a (111) crystal plane texture coefficient TC(111)>2.5, thereby significantly improving the crack propagation resistance and wear resistance of the coating, and significantly improving the coating tool's durability. service life.
本发明的另一个目的是提供一种TC(111)>2.5,具有优异抗裂纹扩展能力和高耐磨性,可显著提高涂层刀具使用寿命的PVD涂层的制备方法,以满足难加工材料及其高效加工对PVD涂层刀具高性能和高寿命的需求。Another object of the present invention is to provide a preparation method of PVD coating with TC(111)>2.5, which has excellent crack growth resistance and high wear resistance, and can significantly improve the service life of coated tools, so as to meet the requirements of difficult-to-machine materials. Its high-efficiency machining requires high performance and long life of PVD-coated tools.
本发明一种具有强(111)织构的PVD涂层,所述PVD涂层采用物理气相沉积的方法制备,包括单层和多层复合涂层中的至少一种;所述单层和多层复合涂层中单一或复合物相的晶体结构至少与fcc-TiN或fcc-AlN中的一种相同或相似;所述PVD涂层的单一或复合物相的(111)晶面织构系数>2.5,通过对涂层前硬质材料基体表面结构进行第二次烧结调控实现;所述fcc代表面心立方晶体结构所述PVD涂层采用硬质材料作为基体,沉积在硬质材料基体表面,构成涂层合金中的涂层部分;所述硬质材料是指WC基硬质合金和TiCN基金属陶瓷;所述WC基硬质合金和TiCN基金属陶瓷的粘结金属包括Co、Ni等元素中的至少一种;所述硬质材料中粘结金属在合金中的质量分数≥6%。The present invention is a PVD coating with strong (111) texture, the PVD coating is prepared by a physical vapor deposition method, and comprises at least one of a single-layer and a multi-layer composite coating; the single-layer and multi-layer composite coatings The crystal structure of the single or composite phase in the layer composite coating is at least the same as or similar to one of fcc-TiN or fcc-AlN; the (111) crystal plane texture coefficient of the single or composite phase of the PVD coating > 2.5, realized by the second sintering adjustment of the surface structure of the hard material substrate before coating; the fcc represents the face-centered cubic crystal structure The PVD coating uses hard material as the substrate and is deposited on the surface of the hard material substrate , constitute the coating part in the coating alloy; the hard material refers to WC-based cemented carbide and TiCN-based cermet; the binder metals of the WC-based cemented carbide and TiCN-based cermet include Co, Ni, etc. At least one of the elements; the mass fraction of the binder metal in the hard material in the alloy is ≥6%.
采用所述PVD涂层合金制备的切削刀具具有显著改善的使用寿命;所述涂层的单一或复合物相是指涂层中不包含过渡层的涂层各层的物相;对单层涂层,所述涂层各层的物相就是单层涂层的物相。Cutting tools prepared by using the PVD coating alloy have significantly improved service life; the single or composite phase of the coating refers to the phase of each layer of the coating that does not include a transition layer in the coating; for single-layer coating layer, the phase of each layer of the coating is the phase of the single-layer coating.
本发明一种具有强(111)织构PVD涂层的制备方法,只需对涂层前硬质材料基体表面结构进行第二次烧结调控,无需对涂层工艺进行改变,就可实现对PVD涂层在硬质材料基体表面形核与生长条件的改变,就可达到使涂层具有强(111)织构的目标;其制备工艺流程包括涂层前硬质材料基体表面结构的第二次烧结调控和在经过表面结构第二次烧结调控的硬质材料基体表面进行涂层的物理气相沉积;所述涂层前硬质材料基体表面结构的第二次烧结调控是指使涂层前硬质材料基体表面原位形成均质连续的粘结金属富集层;所述粘结金属富集层均匀覆盖在整个合金基体的表面,厚度在0.5~2.0μm之间。The present invention is a preparation method of a PVD coating with strong (111) texture, which only needs to perform a second sintering adjustment on the surface structure of the hard material substrate before the coating, and does not need to change the coating process. By changing the nucleation and growth conditions of the coating on the surface of the hard material substrate, the goal of making the coating with strong (111) texture can be achieved; the preparation process includes the second step of the surface structure of the hard material substrate before coating Sintering control and physical vapor deposition of coating on the surface of the hard material substrate after the second sintering control of the surface structure; the second sintering control of the surface structure of the hard material substrate before coating refers to making the A homogeneous and continuous bonding metal-enriched layer is formed in situ on the surface of the material substrate; the bonding metal-enriched layer uniformly covers the entire surface of the alloy substrate, and has a thickness of 0.5-2.0 μm.
