CN110411613B - Air guide gasket and method for manufacturing the same - Google Patents
Air guide gasket and method for manufacturing the same Download PDFInfo
- Publication number
- CN110411613B CN110411613B CN201910833186.1A CN201910833186A CN110411613B CN 110411613 B CN110411613 B CN 110411613B CN 201910833186 A CN201910833186 A CN 201910833186A CN 110411613 B CN110411613 B CN 110411613B
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- air guide
- gasket
- air
- gasket body
- guide groove
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/005—Measuring force or stress, in general by electrical means and not provided for in G01L1/06 - G01L1/22
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/06—Devices or apparatus for measuring differences of two or more fluid pressure values using electric or magnetic pressure-sensitive elements
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
本发明提供一种导气垫圈及其制造方法，属于专用于制造传感器的设备技术领域，其中，导气垫圈为环形结构，包括：垫圈本体，为环形结构，具有上、下两个结合面；导气凹槽，设置在所述垫圈本体的至少一个所述结合面上，所述导气凹槽连通所述垫圈本体的内外两侧；本发明的导气垫圈，在使用时，通过导气凹槽将垫圈本体的内外两侧连通，在不改变垫圈本体原来厚度的前提下，使垫圈本体内圈的空气在抽真空时，能够快速高效的排出，从而避免气体陷入在环形垫圈的内部，提高传感器在超高真空排气时的排气效率和排气效果。
The present invention provides an air-conducting gasket and a manufacturing method thereof, belonging to the technical field of equipment specially used for manufacturing sensors, wherein the air-conducting gasket is an annular structure, comprising: a gasket body, which is an annular structure, and has two upper and lower joint surfaces; an air-conducting groove, which is arranged on at least one of the joint surfaces of the gasket body, and the air-conducting groove connects the inner and outer sides of the gasket body; when the air-conducting gasket of the present invention is in use, the inner and outer sides of the gasket body are connected through the air-conducting groove, and the air in the inner circle of the gasket body can be quickly and efficiently discharged when vacuuming without changing the original thickness of the gasket body, thereby avoiding gas being trapped in the interior of the annular gasket, and improving the exhaust efficiency and exhaust effect of the sensor during ultra-high vacuum exhaust.
Description
Technical Field
The invention relates to the technical field of equipment special for manufacturing sensors, in particular to a guide air cushion ring and a manufacturing method thereof.
Background
The differential pressure sensor is composed of a plurality of components such as an upper electrode, an insulator, a lower electrode and the like. When the electrodes are pressed, the stressed electrodes deform to a certain extent, so that the distance between the upper electrode and the lower electrode changes to a certain extent, and the detection signals change.
In the preparation process of the differential pressure sensor, the distance between the two electrodes is regulated and controlled. Typically by replacing one or more hard material gage washers of different thickness, the purpose is to define the test range of the very small differential pressure detection signal.
However, because the processing precision and the flatness of the internal fittings of the differential pressure sensor are extremely high, when the existing distance-adjusting gasket is adopted to adjust the distance, the gas flow between two electrodes is easy to be blocked, the exhaust efficiency of the sensor is affected, even the gas is trapped in a tiny space, and the service life of the sensor is directly affected.
Disclosure of Invention
Therefore, the invention aims to provide a gas guide cushion ring which is used for solving the problems of long exhaust sealing time and more residual gas after sealing of a differential pressure sensor in the prior art.
In order to solve the above technical problems, the present invention provides an air guide gasket, including:
the gasket body is of an annular structure and is provided with an upper joint surface and a lower joint surface;
The air guide grooves are arranged on at least one joint surface of the gasket body and are communicated with the inner side and the outer side of the gasket body.
As a preferable scheme, the upper and lower joint surfaces of the gasket body are respectively provided with the air guide grooves.
As a preferable scheme, the air guide groove is sinusoidal.
As a preferred solution, the air guide groove has two mutually intersecting strips on the joint surface.
As a preferred embodiment, the method further comprises:
the air guide gap is arranged on the end face of the support step surrounded by the air guide groove of the gasket body, and two ends of the air guide gap are respectively communicated with the air guide groove.
As a preferred solution, the air guide slits have two on the end face of the support step, and the two air guide slits are connected in a crisscross form.
As a preferable scheme, the width of the air guide gap is 0.1-1 mm.
As a preferable scheme, the thickness of the gasket body is 0.05-0.35 mm.
