CN110514673A - A kind of detection device of glass substrate - Google Patents
A kind of detection device of glass substrate Download PDFInfo
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- CN110514673A CN110514673A CN201910578234.7A CN201910578234A CN110514673A CN 110514673 A CN110514673 A CN 110514673A CN 201910578234 A CN201910578234 A CN 201910578234A CN 110514673 A CN110514673 A CN 110514673A
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- 239000011521 glass Substances 0.000 title claims abstract description 187
- 239000000758 substrate Substances 0.000 title claims abstract description 181
- 238000001514 detection method Methods 0.000 title claims abstract description 92
- 230000005540 biological transmission Effects 0.000 claims abstract description 13
- 230000007246 mechanism Effects 0.000 claims description 21
- 241000252254 Catostomidae Species 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims description 2
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 5
- 238000006748 scratching Methods 0.000 abstract description 2
- 230000002393 scratching effect Effects 0.000 abstract description 2
- 230000008859 change Effects 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229920001621 AMOLED Polymers 0.000 description 3
- 238000005188 flotation Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000002716 delivery method Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
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- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to technical field of liquid crystal display, disclose a kind of detection device of glass substrate, including air floating platform, transmission device, rotating device and detection device, wherein air floating platform is configured as air bearing and supports glass substrate to be measured；Transmission device is configured as transmitting glass substrate to be measured to be moved along air floating platform；Rotating device vertically runs through air floating platform and can go up and down with respect to air floating platform, and rotating device is configured as adsorbing glass substrate to be measured and glass substrate to be measured is driven to rotate；Detection device is set up in air floating platform, and detection device is configured to detect to before rotation with postrotational glass substrate to be measured.The detection device can rotate glass substrate in the case where glass substrate is in suspended state, to realize exchanging for glass substrate long side and short side, realize the Scanning Detction to glass substrate both direction (longitudinal direction and short side direction), and can be avoided the surface for scratching glass substrate in rotary course, suitable for glass substrate flexible and rigid.
Description
Technical field
The present invention relates to technical field of liquid crystal display more particularly to a kind of detection devices of glass substrate.
Background technique
In TFT-LCD (Thin film transistor-liquid crystal display, tft liquid crystal
Display), LTPS (Low Temperature Poly-silicon, low temperature polycrystalline silicon) liquid crystal display, AM-OLED
(Active-matrix organic light-emitting diode, active matrix organic light emitting diode panel) etc. is more
In the processing procedure of kind display panel, when glass substrate is after finishing laser molecular annealing, needing to check whether there is on glass substrate
The defects of color unevenness (mura), bright dim spot.
When detecting glass substrate, need glass substrate being transmitted to check bit.Currently, mainly utilizing belt
Or the mode that idler wheel holds the lower surface of glass substrate and then glass substrate is driven to move forward is transmitted.Using this biography
Delivery method, when needing by the long side of glass substrate and when short side change of direction, usually by operator lift glass substrate into
Row correspondingly rotates.Manually-operated mode is time-consuming and laborious, and efficiency is lower.
Certainly, it is transmitted after also thering is the automatic rotating platform of use to be rotated by 90 ° glass substrate, but existing automatic
Rotating platform can be easy in rotary course to scratch glass baseplate surface directly with the following table face contact of glass substrate.
In order to reduce the lower surface of glass substrate and the contact of rotating actuator, a variety of utilizations exist in the prior art
Air is blown upwards with the air bearing rotary reversing device of planar support glass substrate.Such as application No. is 201720152664.9 disclosures
" glass substrate slewing ", the equipment utilization air floating platform planar support glass substrate, utilize driving device drive glass
Substrate is moved along air floating platform, rotating device is liftably arranged above air floating platform, rotating device is provided with can be with glass
Drive rod of the side contact of glass substrate to drive glass substrate to rotate.Although the glass substrate slewing ensure that glass
Substrate rotate when its surface with slewing occur it is any contact, avoid glass baseplate surface scuffing, still, the rotation
Device is to rotate glass substrate in the way of drive rod clamping glass substrate, and its structure is complicated, can not be suitable for flexible
Glass substrate (clamping flexible glass substrate, flexible glass substrate is easy to cause to deform), while air floating platform and driving are filled
The structure set also becomes complicated accordingly, also more complicated in operation.
