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CN110797254A - Rectangular excimer lamp emitting uniform parallel light on single surface - Google Patents

Rectangular excimer lamp emitting uniform parallel light on single surface Download PDF

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CN110797254A
CN110797254A CN201911046162.8A CN201911046162A CN110797254A CN 110797254 A CN110797254 A CN 110797254A CN 201911046162 A CN201911046162 A CN 201911046162A CN 110797254 A CN110797254 A CN 110797254A
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square tube
excimer lamp
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parallel light
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李俊芳
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Shenzhen Jiaguang Technology Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/048Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using an excitation coil
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00Radiation therapy
    • A61N5/06Radiation therapy using light
    • A61N5/0613Apparatus adapted for a specific treatment
    • A61N5/0616Skin treatment other than tanning
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/025Associated optical elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/52Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00Radiation therapy
    • A61N5/06Radiation therapy using light
    • A61N2005/0658Radiation therapy using light characterised by the wavelength of light used
    • A61N2005/0661Radiation therapy using light characterised by the wavelength of light used ultraviolet

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Abstract

本发明涉及医疗光源技术领域,尤其是一种单面发均匀平行光的长方形准分子灯,包括负电极、正电极和方管,所述方管包括第一端面和第二端面,所述正电极布设在第一端面上,所述负电极布设在第二端面上,所述第一端面上任一点到第二端面的垂直距离相同,所述方管内填充有工作气体,当在所述负电极和正电极上施加电源电压时,所述方管内的工作气体受激发产生光并在所述第二端面上输出,所述方管内贯穿有通风管。本发明能够改善市面上的圆柱形灯管发光不均的问题,并且能够降低因灯管发光带来的高温并延长灯管的使用寿命。

Figure 201911046162

The invention relates to the technical field of medical light sources, in particular to a rectangular excimer lamp that emits uniform parallel light on one side, comprising a negative electrode, a positive electrode and a square tube, wherein the square tube comprises a first end face and a second end face, the positive electrode The electrode is arranged on the first end face, the negative electrode is arranged on the second end face, the vertical distance from any point on the first end face to the second end face is the same, the square tube is filled with working gas, and when the negative electrode is on the negative electrode When a power supply voltage is applied to the positive electrode, the working gas in the square tube is excited to generate light and output on the second end face, and a ventilation tube runs through the square tube. The invention can improve the problem of uneven lighting of the cylindrical lamps on the market, and can reduce the high temperature caused by the lighting of the lamps and prolong the service life of the lamps.

Figure 201911046162

Description

一种单面发均匀平行光的长方形准分子灯A rectangular excimer lamp that emits uniform parallel light on one side

技术领域technical field

本发明涉及医疗光源领域,尤其涉及一种单面发均匀平行光的长方形准分子灯。The invention relates to the field of medical light sources, in particular to a rectangular excimer lamp that emits uniform parallel light on one side.

背景技术Background technique

308nm准分子灯是用于治疗皮肤病尤其是白癜风和银屑病等的光治疗仪器,能够发出以氯化氙气体为照射源的308nm准分子光,可诱导T细胞凋亡,并促进色素的合成,能更准确针对患病皮肤进行治疗,且治疗时间短,效果佳。The 308nm excimer lamp is a phototherapy instrument used for the treatment of skin diseases, especially vitiligo and psoriasis. It can emit 308nm excimer light with xenon chloride gas as the irradiation source, which can induce T cell apoptosis and promote pigmentation. Synthetic, can more accurately treat the diseased skin, and the treatment time is short and the effect is good.

目前,市面上的308nm准分子灯存在以下问题:1、部分产品存在造假情况,即厂家用普通荧光灯管冒充308nm准分子灯;2、正品308nm准分子灯存在光功率低,光功率不稳定,工作过程中灯管温度过高等问题;3、由于产品内部空间的限制或者环境的不同,市面上的圆形灯管无法满足要求。同时,由于市场对308nm准分子灯的需求却持续增加,因此,急需提高308nm准分子灯的性能。4、散热效果差影响准分子灯的工作效率。5、发光不均匀。At present, the 308nm excimer lamps on the market have the following problems: 1. Some products are counterfeit, that is, manufacturers use ordinary fluorescent tubes to pretend to be 308nm excimer lamps; 2. Authentic 308nm excimer lamps have low optical power and unstable optical power. During the working process, the temperature of the lamp tube is too high; 3. Due to the limitation of the internal space of the product or the difference of the environment, the circular lamp tube on the market cannot meet the requirements. At the same time, as the market demand for 308nm excimer lamps continues to increase, there is an urgent need to improve the performance of 308nm excimer lamps. 4. The poor heat dissipation effect affects the working efficiency of the excimer lamp. 5. The light is uneven.