本发明使硬质材料基体表面原位形成均质连续的粘结金属富集层,实现对整个合金基体表面的均匀覆盖,并控制其厚度在0.5~2.0μm之间的方法,包括以下步骤:In the present invention, a homogeneous and continuous bonding metal enrichment layer is formed on the surface of the hard material substrate in situ, so as to achieve uniform coverage of the entire alloy substrate surface, and the method for controlling the thickness thereof to be between 0.5 and 2.0 μm includes the following steps:
(1)将经过第一次烧结和涂层前常规工艺处理后的硬质材料制品装入高纯石墨舟皿中,以相互隔离状态均匀埋伏在由高纯稀土氧化物和高纯石墨粉组成的混合粉体填料中,制品之间通过混合粉体填料隔离;(2)将上述装入舟皿的制品放入烧结炉中进行真空烧结并随炉冷却出炉;(3)清除制品表面的填料;(1) The hard material products after the first sintering and conventional processing before coating are loaded into the high-purity graphite boat, and evenly buried in the high-purity rare earth oxide and high-purity graphite powder in a mutually isolated state In the mixed powder filler, the products are separated by the mixed powder filler; (2) put the products loaded into the boat into the sintering furnace for vacuum sintering and cool down with the furnace; (3) remove the filler on the surface of the product ;
所述混合粉体填料中高纯石墨粉的质量分数在3~6%之间;The mass fraction of the high-purity graphite powder in the mixed powder filler is between 3% and 6%;
所述真空烧结的烧结温度控制在合金体系共晶温度以上10~40℃,保温时间控制在40~120min之间。The sintering temperature of the vacuum sintering is controlled at 10-40° C. above the eutectic temperature of the alloy system, and the holding time is controlled between 40-120 minutes.
所述高纯稀土氧化物粒度对应的筛网孔径在75~115μm之间;所述高纯石墨粉粒度对应的筛网孔径在38~75μm之间;所述高纯是指纯度>99.5%;所述稀土包括常见稀土La、Ce、Pr、Nd、Y等中的至少一种。The mesh aperture corresponding to the particle size of the high-purity rare earth oxide is between 75 and 115 μm; the mesh aperture corresponding to the particle size of the high-purity graphite powder is between 38 and 75 μm; the high purity means that the purity is greater than 99.5%; The rare earth includes at least one of common rare earths La, Ce, Pr, Nd, Y and the like.
所述合金体系共晶温度可通过差示扫描量热分析或差热分析等热分析方法获得。The eutectic temperature of the alloy system can be obtained by thermal analysis methods such as differential scanning calorimetry or differential thermal analysis.
所述清除制品表面的填料包括将制品置于酒精介质中进行超声波清洗。The removing the filler on the surface of the product includes placing the product in an alcohol medium for ultrasonic cleaning.
所述均质连续、均匀覆盖在硬质材料基体表面,厚度在0.5~2.0μm之间的粘结金属富集层是在真空烧结过程中通过混合粉体填料中粉体间隙形成的隧道效应,可控式诱导硬质材料中液相定向迁移原位形成;其厚度通过烧结温度和保温时间协同调控;所述烧结温度和保温时间分别控制在合金体系共晶温度以上10~40℃和40~120min。The homogeneous, continuous and evenly covered surface of the hard material substrate and the bonding metal enrichment layer with a thickness of 0.5-2.0 μm is a tunnel effect formed by mixing the powder gaps in the powder filler during the vacuum sintering process. The directional migration of the liquid phase in the hard material is controllably induced to form in-situ; its thickness is regulated by the sintering temperature and the holding time; the sintering temperature and holding time are respectively controlled at 10-40° C. 120min.
本发明的机理和优点简述于下:The mechanism and advantages of the present invention are briefly described below:
本发明通过混合粉体填料中粉体间隙形成的隧道效应可控式诱导硬质材料中液相定向迁移,使硬质材料基体表面原位形成均质连续的粘结金属富集层。高纯石墨粉和高纯稀土氧化物按一定比例进行混合,可实现混合粉体填料中的碳氧平衡,混合粉体填料具有高纯度、高熔点、与硬质材料之间具有高反应惰性,因此可维持硬质材料制品良好的清洁表面结构。The invention can controllably induce the directional migration of the liquid phase in the hard material through the tunnel effect formed by the powder gap in the mixed powder filler, so that a homogeneous and continuous bonding metal enrichment layer is formed on the surface of the hard material substrate in situ. High-purity graphite powder and high-purity rare earth oxide are mixed in a certain proportion to achieve carbon-oxygen balance in the mixed powder filler. The mixed powder filler has high purity, high melting point, and high reaction inertness with hard materials. A good clean surface structure of the hard material article can thus be maintained.