In view of the above shortcomings, the designer, is actively subject to research and innovation, to found a kind of new structural glass
The detection device of glass substrate makes it with more the utility value in industry.
Summary of the invention
It is an object of the invention to propose a kind of detection device of glass substrate, suspension can be in glass substrate
Glass substrate is rotated under state, to realize exchanging for glass substrate long side and short side, is realized to glass substrate both direction
The Scanning Detction of (longitudinal direction and short side direction), and can be avoided the surface for scratching glass substrate in rotary course, it is suitable for
Glass substrate flexible and rigid.
To achieve this purpose, the present invention adopts the following technical scheme:
A kind of detection device of glass substrate, including air floating platform, transmission device, rotating device and detection device,
In:
The air floating platform is configured as air bearing and supports glass substrate to be measured；
The transmission device is configured as transmitting the glass substrate to be measured to be moved along the air floating platform；
The rotating device vertically run through the air floating platform and can air floating platform lifting relatively, the rotation
Device is configured as adsorbing the glass substrate to be measured and drives the glass substrate rotation to be measured；
The detection device is set up in the air floating platform, the detection device be configured to before rotation with it is postrotational
The glass substrate to be measured is detected.
Glass substrate is supported using air floating platform air bearing, glass substrate can be made to be in suspended state and transmitted, as general
When the long side and short side change of direction of glass substrate, contact rotating device rise with glass substrate, by glass under suspended state
Glass substrate is rotated, and rotating device is only contacted at the center of glass substrate, and contact area is smaller, in rotary course not
The surface of glass substrate can be caused to scratch, and can be avoided glass substrate deformation；Glass substrate only need to be on air floating platform
It is primary back and forth, detection device can the glass substrate respectively to longitudinal direction and short side direction take pictures, improve detection efficiency.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, the detection device include the first detection
Component and/or the second detection components, first detection components are configured as obtaining the overall diagram of the glass substrate to be measured
Picture, second detection components are configured as obtaining the fixed point image of the glass substrate to be measured.By obtaining whole and fixed point
Image, glass substrate can comprehensively be detected.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, first detection components include multiple
Line sweeps camera, and each line is swept camera and can be translated along the conveying direction perpendicular to the glass substrate to be measured.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, second detection components include multiple
Gauge head, each gauge head can be translated along the conveying direction perpendicular to the glass substrate to be measured.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, each gauge head are obliquely installed.Inclination is set
Setting can take pictures to glass substrate in a manner of all standing.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, the detection device further include detection institute
State the detection piece of air floating platform flatness.It can ensure that the flatness of air floating platform using detection piece, it is ensured that convey glass substrate
Stability ensures that detection effect.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, the detection piece are to be erected at the gas
Leveling ruler above floating platform.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, the detection device further include by position machine
Structure, it is described to be configured as positioning to before rotation with the postrotational glass substrate to be measured by position mechanism.Because of glass substrate
After rotation, long side is exchanged with short side, using by position mechanism, it can be ensured that glass substrate is located at required position, convenient for accurate
It takes pictures to glass substrate on ground.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, the rotating device include the first support
Seat, first actuator rotatable around its axis with the turntable of first support base rotation connection and the driving turntable,
The turntable is equipped with multiple suckers, and the sucker is soft suction nozzle, and the soft suction nozzle periphery is connected with rigid support ring.It is soft
Suction nozzle can cause to scratch to avoid to glass substrate, and rigid support ring can rotate through to avoid soft suction nozzle in absorption glass substrate
It is not in place because being rotated caused by deformation in journey.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, the transmission device include being set to institute
State the line motor of air floating platform both sides, the line motor is connected with liftable adsorbing mechanism, and two line motors it
Between spacing be less than or equal to the air floating platform air bearing spacing.The structure can ensure that stability when glass substrate transmission.
