CN110954980A - Diffractive optical device with protective cover plate and method for producing the same - Google Patents
Diffractive optical device with protective cover plate and method for producing the same Download PDFInfo
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- CN110954980A CN110954980A CN201911410677.1A CN201911410677A CN110954980A CN 110954980 A CN110954980 A CN 110954980A CN 201911410677 A CN201911410677 A CN 201911410677A CN 110954980 A CN110954980 A CN 110954980A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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- Optics & Photonics (AREA)
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Abstract
本发明提供一种光学组件，包括：衍射光学器件，所述衍射光学器件具有包括微纳结构的微纳结构面；保护盖板，所述保护盖板覆盖在所述衍射光学器件的具有微纳结构面的一侧上；以及支撑结构，所述支撑结构围绕所述衍射光学器件的微纳结构设置，其中所述衍射光学器件与所述保护盖板之间通过所述支撑结构来支撑。本发明还提供几种光学组件的制造方法。本发明的优选实施例提出了一种具有保护盖板的衍射光学器件，以及这种衍射光学器件的几种制造方法。所述具有保护盖板的衍射光学器件，保护了具有微纳结构的有效区域，使得衍射光学器件不易出现老化、变形或者损坏的问题，保证了其衍射光束的能力，进而保证了整个光学系统的精确度和效率。
The present invention provides an optical assembly, comprising: a diffractive optical device, the diffractive optical device has a micro-nano structure surface including a micro-nano structure; a protective cover plate, the protective cover plate covers the diffractive optical device with a micro-nano structure on one side of the structure surface; and a support structure, wherein the support structure is arranged around the micro-nano structure of the diffractive optical device, wherein the diffractive optical device and the protective cover plate are supported by the support structure. The present invention also provides several manufacturing methods of optical components. Preferred embodiments of the present invention propose a diffractive optical device with a protective cover, and several methods of manufacturing such a diffractive optical device. The diffractive optical device with the protective cover plate protects the effective area with the micro-nano structure, so that the diffractive optical device is not prone to aging, deformation or damage, and ensures its ability to diffract light beams, thereby ensuring the integrity of the entire optical system. Precision and Efficiency.
Description
Technical Field
The present invention relates generally to the field of diffractive optics, and more particularly to a diffractive optical element having a protective cover plate and a method of making the same.
Background
The diffraction optical Device (DOE) is a micro-nano structure which is based on the diffraction theory of light waves, utilizes computer aided design and semiconductor chip manufacturing process to etch and produce step-shaped or continuous relief on a substrate, and utilizes the micro-nano structure to change the phase of light transmitted by the micro-nano structure. The micro-nano structure on the surface of the diffraction optical device is reasonably designed, so that any light which accords with the designed light intensity distribution can be output when specific light is input. Diffractive optics technology enables many functions and light manipulation not possible with conventional optical systems and has the feature of being reproducible, allowing optical systems to be developed towards lightness, miniaturization and integration.
Diffractive optics are commonly used in applications ranging from biotechnology, material processing to optical metrology and detection. The better the performance of the diffractive optical device, the higher the resolution of the light pattern, the higher the contrast; on the contrary, if the problem of aging, deformation or damage occurs to the diffraction optical device, the ability of the diffraction optical device to diffract light beams is affected, and the accuracy and the efficiency of the whole optical system are further affected. When the ability of the DOE to diffract the beam is reduced, the quality of the light pattern is also reduced to varying degrees, even with a severe zero-order diffracted beam. By zero order diffracted beam is meant that of the light beam directed towards the diffractive optical element, there is a portion of the light beam that is not diffracted and continues through the diffractive optical element into the target space, i.e. the portion of the light beam that directly enters the target space without being diffracted by the diffractive optical element is zero order diffracted beam. The energy of the zero-order diffracted beam is usually higher than that of the high-order diffracted beam by several orders of magnitude, and the energy is not processed properly, so that the problem of human eye safety is possibly induced in some applications.
Therefore, protection of precision diffractive optics is a problem to be solved in the art.
The statements in this background section merely represent techniques known to the public and are not, of course, representative of the prior art.
Disclosure of Invention
In view of at least one of the drawbacks of the prior art, the present invention provides a diffractive optical element having a protective cover plate, and a method of manufacturing the diffractive optical element having the protective cover plate.