本发明人经过理论计算与实验研究发现,通过真空烧结温度和保温时间的协同调控,可控制粘结金属富集层厚度在0.5~2.0μm之间;在此厚度范围内,粘结金属富集层的存在不会影响硬质涂层与硬质基体之间弹性模量、泊松比、热膨胀系数等的匹配性,但会显著影响PVD涂层的形核与晶体生长,有利于涂层形成明显的织构效应,有利于涂层应力的释放。The inventors have found through theoretical calculations and experimental studies that the thickness of the bonding metal enrichment layer can be controlled to be between 0.5 and 2.0 μm through the coordinated regulation of the vacuum sintering temperature and the holding time; within this thickness range, the bonding metal enrichment The existence of the layer will not affect the matching of elastic modulus, Poisson's ratio, thermal expansion coefficient, etc. between the hard coating and the hard substrate, but will significantly affect the nucleation and crystal growth of the PVD coating, which is conducive to the formation of the coating. The obvious texture effect is beneficial to the release of coating stress.
本发明PVD涂层其单一或复合物相的(111)晶面织构系数>2.5。采用这种织构技术,可显著改善涂层的结晶完整性,减少结晶缺陷,显著改善涂层的耐磨性,显著改善涂层抗裂纹形成和抗裂纹扩展的能力,从而显著提高涂层刀具的使用寿命。The (111) crystal plane texture coefficient of the single or composite phase of the PVD coating of the present invention is greater than 2.5. With this texturing technique, the crystalline integrity of the coating can be significantly improved, crystalline defects can be reduced, the wear resistance of the coating can be significantly improved, and the coating's resistance to crack formation and crack propagation can be significantly improved, thereby significantly improving the coating tool. service life.
附图说明Description of drawings
图1是实施例1铣削实验用铣削刀片的外观形貌和几何尺寸。FIG. 1 shows the appearance and geometric dimensions of the milling insert for the milling experiment in Example 1.
图2是实施例1采用WC–0.7Cr3C2–0.4VC–10Co为基体,制备的PVD-TiSiN/TiAlSiN/AlTiN涂层的X射线衍射(XRD)图谱,图谱中标注了JCPDS数据库中编号为25-1495的AlN卡片各晶面所处的2θ位置及其理论峰强。Figure 2 is the X-ray diffraction (XRD) pattern of the PVD-TiSiN/TiAlSiN/AlTiN coating prepared in Example 1 using WC-0.7Cr 3 C 2 -0.4VC-10Co as the substrate, and the number in the JCPDS database is marked in the pattern It is the 2θ position of each crystal plane of AlN card of 25-1495 and its theoretical peak intensity.
图3是实施例1采用WC–0.7Cr3C2–0.4VC–10Co为基体,制备的PVD-TiSiN/TiAlSiN/AlTiN涂层的XRD图谱,图谱中标注了JCPDS数据库中编号为38-1420的TiN卡片各晶面所处的2θ位置及其理论峰强。Figure 3 is the XRD pattern of the PVD-TiSiN/TiAlSiN/AlTiN coating prepared by using WC-0.7Cr 3 C 2 -0.4VC-10Co as the substrate in Example 1. The pattern is marked with the number 38-1420 in the JCPDS database. The 2θ position of each crystal plane of TiN card and its theoretical peak intensity.
图4是实施例1采用WC–0.7Cr3C2–0.4VC–10Co为基体,制备的PVD-TiSiN/TiAlSiN/AlTiN涂层的XRD图谱及其物相分析综合结果。Figure 4 is the XRD pattern and the comprehensive results of the phase analysis of the PVD-TiSiN/TiAlSiN/AlTiN coating prepared in Example 1 using WC-0.7Cr 3 C 2 -0.4VC-10Co as the substrate.
由图1可以看出实施例1铣削实验用铣削刀片的外观形貌和几何尺寸。It can be seen from FIG. 1 that the appearance and geometric dimensions of the milling insert used in the milling experiment in Example 1.