The invention has the benefit that supporting glass substrate using air floating platform air bearing, glass substrate can be made to be in outstanding
Floating state is transmitted, and when by the long side of glass substrate and short side change of direction, connects rotating device rise with glass substrate
Touching, rotates glass substrate under suspended state, and rotating device is only contacted at the center of glass substrate, contact surface
Product is smaller, will not cause to scratch to the surface of glass substrate in rotary course, and can be avoided glass substrate deformation；Glass
Substrate need to only move back and forth once on air floating platform, the glass that detection device can respectively to longitudinal direction and short side direction
Substrate is taken pictures, and detection efficiency is improved.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the detection device for the glass substrate that the specific embodiment of the invention provides；
Fig. 2 is the structural representation of another angle of the detection device for the glass substrate that the specific embodiment of the invention provides
Figure；
Fig. 3 is that the structure of the rotating mechanism in the detection device for the glass substrate that the specific embodiment of the invention provides is shown
It is intended to；
Fig. 4 is the structural schematic diagram of the rotating device in rotating mechanism；
Fig. 5 is the structural schematic diagram by position mechanism in Fig. 3 at A.
In figure: 100- air floating platform, 110- air flotation strip, 200- rotating device, the first support base of 210-, 220- turntable,
221- sucker, 222- rigid support ring, the first actuator of 230-, 300- lifting device, the second support base of 310-, 320- second
Actuator, 400- lean on position mechanism, 410- force piece, 420- contact, 500- glass substrate, 600- board, 700- transmission dress
It sets, the first detection components of 810-, the second detection components of 820-, 900- detection piece.
Specific embodiment
To keep the technical problems solved, the adopted technical scheme and the technical effect achieved by the invention clearer, below
It will the technical scheme of the embodiment of the invention will be described in further detail in conjunction with attached drawing, it is clear that described embodiment is only
It is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those skilled in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
In the description of the present invention unless specifically defined or limited otherwise, term " connected ", " connection ", " fixation " are answered
It is interpreted broadly, for example, it may be being fixedly connected, may be a detachable connection, or is integral；It can be mechanical connection,
It can be electrical connection；It can be directly connected, can also can be inside two elements indirectly connected through an intermediary
The interaction relationship of connection or two elements.For the ordinary skill in the art, on being understood with concrete condition
State the concrete meaning of term in the present invention.
In the present invention unless specifically defined or limited otherwise, fisrt feature second feature "upper" or "lower"
It may include that the first and second features directly contact, also may include that the first and second features are not direct contacts but pass through
Other characterisation contact between them.Moreover, fisrt feature includes above the second feature " above ", " above " and " above "
One feature is right above second feature and oblique upper, or is merely representative of first feature horizontal height higher than second feature.First is special
Sign is directly below and diagonally below the second feature including fisrt feature under the second feature " below ", " below " and " below ", or only
Indicate that first feature horizontal height is less than second feature.
As shown in Fig. 1 to 5, the detection device of glass substrate of the invention includes board 600 and is set on board 600
Air floating platform 100, transmission device 700, rotating device 200 and detection device.Wherein, air floating platform 100 is configured as air bearing
Support glass substrate 500 to be measured；Transmission device 700 is configured as transmitting glass substrate 500 to be measured to be moved along air floating platform 100,
Rotating device 200 is configured as at the center for adsorbing glass substrate 500 to be measured and glass substrate 500 to be measured is driven to rotate；Detection
Device is set up in air floating platform 100, and detection device is configured to examine to before rotation with postrotational glass substrate 500 to be measured
It surveys.Glass substrate 500 is supported using 100 air bearing of air floating platform, glass substrate 500 can be made to be in suspended state and transmitted,
When by the long side of glass substrate 500 and short side change of direction, contact the rise of rotating device 200 with glass substrate 500, In
Glass substrate 500 is rotated under suspended state, and rotating device 200 is only contacted at the center of glass substrate 500, is connect
Contacting surface product is smaller, will not cause to scratch to the surface of glass substrate 500 in rotary course, and can be avoided glass substrate 500
Deformation；Glass substrate 500 need to only move back and forth once on air floating platform 100, and detection device can be respectively to longitudinal direction
It takes pictures with the glass substrate 500 of short side direction, improves detection efficiency.