发明内容SUMMARY OF THE INVENTION

本发明的目的是为了解决现有技术中存在发光不均匀的缺点,而提出的一种单面发均匀平行光的长方形准分子灯。The purpose of the present invention is to propose a rectangular excimer lamp that emits uniform parallel light on one side in order to solve the disadvantage of uneven light emission in the prior art.

为达到以上目的,本发明采用的技术方案为:一种单面发均匀平行光的长方形准分子灯,包括负电极、正电极和方管,所述方管包括第一端面和第二端面,所述正电极布设在第一端面上,所述负电极布设在第二端面上,所述第一端面上任一点到第二端面的垂直距离相同,所述方管内填充有工作气体,当在所述负电极和正电极上施加电源电压时,所述方管内的工作气体受激发产生光并在所述第二端面上输出,所述方管内贯穿有通风管。In order to achieve the above purpose, the technical scheme adopted in the present invention is as follows: a rectangular excimer lamp that emits uniform parallel light on one side, comprising a negative electrode, a positive electrode and a square tube, wherein the square tube comprises a first end face and a second end face, The positive electrode is arranged on the first end face, the negative electrode is arranged on the second end face, and the vertical distance from any point on the first end face to the second end face is the same, and the square tube is filled with working gas. When a power supply voltage is applied to the negative electrode and the positive electrode, the working gas in the square tube is excited to generate light and output on the second end face, and a ventilation tube runs through the square tube.

优选的,所述方管为长方体,所述第一端面和第二端面为两个非相邻平面,所述方管为石英玻璃制成。Preferably, the square tube is a rectangular parallelepiped, the first end face and the second end face are two non-adjacent planes, and the square tube is made of quartz glass.

优选的,负电极在第二端面上所占面积小于第二端面面积的10%,所述正电极为片状电极,所述负电极为平行绕丝。Preferably, the area occupied by the negative electrode on the second end surface is less than 10% of the area of the second end surface, the positive electrode is a sheet electrode, and the negative electrode is a parallel winding wire.

优选的,所述片状电极表面为镜面反光面。Preferably, the surface of the sheet electrode is a specular reflective surface.

优选的,所述工作气体为Xe和Cl混合气体。Preferably, the working gas is a mixed gas of Xe and Cl.

优选的,所述第一端面上设有对光进行反射的镀膜,所述第二端面上设有对输出光的波长进行选择性输出的镀膜及增透膜,能够增加308nm光的透过率,提高光功率。Preferably, the first end face is provided with a coating for reflecting light, and the second end face is provided with a coating and an anti-reflection coating for selectively outputting the wavelength of the output light, which can increase the transmittance of 308 nm light , to increase the optical power.

优选的,所述方管的侧壁上连接有安装板,所述安装板上开设有安装孔。Preferably, a mounting plate is connected to the side wall of the square tube, and a mounting hole is opened on the mounting plate.

优选的,所述方管的侧壁上开设有气体注射口。Preferably, a gas injection port is opened on the side wall of the square tube.

优选的,所述通风管的两端连接有接管,所述接管的端部通过管接头连接有连接软管。Preferably, both ends of the ventilation pipe are connected with connecting pipes, and the ends of the connecting pipes are connected with connecting hoses through pipe joints.

优选的,所述方管的侧壁上垂直连接有等距设置的散热片。Preferably, the side walls of the square tube are vertically connected with radiating fins arranged at equal intervals.

