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CN110763057A - Ultrathin heat pipe and manufacturing method thereof - Google Patents

Ultrathin heat pipe and manufacturing method thereof Download PDF

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Publication number
CN110763057A
CN110763057A CN201910981875.7A CN201910981875A CN110763057A CN 110763057 A CN110763057 A CN 110763057A CN 201910981875 A CN201910981875 A CN 201910981875A CN 110763057 A CN110763057 A CN 110763057A
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China
Prior art keywords
heat pipe
positioning rod
capillary structure
shell
metal
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CN201910981875.7A
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Chinese (zh)
Inventor
罗合云
梁平平
李学华
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Dongguan Lingjie Metal Precision Manufacturing Technology Co Ltd
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Dongguan Lingjie Metal Precision Manufacturing Technology Co Ltd
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Priority to CN201910981875.7A priority Critical patent/CN110763057A/en
Publication of CN110763057A publication Critical patent/CN110763057A/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/0283Means for filling or sealing heat pipes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
    • F28D15/046Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure characterised by the material or the construction of the capillary structure

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  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

The invention discloses an ultrathin heat pipe and a manufacturing method thereof.A positioning rod with a conical end is used as a guide, a wick capillary structure which is bent and attached to the surface of the positioning rod is arranged in a metal pipe shell of the heat pipe, and a plurality of wick capillary structures which are distributed in an array are formed on the inner wall of the pipe shell through sintering. The invention can form a plurality of capillary structures which are distributed, increase the heat transfer area, improve the heat transfer efficiency, has flexible operation and greatly reduced processing difficulty, and is not easy to cause copper wires to hang on the pipe orifice to cause the damage of the capillary structures, thereby not reducing the capillary capacity of the capillary structures and greatly improving the heat transfer efficiency of the heat pipe.

Description

一种超薄热管及其制作方法A kind of ultra-thin heat pipe and its production method

技术领域technical field

本发明属于热管均温板领域,具体涉及一种超薄热管制作工艺。The invention belongs to the field of heat pipe temperature equalizing plates, and particularly relates to a manufacturing process of an ultra-thin heat pipe.

背景技术Background technique

随着科技的进步,现今的电子产品都朝着高功能,高效率,轻薄方向发展,尤其是在当前,5G是消费电子领域未来的发展趋势,芯片的计算能力显著提升的同时其功耗也远高于4G芯片,因此消费电子产品未来对散热的需求将愈发强烈。芯片功耗加大,使其在单位面积内产生的热量也大幅提升,如何能快速将芯片热量快速散开,一直是业内难点和瓶颈。所以,快速将芯片热量传导的超导热材料和散热材料需不断进步和提升来解决芯片散热问题,才能促进科技的不断发展。With the advancement of science and technology, today's electronic products are developing in the direction of high function, high efficiency, and thinness. Especially at present, 5G is the future development trend of the consumer electronics field. The computing power of the chip is significantly improved, and its power consumption is also reduced. Much higher than 4G chips, the demand for heat dissipation in consumer electronics products will become stronger in the future. The increase in chip power consumption has greatly increased the heat generated in the unit area. How to quickly dissipate the heat of the chip has always been a difficulty and bottleneck in the industry. Therefore, superconducting materials and heat-dissipating materials that quickly conduct heat from chips need to be continuously improved and improved to solve the problem of heat dissipation of chips, so as to promote the continuous development of science and technology.

热管具有重量轻,高导热,高可靠性,免维护,没有噪音等优点,是一种可循环利用的绿色环保技术。与常规铜片或铝片相比,热管的导热系数是其10倍以上,热管的高导热特性非常适用于集中热源的散热。现有的热管制作工艺复杂,往往采用毛细结构直接置入,但管径口过小导致加工精确度和难度较大,效率低下;或先将芯体置入金属管壳中形成间隙,再向间隙中填入金属粉末,烧结使其在管壳表面形成毛细结构,但该方法无法形成所需形状(如线、或多支排列等)的毛细结构。The heat pipe has the advantages of light weight, high thermal conductivity, high reliability, maintenance-free, no noise, etc. It is a recyclable green technology. Compared with conventional copper or aluminum sheets, the thermal conductivity of heat pipes is more than 10 times higher, and the high thermal conductivity of heat pipes is very suitable for heat dissipation of concentrated heat sources. The existing heat pipe manufacturing process is complicated, and the capillary structure is often used for direct placement. However, the small diameter of the pipe leads to greater processing accuracy and difficulty, and the efficiency is low; The gap is filled with metal powder and sintered to form a capillary structure on the surface of the tube shell, but this method cannot form a capillary structure with the desired shape (such as lines, or multi-branched arrangements, etc.).