In order to ensure the flatness of 100 air bearing of air floating platform support glass substrate 500, detection device of the invention is also wrapped
The detection piece 900 of detection 100 flatness of air floating platform is included, detection piece 900 is the leveling ruler for being erected at 100 top of air floating platform.Benefit
With the benchmark of each air flotation strip 110 of the adjustable air floating platform 100 of leveling ruler, so that it is guaranteed that the flatness of air floating platform 100, in turn
Smoothly air bearing it can support glass substrate 500.
Specifically, transmission device 700 includes the line motor for being set to 100 both sides of air floating platform, and line motor is connected with can
The adsorbing mechanism of lifting, and the spacing between two line motors is less than or equal to the air bearing spacing of air floating platform 100.Utilize line horse
It reaches and adsorbing mechanism, is transmitted in the case where adsorbing glass substrate 500 along air floating platform 100, and do not connect with air floating platform 100
Touching.Make adsorbing mechanism liftable, is to not influence glass substrate 500 in 200 rotary glass substrate 500 of rotating device
Rotation, and after the rotation of glass substrate 500, absorption glass substrate 500 can be risen and continue to transmit.
Rotating device 200 in the present invention is mainly by the long side of glass substrate 500 and short side change of direction, therefore, rotation
The angle that rotary device 200 drives glass substrate 500 to rotate is 90 °, is rotated by 90 °, it can be achieved that 500 long side of glass substrate and short side
Exchange.
Specifically, rotating device 200 includes the first support base 210, the turntable with the rotation connection of the first support base 210
220 and driving turntable 220 first actuator 230 rotatable around its axis, turntable 220 be equipped with multiple suckers 221, the
One actuator 230 is rotary cylinder.The rotating device 200 of the structure is able to achieve to be driven in the case where adsorbing glass substrate 500
Glass substrate 500 rotates.
In order to avoid damaging when absorption glass substrate 500 to glass substrate 500, the sucker 221 in the present invention is soft
Suction nozzle, and rigid support ring 222 is connected in soft suction nozzle periphery.Turntable 220 drive glass substrate 500 rotate when, by
There is weight in glass substrate 500 itself, and because sucker 221 is soft suction nozzle, when turntable 220 rotates, sucker 221 can be distorted
Deformation, sucker 221 will lead to glass substrate 500 rotation angle after deforming is inaccurate, and therefore, rigid support ring 222 can be kept away
It is not in place because rotating caused by deforming in absorption 500 rotary course of glass substrate to exempt from soft suction nozzle.
For the lifting structure of rotating device 200, rotating device 200 is connected with by the present invention drives it to put down with respect to air bearing
The lifting device 300 that platform 100 is gone up and down.The lifting device 300 includes the second support base 310 and the second actuator 320, and second drives
Moving part 320 drives the first support base 210 vertically mobile relative to the second support base 310, and the second actuator 320 is cylinder.That is,
First support base 210 is connect with the second support base 310 by sliding rail, under the action of the second actuator 320, the first support
Seat 210 can drive turntable 220 to go up and down.
As the preferred embodiment of the present invention, the height after turntable 220 declines is flushed with air floating platform 100, is rotated
The height that platform 220 rises is more than or equal to the air floatation heights of air floating platform 100.In this way, both can ensure that 100 air bearing branch of air floating platform
The flatness of glass substrate 500 is supportted, and can ensure turntable 220 and glass substrate in the case where glass substrate 500 is in suspended state
500 contacts.
In another embodiment, the invention also includes position mechanism 400 is leaned on, it is configured as by position mechanism 400 to rotation front and back
It is positioned with postrotational glass substrate 500 to be measured.After rotating because of glass substrate 500, long side is exchanged with short side,
Using by position mechanism 400, it can be ensured that glass substrate 500 is located at required position, convenient for accurately clapping glass substrate 500
According to.In the present invention, by position mechanism 400 be it is multiple, respectively by position mechanism 400 surround space can with rotation before and it is postrotational
Glass substrate 500 matches.That is, being positioned from the periphery of glass substrate 500 to glass substrate 500, glass substrate 500 is limited
It is scheduled on the position of setting.It specifically, include force piece 410 and contact 420 by position mechanism 400, contact 420 is configured as
The edge of glass substrate 500 is contradicted, force piece 410 drives contact 420 to move between the air flotation strip 110 of air floating platform 100
It is dynamic.The structure leans on position mechanism 400, is conveniently adjusted respectively by the space that position mechanism 400 surrounds, to before matching rotation and rotate
Glass substrate 500 afterwards.