由图2可知,涂层中晶体结构与AlN相同的AlTiN物相的(111)晶面对应的衍射峰是实测XRD图谱中的最强峰,AlN卡片中(200)晶面对应的第二强峰(理论峰强为75%)的实际峰强明显弱化,AlN标准卡片中(420)晶面对应的第一强峰(理论峰强为100%)的实际峰强为零。图2中AlTiN物相(111)晶面左侧的连体衍射峰对应涂层中TiSiN物相的(111)晶面。由于原子半径较大的Ti在AlN晶格中产生固溶,并大量替代原子半径较小的Al原子,AlTiN物相各晶面对应的实际衍射峰相对AlN标准峰位发生了向小角度方向的整体偏移。It can be seen from Figure 2 that the diffraction peak corresponding to the (111) crystal plane of the AlTiN phase with the same crystal structure as AlN in the coating is the strongest peak in the measured XRD pattern, and the first one corresponding to the (200) crystal plane in the AlN card. The actual peak intensity of the second strong peak (theoretical peak intensity is 75%) is obviously weakened, and the actual peak intensity of the first strong peak (theoretical peak intensity is 100%) corresponding to the (420) crystal plane in the AlN standard card is zero. The conjoined diffraction peak on the left side of the (111) crystal plane of the AlTiN phase in Figure 2 corresponds to the (111) crystal plane of the TiSiN phase in the coating. Since Ti with a larger atomic radius produces a solid solution in the AlN lattice and replaces a large number of Al atoms with a smaller atomic radius, the actual diffraction peaks corresponding to each crystal plane of the AlTiN phase have a small angle relative to the AlN standard peak position. overall offset.
由图3可知,涂层中晶体结构与TiN相同的TiSiN物相的(111)晶面对应的衍射峰是实测XRD图谱中的第二强峰,TiN卡片中(200)晶面对应的第一强峰(理论峰强为100%)的实际峰强已经明显弱化。由于Si在TiN晶格中的固溶量很小,TiSiN物相各晶面对应的实际衍射峰位与TiN标准峰位基本重叠。It can be seen from Figure 3 that the diffraction peak corresponding to the (111) crystal plane of the TiSiN phase with the same crystal structure as TiN in the coating is the second strongest peak in the measured XRD pattern, and the (200) crystal plane in the TiN card corresponds to the diffraction peak. The actual peak intensity of the first strong peak (the theoretical peak intensity is 100%) has been significantly weakened. Due to the small amount of solid solution of Si in the TiN lattice, the actual diffraction peak positions corresponding to each crystal plane of the TiSiN phase basically overlap with the standard peak positions of TiN.
由图4可知,涂层中存在晶体结构与AlN相同的AlTiN物相,晶体结构与TiN相同的TiSiN物相,同时也检测到了富集在基体表面的fcc结构(对应89-7093卡片)和hcp结构(对应89-7094卡片)的粘结金属Co。It can be seen from Figure 4 that there is an AlTiN phase with the same crystal structure as AlN in the coating, and a TiSiN phase with the same crystal structure as TiN. At the same time, the fcc structure (corresponding to 89-7093 cards) and hcp enriched on the surface of the substrate were also detected. Bond metal Co for structure (corresponding to 89-7094 card).
具体实施方式Detailed ways
下面结合实施例对本发明作进一步说明。The present invention will be further described below in conjunction with the examples.
实施例1:Example 1:
分别采用压力烧结工艺制备的WC–0.7Cr3C2–0.4VC–10Co(其中数值为质量分数,%,下同)和WC–0.4Cr3C2–0.3VC–6Co硬质合金刀片,以及TiC0.7N0.3–25WC–10TaC–2Mo2C–6Co–6Ni金属陶瓷刀片作为如图1所示的铣削加工用涂层刀片的基体。与此同时也制备了相应材质10×10×5mm的测试用合金样品。扫描电镜观察与分析结果表明,2种硬质合金的晶粒度均为~0.4μm,金属陶瓷中具有典型芯环结构的(Ti,M)C0.7N0.3(M=W,Ta,Mo)硬质相的晶粒度为~1.2μm;上述3种合金均为正常的硬质相+粘结相两相结构。差示扫描量热分析结果表明,上述3种合金的共晶温度分别为1310℃,1325℃和1340℃。WC-0.7Cr 3 C 2 -0.4VC-10Co (where the value is mass fraction, %, the same below) and WC-0.4Cr 3 C 2 -0.3VC-6Co cemented carbide inserts prepared by pressure sintering process, and TiC 0.7 N 0.3 – 25WC – 10TaC – 2Mo 2 C – 6Co – 6Ni cermet insert is used as the base of the coated insert for milling as shown in Figure 1. At the same time, alloy samples with the corresponding material of 10×10×5mm for testing were also prepared. Scanning electron microscope observation and analysis results show that the grain size of the two cemented carbides is ~0.4μm, and the cermet has a typical core-ring structure (Ti, M)C 0.7 N 0.3 (M=W, Ta, Mo) The grain size of the hard phase is ~1.2 μm; the above three alloys are all normal hard phase + binder phase two-phase structure. Differential scanning calorimetry analysis results show that the eutectic temperatures of the above three alloys are 1310°C, 1325°C and 1340°C, respectively.