As a preferable scheme, the depth of the air guide groove is 0.01-0.1 mm.
The invention provides a manufacturing method of an air guide gasket, which comprises the following steps:
selecting a gasket body according to the thickness requirement;
The method comprises the steps of arranging an air guide groove, and arranging the air guide groove on the joint surface of a gasket body by adopting a laser, electron beam, chemical corrosion or electrochemical corrosion method so as to enable the inner side and the outer side of the gasket body to be communicated;
And arranging an air guide gap, wherein at least one air guide gap is arranged on the joint surface of the gasket body and the end surface of the supporting step surrounded by the air guide groove in a laser, electron beam, chemical corrosion or electrochemical corrosion method, so that two ends of the air guide gap are communicated with the air guide groove and/or the inner side and the outer side of the gasket body.
The technical scheme of the invention has the following advantages:
1. when the air guide gasket provided by the invention is used, the inner side and the outer side of the gasket body are communicated through the air guide groove, so that air in the inner ring of the gasket body can be rapidly and efficiently discharged when the gasket body is vacuumized on the premise of not changing the original thickness of the gasket body, the air is prevented from being trapped in the annular gasket, and the exhaust efficiency and the exhaust effect of the sensor during ultrahigh vacuum exhaust are improved.
2. According to the air guide gasket provided by the invention, the air guide slit arranged on the end part of the supporting step can exhaust air at the end part of the supporting step, so that when a plurality of gaskets are stacked for use, air cannot sink into a tiny space at the end part of the supporting step, the exhaust effect of the sensor is ensured, and the quality of the sensor can be improved.
3. According to the manufacturing method of the air guide gasket, after the thickness of the gasket body is selected, the air guide groove is manufactured, the thickness of the gasket body is not changed, the setting method is simple, the thickness of the annular gasket at the position of the supporting step is unchanged, the original application range of the gasket is guaranteed, and then the air guide gap is arranged on the supporting end face of the supporting step, so that air at the supporting end face of the supporting step can be further guided out, and the air guide gasket is convenient to stack and use, and the sensor is vacuumized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic perspective view of an air guide gasket according to an embodiment of the present invention.
Fig. 2 is an enlarged view of the area a in fig. 1.
Fig. 3 is a front view of a part of the structure of the air guide gasket.
Fig. 4 is a top view of fig. 3.
Fig. 5 is a schematic perspective view showing a use state of stacking a plurality of sets of air guide rings.
Fig. 6 is an enlarged view of region B in fig. 5.
Reference numerals illustrate:
1. The device comprises a gasket body, an air guide groove, a supporting step and an air guide gap.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected via an intervening medium, or in communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Example 1
The embodiment provides a specific implementation manner of an air guide gasket, as shown in fig. 1 and 2, the gasket body 1 of this implementation manner is a conventional ring-shaped gasket, air guide grooves 2 are respectively formed on the upper and lower bonding surfaces of the gasket body 1 by laser, the two air guide grooves 2 are in a sine curve shape intersecting each other, and the air guide grooves 2 are used for communicating the inner side and the outer side of the gasket body 1, so that the air inside the gasket body 1 can be timely pumped out during vacuumizing.
Two air guide gaps 4 are further formed in the end face of the supporting step 3 surrounded by the air guide grooves 2, the air guide gaps 4 are arranged in a crisscross mode, one air guide gap 4 is communicated with the inner side and the outer side of the gasket body 1, the other air guide gap 4 is communicated with the air guide grooves 2 on the two sides of the supporting step 3, and air at the end face of the supporting step 3 can be timely pumped out when vacuumizing is conducted through the air guide gaps 4.
In order to realize accurate adjustment of the distance between the two electrodes of the sensor, the gasket body 1 of the embodiment is made of hard materials, and specifically, ceramics, glass, alloy, metal, bakelite and the like can be used.
As shown in fig. 3 and 4, the thickness h1 of the gasket body 1 may be selected from 0.05 to 0.35mm;
Regarding the depth h2 of the air guiding groove 2, the range of the air guiding groove is 0.01-0.1 mm.
Regarding the width d of the air guide slit 4, the range of 0.1 to 1mm is selected.
The specific numerical values can be selected according to actual needs, for example, in the embodiment, the thickness h1 of the gasket body 1 is 0.35mm, the depth h2 of the air guide groove 2 is 0.04mm, and the width d of the air guide groove 2 is 1mm.