与现有技术相比,本发明具有以下有益效果:Compared with the prior art, the present invention has the following beneficial effects:

1、在方管内贯穿设置了通风管,通过通风管对准分子灯进行降温保护,用风冷方式降低设备温度,满足治疗时的温度要求。1. A ventilation pipe is set through the square tube, and the ventilation pipe is aimed at the molecular lamp for cooling protection, and the temperature of the equipment is reduced by air cooling to meet the temperature requirements during treatment.

2、通过固定的高频电场使工作气体发出308nm的光,且单一的308nm波长是紫外光治疗白癜风和银屑病的最佳波长,第一端面和第二端面之间的距离大致相等,发光均匀;2. The working gas emits 308nm light through a fixed high-frequency electric field, and a single 308nm wavelength is the best wavelength for ultraviolet light to treat vitiligo and psoriasis. The distance between the first end face and the second end face is roughly equal, and the light uniform;

3、进一步的,现有产品的气体注射口设计在灯管的中间,本产品将气体注射口设计在灯管端部,有如下好处:3. Further, the gas injection port of the existing product is designed in the middle of the lamp tube, and the gas injection port of this product is designed at the end of the lamp tube, which has the following advantages:

(1)方便绕线;(2)不会阻碍308准分子光向外部的辐射。(1) It is convenient for winding; (2) It will not hinder the radiation of 308 excimer light to the outside.

4、进一步的,在第一端面上设置反光镀膜,这样既可以阻止光四处辐射,造成设备内温度过高,也可以将光反射到治疗窗口的方向,增加了光的强度,增强了治疗效果,缩短了治疗时间。4. Further, a reflective coating is arranged on the first end face, which can not only prevent the light from radiating around, causing the temperature in the device to be too high, but also reflect the light in the direction of the treatment window, which increases the intensity of the light and enhances the treatment effect. , shorten the treatment time.

附图说明Description of drawings

图1为本发明的正面的结构示意图;Fig. 1 is the structural representation of the front of the present invention;

图2为本发明的背面的结构示意图;Fig. 2 is the structural representation of the back of the present invention;

图3为本发明的剖视结构示意图;Fig. 3 is the sectional structure schematic diagram of the present invention;

图4为图3中A处的结构示意图。FIG. 4 is a schematic diagram of the structure at A in FIG. 3 .

图中:方管1、气体注射口2、负电极3、散热片4、第一端面5、正电极6、安装板7、通风管8、连接软管9、管接头10、接管11、第二端面12。In the figure: square tube 1, gas injection port 2, negative electrode 3, heat sink 4, first end face 5, positive electrode 6, mounting plate 7, ventilation pipe 8, connecting hose 9, pipe joint 10, connecting pipe 11, first Two end faces 12 .

具体实施方式Detailed ways

以下描述用于揭露本发明以使本领域技术人员能够实现本发明。以下描述中的优选实施例只作为举例,本领域技术人员可以想到其他显而易见的变型。The following description serves to disclose the invention to enable those skilled in the art to practice the invention. The preferred embodiments described below are given by way of example only, and other obvious modifications will occur to those skilled in the art.