发明内容SUMMARY OF THE INVENTION

本发明针对上述现有的问题,提出一种超薄热管吸液芯多支排布结构及其制作方法,具体提出如下技术方案:In view of the above-mentioned existing problems, the present invention proposes a multi-branched arrangement structure of an ultra-thin heat pipe liquid absorbing core and a manufacturing method thereof, and specifically proposes the following technical solutions:

一种超薄热管,其特征在于,包括:An ultra-thin heat pipe, characterized in that it includes:

金属管壳,所述金属管壳沿轴向方向具有长度,内部形成封闭空腔;a metal tube shell, the metal tube shell has a length along the axial direction, and a closed cavity is formed inside;

吸液芯毛细结构,所述吸液芯毛细结构呈多支排布结构附着于金属管壳内壁,所述吸液芯毛细结构为偶数倍条金属线;The capillary structure of the liquid-absorbing core, the capillary structure of the liquid-absorbing core is attached to the inner wall of the metal tube shell in a multi-branch arrangement structure, and the capillary structure of the liquid-absorbing core is an even number of metal wires;

工作流体,所述工作流体密封在金属管壳的封闭空腔内。The working fluid is sealed in the closed cavity of the metal tube shell.

一种超薄热管的制作方法,其特征在于,包括以下步骤:A method for making an ultra-thin heat pipe, comprising the following steps:

提供金属管壳,所述金属管壳具有分别开口的第一端和第二端,将热管管壳的第一端缩头,第二端保持不变;providing a metal tube shell, the metal tube shell has a first end and a second end respectively open, the first end of the heat pipe shell is contracted, and the second end remains unchanged;

提供定位棒,所述定位棒外径小于金属管壳内径,所述定位棒的一端为锥形;A positioning rod is provided, the outer diameter of the positioning rod is smaller than the inner diameter of the metal tube shell, and one end of the positioning rod is tapered;

提供吸液芯毛细结构,所述吸液芯毛细结构在所述定位棒锥形的锥顶形成折弯,所述吸液芯毛细结构折弯后贴合在所述定位棒外表面;providing a capillary structure of the liquid-absorbent core, the capillary structure of the liquid-absorbent core is bent at the conical top of the positioning rod, and the capillary structure of the liquid-absorbent core is bent and attached to the outer surface of the positioning rod;

将外表面贴合有折弯吸液芯毛细结构的定位棒经由未缩头的第二端开口置入所述金属管壳,所述定位棒的锥形端位于所述金属管壳缩头的第一端处;The positioning rod with the capillary structure of the bent liquid-absorbing wick attached to the outer surface is inserted into the metal tube shell through the opening of the second end of the unshrunk head, and the tapered end of the positioning rod is located at the shrinking head of the metal tube shell. at the first end;

烧结;sintering;

烧结后将定位棒从金属管壳中抽出。After sintering, the positioning rod is pulled out from the metal tube shell.

进一步的,所述超薄热管的制作方法还包括,将多组吸液芯毛细结构折弯贴合在定位棒表面后,将定位棒置入金属管壳。由此可以通过烧结在金属管壳内壁形成沿周向不重叠地均匀或不均匀分布的多组吸液芯毛细结构。Further, the manufacturing method of the ultra-thin heat pipe further includes: after the capillary structures of the plurality of liquid absorbing cores are bent and attached to the surface of the positioning rod, the positioning rod is placed in the metal tube shell. Therefore, multiple groups of capillary structures of the liquid-absorbing wick that are uniformly or non-uniformly distributed in the circumferential direction without overlapping can be formed on the inner wall of the metal tube shell by sintering.