将上述经过喷砂和研磨等处理的合金刀片和方形合金样品装入高纯石墨舟皿中,以相互隔离状态均匀埋伏在由Y2O3和石墨粉组成的混合粉体填料中,其中石墨粉的质量分数为6%,2种粉末的纯度均为99.9%,Y2O3粒度对应的筛网孔径在75~115μm之间,石墨粉粒度对应的筛网孔径在38~75μm之间。合金样品之间通过混合粉体填料隔离。将装入舟皿的上述刀片和方形样品放入烧结炉中进行真空烧结,烧结温度为1350℃,保温时间为70min,随炉冷却出炉。The above-mentioned sandblasted and ground alloy blades and square alloy samples were loaded into a high-purity graphite boat, and evenly buried in a mixed powder filler composed of Y 2 O 3 and graphite powder in a mutually isolated state, in which graphite The mass fraction of the powder is 6%, the purity of the two powders is 99.9%, the sieve aperture corresponding to the particle size of Y 2 O 3 is between 75 and 115 μm, and the aperture of the mesh corresponding to the particle size of the graphite powder is between 38 and 75 μm. The alloy samples are separated by mixed powder fillers. The above-mentioned blade and square sample loaded into the boat were put into a sintering furnace for vacuum sintering, the sintering temperature was 1350° C., the holding time was 70 min, and the furnace was cooled and released.
合金烧结体表面和抛光截面的扫描电镜观察结果表明,经混合粉体填料中真空烧结后的3种合金表面均出现了均质连续、均匀覆盖的粘结金属富集层,其平均厚度分别为1.9、1.0和0.6μm。The scanning electron microscope observation results of the surface of the alloy sintered body and the polished section show that the three alloys after vacuum sintering in the mixed powder filler have a homogeneous continuous and uniformly covered binder metal enrichment layer, and the average thickness is 1.9, 1.0 and 0.6 μm.
采用过筛的方法清除制品表面的填料,随后将制品放入酒精介质中进行超声波清洗。采用直流磁控溅射技术在上述3种合金刀片和方形合金基体表面沉积TiSiN/TiAlSiN/AlTiN(与基体直接接触)多层复合涂层。涂层沉积前,将沉积室抽真空至3×10–3Pa,将基体加热至450℃,在高纯Ar气中对基体施加–100V偏压,对其表面进行溅射刻蚀50min。在基体温度450℃、基体偏压–100V、高纯N2气氛条件下进行涂层沉积。厚度为~2.9μm TiSiN层和厚度为~1.6μm AlTiN层分别由TiSi靶和TiAl靶单独沉积获得;TiAlSiN过渡层由2种靶材同时沉积获得,厚度为~50nm(高分辨透射电镜测量结果)。电子探针分析结果表明,涂层成分为Ti0.94Si0.06N/TiAlSiN/Al0.52Ti0.48N。The filler on the surface of the product is removed by sieving, and then the product is placed in an alcohol medium for ultrasonic cleaning. The TiSiN/TiAlSiN/AlTiN (direct contact with the substrate) multilayer composite coating was deposited on the surfaces of the above three alloy blades and square alloy substrates by DC magnetron sputtering technology. Before coating deposition, the deposition chamber was evacuated to 3 × 10 -3 Pa, the substrate was heated to 450 °C, and a bias voltage of –100 V was applied to the substrate in high-purity Ar gas, and the surface was sputter-etched for 50 min. The coating deposition was carried out under the conditions of substrate temperature of 450 °C, substrate bias voltage of -100 V, and high-purity N 2 atmosphere. The TiSiN layer with a thickness of ~2.9μm and the AlTiN layer with a thickness of ~1.6μm were deposited separately from the TiSi target and the TiAl target, respectively. . Electron probe analysis results show that the coating composition is Ti 0.94 Si 0.06 N/TiAlSiN/Al 0.52 Ti 0.48 N.