In addition, detection device in the present invention includes the first detection components 810 and/or the second detection components 820, first
Detection components 810 are configured as obtaining the general image of glass substrate 500 to be measured, and the second detection components 820 are configured as obtaining
The fixed point image of glass substrate 500 to be measured.Detection device is set on the portal frame being crossed on board 600, the first detection group
Part 810 is set to the side of portal frame, and the second detection components 820 are set to the other side of portal frame, and rotating device 200
Positioned at the other side of portal frame.In 500 moving process of glass substrate to be measured, pass through from portal frame lower section.Specifically, the first inspection
Surveying component 810 includes that multiple lines sweep camera, and each line sweeps camera can be flat along the conveying direction perpendicular to glass substrate 500 to be measured
It moves；Second detection components 820 include multiple gauge heads, and each gauge head can be flat along the conveying direction perpendicular to glass substrate 500 to be measured
It moves, and each gauge head is obliquely installed.By obtaining whole and fixed point image, glass substrate can comprehensively be detected；Incline
Each gauge head is tiltedly set, can be taken pictures in a manner of all standing to glass substrate, has further ensured that the comprehensive of detection
Property.
To sum up, the detection device of glass substrate 500 of the invention can be incited somebody to action in the case where glass substrate 500 is in suspended state
Glass substrate 500 is rotated, and to realize exchanging for glass substrate long side and short side, is realized (long to glass substrate both direction
Edge direction and short side direction) Scanning Detction, and can be avoided in rotary course scratch glass substrate 500 surface, be suitable for
Glass substrate 500 flexible and rigid.
The technical principle of the invention is described above in combination with a specific embodiment.These descriptions are intended merely to explain the present invention
Principle, and shall not be construed in any way as a limitation of the scope of protection of the invention.Based on the explanation herein, this field
Technical staff can associate with other specific embodiments of the invention without creative labor, these modes are all
It will fall under the scope of the present invention.
Claims (10)
1. a kind of detection device of glass substrate, which is characterized in that including air floating platform (100), transmission device (700), rotation
Device (200) and detection device, in which:
The air floating platform (100) is configured as air bearing and supports glass substrate (500) to be measured；
The transmission device (700) is configured as transmitting the glass substrate to be measured (500) along the air floating platform (100) shifting
It is dynamic；
The rotating device (200) vertically runs through the air floating platform (100) and being capable of relatively described air floating platform (100) liter
Drop, the rotating device (200) are configured as adsorbing the glass substrate to be measured (500) and drive the glass substrate to be measured
(500) it rotates；
The detection device is set up in the air floating platform (100), the detection device be configured to rotation before with it is postrotational
The glass substrate to be measured (500) is detected.
2. the detection device of glass substrate according to claim 1, which is characterized in that the detection device includes the first inspection
It surveys component (810) and/or the second detection components (820), first detection components (810) is configured as obtaining the glass to be measured
The general image of glass substrate (500), second detection components (820) are configured as obtaining the glass substrate to be measured (500)
Fixed point image.
3. the detection device of glass substrate according to claim 2, which is characterized in that first detection components (810)
Camera is swept including multiple lines, each line sweeps camera can be flat along the conveying direction perpendicular to the glass substrate (500) to be measured
It moves.
4. the detection device of glass substrate according to claim 2, which is characterized in that second detection components (820)
Including multiple gauge heads, each gauge head can be translated along the conveying direction perpendicular to the glass substrate (500) to be measured.
5. the detection device of glass substrate according to claim 4, which is characterized in that each gauge head is obliquely installed.
6. the detection device of glass substrate according to claim 1, which is characterized in that the detection device further includes detection
The detection piece (900) of air floating platform (100) flatness.