进一步的,所述超薄热管的制作方法还包括,所述烧结步骤之后还包括将所述第二端缩口并对缩口进行焊接、冷媒注入、脱气和封装步骤;所述冷媒经由所述热管管壳的第一端注入置入有吸液芯毛细结构的管壳空腔;所述脱气为真空脱气;所述封装采用焊接封装。Further, the manufacturing method of the ultra-thin heat pipe further includes, after the sintering step, the steps of shrinking the second end and welding the shrinking, refrigerant injection, degassing and packaging; The first end of the heat pipe shell is injected into the shell cavity in which the capillary structure of the liquid absorbing core is inserted; the degassing is vacuum degassing; and the packaging adopts welding packaging.

进一步的,所述金属管壳为铜材、铝材、不锈钢、钛材质之一或其合金;所述金属管壳横截面为圆形或椭圆形或矩形。Further, the metal tube shell is one of copper, aluminum, stainless steel, titanium or its alloy; the cross-section of the metal tube shell is circular, oval or rectangular.

进一步的,所述吸液芯毛细结构的金属线材质为铜、镍、锌、银;所述吸液芯毛细结构可采用蚀刻、激光、机械加工、拉丝、烧结、印刷、3D打印等技术加工形成。Further, the material of the metal wire of the capillary structure of the liquid-absorbing core is copper, nickel, zinc, and silver; the capillary structure of the liquid-absorbing core can be processed by techniques such as etching, laser, machining, wire drawing, sintering, printing, 3D printing, etc. form.

进一步的,所述工作流体为冷媒介质,所述冷媒介质为氟化液、酒精、丙酮、水、7100、冷媒R22、1233。Further, the working fluid is a cooling medium, and the cooling medium is fluorinated liquid, alcohol, acetone, water, 7100, and refrigerants R22 and 1233.

本发明的有益效果是:The beneficial effects of the present invention are:

本发明工艺因管尾端未缩口,口径较大,相比缩管后的缩管口孔径放大数倍级,毛细结构置线可以很轻松置入,效率可大大提升;在定位棒的引导下根据需要将所需吸液芯结构置入管壳内,可形成多支排布的毛细结构,增加传热面积,提高传热效率,操作灵活,加工难度大大下降,且不易造成铜丝挂在管口,造成毛细结构损坏,从而不会降低毛细结构的毛细能力,热管的传热效率将大大提升。Because the tail end of the tube is not narrowed and the diameter of the process of the invention is larger, the diameter of the tube opening after the tube is reduced by several times, the capillary structure can be easily placed, and the efficiency can be greatly improved; The required liquid-absorbing core structure is placed in the tube shell according to the needs, which can form a multi-branched capillary structure, increase the heat transfer area, improve the heat transfer efficiency, the operation is flexible, the processing difficulty is greatly reduced, and it is not easy to cause the copper wire to hang. At the nozzle, the capillary structure is damaged, so that the capillary capacity of the capillary structure will not be reduced, and the heat transfer efficiency of the heat pipe will be greatly improved.

附图说明Description of drawings

图1为本发明超薄热管制作方法所需材料示意图;1 is a schematic diagram of the materials required for the method for making an ultra-thin heat pipe of the present invention;

图2为本发明超薄热管制作方法的步骤示意图。FIG. 2 is a schematic diagram of steps of a method for manufacturing an ultra-thin heat pipe of the present invention.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例是本发明一部分实施例,而不是全部的实施例,仅用以解释本发明,并不用于限定本发明。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are a part of the embodiments of the present invention, not all of the embodiments, and are only used to explain the present invention, but not to limit the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

图1示意性地给出了本发明的一种超薄热管制作方法所需材料,提供金属管壳1,所述金属管壳具有分别开口的第一端11和第二端12,将热管管壳1的第一端11缩头,第二端12保持不变,所述金属管壳1内部具有空腔用于形成吸液芯毛细结构3和封装传热所需的工作流体;提供定位棒2,所述定位棒2外径小于金属管壳1内径,所述定位棒2的一端为锥形。Fig. 1 schematically shows the materials required for a method of manufacturing an ultra-thin heat pipe of the present invention, providing a metal tube shell 1, the metal tube shell has a first end 11 and a second end 12 respectively opened, and the heat pipe The first end 11 of the shell 1 is retracted, and the second end 12 remains unchanged. The metal tube shell 1 has a cavity inside for forming the wick capillary structure 3 and encapsulating the working fluid required for heat transfer; a positioning rod is provided 2. The outer diameter of the positioning rod 2 is smaller than the inner diameter of the metal tube shell 1, and one end of the positioning rod 2 is tapered.