The present invention provides an optical assembly comprising:
a diffractive optical device having a micro-nano structured surface including a micro-nano structure;
the protective cover plate covers one side, with the micro-nano structure surface, of the diffraction optical device; and
the supporting structure is arranged around the micro-nano structure of the diffractive optical device, and the diffractive optical device and the protective cover plate are supported through the supporting structure.
According to an aspect of the invention, wherein the support structure is arranged on the protective cover plate or on the diffractive optical element, the diffractive optical element and the protective cover plate are bonded together by the support structure or by glue filled on the outside of the support structure.
According to an aspect of the invention, wherein the height of the support structure is higher than the height of the micro-nano structure of the diffractive optical element.
According to one aspect of the invention, wherein the support structure is one or more layers.
According to one aspect of the invention, wherein the diffractive optic and the protective cover plate are made of glass or PET substrate.
According to an aspect of the invention, wherein the micro-nano structure of the diffractive optical element and the support structure are imprinted by a nano-imprinting technique.
According to an aspect of the invention, the micro-nano structure of the diffractive optical device has a height ranging from 300nm to 10um, the support structure has a height ranging from 5um to 200um and a width ranging from 10um to 500 um.
The present invention also provides a method of manufacturing an optical component, comprising:
preparing at least one diffraction optical device on a substrate, wherein the diffraction optical device is provided with a micro-nano structure surface comprising a micro-nano structure;
providing a protective cover plate, and preparing at least one supporting structure on the protective cover plate; and
aligning and covering the protective cover plate on one side of the diffractive optical device, which is provided with a micro-nano structure surface, so that the support structure is arranged around the micro-nano structure of the diffractive optical device, wherein the diffractive optical device and the protective cover plate are supported through the support structure.
The present invention also provides a method of manufacturing an optical component, comprising:
preparing at least one diffraction optical device with a micro-nano structure surface comprising a micro-nano structure and at least one supporting structure arranged around the micro-nano structure of the diffraction optical device on a substrate;
providing a protective cover plate; and
covering the protective cover plate on one side of the diffractive optical device, which is provided with a micro-nano structure surface, wherein the diffractive optical device and the protective cover plate are supported through the supporting structure.
According to an aspect of the invention, wherein the diffractive optical element and the support structure are prepared by nanoimprint technology.
In accordance with one aspect of the present invention,
the manufacturing method further includes: filling glue into a gap between the diffractive optic and the protective cover plate outside the support structure, thereby bonding the diffractive optic and the protective cover plate together.
In accordance with one aspect of the present invention,
the method further comprises the following steps: when the supporting structure is prepared by the nanoimprint technology, adjusting the curing parameters of the UV glue forming the supporting structure to enable the supporting structure to be shaped but not completely cured;
applying pressure and/or temperature to the diffractive optic and the protective cover plate to fully cure the support structure, thereby bonding the diffractive optic and the protective cover plate together.
According to an aspect of the invention, the manufacturing method further comprises: and cutting the substrate and the protective cover plate to obtain the single-piece diffraction optical device with the protective cover plate protection.
According to an aspect of the invention, the manufacturing method further comprises: bonding the diffractive optic and the protective cover plate together in an evacuated environment.