As shown in fig. 5 and 6, when in use, the gasket bodies 1 can be stacked in sequence as required, and when being stacked, two gasket bodies 1 are supported by the support step 3. Thus, when the sensor is exhausted, the gas between the two adjacent gasket bodies 1 is smoothly exhausted, and the gas is not trapped in the gasket bodies 1, so that the quality of the sensor is ensured.
In addition, as an alternative embodiment, the gasket body 1 may be provided with the air guide groove 2 on only one side of the joint surface, and the other side may be used to cooperate with the joint surface of the other gasket body 1 provided with the air guide groove 2.
As an alternative embodiment, the air guide slit 4 provided on the end surface of the support step 3 of the gasket body 1 may be omitted, and the air circulation between the inner and outer sides of the gasket body 1 may be achieved only by the air guide groove 2.
Example 2
The embodiment provides a specific implementation manner of a manufacturing method of an air guide gasket, which comprises the following steps:
The method comprises the steps of firstly, selecting the thickness of a gasket body 1 to be processed, selecting the thickness of a proper gasket according to the distance between two electrodes of a sensor which is required to be adjusted, wherein the specific selectable range is 0.05-0.35 mm, and selecting the thickness of the gasket to adjust the detection signal change of the differential pressure sensor through a micron-sized ultrathin gasket.
And secondly, arranging an air guide groove 2, and arranging the air guide groove 2 on the joint surface of the gasket body 1 by adopting methods such as laser, electron beam, chemical corrosion or electrochemical corrosion and the like so as to enable the inner side and the outer side of the gasket body 1 to be communicated.
And thirdly, arranging an air guide slit 4, and arranging two air guide slits 4 which are crisscrossed with each other on the end face of the supporting step 3 surrounded by the air guide groove 2 on the joint surface of the gasket body 1 by using a laser, electron beam, chemical corrosion or electrochemical corrosion method so that two ends of the air guide slit 4 are communicated with the air guide groove 2 and the inner side and the outer side of the gasket body 1.
In addition, as an alternative real-time mode, the step of arranging the air guide slit 4 can be omitted, and the air circulation inside and outside the gasket body 1 can be realized only through the air guide groove 2.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (9)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910833186.1A CN110411613B (en) | 2019-09-04 | 2019-09-04 | Air guide gasket and method for manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910833186.1A CN110411613B (en) | 2019-09-04 | 2019-09-04 | Air guide gasket and method for manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110411613A CN110411613A (en) | 2019-11-05 |
| CN110411613B true CN110411613B (en) | 2025-05-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910833186.1A Active CN110411613B (en) | 2019-09-04 | 2019-09-04 | Air guide gasket and method for manufacturing the same |
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| Country | Link |
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| CN (1) | CN110411613B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2302378Y (en) * | 1997-03-05 | 1998-12-30 | 冶金工业部钢铁研究总院 | Self-sealing inflation valve |
| CN210322097U (en) * | 2019-09-04 | 2020-04-14 | 川北真空科技(北京)有限公司 | Air guide gasket |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6532737B1 (en) * | 2001-08-30 | 2003-03-18 | Dana Corporation | Exhaust port gasket with cylinder-specific electronic oxygen sensors |
| US8272346B2 (en) * | 2009-04-10 | 2012-09-25 | Lam Research Corporation | Gasket with positioning feature for clamped monolithic showerhead electrode |
| CN102395250B (en) * | 2011-11-01 | 2013-08-21 | 深南电路有限公司 | Vacuum pumping device and method for circuit board |
| CN208579860U (en) * | 2018-07-18 | 2019-03-05 | 上海贤日测控科技有限公司 | A kind of differential capacitive pressure sensor structure |
| CN208606936U (en) * | 2018-08-16 | 2019-03-15 | 常州曼淇威压力控制技术有限公司 | Anti- pipeline floats electricity pressure sensor |
-
2019
- 2019-09-04 CN CN201910833186.1A patent/CN110411613B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2302378Y (en) * | 1997-03-05 | 1998-12-30 | 冶金工业部钢铁研究总院 | Self-sealing inflation valve |
| CN210322097U (en) * | 2019-09-04 | 2020-04-14 | 川北真空科技(北京)有限公司 | Air guide gasket |
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| Publication number | Publication date |
|---|---|
| CN110411613A (en) | 2019-11-05 |
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