图2示意性地给出了本发明的一种超薄热管制作方法的操作步骤,提供吸液芯毛细结构3,所述吸液芯毛细结构3在所述定位棒2锥形的锥顶形成折弯,所述吸液芯毛细结构3折弯后贴合在所述定位棒2外表面;将外表面贴合有折弯吸液芯毛细结构3的定位棒2经由金属管壳1未缩头的第二端12开口置入所述金属管壳1,所述定位棒的锥形端位于所述金属管壳1缩头的第一端11处;烧结;烧结后将定位棒2从金属管壳1中抽出,吸液芯毛细结构3通过烧结与金属管壳1的内壁结合,并留在内壁表面形成所需的多支排列的毛细结构。所述烧结步骤之后还包括将所述第二端12缩口并对缩口进行焊接封口、冷媒注入、脱气和封装步骤;所述冷媒经由所述热管管壳1的第一端11注入置入有吸液芯毛细结构的管壳空腔;所述脱气为真空脱气;所述封装采用焊接封装。FIG. 2 schematically shows the operation steps of an ultra-thin heat pipe manufacturing method of the present invention, and provides a liquid-absorbent wick capillary structure 3 , and the liquid-absorbent wick capillary structure 3 is formed on the conical top of the positioning rod 2 . Bending, the liquid-absorbent core capillary structure 3 is bent and attached to the outer surface of the positioning rod 2; The second end 12 of the head is opened into the metal tube shell 1, and the tapered end of the positioning rod is located at the first end 11 of the shrinking head of the metal tube shell 1; sintering; after sintering, the positioning rod 2 is removed from the metal tube. The capillary structure 3 of the liquid-absorbing wick is combined with the inner wall of the metal tube shell 1 by sintering, and is left on the inner wall surface to form the desired multi-branched capillary structure. After the sintering step, it also includes the steps of shrinking the second end 12 and performing welding sealing, refrigerant injection, degassing and encapsulation; into the tube-shell cavity with the capillary structure of the liquid absorbing core; the degassing is vacuum degassing; the packaging adopts welding packaging.

在另一实施方式中,在折弯第一组吸液芯毛细结构3之后,还可以根据需要以同样的方式折弯多组吸液芯毛细结构,使多组吸液芯毛细结构折弯后沿定位棒2的外表面周向不重叠地均匀或不均匀排布。再将折弯排布有多组吸液芯毛细结构的定位棒2经由金属管壳1未缩头的第二端12开口置入所述金属管壳1,烧结后将定位棒2从金属管壳1中抽出,金属管壳1内壁形成沿周向不重叠地均匀或不均匀分布的多组吸液芯毛细结构。In another embodiment, after the first group of capillary structures 3 for liquid-absorbent wicks are bent, multiple groups of capillary structures for liquid-absorbent wicks can be bent in the same manner as required, so that the multiple groups of capillary structures for liquid-absorbent wicks are bent The positioning rods 2 are uniformly or non-uniformly arranged without overlapping in the circumferential direction of the outer surface of the positioning rods 2 . Then, the positioning rods 2 that are bent and arranged with multiple groups of capillary structures of the liquid-absorbing core are inserted into the metal tube shell 1 through the opening of the second end 12 of the unshrunk head of the metal tube shell 1. After sintering, the positioning rods 2 are removed from the metal tube. When the shell 1 is pulled out, the inner wall of the metal tube shell 1 forms a plurality of groups of capillary structures of liquid-absorbent wicks that are uniformly or non-uniformly distributed along the circumferential direction without overlapping.