The preferred embodiment of the present invention provides a diffractive optical device having a protective cover plate, which protects an effective region having a micro-nano structure, and several manufacturing methods of the diffractive optical device. The problems of aging, deformation or damage of the diffraction optical device are not easy to occur, the capability of the diffraction optical device for diffracting light beams is ensured, and the accuracy and the efficiency of the whole optical system are further ensured.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1A schematically illustrates a two-dimensional side view of a diffractive optical element having a protective cover plate in accordance with a preferred embodiment of the present invention;
figure 1B schematically shows a two-dimensional side view of a diffractive optical device having a micro-nano structured surface comprising micro-nano structures according to a preferred embodiment of the present invention;
fig. 2A schematically illustrates a diffractive optical device and a micro-nanostructured surface thereof according to a preferred embodiment of the present invention;
FIG. 2B schematically illustrates a protective cover plate according to a preferred embodiment of the invention, wherein a support structure is provided on the protective cover plate;
FIG. 2C schematically illustrates the product configuration after the protective cover sheet is overlaid on the diffractive optic according to a preferred embodiment of the present invention;
fig. 3A schematically illustrates a diffractive optical device and a micro-nanostructured surface thereof according to a preferred embodiment of the present invention, wherein a support structure is arranged on the diffractive optical device;
FIG. 3B schematically illustrates a protective cover plate according to a preferred embodiment of the present invention;
FIG. 3C schematically illustrates the product configuration after the protective cover sheet is overlaid on the diffractive optic according to a preferred embodiment of the present invention;
FIG. 4 schematically illustrates a method of manufacturing an optical assembly according to a preferred embodiment of the present invention;
FIG. 5 schematically illustrates a method of manufacturing an optical assembly according to a preferred embodiment of the present invention;
FIG. 6 schematically illustrates a glue filling method in a method of manufacturing an optical assembly according to a preferred embodiment of the present invention;
FIG. 7 schematically illustrates a thermal bonding approach in a method of manufacturing an optical assembly according to a preferred embodiment of the present invention;
FIG. 8 schematically illustrates a method of manufacturing an optical assembly according to a preferred embodiment of the present invention;
fig. 9 suitably shows a schematic view of a substrate cut together with a protective cover sheet to give a monolithic diffractive optical device with protection of the protective cover sheet.
100 … diffractive optic with protective cover plate
101 … diffractive optical element having a micro-nano structured surface including micro-nano structures
102 … protective cover plate
103 … support structure
200 … diffractive optic with protective cover plate
201 … diffractive optical element with a micro-nano structured surface comprising micro-nano structures
202 … protective cover plate
203 … support structure
300 … diffractive optic with protective cover plate
301 … diffractive optical element having a micro-nano structured surface including a micro-nano structure
302 … protective cover plate
303 … supporting structure
Detailed Description
In the following, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection, either mechanically, electrically, or in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly above and obliquely above the second feature, or simply meaning that the first feature is at a lesser level than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize applications of other processes and/or uses of other materials.
The embodiments of the present invention will be described in conjunction with the accompanying drawings, and it should be understood that the embodiments described herein are only for the purpose of illustrating and explaining the present invention, and are not intended to limit the present invention.
Fig. 1A, 1B schematically show two-dimensional side views of an optical assembly according to a preferred embodiment of the invention, which is described in detail below with reference to the drawings.
As shown in fig. 1A, the optical assembly 100 includes a diffractive optic 101 and a protective cover plate 102. Wherein the diffractive optical element 101 has a micro-nano structured surface comprising micro-nano structures, such as the upper surface shown in fig. 1B. For the light beam incident on the diffractive optical element 101, the micro-nano structure on the diffractive optical element 101 can change the propagation phase thereof, and perform appropriate modulation, thereby projecting the light field in accordance with the designed light intensity distribution. The protective cover plate 102 covers one side of the diffractive optical device 101, which is provided with a micro-nano structure surface, the protective cover plate and the micro-nano structure surface are supported by a support structure 103, and the support structure 103 is arranged around the micro-nano structure of the diffractive optical device 101. The height of the support structure 103 is higher than the height of the micro-nano structure, so that the protective cover plate 102 is spaced apart from the micro-nano structure by a certain distance. Therefore, according to the invention, the micro-nano structure surface of the diffractive optical device 101 can be effectively protected and prevented from being damaged by arranging the protective cover plate above the micro-nano structure surface of the diffractive optical device 101.
In addition, as will be readily understood by those skilled in the art, the arrangement of the support structure 103 around the micro-nano structure of the diffractive optical element 101 does not necessarily mean that the support structure 103 completely surrounds the micro-nano structure to form a completely enclosed space all around. A completely surrounding embodiment is a preferred embodiment of the present invention, although a partially surrounding embodiment is also possible, and in addition, a support structure may be provided at a plurality of locations between the protective cover 102 and the diffractive optical element 101, as long as the protective cover 102 can be supported on the diffractive optical element 101, and these embodiments and modifications fall within the scope of the present invention.
Fig. 2A, 2B and 2C schematically show an optical assembly 200 according to a preferred embodiment of the invention, wherein a support structure is located on the protective cover plate. The following detailed description refers to the accompanying drawings.