图2~4为采用WC–0.7Cr3C2–0.4VC–10Co合金为基体制备的涂层方形硬质合金样品表面的XRD图谱和采用MDI Jade软件获得的物相分析结果。计算结果表明,TiSiN和AlTiN的TC(111)分别为3.2和5.9。Figures 2-4 show the XRD patterns of the surface of the coated square cemented carbide samples prepared by using the WC-0.7Cr 3 C 2 -0.4VC-10Co alloy as the matrix and the phase analysis results obtained by the MDI Jade software. The calculated results show that the TC(111) of TiSiN and AlTiN are 3.2 and 5.9, respectively.
铣削实验在立式加工中心进行。刀盘齿数为3,每次实验使用1片刀片。加工对象为316L奥氏体不锈钢,工件尺寸为1200×600×600mm。干式铣削参数如下:切削速度180m/min,进给量0.7mm/th(每齿的进刀量),轴向切深0.7mm,径向切深20mm。GB/T 16459-1996面铣刀寿命试验确定刀具寿命:后刀面最大磨损量VBmax=0.3mm。The milling experiments were carried out on a vertical machining center. The number of teeth on the cutter head was 3, and one blade was used in each experiment. The processing object is 316L austenitic stainless steel, and the workpiece size is 1200×600×600mm. The dry milling parameters are as follows: cutting speed 180m/min, feed 0.7mm/th (feed per tooth), axial depth of cut 0.7mm, radial depth of cut 20mm. GB/T 16459-1996 face milling cutter life test to determine the tool life: the maximum wear of the flank face VB max = 0.3mm.
铣削实验结果表明,采用WC–0.7Cr3C2–0.4VC–10Co、WC–0.4Cr3C2–0.3VC–6Co以及TiC0.7N0.3–25WC–10TaC–2Mo2C–6Co–6Ni合金为基体的TiSiN/TiAlSiN/AlTiN涂层铣削刀具的平均寿命分别为59min、54min和63min。The results of milling experiments show that the WC–0.7Cr 3 C 2 –0.4VC–10Co, WC–0.4Cr 3 C 2 –0.3VC–6Co and TiC 0.7 N 0.3 –25WC–10TaC–2Mo 2 C–6Co–6Ni alloys are The average lifespans of the TiSiN/TiAlSiN/AlTiN coated milling tools for the substrate are 59min, 54min and 63min, respectively.
对比例1:Comparative Example 1:
3种合金刀片和方形合金基体与实施例1为同批制备。与实施例1唯一不同的是,合金刀片和方形合金样品未经涂层前表面结构第二次烧结调控,即没有经过在混合粉体填料中的真空烧结处理。涂层沉积和铣削实验与实施例1在同样条件下同批进行。The three alloy blades and the square alloy base were prepared in the same batch as in Example 1. The only difference from Example 1 is that the alloy inserts and the square alloy samples are not subject to the second sintering control of the surface structure before the coating, that is, they have not undergone the vacuum sintering treatment in the mixed powder filler. Coating deposition and milling experiments were performed in the same batch as Example 1 under the same conditions.
基于XRD分析的计算结果表明,采用未经涂层前表面结构第二次烧结调控的WC–0.7Cr3C2–0.4VC–10Co合金为基体制备的涂层,其TiSiN和AlTiN涂层的TC(111)分别为1.4和1.8。The calculation results based on XRD analysis show that the coatings prepared by using the WC-0.7Cr 3 C 2 -0.4VC-10Co alloy with the second sintering control of the uncoated front surface structure as the matrix have the TC of TiSiN and AlTiN coatings. (111) are 1.4 and 1.8, respectively.
铣削实验结果表明,采用未经涂层前表面结构第二次烧结调控的WC–0.7Cr3C2–0.4VC–10Co、WC–0.4Cr3C2–0.3VC–6Co以及TiC0.7N0.3–25WC–10TaC–2Mo2C–6Co–6Ni合金为基体的TiSiN/TiAlSiN/AlTiN铣削刀具的平均寿命分别为36min、32min和40min。The results of milling experiments show that WC – 0.7Cr3C2–0.4VC–10Co, WC – 0.4Cr3C2–0.3VC – 6Co and TiC0.7N0.3– The average life of the TiSiN/TiAlSiN/AlTiN milling tools based on 25WC–10TaC–2Mo 2 C–6Co–6Ni alloy is 36min, 32min and 40min, respectively.