如图1-4所示的一种单面发均匀平行光的长方形准分子灯,包括负电极3、正电极6和方管1,方管1为长方体,第一端面5和第二端面12为两个非相邻平面,方管1为石英玻璃制成。负电极3在第二端面12上所占面积小于第二端面12面积的10%,正电极6为片状电极,负电极3为平行绕丝。片状电极表面为镜面反光面。介质阻挡放电光源通过负电极3和正电极6连接高压电源来激发方管内的工作气体发光,由于方管1内气体容量相当,且负电极3和正电极6所在端面之间的距离大致相等,故光均匀输出。由于负电极3一侧为光的输出端,在进行负电极3设置时,负电极3在方管1的第二端面12上所占面积小于第二端面12面积的10%,从而可以保证光的输出效率不低于90%。为了实现更大光功率的输出,正电极6选用片状电极,同时起反光作用和电极作用。例如,可以采用金属镀膜的方式在所述第一端面5上来实现所述片状电极。As shown in Figure 1-4, a single-sided rectangular excimer lamp that emits uniform parallel light includes a negative electrode 3, a positive electrode 6 and a square tube 1. The square tube 1 is a cuboid, with a first end face 5 and a second end face 12. For two non-adjacent planes, the square tube 1 is made of quartz glass. The area occupied by the negative electrode 3 on the second end face 12 is less than 10% of the area of the second end face 12 , the positive electrode 6 is a sheet electrode, and the negative electrode 3 is a parallel winding wire. The surface of the sheet electrode is a specular reflective surface. The dielectric barrier discharge light source is connected to a high-voltage power supply through the negative electrode 3 and the positive electrode 6 to excite the working gas in the square tube to emit light. Since the gas capacity in the square tube 1 is equivalent, and the distance between the end faces of the negative electrode 3 and the positive electrode 6 is approximately equal, the light output evenly. Since one side of the negative electrode 3 is the output end of light, when the negative electrode 3 is set, the area occupied by the negative electrode 3 on the second end face 12 of the square tube 1 is less than 10% of the area of the second end face 12, so that light can be guaranteed. The output efficiency is not less than 90%. In order to realize the output of higher optical power, the positive electrode 6 selects a sheet electrode, which plays the role of reflection and electrode at the same time. For example, the sheet electrode may be implemented on the first end face 5 by means of metal plating.

方管1包括第一端面5和第二端面12,正电极6布设在第一端面5上,负电极3布设在第二端面12上,第一端面5上任一点到第二端面12的垂直距离相同,方管1内填充有工作气体,工作气体为Xe和Cl混合气体。当在负电极3和正电极6上施加电源电压时,方管1内的工作气体受激发产生光并在第二端面12上输出。工作气体可以为被激发的任何气体,例如,可以为Xe和Cl混合气体来得到308nm波长的光。其原理为:氯是卤族元素,氙为惰性气体,在正常情况下氯和氙是不会发生反应的,在自然界中也不存在氯和氙的化合物,但在高压和强电场作用下氯可以接受氙的一个电子,形成氯化氙分子,氯化氙不稳定维持的时间很短,很快会解离成为氯和氙,这种不稳定的分子称为准分子,由不稳定的氯化氙准分子受激发而产生的光即为波长308mn的紫外线光。当然,该工作气体还可以为一种卤族单质气体或多种卤族单质气体的组合,甚至还可以为卤族化合物气体,本申请并不限制工作气体的具体类型,其可以根据具体需求来自行选择。The square tube 1 includes a first end face 5 and a second end face 12, the positive electrode 6 is arranged on the first end face 5, the negative electrode 3 is arranged on the second end face 12, and the vertical distance from any point on the first end face 5 to the second end face 12 Similarly, the square tube 1 is filled with a working gas, and the working gas is a mixed gas of Xe and Cl. When a power supply voltage is applied to the negative electrode 3 and the positive electrode 6 , the working gas in the square tube 1 is excited to generate light and output it on the second end face 12 . The working gas can be any gas that is excited, for example, it can be a mixed gas of Xe and Cl to obtain light with a wavelength of 308 nm. The principle is: chlorine is a halogen element, and xenon is an inert gas. Under normal circumstances, chlorine and xenon will not react, and there is no compound of chlorine and xenon in nature, but under the action of high voltage and strong electric field, chlorine It can accept one electron of xenon to form a xenon chloride molecule. Xenon chloride is unstable for a short time, and will soon dissociate into chlorine and xenon. This unstable molecule is called an excimer, which is composed of unstable chlorine. The light generated by the excitation of the xenon excimer is ultraviolet light with a wavelength of 308mn. Of course, the working gas can also be a halogen element gas or a combination of multiple halogen element gases, or even a halogen compound gas. The present application does not limit the specific type of the working gas, which can be obtained from row selection.