Fig. 2A shows a diffractive optical element 201 with a micro-nano structure in the central region. Fig. 2B shows a protective cover 202, wherein the support structure 203 is arranged on the protective cover 202, for example manufactured on said protective cover 202 at a manufacturing stage. A protective cover plate 202 is aligned over the side of the diffractive optic 201 having the micro-nano structured surface such that the support structure is disposed around the micro-nano structure of the diffractive optic. Fig. 2C shows the optical assembly 200 after the protective cover 202 is placed over the diffractive optical element 201. The micro-nano structure and the supporting structure for protecting the micro-nano structure are respectively arranged on the diffractive optical device and the protective cover plate, so that the protective cover plate needs to be aligned when covering the diffractive optical device. The alignment can be achieved by making alignment marks around the micro-nano structure, for example, as shown in fig. 2A, 2B, and 2C, alignment marks are made near two corners of the micro-nano structure on the diffractive optical device, and when the protective cover plate is covered on the diffractive optical device, the inner wall of the support structure provided on the protective cover plate is aligned with the alignment marks.
The protective cover 202 is supported by the support structure 203 from the diffractive optical element 201 so that the protective cover 202 does not damage the micro-nano structure (phase distribution pattern) on the surface of the diffractive optical element 201. After the protective cover 202 is abutted against the diffractive optical element 201, the diffractive optical element 201 and the protective cover 202 may be bonded together by filling UV glue into the gap therebetween, or by thermal bonding. In the embodiment of bonding the diffractive optical element 201 and the protective cover 202 together by filling the UV glue into the gap therebetween, the support structure is configured to completely surround the micro-nano structure, and since the height of the support structure 203 is higher than that of the micro-nano structure of the diffractive optical element 201, the UV glue flowing during filling the UV glue can be prevented from entering the micro-nano structure region of the diffractive optical element 201 to damage the performance of the diffractive optical element 201. Further according to a preferred embodiment of the invention, in order to prevent glue leakage, a multi-layer (or multi-turn) support structure 203 may be provided to ensure that UV glue does not enter the micro-nano structure area.
The diffractive optics 201 and the protective cover plate 202 may be made of glass or PET substrates. The height of the micro-nano structure of the diffractive optical device 201 is typically, for example, several hundred nanometers to several micrometers, for example, 300nm to 10um, the height of the corresponding support structure 203 may be set to several micrometers to several hundred micrometers, for example, 5um to 200um, and the width of the support structure 203 may be several tens to several hundreds micrometers, for example, 10um to 500 um.
According to an embodiment of the present invention, the micro-nano structure of the diffractive optical element 201 and the support structure 203 can be formed by manufacturing a transfer template and then transferring the transfer template by UV glue, which is not described herein again.
In the embodiments of fig. 2A, 2B and 2C, the support structure 203 is arranged on the protective cover 202, and an embodiment in which a support structure is arranged on the diffractive optical element is described below.
Fig. 3A, 3B and 3C schematically illustrate an optical assembly 300 according to a preferred embodiment of the present invention, which is described in detail below with reference to the accompanying drawings.
Fig. 3A shows a diffractive optical element 301 with a micro-nano structure in a central region and a support structure 303 arranged in a peripheral region around the micro-nano structure; fig. 3B shows the protective cover plate 302 and fig. 3C shows a schematic view of the optical assembly 300 after the protective cover plate 302 is overlaid on the diffractive optical element 301. Features of fig. 2A, 2B and 2C may also be incorporated into the embodiments of fig. 3A, 3B and 3C, and will not be described again here.
In addition, the outline of the support structure shown in fig. 2A, 2B, 2C, 3A, 3B, and 3C is a square shape, but the present invention is not limited thereto, and the outline of the support structure may be any shape such as a circle, an ellipse, and the like as long as it can surround the micro-nano structure. The corner of the inner wall of the support structure shown in the figure is a right angle of 90 degrees, but the present invention is not limited thereto, and may be a circular arc or another corner having a 45-degree angle.