在本发明的描述中,需要说明的是,术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”、“两端”、“两侧”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的元件必须具有特定的方位或者以特定的方位构造和操作,因此不能理解为对本发明的限制。In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", The orientation or positional relationship indicated by "two ends", "both sides", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the indicated elements must have The particular orientation, or construction and operation in the particular orientation, is therefore not to be construed as a limitation of the invention.

以上所述的仅是本发明的一些实施方式。对于本领域的普通技术人员来说,在不脱离本发明创造构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。The foregoing are merely some of the embodiments of the present invention. For those of ordinary skill in the art, without departing from the inventive concept of the present invention, several modifications and improvements can be made, which all belong to the protection scope of the present invention.

Claims (10)

1. An ultra-thin heat pipe, comprising:
the metal tube shell is provided with a length along the axial direction, and a closed cavity is formed inside the metal tube shell;
the liquid absorption core capillary structure is of a plurality of arrangement structures and is attached to the inner wall of the metal pipe shell, and the liquid absorption core capillary structure is an even number of metal wires;
a working fluid sealed within the enclosed cavity of the metal envelope.
2. An ultra-thin heat pipe as claimed in claim 1, wherein the metal pipe case is made of one of copper material, aluminum material, stainless steel, titanium material or alloy thereof; the cross section of the metal pipe shell is circular, elliptical or rectangular.
3. The ultra-thin heat pipe of any of claims 1 or 2 wherein the wire of the wick capillary structure is copper, nickel, zinc, silver; the wick capillary structure can be formed by etching, laser, machining, wire drawing, sintering, printing, 3D printing and other technologies.
4. The ultra-thin heat pipe of any one of claims 1 or 2, wherein the working fluid is a refrigerant medium, and the refrigerant medium is fluorinated liquid, alcohol, acetone, water, 7100, R22, 1233.
5. A method for manufacturing an ultra-thin heat pipe as claimed in claims 1-4, comprising the steps of:
providing a metal pipe shell, wherein the metal pipe shell is provided with a first end and a second end which are respectively provided with openings, the first end of the heat pipe shell is contracted, and the second end of the heat pipe shell is kept unchanged;
providing a positioning rod, wherein the outer diameter of the positioning rod is smaller than the inner diameter of the metal pipe shell, and one end of the positioning rod is conical;
providing a wick capillary structure, wherein the wick capillary structure forms a bend at the conical top of the positioning rod, and the wick capillary structure is attached to the outer surface of the positioning rod after being bent;
placing a positioning rod with a bent wick capillary structure attached to the outer surface into the metal tube shell through a second end opening of the non-shrinking head, wherein the conical end of the positioning rod is positioned at the first end of the shrinking head of the metal tube shell;
sintering;
and after sintering, the positioning rod is extracted from the metal tube shell.
6. The method of claim 5, wherein the wick capillary structures are at least one group, and after the first group of wick capillary structures are bent and attached to the outer surface of the positioning rod, the remaining groups of wick capillary structures are bent and attached to the outer surface of the positioning rod in the same manner.
7. The method of claim 5 or 6, further comprising, after the sintering step, the steps of necking the second end and welding, injecting a cooling medium, degassing, and encapsulating the necked portion; the refrigerant is injected into the tube shell cavity with the wick capillary structure through the first end of the heat pipe shell; the degassing is vacuum degassing; the packaging adopts welding packaging.
8. A method for making an ultra-thin heat pipe as claimed in claim 7, wherein the metal casing is made of one of copper, aluminum, stainless steel, titanium or their alloys; the cross section of the metal pipe shell is circular, elliptical or rectangular.
9. A method for fabricating an ultra-thin heat pipe as claimed in claim 7, wherein the wick is a capillary structure of copper, nickel, zinc, or silver; the wick capillary structure can be formed by etching, laser, machining, wire drawing, sintering, printing, 3D printing and other technologies.
10. A method for fabricating an ultra-thin heat pipe as claimed in claim 7, wherein the working fluid is a refrigerant medium, and the refrigerant medium is fluorinated liquid, alcohol, acetone, water, 7100, and refrigerant R22, 1233.
CN201910981875.7A 2019-10-16 2019-10-16 Ultrathin heat pipe and manufacturing method thereof Pending CN110763057A (en)

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