实施例2:Example 2:
采用压力烧结工艺制备的WC–10Co、WC–10Ni和WC–5Co–5Ni等3种10×10×5mm方形硬质合金样品作为涂层基体。扫描电镜观察与分析结果表明,3种硬质合金的晶粒度均为~1.2μm,均为正常的硬质相+粘结相两相结构。差示扫描量热分析结果表明,上述3种合金的共晶温度分别为1370℃,1400℃和1385℃。Three 10×10×5mm square cemented carbide samples, WC–10Co, WC–10Ni and WC–5Co–5Ni, prepared by pressure sintering process were used as coating substrates. Scanning electron microscope observation and analysis results show that the grain sizes of the three cemented carbides are all ~1.2 μm, and they are all normal hard phase + binder phase two-phase structure. Differential scanning calorimetry analysis results show that the eutectic temperatures of the above three alloys are 1370℃, 1400℃ and 1385℃, respectively.
将上述经过喷砂和研磨等处理的方形合金样品分为4组,每组均包含3种合金,装入高纯石墨舟皿中,以相互隔离状态均匀埋伏在分别由La2O3和3%(质量分数,下同)石墨粉、CeO2和4%石墨粉、Pr6O11和5%石墨粉、Nd2O3和6%石墨粉组成的混合粉体填料中;上述稀土氧化物和石墨粉的纯度均为99.9%;上述稀土氧化物粒度对应的筛网孔径在75~115μm之间,石墨粉粒度对应的筛网孔径在38~75μm之间。合金样品之间通过混合粉体填料隔离。将装入舟皿的上述方形样品放入烧结炉中分2组进行真空烧结。第1组为装入La2O3+3%石墨粉和CeO2+4%石墨粉混合粉体填料中的合金,烧结温度为1410℃,保温时间为40min,随炉冷却出炉。第2组为装入Pr6O11+5%石墨粉和Nd2O3+6%石墨粉混合粉体填料中的合金,烧结温度为1410℃,保温时间为120min,随炉冷却出炉。The above-mentioned square alloy samples treated by sandblasting and grinding were divided into 4 groups, each group containing 3 kinds of alloys, loaded into high-purity graphite boats, and evenly buried in a state of mutual isolation between La 2 O 3 and 3 alloys. % (mass fraction, the same below) graphite powder, CeO 2 and 4% graphite powder, Pr 6 O 11 and 5% graphite powder, Nd 2 O 3 and 6% graphite powder in the mixed powder filler; the above rare earth oxides The purity of the graphite powder and the graphite powder are both 99.9%; the mesh aperture corresponding to the particle size of the rare earth oxide is between 75 and 115 μm, and the mesh aperture corresponding to the particle size of the graphite powder is between 38 and 75 μm. The alloy samples are separated by mixed powder fillers. The above-mentioned square samples loaded into the boat were placed in a sintering furnace for vacuum sintering in two groups. The first group is an alloy loaded with La 2 O 3 +3% graphite powder and CeO 2 +4% graphite powder mixed powder filler, the sintering temperature is 1410 ° C, the holding time is 40 min, and the furnace is cooled and released. The second group is an alloy loaded with Pr 6 O 11 +5% graphite powder and Nd 2 O 3 +6% graphite powder mixed powder filler.
合金烧结体表面和抛光截面的扫描电镜观察结果表明,上述3种合金表面均出现了均质连续、均匀覆盖的粘结金属富集层,其平均厚度受填料种类的影响较小,保温时间分别为40min和120min的WC–10Co合金表面粘结金属富集层平均厚度分别为1.0μm和1.8μm;保温时间分别为40min和120min的WC–10Ni合金表面粘结金属富集层平均厚度分别为0.7μm和1.1μm;保温时间分别为40min和120min的WC–5Co–5Ni合金表面粘结金属富集层平均厚度分别为1.1μm和1.9μm。上述平均厚度是同一成分合金在相同烧结温度和保温时间条件下,对应不同填料的合金其表面粘结金属富集层厚度的统计结果。The scanning electron microscope observation results of the surface of the alloy sintered body and the polished section show that the above three alloys have a homogeneous continuous and uniformly covered bond metal enrichment layer, and the average thickness is less affected by the type of filler, and the holding time is different. The average thickness of the metal-enriched layer on the surface of the WC-10Co alloy for 40min and 120min was 1.0μm and 1.8μm, respectively; the average thickness of the metal-enriched layer on the surface of the WC-10Ni alloy for the holding time of 40min and 120min was 0.7 μm, respectively. μm and 1.1 μm; the average thickness of the metal-enriched layer on the surface of WC–5Co–5Ni alloy with holding time of 40 min and 120 min, respectively, was 1.1 μm and 1.9 μm. The above average thickness is the statistical result of the thickness of the metal-enriched layer on the surface of alloys with different fillers under the same sintering temperature and holding time of the same composition alloy.