Fig. 4 is a method 400 of manufacturing an optical assembly in accordance with a preferred embodiment of the present invention, comprising the steps of:
s401: at least one diffractive optic is fabricated on a substrate. The substrate is a glass substrate or a PET substrate, for example, and a diffraction optical device is imprinted on the substrate by a nanoimprint technology through UV glue, wherein the diffraction optical device is provided with a micro-nano structure surface comprising a micro-nano structure. Such as diffractive optic 201 shown in fig. 2A.
S402: a protective cover plate is provided, for example made of a glass or PET substrate, on which at least one support structure is prepared, for example by nanoimprinting the protective cover plate with the support structure using UV glue. Such as protective cover 202 shown in fig. 2B.
S403: aligning and covering the protective cover plate on one side of the diffractive optical device, which is provided with a micro-nano structure surface, so that the support structure is arranged around the micro-nano structure of the diffractive optical device, wherein the diffractive optical device and the protective cover plate are supported through the support structure. The resulting optical assembly is, for example, the optical assembly 200 shown in fig. 2C.
Fig. 5 is a method 700 of manufacturing an optical assembly according to a preferred embodiment of the present invention, comprising the steps of:
s701: the method comprises the steps of preparing at least one diffraction optical device with a micro-nano structure surface comprising a micro-nano structure on a substrate and at least one supporting structure arranged around the micro-nano structure of the diffraction optical device, for example, preparing the micro-nano structure of the diffraction optical device in a central area on a glass substrate or a PET substrate in a template preparation mode, for example, transferring by using UV glue through a nano-imprinting technology, and preparing the supporting structure in a peripheral area of the micro-nano structure of the diffraction optical device, so that the micro-nano structure and the supporting structure of the diffraction optical device are prepared on the same substrate at one time. The diffractive optical device is formed as shown in fig. 3A.
S702: a protective cover sheet is provided, for example using a flat glass sheet (or PET sheet), such as the protective cover sheet shown in fig. 3B.
S703: covering the protective cover plate on one side of the diffractive optical device, which is provided with a micro-nano structure surface, wherein the diffractive optical device and the protective cover plate are supported through the supporting structure. The resulting optical assembly is, for example, the optical assembly 300 shown in fig. 3C.
By the manufacturing method 700, the secondary transfer can be changed into the primary transfer, and the protective cover plate, such as a pure glass structure, does not need to be aligned when covering the diffractive optical element, so that no residual glue layer affects the optical path and the uniformity in the chip.
According to a preferred embodiment of the present invention, after the protective cover plate is covered on the side of the diffractive optical element having the micro-nano structure surface, glue may be injected between the two, so as to bond the two together. Fig. 6 shows a preferred embodiment of the invention in which the optical assembly 200/300 is erected and UV glue is filled into the gap between the diffractive optic and the protective cover on the outside of the support structure, using gravity and capillary action to fill all voids. Blocking UV glue outside the effective micro-nano structure area through a higher supporting structure around the protective cover plate, and bonding the protective cover plate on the diffraction optical device through the UV glue on the periphery of the supporting structure.
Fig. 7 is a heat bonding manner of a preferred embodiment of the present invention, which can be applied to the methods shown in fig. 4 and 5. When the support structure 203/303 is prepared by using the UV glue through the nanoimprint technology, the curing parameters of the UV glue forming the support structure are adjusted to make the support structure be shaped but not completely cured, for example, the ultraviolet light irradiation time is properly shortened, the oven baking time is shortened, the baking temperature is reduced, or no baking is performed after the ultraviolet light irradiation. After the protective cover plate is placed over the diffractive optical element, the diffractive optical element and the protective cover plate are heated and pressed 1 min to 3 min at a pressure and/or temperature of, for example, 140 ℃ to 190 ℃ and 3bar to 8bar to fully cure the support structure, thereby bonding the diffractive optical element and the protective cover plate together.
In addition, the glue filling method and the thermal bonding method can be operated in a vacuum environment so as to bond the diffractive optical element and the protective cover plate together.
Fig. 8 is a manufacturing method of a preferred embodiment of the present invention, wherein when manufacturing a diffractive optical device, a plurality of diffractive optical devices having a micro-nano structure surface including a micro-nano structure are manufactured on a substrate at one time, and for each diffractive optical element, at least one supporting structure disposed around the micro-nano structure of the diffractive optical device is provided thereon. The protective cover sheet is, for example, a glass substrate or a PET substrate, having an area sufficient to cover the substrate of the diffractive optic, and to cover both together to form the array of optical components 300 of the present invention. The array of fabricated diffractive optics and protective cover plate can then be diced, as shown in fig. 9, to yield a monolithic diffractive optic with protective cover plate protection.