方管1内贯穿有通风管8。通风管8为石英管,通风管8的两端连接有接管11,接管11的端部通过管接头10连接有连接软管9。方管1的侧壁上垂直连接有等距设置的散热片4。通过通风管8能够向方管1内输入冷风,冷风经过通风管8能够带走通风管8管壁上的热量,从而对分子灯进行快速的降温,连接软管9用于与风源连接,散热片4采用导热性能良好的金属片,例如铜片,散热片4能够增加方管1的散热面积,提高散热效果。A ventilation pipe 8 runs through the square pipe 1 . The ventilation pipe 8 is a quartz tube, two ends of the ventilation pipe 8 are connected with a connecting pipe 11 , and the end of the connecting pipe 11 is connected with a connecting hose 9 through a pipe joint 10 . The side walls of the square tube 1 are vertically connected with radiating fins 4 arranged at equal distances. Through the ventilation pipe 8, cold air can be input into the square pipe 1, and the cold air can take away the heat on the pipe wall of the ventilation pipe 8 through the ventilation pipe 8, thereby rapidly cooling the molecular lamp. The connecting hose 9 is used to connect with the wind source. The heat sink 4 adopts a metal sheet with good thermal conductivity, such as a copper sheet. The heat sink 4 can increase the heat dissipation area of the square tube 1 and improve the heat dissipation effect.

第一端面5上设有对光进行反射的镀膜,第二端面12上设有对输出光的波长进行选择性输出的镀膜及增透膜,能够增加308nm光的透过率,提高光功率。The first end surface 5 is provided with a coating for reflecting light, and the second end surface 12 is provided with a coating and an anti-reflection coating for selectively outputting the wavelength of the output light, which can increase the transmittance of 308 nm light and improve the optical power.

方管1的侧壁上连接有安装板7,安装板7上开设有安装孔。安装板7用于方便对分子灯进行安装,方管1的侧壁上开设有气体注射口2。第二端面12上设置的镀膜对所需要的波长进行选择性输出,如对300nm-320nm的波长选择性输出。现有产品的气体注射口2设计在灯管的中间,本产品将气体注射口2设计在方管1的端部,有如下好处:(1)方便绕线;(2)不会阻碍308准分子光向外部的辐射。A mounting plate 7 is connected to the side wall of the square tube 1 , and the mounting plate 7 is provided with mounting holes. The mounting plate 7 is used to facilitate the installation of the molecular lamp, and the side wall of the square tube 1 is provided with a gas injection port 2 . The coating film provided on the second end face 12 selectively outputs the desired wavelength, for example, selectively outputs the wavelength of 300nm-320nm. The gas injection port 2 of the existing product is designed in the middle of the lamp tube. In this product, the gas injection port 2 is designed at the end of the square tube 1, which has the following advantages: (1) It is convenient for winding; (2) It will not hinder the 308 standard The radiation of molecular light to the outside.

以上显示和描述了本发明的基本原理、主要特征和本发明的优点。本行业的技术人员应该了解,本发明不受上述实施例的限制,上述实施例和说明书中描述的只是本发明的原理,在不脱离本发明精神和范围的前提下本发明还会有各种变化和改进,这些变化和改进都落入要求保护的本发明的范围内。本发明要求的保护范围由所附的权利要求书及其等同物界定。The foregoing has shown and described the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited by the above-mentioned embodiments. The above-mentioned embodiments and descriptions describe only the principles of the present invention. Without departing from the spirit and scope of the present invention, there are various Variations and improvements are intended to fall within the scope of the claimed invention. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims (10)