采用过筛的方法清除制品表面的填料,随后将制品放入酒精介质中进行超声波清洗。采用直流磁控溅射技术在上述3种成分的方形合金基体表面沉积AlCrN单层涂层。沉积前将沉积室抽真空至压力3×10–3Pa,将基体加热至450℃,在高纯Ar气中对基体施加–100V偏压,对其表面进行溅射刻蚀50min。在基体温度450℃、基体偏压–100V和高纯N2气氛条件下进行涂层沉积。电子探针分析结果表明,涂层成分为Al0.55Cr0.45N,厚度为~4.0μm。The filler on the surface of the product is removed by sieving, and then the product is placed in an alcohol medium for ultrasonic cleaning. AlCrN single-layer coating was deposited on the surface of the square alloy matrix with the above three components by DC magnetron sputtering technology. Before deposition, the deposition chamber was evacuated to a pressure of 3 × 10 -3 Pa, the substrate was heated to 450 °C, a bias voltage of –100 V was applied to the substrate in high-purity Ar gas, and the surface was sputter-etched for 50 min. The coating deposition was carried out under the conditions of a substrate temperature of 450 °C, a substrate bias voltage of –100 V and a high-purity N2 atmosphere. Electron probe analysis results show that the coating composition is Al 0.55 Cr 0.45 N and the thickness is ~4.0 μm.
基于XRD分析和计算结果表明,AlCrN的TC(111)受合金表面粘结金属富集层厚度的影响较小;WC–10Co、WC–10Ni和WC–5Co–5Ni等3种合金基体表面具有fcc-AlN晶体结构AlCrN涂层的TC(111)平均值分别为6.1、5.5和5.9。Based on XRD analysis and calculation results, it is shown that the TC(111) of AlCrN is less affected by the thickness of the bonding metal-enriched layer on the surface of the alloy; WC-10Co, WC-10Ni and WC-5Co-5Ni have fcc The average values of TC(111) for AlCrN coatings with AlN crystal structure are 6.1, 5.5 and 5.9, respectively.
对比例2:Comparative Example 2:
3种方形合金基体与实施例2为同批制备。与实施例2唯一不同的是,所有方形合金样品未经涂层前表面结构第二次烧结调控,即没有经过在混合粉体填料中的真空烧结处理。涂层沉积与实施例2为同批进行。The three square alloy substrates were prepared in the same batch as Example 2. The only difference from Example 2 is that all the square alloy samples were not conditioned by the second sintering of the surface structure before the coating, that is, they were not subjected to vacuum sintering in the mixed powder filler. Coating deposition was performed on the same batch as Example 2.
基于XRD分析和计算结果表明,采用未经涂层前表面结构第二次烧结调控的WC–10Co、WC–10Ni和WC–5Co–5Ni等3种合金为基体,其表面具有fcc-AlN晶体结构AlCrN涂层的TC(111)分别为1.6、1.4和1.5。Based on XRD analysis and calculation results, it is shown that three alloys, WC-10Co, WC-10Ni and WC-5Co-5Ni, which are controlled by the second sintering of the uncoated front surface structure, are used as the matrix, and the surface has the fcc-AlN crystal structure. The TC(111) of the AlCrN coatings are 1.6, 1.4 and 1.5, respectively.
上述所有实施例和对比例的数据获取采用随机抽样方式,每种条件的抽样样本数量为3。在同等测试条件下,对比例2所得产品明显低于实施例2对应产品的寿命。The data acquisition of all the above embodiments and comparative examples adopts random sampling, and the number of sampling samples for each condition is 3. Under the same test conditions, the product obtained in Comparative Example 2 is significantly shorter than the life of the corresponding product in Example 2.
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