In fig. 8, the support structure is located on the diffractive optical device, and those skilled in the art can easily understand that the support structure may also be located on the protective cover plate, which is not described herein again.
The preferred embodiment of the present invention provides a diffractive optical device having a protective cover plate, which protects an effective region having a micro-nano structure, and several manufacturing methods of the diffractive optical device. The problems of aging, deformation or damage of the diffraction optical device are not easy to occur, the capability of the diffraction optical device for diffracting light beams is ensured, and the accuracy and the efficiency of the whole optical system are further ensured.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (14)
1. An optical assembly, comprising:
a diffractive optical device having a micro-nano structured surface including a micro-nano structure;
the protective cover plate covers one side, with the micro-nano structure surface, of the diffraction optical device; and
the supporting structure is arranged around the micro-nano structure of the diffractive optical device, and the diffractive optical device and the protective cover plate are supported through the supporting structure.
2. The optical assembly of claim 1, wherein the support structure is disposed on the protective cover plate, or on the diffractive optical element, the diffractive optical element and the protective cover plate being bonded together by the support structure, or by a glue filled on the outside of the support structure.
3. The optical assembly according to claim 1 or 2, wherein the height of the support structure is higher than the height of the micro-nano structure of the diffractive optical device.
4. The optical assembly of claim 1 or 2, wherein the support structure is one or more layers.
5. The optical assembly of claim 1 or 2, wherein the diffractive optic and the protective cover plate are made of glass or PET substrate.
6. Optical assembly according to claim 1 or 2, wherein the micro-nano-structures of the diffractive optical device and the support structure are embossed by a nano-imprint technique.
7. The optical assembly of claim 1 or 2, wherein the micro-nano structure of the diffractive optical device has a height in the range of 300nm to 10um, the support structure has a height in the range of 5um to 200um and a width in the range of 10um to 500 um.
8. A method of manufacturing an optical assembly comprising:
preparing at least one diffraction optical device on a substrate, wherein the diffraction optical device is provided with a micro-nano structure surface comprising a micro-nano structure;
providing a protective cover plate, and preparing at least one supporting structure on the protective cover plate; and
aligning and covering the protective cover plate on one side of the diffractive optical device, which is provided with a micro-nano structure surface, so that the support structure is arranged around the micro-nano structure of the diffractive optical device, wherein the diffractive optical device and the protective cover plate are supported through the support structure.
9. A method of manufacturing an optical assembly comprising:
preparing at least one diffraction optical device with a micro-nano structure surface comprising a micro-nano structure and at least one supporting structure arranged around the micro-nano structure of the diffraction optical device on a substrate;
providing a protective cover plate; and
covering the protective cover plate on one side of the diffractive optical device, which is provided with a micro-nano structure surface, wherein the diffractive optical device and the protective cover plate are supported through the supporting structure.
10. The manufacturing method according to claim 8 or 9, wherein the diffractive optical element and the support structure are prepared by nanoimprint technology.
11. The manufacturing method of claim 10, further comprising: filling glue into a gap between the diffractive optic and the protective cover plate outside the support structure, thereby bonding the diffractive optic and the protective cover plate together.
12. The manufacturing method of claim 10, further comprising:
when the supporting structure is prepared by the nanoimprint technology, adjusting the curing parameters of the UV glue forming the supporting structure to enable the supporting structure to be shaped but not completely cured;
applying pressure and/or temperature to the diffractive optic and the protective cover plate to fully cure the support structure, thereby bonding the diffractive optic and the protective cover plate together.
13. The manufacturing method according to claim 11 or 12, further comprising: and cutting the substrate and the protective cover plate to obtain the single-piece diffraction optical device with the protective cover plate protection.
14. The manufacturing method according to claim 11 or 12, further comprising: bonding the diffractive optic and the protective cover plate together in an evacuated environment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911410677.1A CN110954980A (en) | 2019-12-31 | 2019-12-31 | Diffractive optical device with protective cover plate and method for producing the same |
Applications Claiming Priority (1)
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