7. the detection device of glass substrate according to claim 6, which is characterized in that the detection piece (900) is to set up
Leveling ruler above the air floating platform (100).
8. the detection device of glass substrate according to claim 1, which is characterized in that the detection device further includes by position
Mechanism (400), it is described by position mechanism (400) be configured as to rotation before and the postrotational glass substrate (500) to be measured into
Row positioning.
9. the detection device of glass substrate according to claim 1, which is characterized in that the rotating device (200) includes
First support base (210), the turntable (220) being rotatablely connected with first support base (210) and the driving turntable
(220) the first actuator (230) rotatable around its axis, the turntable (220) are equipped with multiple suckers (221), the suction
Disk (221) is soft suction nozzle, and the soft suction nozzle periphery is connected with rigid support ring (222).
10. the detection device of glass substrate according to claim 1, which is characterized in that the transmission device (700) includes
It is set to the line motor of the air floating platform (100) both sides, the line motor is connected with liftable adsorbing mechanism, and two
Spacing between the line motor is less than or equal to the air bearing spacing of the air floating platform (100).
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| CN201910578234.7A CN110514673A (en) | 2019-06-28 | 2019-06-28 | A kind of detection device of glass substrate |
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| CN201910578234.7A CN110514673A (en) | 2019-06-28 | 2019-06-28 | A kind of detection device of glass substrate |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110884896A (en) * | 2019-12-09 | 2020-03-17 | 苏州精濑光电有限公司 | Turnover device |
| CN112098418A (en) * | 2020-09-10 | 2020-12-18 | 安徽皓视光电科技有限公司 | Angle correction mechanism and AOI detection device based on glass substrate under air floatation transmission |
| CN112595722A (en) * | 2021-03-02 | 2021-04-02 | 苏州天准科技股份有限公司 | Sectional type air flotation platform, platform module and detection equipment |
| CN113008537A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Damping rack and detection equipment adopting same |
| CN113008520A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Integrated function outer box and detection equipment adopting same |
| CN113009171A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Sucking disc subassembly, move and carry device and check out test set |
| CN113008794A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Detection equipment and optical detection method |
| CN113176277A (en) * | 2021-03-19 | 2021-07-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Panel defect detection equipment |
| CN113945491A (en) * | 2021-09-01 | 2022-01-18 | 郑州旭飞光电科技有限公司 | Glass substrate surface particle detection system |
| CN115753835A (en) * | 2022-12-07 | 2023-03-07 | 彩虹（合肥）液晶玻璃有限公司 | Glass substrate limit portion check out test set |
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| CN110884896A (en) * | 2019-12-09 | 2020-03-17 | 苏州精濑光电有限公司 | Turnover device |
| CN112098418A (en) * | 2020-09-10 | 2020-12-18 | 安徽皓视光电科技有限公司 | Angle correction mechanism and AOI detection device based on glass substrate under air floatation transmission |
| CN112098418B (en) * | 2020-09-10 | 2024-06-21 | 安徽皓视光电科技有限公司 | Angle correction mechanism and AOI detection device based on glass substrate under air floatation transmission |
| CN112595722A (en) * | 2021-03-02 | 2021-04-02 | 苏州天准科技股份有限公司 | Sectional type air flotation platform, platform module and detection equipment |
| CN113008537A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Damping rack and detection equipment adopting same |
| CN113008520A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Integrated function outer box and detection equipment adopting same |
| CN113009171A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Sucking disc subassembly, move and carry device and check out test set |
| CN113008794A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Detection equipment and optical detection method |
| CN113009171B (en) * | 2021-03-02 | 2022-07-19 | 苏州天准科技股份有限公司 | Sucking disc subassembly, move and carry device and check out test set |
| CN113176277A (en) * | 2021-03-19 | 2021-07-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Panel defect detection equipment |
| CN113945491A (en) * | 2021-09-01 | 2022-01-18 | 郑州旭飞光电科技有限公司 | Glass substrate surface particle detection system |
| CN115753835A (en) * | 2022-12-07 | 2023-03-07 | 彩虹（合肥）液晶玻璃有限公司 | Glass substrate limit portion check out test set |
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Application publication date: 20191129 |