1.一种单面发均匀平行光的长方形准分子灯,包括负电极(3)、正电极(6)和方管(1),所述方管(1)包括第一端面(5)和第二端面(12),所述正电极(6)布设在第一端面(5)上,所述负电极(3)布设在第二端面(12)上,所述第一端面(5)上任一点到第二端面(12)的垂直距离相同,所述方管(1)内填充有工作气体,当在所述负电极(3)和正电极(6)上施加电源电压时,所述方管(1)内的工作气体受激发产生光并在所述第二端面(12)上输出,其特征在于,所述方管(1)内贯穿有通风管(8)。1. A rectangular excimer lamp that emits uniform parallel light on one side, comprising a negative electrode (3), a positive electrode (6) and a square tube (1), the square tube (1) comprising a first end face (5) and The second end face (12), the positive electrode (6) is arranged on the first end face (5), the negative electrode (3) is arranged on the second end face (12), and the first end face (5) is on the The vertical distance from one point to the second end face (12) is the same, the square tube (1) is filled with working gas, and when a power supply voltage is applied to the negative electrode (3) and the positive electrode (6), the square tube The working gas in (1) is excited to generate light and output on the second end face (12), characterized in that a ventilation pipe (8) runs through the square pipe (1). 2.根据权利要求1所述的一种单面发均匀平行光的长方形准分子灯,其特征在于,所述方管(1)为长方体,所述第一端面(5)和第二端面(12)为两个非相邻平面,所述方管(1)为石英玻璃制成。2 . The rectangular excimer lamp with uniform parallel light emitted from one side according to claim 1 , wherein the square tube ( 1 ) is a rectangular parallelepiped, and the first end face ( 5 ) and the second end face ( 12) are two non-adjacent planes, and the square tube (1) is made of quartz glass. 3.根据权利要求1所述的一种单面发均匀平行光的长方形准分子灯,其特征在于,所述负电极(3)在第二端面(12)上所占面积小于第二端面(12)面积的10%,所述正电极(6)为片状电极,所述负电极(3)为平行绕丝。3. The rectangular excimer lamp with uniform parallel light emitted from one side according to claim 1, wherein the area occupied by the negative electrode (3) on the second end face (12) is smaller than the second end face (12). 12) 10% of the area, the positive electrode (6) is a sheet electrode, and the negative electrode (3) is a parallel winding wire. 4.根据权利要求3所述的一种单面发均匀平行光的长方形准分子灯,其特征在于,所述片状电极表面为镜面反光面。4 . The rectangular excimer lamp of claim 3 , wherein the surface of the sheet electrode is a specular reflective surface. 5 . 5.根据权利要求1所述的一种单面发均匀平行光的长方形准分子灯,其特征在于,所述工作气体为Xe和Cl混合气体。5 . The rectangular excimer lamp that emits uniform parallel light on one side according to claim 1 , wherein the working gas is a mixed gas of Xe and Cl. 6 . 6.根据权利要求1所述的一种单面发均匀平行光的长方形准分子灯,其特征在于,所述第一端面(5)上设有对光进行反射的镀膜,所述第二端面(12)上设有对输出光的波长进行选择性输出的镀膜及增透膜。6 . The rectangular excimer lamp of claim 1 , wherein the first end face ( 5 ) is provided with a coating for reflecting light, and the second end face (12) is provided with a coating film and an anti-reflection film that selectively output the wavelength of the output light. 7.根据权利要求1所述的一种单面发均匀平行光的长方形准分子灯,其特征在于,所述方管(1)的侧壁上连接有安装板(7),所述安装板(7)上开设有安装孔。7 . The rectangular excimer lamp with uniform parallel light emitted from one side according to claim 1 , wherein a mounting plate ( 7 ) is connected to the side wall of the square tube ( 1 ), and the mounting plate (7) is provided with mounting holes. 8.根据权利要求1所述的一种单面发均匀平行光的长方形准分子灯,其特征在于,所述方管(1)的侧壁上开设有气体注射口(2)。8 . The rectangular excimer lamp of claim 1 , wherein a gas injection port ( 2 ) is provided on the side wall of the square tube ( 1 ). 9.根据权利要求1所述的一种单面发均匀平行光的长方形准分子灯,其特征在于,所述通风管(8)的两端连接有接管(11),所述接管(11)的端部通过管接头(10)连接有连接软管(9)。9. The rectangular excimer lamp that emits uniform parallel light on one side according to claim 1, wherein the two ends of the ventilation pipe (8) are connected with a connecting pipe (11), and the connecting pipe (11) The end of the tube is connected with a connecting hose (9) through a pipe joint (10). 10.根据权利要求1所述的一种单面发均匀平行光的长方形准分子灯,其特征在于,所述方管(1)的侧壁上垂直连接有等距设置的散热片(4)。10 . The rectangular excimer lamp with uniform parallel light emitted from one side according to claim 1 , wherein the side walls of the square tube ( 1 ) are vertically connected with radiating fins ( 4 ) arranged at equal distances. 11 . .
CN201911046162.8A 2019-10-30 2019-10-30 Rectangular excimer lamp emitting uniform parallel light on single surface Pending CN110797254A (en)

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